CN110218985B - Cathode baffle plate of crank rocker type magnetron sputtering equipment - Google Patents

Abstract

The invention discloses a crank rocker type cathode baffle of magnetron sputtering equipment, belonging to the field of magnetron sputtering equipment, comprising a plate body, wherein one end of the plate body is fixedly connected with a shaft sleeve, the middle position of the shaft sleeve is provided with a sleeve hole, a transmission shaft is sleeved in the sleeve hole in a sliding manner, the surface of the transmission shaft is fixedly connected with an antiskid block, the antiskid block is semicircular in shape and is distributed in an annular equal distance, the surface of the transmission shaft is fixedly connected with a limit block, the shaft sleeve is provided with an antiskid function, when the shaft sleeve is sleeved on the surface of the transmission shaft, the antiskid block is clamped in an antiskid groove to increase the contact area between the transmission shaft and the shaft sleeve, the connection firmness of the cathode baffle is improved, and the arranged first elastic cushion and the second elastic cushion have the function of compression elasticity, so that the left and right displacement of the shaft sleeve after long-time use can be avoided, the use stability of the cathode baffle is improved.

Description

Cathode baffle plate of crank rocker type magnetron sputtering equipment

Technical Field

The invention relates to the field of magnetron sputtering equipment, in particular to a crank rocker type cathode baffle of magnetron sputtering equipment.

Background

Magnetron sputtering is one kind of physical vapor deposition, and a common sputtering method can be used for preparing multiple materials such as metal, semiconductor, insulator and the like, and has the advantages of simple equipment, easy control, large film coating area, strong adhesive force and the like.

At present, current crank rocker formula magnetron sputtering equipment adopts a plurality of magnetron sputtering negative poles usually, but when the coating film, not necessarily all negative poles all use simultaneously, in order to avoid the mutual pollution between the different negative poles, add before the inoperative negative pole and establish the negative pole baffle usually, but the axle sleeve that current crank rocker formula magnetron sputtering equipment negative pole baffle set up mostly does not have skid-proof function, when the transmission shaft rotates and drives the negative pole baffle and remove, the phenomenon that axle sleeve and transmission shaft skid can appear, the firm in connection of negative pole baffle has been reduced, and the condition emergence of axle sleeve at transmission shaft surface displacement can appear after current negative pole baffle uses for a long time, the not hard up great stability in use of negative pole baffle of influence of production.

Disclosure of Invention

1. Technical problem to be solved

The invention aims to solve the problems in the prior art, and provides a crank rocker type magnetron sputtering device cathode baffle plate which is provided with a shaft sleeve with an anti-skidding function, wherein when the shaft sleeve is sleeved on the surface of a transmission shaft, an anti-skidding block is clamped into an anti-skidding groove to increase the contact area between the transmission shaft and the shaft sleeve, so that the connection firmness of the cathode baffle plate is improved, and a first elastic cushion and a second elastic cushion are arranged to have the effect of compression elasticity, so that the left and right displacement of the shaft sleeve after long-time use can be avoided, and the use stability of the cathode baffle plate is improved.

2. Technical scheme

In order to solve the above problems, the present invention adopts the following technical solutions.

A crank rocker type cathode baffle of magnetron sputtering equipment comprises a plate body, wherein one end of the plate body is fixedly connected with a shaft sleeve, a sleeve hole is formed in the middle position of the shaft sleeve, a transmission shaft is sleeved in the sleeve hole in a sliding mode, an anti-slip block is fixedly connected to the surface of the transmission shaft, the anti-slip block is semicircular in shape and distributed in an annular equal distance mode, a limiting block is fixedly connected to the surface of the transmission shaft, a threaded hole is formed in the middle position of the left end of the transmission shaft, a limiting seat is fixedly sleeved on the surface of the transmission shaft, a positioning groove is formed in the left side of the limiting seat, a first elastic pad is clamped and connected to the left side of the positioning groove, a fastening seat is connected to the left end of the shaft sleeve in a contact mode, a clamping groove is formed in the right side of the fastening seat, a clearance groove is formed in the left side of the fastening seat, the shaft sleeve has an anti-slip function, and when the shaft sleeve is sleeved on the surface of the transmission shaft, the non-slip block blocks into the non-slip groove to increase the contact area between the transmission shaft and the shaft sleeve, so that the connection firmness of the cathode baffle is improved, the arranged first elastic pad and the second elastic pad have the effect of compression elasticity, the situation that the shaft sleeve is displaced left and right after being used for a long time can be avoided, and the use stability of the cathode baffle is improved.

