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CN110640614B - Negative pressure polishing device and method for polishing blind holes of conductive workpiece - Google Patents

Negative pressure polishing device and method for polishing blind holes of conductive workpiece
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CN110640614B
CN110640614BCN201910984170.0ACN201910984170ACN110640614BCN 110640614 BCN110640614 BCN 110640614BCN 201910984170 ACN201910984170 ACN 201910984170ACN 110640614 BCN110640614 BCN 110640614B
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workpiece
flow channel
rotating
processed
joint
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CN110640614A (en
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单晓杭
汪佳成
张利
李研彪
叶必卿
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Zhejiang University of Technology ZJUT
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Zhejiang University of Technology ZJUT
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Abstract

The invention discloses a negative pressure polishing device and a method for polishing a blind hole of a conductive workpiece, wherein the negative pressure polishing device comprises a workbench, a movable positioning device, a rotary runner device and a rotary magnetic field device, the movable positioning device is arranged on the workbench, the rotary runner device is arranged on the movable positioning device, and the rotary magnetic field device is fixed on the workbench obliquely below the rotary runner device; according to the invention, the blind holes of the blind hole type workpiece can be polished, and the blind holes of the workpiece to be polished are in a negative pressure state by pumping, so that abrasive particle flows can smoothly enter the blind holes; the abrasive particle flow used in the invention is liquid metal abrasive particle flow, metal particles in the liquid metal abrasive particle flow can form good contact with the surface of a workpiece to be processed under the action of a rotating magnetic field generated by the three-phase stator coil, and micro cutting is carried out, so that the surface of a blind hole of the workpiece to be processed can not generate mechanical deformation; so that the polishing efficiency is faster, the effect is better and the micro-cutting is performed.

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Translated fromChinese
一种用于导电工件盲孔抛光的负压抛光装置及其方法Negative pressure polishing device and method for polishing blind holes of conductive workpieces

技术领域Technical Field

本发明涉及液态金属领域,更具体的说,尤其涉及一种用于导电工件盲孔抛光的负压抛光装置及其方法。The invention relates to the field of liquid metal, and more specifically, to a negative pressure polishing device and method for polishing blind holes of a conductive workpiece.

背景技术Background technique

3D打印技术也叫增材制造技术,亦即是国内称之为快速成形的一种先进制造技术,其本质原理是离散与堆积,即在计算机的辅助下,通过对实体模型进行切片处理,把三维实体的制造转换成二维层面的堆积和沿成形方向上的不断叠加,最终实现三维实体的制造。随着3D打印技术的使用越来越广泛,利用3D打印技术产生的盲孔产品也越来越多。盲孔相对于通孔来说是指不通的孔,广泛应用于生活和工业生产中,同时高精度的盲孔的用途越来越广泛,如压力传感器壳体的盲孔;车辆发动机中的关键零部件如柱塞、电磁阀座、喷油器的中间体、泵体盲孔等,用于实现发动机高效运转;在医疗应用中的人造心脏瓣膜架上的盲孔。3D printing technology is also called additive manufacturing technology, which is also known as rapid prototyping in China. Its essential principle is discreteness and accumulation, that is, with the assistance of a computer, by slicing the solid model, the manufacturing of a three-dimensional entity is converted into two-dimensional accumulation and continuous superposition along the forming direction, and finally the manufacturing of a three-dimensional entity is realized. With the increasing use of 3D printing technology, more and more blind hole products are produced using 3D printing technology. Blind holes refer to holes that are not connected compared to through holes. They are widely used in life and industrial production. At the same time, high-precision blind holes are increasingly used, such as blind holes in pressure sensor housings; key components in vehicle engines such as plungers, solenoid valve seats, injector intermediates, pump body blind holes, etc., which are used to achieve efficient engine operation; blind holes on artificial heart valve frames in medical applications.

虽然现在3D打印技术越来越好,精细度已经很高,但是3D打印出来的模型,表面仍然会比较粗糙。为了解决表面粗糙的问题,传统的后处理方法采用机械打磨,表面喷砂等方法,但是这些传统的方法都易破坏零件所需求的形状,抛光过程产生的粉尘对环境和加工工人产生影响, 且传统的抛光方法不能抛光3D打印的小孔径的盲孔型工件,尤其是这些盲孔型工件的盲孔。Although 3D printing technology is getting better and better, and the precision is already very high, the surface of the 3D printed model is still relatively rough. In order to solve the problem of surface roughness, traditional post-processing methods use mechanical grinding, surface sandblasting and other methods, but these traditional methods are easy to destroy the required shape of the parts, and the dust generated during the polishing process affects the environment and processing workers. In addition, traditional polishing methods cannot polish small-diameter blind hole workpieces printed by 3D, especially the blind holes of these blind hole workpieces.

发明内容Summary of the invention

本发明的目的在于解决现有抛光方法无法对3D打印技术打印出来的导电工件的盲孔进行抛光的问题,提出了一种用于导电工件盲孔抛光的负压抛光装置及其方法,通过利用负压抛光环境下电磁场控制液态金属磨粒流的运动实现待加工工件的盲孔的自动化抛光,通过抽气使待加工工件的盲孔处于负压状态,使得液态金属磨粒流可以更顺利的进入盲孔中,在抛光过程中,电磁场不断作用于液态金属磨粒流,液态金属磨粒流在电磁场的作用下与待加工工件表面形成良好的接触,对待加工工件的盲孔进行微量切削抛光,以实现待加工工件的盲孔抛光。The purpose of the present invention is to solve the problem that the existing polishing method cannot polish the blind holes of the conductive workpiece printed by 3D printing technology. A negative pressure polishing device and method for polishing the blind holes of the conductive workpiece are proposed. The movement of the liquid metal abrasive flow is controlled by the electromagnetic field in the negative pressure polishing environment to realize the automatic polishing of the blind holes of the workpiece to be processed. The blind holes of the workpiece to be processed are placed in a negative pressure state by exhausting air, so that the liquid metal abrasive flow can enter the blind holes more smoothly. During the polishing process, the electromagnetic field continuously acts on the liquid metal abrasive flow. The liquid metal abrasive flow forms good contact with the surface of the workpiece to be processed under the action of the electromagnetic field, and micro-cutting and polishing are performed on the blind holes of the workpiece to be processed to realize the blind hole polishing of the workpiece to be processed.

本发明通过以下技术方案来实现上述目的:一种用于导电工件盲孔抛光的负压抛光装置,包括工作台、移动定位装置、旋转流道装置和旋转磁场装置,移动定位装置安装在工作台上,旋转流道装置安装在移动定位装置上,旋转磁场装置固定在旋转流道装置斜下方的工作台上;The present invention achieves the above-mentioned purpose through the following technical solutions: A negative pressure polishing device for polishing blind holes of conductive workpieces, comprising a workbench, a mobile positioning device, a rotating flow channel device and a rotating magnetic field device, wherein the mobile positioning device is mounted on the workbench, the rotating flow channel device is mounted on the mobile positioning device, and the rotating magnetic field device is fixed on the workbench obliquely below the rotating flow channel device;

所述移动定位装置包括水平模组安装架、水平直线模组、水平模组驱动电机、竖直直线模组和竖直模组驱动电机,所述水平模组安装架固定在工作台上;所述水平直线模组水平固定在水平模组安装架上,所述水平模组驱动电机固定在水平直线模组的一端,水平模组驱动电机的驱动轴连接水平直线模组并驱动水平直线模组上的水平滑块沿着水平方向做直线运动;所述竖直直线模组竖直固定在水平直线模组的水平滑块上,竖直模组驱动电机固定在竖直直线模组的上端,竖直模组驱动电机的驱动轴连接竖直直线模组并驱动竖直直线模组上的竖直滑块沿着竖直方向做直线运动;所述旋转流道装置安装在竖直直线模组的竖直滑块上,所述旋转磁场装置安装在水平模组安装架旁边的工作台上;旋转磁场装置和旋转流道装置设置在竖直滑块的同一侧;The mobile positioning device includes a horizontal module mounting frame, a horizontal linear module, a horizontal module driving motor, a vertical linear module and a vertical module driving motor, wherein the horizontal module mounting frame is fixed on a workbench; the horizontal linear module is horizontally fixed on the horizontal module mounting frame, the horizontal module driving motor is fixed on one end of the horizontal linear module, the driving shaft of the horizontal module driving motor is connected to the horizontal linear module and drives the horizontal slider on the horizontal linear module to perform linear motion along the horizontal direction; the vertical linear module is vertically fixed on the horizontal slider of the horizontal linear module, the vertical module driving motor is fixed on the upper end of the vertical linear module, the driving shaft of the vertical module driving motor is connected to the vertical linear module and drives the vertical slider on the vertical linear module to perform linear motion along the vertical direction; the rotating flow channel device is installed on the vertical slider of the vertical linear module, and the rotating magnetic field device is installed on the workbench next to the horizontal module mounting frame; the rotating magnetic field device and the rotating flow channel device are arranged on the same side of the vertical slider;

旋转磁场装置包括支撑块、旋转从动盘、转盘底座、三相定子线圈、法兰型过电滑环、导电铜片、和定子线圈固定座,所述支撑块固定在工作台上,支撑块上设置有一个倾斜向上的安装斜面;安装斜面上开设有用于安装定子线圈固定座的圆形凹槽和用于安装法兰型过电滑环的电滑环安装凹槽;所述电滑环安装凹槽与圆形凹槽同轴心设置且电滑环安装凹槽设置在圆形凹槽内部,所述定子线圈固定座内嵌在安装斜面的圆形凹槽内,所述法兰型过电滑环内嵌在斜面的电滑环安装槽内,所述法兰型过电滑环的定子端固定安装在电滑环安装槽内,法兰型过电滑环的转子端与旋转从动盘的固定端固定连接;旋转从动盘上设置有工件安装槽,旋转从动盘的工件安装槽内壁上设置有导电铜片,导电铜片与法兰型过电滑环的转子端的导线相连接,法兰型过电滑环的定子端的导线连接外置方波交流电源的一根输入线;所述三相定子线圈固定在定子线圈固定座上,三相定子线圈环绕整个旋转从动盘和转盘底座设置;三相定子线圈的输入端连接外置的正弦交流电源;The rotating magnetic field device comprises a support block, a rotating driven disk, a turntable base, a three-phase stator coil, a flange-type electric slip ring, a conductive copper sheet, and a stator coil fixing seat. The support block is fixed on a workbench, and an upwardly inclined mounting slope is provided on the support block; a circular groove for mounting the stator coil fixing seat and an electric slip ring mounting groove for mounting the flange-type electric slip ring are provided on the mounting slope; the electric slip ring mounting groove is coaxially arranged with the circular groove and the electric slip ring mounting groove is arranged inside the circular groove, the stator coil fixing seat is embedded in the circular groove of the mounting slope, and the flange-type electric slip ring is embedded in the electric slip ring mounting groove of the slope. The stator end of the flange-type electric slip ring is fixedly installed in the electric slip ring installation groove, and the rotor end of the flange-type electric slip ring is fixedly connected to the fixed end of the rotating driven disk; a workpiece installation groove is provided on the rotating driven disk, and a conductive copper sheet is provided on the inner wall of the workpiece installation groove of the rotating driven disk, and the conductive copper sheet is connected to the wire of the rotor end of the flange-type electric slip ring, and the wire of the stator end of the flange-type electric slip ring is connected to an input line of an external square wave AC power supply; the three-phase stator coil is fixed on the stator coil fixing seat, and the three-phase stator coil is arranged around the entire rotating driven disk and the turntable base; the input end of the three-phase stator coil is connected to an external sinusoidal AC power supply;

