技术领域technical field
本发明实施例涉及微流控系统技术领域，具体涉及一种交流电渗驱动乙醇非对称型微泵及工作方法。The embodiments of the present invention relate to the technical field of microfluidic systems, and in particular to an AC electroosmosis-driven ethanol asymmetrical micropump and a working method.
背景技术Background technique
随着电子元器件性能及微型化的发展，对散热的要求越来越高。微电子器件的可靠性对温度非常敏感，电子器件的温度上升会大大降低其可靠性。器件温度在70℃∽80℃的水平上每增加1℃，其可靠性将下降5％。未来智能化的发展要求CPU速度要提高2∽3个数量级，现有的气冷技术已经无法满足其散热的需求，因此需要开发新的液冷技术。随着微流控系统的发展，微泵成为了微流体控制及微电子冷却系统中的关键技术。With the development of performance and miniaturization of electronic components, the requirements for heat dissipation are getting higher and higher. The reliability of microelectronic devices is very sensitive to temperature, and the temperature rise of electronic devices will greatly reduce their reliability. For every 1°C increase in device temperature at the level of 70°C∽80°C, its reliability will drop by 5%. The development of intelligence in the future requires the CPU speed to be increased by 2∽3 orders of magnitude. The existing air-cooling technology can no longer meet its heat dissipation requirements, so it is necessary to develop a new liquid-cooling technology. With the development of microfluidic systems, micropumps have become a key technology in microfluidic control and microelectronic cooling systems.
在微流控系统中，液体的微流量驱动与控制技术始终是一项较为关键的技术难题。微流体的控制是指对特征尺寸小于1mm的系统或器件里的流体的控制，而精确控制微流体的驱动技术是微流控系统发展的必然要求。因此微流控系统要求集成有可控的用于泵出小体积微流体的微泵，并且微泵的研究已经成为微流控系统发展水平的重要标志。In the microfluidic system, the micro-flow drive and control technology of liquid is always a key technical problem. The control of microfluidics refers to the control of fluids in systems or devices with a characteristic size of less than 1mm, and the precise control of microfluidic drive technology is an inevitable requirement for the development of microfluidic systems. Therefore, microfluidic systems require the integration of controllable micropumps for pumping out small-volume microfluids, and the research on micropumps has become an important symbol of the development level of microfluidic systems.
依据工作原理，微泵从结构上分为机械式微泵和非机械式微泵，两者的主要区别在于有无运动部件。目前，机械式微泵主要包括：压电微泵、电磁微泵、静电微泵、形状记忆合金微泵及热驱动微泵等。机械式微泵发展历史悠久，理论成熟，几乎可以驱动任何类型的液体，因为它含有运动件，在微泵内部易产生摩擦、抽速不稳定、有微渗漏、寿命短、不易与芯片集成等不足，泵的可靠性大大降低。非机械式微泵成为微泵研究的新方向。According to the working principle, micropumps are structurally divided into mechanical micropumps and non-mechanical micropumps. The main difference between the two is whether there are moving parts. At present, mechanical micropumps mainly include: piezoelectric micropumps, electromagnetic micropumps, electrostatic micropumps, shape memory alloy micropumps, and heat-driven micropumps. Mechanical micropumps have a long history of development and mature theories, and can drive almost any type of liquid, because it contains moving parts, which are prone to friction inside the micropump, unstable pumping speed, micro-leakage, short life, and difficult integration with chips, etc. Insufficient, the reliability of the pump is greatly reduced. Non-mechanical micropumps have become a new direction of micropump research.