Furthermore, the inner wall of trepanning is equipped with anti-skidding groove, anti-skidding groove's shape is semi-circular, anti-skidding groove is annular equidistance and distributes, the joint has the non slipping spur in the anti-skidding inslot, and the anti-skidding groove that sets up can increase the area of contact of axle sleeve and transmission shaft, has skid-proof effect.

Furthermore, the inner wall of trepanning is equipped with the spacing groove, the shape of spacing groove is square, the limiting block has been cup jointed in the spacing groove, the shape of limiting block is square, when the shaft sleeve cup joints the surface at the transmission shaft, the limiting block has the effect of location fool-proofing, can improve staff's installation effectiveness.

Further, the material of first cushion is the withstand voltage rubber of elasticity, the left side contact of first cushion is connected with the axle sleeve, the intermediate position of first cushion is equipped with the second through-hole, the transmission shaft has been cup jointed in the second through-hole slides, and when first cushion received the extrusion of axle sleeve, has the effect of compression elasticity, and elasticity makes the axle sleeve have the function of preventing not hard up.

Further, the right side joint of draw-in groove has the second cushion, the material of second cushion is the withstand voltage rubber of elasticity, be equipped with the via hole in the second cushion, the right side contact of second cushion is connected with the axle sleeve, and when the second cushion received the extrusion of axle sleeve, has the effect of compression elasticity, and elasticity makes the axle sleeve have the function of preventing not hard up.

Furthermore, the inside of the clearance groove is in contact connection with a screw rod, the surface of the screw rod is sleeved with a spring pad in a sliding mode, the surface of the screw rod is sleeved with a connecting hole and a via hole in a sliding mode, the screw rod is connected with a threaded hole through threads, the clearance groove is arranged to prevent the left end of the screw rod from being exposed outside, and the situation that objects touch the screw rod to cause looseness when the rotating shaft rotates can be avoided.

Furthermore, the left side of the limiting seat is connected with a shaft sleeve in a contact mode, a first through hole is formed in the middle of the limiting seat, a transmission shaft is fixedly sleeved in the first through hole, and when the shaft sleeve is sleeved on the surface of the transmission shaft, the limiting seat has a limiting effect.

3. Advantageous effects

Compared with the prior art, the invention has the advantages that:

(1) the axle sleeve that this scheme set up has skid-proof function, and when the axle sleeve cup joints the surface at the transmission shaft, the non slipping spur card advances the area of contact between anti-skidding inslot increase transmission shaft and the axle sleeve, has improved the firm in connection nature of negative pole baffle to the first cushion and the effect that the second cushion that set up have compression elasticity, can avoid long-time use back axle sleeve to appear controlling the condition of displacement and taking place, improved the stability in use of negative pole baffle.

(2) The inner wall of trepanning is equipped with anti-skidding groove, and anti-skidding groove's shape is semi-circular, and anti-skidding groove is annular equidistance and distributes, and the anti-skidding inslot joint has the non slipping spur, and the anti-skidding groove that sets up can increase the area of contact of axle sleeve and transmission shaft, has skid-proof effect.

(3) The inner wall of trepanning is equipped with the spacing groove, and the shape of spacing groove is square, and the spacing inslot joint has the stopper, and the shape of stopper is square, and when the axle sleeve cup joints the surface at the transmission shaft, the stopper has the effect that the location was prevented staying, can improve staff's installation effectiveness.

