A kind of detection device of glass substrateTechnical field
The present invention relates to technical field of liquid crystal display more particularly to a kind of detection devices of glass substrate.
Background technique
In TFT-LCD (Thin film transistor-liquid crystal display, tft liquid crystalDisplay), LTPS (Low Temperature Poly-silicon, low temperature polycrystalline silicon) liquid crystal display, AM-OLED(Active-matrix organic light-emitting diode, active matrix organic light emitting diode panel) etc. is moreIn the processing procedure of kind display panel, when glass substrate is after finishing laser molecular annealing, needing to check whether there is on glass substrateThe defects of color unevenness (mura), bright dim spot.
When detecting glass substrate, need glass substrate being transmitted to check bit.Currently, mainly utilizing beltOr the mode that idler wheel holds the lower surface of glass substrate and then glass substrate is driven to move forward is transmitted.Using this biographyDelivery method, when needing by the long side of glass substrate and when short side change of direction, usually by operator lift glass substrate intoRow correspondingly rotates.Manually-operated mode is time-consuming and laborious, and efficiency is lower.
Certainly, it is transmitted after also thering is the automatic rotating platform of use to be rotated by 90 ° glass substrate, but existing automaticRotating platform can be easy in rotary course to scratch glass baseplate surface directly with the following table face contact of glass substrate.
In order to reduce the lower surface of glass substrate and the contact of rotating actuator, a variety of utilizations exist in the prior artAir is blown upwards with the air bearing rotary reversing device of planar support glass substrate.Such as application No. is 201720152664.9 disclosures" glass substrate slewing ", the equipment utilization air floating platform planar support glass substrate, utilize driving device drive glassSubstrate is moved along air floating platform, rotating device is liftably arranged above air floating platform, rotating device is provided with can be with glassDrive rod of the side contact of glass substrate to drive glass substrate to rotate.Although the glass substrate slewing ensure that glassSubstrate rotate when its surface with slewing occur it is any contact, avoid glass baseplate surface scuffing, still, the rotationDevice is to rotate glass substrate in the way of drive rod clamping glass substrate, and its structure is complicated, can not be suitable for flexibleGlass substrate (clamping flexible glass substrate, flexible glass substrate is easy to cause to deform), while air floating platform and driving are filledThe structure set also becomes complicated accordingly, also more complicated in operation.
In view of the above shortcomings, the designer, is actively subject to research and innovation, to found a kind of new structural glassThe detection device of glass substrate makes it with more the utility value in industry.
Summary of the invention
It is an object of the invention to propose a kind of detection device of glass substrate, suspension can be in glass substrateGlass substrate is rotated under state, to realize exchanging for glass substrate long side and short side, is realized to glass substrate both directionThe Scanning Detction of (longitudinal direction and short side direction), and can be avoided the surface for scratching glass substrate in rotary course, it is suitable forGlass substrate flexible and rigid.
To achieve this purpose, the present invention adopts the following technical scheme:
A kind of detection device of glass substrate, including air floating platform, transmission device, rotating device and detection device,In:
The air floating platform is configured as air bearing and supports glass substrate to be measured；
The transmission device is configured as transmitting the glass substrate to be measured to be moved along the air floating platform；
The rotating device vertically run through the air floating platform and can air floating platform lifting relatively, the rotationDevice is configured as adsorbing the glass substrate to be measured and drives the glass substrate rotation to be measured；
The detection device is set up in the air floating platform, the detection device be configured to before rotation with it is postrotationalThe glass substrate to be measured is detected.
Glass substrate is supported using air floating platform air bearing, glass substrate can be made to be in suspended state and transmitted, as generalWhen the long side and short side change of direction of glass substrate, contact rotating device rise with glass substrate, by glass under suspended stateGlass substrate is rotated, and rotating device is only contacted at the center of glass substrate, and contact area is smaller, in rotary course notThe surface of glass substrate can be caused to scratch, and can be avoided glass substrate deformation；Glass substrate only need to be on air floating platformIt is primary back and forth, detection device can the glass substrate respectively to longitudinal direction and short side direction take pictures, improve detection efficiency.
A kind of preferred embodiment of detection device as above-mentioned glass substrate, the detection device include the first detectionComponent and/or the second detection components, first detection components are configured as obtaining the overall diagram of the glass substrate to be measuredPicture, second detection components are configured as obtaining the fixed point image of the glass substrate to be measured.By obtaining whole and fixed pointImage, glass substrate can comprehensively be detected.
