Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, rightThe present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, andIt is not used in the restriction present invention.
It is appreciated that term " first " used in this application, " second " etc. can be used to describe various elements herein,But unless stated otherwise, these elements should not be limited by these terms.These terms are only used to by first element and another yuanPart is distinguished.For example, in the case where not departing from scope of the present application, first support arm optical path can be known as to second support arm lightRoad, and similarly, second support arm optical path can be known as to first support arm optical path.
Fig. 1 shows a kind of structural schematic diagram of the acousto-optic Q modulation ultraviolet laser provided in the embodiment of the present invention, the present inventionSchematic diagram in embodiment is a kind of specific embodiment of inventive technique scheme, is not intended to limit the present invention, and thisThe embodiment of invention is all that the acousto-optic Q modulation ultraviolet laser with output wavelength for the ultraviolet pulse light of 244nm is illustrated, butBe do not represent the application technical solution can only output wavelength as 244nm ultraviolet pulse laser.
In embodiments of the present invention, as shown in Figure 1, including: in acousto-optic Q modulation ultraviolet laser provided in an embodiment of the present invention
Arm light path, there are two the arm light path settings, and each arm light path is provided with laser pumping source, focusesThe pump light of component, laser crystal and acousto-optic Q modulation switch, the laser pumping source output focuses on institute through the focus packIt states on laser crystal, is converted into fundamental frequency light output；
The acousto-optic Q modulation opens the light, for converting pulse fundamental frequency light for the fundamental frequency light, wherein fundamental frequency pulse described in two beamsLight in the same plane and is mutually perpendicular to；
V-shaped refrative cavity, including light combination mirror, the first hysteroscope and the second hysteroscope, the light combination mirror are coated with to the first fundamental frequency lightHigh anti-, saturating to the second fundamental frequency light height film, for pulse fundamental frequency light described in two-way to be merged into all the way, first hysteroscope is coated withTo fundamental frequency light high reflection, to the film highly transmissive with frequency light；Second hysteroscope be coated with to fundamental frequency light and and frequency light it is all high anti-The film penetrated；Between first hysteroscope and second hysteroscope be equipped with and frequency crystal, for converting the pulse fundamental frequency light toPulse and frequency light output；And
Cavity external frequency multiplication device, is provided with condenser lens, frequency-doubling crystal and light splitting piece, and the monochromatic pulses and frequency light pass throughCondenser lens focuses on frequency-doubling crystal, and the monochromatic ultraviolet pulsed light of specified wavelength is exported by light splitting piece.
As an embodiment of the present invention, there are two arm light path settings, forms first support arm optical path and second support arm lightRoad, wherein first support arm optical path is equipped with first laser pumping source 11, the first focus pack 31 and first laser crystal 41, theTwo arm light paths are equipped with second laser pumping source 12, the second focus pack 32 and second laser crystal 42, wherein first, theThe laser of dual-laser pumping source output is by optical fiber output, wherein the first optical fiber 21 is connected on first laser pumping source, secondOptical fiber 22 is connected on second laser pumping source, and the other end of the first optical fiber 21 is fixed on the first fixing piece 23, the second optical fiberThe other end be fixed on the second fixing piece 24, wherein the first fixing piece 23 and the second fixing piece 24 are used to fix the output of optical fiberEnd, adjusts the exit direction of laser, guarantee laser irradiation on focus pack, wherein first support arm optical path and second support arm optical pathOn focus pack be respectively the first focus lamp 31 and the second focus lamp 32, focus pack is used for the laser that will be exported from optical fiberIt is focused, to form the laser more concentrated all the way, focuses on laser crystal, wherein first support arm optical path and second support armLaser crystal in optical path is respectively first laser crystal 41 and second laser crystal 42.
In embodiments of the present invention, as shown in Figure 1, being respectively equipped with the first sound in first support arm optical path and second support arm optical pathLight Q-switch 51 and the second acousto-optic Q-switch 52, in embodiments of the present invention, acousto-optic Q modulation switch can according to the actual situation intoRow select, it is used in the embodiment of the present invention be QS68-2.5C-B-GH9 type acousto-optic Q modulation switch, for two beam basic frequency lasers intoRow adjusts Q, by exporting monochromatic pulses and frequency light with frequency crystal.In embodiments of the present invention, the light pass surface face of acousto-optic Q modulation switchLaser crystal, and can vertically be injected in the acousto-optic Q modulation switch from the laser that laser crystal is emitted.