(4) The material of first cushion is the withstand voltage rubber of elasticity, and the left side contact of first cushion is connected with the axle sleeve, and the intermediate position of first cushion is equipped with the second through-hole, and the transmission shaft has been cup jointed in the second through-hole slides, and when first cushion received the extrusion of axle sleeve, has the effect of compression elasticity, and elasticity makes the axle sleeve have the function of preventing not hard up.

(5) The right side joint of draw-in groove has the second cushion, and the material of second cushion is the withstand voltage rubber of elasticity, is equipped with the via hole in the second cushion, and the right side contact of second cushion is connected with the axle sleeve, and when the second cushion received the extrusion of axle sleeve, has the effect of compression elasticity, and elasticity makes the axle sleeve have the function that prevents not hard up.

(6) Keep away the inslot contact and be connected with the screw rod, the surperficial slip of screw rod has cup jointed the spring pad, and the surperficial slip of screw rod has cup jointed connecting hole and via hole, and the screw rod has the screw hole through threaded connection, and the left end that the screw rod can be avoided in the groove of keeping away of setting exposes outside, can avoid the axis of rotation object touch screw rod when rotating to cause not hard up.

(7) The left side contact of spacing seat is connected with the axle sleeve, and the intermediate position of spacing seat is equipped with first through-hole, and the transmission shaft has been cup jointed to the first through-hole internal fixation, and when the axle sleeve cup jointed on the surface of transmission shaft, spacing seat has spacing effect.

Drawings

FIG. 1 is a perspective view of the overall construction of the present invention;

FIG. 2 is a side view of a drive shaft construction of the present invention;

FIG. 3 is a side view of the bushing configuration of the present invention;

FIG. 4 is a sectional view of the fastening seat structure of the present invention;

FIG. 5 is a sectional view of the structure of the spacing block of the present invention.

The reference numbers in the figures illustrate:

the anti-slip device comprises aplate body 1, ashaft sleeve 2, asleeve hole 21, ananti-slip groove 22, alimiting groove 23, atransmission shaft 3, ananti-slip block 31, a limitingblock 32, a threadedhole 33, a limiting seat 4, a first throughhole 41, apositioning groove 42, a firstelastic pad 43, a second throughhole 44, afastening seat 5, aclamping groove 51, a secondelastic pad 52, a throughhole 53, aclearance groove 54, ascrew rod 55, aspring pad 56 and a connectinghole 57.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", "outer", "top/bottom", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "disposed," "sleeved/connected," "connected," and the like are to be construed broadly, e.g., "connected," which may be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.

Example 1:

referring to fig. 1-5, a cathode baffle plate of a crank rocker type magnetron sputtering apparatus comprises aplate body 1, referring to fig. 1-5, wherein one end of theplate body 1 is fixedly connected with ashaft sleeve 2, the lower end of theplate body 1 is hinged with another baffle plate, theplate body 1 has a folding and unfolding function under the driving of atransmission shaft 3, belonging to the prior art, theshaft sleeve 2 is used for connecting theplate body 1 with thetransmission shaft 3 of a driving device motor, so that thetransmission shaft 3 can drive theplate body 1 to move, the driving device motor belongs to the prior art, asleeve hole 21 is arranged at the middle position of theshaft sleeve 2, thetransmission shaft 3 is sleeved in thesleeve hole 21 in a sliding manner,anti-skidding blocks 31 are fixedly connected to the surface of thetransmission shaft 3, theanti-skidding blocks 31 are semicircular, when theanti-skidding blocks 31 are clamped in theanti-skidding grooves 22, theshaft sleeve 2 has the effect of preventing thetransmission shaft 3 from skidding in thesleeve hole 21, theanti-skidding blocks 31 are distributed annularly and equidistantly, fixed surface oftransmission shaft 3 is connected withstopper 32, install ontransmission shaft 3 ataxle sleeve 2,stopper 32 can help the staff quick fix a position, the left end intermediate position oftransmission shaft 3 is equipped withscrew hole 33,screw hole 33 passes through threadedconnection screw rod 55, a position forfixing fastening seat 5, the fixed surface oftransmission shaft 3 has cup jointed spacing seat 4, the left side of spacing seat 4 is equipped withconstant head tank 42,constant head tank 42's left side joint hasfirst cushion 43, the left end ofaxle sleeve 2 contacts and is connected withfastening seat 5, the right side of fasteningseat 5 is equipped with draw-ingroove 51, the left side of fasteningseat 5 is equipped with keeps awaydead slot 54.

