CN110857870A - Composite sensor, method for making composite sensor, and composite sensor system - Google Patents

Abstract

Translated fromChinese

本发明实施例公开了一种复合传感器、复合传感器的制作方法及复合传感器系统。该复合传感器包括：压电驻极体传感器、绝缘层和生理电信号采集电极；所述绝缘层设置于所述压电驻极体传感器和所述生理电信号采集电极之间。本发明实施例提供的复合传感器，通过在压电驻极体传感器上设置生理电信号采集电极，使得传感器可以同时进行压力和生理电信号的采集，从而减小传感器的体积，提高空间利用率。

Embodiments of the invention disclose a composite sensor, a method for making the composite sensor, and a composite sensor system. The composite sensor includes: a piezoelectric electret sensor, an insulating layer and a physiological electrical signal collecting electrode; the insulating layer is arranged between the piezoelectric electret sensor and the physiological electrical signal collecting electrode. In the composite sensor provided by the embodiment of the present invention, by arranging a physiological electrical signal collection electrode on the piezoelectric electret sensor, the sensor can collect pressure and physiological electrical signals at the same time, thereby reducing the volume of the sensor and improving the space utilization rate.

Description

Translated fromChinese

复合传感器、复合传感器的制作方法及复合传感器系统Composite sensor, method for making composite sensor, and composite sensor system

技术领域technical field

本发明实施例涉及传感器技术领域，尤其涉及一种复合传感器、复合传感器的制作方法及复合传感器系统。Embodiments of the present invention relate to the technical field of sensors, and in particular, to a composite sensor, a method for fabricating a composite sensor, and a composite sensor system.

背景技术Background technique

生理电信号传感器和机械信号传感器广泛地用在康复辅助设备中，如智能假肢，其关键技术之一是采用生理点信号和机械信号提取人体运动意图。高质量、多元信号的获取能够提高人体运动意图的识别率、提高系统的控制性能，而传感器的性能、体积和集成度直接关系到这些设备的性能。目前，生理电信号和机械信号的采集主要是通过在不同位置放置不同的传感器进行采集，当同时采用多种传感器时，不仅采集系统复杂、空间利用率有限，而且无法对同一区域的信号进行同步采集。Physiological electrical signal sensors and mechanical signal sensors are widely used in rehabilitation aids, such as intelligent prostheses. One of the key technologies is to use physiological point signals and mechanical signals to extract human motion intentions. The acquisition of high-quality, multi-component signals can improve the recognition rate of human motion intentions and improve the control performance of the system, and the performance, volume and integration of sensors are directly related to the performance of these devices. At present, the acquisition of physiological electrical signals and mechanical signals is mainly carried out by placing different sensors at different positions. When multiple sensors are used at the same time, not only the acquisition system is complex, the space utilization is limited, but also the signals in the same area cannot be synchronized. collection.

复合传感器是在一个传感器中集成了两个及以上的能检测不同物理量的传感器单元，不仅能减小传感器的体积、重量实现高密度采集，而且能同时测量分析同一区域的力和电信号的关系，这对一些智能设备和医疗康复辅具设备具有十分重要的意。A composite sensor is a sensor that integrates two or more sensor units that can detect different physical quantities. It can not only reduce the volume and weight of the sensor to achieve high-density acquisition, but also measure and analyze the relationship between the force and electrical signals in the same area at the same time. , which is of great significance to some smart devices and medical rehabilitation aids.

发明内容SUMMARY OF THE INVENTION

本发明实施例提供一种复合传感器、复合传感器的制作方法及复合传感器系统，可以实现同时对同一区域不同物理量的测量，减小传感器的体积，提高空间利用率。Embodiments of the present invention provide a composite sensor, a method for making a composite sensor, and a composite sensor system, which can simultaneously measure different physical quantities in the same area, reduce the volume of the sensor, and improve space utilization.

第一方面，本发明实施例提供了一种复合传感器，包括：压电驻极体传感器、绝缘层和生理电信号采集电极；In a first aspect, an embodiment of the present invention provides a composite sensor, including: a piezoelectric electret sensor, an insulating layer, and a physiological electrical signal acquisition electrode;

所述绝缘层设置于所述压电驻极体传感器和所述生理电信号采集电极之间。The insulating layer is arranged between the piezoelectric electret sensor and the physiological electrical signal acquisition electrode.

