CN111113201A - Floating pressure clamping device and method for optical element quick polishing - Google Patents

Abstract

The invention provides a floating pressurizing clamping device for quickly polishing an optical element, which can improve the removal efficiency of a polishing material and obtain higher surface shape precision. The floating pressurizing and clamping device is used for quickly polishing the optical element, the upper end of the coupler is connected with a workpiece shaft of a polishing machine tool, and the lower end of the coupler is connected with the connecting plate; the connecting plate is provided with a plurality of through holes, a plurality of connecting bolts penetrate through the through holes respectively to be connected with the weight blocks arranged below the connecting plate, a gap is kept between the lower surface of the connecting plate and the weight blocks, a plurality of clamping rods are symmetrically arranged around the connecting plate, a plurality of workpiece stop blocks are connected to the lower ends of the clamping rods, and the clamping size of the optical element is formed among the plurality of workpiece stop blocks. According to the invention, the floating pressurizing clamping device is adopted on the optical element plane polishing machine tool, so that the removal efficiency of the optical element polishing material is improved, high element surface shape precision can be obtained, and the rapid high-precision polishing of the plane optical element is realized.

Description

Floating pressure clamping device and method for optical element quick polishing

Technical Field

The invention belongs to the field of optical processing, and particularly relates to a floating pressurizing clamping device and a method for quickly polishing an optical element.

Background

In the processing process of the large-caliber planar optical element, the planar rapid polishing can rapidly remove the grinding subsurface defect of the element and the surface precision of the convergent element, and the processing efficiency and precision result of the planar rapid polishing are very important for improving the manufacturing efficiency of the whole processing flow. The processing principle of plane rapid polishing is as follows: the optical element is tightly attached to the surface of a large-size polishing disk under the action of pressure applied by the polishing head on the back surface of the optical element, and actively rotates under the clamping driving of the polishing head, polishing liquid consisting of micron/submicron abrasive particles and chemical solution is added between the polishing disk and the optical element, and the optical element generates surface material removal under the combined action of mechanical friction of the polishing disk/polishing particles and chemical corrosion of the polishing liquid. In the plane rapid polishing process, the material removal efficiency of the element is positively correlated with the polishing pressure, and the surface shape precision of the element is closely correlated with the pressure distribution uniformity of the polishing interface. Because the polishing pressure between the workpiece and the polishing disk mainly comes from the clamping polishing head of the machine tool, the reasonably designed element clamping polishing head can improve the distribution uniformity of the polishing pressure while improving the loading polishing pressure, and is vital to the improvement of the polishing efficiency and the element polishing precision. In order to increase the adhesion between a workpiece and a polishing disk, most full-caliber single-side polishing machine tools (such as single-shaft machines and chemical mechanical polishing machines) usually adopt polishing heads connected by universal joints or ball heads, but the polishing heads can generate overturning moment on the workpiece in the motion process, so that the pressure distribution of a contact surface is in asymmetric nonlinear distribution, the edge of the workpiece is seriously collapsed, and the surface shape precision of an element is difficult to improve; the ring polishing machine tool adopting the asphalt polishing disc overcomes the overturning moment by adopting the separator to drive the workpiece, but cannot realize active loading of large-load polishing pressure at the same time, and the removal efficiency of element materials is lower.

Disclosure of Invention

The invention aims to provide a floating pressure clamping device for quickly polishing an optical element, which can improve the removal efficiency of a polishing material and obtain higher surface shape precision.

The technical problem to be solved by the invention is as follows: the floating pressurizing clamping device for the rapid polishing of the optical element comprises a coupler, a connecting plate, a plurality of connecting bolts, a plurality of clamping rods, a weight block and a plurality of workpiece stop blocks, wherein the upper end of the coupler is connected with a workpiece shaft of a polishing machine tool, and the lower end of the coupler is connected with the connecting plate; the connecting plate is provided with a plurality of through holes, the connecting bolts penetrate through the through holes respectively to be connected with the weight blocks arranged below the connecting plate, a gap is kept between the lower surface of the connecting plate and the weight blocks, the clamping rods are symmetrically arranged around the connecting plate, the workpiece stop blocks are connected to the lower ends of the clamping rods, and the clamping size of the optical element is formed among the workpiece stop blocks.