所述旋转流道装置包括旋转夹持头、旋转接头固定座、流道固定板、滑轨连接板、抽气口单向阀、气液磨粒流接头、磨粒流入口阀、流道接头、空心流道、旋转接头、法兰盘、旋转驱动电机、旋转主动轮、旋转从动轮、旋转同步带、环形过电滑环、电滑环固定座、电滑环定子端导线、滑环转子端导线、导电铜环和主夹持端O型圈,所述滑轨连接板竖直安装在竖直直线模组的竖直滑块上,流道固定板固定安装在滑轨连接板上,所述旋转接头固定座和电滑环固定座均固定安装在流道固定板上,所述旋转接头安装在旋转接头固定座上,所述旋转接头安装时旋转接头的轴心线平行于旋转从动盘的轴心线;所述旋转接头靠近旋转磁场模块模块的一端为旋转接头的旋转端,空心流道的一端与旋转接头的旋转端固定连接,空心流道的另一端套装有法兰盘,旋转夹持头安装在法兰盘上,旋转夹持头正对旋转流道装置的安装斜面,旋转夹持头的轴心线与安装斜面垂直设置,所述空心流道安装时空心流道的轴心线平行于旋转从动盘和旋转夹持头的轴心线;所述环形过电滑环安装在电滑环固定座上,环形过电滑环套装在空心流道上;所述环形过电滑环通过电滑环定子端导线连接外置的方波交流电源的另一根输入线;所述空心流道上设置有第一转子导线槽,第一转子导线槽沿着空心流道的外壁延伸到空心流道连接法兰盘的一端的端面上,所述法兰盘上设置有第二转子导线槽,第二转子导线槽的一端与空心流道上的第一转子导线槽连通,第二转子导线槽的另一端延伸到法兰盘用于装夹待加工工件一端的端面上,导电铜环安装在法兰盘用于装夹待加工工件的一端,滑环转子端导线嵌装在第一转子导线槽和第二转子导线槽内,滑环转子端导线的一端与环形过电滑环贴合,滑环转子端导线的另一端与导电铜环连接;待加工工件的两端分别通过旋转夹持头和旋转从动盘夹持,待加工工件的盲孔位于旋转夹持头一端,待加工工件装夹在旋转夹持头上时导电铜环与待加工工件贴合;所述旋转接头的另一端为旋转接头的固定端,旋转接头的固定端通过流道接头连接气液磨粒流接头,所述气液磨粒流接头设置有三个出入口,分别为磨粒流入口端、磨粒流出口端和抽气端,磨粒流入口端、磨粒流出口端和抽气端相互连通,气液磨粒流接头的磨粒流出口端连接流道接头,气液磨粒流接头的磨粒流入口端通过磨粒流入口阀和磨粒流管道连接外置的液态金属磨粒流发生装置,所述液态金属磨粒流发生装置产出的磨粒流为液态金属磨粒流,气液磨粒流接头的抽气端通过抽气口单向阀和抽气管道连接外置的抽气装置,所述气液磨粒流接头、流道接头、空心流道和旋转夹持头共同构成旋转流道装置的流道部分,气液磨粒流接头、流道接头、空心流道和旋转夹持头的高度依次降低。The rotating flow channel device includes a rotating clamping head, a rotating joint fixing seat, a flow channel fixing plate, a slide rail connecting plate, an exhaust port one-way valve, a gas-liquid abrasive flow joint, an abrasive flow inlet valve, a flow channel joint, a hollow flow channel, a rotating joint, a flange, a rotating drive motor, a rotating active wheel, a rotating driven wheel, a rotating synchronous belt, an annular electric slip ring, an electric slip ring fixing seat, an electric slip ring stator end wire, a slip ring rotor end wire, a conductive copper ring and a main clamping end O-ring, the slide rail connecting plate is vertically mounted on the vertical slider of the vertical linear module, the flow channel fixing plate is fixedly mounted on the slide rail connecting plate, the rotating joint fixing seat and the electric slip ring fixing seat are both fixedly mounted on the flow channel fixing plate, the rotating joint is mounted on the rotating joint fixing seat, and when the rotating joint is installed, the axis of the rotating joint is parallel to the axis of the rotating driven disk; the rotating joint One end of the module close to the rotating magnetic field module is the rotating end of the rotating joint, one end of the hollow flow channel is fixedly connected to the rotating end of the rotating joint, the other end of the hollow flow channel is sleeved with a flange, the rotating clamping head is installed on the flange, the rotating clamping head is facing the mounting inclined surface of the rotating flow channel device, the axis of the rotating clamping head is perpendicular to the mounting inclined surface, and the axis of the hollow flow channel is parallel to the axis of the rotating driven disk and the rotating clamping head when the hollow flow channel is installed; the annular electric slip ring is installed on the electric slip ring fixing seat, and the annular electric slip ring is sleeved on the hollow flow channel; the annular electric slip ring is connected to another input line of an external square wave AC power supply through the electric slip ring stator end wire; the hollow flow channel is provided with a first rotor wire groove, and the first rotor wire groove extends along the outer wall of the hollow flow channel to the end surface of one end of the hollow flow channel connected to the flange. The flange is provided with a second rotor wire groove, one end of which is communicated with the first rotor wire groove on the hollow flow channel, and the other end of the second rotor wire groove extends to the end surface of the flange for clamping one end of the workpiece to be processed, and the conductive copper ring is installed at the end of the flange for clamping the workpiece to be processed, and the slip ring rotor end wire is embedded in the first rotor wire groove and the second rotor wire groove, one end of the slip ring rotor end wire is fitted with the annular electric slip ring, and the other end of the slip ring rotor end wire is connected to the conductive copper ring; the two ends of the workpiece to be processed are clamped by a rotating clamping head and a rotating driven disk respectively, the blind hole of the workpiece to be processed is located at one end of the rotating clamping head, and the conductive copper ring is fitted with the workpiece to be processed when the workpiece to be processed is clamped on the rotating clamping head; the other end of the rotary joint is the fixed end of the rotary joint, and the fixed end of the rotary joint is connected to the flow channel The head is connected to a gas-liquid abrasive flow joint, and the gas-liquid abrasive flow joint is provided with three inlets and outlets, namely an abrasive flow inlet end, an abrasive flow outlet end and an exhaust end. The abrasive flow inlet end, the abrasive flow outlet end and the exhaust end are interconnected, and the abrasive flow outlet end of the gas-liquid abrasive flow joint is connected to the flow channel joint, and the abrasive flow inlet end of the gas-liquid abrasive flow joint is connected to an external liquid metal abrasive flow generating device through an abrasive flow inlet valve and an abrasive flow pipeline. The abrasive flow generated by the liquid metal abrasive flow generating device is a liquid metal abrasive flow, and the exhaust end of the gas-liquid abrasive flow joint is connected to an external exhaust device through an exhaust port one-way valve and an exhaust pipeline. The gas-liquid abrasive flow joint, the flow channel joint, the hollow flow channel and the rotating clamping head together constitute the flow channel part of the rotating flow channel device, and the heights of the gas-liquid abrasive flow joint, the flow channel joint, the hollow flow channel and the rotating clamping head decrease in sequence.

进一步的,旋转夹持头包括法兰状的固定法兰端和用于固定待加工工件的主安装端,旋转夹持头的固定法兰端与法兰盘固定连接,旋转夹持头的主安装端上设置有与待加工工件的加工端形状相配合的工件安装主槽,待加工工件的加工端安装在工件安装主槽内,旋转夹持头的工件安装主槽设置有用于防止待加工工件的加工端滑动的主夹持端O型圈,主夹持端O型圈的内圈贴合并套装在待加工工件的加工端,主夹持端O型圈的外圈贴合工件安装主槽的内壁;所述旋转从动盘包括圆柱状的固定端和用于固定待加工工件的副安装端,旋转从动盘的固定端固定在支撑块的圆形凹槽内,所述旋转从动盘的副安装端内设置有与待加工工件后端形状相配合的工件安装副槽,待加工工件的后端安装在工件安装副槽内,旋转从动盘的工件安装副槽底部设置有用于防止待加工工件滑动的副夹持端O型圈,副夹持端O型圈的内圈贴合并套装在待加工工件的后端,副夹持端O型圈的外圈贴合工件安装副槽的内壁,所述导电铜环设置在主夹持端O型圈的内壁上,所述导电铜片设置在副夹持端O型圈的内壁上。Furthermore, the rotary clamping head comprises a flange-shaped fixed flange end and a main mounting end for fixing the workpiece to be processed, the fixed flange end of the rotary clamping head is fixedly connected to the flange plate, a workpiece mounting main groove matching the shape of the processing end of the workpiece to be processed is arranged on the main mounting end of the rotary clamping head, the processing end of the workpiece to be processed is installed in the workpiece mounting main groove, the workpiece mounting main groove of the rotary clamping head is provided with a main clamping end O-ring for preventing the processing end of the workpiece to be processed from sliding, the inner ring of the main clamping end O-ring is fitted and sleeved on the processing end of the workpiece to be processed, and the outer ring of the main clamping end O-ring is fitted on the inner wall of the workpiece mounting main groove; the rotary driven disk comprises a cylindrical fixed end and A secondary mounting end is used to fix the workpiece to be processed, the fixed end of the rotating driven disk is fixed in the circular groove of the supporting block, and a workpiece mounting secondary groove matching the shape of the rear end of the workpiece to be processed is arranged in the secondary mounting end of the rotating driven disk, and the rear end of the workpiece to be processed is installed in the workpiece mounting secondary groove, and a secondary clamping end O-ring for preventing the workpiece to be processed from sliding is arranged at the bottom of the workpiece mounting secondary groove of the rotating driven disk, the inner ring of the secondary clamping end O-ring is fitted and sleeved on the rear end of the workpiece to be processed, and the outer ring of the secondary clamping end O-ring is fitted on the inner wall of the workpiece mounting secondary groove, the conductive copper ring is arranged on the inner wall of the main clamping end O-ring, and the conductive copper sheet is arranged on the inner wall of the secondary clamping end O-ring.

进一步的,水平直线模组通过螺栓固定在水平模组安装架上,水平模组安装架通过螺栓固定在工作台上,竖直直线模组通过螺栓固定在水平直线模组的水平滑块上。水平直线模组的一端设置有四个螺栓孔,水平模组驱动电机上设置有四个与水平直线模组上的螺栓孔相配合的螺栓孔,通过四个穿过螺栓孔的固定螺栓进行固定。Furthermore, the horizontal linear module is fixed to the horizontal module mounting frame by bolts, the horizontal module mounting frame is fixed to the workbench by bolts, and the vertical linear module is fixed to the horizontal slider of the horizontal linear module by bolts. Four bolt holes are arranged at one end of the horizontal linear module, and four bolt holes matching the bolt holes on the horizontal linear module are arranged on the horizontal module driving motor, and the module is fixed by four fixing bolts passing through the bolt holes.

进一步的,所述气液磨粒流接头为方形接头,气液磨粒流接头固定在滑轨连接板上。Furthermore, the gas-liquid abrasive flow joint is a square joint, and the gas-liquid abrasive flow joint is fixed on the slide rail connecting plate.

进一步的,所述旋转接头固定座包括流道固定底座和流道固定上座,流道固定底座和流道固定上座上均设置有与空心流道相配合的弧形槽,流道固定底座和流道固定上座共同将空心流道夹持住,流道固定底座和流道固定上座通过螺栓固定连接。Furthermore, the rotary joint fixing seat includes a flow channel fixing base and a flow channel fixing upper seat, and the flow channel fixing base and the flow channel fixing upper seat are both provided with arc grooves matching the hollow flow channel, the flow channel fixing base and the flow channel fixing upper seat jointly clamp the hollow flow channel, and the flow channel fixing base and the flow channel fixing upper seat are fixedly connected by bolts.

进一步的,所述空心流道的轴心线和旋转从动盘的固定端的轴心线均与水平面倾斜30-60度角,且空心流道的轴心线和旋转从动盘的固定端的轴心线均与支撑块的安装斜面相垂直。Furthermore, the axis of the hollow flow channel and the axis of the fixed end of the rotating driven disk are both inclined at an angle of 30-60 degrees to the horizontal plane, and are perpendicular to the installation slope of the support block.

进一步的,所述支撑块为直角三棱柱状的支撑块,支撑块上设置有两个直角面和一个安装斜面,支撑块的直角面固定安装在工作台上,旋转从动盘通过转盘底座安装在支撑块的安装斜面上。Furthermore, the support block is a right-angled triangular prism-shaped support block, which is provided with two right-angled surfaces and a mounting bevel. The right-angled surfaces of the support block are fixedly mounted on the workbench, and the rotating driven disk is mounted on the mounting bevel of the support block through a turntable base.

进一步的,所述液态金属磨粒流为液态金属与松散磨粒混合构成,所述液态金属为液态镓。Furthermore, the liquid metal abrasive flow is composed of a mixture of liquid metal and loose abrasive particles, and the liquid metal is liquid gallium.

进一步的,所述抽气装置为抽气泵,所述空心流道为一空心轴。Furthermore, the air extraction device is an air extraction pump, and the hollow flow channel is a hollow shaft.

进一步的,所述空心流道的中部设置有用于安装环形过电滑环的中部定位安装螺纹,所述空心流道靠近旋转接头的一端设置有用于连接旋转接头的尾端定位安装螺纹,所述空心流道靠近法兰盘的一端设置有用于连接法兰盘的凸台。空心流道的两端与法兰盘和旋转接头的连接均为密封连接。Furthermore, the middle of the hollow flow channel is provided with a middle positioning installation thread for installing an annular electric slip ring, the end of the hollow flow channel close to the rotary joint is provided with a tail end positioning installation thread for connecting the rotary joint, and the end of the hollow flow channel close to the flange is provided with a boss for connecting the flange. Both ends of the hollow flow channel are connected to the flange and the rotary joint in a sealed manner.

