技术领域technical field
本发明涉及一种微机电系统中的微试样精密测试装置，尤其是一种可对微操作试样进行精密定位和多维调节的五自由度机械式微动平台。The invention relates to a micro-sample precision testing device in a micro-electromechanical system, in particular to a five-degree-of-freedom mechanical micro-movement platform capable of performing precise positioning and multi-dimensional adjustment on a micro-manipulation sample.
背景技术Background technique
精密测试技术在精密制造、微机电系统、微操纵等诸多领域有着广泛的应用。在微机电系统中试样微实验中，试样本身尺寸微小，且在微拉伸测试中需要对试样进行直线、回转等与运动，由于实验特点该运动具有精度高、位移小、运动维度多等特点，这就要求微动平台具有在尽可能多的维度上的微小位移能力。综上所述需要设计可对微小试样进行多方向、多角度、微位移的平台，以实现微试样的微操作实验。Precision testing technology has a wide range of applications in precision manufacturing, MEMS, micro-manipulation and many other fields. In the micro-experiment of the sample in the micro-electromechanical system, the sample itself is small in size, and the sample needs to be moved in a straight line, a rotation, etc. in the micro-tensile test. This requires the micro-movement platform to have tiny displacement capabilities in as many dimensions as possible. In summary, it is necessary to design a platform that can perform multi-direction, multi-angle, and micro-displacement on micro-samples to realize micro-manipulation experiments on micro-samples.
目前的微纳定位中采用的方法主要有采用电机减速器来驱动多维工作台，这种方法往往结构复杂，体积较大，多级齿轮的传动精度不够造成定位误差大，伺服刚性差等缺点，适合大位移情况下使用；在采用机械式的多维微动装置中，采用的机构大多体积很大，但调整位移精度很差，难以满足微操作中细微的位移移动。The current methods used in micro-nano positioning mainly use motor reducers to drive multi-dimensional worktables. This method is often complex in structure, large in size, and the transmission accuracy of multi-stage gears is not enough, resulting in large positioning errors and poor servo rigidity. It is suitable for use in the case of large displacement; in the mechanical multi-dimensional micro-movement device, most of the mechanisms used are large in size, but the adjustment displacement accuracy is poor, and it is difficult to meet the subtle displacement movement in the micro-operation.
公开的机械式的微动平台，如多维位移平台(申请号：201510112074.9)能够实现三维平动和二维旋转的调整，但其体积大，可以进行大位移的五维调整，采用调整螺丝来控制平台的倾斜程度，可调旋转范围小，而且可调旋转精度差，因此不能满足微操作需要的微小位移的要求。The disclosed mechanical micro-movement platform, such as the multi-dimensional displacement platform (application number: 201510112074.9), can realize the adjustment of three-dimensional translation and two-dimensional rotation, but its volume is large, and it can perform five-dimensional adjustment of large displacement, which is controlled by adjusting screws. The inclination of the platform, the adjustable rotation range are small, and the adjustable rotation precision is poor, so it cannot meet the requirements of micro-displacement required by micro-operations.
发明内容SUMMARY OF THE INVENTION
本发明要解决的技术难题是克服现有技术的缺陷，针对微机械系统中微试样的精密测试，提供一种五自由度机械式微动平台，以至少解决现有技术中的精密定位和多维调节问题。The technical problem to be solved by the present invention is to overcome the defects of the prior art, and for the precise testing of micro-samples in the micro-mechanical system, a five-degree-of-freedom mechanical micro-movement platform is provided to at least solve the problems of precise positioning and precise positioning in the prior art. Multidimensional adjustment problems.