Furthermore, the upper part of the connecting bolt is provided with a section of smooth conical surface.

Further, the bottom of the weight block is provided with a spacer. The spacer is adhered to the bottom of the weight block through double-sided adhesive.

Furthermore, the lower end of the coupler is connected with the connecting plate through a locking screw, and the workpiece stop blocks are fixedly connected to the lower end of the clamping rod through the locking screw.

Furthermore, a plurality of the weight blocks are arranged in an overlapping mode, the connecting bolt is fixed in the lowest weight block through threads at the lower end portion of the connecting bolt, and the spacer is arranged at the bottom of the lowest weight block.

Furthermore, 4 through holes are symmetrically formed in the connecting plate, and 4 connecting bolts penetrate through the through holes to be connected with the weight blocks respectively.

Furthermore, the clamping rod symmetry sets up at four angles of connecting plate and sets up 8, 2 a set of, totally 4 groups, the clamping rod upper end is connected with the connecting plate through locking screw, the clamping rod lower extreme is connected with the work piece dog through locking screw, and forms optical element's clamping size between 8 work piece dogs.

Furthermore, the workpiece stop block is made of a plastic material with a smooth surface; the coupling, the connecting plate, the connecting bolt, the clamping rod and the weight are made of metal materials.

A method of operating a floating pressurized clamping device for rapid polishing of optical components, the method comprising the steps of: firstly, connecting a coupler of a floating pressure clamping device with a workpiece shaft of a polishing machine tool, and suspending the coupler above a polishing disc; then, the optical element is placed on the polishing disk and is positioned below the floating pressurizing clamping device, and the side edge of the optical element is aligned with the side edge of the weight block; then, the height of the floating pressure clamping device is reduced under the driving of a workpiece shaft of the polishing machine tool until the distance between the workpiece stop block and the upper surface of the polishing disc is several millimeters; then, the polishing machine is started to operate, the optical element is subjected to high-pressure floating polishing, and the polished optical element and the weight block can freely float up and down in the polishing process; after polishing, the whole floating pressure clamping device is lifted under the driving of the workpiece shaft until the weight block leaves the upper surface of the optical element.

The invention has the beneficial effects that: by adopting the floating pressurizing clamping device on the optical element plane polishing machine tool, the removal efficiency of the optical element polishing material is improved, meanwhile, higher element surface shape precision can be obtained, and the rapid high-precision polishing of the plane optical element is realized.

Drawings

FIG. 1 is a schematic diagram of the structure of the apparatus of the present invention.

Fig. 2 is a front view of the attachment bolt in the apparatus of the present invention.

Fig. 3 is a perspective view of fig. 2.

Detailed Description

As shown in fig. 1-3, the floating pressurizing clamping device for optical element rapid polishing of the present invention comprises a coupling 1, acoupling plate 2, a plurality ofcoupling bolts 3, a plurality ofclamping rods 4, aweight block 6 and a plurality ofworkpiece stoppers 5, wherein the upper end of the coupling 1 is connected with a workpiece shaft of a polishing machine, and the lower end of the coupling 1 is connected with thecoupling plate 2 through alocking screw 8; the connectingplate 2 is provided with a plurality of through holes, theweight block 6 is arranged below the connectingplate 2, a plurality of connectingbolts 3 respectively pass through the through holes to be connected with theweight block 6, and meanwhile, a gap is kept between the lower surface of the connectingplate 2 and theweight block 6, so that the polishedoptical element 9 and theweight block 6 can freely float up and down in the polishing process; the plurality ofclamping rods 4 are symmetrically arranged around the connectingplate 2, the plurality ofworkpiece stop blocks 5 are fixedly connected to the lower ends of theclamping rods 4 throughlocking screws 8, the clamping size of theoptical element 9 is formed between the plurality ofworkpiece stop blocks 5, and the clamping size is slightly larger than the external size of theoptical element 9.