进一步地，所述压电驻极体传感器上设置有两个导线接口；所述生理电信号采集电极包括两个电极接口。Further, the piezoelectric electret sensor is provided with two wire interfaces; the physiological electrical signal acquisition electrode includes two electrode interfaces.

第二方面，本发明实施例还提供了一种复合传感器的制作方法，该方法包括：In a second aspect, an embodiment of the present invention also provides a method for fabricating a composite sensor, the method comprising:

在压电驻极体传感器上以第一设定方式形成一绝缘层；forming an insulating layer on the piezoelectric electret sensor in a first setting manner;

在所述绝缘层上以第二设定方式附着一金属层；A metal layer is attached on the insulating layer in a second setting manner;

利用设定电极模板在所述金属层上生成生理电信号采集电极。Physiological electrical signal acquisition electrodes are generated on the metal layer by using a set electrode template.

进一步地，所述第一设定方式包括蒸镀或者层压。Further, the first setting manner includes evaporation or lamination.

进一步地，所述第二设定方式包括蒸镀或者磁控溅射。Further, the second setting mode includes evaporation or magnetron sputtering.

进一步地，在压电驻极体传感器上以第一设定方式形成一绝缘层之前，还包括：Further, before forming an insulating layer on the piezoelectric electret sensor in a first setting manner, the method further includes:

对原始压电材料薄膜进行气体扩散膨胀处理；Perform gas diffusion expansion treatment on the original piezoelectric material film;

在室温下使用设定电晕尖端电压充电设定时长，获得压电驻极体薄膜；The piezoelectric electret film is obtained by charging the set time with the set corona tip voltage at room temperature;

利用真空蒸发的方式在所述压电驻极体薄膜的两个表面上生成两个金属电极，获得金属化薄膜；Two metal electrodes are formed on the two surfaces of the piezoelectric electret film by means of vacuum evaporation to obtain a metallized film;

将所述金属化薄膜对称折叠，且内表面通过导电胶带粘合在一起；The metallized film is symmetrically folded, and the inner surfaces are bonded together by conductive tape;

将金属端子分别连接到两个金属电极上，获得压电驻极体传感器。The metal terminals were respectively connected to the two metal electrodes to obtain a piezoelectric electret sensor.

第三方面，本发明实施例还提供了一种复合传感器系统，该系统包括：本发明实施例所述的复合传感器、信号采集电路、主控电路、无线传输模块和数据处理模块；In a third aspect, an embodiment of the present invention further provides a composite sensor system, which includes: the composite sensor described in the embodiment of the present invention, a signal acquisition circuit, a main control circuit, a wireless transmission module, and a data processing module;

所述复合传感器的输出端与所述信号采集电路的输入端相连，所述信号采集电路的输出端和所述主控电路的输入端相连，所述主控电路的输出端和所述无线传输模块的输入端相连；The output end of the composite sensor is connected to the input end of the signal acquisition circuit, the output end of the signal acquisition circuit is connected to the input end of the main control circuit, and the output end of the main control circuit is connected to the wireless transmission The input end of the module is connected;

所述主控电路的控制端分别与所述信号采集电路的受控端和所述无线传输模块的受控端相连；所述主控电路控制所述信号采集电路采集所述复合传感器感应到的复合传感信号；所述主控电路控制所述无线传输模块将所述复合传感信号发送至所述数据处理模块；所述数据处理模块对接收到的复合传感信号进行处理。The control end of the main control circuit is respectively connected with the controlled end of the signal acquisition circuit and the controlled end of the wireless transmission module; the main control circuit controls the signal acquisition circuit to collect the signals sensed by the composite sensor. composite sensing signal; the main control circuit controls the wireless transmission module to send the composite sensing signal to the data processing module; the data processing module processes the received composite sensing signal.