In embodiments of the present invention, as shown in Figure 1, light combination mirror 63 is arranged in the first acousto-optic Q modulation switch 51 and the second acousto-opticBetween Q-switch 52, wherein first support arm optical path is mutually perpendicular to place with second support arm optical path, to guarantee that two beam basic frequency lasers existIn same plane and be mutually perpendicular to, the light pass surface and two-way arm light path of light combination mirror all in angle of 45 degrees, by first support arm lightRoad and second support arm optical path are merged into optical path all the way.
In embodiments of the present invention, as shown in Figure 1, V-shaped refrative cavity includes the first hysteroscope 64, the second hysteroscope 65, wherein theOne hysteroscope 64 be coated with it is high to two beam fundamental frequency lights it is anti-, to the high saturating film of frequency light；Second hysteroscope 65 be coated with to two beam fundamental frequency lights andWith the whole high anti-films of frequency light, two beam fundamental frequency pulsed lights pass through and frequency crystal 70 is converted into monochromatic pulses and frequency light.
In embodiments of the present invention, as shown in Figure 1, cavity external frequency multiplication device, the cavity external frequency multiplication device, it is saturating to be provided with focusingMirror 80, frequency-doubling crystal 90 and light splitting piece 100, pulse and frequency light are focused on by condenser lens 80 and export purple on frequency-doubling crystal 90Outer pulsed light exports monochromatic ultraviolet pulsed light by light splitting piece.For how to select specific wavelength, latter embodiments of the present inventionIt will do it detailed description.
As one embodiment of the invention, by taking output wavelength is the monochromatic ultraviolet pulsed light of 244nm as an example, as shown in Figure 1,In the arm light path, the laser pumping source 11 is diode laser pump source, and the focus pack includes the first plano-convexThe convex surface of lens and the second plano-convex lens, the convex surface of first plano-convex lens and second plano-convex lens is oppositely arranged, instituteThe laser in diode laser pump source is stated by fiber-optic illuminated in the plane of first plano-convex lens, and passes through described secondThe plane of plano-convex lens exports.
It in embodiments of the present invention, is the aberration for reducing the first focus pack 31, the first focus pack 31 includes first flatConvex lens 33, the second plano-convex lens 34, the convex surface of the first plano-convex lens 33 are opposite with the convex surface of the second plano-convex lens 34；FurtherGround, to reduce loss of the pump light on the first focus pack 31, the first plano-convex lens 33, the second plano-convex lens 34 plate 808nmAnti-reflection film；For the aberration for reducing the second focus pack 32, the second focus pack 32 includes that the first plano-convex lens 35, the second plano-convex are saturatingMirror 36, the convex surface of the first plano-convex lens 35 are opposite with the convex surface of the second plano-convex lens 36；Further, to reduce pump light theLoss on two focus packs 32, the first plano-convex lens 35, the second plano-convex lens 36 plate 808nm anti-reflection film.
By the way that the drawing of two plano-convex lens is opposite, composition focus pack is used for laser pump (ing) the embodiment of the present inventionThe laser of source output is focused, and guarantees the quality of output laser.
As one embodiment of the invention, by taking output wavelength is the monochromatic ultraviolet pulsed light of 244nm as an example, as shown in Figure 1,The laser crystal is both provided in each arm light path, wherein the first laser crystal in first support arm optical pathFor Nd-doped yttrium vanadate crystal, the second laser crystal in second support arm optical path is neodymium-doped lithium fluoride yttrium crystal, the first laserCrystal front end face be coated with to wavelength be 808nm light is highly transmissive, film of light high reflection that wavelength is 914nm, rear end face is coated with pairThe high antireflective film of the light that wavelength is 914nm；The second laser crystal front end face is coated with to be increased to the light height that wavelength is 808nmThoroughly, to the film for the light high reflection that wavelength is 1047nm；Rear end face is coated with to the high antireflective film of light that wavelength is 1047nm, whereinLaser is injected from the front end face of the first laser crystal and the second laser crystal.