电渗流微泵是目前最主要的非机械微泵，具有易于加工和控制、无需移动部件、较高的可重复性和可靠性等优点。根据施加的电压类型可以分为直流电渗驱动微泵和交流电渗驱动微泵。直流电渗驱动微泵具有流量可调、范围宽、无活塞、无阀、无动态密封、制造成本低和设计简洁等优点，是一种有效的驱动液体的方式。其缺点是需要高压、直流电渗流体驱动技术需要极高的直流电压(高达几千伏)，存在安全隐患，容易发生电解反应产生气泡,产生大量热,进而影响微流体流动的稳定性。由于电压很大，有一定的危害性，因此直流电渗泵的适用范围受到一定的限制。与传统的直流电驱动方法相比，交流电驱动方式具有施加电压低(其输入信号电压幅值一般小于4V)、能很好地抑制电解反应，易于与其它微器件集成等优点，因此交流电渗驱动技术具有重要的应用价值。Electroosmotic flow micropumps are currently the most important non-mechanical micropumps, which have the advantages of easy processing and control, no moving parts, high repeatability and reliability. According to the type of applied voltage, it can be divided into DC electroosmotic driven micropump and AC electroosmotic driven micropump. DC electroosmosis-driven micropump has the advantages of adjustable flow rate, wide range, no piston, no valve, no dynamic seal, low manufacturing cost and simple design, and is an effective way to drive liquid. The disadvantage is that it requires high voltage and DC electroosmotic fluid drive technology requires extremely high DC voltage (up to several thousand volts), which has potential safety hazards, and is prone to electrolytic reactions to generate bubbles and generate a lot of heat, which in turn affects the stability of microfluidic flow. Due to the high voltage and certain hazards, the scope of application of DC electroosmotic pumps is limited to a certain extent. Compared with the traditional DC driving method, the AC driving method has the advantages of low applied voltage (the input signal voltage amplitude is generally less than 4V), can well suppress the electrolytic reaction, and is easy to integrate with other micro devices. Therefore, the AC electroosmosis driving technology It has important application value.
驱动的液体主要分为水溶液和非水溶液，在生物领域，水溶液的应用较为广泛，而在其他领域，驱动需求最广泛的液体是非水溶液，如甲醇、乙醇等，在微型燃料电池，芯片、集成电路、电器散热等系统系统中应用广泛。目前国际上仅仅进行了交流电渗驱动水溶液的研究,没有关于驱动非水溶液报道。现在国内外驱动非水溶液的方法主要是采用注入型电液动力泵，如离子拖曳泵。The driving liquid is mainly divided into aqueous solution and non-aqueous solution. In the biological field, aqueous solution is widely used, while in other fields, the liquid with the most extensive driving demand is non-aqueous solution, such as methanol, ethanol, etc., in micro fuel cells, chips, integrated circuits , electrical cooling and other systems are widely used. At present, only the research on AC electroosmosis driving aqueous solution has been carried out in the world, and there is no report on driving non-aqueous solution. At present, the method of driving non-aqueous solution at home and abroad is mainly to use injection-type electro-hydraulic power pumps, such as ion drag pumps.
主要原理是在阳极电极施加直流高电压，在阳极表面产生电化学反应。阳极金属电极材料在高电压作用下产生阳离子，或液体通过电化学反应产生离子，离子随后注入到液体。注入到液体中的阳离子在电场的作用下被驱动。由于粘性力作用，阳离子的能量转移到流体中，使得流体流动。这一方法优点在于基本上对所有溶液都可以驱动，包括不含有电荷的有机溶液，缺点是电压较高，消耗阳极材料，造成这种方法制成的微泵很快就失效。The main principle is to apply a DC high voltage to the anode electrode to generate an electrochemical reaction on the surface of the anode. The anode metal electrode material generates cations under high voltage, or the liquid generates ions through an electrochemical reaction, and the ions are then injected into the liquid. The cations injected into the liquid are driven under the action of an electric field. Due to viscous forces, the energy of the cations is transferred into the fluid, causing the fluid to flow. The advantage of this method is that it can drive basically all solutions, including organic solutions that do not contain charges. The disadvantage is that the voltage is high and the anode material is consumed, causing the micropump made by this method to fail quickly.
目前针对微流控系统中，采用注入型电液动力泵驱动非水溶液具有电压高，寿命短等缺点，造成了非机械式微泵无法大规模应用于微流控系统。At present, for microfluidic systems, the use of injection-type electro-hydraulic power pumps to drive non-aqueous solutions has disadvantages such as high voltage and short life, which prevents non-mechanical micropumps from being widely used in microfluidic systems.