进一步地，所述复合传感器包括压电驻极体传感器和生理电信号采集电极；所述信号采集电路包括压电信号采集电路和生理电信号采集电路；Further, the composite sensor includes a piezoelectric electret sensor and a physiological electrical signal acquisition electrode; the signal acquisition circuit includes a piezoelectric signal acquisition circuit and a physiological electrical signal acquisition circuit;

所述压电驻极体传感器的输出端与所述压电信号采集电路的输入端相连，所述生理电信号采集电极的输出端与所述生理电信号采集电路的输入端相连。The output end of the piezoelectric electret sensor is connected with the input end of the piezoelectric signal collecting circuit, and the output end of the physiological electrical signal collecting electrode is connected with the input end of the physiological electrical signal collecting circuit.

进一步地，所述信号采集电路还包括压电信号处理电路和生理电信号处理电路；Further, the signal acquisition circuit further includes a piezoelectric signal processing circuit and a physiological electrical signal processing circuit;

所述压电信号处理电路设置于所述压电驻极体传感器和所述压电信号采集电路之间，所述压电信号处理电路的输入端与所述压电驻极体传感器的输出端相连；所述压电信号处理电路的输出端与所述压电信号采集电路的输入端相连；The piezoelectric signal processing circuit is arranged between the piezoelectric electret sensor and the piezoelectric signal acquisition circuit, the input end of the piezoelectric signal processing circuit and the output end of the piezoelectric electret sensor connected; the output end of the piezoelectric signal processing circuit is connected with the input end of the piezoelectric signal acquisition circuit;

所述生理电信号处理电路设置于所述生理电信号采集电极和所述生理电信号采集电路之间，所述生理电信号处理电路的输入端与所述生理电信号采集电极的输出端相连，所述生理电信号处理电路的输出端与所述生理电信号采集电路的输入端相连。The physiological electrical signal processing circuit is arranged between the physiological electrical signal acquisition electrode and the physiological electrical signal acquisition circuit, and the input end of the physiological electrical signal processing circuit is connected to the output end of the physiological electrical signal acquisition electrode, The output end of the physiological electrical signal processing circuit is connected with the input end of the physiological electrical signal acquisition circuit.

进一步地，所述压电信号处理电路包括压电信号放大、滤波及模数转换电路；所述生理电信号处理电路包括生物点信号放大、滤波及模数转换电路。Further, the piezoelectric signal processing circuit includes a piezoelectric signal amplification, filtering and analog-to-digital conversion circuit; the physiological electrical signal processing circuit includes a biological point signal amplification, filtering and analog-to-digital conversion circuit.

本发明实施例提供的复合传感器，包括：压电驻极体传感器、绝缘层和生理电信号采集电极，绝缘层设置于压电驻极体传感器和生理电信号采集电极之间。本发明实施例提供的复合传感器，通过在压电驻极体传感器上设置生理电信号采集电极，使得传感器可以同时进行压力和生理电信号的采集，从而减小传感器的体积，提高空间利用率。The composite sensor provided by the embodiment of the present invention includes: a piezoelectric electret sensor, an insulating layer and a physiological electrical signal collecting electrode, and the insulating layer is arranged between the piezoelectric electret sensor and the physiological electrical signal collecting electrode. In the composite sensor provided by the embodiment of the present invention, by arranging a physiological electrical signal collection electrode on the piezoelectric electret sensor, the sensor can collect pressure and physiological electrical signals at the same time, thereby reducing the volume of the sensor and improving the space utilization rate.

附图说明Description of drawings

图1是本发明实施例一中的一种复合传感器的结构示意图；1 is a schematic structural diagram of a composite sensor in Embodiment 1 of the present invention;

图2是本发明实施例二中的一种复合传感器的制作方法；Fig. 2 is a manufacturing method of a composite sensor in the second embodiment of the present invention;

图3是本发明实施例三中的一种复合传感器系统的结构示意图；3 is a schematic structural diagram of a composite sensor system in Embodiment 3 of the present invention;

图4是本发明实施例三中的另一种复合传感器系统的结构示意图。FIG. 4 is a schematic structural diagram of another composite sensor system in Embodiment 3 of the present invention.