进一步的,所述水平直线模组和竖直直线模组均为由底座、直线导轨、滚珠丝杠、丝杠螺母、滑块和轴承座组成的丝杠模组。Furthermore, the horizontal linear module and the vertical linear module are both screw modules composed of a base, a linear guide rail, a ball screw, a screw nut, a slider and a bearing seat.

基于一种用于导电工件盲孔抛光的负压抛光装置的一种用于导电工件盲孔抛光的负压抛光方法,具体包括如下步骤:A negative pressure polishing method for polishing blind holes of conductive workpieces based on a negative pressure polishing device for polishing blind holes of conductive workpieces specifically comprises the following steps:

步骤一:将待加工工件的底端通过副夹持端O型圈安装在旋转从动盘上;Step 1: Install the bottom end of the workpiece to be processed on the rotating driven disc through the O-ring at the auxiliary clamping end;

步骤二:启动竖直模组驱动电机,通过带动竖直直线模组上的竖直滑块向下直线运动,带动旋转夹持头向下运动,使旋转夹持头靠近旋转从动盘上的待加工工件;Step 2: Start the vertical module drive motor to drive the vertical slider on the vertical linear module to move linearly downward, thereby driving the rotary clamping head to move downward, so that the rotary clamping head is close to the workpiece to be processed on the rotary driven disk;

步骤三:启动水平模组驱动电机,通过带动水平直线模组上的水平滑块的水平运动,带动旋转夹持头在水平方向上向待加工工件方向移动,当达到合适位置后停止水平模组驱动电机;Step 3: Start the horizontal module drive motor, drive the horizontal slider on the horizontal linear module to move horizontally, drive the rotary clamping head to move horizontally toward the workpiece to be processed, and stop the horizontal module drive motor when it reaches the appropriate position;

步骤四:重复步骤二和步骤三,使待加工工件和旋转夹持头逐渐靠近,直至待加工工件的加工端完全伸入旋转夹持头内,且旋转夹持头内的主夹持端O型圈完全套装在待加工工件的加工端上,此时待加工工件被旋转夹持头和旋转从动盘共同夹紧,待加工工件的盲孔与空心流道相连通;Step 4: Repeat steps 2 and 3 to gradually bring the workpiece to be processed and the rotary clamping head closer together until the processing end of the workpiece to be processed is completely inserted into the rotary clamping head, and the main clamping end O-ring in the rotary clamping head is completely fitted on the processing end of the workpiece to be processed. At this time, the workpiece to be processed is clamped by the rotary clamping head and the rotary driven disk, and the blind hole of the workpiece to be processed is connected to the hollow flow channel;

步骤五:关闭磨粒流入口阀,打开抽气口单向阀并启动抽气装置,利用抽气口单向阀通过抽气管道连接抽气装置进行抽气,使待加工工件的盲孔和空心流道内部处于负压状态;Step 5: Close the abrasive inlet valve, open the exhaust port check valve and start the exhaust device, use the exhaust port check valve to connect the exhaust device through the exhaust pipe to exhaust air, so that the blind hole and hollow flow channel of the workpiece to be processed are in a negative pressure state;

步骤六:待加工工件的盲孔内部处于负压状态后关闭抽气装置,由于抽气口单向阀只允许气体单向流动,所以待加工工件的盲孔内部一直保持负压状态,此时打开磨粒流入口阀并启动液态金属磨粒流发生装置,使液态金属磨粒流发生装置中产生的液态金属磨粒流依次流经磨粒流入口阀、气液磨粒流接头、流道接头和旋转接头进入空心流道中,由于待加工工件的盲孔和空心流道均处于负压状态,液态金属磨粒流会直接流入待加工工件的盲孔内;Step 6: After the blind hole of the workpiece to be processed is in a negative pressure state, the exhaust device is closed. Since the one-way valve of the exhaust port only allows gas to flow in one direction, the blind hole of the workpiece to be processed is always kept in a negative pressure state. At this time, the abrasive flow inlet valve is opened and the liquid metal abrasive flow generating device is started, so that the liquid metal abrasive flow generated in the liquid metal abrasive flow generating device flows through the abrasive flow inlet valve, the gas-liquid abrasive flow joint, the flow channel joint and the rotary joint in sequence into the hollow flow channel. Since the blind hole and the hollow flow channel of the workpiece to be processed are both in a negative pressure state, the liquid metal abrasive flow will directly flow into the blind hole of the workpiece to be processed;

步骤七:液态金属磨粒流注入完毕后关闭磨粒流入口阀,打开旋转驱动电机,旋转驱动电机通过旋转主动轮、旋转从动轮和旋转同步带组成的同步带机构带动旋转接头的活动端、空心流道、法兰盘、旋转夹持头和待加工工件组成的整体进行旋转;Step 7: After the liquid metal abrasive flow is injected, the abrasive flow inlet valve is closed, and the rotary drive motor is turned on. The rotary drive motor drives the movable end of the rotary joint, the hollow flow channel, the flange, the rotary clamping head and the workpiece to be processed to rotate through a synchronous belt mechanism composed of a rotating driving wheel, a rotating driven wheel and a rotating synchronous belt;

步骤八:打开与三相定子线圈相连的正弦交流电源,由于三相定子线圈在交流电场下会产生旋转磁场,三相定子线圈工作时产生的旋转磁场带动液态金属抛光液内的金属粒子运动,加快液态金属抛光液内的磨粒旋转撞击待加工工件的盲孔;Step 8: Turn on the sinusoidal AC power supply connected to the three-phase stator coil. Since the three-phase stator coil will generate a rotating magnetic field under the AC electric field, the rotating magnetic field generated by the three-phase stator coil when working drives the metal particles in the liquid metal polishing liquid to move, and accelerates the rotation of the abrasive particles in the liquid metal polishing liquid to hit the blind hole of the workpiece to be processed;

步骤九:打开外置的方波交流电源,通过与环形过电滑环、滑环转子端导线、导电铜片、待加工工件、导电铜环和法兰型过电滑环组成的闭合回路向待加工工件施加方波交流电,在方波交流电的作用下待加工工件内部在会形成交流的电场,在交流电场的作用下,液态金属磨粒流中的金属粒子会沿着盲孔的轴向进行往复振荡运动,使液态金属磨粒流中磨粒运动更加无序,从而进一步加快待加工工件的盲孔抛光,直至完成待加工工件的盲孔抛光。Step nine: Turn on the external square wave AC power supply, and apply square wave AC to the workpiece to be processed through a closed loop composed of an annular power-passing slip ring, a slip ring rotor end conductor, a conductive copper sheet, a workpiece to be processed, a conductive copper ring and a flange-type power-passing slip ring. Under the action of the square wave AC, an AC electric field will be formed inside the workpiece to be processed. Under the action of the AC electric field, the metal particles in the liquid metal abrasive flow will reciprocate and oscillate along the axial direction of the blind hole, making the abrasive movement in the liquid metal abrasive flow more disordered, thereby further accelerating the blind hole polishing of the workpiece to be processed until the blind hole polishing of the workpiece to be processed is completed.

进一步的,所述步骤八过程中通过调节外接的正弦交流电源的频率和电压对三相定子线圈产生的旋转磁场的旋转速度和强度进行控制,实现液态金属抛光液内金属粒子运动情况的改变,进而实现抛光效率的改变。Furthermore, in the process of step eight, the rotation speed and intensity of the rotating magnetic field generated by the three-phase stator coil are controlled by adjusting the frequency and voltage of the external sinusoidal AC power supply, thereby changing the movement of metal particles in the liquid metal polishing liquid and thus changing the polishing efficiency.

本发明的有益效果在于:The beneficial effects of the present invention are:

1、本发明可以对盲孔类工件的盲孔进行抛光,通过抽气使待抛光工件的盲孔处于负压状态,使得磨粒流可以更顺利的进入盲孔中。1. The present invention can polish the blind hole of a blind hole workpiece. By exhausting air, the blind hole of the workpiece to be polished is placed in a negative pressure state, so that the abrasive flow can enter the blind hole more smoothly.

2、本发明使用的磨粒流为液态金属磨粒流,在三相定子线圈产生的旋转磁场的作用下液态金属磨粒流内的金属粒子会与待加工工件表面形成良好接触,进行微量切削,不会导致待加工工件的盲孔表面产生机械变形;使得抛光效率更快,效果更佳且进行微量切削,不会导致工件表面的机械变形。2. The abrasive flow used in the present invention is a liquid metal abrasive flow. Under the action of the rotating magnetic field generated by the three-phase stator coil, the metal particles in the liquid metal abrasive flow will form a good contact with the surface of the workpiece to be processed, and perform micro-cutting without causing mechanical deformation of the blind hole surface of the workpiece to be processed; the polishing efficiency is faster, the effect is better, and micro-cutting is performed without causing mechanical deformation of the workpiece surface.

3、本发明将待加工工件孔口倾斜朝上,使得在抛光过程的磨粒流在盲孔中聚集,采用的液态金属磨粒流在旋转磁场下产生湍流流动,与传统介质水和油相比,液态金属具有密度大和流动可控性好等特点,而且,液态金属的流动性与其周围的电场和磁场密切相关,可以通过改变磁场控制液态金属的流动状态,对导体和非导体类型的工件可以进行不同的处理方式,应用范围广。3. The present invention tilts the orifice of the workpiece to be processed upward so that the abrasive flow in the polishing process gathers in the blind hole. The liquid metal abrasive flow used generates turbulent flow under a rotating magnetic field. Compared with traditional media such as water and oil, liquid metal has the characteristics of high density and good flow controllability. Moreover, the fluidity of liquid metal is closely related to the electric and magnetic fields around it. The flow state of liquid metal can be controlled by changing the magnetic field. Different processing methods can be used for conductor and non-conductor workpieces, and the application range is wide.

4、本发明采用液态金属磨粒流进行加工,液态金属磨粒流的熔点较低,可控制在8-29℃,同时液态金属磨粒流沸点高于2000℃,能够避免产生气化,便于流体管理,且液态金属磨粒流不可燃、无毒,其安全性比较高;同时液态金属磨粒流使用后可经过电磁净化技术进行分离,实现液态金属磨粒流的后期回收,节约能源。4. The present invention adopts liquid metal abrasive flow for processing. The melting point of the liquid metal abrasive flow is relatively low and can be controlled at 8-29°C. At the same time, the boiling point of the liquid metal abrasive flow is higher than 2000°C, which can avoid gasification and facilitate fluid management. The liquid metal abrasive flow is non-flammable and non-toxic, and its safety is relatively high. At the same time, the liquid metal abrasive flow can be separated by electromagnetic purification technology after use to achieve the later recovery of the liquid metal abrasive flow and save energy.

5、本发明在抛光过程中只需较少的磨粒流,且磨粒流无毒、安全性较高对污染小,环境友好。5. The present invention requires less abrasive flow during the polishing process, and the abrasive flow is non-toxic, highly safe, less polluting, and environmentally friendly.

6、本发明利用水平直线模组和竖直直线模组组成的移动定位模块进行移动定位,能够快速准确实现在空间中的精确定位。6. The present invention utilizes a mobile positioning module composed of a horizontal linear module and a vertical linear module for mobile positioning, which can quickly and accurately achieve precise positioning in space.

7、本发明公开了旋转流道组件中通过同步带轮和同步带传动,可以在相对恶劣的抛光环境下进行工作。7. The present invention discloses a rotating flow channel assembly which can work in a relatively harsh polishing environment through a synchronous pulley and a synchronous belt transmission.

8、本发明将待加工工件倾斜放置在直角三棱柱状的支撑块上,待加工工件的盲孔具有一定的倾斜角,使得抛光时磨粒流进入盲孔后的运动更加无序,使得抛光效果更佳。8. The present invention places the workpiece to be processed on a right-angled triangular prism-shaped support block at an angle, and the blind hole of the workpiece to be processed has a certain inclination angle, so that the movement of the abrasive flow after entering the blind hole during polishing is more disordered, resulting in a better polishing effect.

9、本发明在抛光时,待加工工件可在旋转驱动电机的带动下进行机械旋转,使得待加工工件的盲孔内的液态金属磨粒流和待加工工件的盲孔产生相对位移,使得抛光效果更佳,效率更快。9. During polishing, the workpiece to be processed can be mechanically rotated by the rotating drive motor, so that the liquid metal abrasive flow in the blind hole of the workpiece to be processed and the blind hole of the workpiece to be processed produce relative displacement, so that the polishing effect is better and the efficiency is higher.

10、本发明公开的旋转夹持头和旋转从动盘均用于待加工工件的夹持,旋转夹持头和旋转从动盘均可方便的拆装,在加工时可根据工件的实际情况设计及更换,并不需要对整套装置进行其他的变更,实用性强。10. The rotary clamping head and rotary driven disk disclosed in the present invention are both used for clamping the workpiece to be processed. Both the rotary clamping head and the rotary driven disk can be conveniently disassembled and assembled. During processing, they can be designed and replaced according to the actual situation of the workpiece, and no other changes are required to the entire device, which has strong practicality.