The upper part of the connectingbolt 3 is provided with a section of smoothconical surface 32 which can ensure that when theweight 6 presses on the upper surface of theoptical element 9, only downward pressure is applied to the upper surface of theoptical element 9 without generating other constraint force; theconical surface 32 can automatically guide theweight 6 when theweight 6 is lifted from the upper surface of theoptical element 9.

4 through holes can be symmetrically arranged on the connectingplate 2, and 4 connectingbolts 3 respectively penetrate through the through holes to be connected with theweight blocks 6, as shown in fig. 1; theclamping rods 4 can be symmetrically arranged at four corners of the connectingplate 2 and are arranged 8, 2 are in a group, and 4 groups are arranged, the upper ends of theclamping rods 4 are connected with the connectingplate 2 through thelocking screws 8, the lower ends of theclamping rods 4 are fixedly connected with theworkpiece stop blocks 5 through thelocking screws 8, and the clamping size of theoptical element 9 is formed between the 8workpiece stop blocks 5, as shown in fig. 1.

If necessary, a plurality ofweight blocks 6 may be arranged one above another, and as shown in fig. 1, thecoupling bolt 3 is fixed to the lowermost one of theweight blocks 6 by ascrew thread 31 at its lower end portion. In order to improve the uniformity of the contact pressure between theweight 6 and theoptical element 9 and protect the upper surface of theoptical element 9, the invention is provided with thespacer 7 at the bottom of theweight 6, the material of thespacer 7 is soft material, such as rubber, silica gel, foam, etc., the thickness is several millimeters, such as 5mm, thespacer 7 can be adhered to the bottom of theweight 6 by double-sided adhesive, if the number of theweight 6 is multiple, thespacer 7 is arranged at the bottom of thelowest weight 6, as shown in fig. 1.

The external dimensions (excluding the thickness) of theweight 6 are the same as or slightly smaller than theoptical element 9 to be polished. Theworkpiece stop 5 is made of plastic material, such as nylon, polytetrafluoroethylene, etc., and has a relatively smooth surface. The coupling 1, the connectingplate 2, the connectingbolt 3, theclamping rod 4, theweight 6 and thelocking screw 8 are made of metal materials, such as carbon steel, stainless steel, duralumin and the like, wherein the coupling 1, the connectingplate 2 and theclamping rod 4 are preferably made of duralumin, and the connectingbolt 3, theweight 6 and thelocking screw 8 are preferably made of stainless steel.

When the floating pressurizing clamping device works, the coupling 1 of the floating pressurizing clamping device is connected with a workpiece shaft of a polishing machine tool and is suspended above apolishing disc 10; placing theoptical element 9 on thepolishing disk 10 and under the device of the invention with the side of theoptical element 9 aligned with the side of theweight 6; then the height of the floating pressure clamping device is reduced under the driving of a workpiece shaft of a polishing machine tool, and after thespacer 7 at the bottom of theweight 6 is contacted with the upper surface of theoptical element 9, the gravity of theweight 6 is completely acted on theoptical element 9; then further reducing the height of the whole floating pressure clamping device until theworkpiece stop block 5 approaches the upper surface of thepolishing disk 10, so that the distance between theworkpiece stop block 5 and the upper surface of thepolishing disk 10 is several millimeters, which can be 5 mm; then, starting the polishing machine to operate, and carrying out high-pressure floating polishing on theoptical element 9; after polishing, the whole floating pressure-applying holding device is lifted by the workpiece shaft until theweight 6 is away from the upper surface of theoptical element 9.

In theoptical element 9, the polishing pressure is provided by theweight 6, thecoupling bolt 3 and thespacer 7, except the gravity of theoptical element 9.