具体实施方式Detailed ways

下面结合附图和实施例对本发明作进一步的详细说明。可以理解的是，此处所描述的具体实施例仅仅用于解释本发明，而非对本发明的限定。另外还需要说明的是，为了便于描述，附图中仅示出了与本发明相关的部分而非全部结构。The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention, but not to limit the present invention. In addition, it should be noted that, for the convenience of description, the drawings only show some but not all structures related to the present invention.

实施例一Example 1

图1为本发明实施例一提供的一种复合传感器的结构示意图，如图1所述，该复合传感器包括：压电驻极体传感器110、绝缘层120和生理电信号采集电极130。绝缘层120设置于压电驻极体传感器110和生理电信号采集电极130之间。FIG. 1 is a schematic structural diagram of a composite sensor provided in Embodiment 1 of the present invention. As shown in FIG. 1 , the composite sensor includes: apiezoelectric electret sensor 110 , aninsulating layer 120 and a physiological electricalsignal collection electrode 130 . Theinsulating layer 120 is disposed between thepiezoelectric electret sensor 110 and the physiological electricalsignal collecting electrode 130 .

其中，压电驻极体也可以称为铁电驻极体，是一种基于聚合物空间电荷驻极体的新型压电材料，具体类似磁滞的极化现象。压电驻极体的压电特性源于内部存储的永久电荷与异质细胞结果的组合。在充电或者极化后，两个极性的电荷分别存储在内腔的上部和下部气体-聚合物界面上，形成准永久性宏观偶极子。当压电驻极体在法线方向收到压力，就会因为内腔的可压缩性，导致宏观偶极子内距减小。此时，电极上的补偿电荷也减少，从而产生电荷信号。绝缘层120可以是一层绝缘薄膜，起到将生物电采集电极与压电驻极体传感器隔绝开来的作用，使两者在进行信号采集时互不干扰。生理电信号可以包括心电、脑电、肌电和胃电等。生理电信号采集电极130可以是一个导电电极。Among them, piezoelectric electret can also be called ferroelectric electret, which is a new type of piezoelectric material based on polymer space charge electret, which is similar to the polarization phenomenon of magnetic hysteresis. The piezoelectric properties of piezoelectric electrets arise from a combination of internally stored permanent charges and heterogeneous cellular consequences. After charging or polarization, charges of two polarities are stored on the upper and lower gas-polymer interfaces of the cavity, respectively, forming quasi-permanent macroscopic dipoles. When the piezoelectric electret receives pressure in the normal direction, the internal distance of the macroscopic dipole decreases due to the compressibility of the inner cavity. At this time, the compensation charge on the electrode is also reduced, thereby generating a charge signal. Theinsulating layer 120 may be a layer of insulating film, which acts to isolate the bioelectricity collecting electrode and the piezoelectric electret sensor, so that the two do not interfere with each other during signal collection. Physiological electrical signals may include ECG, EEG, EMG, and gastric electricity. The physiological electricalsignal acquisition electrode 130 may be a conductive electrode.

本实施例中，绝缘层120可以以蒸镀或者层压的方式在压电驻极体传感器形成，绝缘层的材料可以是塑料、陶瓷等任意绝缘材料。生理电信号采集电极130的形成过程可以是首先在绝缘层120上以蒸镀或者磁控溅射的方式形成一金属层，然后利用设定电极模板在金属层上生成生理电信号采集电极130.金属可以是银、金或铝等具有导电性能的金属。In this embodiment, theinsulating layer 120 may be formed on the piezoelectric electret sensor by means of evaporation or lamination, and the material of the insulating layer may be any insulating material such as plastic and ceramics. The formation process of the physiological electricalsignal collecting electrode 130 may be firstly to form a metal layer on the insulatinglayer 120 by means of evaporation or magnetron sputtering, and then use a set electrode template to generate the physiological electricalsignal collecting electrode 130 on the metal layer. The metal can be silver, gold or aluminum and other metals with electrical conductivity.

可选的，压电驻极体传感器110上设置有两个导线接口，作为压力信号输出的接口。理电信号采集电极130包括两个电极接口，作为生理信号输出的接口。Optionally, thepiezoelectric electret sensor 110 is provided with two wire interfaces as interfaces for outputting pressure signals. The electricalsignal acquisition electrode 130 includes two electrode interfaces, which are used as interfaces for outputting physiological signals.