为实现上述目的，本发明的技术方案是：一种五自由度机械式微动平台，具有一个用于安装微动平台的基座，所述基座上依次通过连接X向直线位移平台和Y向直线位移平台，且X向直线位移平台和Y向直线位移平台的载台分别连接分厘卡，并分别通过各自的分厘卡精确控制沿X向和Y向平移，位移行程15mm，读数精度达0.01mm；所述Y向直线位移平台的载台上面固定连接Z轴旋转位移平台，所述Z轴旋转位移平台内设有一对蜗轮蜗杆副，其中，蜗轮通过推力球轴承与Z轴旋转位移平台连接，蜗轮上面固定连接支撑环载台，蜗轮通过蜗杆连接分厘卡，利用分厘卡精确控制输入扭矩驱动蜗杆，蜗杆驱动蜗轮旋转，从而驱动支撑环载台绕Z轴方向旋转；所述支撑环载台上面固定连接Z向直线位移平台，所述Z向直线位移平台内装有一对圆锥齿轮，其中，从动圆锥齿轮固定连接研磨丝杠，研磨丝杠通过丝杠螺母和连接杆连接承接平台，主动圆锥齿轮连接分厘卡，通过控制分厘卡输入扭矩，使主动圆锥齿驱动从动圆锥齿轮及研磨丝杠旋转，从而驱动丝杠螺母带动承接平台沿Z轴方向运动；所述承接平台上面固定连接Y轴旋转位移平台，Y轴旋转位移平台内安装有蜗杆蜗轮副，其中，蜗杆一端连接分厘卡，且蜗杆与部分蜗轮配合连接，部分蜗轮与承载工作平台固定连接，承载工作平台安装在滑槽上，利用分厘卡精确控制输入扭矩驱动蜗杆，蜗杆驱动部分蜗轮带动承载工作平台沿着滑槽在一定范围内绕着Y轴旋转，其角位移行程达10度，读数精度达0.1度。In order to achieve the above-mentioned purpose, the technical scheme of the present invention is: a five-degree-of-freedom mechanical micro-movement platform, which has a base for installing the micro-movement platform, and the base is connected to the X-direction linear displacement platform and the Y-axis in turn. The X-direction linear displacement platform and the Y-direction linear displacement platform are connected to the centicards respectively, and the translation along the X- and Y-directions is precisely controlled by the respective centicards, the displacement stroke is 15mm, and the reading accuracy is Up to 0.01mm; the carrier of the Y-direction linear displacement platform is fixedly connected to the Z-axis rotary displacement platform, and a pair of worm gear and worm pairs are arranged in the Z-axis rotary displacement platform, wherein the worm wheel is rotated and displaced by the Z-axis through a thrust ball bearing The platform is connected, the support ring carrier is fixedly connected on the worm wheel, the worm wheel is connected to the centicard through the worm, and the input torque is precisely controlled to drive the worm, and the worm drives the worm wheel to rotate, thereby driving the support ring carrier to rotate around the Z-axis direction; the A Z-direction linear displacement platform is fixedly connected to the support ring carrier, and a pair of bevel gears are installed in the Z-direction linear displacement platform. The driven bevel gear is fixedly connected to the grinding screw, and the grinding screw is connected by the screw nut and the connecting rod. The platform, the driving bevel gear is connected with the centicard, and by controlling the input torque of the centrate, the active bevel gear drives the driven bevel gear and the grinding screw to rotate, thereby driving the screw nut to drive the bearing platform to move along the Z-axis; the bearing The Y-axis rotary displacement platform is fixedly connected to the platform, and a worm and worm gear pair is installed in the Y-axis rotary displacement platform. One end of the worm is connected to a centicard, and the worm is connected with part of the worm gear, and some of the worm gear is fixedly connected with the bearing working platform to carry the work. The platform is installed on the chute, and the input torque is precisely controlled by centicards to drive the worm. The worm drive part of the worm gear drives the bearing work platform to rotate along the chute around the Y-axis within a certain range, and its angular displacement stroke reaches 10 degrees. 0.1 degrees.
进一步，所述X向直线位移平台与基座之间，以及X向直线位移平台与Y向直线位移平台之间分别设有滚动线性导轨及滑块。Further, between the X-direction linear displacement platform and the base, and between the X-direction linear displacement platform and the Y-direction linear displacement platform, rolling linear guide rails and sliders are respectively provided.