Claims (10)

1. A floating pressurization clamping device for optical element rapid polishing is characterized in that: the polishing machine tool comprises a coupler (1), a connecting plate (2), a plurality of connecting bolts (3), a plurality of clamping rods (4), a weight block (6) and a plurality of workpiece stop blocks (5), wherein the upper end of the coupler (1) is connected with a workpiece shaft of a polishing machine tool, and the lower end of the coupler (1) is connected with the connecting plate (2); the connecting plate is characterized in that a plurality of through holes are formed in the connecting plate (2), a plurality of connecting bolts (3) penetrate through the through holes respectively to be connected with the weight blocks (6) arranged below the connecting plate (2), a gap is kept between the lower surface of the connecting plate (2) and the weight blocks (6), a plurality of clamping rods (4) are symmetrically arranged around the connecting plate (2), a plurality of workpiece stop blocks (5) are connected to the lower ends of the clamping rods (4), and the clamping size of the optical element (9) is formed among the workpiece stop blocks (5).

2. A floating press-on holding device for use in the rapid polishing of optical elements as claimed in claim 1, wherein: the upper part of the connecting bolt (3) is provided with a section of smooth conical surface (32).

3. A floating press-on holding device for use in the rapid polishing of optical elements as claimed in claim 1, wherein: and a spacer (7) is arranged at the bottom of the weight block (6).

4. A floating press-on holding device for use in the rapid polishing of optical elements as claimed in claim 3, wherein: the spacer (7) is adhered to the bottom of the weight block (6) through double-sided adhesive.

5. A floating press-on holding device for use in the rapid polishing of optical elements as claimed in claim 1, wherein: the lower end of the coupler (1) is connected with the connecting plate (2) through a locking screw (8), and the workpiece stop blocks (5) are fixedly connected to the lower end of the clamping rod (4) through the locking screw (8).

6. A floating press-on holding device for use in the rapid polishing of optical elements as claimed in claim 1, wherein: the plurality of the weight blocks (6) are overlapped, the connecting bolt (3) is fixed in the lowest weight block (6) through threads (31) at the lower end part of the connecting bolt, and the spacer (7) is arranged at the bottom of the lowest weight block (6).

7. A floating press-on holding device for use in the rapid polishing of optical elements as claimed in claim 1, wherein: 4 through holes are symmetrically formed in the connecting plate (2), and 4 connecting bolts (3) penetrate through the through holes respectively to be connected with the weight blocks (6).

8. A floating press-on holding device for use in the rapid polishing of optical elements as claimed in claim 1, wherein: the clamping rod (4) is symmetrically arranged at four corners of the connecting plate (2) and is provided with 8 clamping rods, 2 clamping rods are in a group and are totally 4 groups, the upper end of each clamping rod (4) is connected with the connecting plate (2) through a locking screw (8), the lower end of each clamping rod (4) is connected with the workpiece stop blocks (5) through the locking screws (8), and the clamping size of the optical element (9) is formed between the 8 workpiece stop blocks (5).

9. A floating press-on holding device for use in the rapid polishing of optical elements as claimed in claim 1, wherein: the workpiece stop block (5) is made of a plastic material with a smooth surface; the coupler (1), the connecting plate (2), the connecting bolt (3), the clamping rod (4) and the weight block (6) are made of metal materials.

10. A method of operating a floating press and clamp apparatus for the rapid polishing of optical components, the method comprising the steps of: firstly, connecting a coupler (1) of a floating pressure clamping device with a workpiece shaft of a polishing machine tool, and suspending the coupler above a polishing disc (10); then, the optical element (9) is placed on the polishing disk (10) and is positioned below the floating pressurizing clamping device, and the side edge of the optical element (9) is aligned with the side edge of the weight block (6); then, the height of the floating pressure clamping device is reduced under the driving of a workpiece shaft of the polishing machine tool until the distance between the workpiece stop block (5) and the upper surface of the polishing disc (10) is several millimeters; then, the polishing machine is started to operate, the optical element (9) is subjected to high-pressure floating polishing, and the polished optical element (9) and the weight block (6) can freely float up and down in the polishing process; after polishing, the whole floating pressure clamping device is lifted up under the drive of the workpiece shaft until the weight block (6) leaves the upper surface of the optical element (9).

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