本实施例提供的复合传感器，包括：压电驻极体传感器、绝缘层和生理电信号采集电极，绝缘层设置于压电驻极体传感器和生理电信号采集电极之间。本发明实施例提供的复合传感器，通过在压电驻极体传感器上设置生理电信号采集电极，使得传感器可以同时进行压力和生理电信号的采集，从而减小传感器的体积，提高空间利用率。The composite sensor provided in this embodiment includes: a piezoelectric electret sensor, an insulating layer and a physiological electrical signal collecting electrode, and the insulating layer is arranged between the piezoelectric electret sensor and the physiological electrical signal collecting electrode. In the composite sensor provided by the embodiment of the present invention, by arranging a physiological electrical signal collection electrode on the piezoelectric electret sensor, the sensor can collect pressure and physiological electrical signals at the same time, thereby reducing the volume of the sensor and improving the space utilization rate.

实施例二Embodiment 2

图2为本发明实施例二提供的一种复合传感器的制作方法，用于制造上述实施例所述的复合传感器，如图2所示，该方法包括如下步骤：FIG. 2 is a manufacturing method of a composite sensor provided in Embodiment 2 of the present invention, which is used to manufacture the composite sensor described in the above embodiment. As shown in FIG. 2 , the method includes the following steps:

步骤210，在压电驻极体传感器上以第一设定方式形成一绝缘层。In step 210, an insulating layer is formed on the piezoelectric electret sensor in a first setting manner.

其中，第一设定方式可以包括蒸镀或者层压，绝缘层的厚度可以是微米级别。The first setting method may include evaporation or lamination, and the thickness of the insulating layer may be in the order of micrometers.

步骤220，在绝缘层上以第二设定方式附着一金属层。Step 220, attaching a metal layer on the insulating layer in a second predetermined manner.

其中，第二设定方式可以包括蒸镀或者磁控溅射。金属层的厚度可以是微米级别。Wherein, the second setting mode may include evaporation or magnetron sputtering. The thickness of the metal layer can be on the order of microns.

步骤230，利用设定电极模板在金属层上生成生理电信号采集电极。Step 230, using the set electrode template to generate a physiological electrical signal acquisition electrode on the metal layer.

具体的，将设定电极模板覆盖在绝缘层上，从而生成生理电信号采集电极。Specifically, the set electrode template is covered on the insulating layer, thereby generating a physiological electrical signal acquisition electrode.

可选的，在压电驻极体传感器上以第一设定方式形成一绝缘层之前，还包括如下步骤：对原始压电材料薄膜进行气体扩散膨胀处理；在室温下使用设定电晕尖端电压充电设定时长，获得压电驻极体薄膜；利用真空蒸发的方式在压电驻极体薄膜的两个表面上生成两个金属电极，获得金属化薄膜；将金属化薄膜对称折叠，且内表面通过导电胶带粘合在一起；将金属端子分别连接到两个金属电极上，获得压电驻极体传感器。Optionally, before forming an insulating layer on the piezoelectric electret sensor in a first setting manner, the method further includes the following steps: performing gas diffusion expansion treatment on the original piezoelectric material film; using a setting corona tip at room temperature Voltage charging for a set duration to obtain a piezoelectric electret film; using vacuum evaporation to generate two metal electrodes on both surfaces of the piezoelectric electret film to obtain a metallized film; symmetrically fold the metallized film, and The inner surfaces were bonded together by conductive tape; the metal terminals were connected to the two metal electrodes respectively to obtain a piezoelectric electret sensor.

其中，设定电晕尖端电压为-20kV，设定时长为60秒。可选的，在金属端子的连接区域可以使用银浆覆盖，从而确保稳定的电接触。Among them, the corona tip voltage is set to -20kV, and the set duration is 60 seconds. Optionally, the connection area of the metal terminal can be covered with silver paste to ensure stable electrical contact.