附图说明BRIEF DESCRIPTION OF THE DRAWINGS

图1是本发明一种用于导电工件盲孔抛光的负压抛光装置的整体结构示意图。FIG1 is a schematic diagram of the overall structure of a negative pressure polishing device for polishing blind holes of a conductive workpiece according to the present invention.

图2是本发明移动定位装置的结构示意图。FIG. 2 is a schematic structural diagram of a mobile positioning device according to the present invention.

图3是本发明旋转流道装置的结构示意图。FIG. 3 is a schematic structural diagram of the rotating flow channel device of the present invention.

图4是本发明旋转流道装置的流道部分剖视结构示意图。FIG. 4 is a schematic cross-sectional view of the flow channel portion of the rotating flow channel device of the present invention.

图5是本发明空心流道的结构示意图。FIG. 5 is a schematic structural diagram of the hollow flow channel of the present invention.

图6是本发明旋转夹持头的剖视结构示意图。FIG. 6 is a schematic cross-sectional view of the rotary clamping head of the present invention.

图7是本发明旋转磁场组件的整体结构示意图。FIG. 7 is a schematic diagram of the overall structure of the rotating magnetic field assembly of the present invention.

图8是本发明旋转磁场组件的剖视结构示意图。FIG8 is a schematic cross-sectional view of the rotating magnetic field assembly of the present invention.

图9是本发明旋转磁场组件上旋转从动盘和法兰型过电滑环的安装机构示意图。9 is a schematic diagram of the installation mechanism of the rotating driven disk and the flange-type current-passing slip ring on the rotating magnetic field assembly of the present invention.

图中,1-移动定位装置、2-旋转流道装置、3-旋转磁场装置、4-待抛光工件、5-工作台、101-水平模组安装架、102-水平直线模组、103-水平滑块、104-竖直滑块、105-竖直模组驱动电机、106-竖直直线模组、107-水平模组驱动电机、201-旋转夹持头、202-空心流道、203-电滑环固定座、204-电滑环定子端导线、205-滑轨连接板、206-旋转接头固定座、207-流道固定板、208-气液磨粒流接头、209-磨粒流入口阀、210-抽气口单向阀、211-流道接头、212-旋转接头、213-环形过电滑环、214-旋转驱动电机、215-旋转电机固定板、216-旋转同步带、217-旋转从动轮、218-定位螺母、219-法兰盘、220-定位螺母安装螺纹、221-滑环转子端导线、222-主夹持端 O 型圈、223-导电铜环、224-旋转主动轮、301-支撑块、302-三相定子线圈、303-定子线圈固定座、304-旋转从动盘、305-从动盘端 O 型圈、306-法兰型过电滑环、307-导电铜片、308-过电滑环转子端导线、309-过电滑环定子端导线、310-圆形凹槽。In the figure, 1-mobile positioning device, 2-rotating flow channel device, 3-rotating magnetic field device, 4-workpiece to be polished, 5-workbench, 101-horizontal module mounting frame, 102-horizontal linear module, 103-horizontal slider, 104-vertical slider, 105-vertical module drive motor, 106-vertical linear module, 107-horizontal module drive motor, 201-rotating clamping head, 202-hollow flow channel, 203-electric slip ring fixing seat, 204-electric slip ring stator end wire, 205-slide rail connecting plate, 2 06-rotating joint fixing seat, 207-flow channel fixing plate, 208-gas-liquid abrasive flow joint, 209-abrasive flow inlet valve, 210-exhaust port one-way valve, 211-flow channel joint, 212-rotating joint, 213-annular electric slip ring, 214-rotating drive motor, 215-rotating motor fixing plate, 216-rotating synchronous belt, 217-rotating driven wheel, 218-positioning nut, 219-flange, 220-positioning nut mounting thread, 221-slip ring rotor end wire, 222-main clamping end O-ring, 223-conductive copper ring, 224-rotating driving wheel, 301-support block, 302-three-phase stator coil, 303-stator coil fixing seat, 304-rotating driven disk, 305-driven disk end O-ring, 306-flange type electric slip ring, 307-conductive copper sheet, 308-electric slip ring rotor end wire, 309-electric slip ring stator end wire, 310-circular groove.

具体实施方式Detailed ways

下面结合附图对本发明作进一步说明:The present invention will be further described below in conjunction with the accompanying drawings:

如图1~9所示,一种用于导电工件盲孔抛光的负压抛光装置,包括工作台5、移动定位装置1、旋转流道装置2和旋转磁场装置3,移动定位装置1安装在工作台5上,旋转流道装置2安装在移动定位装置1上,旋转磁场装置3固定在旋转流道装置2斜下方的工作台5上。As shown in Figures 1 to 9, a negative pressure polishing device for polishing blind holes in conductive workpieces includes a workbench 5, a mobile positioning device 1, a rotating flow channel device 2 and a rotating magnetic field device 3. The mobile positioning device 1 is installed on the workbench 5, the rotating flow channel device 2 is installed on the mobile positioning device 1, and the rotating magnetic field device 3 is fixed on the workbench 5 obliquely below the rotating flow channel device 2.

所述移动定位装置1包括水平模组安装架101、水平直线模组102、水平模组驱动电机107、竖直直线模组106和竖直模组驱动电机105,所述水平模组安装架101固定在工作台5上;所述水平直线模组102水平固定在水平模组安装架101上,所述水平模组驱动电机107固定在水平直线模组102的一端,水平模组驱动电机107的驱动轴连接水平直线模组102并驱动水平直线模组102上的水平滑块103沿着水平方向做直线运动;所述竖直直线模组106竖直固定在水平直线模组102的水平滑块103上,竖直模组驱动电机105固定在竖直直线模组106的上端,竖直模组驱动电机105的驱动轴连接竖直直线模组106并驱动竖直直线模组106上的竖直滑块104沿着竖直方向做直线运动;所述旋转流道装置2安装在竖直直线模组106的竖直滑块104上,所述旋转磁场装置3安装在水平模组安装架101旁边的工作台5上;旋转磁场装置3和旋转流道装置2设置在竖直滑块104的同一侧。The mobile positioning device 1 includes a horizontal module mounting frame 101, a horizontal linear module 102, a horizontal module driving motor 107, a vertical linear module 106 and a vertical module driving motor 105. The horizontal module mounting frame 101 is fixed on the workbench 5; the horizontal linear module 102 is horizontally fixed on the horizontal module mounting frame 101, the horizontal module driving motor 107 is fixed on one end of the horizontal linear module 102, and the driving shaft of the horizontal module driving motor 107 is connected to the horizontal linear module 102 and drives the horizontal slider 103 on the horizontal linear module 102 to perform linear motion along the horizontal direction; the vertical linear module 106 is fixed on the workbench 5; the horizontal linear module 102 is horizontally fixed on the horizontal module mounting frame 101, and the horizontal module driving motor 107 is fixed on one end of the horizontal linear module 102. The linear module 106 is vertically fixed on the horizontal slider 103 of the horizontal linear module 102, the vertical module drive motor 105 is fixed on the upper end of the vertical linear module 106, the drive shaft of the vertical module drive motor 105 is connected to the vertical linear module 106 and drives the vertical slider 104 on the vertical linear module 106 to perform linear motion along the vertical direction; the rotating flow channel device 2 is installed on the vertical slider 104 of the vertical linear module 106, and the rotating magnetic field device 3 is installed on the workbench 5 next to the horizontal module mounting frame 101; the rotating magnetic field device 3 and the rotating flow channel device 2 are arranged on the same side of the vertical slider 104.

所述旋转磁场装置3包括支撑块301、旋转从动盘304、、三相定子线圈302、法兰型过电滑环306、导电铜片307、和定子线圈固定座303,所述支撑块301固定在工作台5上,支撑块301上设置有一个倾斜向上的安装斜面;安装斜面上开设有用于安装定子线圈固定座303的圆形凹槽310和用于安装法兰型过电滑环306的电滑环安装凹槽;所述电滑环安装凹槽与圆形凹槽310同轴心设置且电滑环安装凹槽设置在圆形凹槽310内部,所述定子线圈固定座303内嵌在安装斜面的圆形凹槽310内,所述法兰型过电滑环306内嵌在斜面的电滑环安装槽内,所述法兰型过电滑环306的定子端固定安装在电滑环安装槽内,法兰型过电滑环306的转子端与旋转从动盘304的固定端固定连接;旋转从动盘304上设置有工件安装槽,旋转从动盘304的工件安装槽内壁上设置有导电铜片307,导电铜片307与法兰型过电滑环306的转子端的导线相连接,法兰型过电滑环306的定子端的导线连接外置方波交流电源的一根输入线;所述三相定子线圈302固定在定子线圈固定座303上,三相定子线圈302环绕整个旋转从动盘304设置;三相定子线圈302的输入端连接外置的正弦交流电源。The rotating magnetic field device 3 includes a support block 301, a rotating driven disk 304, a three-phase stator coil 302, a flange-type electric slip ring 306, a conductive copper sheet 307, and a stator coil fixing seat 303. The support block 301 is fixed on the workbench 5, and a mounting slope inclined upward is provided on the support block 301; a circular groove 310 for mounting the stator coil fixing seat 303 and an electric slip ring mounting groove for mounting the flange-type electric slip ring 306 are provided on the mounting slope; the electric slip ring mounting groove is coaxially arranged with the circular groove 310 and the electric slip ring mounting groove is arranged inside the circular groove 310, the stator coil fixing seat 303 is embedded in the circular groove 310 of the mounting slope, and the flange-type electric slip ring 306 is embedded in the circular groove 310 of the slope. In the electric slip ring installation groove, the stator end of the flange type electric slip ring 306 is fixedly installed in the electric slip ring installation groove, and the rotor end of the flange type electric slip ring 306 is fixedly connected to the fixed end of the rotating driven disk 304; a workpiece installation groove is provided on the rotating driven disk 304, and a conductive copper sheet 307 is provided on the inner wall of the workpiece installation groove of the rotating driven disk 304, and the conductive copper sheet 307 is connected to the wire of the rotor end of the flange type electric slip ring 306, and the wire of the stator end of the flange type electric slip ring 306 is connected to an input line of an external square wave AC power supply; the three-phase stator coil 302 is fixed on the stator coil fixing seat 303, and the three-phase stator coil 302 is arranged around the entire rotating driven disk 304; the input end of the three-phase stator coil 302 is connected to an external sinusoidal AC power supply.