进一步，所述研磨丝杠为自锁性丝杠。Further, the grinding screw is a self-locking screw.
进一步，所述滑槽为燕尾环形导轨。Further, the chute is a dovetail annular guide rail.
进一步，所述分厘卡为15mm分厘卡。Further, the decimeter is a 15mm decimeter.
进一步，所述承载工作平台上设有多个安装孔。Further, the carrying work platform is provided with a plurality of mounting holes.
本发明的有益效果是：The beneficial effects of the present invention are:
本发明通过第一直线位移平台和第二直线位移平台的分厘卡和滚动线性导轨和第三直线位移平台的研磨丝杠可精密控制工作平台沿着X、Y、Z三个方向进平移，位移行程15mm，读数精度达0.01mm，通过第一绕动位移平台的蜗轮蜗杆副可以驱动工作平台绕着Z轴旋转，第二旋转位移平台上的蜗杆与部分蜗轮副结构可以驱动工作平台绕着Y轴在一定范围绕动，其角位移行程达10度，读数精度达0.1度，环形燕尾导轨的圆弧导轨可以使平台绕动更平稳，可承载重量5kg，解决了相关技术中微操作实验的可调维度少、可调位移精度低、机械机构大的技术问题，达到了多维度精密运动的技术效果。The present invention can precisely control the advance and translation of the working platform along the three directions of X, Y and Z through the centicards and rolling linear guide rails of the first linear displacement platform and the second linear displacement platform and the grinding screw of the third linear displacement platform. , the displacement stroke is 15mm, and the reading accuracy is 0.01mm. The worm gear and worm pair of the first orbiting displacement platform can drive the working platform to rotate around the Z axis. The worm and part of the worm gear pair structure on the second rotating displacement platform can drive the working platform to rotate around the Z axis. With the Y-axis orbiting within a certain range, its angular displacement stroke is 10 degrees, and the reading accuracy is 0.1 degrees. The circular arc guide of the annular dovetail guide can make the platform orbit more smoothly, and can carry a weight of 5kg, which solves the micro-operation experiment in the related technology. The technical problems of less adjustable dimensions, low adjustable displacement accuracy, and large mechanical mechanisms have achieved the technical effect of multi-dimensional precision motion.
附图说明Description of drawings
图1是本发明的五自由度机械式微动平台的结构示意图；Fig. 1 is the structural representation of the five-degree-of-freedom mechanical micro-movement platform of the present invention;
图2是第一旋转位移平台主视图；Fig. 2 is the front view of the first rotary displacement platform;
图3是第三直线位移平台主视图；Fig. 3 is the front view of the third linear displacement platform;
图4是第二旋转位移平台主视图。FIG. 4 is a front view of the second rotary displacement platform.
图中：1.基座、2.第一分厘卡、3.微型直线导轨、4.微型直线导轨滑块、5.第一直线位移平台(X向平移)、6.开槽盘头螺钉、7.第二直线位移平台(Y向平移)、8.第一旋转位移平台(Z轴旋转)、9.推力球轴承、10.蜗轮、11.法兰端盖、12.第三直线位移平台(Z向平移)、13.角接触球轴承、14.圆锥齿轮、15.研磨丝杠、16.连接杆、17.承接平台、18.第二旋转位移平台(Y轴旋转)、19.开孔端盖法兰、20.第四分厘卡、21.角接触球轴承、22.燕尾滑槽、23.蜗杆、24.承载工作台，25.蜗杆，26.平键，27.螺母，28.部分蜗轮，29.安装孔，30.支撑环载台。In the picture: 1. Base, 2. The first centicard, 3. Miniature linear guide, 4. Miniature linear guide slider, 5. The first linear displacement platform (X-direction translation), 6. Slotted pan head Screw, 7. Second linear displacement platform (Y-direction translation), 8. First rotary displacement platform (Z-axis rotation), 9. Thrust ball bearing, 10. Worm gear, 11. Flange end cover, 12. Third straight line Displacement platform (Z-direction translation), 13. Angular contact ball bearing, 14. Bevel gear, 15. Grinding screw, 16. Connecting rod, 17. Undertaking platform, 18. Second rotary displacement platform (Y-axis rotation), 19 . Opening end cover flange, 20. Fourth centicard, 21. Angular contact ball bearing, 22. Dovetail chute, 23. Worm, 24. Loading table, 25. Worm, 26. Flat key, 27. Nut, 28. Part of worm gear, 29. Mounting hole, 30. Support ring carrier.