发明内容Contents of the invention
为此，本发明实施例提供一种交流电渗驱动乙醇非对称型微泵及工作方法，采用的交流电渗驱动非对称型微泵，具有电压低，寿命长等优点，可以对乙醇长时间驱动，克服了注入型电液动力泵驱动非水溶液，具有电压高，寿命短等缺点，造成了非机械式微泵无法大规模应用于微流控系统的问题。Therefore, the embodiment of the present invention provides an AC electroosmosis-driven ethanol asymmetric micropump and its working method. The AC electroosmosis-driven asymmetric micropump has the advantages of low voltage and long life, and can drive ethanol for a long time. It overcomes the disadvantages of injection-type electro-hydraulic power pumps driving non-aqueous solutions, such as high voltage and short life, which cause the problem that non-mechanical micropumps cannot be used in large-scale microfluidic systems.
为了实现上述目的，本发明的实施方式提供如下技术方案：In order to achieve the above object, embodiments of the present invention provide the following technical solutions:
一种交流电渗驱动乙醇非对称型微泵，包括镜像对置的第一金属电极和第二金属电极，以及微通道，所述第一金属电极上等间距阵列有大电极，第二金属电极上等间距阵列有小电极，且大电极和小电极顺次交错阵列置于微通道中。An AC electroosmosis-driven ethanol asymmetrical micropump, comprising mirror-opposed first metal electrodes and second metal electrodes, and microchannels, the first metal electrodes have large electrodes in an array at equal intervals, and the second metal electrodes have The equidistant array has small electrodes, and the large electrodes and small electrodes are placed in the microchannel in an alternate array in sequence.
作为本发明的一种优选方案，所述大电极和小电极的宽度之比为10:1，小电极宽度为10～30μm，大电极宽度为100～300μm。As a preferred solution of the present invention, the ratio of the width of the large electrode to the small electrode is 10:1, the width of the small electrode is 10-30 μm, and the width of the large electrode is 100-300 μm.
作为本发明的一种优选方案，所述大电极和小电极之间的间隔为10～30μm，一个大电极和一个小电极组成的电极对与相邻的电极对之间的间距为30～300μm。As a preferred solution of the present invention, the distance between the large electrode and the small electrode is 10-30 μm, and the distance between an electrode pair composed of a large electrode and a small electrode and an adjacent electrode pair is 30-300 μm .
作为本发明的一种优选方案，所述第一金属电极、第二金属电极、大电极以及小电极的材料相同，为为金、铂或铜中的任意一种金属。As a preferred solution of the present invention, the materials of the first metal electrode, the second metal electrode, the large electrode and the small electrode are the same, which is any metal among gold, platinum or copper.
一种交流电渗驱动乙醇非对称型微泵工作方法，其特征在于，包括如下步骤：An AC electroosmosis-driven ethanol asymmetrical micropump working method is characterized in that it comprises the following steps:
S100、在硅、玻璃或聚甲基丙烯酸甲酯上加工该非对称型微泵，并将非对称型微泵的大电极和小电极形成的阵列置于微通道内；S100, processing the asymmetric micropump on silicon, glass or polymethyl methacrylate, and placing the array formed by the large electrode and the small electrode of the asymmetric micropump in the microchannel;
S200、向微通道内注入加了微量氢氧化钾电解质的乙醇溶液，调节乙醇溶液的电导率为5～110uS/cm；S200, injecting an ethanol solution added with a trace amount of potassium hydroxide electrolyte into the microchannel to adjust the conductivity of the ethanol solution to 5-110uS/cm;
S300、将交流电正负极与第一金属电极和第二金属电极连接，施加交流电信号，驱动乙醇溶液流动。S300. Connect the positive and negative poles of the alternating current to the first metal electrode and the second metal electrode, apply an alternating current signal, and drive the ethanol solution to flow.
作为本发明的一种优选方案，在步骤S300中，向第一金属电极和第二金属电极施加的交流电电压为1～10V，交流电频率在5～-500Hz之间。As a preferred solution of the present invention, in step S300, the AC voltage applied to the first metal electrode and the second metal electrode is 1-10V, and the AC frequency is between 5-500 Hz.