所述旋转流道装置2包括旋转夹持头201、旋转接头212、旋转接头固定座206、流道固定板207、滑轨连接板205、抽气口单向阀210、气液磨粒流接头208、磨粒流入口阀209、流道接头211、空心流道202、旋转接头212、法兰盘219、旋转驱动电机214、旋转主动轮224、旋转从动轮217、旋转同步带216、环形过电滑环213、电滑环固定座203、电滑环定子端导线204、滑环转子端导线221、导电铜环223和主夹持端O型圈222,所述滑轨连接板205竖直安装在竖直直线模组106的竖直滑块104上,流道固定板207固定安装在滑轨连接板205上,所述旋转接头固定座206和电滑环固定座203均固定安装在流道固定板207上,所述旋转接头212安装在旋转接头固定座206上,所述旋转接头212安装时旋转接头212的轴心线平行于旋转从动盘304的轴心线;所述旋转接头212靠近旋转磁场模块模块的一端为旋转接头212的旋转端,空心流道202的一端与旋转接头212的旋转端固定连接,空心流道202的另一端套装有法兰盘219,旋转夹持头201安装在法兰盘219上,旋转夹持头201正对旋转流道装置2的安装斜面,旋转夹持头201的轴心线与安装斜面垂直设置,所述空心流道202安装时空心流道202的轴心线平行于旋转从动盘304和旋转夹持头201的轴心线;所述环形过电滑环213安装在电滑环固定座203上,环形过电滑环213套装在空心流道202上;所述环形过电滑环213通过电滑环定子端导线204连接外置的方波交流电源的另一根输入线;所述空心流道202上设置有第一转子导线槽,第一转子导线槽沿着空心流道202的外壁延伸到空心流道202连接法兰盘219的一端的端面上,所述法兰盘219上设置有第二转子导线槽,第二转子导线槽的一端与空心流道202上的第一转子导线槽连通,第二转子导线槽的另一端延伸到法兰盘219用于装夹待加工工件一端的端面上,导电铜环223安装在法兰盘219用于装夹待加工工件的一端,滑环转子端导线221嵌装在第一转子导线槽和第二转子导线槽内,滑环转子端导线221的一端与环形过电滑环213贴合,滑环转子端导线221的另一端与导电铜环223连接;待加工工件的两端分别通过旋转夹持头201和旋转从动盘304夹持,待加工工件的盲孔位于旋转夹持头201一端,待加工工件装夹在旋转夹持头201上时导电铜环223与待加工工件贴合;所述旋转接头212的另一端为旋转接头212的固定端,旋转接头212的固定端通过流道接头211连接气液磨粒流接头208,所述气液磨粒流接头208设置有三个出入口,分别为磨粒流入口端、磨粒流出口端和抽气端,磨粒流入口端、磨粒流出口端和抽气端相互连通,气液磨粒流接头208的磨粒流出口端连接流道接头211,气液磨粒流接头208的磨粒流入口端通过磨粒流入口阀209和磨粒流管道连接外置的液态金属磨粒流发生装置,所述液态金属磨粒流发生装置产出的磨粒流为液态金属磨粒流,气液磨粒流接头208的抽气端通过抽气口单向阀210和抽气管道连接外置的抽气装置,所述气液磨粒流接头208、流道接头211、空心流道202和旋转夹持头201共同构成旋转流道装置的流道部分,气液磨粒流接头208、流道接头211、空心流道和旋转夹持头201的高度依次降低。The rotating flow channel device 2 includes a rotating clamping head 201, a rotating joint 212, a rotating joint fixing seat 206, a flow channel fixing plate 207, a slide rail connecting plate 205, an air extraction port one-way valve 210, a gas-liquid abrasive flow joint 208, an abrasive flow inlet valve 209, a flow channel joint 211, a hollow flow channel 202, a rotating joint 212, a flange 219, a rotating drive motor 214, a rotating driving wheel 224, a rotating driven wheel 217, a rotating synchronous belt 216, an annular electric slip ring 213, and an electric slip ring fixing plate 214. The slide rail connecting plate 205 is vertically mounted on the vertical slider 104 of the vertical linear module 106, the flow channel fixing plate 207 is fixedly mounted on the slide rail connecting plate 205, the rotary joint fixing seat 206 and the electric slip ring fixing seat 203 are both fixedly mounted on the flow channel fixing plate 207, the rotary joint 212 is mounted on the rotary joint fixing seat 206, and the rotary joint 213 is fixedly mounted on the rotary joint fixing seat 206. When the head 212 is installed, the axis of the rotating joint 212 is parallel to the axis of the rotating driven disk 304; the end of the rotating joint 212 close to the rotating magnetic field module is the rotating end of the rotating joint 212, one end of the hollow flow channel 202 is fixedly connected to the rotating end of the rotating joint 212, and the other end of the hollow flow channel 202 is provided with a flange 219, and the rotating clamping head 201 is installed on the flange 219, and the rotating clamping head 201 is facing the installation inclined surface of the rotating flow channel device 2, and the axis of the rotating clamping head 201 is parallel to the axis of the rotating driven disk 304; the end of the rotating joint 212 close to the rotating magnetic field module is the rotating end of the rotating joint 212, and the end of the hollow flow channel 202 is fixedly connected to the rotating end of the rotating joint 212, and the other end of the hollow flow channel 202 is provided with a flange 219, and the rotating clamping head 201 is installed on the flange 219, and the rotating clamping head 201 is facing the installation inclined surface of the rotating flow channel device 2, and the axis of the rotating clamping head 201 is parallel to the axis of the rotating clamping head 201. The hollow channel 202 is arranged perpendicularly to the installation inclined surface. When the hollow channel 202 is installed, the axis of the hollow channel 202 is parallel to the axis of the rotating driven disk 304 and the rotating clamping head 201. The annular electric slip ring 213 is installed on the electric slip ring fixing seat 203, and the annular electric slip ring 213 is sleeved on the hollow channel 202. The annular electric slip ring 213 is connected to another input line of the external square wave AC power supply through the electric slip ring stator end wire 204. The hollow channel 202 is provided with a first rotor wire groove, and the first rotor The wire groove extends along the outer wall of the hollow flow channel 202 to the end surface of one end of the hollow flow channel 202 connected to the flange 219. The flange 219 is provided with a second rotor wire groove. One end of the second rotor wire groove is connected to the first rotor wire groove on the hollow flow channel 202. The other end of the second rotor wire groove extends to the end surface of the flange 219 for clamping the workpiece to be processed. The conductive copper ring 223 is installed on the end of the flange 219 for clamping the workpiece to be processed. The slip ring rotor end wire 221 is embedded in the first In the rotor wire groove and the second rotor wire groove, one end of the slip ring rotor end wire 221 is fitted with the annular electric slip ring 213, and the other end of the slip ring rotor end wire 221 is connected to the conductive copper ring 223; the two ends of the workpiece to be processed are clamped by the rotating clamping head 201 and the rotating driven disk 304 respectively, the blind hole of the workpiece to be processed is located at one end of the rotating clamping head 201, and the conductive copper ring 223 is fitted with the workpiece to be processed when the workpiece to be processed is clamped on the rotating clamping head 201; the other end of the rotary joint 212 is the rotary joint 2 The fixed end of the rotary joint 212 is connected to the gas-liquid abrasive flow joint 208 through the flow channel joint 211. The gas-liquid abrasive flow joint 208 is provided with three inlets and outlets, namely, an abrasive flow inlet end, an abrasive flow outlet end and an air extraction end. The abrasive flow inlet end, the abrasive flow outlet end and the air extraction end are interconnected. The abrasive flow outlet end of the gas-liquid abrasive flow joint 208 is connected to the flow channel joint 211. The abrasive flow inlet end of the gas-liquid abrasive flow joint 208 is connected to the external liquid through the abrasive flow inlet valve 209 and the abrasive flow pipeline. The liquid metal abrasive flow generating device produces a liquid metal abrasive flow. The suction end of the gas-liquid abrasive flow joint 208 is connected to an external suction device through a suction port one-way valve 210 and a suction pipeline. The gas-liquid abrasive flow joint 208, the flow channel joint 211, the hollow flow channel 202 and the rotating clamping head 201 together constitute the flow channel part of the rotating flow channel device. The heights of the gas-liquid abrasive flow joint 208, the flow channel joint 211, the hollow flow channel and the rotating clamping head 201 decrease in sequence.

旋转夹持头201包括法兰状的固定法兰端和用于固定待加工工件的主安装端,旋转夹持头201的固定法兰端与法兰盘219固定连接,旋转夹持头201的主安装端上设置有与待加工工件的加工端形状相配合的工件安装主槽,待加工工件的加工端安装在工件安装主槽内,旋转夹持头201的工件安装主槽设置有用于防止待加工工件的加工端滑动的主夹持端O型圈222,主夹持端O型圈222的内圈贴合并套装在待加工工件的加工端,主夹持端O型圈222的外圈贴合工件安装主槽的内壁;所述旋转从动盘304包括圆柱状的固定端和用于固定待加工工件的副安装端,旋转从动盘304的固定端固定在支撑块301的圆形凹槽310内,所述旋转从动盘304的副安装端内设置有与待加工工件后端形状相配合的工件安装副槽,待加工工件的后端安装在工件安装副槽内,旋转从动盘304的工件安装副槽底部设置有用于防止待加工工件滑动的副夹持端O型圈,副夹持端O型圈的内圈贴合并套装在待加工工件的后端,副夹持端O型圈的外圈贴合工件安装副槽的内壁,所述导电铜环223设置在主夹持端O型圈222的内壁上,所述导电铜片307设置在副夹持端O型圈的内壁上。The rotating clamping head 201 includes a flange-shaped fixed flange end and a main mounting end for fixing the workpiece to be processed. The fixed flange end of the rotating clamping head 201 is fixedly connected to the flange plate 219. The main mounting end of the rotating clamping head 201 is provided with a workpiece mounting main groove that matches the shape of the processing end of the workpiece to be processed. The processing end of the workpiece to be processed is installed in the workpiece mounting main groove. The workpiece mounting main groove of the rotating clamping head 201 is provided with a main clamping end O-ring 222 for preventing the processing end of the workpiece to be processed from sliding. The inner ring of the main clamping end O-ring 222 is fitted and sleeved on the processing end of the workpiece to be processed, and the outer ring of the main clamping end O-ring 222 is fitted on the inner wall of the workpiece mounting main groove. The rotating driven disk 304 includes a cylindrical fixed end and a flange plate 219. The auxiliary mounting end for fixing the workpiece to be processed, the fixed end of the rotating driven disk 304 is fixed in the circular groove 310 of the support block 301, and a workpiece mounting auxiliary groove matching the shape of the rear end of the workpiece to be processed is arranged in the auxiliary mounting end of the rotating driven disk 304, and the rear end of the workpiece to be processed is installed in the workpiece mounting auxiliary groove, and an auxiliary clamping end O-ring for preventing the workpiece to be processed from sliding is arranged at the bottom of the workpiece mounting auxiliary groove of the rotating driven disk 304, the inner ring of the auxiliary clamping end O-ring is fitted and sleeved on the rear end of the workpiece to be processed, and the outer ring of the auxiliary clamping end O-ring is fitted on the inner wall of the workpiece mounting auxiliary groove, the conductive copper ring 223 is arranged on the inner wall of the main clamping end O-ring 222, and the conductive copper sheet 307 is arranged on the inner wall of the auxiliary clamping end O-ring.

水平直线模组102通过螺栓固定在水平模组安装架101上,水平模组安装架101通过螺栓固定在工作台5上,竖直直线模组106通过螺栓固定在水平直线模组102的水平滑块103上。。The horizontal linear module 102 is fixed to the horizontal module mounting frame 101 by bolts, the horizontal module mounting frame 101 is fixed to the workbench 5 by bolts, and the vertical linear module 106 is fixed to the horizontal slider 103 of the horizontal linear module 102 by bolts.

所述气液磨粒流接头208为方形接头,气液磨粒流接头208固定在滑轨连接板205上。The gas-liquid abrasive flow joint 208 is a square joint, and the gas-liquid abrasive flow joint 208 is fixed on the slide rail connecting plate 205 .

所述旋转接头固定座206包括流道固定底座和流道固定上座,流道固定底座和流道固定上座上均设置有与空心流道202相配合的弧形槽,流道固定底座和流道固定上座共同将空心流道202夹持住,流道固定底座和流道固定上座通过螺栓固定连接。The rotary joint fixing seat 206 includes a flow channel fixing base and a flow channel fixing upper seat, both of which are provided with arc grooves matching the hollow flow channel 202, the flow channel fixing base and the flow channel fixing upper seat jointly clamp the hollow flow channel 202, and the flow channel fixing base and the flow channel fixing upper seat are fixedly connected by bolts.

所述空心流道202的轴心线和旋转从动盘304的固定端的轴心线均与水平面倾斜30-60度角,且空心流道202的轴心线和旋转从动盘304的固定端的轴心线均与支撑块301的安装斜面相垂直。The axis of the hollow channel 202 and the axis of the fixed end of the driven disk 304 are both inclined at an angle of 30-60 degrees to the horizontal plane, and are perpendicular to the installation slope of the support block 301.

所述支撑块301为直角三棱柱状的支撑块301,支撑块301上设置有两个直角面和一个安装斜面,支撑块301的直角面固定安装在工作台5上,旋转从动盘304通过转盘底座安装在支撑块的安装斜面上。。The support block 301 is a right-angled triangular prism-shaped support block 301, which is provided with two right-angled surfaces and a mounting inclined surface. The right-angled surface of the support block 301 is fixedly mounted on the workbench 5, and the rotating driven disk 304 is mounted on the mounting inclined surface of the support block through the turntable base.

所述空心流道202的中部设置有用于安装环形过电滑环213的中部定位安装螺纹,所述空心流道202靠近旋转接头212的一端设置有用于连接旋转接头212的尾端定位安装螺纹,所述空心流道202靠近法兰盘219的一端设置有用于连接法兰盘219的凸台。空心流道202的两端与法兰盘219和旋转接头212的连接均为密封连接。The middle part of the hollow flow channel 202 is provided with a middle positioning installation thread for installing the annular electric slip ring 213, the end of the hollow flow channel 202 close to the rotary joint 212 is provided with a tail end positioning installation thread for connecting the rotary joint 212, and the end of the hollow flow channel 202 close to the flange 219 is provided with a boss for connecting the flange 219. Both ends of the hollow flow channel 202 are connected to the flange 219 and the rotary joint 212 in a sealed manner.