本实施例的技术方案，首先在压电驻极体传感器上以第一设定方式形成一绝缘层，然后在绝缘层上以第二设定方式附着一金属层，最后利用设定电极模板在金属层上生成生理电信号采集电极。在压电驻极体传感器上生成生理电信号采集电极形成复合传感器，可以同时进行压力和生理电信号的采集，从而减小传感器的体积，提高空间利用率。In the technical solution of this embodiment, an insulating layer is firstly formed on the piezoelectric electret sensor in a first setting manner, then a metal layer is attached on the insulating layer in a second setting manner, and finally a setting electrode template is used to Physiological electrical signal acquisition electrodes are generated on the metal layer. The piezoelectric electret sensor generates physiological electrical signal acquisition electrodes to form a composite sensor, which can simultaneously collect pressure and physiological electrical signals, thereby reducing the volume of the sensor and improving space utilization.

实施例三Embodiment 3

图3为本发明实施例三提供的一种复合传感器系统的结构示意图，如图3所示，该系统包括：复合传感器310、信号采集电路320、主控电路330、无线传输模块340和数据处理模块350。FIG. 3 is a schematic structural diagram of a composite sensor system according to Embodiment 3 of the present invention. As shown in FIG. 3 , the system includes: acomposite sensor 310 , asignal acquisition circuit 320 , amain control circuit 330 , awireless transmission module 340 anddata processing Module 350.

复合传感器310的输出端与信号采集电路320的输入端相连，信号采集电路320的输出端和主控电路330的输入端相连，主控电路330的输出端和无线传输模块340的输入端相连；The output end of thecomposite sensor 310 is connected with the input end of thesignal acquisition circuit 320, the output end of thesignal acquisition circuit 320 is connected with the input end of themain control circuit 330, and the output end of themain control circuit 330 is connected with the input end of thewireless transmission module 340;

主控电路330的控制端分别与信号采集电路320的受控端和无线传输模块340的受控端相连；主控电路330控制信号采集电路320采集复合传感器310感应到的复合传感信号；主控电路330控制无线传输模块340将复合传感信号发送至数据处理模块350；数据处理模块350对接收到的复合传感信号进行处理。The control end of themain control circuit 330 is respectively connected with the controlled end of thesignal acquisition circuit 320 and the controlled end of thewireless transmission module 340; themain control circuit 330 controls thesignal acquisition circuit 320 to collect the composite sensing signal sensed by thecomposite sensor 310; Thecontrol circuit 330 controls thewireless transmission module 340 to send the composite sensor signal to thedata processing module 350; thedata processing module 350 processes the received composite sensor signal.

可选的，无线传输模块340可以是蓝牙模块或者WIFI模块。数据处理模块350可以是计算机或者移动终端等具有数据处理能力的设备。Optionally, thewireless transmission module 340 may be a Bluetooth module or a WIFI module. Thedata processing module 350 may be a computer or a mobile terminal or other device with data processing capability.

可选的，图4为本发明实施例三提供的另一种复合传感器系统的结构示意图。如图4所示，复合传感器310包括压电驻极体传感器311和生理电信号采集电极312；信号采集电路320包括压电信号采集电路321和生理电信号采集电路322；Optionally, FIG. 4 is a schematic structural diagram of another composite sensor system according to Embodiment 3 of the present invention. As shown in FIG. 4 , thecomposite sensor 310 includes a piezoelectric electret sensor 311 and a physiological electrical signal acquisition electrode 312; thesignal acquisition circuit 320 includes a piezoelectricsignal acquisition circuit 321 and a physiological electricalsignal acquisition circuit 322;

压电驻极体传感器311的输出端与压电信号采集电路321的输入端相连，生理电信号采集电极312的输出端与生理电信号采集电路322的输入端相连。The output terminal of the piezoelectric electret sensor 311 is connected to the input terminal of the piezoelectricsignal acquisition circuit 321 , and the output terminal of the physiological electrical signal acquisition electrode 312 is connected to the input terminal of the physiological electricalsignal acquisition circuit 322 .