In embodiments of the present invention, the first laser crystal front end face 61 and the first laser crystal 41 are one；The second laser crystal front end face 62 and the second laser crystal 42 are one, and the first laser crystal front end face 61 arrivesThe distance of the light combination mirror 63 is 90mm；The distance of the second laser crystal front end face 62 to the light combination mirror 63 is 87mm；The distance of the light combination mirror 63 to first hysteroscope is 23mm；The light combination mirror 63 is coated with to 914nm light high reflection, rightThe highly transmissive film of 1047nm light；First hysteroscope 64 is coated with to 914nm light, 1047nm light high reflection, highly transmissive to 488nm lightFilm；Second hysteroscope 65 is coated with the film to 914nm, 1047nm, 488nm light high reflection.
The embodiment of the present invention is highly transmissive to specified wavelength light or high by being coated in the light pass surface of specified laser crystalThe selection of the plated film of the film of reflection and each eyeglass, and focus on frequency-doubling crystal by focusing lens and generate high repetition frequencyUltraviolet laser realizes that single ultraviolet laser exports using light splitting piece.
As an embodiment of the present invention, the focus of the focus pack in the laser crystal, and with the front endFace is at a distance of 1-3mm, as shown in Figure 1, to reduce loss of the pump light on the first focus pack 31, the first plano-convex lens 33, theTwo plano-convex lens 34 plate 808nm anti-reflection film, and the focus of the first focus pack 31 is in first laser crystal 41, and swash with firstLuminescent crystal front end face 61 is at 1-3mm；To reduce loss of the pump light on the second focus pack 32, the first plano-convex lens35, the second plano-convex lens 36 plate 808nm anti-reflection film, and the focus of the second focus pack 32 is in first laser crystal 42, and withSecond laser crystal front end face 62 is at 1-3mm.
The embodiment of the present invention can effectively reduce laser by being arranged the focus of focus pack inside laser crystalLoss, guarantees the quality of laser.
As an embodiment of the present invention, in described two acousto-optic Q modulations switch, the first acousto-optic Q modulation switchs light passing end faceIt is coated with to the antireflective film of the first fundamental frequency light, the second acousto-optic Q-switch light passing end face is coated with to the antireflective film of the second fundamental frequency light.At thisIn inventive embodiments, the first acousto-optic Q-switching light passing end face is coated with the film penetrated anti-reflection to 914nm light；The second acousto-optic Q is openedIt closes light passing end face and is coated with the film penetrated anti-reflection to 1047nm light.
As an embodiment of the present invention, by taking output wavelength is the monochromatic ultraviolet pulsed light of 244nm as an example, as shown in Figure 1,First hysteroscope be plano-concave mirror, the concave surface of first hysteroscope be coated with to wavelength be 914nm light high reflection, wavelength beThe highly transmissive film of the light high reflection of 1047nm, the light that wavelength is 488nm, the plane of first hysteroscope is coated with is to wavelengthThe antireflective film of the light of 488nm, second hysteroscope towards first hysteroscope be coated on one side to wavelength be 914nm, 1047nm,The film of the light whole high reflection of 488nm.The concave curvature of first hysteroscope is 100mm, in first hysteroscope and described theBetween two hysteroscopes, be additionally provided with frequency crystal 70, for being converted into pulse to by two beam fundamental frequency pulsed lights in the resonant cavityWith frequency light, described and frequency crystal 70 uses lithium triborate crystal.
In embodiments of the present invention, by taking output wavelength is the monochromatic ultraviolet pulsed light of 244nm as an example, as shown in Figure 1, acousto-opticAdjusting Q ultraviolet laser further includes cavity external frequency multiplication device, including the V-shaped refrative cavity is arranged in and passes through and the output of frequency crystal 70Focus lamp 80, frequency-doubling crystal 90 and light splitting piece 100 in monochromatic pulses and the optical path of frequency light, for the monochromatic pulses and frequencyLight is focused, and exports the single ultraviolet pulse light of specified wavelength by frequency-doubling crystal 90；Wherein, it is coated on the light splitting piece 100To the film of ultraviolet light high reflection, the focus of the focus lamp 80 is inside the frequency-doubling crystal 90.