具体实施方式Detailed ways
在本实施例中还提供了一种五自由度机械式微动平台，该装置用于实现上述实施例1及其优选实施方式，对于本实施例中未详述的术语或实现方式，可参见实施例1中的相关说明，已经进行过说明的不再赘述。In this embodiment, a five-degree-of-freedom mechanical micro-movement platform is also provided, and the device is used to realize the above-mentioned Embodiment 1 and its preferred implementation. For terms or implementations not described in detail in this embodiment, please refer to The relevant descriptions in Embodiment 1, which have already been described, will not be repeated.
如图1至图4所示，一种五自由度机械式微动平台，包括：基座1、第一直线位移平台5(X向平移)、第二直线位移平台7(Y向平移)、第一旋转位移平台8(Z轴旋转)、第三直线位移平台12(Z向平移)、第二旋转位移平台18(Y轴旋转)、承载工作台24。As shown in Figures 1 to 4, a five-degree-of-freedom mechanical micro-movement platform includes: a base 1, a first linear displacement platform 5 (translation in the X direction), and a second linear displacement platform 7 (translation in the Y direction) , a first rotary displacement platform 8 (Z-axis rotation), a third linear displacement platform 12 (Z-direction translation), a second rotary displacement platform 18 (Y-axis rotation), and a bearing table 24 .
基座1一侧上设有通孔安装有第一分厘卡2，第一分厘卡2与第二直线位移平台5相连，第一直线位移平台5与安装在基座1的凹槽内的导轨3及滑块4相连，第一分厘卡2与滑块4连接，通过第一分厘卡2输入精确位移值控制第一直线位移平台5的载台向X方向平移，第二直线位移平台7采用螺钉固定于第一直线位移平台之5上，第二直线位移平台7通过导轨及滑块连接第一直线位移平台5内的载台，并通过安装在第一直线位移平台5后端面的第二分厘卡驱动第二直线位移平台7的载台沿Y向平移；第一旋转位移平台8(Z轴旋转)固定连接在第二直线位移平台7的载台上定，第一旋转位移平台内设有一对蜗轮蜗杆副，蜗轮10通过推力球轴承9与第一旋转位移平台8连接，蜗轮10上面固定连接支撑环载台30，蜗轮10通过蜗杆25连接第三分厘卡，利用第三分厘卡输入扭矩驱动蜗杆，蜗杆驱动蜗轮旋转，从而驱动支撑环载台绕Z轴方向旋转；第三直线位移平台12通过支撑环载台30与第一旋转位移平台5相连，第三直线位移平台12开有通孔，通孔内安装有角接触求轴承13，角接触球轴承13由端盖法兰11相连固定，用于支撑研磨丝杠15，研磨丝杠15通过平键26与圆锥齿轮14连接，研磨丝杠15上端与螺母27配合连接，螺母27上装有连接杆16，连接杆16与承接平台17连接，承接平台17上面固定连接第二旋转位移平台18，第二旋转位移平台18侧面设有轴承孔，轴承孔内安装有角接触球轴承21，角接触球轴承21支撑蜗杆23，蜗杆23连接第四分厘卡20，且蜗杆23与部分蜗轮28配合连接，部分蜗轮28与承载工作平台24固定连接，承载工作平台24安装在燕尾滑槽22上，利用第四分厘卡20输入扭矩，驱动蜗杆23，蜗杆23驱动部分蜗轮28带动承载工作平台24沿着燕尾滑槽22在一定范围内绕着Y轴旋转，承载工作平台24设有多个安装孔29。There is a through hole on one side of the base 1 and a first centicard 2 is installed. The first centicard 2 is connected with the second linear displacement platform 5, and the first linear displacement platform 5 is installed in the groove of the base 1. The inner guide rail 3 is connected with the slider 4, the first centimeter 2 is connected with the slider 4, and the accurate displacement value is input through the first centimeter 2 to control the carrier of the first linear displacement platform 5 to translate in the X direction. Two linear displacement platforms 7 are fixed on the first linear displacement platform 5 with screws, and the second linear displacement platform 7 is connected to the carrier in the first linear displacement platform 5 through guide rails and sliders, and is installed on the first linear displacement platform 5 by means of guide rails and sliders. The second centicard on the rear surface of the linear displacement platform 5 drives the carrier of the second linear displacement platform 7 to translate along the Y direction; the first rotational displacement platform 8 (Z-axis rotation) is fixedly connected to the carrier of the second linear displacement platform 7 A pair of worm gears and worms are arranged in the first rotary displacement platform. The worm wheel 10 is connected with the first rotary displacement platform 8 through the thrust ball bearing 9. Three centimeters, the