可选的，信号采集电路320还包括压电信号处理电路323和生理电信号处理电路324；Optionally, thesignal acquisition circuit 320 further includes a piezoelectricsignal processing circuit 323 and a physiological electricalsignal processing circuit 324;

压电信号处理电路323设置于压电驻极体传感器311和压电信号采集电路321之间，压电信号处理电路323的输入端与压电驻极体传感器311的输出端相连；压电信号处理电路323的输出端与压电信号采集电路321的输入端相连；The piezoelectricsignal processing circuit 323 is arranged between the piezoelectric electret sensor 311 and the piezoelectricsignal acquisition circuit 321, and the input end of the piezoelectricsignal processing circuit 323 is connected to the output end of the piezoelectric electret sensor 311; the piezoelectric signal The output end of theprocessing circuit 323 is connected to the input end of the piezoelectricsignal acquisition circuit 321;

生理电信号处理电路324设置于生理电信号采集电极312和生理电信号采集电路322之间，生理电信号处理电路324的输入端与生理电信号采集电极312的输出端相连，生理电信号处理电路324的输出端与生理电信号采集电路322的输入端相连。The physiological electricalsignal processing circuit 324 is arranged between the physiological electrical signal acquisition electrode 312 and the physiological electricalsignal acquisition circuit 322. The input terminal of the physiological electricalsignal processing circuit 324 is connected to the output terminal of the physiological electrical signal acquisition electrode 312. The physiological electrical signal processing circuit The output end of 324 is connected to the input end of the physiological electricalsignal acquisition circuit 322 .

可选的，压电信号处理电路323包括压电信号放大、滤波及模数转换电路；生理电信号处理电路324包括生物点信号放大、滤波及模数转换电路。Optionally, the piezoelectricsignal processing circuit 323 includes a piezoelectric signal amplification, filtering and analog-to-digital conversion circuit; the physiological electricalsignal processing circuit 324 includes a biological point signal amplification, filtering and analog-to-digital conversion circuit.

具体的，压电信号处理电路323对压电信号进行放大、滤波及模数转换处理后，将压电信号发送至压电信号采集电路321，压电信号采集电路321将压电信号发送至主控电路330；生理电信号处理电路324对生理电信号进行放大、滤波及模数转换处理后，将生理电信号发送至生理电信号采集电路322，生理电信号采集电路322将生理电信号发送至主控电路330。主控电路330对接收到的压电信号及生理电信号信息数据打包处理后，发送至无线传输模块340，无线传输模块340将打包后的传感信号发送至数据处理模块。Specifically, after the piezoelectricsignal processing circuit 323 amplifies, filters and converts the piezoelectric signal, the piezoelectric signal is sent to the piezoelectricsignal acquisition circuit 321, and the piezoelectricsignal acquisition circuit 321 sends the piezoelectric signal to themain control circuit 330; after the physiological electricalsignal processing circuit 324 amplifies, filters and converts the physiological electrical signal, the physiological electrical signal is sent to the physiological electricalsignal acquisition circuit 322, and the physiological electricalsignal acquisition circuit 322 sends the physiological electrical signal tomain control circuit 330 . Themain control circuit 330 packages the received piezoelectric signal and physiological electrical signal information data, and sends it to thewireless transmission module 340, and thewireless transmission module 340 sends the packaged sensor signal to the data processing module.

本实施例提供的复合传感器，包括：压电驻极体传感器和生理电信号采集电极；所述信号采集电路包括压电信号采集电路和生理电信号采集电路。可以同时进行压力和生理电信号的采集，从而减小传感器的体积，提高空间利用率。The composite sensor provided in this embodiment includes: a piezoelectric electret sensor and a physiological electrical signal acquisition electrode; the signal acquisition circuit includes a piezoelectric signal acquisition circuit and a physiological electrical signal acquisition circuit. The collection of pressure and physiological electrical signals can be performed at the same time, thereby reducing the volume of the sensor and improving the space utilization.

注意，上述仅为本发明的较佳实施例及所运用技术原理。本领域技术人员会理解，本发明不限于这里所述的特定实施例，对本领域技术人员来说能够进行各种明显的变化、重新调整和替代而不会脱离本发明的保护范围。因此，虽然通过以上实施例对本发明进行了较为详细的说明，但是本发明不仅仅限于以上实施例，在不脱离本发明构思的情况下，还可以包括更多其他等效实施例，而本发明的范围由所附的权利要求范围决定。Note that the above are only preferred embodiments of the present invention and applied technical principles. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and various obvious changes, readjustments and substitutions can be made by those skilled in the art without departing from the protection scope of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments, and can also include more other equivalent embodiments without departing from the concept of the present invention. The scope is determined by the scope of the appended claims.