本发明的实施方式具有如下优点：Embodiments of the present invention have the following advantages:
本发明在乙醇溶液中添加少量的KOH电解质，可以在较低的电压下就可以驱动乙醇溶液，替代目前采用的高压方法，高压方法主要是通过施加高电压，使阳极金属电极材料产生阳离子，阳离子进入到液体，液体内的阳离子在电场作用下驱动溶液。The present invention adds a small amount of KOH electrolyte to the ethanol solution, which can drive the ethanol solution at a lower voltage, replacing the high-voltage method currently used. The high-voltage method mainly generates cations and cations from the anode metal electrode material by applying a high voltage. Entering the liquid, the cations in the liquid drive the solution under the action of an electric field.
在微电极设计成不对称的宽度，再施加交流电，来降低施加的电压，降低微泵功耗。The microelectrode is designed to have an asymmetric width, and then an alternating current is applied to reduce the applied voltage and reduce the power consumption of the micropump.
附图说明Description of drawings
为了更清楚地说明本发明的实施方式或现有技术中的技术方案，下面将对实施方式或现有技术描述中所需要使用的附图作简单地介绍。显而易见地，下面描述中的附图仅仅是示例性的，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据提供的附图引伸获得其它的实施附图。In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following will briefly introduce the accompanying drawings that are required in the description of the embodiments or the prior art. Apparently, the drawings in the following description are only exemplary, and those skilled in the art can also obtain other implementation drawings according to the provided drawings without creative work.
本说明书所绘示的结构、比例、大小等，均仅用以配合说明书所揭示的内容，以供熟悉此技术的人士了解与阅读，并非用以限定本发明可实施的限定条件，故不具技术上的实质意义，任何结构的修饰、比例关系的改变或大小的调整，在不影响本发明所能产生的功效及所能达成的目的下，均应仍落在本发明所揭示的技术内容得能涵盖的范围内。The structures, proportions, sizes, etc. shown in this manual are only used to cooperate with the content disclosed in the manual, so that people familiar with this technology can understand and read, and are not used to limit the conditions for the implementation of the present invention, so there is no technical In the substantive meaning above, any modification of structure, change of proportional relationship or adjustment of size shall still fall within the scope of the technical content disclosed in the present invention without affecting the functions and objectives of the present invention. within the range that can be covered.
图1为本发明实施方式1中一种交流电渗驱动乙醇非对称型微泵结构示意图；Fig. 1 is a schematic structural diagram of an AC electroosmosis-driven ethanol asymmetric micropump in Embodiment 1 of the present invention;
图2为本发明实施方式2中一种交流电渗驱动乙醇非对称型微泵工作方法实验效果图。FIG. 2 is an experimental effect diagram of an AC electroosmosis-driven ethanol asymmetric micropump working method in Embodiment 2 of the present invention.
图中：In the picture:
1-第一金属电极；2-第二金属电极；3-大电极；4-小电极；5-微通道。1-first metal electrode; 2-second metal electrode; 3-large electrode; 4-small electrode; 5-microchannel.
具体实施方式Detailed ways
以下由特定的具体实施例说明本发明的实施方式，熟悉此技术的人士可由本说明书所揭露的内容轻易地了解本发明的其他优点及功效，显然，所描述的实施例是本发明一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。The implementation mode of the present invention is illustrated by specific specific examples below, and those who are familiar with this technology can easily understand other advantages and effects of the present invention from the contents disclosed in this description. Obviously, the described embodiments are a part of the present invention. , but not all examples. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
实施例1：Example 1:
如图1所示，本发明提供了一种交流电渗驱动乙醇非对称型微泵，包括镜像对置的第一金属电极1和第二金属电极2，以及微通道5，该微泵采用微流控芯片系统的平板印刷术技术，在硅、玻璃、或聚甲基丙烯酸甲酯等材料表面贴附金属电极。As shown in Figure 1, the present invention provides an AC electroosmosis-driven ethanol asymmetrical micropump, which includes a first metal electrode 1 and a second metal electrode 2 that are mirrored opposite each other, and a microchannel 5. The micropump uses microflow The lithography technology of the control chip system attaches metal electrodes on the surface of materials such as silicon, glass, or polymethyl methacrylate.