基于一种用于导电工件盲孔抛光的负压抛光装置的一种用于导电工件盲孔抛光的负压抛光方法,具体包括如下步骤:A negative pressure polishing method for polishing blind holes of conductive workpieces based on a negative pressure polishing device for polishing blind holes of conductive workpieces specifically comprises the following steps:

步骤一:将待加工工件的底端通过副夹持端O型圈安装在旋转从动盘304上;Step 1: Mount the bottom end of the workpiece to be processed on the rotating driven disk 304 through the secondary clamping end O-ring;

步骤二:启动竖直模组驱动电机105,通过带动竖直直线模组106上的竖直滑块104向下直线运动,带动旋转夹持头201向下运动,使旋转夹持头201靠近旋转从动盘304上的待加工工件;Step 2: Start the vertical module drive motor 105 to drive the vertical slider 104 on the vertical linear module 106 to move linearly downward, thereby driving the rotary clamping head 201 to move downward, so that the rotary clamping head 201 is close to the workpiece to be processed on the rotary driven disk 304;

步骤三:启动水平模组驱动电机107,通过带动水平直线模组102上的水平滑块103的水平运动,带动旋转夹持头201在水平方向上向待加工工件方向移动,当达到合适位置后停止水平模组驱动电机107;Step 3: Start the horizontal module drive motor 107, drive the horizontal slider 103 on the horizontal linear module 102 to move horizontally, drive the rotary clamping head 201 to move horizontally toward the workpiece to be processed, and stop the horizontal module drive motor 107 when reaching a suitable position;

步骤四:重复步骤二和步骤三,使待加工工件和旋转夹持头201逐渐靠近,直至待加工工件的加工端完全伸入旋转夹持头201内,且旋转夹持头201内的主夹持端O型圈222完全套装在待加工工件的加工端上,此时待加工工件被旋转夹持头201和旋转从动盘304共同夹紧,待加工工件的盲孔与空心流道202相连通;Step 4: Repeat steps 2 and 3 to gradually bring the workpiece to be processed and the rotary clamping head 201 closer together until the processing end of the workpiece to be processed is completely inserted into the rotary clamping head 201, and the main clamping end O-ring 222 in the rotary clamping head 201 is completely mounted on the processing end of the workpiece to be processed. At this time, the workpiece to be processed is clamped by the rotary clamping head 201 and the rotary driven disk 304, and the blind hole of the workpiece to be processed is connected to the hollow flow channel 202;

步骤五:关闭磨粒流入口阀209,打开抽气口单向阀210并启动抽气装置,利用抽气口单向阀210通过抽气管道连接抽气装置进行抽气,使待加工工件的盲孔和空心流道202内部处于负压状态;Step 5: close the abrasive inlet valve 209, open the exhaust port check valve 210 and start the exhaust device, and use the exhaust port check valve 210 to connect the exhaust device through the exhaust pipeline to exhaust air, so that the blind hole and the hollow flow channel 202 of the workpiece to be processed are in a negative pressure state;

步骤六:待加工工件的盲孔内部处于负压状态后关闭抽气装置,由于抽气口单向阀210只允许气体单向流动,所以待加工工件的盲孔内部一直保持负压状态,此时打开磨粒流入口阀209并启动液态金属磨粒流发生装置,使液态金属磨粒流发生装置中产生的液态金属磨粒流依次流经磨粒流入口阀209、气液磨粒流接头208、流道接头211和旋转接头212进入空心流道202中,由于待加工工件的盲孔和空心流道202均处于负压状态,液态金属磨粒流会直接流入待加工工件的盲孔内;Step 6: After the blind hole of the workpiece to be processed is in a negative pressure state, the exhaust device is closed. Since the exhaust port one-way valve 210 only allows gas to flow in one direction, the blind hole of the workpiece to be processed is always kept in a negative pressure state. At this time, the abrasive flow inlet valve 209 is opened and the liquid metal abrasive flow generating device is started, so that the liquid metal abrasive flow generated in the liquid metal abrasive flow generating device flows through the abrasive flow inlet valve 209, the gas-liquid abrasive flow joint 208, the flow channel joint 211 and the rotary joint 212 in sequence into the hollow flow channel 202. Since the blind hole of the workpiece to be processed and the hollow flow channel 202 are both in a negative pressure state, the liquid metal abrasive flow will directly flow into the blind hole of the workpiece to be processed;

步骤七:液态金属磨粒流注入完毕后关闭磨粒流入口阀209,打开旋转驱动电机214,旋转驱动电机214通过旋转主动轮224、旋转从动轮217和旋转同步带216组成的同步带机构带动旋转接头212的活动端、空心流道202、法兰盘219、旋转夹持头201和待加工工件组成的整体进行旋转;Step 7: After the liquid metal abrasive flow is injected, the abrasive flow inlet valve 209 is closed, and the rotary drive motor 214 is turned on. The rotary drive motor 214 drives the movable end of the rotary joint 212, the hollow flow channel 202, the flange 219, the rotary clamping head 201 and the workpiece to be processed to rotate through the synchronous belt mechanism composed of the rotating driving wheel 224, the rotating driven wheel 217 and the rotating synchronous belt 216;

步骤八:打开与三相定子线圈302相连的正弦交流电源,由于三相定子线圈在交流电场下会产生旋转磁场,三相定子线圈302工作时产生的旋转磁场带动液态金属抛光液内的金属粒子运动,加快液态金属抛光液内的磨粒旋转撞击待加工工件的盲孔;Step 8: Turn on the sinusoidal AC power supply connected to the three-phase stator coil 302. Since the three-phase stator coil will generate a rotating magnetic field under the AC electric field, the rotating magnetic field generated by the three-phase stator coil 302 when working drives the metal particles in the liquid metal polishing liquid to move, and accelerates the rotation of the abrasive particles in the liquid metal polishing liquid to hit the blind hole of the workpiece to be processed;

步骤九:打开外置的方波交流电源,通过与环形过电滑环213、滑环转子端导线221、导电铜片307、待加工工件、导电铜环223和法兰型过电滑环306组成的闭合回路向待加工工件施加方波交流电,在方波交流电的作用下待加工工件内部在会形成交流的电场,在交流电场的作用下,液态金属磨粒流中的金属粒子会沿着盲孔的轴向进行往复振荡运动,使液态金属磨粒流中磨粒运动更加无序,从而进一步加快待加工工件的盲孔抛光,直至完成待加工工件的盲孔抛光。Step nine: turn on the external square wave AC power supply, and apply square wave AC to the workpiece to be processed through a closed loop composed of the annular current passing slip ring 213, the slip ring rotor end conductor 221, the conductive copper sheet 307, the workpiece to be processed, the conductive copper ring 223 and the flange type current passing slip ring 306. Under the action of the square wave AC, an AC electric field will be formed inside the workpiece to be processed. Under the action of the AC electric field, the metal particles in the liquid metal abrasive flow will reciprocate and oscillate along the axial direction of the blind hole, making the abrasive movement in the liquid metal abrasive flow more disordered, thereby further accelerating the blind hole polishing of the workpiece to be processed until the blind hole polishing of the workpiece to be processed is completed.

所述步骤八过程中通过调节外接的正弦交流电源的频率和电压对三相定子线圈302产生的旋转磁场的旋转速度和强度进行控制,实现液态金属抛光液内金属粒子运动情况的改变,进而实现抛光效率的改变。In the step eight, the rotation speed and intensity of the rotating magnetic field generated by the three-phase stator coil 302 are controlled by adjusting the frequency and voltage of the external sinusoidal AC power supply, thereby changing the movement of metal particles in the liquid metal polishing liquid and thus changing the polishing efficiency.

上述实施例只是本发明的较佳实施例,并不是对本发明技术方案的限制,只要是不经过创造性劳动即可在上述实施例的基础上实现的技术方案,均应视为落入本发明专利的权利保护范围内。The above embodiments are only preferred embodiments of the present invention and are not limitations of the technical solutions of the present invention. Any technical solution that can be implemented on the basis of the above embodiments without creative work should be deemed to fall within the scope of protection of the patent of the present invention.

Claims (8)