A kind of preferred embodiment of detection device as above-mentioned glass substrate, first detection components include multipleLine sweeps camera, and each line is swept camera and can be translated along the conveying direction perpendicular to the glass substrate to be measured.
A kind of preferred embodiment of detection device as above-mentioned glass substrate, second detection components include multipleGauge head, each gauge head can be translated along the conveying direction perpendicular to the glass substrate to be measured.
A kind of preferred embodiment of detection device as above-mentioned glass substrate, each gauge head are obliquely installed.Inclination is setSetting can take pictures to glass substrate in a manner of all standing.
A kind of preferred embodiment of detection device as above-mentioned glass substrate, the detection device further include detection instituteState the detection piece of air floating platform flatness.It can ensure that the flatness of air floating platform using detection piece, it is ensured that convey glass substrateStability ensures that detection effect.
A kind of preferred embodiment of detection device as above-mentioned glass substrate, the detection piece are to be erected at the gasLeveling ruler above floating platform.
A kind of preferred embodiment of detection device as above-mentioned glass substrate, the detection device further include by position machineStructure, it is described to be configured as positioning to before rotation with the postrotational glass substrate to be measured by position mechanism.Because of glass substrateAfter rotation, long side is exchanged with short side, using by position mechanism, it can be ensured that glass substrate is located at required position, convenient for accurateIt takes pictures to glass substrate on ground.
A kind of preferred embodiment of detection device as above-mentioned glass substrate, the rotating device include the first supportSeat, first actuator rotatable around its axis with the turntable of first support base rotation connection and the driving turntable,The turntable is equipped with multiple suckers, and the sucker is soft suction nozzle, and the soft suction nozzle periphery is connected with rigid support ring.It is softSuction nozzle can cause to scratch to avoid to glass substrate, and rigid support ring can rotate through to avoid soft suction nozzle in absorption glass substrateIt is not in place because being rotated caused by deformation in journey.
A kind of preferred embodiment of detection device as above-mentioned glass substrate, the transmission device include being set to instituteState the line motor of air floating platform both sides, the line motor is connected with liftable adsorbing mechanism, and two line motors itBetween spacing be less than or equal to the air floating platform air bearing spacing.The structure can ensure that stability when glass substrate transmission.
The invention has the benefit that supporting glass substrate using air floating platform air bearing, glass substrate can be made to be in outstandingFloating state is transmitted, and when by the long side of glass substrate and short side change of direction, connects rotating device rise with glass substrateTouching, rotates glass substrate under suspended state, and rotating device is only contacted at the center of glass substrate, contact surfaceProduct is smaller, will not cause to scratch to the surface of glass substrate in rotary course, and can be avoided glass substrate deformation；GlassSubstrate need to only move back and forth once on air floating platform, the glass that detection device can respectively to longitudinal direction and short side directionSubstrate is taken pictures, and detection efficiency is improved.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the detection device for the glass substrate that the specific embodiment of the invention provides；
Fig. 2 is the structural representation of another angle of the detection device for the glass substrate that the specific embodiment of the invention providesFigure；
Fig. 3 is that the structure of the rotating mechanism in the detection device for the glass substrate that the specific embodiment of the invention provides is shownIt is intended to；
Fig. 4 is the structural schematic diagram of the rotating device in rotating mechanism；
Fig. 5 is the structural schematic diagram by position mechanism in Fig. 3 at A.
In figure: 100- air floating platform, 110- air flotation strip, 200- rotating device, the first support base of 210-, 220- turntable,221- sucker, 222- rigid support ring, the first actuator of 230-, 300- lifting device, the second support base of 310-, 320- secondActuator, 400- lean on position mechanism, 410- force piece, 420- contact, 500- glass substrate, 600- board, 700- transmission dressIt sets, the first detection components of 810-, the second detection components of 820-, 900- detection piece.
Specific embodiment
To keep the technical problems solved, the adopted technical scheme and the technical effect achieved by the invention clearer, belowIt will the technical scheme of the embodiment of the invention will be described in further detail in conjunction with attached drawing, it is clear that described embodiment is onlyIt is a part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, those skilled in the artEvery other embodiment obtained without creative efforts, shall fall within the protection scope of the present invention.