第一金属电极1上等间距阵列有大电极3，第二金属电极2上等间距阵列有小电极4，且大电极3和小电极4顺次交错阵列置于微通道5中，大电极3和小电极4按照指叉形，顺次交叉排列；On the first metal electrode 1, there are large electrodes 3 in an array at equal intervals, on the second metal electrode 2, there are small electrodes 4 in an array at equal intervals, and the large electrodes 3 and the small electrodes 4 are placed in the microchannel 5 in an alternate array in sequence, and the large electrodes 3 and the small electrodes 4 are interdigitated and arranged sequentially;
通过微加工技术，在硅、玻璃、聚二甲基硅氧烷(PDMS)或聚甲基丙烯酸甲酯等材料表面加工微通道5，Process microchannels on the surface of materials such as silicon, glass, polydimethylsiloxane (PDMS) or polymethylmethacrylate through micromachining techniques5,
将金属大电极3和金属小电极4与微通道5凹槽封装，使金属电极3和金属电极4置于微通道5中，加工制成该非对称型微泵。The large metal electrode 3 and the small metal electrode 4 are packaged with the groove of the microchannel 5, so that the metal electrode 3 and the metal electrode 4 are placed in the microchannel 5, and the asymmetric micropump is manufactured by processing.
金属电极与微通道5封装的方法可以采用胶粘方法，也可以采用等离子键合方法。The method of encapsulating the metal electrode and the microchannel 5 can be an adhesive method or a plasma bonding method.
大电极3和小电极4的宽度之比为10:1，小电极4宽度为10～30μm，大电极3宽度为100～300μm。The width ratio of the large electrode 3 and the small electrode 4 is 10:1, the width of the small electrode 4 is 10-30 μm, and the width of the large electrode 3 is 100-300 μm.
大电极3和小电极4之间的间隔为10～30μm，一个大电极3和一个小电极4组成的电极对与相邻的电极对之间的间距为30～300μm。The distance between the large electrode 3 and the small electrode 4 is 10-30 μm, and the distance between an electrode pair composed of a large electrode 3 and a small electrode 4 and an adjacent electrode pair is 30-300 μm.
第一金属电极1、第二金属电极2、大电极3以及小电极4的材料相同，为为金、铂或铜中的任意一种金属。The materials of the first metal electrode 1 , the second metal electrode 2 , the large electrode 3 and the small electrode 4 are the same, which is any metal among gold, platinum or copper.
交流电渗驱动流体的原理为:当在电极上施加交流电压时,就会在电极的表面形成双电层,双电层呈电容性；在电极上面的液体类似于电阻,呈电阻性。The principle of AC electroosmosis driving fluid is: when an AC voltage is applied to the electrode, an electric double layer will be formed on the surface of the electrode, and the electric double layer is capacitive; the liquid on the electrode is similar to a resistor and is resistive.
前1/2个周期,在两个电极上,双电层中的离子会受到背离圆心方向的电场力F,且力大小相等,方向相反,因此电极表面的流体会向外流动；In the first 1/2 period, on the two electrodes, the ions in the electric double layer will be subjected to an electric field force F away from the center of the circle, and the force is equal in magnitude and opposite in direction, so the fluid on the electrode surface will flow outward;
后1/2个周期内,电场方向发生变化,但是双电层电荷符号也随之改变,因此电场力和流体的受力方向不变。In the last 1/2 period, the direction of the electric field changes, but the sign of the electric double layer charge also changes accordingly, so the electric field force and the force direction of the fluid remain unchanged.
所以在一个周期内,电荷受到的库仑力的方向并没有发生改变,因而形成稳定的流体漩涡。Therefore, in one cycle, the direction of the Coulomb force on the charge does not change, thus forming a stable fluid vortex.
由于系统所受的合力为0,虽然电极表面有电渗流的产生,但是系统中不会产生液体的定向流动。Since the resultant force on the system is 0, although there is electroosmotic flow on the surface of the electrode, there will be no directional flow of liquid in the system.
在对称电极模型,虽然流体可以流动,但是无法形成流体的定向运动，为了使流体沿一个方向流动,必须要打破这种平衡,可行的方法是使用非对称电极。In the symmetrical electrode model, although the fluid can flow, the directional movement of the fluid cannot be formed. In order to make the fluid flow in one direction, this balance must be broken. The feasible method is to use an asymmetric electrode.