worm is driven by the third centimeter input torque, and the worm drives the worm wheel to rotate, thereby driving the support ring carrier to rotate around the Z-axis direction; the third linear displacement platform 12 passes through the support ring carrier 30 and the first rotational displacement The platform 5 is connected to each other, the third linear displacement platform 12 has a through hole, and an angular contact ball bearing 13 is installed in the through hole. The angular contact ball bearing 13 is connected and fixed by the end cover flange 11, which is used to support the grinding screw 15 and the grinding wire. The lever 15 is connected with the bevel gear 14 through the flat key 26, the upper end of the grinding screw 15 is connected with the nut 27, the nut 27 is equipped with a connecting rod 16, the connecting rod 16 is connected with the receiving platform 17, and the second rotational displacement is fixedly connected on the receiving platform 17. The platform 18 and the second rotary displacement platform 18 are provided with bearing holes on the sides, and angular contact ball bearings 21 are installed in the bearing holes. The worm gear 28 is matched and connected, and part of the worm gear 28 is fixedly connected with the bearing working platform 24, and the bearing working platform 24 is installed on the dovetail chute 22, and the fourth centicard 20 is used to input torque to drive the worm 23, and the worm 23 drives part of the worm gear 28 to drive the bearing The working platform 24 rotates around the Y axis within a certain range along the dovetail chute 22 , and the carrying working platform 24 is provided with a plurality of mounting holes 29 .
为了使整个机构结构更加轻便，优选采用中空的载台结构。In order to make the whole mechanism structure lighter, it is preferable to use a hollow stage structure.
为了保持Z轴平动，使用研磨丝杠自锁性固定。In order to maintain the translation of the Z-axis, the self-locking fixation is performed using a ground screw.
以上所述实施例仅是为充分说明本申请而所举的较佳的实施例，本申请的保护范围不限于此。本技术领域的技术人员在本申请基础上所作的等同替代或变换，均在本申请的保护范围之内。本申请的保护范围以权利要求书为准。The above-mentioned embodiments are only preferred embodiments for fully illustrating the present application, and the protection scope of the present application is not limited thereto. Equivalent substitutions or transformations made by those skilled in the art on the basis of this application are all within the protection scope of this application. The scope of protection of this application is subject to the claims.
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910801796.3ACN110450112B (en) | 2019-08-28 | 2019-08-28 | Five-freedom-degree mechanical micro-motion platform |
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910801796.3ACN110450112B (en) | 2019-08-28 | 2019-08-28 | Five-freedom-degree mechanical micro-motion platform |
| Publication Number | Publication Date |
|---|---|
| CN110450112Atrue CN110450112A (en) | 2019-11-15 |
| CN110450112B CN110450112B (en) | 2022-11-04 |
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910801796.3AActiveCN110450112B (en) | 2019-08-28 | 2019-08-28 | Five-freedom-degree mechanical micro-motion platform |
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| CN (1) | CN110450112B (en) |
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