In the description of the present invention unless specifically defined or limited otherwise, term " connected ", " connection ", " fixation " are answeredIt is interpreted broadly, for example, it may be being fixedly connected, may be a detachable connection, or is integral；It can be mechanical connection,It can be electrical connection；It can be directly connected, can also can be inside two elements indirectly connected through an intermediaryThe interaction relationship of connection or two elements.For the ordinary skill in the art, on being understood with concrete conditionState the concrete meaning of term in the present invention.
In the present invention unless specifically defined or limited otherwise, fisrt feature second feature "upper" or "lower"It may include that the first and second features directly contact, also may include that the first and second features are not direct contacts but pass throughOther characterisation contact between them.Moreover, fisrt feature includes above the second feature " above ", " above " and " above "One feature is right above second feature and oblique upper, or is merely representative of first feature horizontal height higher than second feature.First is specialSign is directly below and diagonally below the second feature including fisrt feature under the second feature " below ", " below " and " below ", or onlyIndicate that first feature horizontal height is less than second feature.
As shown in Fig. 1 to 5, the detection device of glass substrate of the invention includes board 600 and is set on board 600Air floating platform 100, transmission device 700, rotating device 200 and detection device.Wherein, air floating platform 100 is configured as air bearingSupport glass substrate 500 to be measured；Transmission device 700 is configured as transmitting glass substrate 500 to be measured to be moved along air floating platform 100,Rotating device 200 is configured as at the center for adsorbing glass substrate 500 to be measured and glass substrate 500 to be measured is driven to rotate；DetectionDevice is set up in air floating platform 100, and detection device is configured to examine to before rotation with postrotational glass substrate 500 to be measuredIt surveys.Glass substrate 500 is supported using 100 air bearing of air floating platform, glass substrate 500 can be made to be in suspended state and transmitted,When by the long side of glass substrate 500 and short side change of direction, contact the rise of rotating device 200 with glass substrate 500, InGlass substrate 500 is rotated under suspended state, and rotating device 200 is only contacted at the center of glass substrate 500, is connectContacting surface product is smaller, will not cause to scratch to the surface of glass substrate 500 in rotary course, and can be avoided glass substrate 500Deformation；Glass substrate 500 need to only move back and forth once on air floating platform 100, and detection device can be respectively to longitudinal directionIt takes pictures with the glass substrate 500 of short side direction, improves detection efficiency.
In order to ensure the flatness of 100 air bearing of air floating platform support glass substrate 500, detection device of the invention is also wrappedThe detection piece 900 of detection 100 flatness of air floating platform is included, detection piece 900 is the leveling ruler for being erected at 100 top of air floating platform.BenefitWith the benchmark of each air flotation strip 110 of the adjustable air floating platform 100 of leveling ruler, so that it is guaranteed that the flatness of air floating platform 100, in turnSmoothly air bearing it can support glass substrate 500.
Specifically, transmission device 700 includes the line motor for being set to 100 both sides of air floating platform, and line motor is connected with canThe adsorbing mechanism of lifting, and the spacing between two line motors is less than or equal to the air bearing spacing of air floating platform 100.Utilize line horseIt reaches and adsorbing mechanism, is transmitted in the case where adsorbing glass substrate 500 along air floating platform 100, and do not connect with air floating platform 100Touching.Make adsorbing mechanism liftable, is to not influence glass substrate 500 in 200 rotary glass substrate 500 of rotating deviceRotation, and after the rotation of glass substrate 500, absorption glass substrate 500 can be risen and continue to transmit.
Rotating device 200 in the present invention is mainly by the long side of glass substrate 500 and short side change of direction, therefore, rotationThe angle that rotary device 200 drives glass substrate 500 to rotate is 90 °, is rotated by 90 °, it can be achieved that 500 long side of glass substrate and short sideExchange.
Specifically, rotating device 200 includes the first support base 210, the turntable with the rotation connection of the first support base 210220 and driving turntable 220 first actuator 230 rotatable around its axis, turntable 220 be equipped with multiple suckers 221, theOne actuator 230 is rotary cylinder.The rotating device 200 of the structure is able to achieve to be driven in the case where adsorbing glass substrate 500Glass substrate 500 rotates.