Claims (10)

1. A composite sensor, comprising: the piezoelectric electret sensor, the insulating layer and the physiological electric signal acquisition electrode are arranged on the piezoelectric electret sensor;

the insulating layer is arranged between the piezoelectric electret sensor and the physiological electric signal acquisition electrode.

2. The compound sensor of claim 1, wherein two wire interfaces are provided on the piezoelectret sensor; the physiological electric signal acquisition electrode comprises two electrode interfaces.

3. A method of making a composite sensor, comprising:

forming an insulating layer on the piezoelectric electret sensor in a first setting mode;

attaching a metal layer on the insulating layer in a second set manner;

and generating a physiological electric signal acquisition electrode on the metal layer by using a set electrode template.

4. The method of claim 3, wherein the first setting comprises evaporation or lamination.

5. The method of claim 3, wherein the second setting comprises evaporation or magnetron sputtering.

6. The method according to any one of claims 3 to 5, wherein before forming an insulating layer on the piezoelectric electret sensor in the first setting manner, the method further comprises:

carrying out gas diffusion expansion treatment on the original piezoelectric material film;

charging for a set time length by using a set corona tip voltage at room temperature to obtain a piezoelectric electret film;

generating two metal electrodes on two surfaces of the piezoelectric electret film by using a vacuum evaporation mode to obtain a metalized film;

symmetrically folding the metalized films, and bonding the inner surfaces of the metalized films together through a conductive adhesive tape;

and respectively connecting the metal terminals to the two metal electrodes to obtain the piezoelectric electret sensor.

7. A composite sensor system, comprising: the composite sensor, the signal acquisition circuit, the main control circuit, the wireless transmission module and the data processing module of any one of claims 1-2;

the output end of the composite sensor is connected with the input end of the signal acquisition circuit, the output end of the signal acquisition circuit is connected with the input end of the main control circuit, and the output end of the main control circuit is connected with the input end of the wireless transmission module;

the control end of the main control circuit is respectively connected with the controlled end of the signal acquisition circuit and the controlled end of the wireless transmission module; the master control circuit controls the signal acquisition circuit to acquire a composite sensing signal sensed by the composite sensor; the master control circuit controls the wireless transmission module to send the composite sensing signal to the data processing module; and the data processing module processes the received composite sensing signal.

8. The system of claim 7, wherein the compound sensor comprises a piezoelectric electret sensor and a physiological electrical signal collection electrode; the signal acquisition circuit comprises a piezoelectric signal acquisition circuit and a physiological electric signal acquisition circuit;

the output end of the piezoelectric electret sensor is connected with the input end of the piezoelectric signal acquisition circuit, and the output end of the physiological electric signal acquisition electrode is connected with the input end of the physiological electric signal acquisition circuit.

9. The system of claim 8, wherein the signal acquisition circuit further comprises a piezoelectric signal processing circuit and a physiological electrical signal processing circuit;

the piezoelectric signal processing circuit is arranged between the piezoelectric electret sensor and the piezoelectric signal acquisition circuit, and the input end of the piezoelectric signal processing circuit is connected with the output end of the piezoelectric electret sensor; the output end of the piezoelectric signal processing circuit is connected with the input end of the piezoelectric signal acquisition circuit;

the physiological electric signal processing circuit is arranged between the physiological electric signal acquisition electrode and the physiological electric signal acquisition circuit, the input end of the physiological electric signal processing circuit is connected with the output end of the physiological electric signal acquisition electrode, and the output end of the physiological electric signal processing circuit is connected with the input end of the physiological electric signal acquisition circuit.

10. The system of claim 9, wherein the piezoelectric signal processing circuitry comprises piezoelectric signal amplification, filtering, and analog-to-digital conversion circuitry; the physiological electric signal processing circuit comprises a biological point signal amplifying, filtering and analog-digital conversion circuit.

Images