当在大电极3、小电极4上分别与交流电正负极相连，施加交流信号后,设某一瞬间小电极上电势为正,大电极3上电势为负,则在小电极4附近的双电层中出现过量的带负电离子,而大电极3附近的双电层中为过量的带正电离子。When the large electrode 3 and the small electrode 4 are respectively connected to the positive and negative poles of the alternating current, after applying the alternating current signal, suppose that the electric potential on the small electrode is positive at a certain moment, and the electric potential on the large electrode 3 is negative, then the double electric potential near the small electrode 4 Excess negatively charged ions appear in the electric layer, while excess positively charged ions appear in the electric double layer near the large electrode 3.
由于此时的电场强度方向由小电极4出发指向大电极3,存在水平向右的分量,因此,小电极4附近的流体由于双电层中负离子的带动会向左运动,而大电极3附近的流体则由于双电层中正离子的带动向右运动,由于电极大小不相等,最终造成流体的净流动方向为从左向右,也即从小电极4指向大电极3；Since the direction of the electric field strength at this time starts from the small electrode 4 and points to the large electrode 3, there is a horizontal component to the right. Therefore, the fluid near the small electrode 4 will move to the left due to the negative ions in the electric double layer, and the fluid near the large electrode 3 will move to the left. The fluid in the electric double layer moves to the right due to the positive ions in the electric double layer. Because the electrodes are not equal in size, the net flow direction of the fluid is from left to right, that is, from the small electrode 4 to the large electrode 3;
当下一时刻电极上的电势方向发生转换以后,小电极4带正电而大电极3带负电,则小电极4附近双电层中为正离子而大电极3为负离子,由于此时电场强度方向为从大电极3指向小电极4,水平分量向左,因此,小电极4附近的流体仍将向左运动而大电极3附近的流体向右运动,最终造成流体的净流动方向仍然为从左向右。When the potential direction on the electrodes changes at the next moment, the small electrode 4 is positively charged and the large electrode 3 is negatively charged, then there are positive ions in the electric double layer near the small electrode 4 and negative ions in the large electrode 3. In order to point from the large electrode 3 to the small electrode 4, the horizontal component is to the left, therefore, the fluid near the small electrode 4 will still move to the left and the fluid near the large electrode 3 will move to the right, and finally the net flow direction of the fluid will still be from the left To the right.
所以,在施加交变电势后,尽管不同时刻施加在电极上的电势会变号,但却会在电解质溶液中产生定向的流动,从而可以实现流体的泵送和输运。Therefore, after applying the alternating potential, although the potential applied to the electrodes will change at different times, a directional flow will be generated in the electrolyte solution, so that the pumping and transportation of the fluid can be realized.
实施例2：Example 2:
一种交流电渗驱动乙醇非对称型微泵工作方法，包括如下步骤：A method for driving an asymmetric ethanol micropump by AC electroosmosis, comprising the following steps:
S100、在硅、玻璃或聚甲基丙烯酸甲酯上加工该非对称型微泵，并将非对称型微泵的大电极和小电极形成的阵列置于微通道内；S100, processing the asymmetric micropump on silicon, glass or polymethyl methacrylate, and placing the array formed by the large electrode and the small electrode of the asymmetric micropump in the microchannel;
通过微流控芯片系统的平板印刷技术，在硅、玻璃、或聚甲基丙烯酸甲酯等材料表面贴附一层金属微电极阵列；Through the lithographic printing technology of the microfluidic chip system, a metal microelectrode array is attached on the surface of silicon, glass, or polymethyl methacrylate and other materials;
在硅、玻璃、聚二甲基硅氧烷(PDMS)或聚甲基丙烯酸甲酯等材料表面加工微通道，将金属微电极阵列与微通道凹槽封装，加工制成该非对称型微泵；Microchannels are processed on the surface of materials such as silicon, glass, polydimethylsiloxane (PDMS) or polymethyl methacrylate, and metal microelectrode arrays are packaged with microchannel grooves to form the asymmetric micropump. ;
该非对称型微泵的大电极和小电极形成的金属微电极阵列是置于微通道内的；The metal microelectrode array formed by the large electrode and the small electrode of the asymmetrical micropump is placed in the microchannel;
大电极和小电极分别通过第一金属电极和第二金属电极可以由外部施加交流信号。The large electrode and the small electrode can be externally applied with an AC signal through the first metal electrode and the second metal electrode respectively.