Translated fromChinese
1.一种用于导电工件盲孔抛光的负压抛光装置,其特征在于:包括工作台(5)、移动定位装置(1)、旋转流道装置(2)和旋转磁场装置(3),移动定位装置(1)安装在工作台(5)上,旋转流道装置(2)安装在移动定位装置(1)上,旋转磁场装置(3)固定在旋转流道装置(2)斜下方的工作台(5)上;1. A negative pressure polishing device for polishing blind holes of conductive workpieces, characterized in that it comprises a workbench (5), a mobile positioning device (1), a rotating flow channel device (2) and a rotating magnetic field device (3), wherein the mobile positioning device (1) is mounted on the workbench (5), the rotating flow channel device (2) is mounted on the mobile positioning device (1), and the rotating magnetic field device (3) is fixed on the workbench (5) obliquely below the rotating flow channel device (2);所述移动定位装置(1)包括水平模组安装架(101)、水平直线模组(102)、水平模组驱动电机(107)、竖直直线模组(106)和竖直模组驱动电机(105),所述水平模组安装架(101)固定在工作台(5)上;所述水平直线模组(102)水平固定在水平模组安装架(101)上,所述水平模组驱动电机(107)固定在水平直线模组(102)的一端,水平模组驱动电机(107)的驱动轴连接水平直线模组(102)并驱动水平直线模组(102)上的水平滑块(103)沿着水平方向做直线运动;所述竖直直线模组(106)竖直固定在水平直线模组(102)的水平滑块(103)上,竖直模组驱动电机(105)固定在竖直直线模组(106)的上端,竖直模组驱动电机(105)的驱动轴连接竖直直线模组(106)并驱动竖直直线模组(106)上的竖直滑块(104)沿着竖直方向做直线运动;所述旋转流道装置(2)安装在竖直直线模组(106)的竖直滑块(104)上,所述旋转磁场装置(3)安装在水平模组安装架(101)旁边的工作台(5)上;旋转磁场装置(3)和旋转流道装置(2)设置在竖直滑块(104)的同一侧;The mobile positioning device (1) comprises a horizontal module mounting frame (101), a horizontal linear module (102), a horizontal module driving motor (107), a vertical linear module (106) and a vertical module driving motor (105); the horizontal module mounting frame (101) is fixed on a workbench (5); the horizontal linear module (102) is horizontally fixed on the horizontal module mounting frame (101); the horizontal module driving motor (107) is fixed on one end of the horizontal linear module (102); the driving shaft of the horizontal module driving motor (107) is connected to the horizontal linear module (102) and drives the horizontal slider (103) on the horizontal linear module (102) to perform linear motion along the horizontal direction; the vertical linear module The group (106) is vertically fixed on the horizontal slider (103) of the horizontal linear module (102); the vertical module drive motor (105) is fixed on the upper end of the vertical linear module (106); the drive shaft of the vertical module drive motor (105) is connected to the vertical linear module (106) and drives the vertical slider (104) on the vertical linear module (106) to perform linear motion along the vertical direction; the rotating flow channel device (2) is installed on the vertical slider (104) of the vertical linear module (106); the rotating magnetic field device (3) is installed on the workbench (5) next to the horizontal module mounting frame (101); the rotating magnetic field device (3) and the rotating flow channel device (2) are arranged on the same side of the vertical slider (104);所述旋转磁场装置(3)包括支撑块(301)、旋转从动盘(304)、三相定子线圈(302)、法兰型过电滑环(306)、导电铜片(307)和定子线圈固定座(303),所述支撑块(301)固定在工作台(5)上,支撑块(301)上设置有一个倾斜向上的安装斜面;安装斜面上开设有用于安装定子线圈固定座(303)的圆形凹槽(310)和用于安装法兰型过电滑环(306)的电滑环安装凹槽;所述电滑环安装凹槽与圆形凹槽(310)同轴心设置且电滑环安装凹槽设置在圆形凹槽(310)内部,所述定子线圈固定座(303)内嵌在安装斜面的圆形凹槽(310)内,所述法兰型过电滑环(306)内嵌在斜面的电滑环安装槽内,所述法兰型过电滑环(306)的定子端固定安装在电滑环安装槽内,法兰型过电滑环(306)的转子端与旋转从动盘(304)的固定端固定连接;旋转从动盘(304)上设置有工件安装槽,旋转从动盘(304)的工件安装槽内壁上设置有导电铜片(307),导电铜片(307)与法兰型过电滑环(306)的转子端的导线相连接,法兰型过电滑环(306)的定子端的导线连接外置方波交流电源的一根输入线;所述三相定子线圈(302)固定在定子线圈固定座(303)上,三相定子线圈(302)环绕整个旋转从动盘(304)设置;三相定子线圈(302)的输入端连接外置的正弦交流电源;The rotating magnetic field device (3) comprises a support block (301), a rotating driven disk (304), a three-phase stator coil (302), a flange-type electric slip ring (306), a conductive copper sheet (307) and a stator coil fixing seat (303); the support block (301) is fixed on a workbench (5); a mounting bevel inclined upward is provided on the support block (301); a circular groove (310) for mounting the stator coil fixing seat (303) and an electric slip ring mounting groove for mounting the flange-type electric slip ring (306) are provided on the mounting bevel; the electric slip ring mounting groove is coaxially arranged with the circular groove (310) and the electric slip ring mounting groove is arranged inside the circular groove (310); the stator coil fixing seat (303) is embedded in the circular groove (310) of the mounting bevel; the flange-type electric slip ring (306) is embedded in the circular groove (310) of the mounting bevel; The stator end of the flange-type electric slip ring (306) is fixedly installed in the electric slip ring installation groove of the inclined surface, and the rotor end of the flange-type electric slip ring (306) is fixedly connected to the fixed end of the rotating driven disk (304); a workpiece installation groove is provided on the rotating driven disk (304), and a conductive copper sheet (307) is provided on the inner wall of the workpiece installation groove of the rotating driven disk (304), and the conductive copper sheet (307) is connected to the conductive wire of the rotor end of the flange-type electric slip ring (306), and the conductive wire of the stator end of the flange-type electric slip ring (306) is connected to an input line of an external square wave AC power supply; the three-phase stator coil (302) is fixed on the stator coil fixing seat (303), and the three-phase stator coil (302) is arranged around the entire rotating driven disk (304); the input end of the three-phase stator coil (302) is connected to an external sinusoidal AC power supply;所述旋转流道装置(2)包括旋转夹持头(201)、旋转接头(212)、旋转接头固定座(206)、流道固定板(207)、滑轨连接板(205)、抽气口单向阀(210)、气液磨粒流接头(208)、磨粒流入口阀(209)、流道接头(211)、空心流道(202)、旋转接头(212)、法兰盘(219)、旋转驱动电机(214)、旋转主动轮(224)、旋转从动轮(217)、旋转同步带(216)、环形过电滑环(213)、电滑环固定座(203)、电滑环定子端导线(204)、滑环转子端导线(221)、导电铜环(223)和主夹持端O型圈(222),所述滑轨连接板(205)竖直安装在竖直直线模组(106)的竖直滑块(104)上,流道固定板(207)固定安装在滑轨连接板(205)上,所述旋转接头固定座(206)和电滑环固定座(203)均固定安装在流道固定板(207)上,所述旋转接头(212)安装在旋转接头固定座(206)上,所述旋转接头(212)安装时旋转接头(212)的轴心线平行于旋转从动盘(304)的轴心线;所述旋转接头(212)靠近旋转磁场模块的一端为旋转接头(212)的旋转端,空心流道(202)的一端与旋转接头(212)的旋转端固定连接,空心流道(202)的另一端套装有法兰盘(219),旋转夹持头(201)安装在法兰盘(219)上,旋转夹持头(201)正对旋转流道装置(2)的安装斜面,旋转夹持头(201)的轴心线与安装斜面垂直设置,所述空心流道(202)安装时空心流道(202)的轴心线平行于旋转从动盘(304)和旋转夹持头(201)的轴心线;所述环形过电滑环(213)安装在电滑环固定座(203)上,环形过电滑环(213)套装在空心流道(202)上;所述环形过电滑环(213)通过电滑环定子端导线(204)连接外置的方波交流电源的另一根输入线;所述空心流道(202)上设置有第一转子导线槽,第一转子导线槽沿着空心流道(202)的外壁延伸到空心流道(202)连接法兰盘(219)的一端的端面上,所述法兰盘(219)上设置有第二转子导线槽,第二转子导线槽的一端与空心流道(202)上的第一转子导线槽连通,第二转子导线槽的另一端延伸到法兰盘(219)用于装夹待加工工件一端的端面上,导电铜环(223)安装在法兰盘(219)用于装夹待加工工件的一端,滑环转子端导线(221)嵌装在第一转子导线槽和第二转子导线槽内,滑环转子端导线(221)的一端与环形过电滑环(213)贴合,滑环转子端导线(221)的另一端与导电铜环(223)连接;待加工工件的两端分别通过旋转夹持头(201)和旋转从动盘(304)夹持,待加工工件的盲孔位于旋转夹持头(201)一端,待加工工件装夹在旋转夹持头(201)上时导电铜环(223)与待加工工件贴合;所述旋转接头(212)的另一端为旋转接头(212)的固定端,旋转接头(212)的固定端通过流道接头(211)连接气液磨粒流接头(208),所述气液磨粒流接头(208)设置有三个出入口,分别为磨粒流入口端、磨粒流出口端和抽气端,磨粒流入口端、磨粒流出口端和抽气端相互连通,气液磨粒流接头(208)的磨粒流出口端连接流道接头(211),气液磨粒流接头(208)的磨粒流入口端通过磨粒流入口阀(209)和磨粒流管道连接外置的液态金属磨粒流发生装置,所述液态金属磨粒流发生装置产出的磨粒流为液态金属磨粒流,气液磨粒流接头(208)的抽气端通过抽气口单向阀(210)和抽气管道连接外置的抽气装置,所述气液磨粒流接头(208)、流道接头(211)、空心流道(202)和旋转夹持头(201)共同构成旋转流道装置的流道部分,气液磨粒流接头、流道接头、空心流道(202)和旋转夹持头的高度依次降低;The rotating flow channel device (2) comprises a rotating clamping head (201), a rotating joint (212), a rotating joint fixing seat (206), a flow channel fixing plate (207), a slide rail connecting plate (205), an air extraction port one-way valve (210), a gas-liquid abrasive flow joint (208), an abrasive flow inlet valve (209), a flow channel joint (211), a hollow flow channel (202), a rotating joint (212), a flange (219), a rotating drive motor (214), a rotating driving wheel (224), a rotating driven wheel (217), a rotating synchronous belt (216), an annular flow channel (202), a rotating drive motor (214), a rotating driving wheel (224), a rotating driven wheel (217), a rotating synchronous belt (216), and a ring-shaped flow channel. An electric slip ring (213), an electric slip ring fixing seat (203), an electric slip ring stator end wire (204), a slip ring rotor end wire (221), a conductive copper ring (223) and a main clamping end O-ring (222); the slide rail connecting plate (205) is vertically mounted on a vertical slider (104) of a vertical linear module (106); the flow channel fixing plate (207) is fixedly mounted on the slide rail connecting plate (205); the rotary joint fixing seat (206) and the electric slip ring fixing seat (203) are both fixedly mounted on the flow channel fixing plate (207); the rotary joint (212) is installed The rotary joint (212) is mounted on a rotary joint fixing seat (206); when the rotary joint (212) is installed, the axis of the rotary joint (212) is parallel to the axis of the rotating driven disk (304); one end of the rotary joint (212) close to the rotating magnetic field module is the rotating end of the rotary joint (212); one end of the hollow flow channel (202) is fixedly connected to the rotating end of the rotary joint (212); the other end of the hollow flow channel (202) is sleeved with a flange (219); the rotary clamping head (201) is mounted on the flange (219); the rotary clamping head (201) is directly opposite to the rotary flow channel The device (2) has an installation slope, the axis of the rotating clamping head (201) is arranged perpendicular to the installation slope, and when the hollow flow channel (202) is installed, the axis of the hollow flow channel (202) is parallel to the axis of the rotating driven disk (304) and the rotating clamping head (201); the annular electric slip ring (213) is installed on the electric slip ring fixing seat (203), and the annular electric slip ring (213) is sleeved on the hollow flow channel (202); the annular electric slip ring (213) is connected to another input line of an external square wave AC power supply through the electric slip ring stator end wire (204); the A first rotor wire groove is provided on the hollow flow channel (202), and the first rotor wire groove extends along the outer wall of the hollow flow channel (202) to the end surface of one end of the hollow flow channel (202) connected to the flange (219). A second rotor wire groove is provided on the flange (219), and one end of the second rotor wire groove is connected to the first rotor wire groove on the hollow flow channel (202), and the other end of the second rotor wire groove extends to the end surface of one end of the flange (219) for clamping the workpiece to be processed. The conductive copper ring (223) is installed on the flange (219) for clamping the workpiece to be processed. one end of the slip ring rotor end wire (221) is embedded in the first rotor wire slot and the second rotor wire slot, one end of the slip ring rotor end wire (221) is in contact with the annular electric slip ring (213), and the other end of the slip ring rotor end wire (221) is connected to the conductive copper ring (223); the two ends of the workpiece to be processed are clamped by the rotating clamping head (201) and the rotating driven disk (304), respectively, the blind hole of the workpiece to be processed is located at one end of the rotating clamping head (201), and the conductive copper ring (223) is in contact with the workpiece to be processed when the workpiece to be processed is clamped on the rotating clamping head (201); The other end of the rotary joint (212) is the fixed end of the rotary joint (212), and the fixed end of the rotary joint (212) is connected to the gas-liquid abrasive flow joint (208) via a flow channel joint (211). The gas-liquid abrasive flow joint (208) is provided with three inlets and outlets, namely an abrasive flow inlet end, an abrasive flow outlet end and an air extraction end. The abrasive flow inlet end, the abrasive flow outlet end and the air extraction end are interconnected. The abrasive flow outlet end of the gas-liquid abrasive flow joint (208) is connected to the flow channel joint (211), and the abrasive flow inlet end of the gas-liquid abrasive flow joint (208) is connected to the flow channel joint (211). The ... 