In order to avoid damaging when absorption glass substrate 500 to glass substrate 500, the sucker 221 in the present invention is softSuction nozzle, and rigid support ring 222 is connected in soft suction nozzle periphery.Turntable 220 drive glass substrate 500 rotate when, byThere is weight in glass substrate 500 itself, and because sucker 221 is soft suction nozzle, when turntable 220 rotates, sucker 221 can be distortedDeformation, sucker 221 will lead to glass substrate 500 rotation angle after deforming is inaccurate, and therefore, rigid support ring 222 can be kept awayIt is not in place because rotating caused by deforming in absorption 500 rotary course of glass substrate to exempt from soft suction nozzle.
For the lifting structure of rotating device 200, rotating device 200 is connected with by the present invention drives it to put down with respect to air bearingThe lifting device 300 that platform 100 is gone up and down.The lifting device 300 includes the second support base 310 and the second actuator 320, and second drivesMoving part 320 drives the first support base 210 vertically mobile relative to the second support base 310, and the second actuator 320 is cylinder.That is,First support base 210 is connect with the second support base 310 by sliding rail, under the action of the second actuator 320, the first supportSeat 210 can drive turntable 220 to go up and down.
As the preferred embodiment of the present invention, the height after turntable 220 declines is flushed with air floating platform 100, is rotatedThe height that platform 220 rises is more than or equal to the air floatation heights of air floating platform 100.In this way, both can ensure that 100 air bearing branch of air floating platformThe flatness of glass substrate 500 is supportted, and can ensure turntable 220 and glass substrate in the case where glass substrate 500 is in suspended state500 contacts.
In another embodiment, the invention also includes position mechanism 400 is leaned on, it is configured as by position mechanism 400 to rotation front and backIt is positioned with postrotational glass substrate 500 to be measured.After rotating because of glass substrate 500, long side is exchanged with short side,Using by position mechanism 400, it can be ensured that glass substrate 500 is located at required position, convenient for accurately clapping glass substrate 500According to.In the present invention, by position mechanism 400 be it is multiple, respectively by position mechanism 400 surround space can with rotation before and it is postrotationalGlass substrate 500 matches.That is, being positioned from the periphery of glass substrate 500 to glass substrate 500, glass substrate 500 is limitedIt is scheduled on the position of setting.It specifically, include force piece 410 and contact 420 by position mechanism 400, contact 420 is configured asThe edge of glass substrate 500 is contradicted, force piece 410 drives contact 420 to move between the air flotation strip 110 of air floating platform 100It is dynamic.The structure leans on position mechanism 400, is conveniently adjusted respectively by the space that position mechanism 400 surrounds, to before matching rotation and rotateGlass substrate 500 afterwards.
In addition, detection device in the present invention includes the first detection components 810 and/or the second detection components 820, firstDetection components 810 are configured as obtaining the general image of glass substrate 500 to be measured, and the second detection components 820 are configured as obtainingThe fixed point image of glass substrate 500 to be measured.Detection device is set on the portal frame being crossed on board 600, the first detection groupPart 810 is set to the side of portal frame, and the second detection components 820 are set to the other side of portal frame, and rotating device 200Positioned at the other side of portal frame.In 500 moving process of glass substrate to be measured, pass through from portal frame lower section.Specifically, the first inspectionSurveying component 810 includes that multiple lines sweep camera, and each line sweeps camera can be flat along the conveying direction perpendicular to glass substrate 500 to be measuredIt moves；Second detection components 820 include multiple gauge heads, and each gauge head can be flat along the conveying direction perpendicular to glass substrate 500 to be measuredIt moves, and each gauge head is obliquely installed.By obtaining whole and fixed point image, glass substrate can comprehensively be detected；InclineEach gauge head is tiltedly set, can be taken pictures in a manner of all standing to glass substrate, has further ensured that the comprehensive of detectionProperty.
To sum up, the detection device of glass substrate 500 of the invention can be incited somebody to action in the case where glass substrate 500 is in suspended stateGlass substrate 500 is rotated, and to realize exchanging for glass substrate long side and short side, is realized (long to glass substrate both directionEdge direction and short side direction) Scanning Detction, and can be avoided in rotary course scratch glass substrate 500 surface, be suitable forGlass substrate 500 flexible and rigid.
The technical principle of the invention is described above in combination with a specific embodiment.These descriptions are intended merely to explain the present inventionPrinciple, and shall not be construed in any way as a limitation of the scope of protection of the invention.Based on the explanation herein, this fieldTechnical staff can associate with other specific embodiments of the invention without creative labor, these modes are allIt will fall under the scope of the present invention.