金属微电极阵列与微通道封装的方法可以采用胶粘方法，也可以采用等离子键合方法；The metal microelectrode array and microchannel packaging method can be glued or plasma bonded;
S200、向微通道内注入加了微量氢氧化钾电解质的乙醇溶液，也可以在丙醇、丁醇等其他醇类溶液添加微量氢氧化钾电解质，采用相同的方法进行方法驱动。调节乙醇溶液的电导率为5～110uS/cm；S200. Inject the ethanol solution added with a small amount of potassium hydroxide electrolyte into the microchannel, or add a small amount of potassium hydroxide electrolyte to other alcohol solutions such as propanol and butanol, and use the same method to drive the method. Adjust the conductivity of the ethanol solution to 5-110uS/cm;
S300、将交流电正负极与第一金属电极和第二金属电极连接，施加交流电信号，驱动乙醇溶液流动；S300. Connect the positive and negative poles of the alternating current to the first metal electrode and the second metal electrode, apply an alternating current signal, and drive the ethanol solution to flow;
将正弦波交流电的正负极，与第一金属电极和第二金属电极相连，电极与交流信号正负极任意连接，通过调节交流电信号的电压和频率，对大小电极施加交流电信号，驱动乙醇溶液流动。Connect the positive and negative poles of the sine wave alternating current with the first metal electrode and the second metal electrode, connect the electrodes to the positive and negative poles of the AC signal arbitrarily, and apply the alternating current signal to the large and small electrodes by adjusting the voltage and frequency of the alternating current signal to drive The ethanol solution flows.
在步骤S300中，向第一金属电极和第二金属电极施加的交流电电压为1～10V，交流电频率在5～-500Hz之间。In step S300, the AC voltage applied to the first metal electrode and the second metal electrode is 1-10V, and the AC frequency is between 5-500 Hz.
非对称交流电渗微泵驱动乙醇实验结果，如图2所示，交流电压5V；测量位置：在电极上方9.1μm处；25℃,KOH溶液，电导率：20.02μs/cm,电极对之间的间隔为：100μm，整体趋势为：频率低于50hz时，频率越高，速度越快，频率高于50hz后，频率越高，速度越慢；溶液电导率为20.2μs/cm时，交流电频率为50hz时，电渗驱动流体的速度最大。The results of the ethanol experiment driven by an asymmetric AC electroosmotic micropump, as shown in Figure 2, AC voltage 5V; measurement position: 9.1 μm above the electrode; 25 ° C, KOH solution, conductivity: 20.02 μs/cm, between the electrode pair The interval is: 100μm, and the overall trend is: when the frequency is lower than 50hz, the higher the frequency, the faster the speed; when the frequency is higher than 50hz, the higher the frequency, the slower the speed; At 50hz, the velocity of the electroosmosis-driven fluid is maximum.
实验未发现微电极有损害现象，微泵可长期实验，施加的交流电压仅仅5V，而离子拖曳泵一般需要10V以上的直流电压。No damage to the microelectrode was found in the experiment, and the micropump can be tested for a long time, and the applied AC voltage is only 5V, while the ion drag pump generally requires a DC voltage of more than 10V.
微泵主要是通过集成在微系统内应用。Micropumps are mainly applied in microsystems through integration.
虽然，上文中已经用一般性说明及具体实施例对本发明作了详尽的描述，但在本发明基础上，可以对之作一些修改或改进，这对本领域技术人员而言是显而易见的。因此，在不偏离本发明精神的基础上所做的这些修改或改进，均属于本发明要求保护的范围。Although the present invention has been described in detail with general descriptions and specific examples above, it is obvious to those skilled in the art that some modifications or improvements can be made on the basis of the present invention. Therefore, the modifications or improvements made on the basis of not departing from the spirit of the present invention all belong to the protection scope of the present invention.
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| CN201910835402.6ACN110601496B (en) | 2019-09-05 | 2019-09-05 | A kind of AC electroosmotic driven ethanol asymmetric micropump and working method |
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| CN116116474A (en)* | 2023-03-23 | 2023-05-16 | 京东方科技集团股份有限公司 | Micropump array device and method of manufacturing the same |
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