9) an external liquid metal abrasive flow generating device is connected to the abrasive flow pipeline, the abrasive flow generated by the liquid metal abrasive flow generating device is a liquid metal abrasive flow, the suction end of the gas-liquid abrasive flow joint (208) is connected to the external suction device via a suction port one-way valve (210) and the suction pipeline, the gas-liquid abrasive flow joint (208), the flow channel joint (211), the hollow flow channel (202) and the rotating clamping head (201) together constitute the flow channel part of the rotating flow channel device, and the heights of the gas-liquid abrasive flow joint, the flow channel joint, the hollow flow channel (202) and the rotating clamping head are successively reduced;旋转夹持头(201)包括法兰状的固定法兰端和用于固定待加工工件的主安装端,旋转夹持头(201)的固定法兰端与法兰盘(219)固定连接,旋转夹持头(201)的主安装端上设置有与待加工工件的加工端形状相配合的工件安装主槽,待加工工件的加工端安装在工件安装主槽内,旋转夹持头(201)的工件安装主槽设置有用于防止待加工工件的加工端滑动的主夹持端O型圈(222),主夹持端O型圈(222)的内圈贴合并套装在待加工工件的加工端,主夹持端O型圈(222)的外圈贴合工件安装主槽的内壁;所述旋转从动盘(304)包括圆柱状的固定端和用于固定待加工工件的副安装端,旋转从动盘(304)的固定端固定在支撑块(301)的圆形凹槽(310)内,所述旋转从动盘(304)的副安装端内设置有与待加工工件后端形状相配合的工件安装副槽,待加工工件的后端安装在工件安装副槽内,旋转从动盘(304)的工件安装副槽底部设置有用于防止待加工工件滑动的副夹持端O型圈,副夹持端O型圈的内圈贴合并套装在待加工工件的后端,副夹持端O型圈的外圈贴合工件安装副槽的内壁,所述导电铜环(223)设置在主夹持端O型圈(222)的内壁上,所述导电铜片(307)设置在副夹持端O型圈的内壁上;The rotary clamping head (201) comprises a flange-shaped fixed flange end and a main mounting end for fixing a workpiece to be processed. The fixed flange end of the rotary clamping head (201) is fixedly connected to the flange plate (219). The main mounting end of the rotary clamping head (201) is provided with a workpiece mounting main groove matching the shape of the processing end of the workpiece to be processed. The processing end of the workpiece to be processed is installed in the workpiece mounting main groove. The workpiece mounting main groove of the rotary clamping head (201) is provided with a main clamping end O-ring (222) for preventing the processing end of the workpiece to be processed from sliding. The inner ring of the main clamping end O-ring (222) fits and is sleeved on the processing end of the workpiece to be processed. The outer ring of the main clamping end O-ring (222) fits the inner wall of the workpiece mounting main groove. The rotary driven disk (304) comprises a cylindrical fixed end and A secondary mounting end for fixing a workpiece to be processed, the fixed end of the rotating driven disk (304) is fixed in a circular groove (310) of the support block (301), a workpiece mounting secondary groove matching the shape of the rear end of the workpiece to be processed is arranged in the secondary mounting end of the rotating driven disk (304), the rear end of the workpiece to be processed is mounted in the workpiece mounting secondary groove, a secondary clamping end O-ring for preventing the workpiece to be processed from sliding is arranged at the bottom of the workpiece mounting secondary groove of the rotating driven disk (304), the inner ring of the secondary clamping end O-ring is fitted and sleeved on the rear end of the workpiece to be processed, the outer ring of the secondary clamping end O-ring is fitted on the inner wall of the workpiece mounting secondary groove, the conductive copper ring (223) is arranged on the inner wall of the main clamping end O-ring (222), and the conductive copper sheet (307) is arranged on the inner wall of the secondary clamping end O-ring;所述空心流道(202)的轴心线和旋转从动盘(304)的固定端的轴心线均与水平面倾斜30-60度角,且空心流道(202)的轴心线和旋转从动盘(304)的固定端的轴心线均与支撑块(301)的安装斜面相垂直。The axis centerline of the hollow flow channel (202) and the axis centerline of the fixed end of the rotating driven disk (304) are both inclined at an angle of 30-60 degrees to the horizontal plane, and the axis centerline of the hollow flow channel (202) and the axis centerline of the fixed end of the rotating driven disk (304) are both perpendicular to the installation inclined surface of the support block (301).2.根据权利要求1所述的一种用于导电工件盲孔抛光的负压抛光装置,其特征在于:水平直线模组(102)通过螺栓固定在水平模组安装架(101)上,水平模组安装架(101)通过螺栓固定在工作台(5)上,竖直直线模组(106)通过螺栓固定在水平直线模组(102)的水平滑块(103)上。2. A negative pressure polishing device for polishing blind holes of conductive workpieces according to claim 1, characterized in that: the horizontal linear module (102) is fixed to the horizontal module mounting frame (101) by bolts, the horizontal module mounting frame (101) is fixed to the workbench (5) by bolts, and the vertical linear module (106) is fixed to the horizontal slider (103) of the horizontal linear module (102) by bolts.3.根据权利要求1所述的一种用于导电工件盲孔抛光的负压抛光装置,其特征在于:所述气液磨粒流接头(208)为方形接头,气液磨粒流接头(208)固定在滑轨连接板(205)上。3. A negative pressure polishing device for polishing blind holes of conductive workpieces according to claim 1, characterized in that: the gas-liquid abrasive flow joint (208) is a square joint, and the gas-liquid abrasive flow joint (208) is fixed on the slide rail connecting plate (205).4.根据权利要求1所述的一种用于导电工件盲孔抛光的负压抛光装置,其特征在于:所述旋转接头固定座(206)包括流道固定底座和流道固定上座,流道固定底座和流道固定上座上均设置有与空心流道(202)相配合的弧形槽,流道固定底座和流道固定上座共同将空心流道(202)夹持住,流道固定底座和流道固定上座通过螺栓固定连接。4. According to claim 1, a negative pressure polishing device for polishing blind holes of conductive workpieces is characterized in that: the rotary joint fixing seat (206) includes a flow channel fixing base and a flow channel fixing upper seat, and the flow channel fixing base and the flow channel fixing upper seat are both provided with an arc groove matching the hollow flow channel (202), the flow channel fixing base and the flow channel fixing upper seat jointly clamp the hollow flow channel (202), and the flow channel fixing base and the flow channel fixing upper seat are fixedly connected by bolts.5.根据权利要求1所述的一种用于导电工件盲孔抛光的负压抛光装置,其特征在于:所述支撑块(301)为直角三棱柱状的支撑块(301),支撑块(301)上设置有两个直角面和一个安装斜面,支撑块(301)的直角面固定安装在工作台(5)上,旋转从动盘(304)通过转盘底座安装在支撑块的安装斜面上。5. A negative pressure polishing device for polishing blind holes in conductive workpieces according to claim 1, characterized in that: the support block (301) is a right-angled triangular prism-shaped support block (301), and the support block (301) is provided with two right-angled surfaces and a mounting bevel, the right-angled surface of the support block (301) is fixedly mounted on the workbench (5), and the rotating driven disk (304) is mounted on the mounting bevel of the support block through a turntable base.6.根据权利要求1所述的一种用于导电工件盲孔抛光的负压抛光装置,其特征在于:所述空心流道(202)的中部设置有用于安装环形过电滑环(213)的中部定位安装螺纹,所述空心流道(202)靠近旋转接头(212)的一端设置有用于连接旋转接头(212)的尾端定位安装螺纹,所述空心流道(202)靠近法兰盘(219)的一端设置有用于连接法兰盘(219)的凸台;空心流道(202)的两端与法兰盘(219)和旋转接头(212)的连接均为密封连接。6. A negative pressure polishing device for polishing blind holes of conductive workpieces according to claim 1, characterized in that: a middle positioning installation thread for installing an annular current-carrying slip ring (213) is provided in the middle of the hollow flow channel (202), a tail positioning installation thread for connecting the rotary joint (212) is provided at one end of the hollow flow channel (202) close to the rotary joint (212), and a boss for connecting the flange (219) is provided at one end of the hollow flow channel (202) close to the flange (219); the connections between the two ends of the hollow flow channel (202) and the flange (219) and the rotary joint (212) are both sealed connections.7.一种用于导电工件盲孔抛光的负压抛光方法,采用如权利要求1所述的一种用于导电工件盲孔抛光的负压抛光装置,其特征在于:具体包括如下步骤:7. A negative pressure polishing method for polishing blind holes of conductive workpieces, using a negative pressure polishing device for polishing blind holes of conductive workpieces as claimed in claim 1, characterized in that it specifically comprises the following steps:步骤一:将待加工工件的底端通过副夹持端O型圈安装在旋转从动盘(304)上;Step 1: Mount the bottom end of the workpiece to be processed on the rotating driven disk (304) through the auxiliary clamping end O-ring;步骤二:启动竖直模组驱动电机(105),通过带动竖直直线模组(106)上的竖直滑块(104)向下直线运动,带动旋转夹持头(201)向下运动,使旋转夹持头(201)靠近旋转从动盘(304)上的待加工工件;Step 2: starting the vertical module drive motor (105) to drive the vertical slider (104) on the vertical linear module (106) to move linearly downward, thereby driving the rotary clamping head (201) to move downward, so that the rotary clamping head (201) is close to the workpiece to be processed on the rotary driven disk (304);步骤三:启动水平模组驱动电机(107),通过带动水平直线模组(102)上的水平滑块(103)的水平运动,带动旋转夹持头(201)在水平方向上向待加工工件方向移动,当达到合适位置后停止水平模组驱动电机(107);Step 3: Start the horizontal module drive motor (107), drive the horizontal slider (103) on the horizontal linear module (102) to move horizontally, and drive the rotary clamping head (201) to move horizontally toward the workpiece to be processed, and stop the horizontal module drive motor (107) when the appropriate position is reached;步骤四:重复步骤二和步骤三,使待加工工件和旋转夹持头(201)逐渐靠近,直至待加工工件的加工端完全伸入旋转夹持头(201)内,且旋转夹持头(201)内的主夹持端O型圈(222)完全套装在待加工工件的加工端上,此时待加工工件被旋转夹持头(201)和旋转从动盘(304)共同夹紧,待加工工件的盲孔与空心流道(202)相连通;Step 4: Repeat steps 2 and 3 to gradually bring the workpiece to be processed and the rotary clamping head (201) closer together until the processing end of the workpiece to be processed is completely inserted into the rotary clamping head (201), and the main clamping end O-ring (222) in the rotary clamping head (201) is completely mounted on the processing end of the workpiece to be processed. At this time, the workpiece to be processed is clamped by the rotary clamping head (201) and the rotary driven disk (304), and the blind hole of the workpiece to be processed is connected to the hollow flow channel (202);步骤五:关闭磨粒流入口阀(209),打开抽气口单向阀(210)并启动抽气装置,利用抽气口单向阀(210)通过抽气管道连接抽气装置进行抽气,使待加工工件的盲孔和空心流道(202)内部处于负压状态;Step 5: close the abrasive inlet valve (209), open the exhaust port check valve (210) and start the exhaust device, and use the exhaust port check valve (210) to connect the exhaust device through the exhaust pipeline to exhaust air, so that the blind hole and the hollow flow channel (202) of the workpiece to be processed are in a negative pressure state;步骤六:待加工工件的盲孔内部处于负压状态后关闭抽气装置,由于抽气口单向阀(210)只允许气体单向流动,所以待加工工件的盲孔内部一直保持负压状态,此时打开磨粒流入口阀(209)并启动液态金属磨粒流发生装置,使液态金属磨粒流发生装置中产生的液态金属磨粒流依次流经磨粒流入口阀(209)、气液磨粒流接头(208)、流道接头(211)和旋转接头(212)进入空心流道(202)中,由于待加工工件的盲孔和空心流道(202)均处于负压状态,液态金属磨粒流会直接流入待加工工件的盲孔内;Step 6: After the blind hole of the workpiece to be processed is in a negative pressure state, the exhaust device is closed. Since the exhaust port one-way valve (210) only allows gas to flow in one direction, the blind hole of the workpiece to be processed is always kept in a negative pressure state. At this time, the abrasive flow inlet valve (209) is opened and the liquid metal abrasive flow generating device is started, so that the liquid metal abrasive flow generated in the liquid metal abrasive flow generating device flows through the abrasive flow inlet valve (209), the gas-liquid abrasive flow joint (208), the flow channel joint (211) and the rotary joint (212) in sequence and enters the hollow flow channel (202). Since the blind hole of the workpiece to be processed and the hollow flow channel (202) are both in a negative pressure state, the liquid metal abrasive flow will directly flow into the blind hole of the workpiece to be processed;步骤七:液态金属磨粒流注入完毕后关闭磨粒流入口阀(209),打开旋转驱动电机(214),旋转驱动电机(214)通过旋转主动轮(224)、旋转从动轮(217)和旋转同步带(216)组成的同步带机构带动旋转接头(212)的活动端、空心流道(202)、法兰盘(219)、旋转夹持头(201)和待加工工件组成的整体进行旋转;Step 7: After the liquid metal abrasive flow is injected, the abrasive flow inlet valve (209) is closed, and the rotary drive motor (214) is turned on. The rotary drive motor (214) drives the movable end of the rotary joint (212), the hollow flow channel (202), the flange (219), the rotary clamping head (201) and the workpiece to be processed to rotate through a synchronous belt mechanism composed of a rotating driving wheel (224), a rotating driven wheel (217) and a rotating synchronous belt (216);步骤八:打开与三相定子线圈(302)相连的正弦交流电源,由于三相定子线圈(302)在交流电场下会产生旋转磁场,三相定子线圈(302)工作时产生的旋转磁场带动液态金属抛光液内的金属粒子运动,加快液态金属抛光液内的磨粒旋转撞击待加工工件的盲孔;Step 8: Turn on the sinusoidal AC power supply connected to the three-phase stator coil (302). Since the three-phase stator coil (302) generates a rotating magnetic field under the AC electric field, the rotating magnetic field generated by the three-phase stator coil (302) when working drives the metal particles in the liquid metal polishing liquid to move, thereby accelerating the rotation of the abrasive particles in the liquid metal polishing liquid to hit the blind hole of the workpiece to be processed;步骤九:打开外置的方波交流电源,通过与环形过电滑环(213)、滑环转子端导线(221)、导电铜片(307)、待加工工件、导电铜环(223)和法兰型过电滑环(306)组成的闭合回路向待加工工件施加方波交流电,在方波交流电的作用下待加工工件内部会形成交流的电场,在交流电场的作用下,液态金属磨粒流中的金属粒子会沿着盲孔的轴向进行往复振荡运动,使液态金属磨粒流中磨粒运动更加无序,从而进一步加快待加工工件的盲孔抛光,直至完成待加工工件的盲孔抛光。Step nine: Turn on the external square wave AC power supply, and apply square wave AC power to the workpiece to be processed through a closed loop composed of the annular current passing slip ring (213), the slip ring rotor end conductor (221), the conductive copper sheet (307), the workpiece to be processed, the conductive copper ring (223) and the flange type current passing slip ring (306). Under the action of the square wave AC power, an AC electric field is formed inside the workpiece to be processed. Under the action of the AC electric field, the metal particles in the liquid metal abrasive flow will reciprocate and oscillate along the axial direction of the blind hole, making the abrasive particles in the liquid metal abrasive flow more disordered, thereby further accelerating the blind hole polishing of the workpiece to be processed until the blind hole polishing of the workpiece to be processed is completed.8.根据权利要求7所述的一种用于导电工件盲孔抛光的负压抛光方法,其特征在于:所述步骤八过程中通过调节外接的正弦交流电源的频率和电压对三相定子线圈(302)产生的旋转磁场的旋转速度和强度进行控制,实现液态金属抛光液内金属粒子运动情况的改变,进而实现抛光效率的改变。8. A negative pressure polishing method for blind hole polishing of a conductive workpiece according to claim 7, characterized in that: during the step eight, the frequency and voltage of the externally connected sinusoidal AC power supply are adjusted to control the rotation speed and intensity of the rotating magnetic field generated by the three-phase stator coil (302), thereby changing the movement of metal particles in the liquid metal polishing liquid, thereby changing the polishing efficiency.
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