Referring to fig. 3, the inner wall of thetrepanning 21 is provided with theanti-slip groove 22, theanti-slip groove 22 is semicircular, theanti-slip groove 22 is distributed in an annular shape at equal intervals, theanti-slip block 31 is clamped in theanti-slip groove 22, the contact area between theshaft sleeve 2 and thetransmission shaft 3 can be increased due to the arrangedanti-slip groove 22, the anti-slip effect is achieved, the inner wall of thetrepanning 21 is provided with thelimiting groove 23, thelimiting groove 23 is square, thelimiting block 32 is clamped in thelimiting groove 23, thelimiting block 32 is square, when theshaft sleeve 2 is sleeved on the surface of thetransmission shaft 3, thelimiting block 32 has the effect of positioning and fool proofing, and the.

Referring to fig. 4 and 5, the firstelastic pad 43 is made of elastic pressure-resistant rubber, the left side of the firstelastic pad 43 is in contact connection with theshaft sleeve 2, the middle position of the firstelastic pad 43 is provided with a second throughhole 44, the second throughhole 44 is slidably sleeved with thetransmission shaft 3, when the firstelastic pad 43 is extruded by theshaft sleeve 2, the firstelastic pad 43 has the effect of compressive elasticity, theshaft sleeve 2 has the function of preventing looseness, the right side of theclamping groove 51 is clamped with the secondelastic pad 52, the secondelastic pad 52 is made of elastic pressure-resistant rubber, the throughhole 53 is formed in the secondelastic pad 52, the right side of the secondelastic pad 52 is in contact connection with theshaft sleeve 2, when the secondelastic pad 52 is extruded by theshaft sleeve 2, the second elastic pad has the effect of compressive elasticity, and theshaft sleeve 2 has the function of preventing looseness.

Referring to fig. 4 and 5, ascrew 55 is in contact connection with the inside of theclearance groove 54, aspring pad 56 is in sliding sleeve connection with the surface of thescrew 55, aconnection hole 57 and a throughhole 53 are in sliding sleeve connection with the surface of thescrew 55, thescrew 55 is in threaded connection with a threadedhole 33 through threads, theclearance groove 54 is arranged to prevent the left end of thescrew 55 from being exposed outside, the object can be prevented from touching thescrew 55 to cause looseness when the rotatingshaft 3 rotates, theshaft sleeve 2 is in contact connection with the left side of the limiting seat 4, a first throughhole 41 is arranged in the middle of the limiting seat 4, thetransmission shaft 3 is fixedly sleeved in the first throughhole 41, and when theshaft sleeve 2 is sleeved on the surface of thetransmission shaft 3, the limiting seat 4 has a limiting effect.

When the crank rocker type magnetron sputtering device cathode baffle is installed, firstly, thelimiting groove 23 arranged on theshaft sleeve 2 aligns with thelimiting block 32 arranged on the surface of thetransmission shaft 3, then theshaft sleeve 2 moves rightwards, at the moment, thetransmission shaft 3 is sleeved in thesleeve hole 21, theanti-skidding block 31 and thelimiting block 32 are respectively clamped in theanti-skidding groove 22 and thelimiting groove 23, the arrangedshaft sleeve 2 has an anti-skidding function, the connection firmness of the cathode baffle is improved, theshaft sleeve 2 continues to move rightwards, theplate body 1 moves rightwards along with theshaft sleeve 2, theshaft sleeve 2 moves rightwards to extrude the firstelastic cushion 43, the firstelastic cushion 43 forms compression elasticity, then the fasteningseat 5 is fastened at the left end of thetransmission shaft 3 through thescrew rod 55, thescrew rod 55 is screwed clockwise to drive the fasteningseat 5 to move rightwards through threads, the fasteningseat 5 moves rightwards to extrude theshaft sleeve 2 to extrude the secondelastic cushion 52, and the secondelastic cushion 52 forms compression elasticity, make fasteningseat 5 be used for the left end position of fixedaxle sleeve 2 afterscrew rod 55 screws up, thefirst cushion 43 and the effect ofsecond cushion 52 that set up have compression elasticity, can avoid long-time use backaxle sleeve 2 the condition emergence of controlling the displacement to appear, have improved the stability in use of cathode baffle.