In embodiments of the present invention, described and frequency crystal 70 is between first hysteroscope 64 and second hysteroscope 65；Under the modulation of first acousto-optic Q-switching 51, second acousto-optic Q-switching 52 and frequency crystal 70, high repetition frequency is exported488nm pulsed light；The high repetition frequency 488nm pulsed light focuses on frequency-doubling crystal 90 by focusing lens 80 and generates high repeatThe 244nm ultraviolet laser of frequency；The focus lamp 80 is coated with the film highly transmissive to 488nm；The focus lamp 80, the frequency multiplication are brilliantBody 90 is correspondingly arranged with first hysteroscope 64；Realize that single 244nm ultraviolet laser exports using light splitting piece 100；Described pointMating plate 100 is coated with the film to 244nm ultraviolet light high reflection.
The embodiment of the present invention exports high repeat by cooperating acousto-optic Q-switching to be modulated two beam fundamental frequency lights with frequency crystalThen the 488nm pulsed light of frequency utilizes pulse light modulation of the cavity external frequency multiplication device to 488nm, finally generates single 244nmUltraviolet laser output, laser output stablizes.
As one embodiment of the invention, acousto-optic Q modulation ultraviolet laser further includes the first acousto-optic Q driving, the second acousto-optic Q driveDynamic, external control signal device；The first acousto-optic Q drives to first acousto-optic Q-switching 51 and provides electric signal；Described secondAcousto-optic Q drives to first acousto-optic Q-switching 52 and provides electric signal；The external control signal device includes the first pressure stabilizing electricitySource, the second regulated power supply and signal synchronizer；First regulated power supply drives to the first acousto-optic Q and provides voltage and current, makesThe upper level inversion population of first fundamental frequency light constantly accumulates and reaches saturation value；Second regulated power supply is to the second acousto-optic QDriving provides voltage and current, and the upper level inversion population of the second fundamental frequency light is made constantly to accumulate and reach saturation value；In signalMaking for two beam fundamental frequency light same times withdraw from ultrasonic field under the modulation of synchronizer, intracavitary Q value is made to surge, laser generation restores rapidly,Its energy is exported in the form of giant-pulse, exports 488nm pulsed light.
Single pulse waveforms figure when Fig. 2 is 244nm acousto-optic Q modulation ultraviolet laser repetition rate 4KHz, exports most at this timeShort pulse width is 19ns.The emission spectrum of acousto-optic Q modulation ultraviolet laser is by spectrometer measurement, as shown in figure 3, central wavelength~244nm；Fig. 4 is the light spot shape of 244nm acousto-optic Q modulation ultraviolet laser.
Acousto-optic Q modulation ultraviolet laser provided in an embodiment of the present invention merges two-way arm light path by light combination mirror,By V-shaped refrative cavity and with frequency crystal output and frequency light, the first acousto-optic Q-switching, the second acousto-optic Q-switching modulation under,Pulse and the frequency light for exporting high repetition frequency, the plated film selection by the first hysteroscope, the second hysteroscope and each eyeglass, and pass throughFocusing lens focus on the ultraviolet laser that frequency-doubling crystal generates high repetition frequency, realize that single ultraviolet laser is defeated using light splitting pieceOut, the ultraviolet output that different wave length may be implemented meets the ultraviolet laser operating of all and frequency laser wavelength cavity external frequency multiplication, andStructure is simple, and cost is relatively low.
Each technical characteristic of embodiment described above can be combined arbitrarily, for simplicity of description, not to above-mentioned realityIt applies all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not depositedIn contradiction, all should be considered as described in this specification.
The embodiments described above only express several embodiments of the present invention, and the description thereof is more specific and detailed, but simultaneouslyLimitations on the scope of the patent of the present invention therefore cannot be interpreted as.It should be pointed out that for those of ordinary skill in the artFor, without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to guarantor of the inventionProtect range.Therefore, the scope of protection of the patent of the invention shall be subject to the appended claims.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the inventionMade any modifications, equivalent replacements, and improvements etc., should all be included in the protection scope of the present invention within mind and principle.