The foregoing is only a preferred embodiment of the present invention; the scope of the invention is not limited thereto. Any person skilled in the art should be able to cover the technical scope of the present invention by equivalent or modified solutions and modifications within the technical scope of the present invention.

Claims (7)

1. The utility model provides a crank rocker formula magnetron sputtering equipment negative pole baffle, includes plate body (1), its characterized in that: the plate comprises a plate body (1), wherein a shaft sleeve (2) is fixedly connected to one end of the plate body (1), a sleeve hole (21) is formed in the middle of the shaft sleeve (2), a transmission shaft (3) is sleeved in the sleeve hole (21) in a sliding mode, anti-skidding blocks (31) are fixedly connected to the surface of the transmission shaft (3), the anti-skidding blocks (31) are semicircular in shape, the anti-skidding blocks (31) are distributed in an annular equal distance mode, limiting blocks (32) are fixedly connected to the surface of the transmission shaft (3), threaded holes (33) are formed in the middle of the left end of the transmission shaft (3), a limiting seat (4) is sleeved on the surface of the transmission shaft (3), a positioning groove (42) is formed in the left side of the limiting seat (4), a first elastic cushion (43) is clamped in the left side of the positioning groove (42), a fastening seat (5) is connected to the left end of the shaft sleeve (2) in a contact mode, a clamping groove (51) is formed in the right side of the fastening seat (5), and a clearance groove (54) is formed in the left side of the fastening seat (5).

2. The cathode baffle plate of the crank rocker type magnetron sputtering device according to claim 1, wherein: the inner wall of trepanning (21) is equipped with anti-skidding groove (22), the shape in anti-skidding groove (22) is semi-circular, anti-skidding groove (22) are annular equidistance and distribute, block joint has non-slipping spur (31) in anti-slipping groove (22).

3. The cathode baffle plate of the crank rocker type magnetron sputtering device according to claim 1, wherein: the inner wall of trepanning (21) is equipped with spacing groove (23), the shape of spacing groove (23) is square, the joint has stopper (32) in spacing groove (23), the shape of stopper (32) is square.

4. The cathode baffle plate of the crank rocker type magnetron sputtering device according to claim 1, wherein: the material of first cushion (43) is the withstand voltage rubber of elasticity, the left side contact of first cushion (43) is connected with axle sleeve (2), the intermediate position of first cushion (43) is equipped with second through-hole (44), slip in second through-hole (44) and cup jointed transmission shaft (3).

5. The cathode baffle plate of the crank rocker type magnetron sputtering device according to claim 1, wherein: the right side joint of draw-in groove (51) has second cushion (52), the material of second cushion (52) is the withstand voltage rubber of elasticity, be equipped with via hole (53) in second cushion (52), the right side contact of second cushion (52) is connected with axle sleeve (2).

6. The cathode baffle plate of the crank rocker type magnetron sputtering device according to claim 1, wherein: the screw rod (55) is connected in the clearance groove (54) in a contact mode, the surface of the screw rod (55) is sleeved with the spring pad (56) in a sliding mode, the surface of the screw rod (55) is sleeved with the connecting hole (57) and the through hole (53) in a sliding mode, and the screw rod (55) is connected with the threaded hole (33) through threads.

7. The cathode baffle plate of the crank rocker type magnetron sputtering device according to claim 1, wherein: the left side contact of spacing seat (4) is connected with axle sleeve (2), the intermediate position of spacing seat (4) is equipped with first through-hole (41), the fixed cover has been cup jointed transmission shaft (3) in first through-hole (41).

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