A kind of crank-rocker style magnetron sputtering apparatus cathode baffleTechnical field
The present invention relates to magnetron sputtering apparatus fields, more specifically to a kind of crank-rocker style magnetron sputtering apparatusCathode baffle.
Background technique
Magnetron sputtering is one kind of physical vapour deposition (PVD), and general sputtering method can be used for preparing metal, semiconductor and absolutelyMore materials such as edge body, and have many advantages, such as that equipment is simple, easily controllable, plated film area is big and adhesive force is strong.
Currently, existing crank-rocker style magnetron sputtering apparatus generallys use multiple magnetic control sputtering cathodes, but in plated film,Not necessarily all cathodes all use simultaneously, in order to avoid the mutual pollution between different cathodes, usually in idle yinCathode baffle is extremely before added, but the axle sleeve of existing crank-rocker style magnetron sputtering apparatus cathode baffle setting is mostly without anti-Sliding function, when transmission shaft rotates and drives cathode baffle mobile, it is possible that the phenomenon that axle sleeve and transmission shaft skid, reducesThe connectivity robustness of cathode baffle, and existing cathode baffle is after prolonged use it is possible that axle sleeve is in transmission shaftThe case where surface displacement, occurs, and the loosening of generation greatly affects the stability in use of cathode baffle.
Summary of the invention
1. technical problems to be solved
Aiming at the problems existing in the prior art, the purpose of the present invention is to provide a kind of crank-rocker style magnetron sputterings to setStandby cathode baffle, the axle sleeve that it is arranged have the function of anti-skidding, and when axle sleeve is socketed in the surface of transmission shaft, non-slipping block sticks into anti-The for increasing the contact area between transmission shaft and axle sleeve in sliding slot, improving the connectivity robustness of cathode baffle, and be arrangedOne elastic cushion and the second elastic cushion have the function of compression elasticity, can be to avoid there is left and right displacement using rear axle housing for a long timeIt happens, improves the stability in use of cathode baffle.
2. technical solution
To solve the above problems, the present invention adopts the following technical scheme that.
A kind of crank-rocker style magnetron sputtering apparatus cathode baffle, including plate body, one end of the plate body are fixedly connected withAxle sleeve, the middle position of the axle sleeve are equipped with sets of holes, and sliding sleeve is connected to transmission shaft in the sets of holes, and the surface of the transmission shaft is solidSurely it is connected with non-slipping block, the shape of the non-slipping block is semicircle, and the non-slipping block is equally spaced in a ring, the transmission shaftSurface is fixedly connected with limited block, and the left end middle position of the transmission shaft is equipped with threaded hole, and the surface of the transmission shaft is fixedIt is socketed with limit base, the left side of the limit base is equipped with locating slot, is connected with the first elastic cushion on the left of the locating slot, describedThe left end of axle sleeve, which connects, fastening seat, and the right side of the fastening seat is equipped with card slot, and the left side of the fastening seat is equipped with empty avoidingSlot, the axle sleeve that it is arranged have the function of anti-skidding, and when axle sleeve is socketed in the surface of transmission shaft, non-slipping block sticks into increasing in non-slip grooveAdd the contact area between transmission shaft and axle sleeve, improves the connectivity robustness of cathode baffle, and the first elastic cushion being arrangedHave the function of compression elasticity with the second elastic cushion, it can be to avoid there is the case where left and right displacement hair using rear axle housing for a long timeIt is raw, improve the stability in use of cathode baffle.
Further, the inner wall of the sets of holes is equipped with non-slip groove, and the shape of the non-slip groove is semicircle, the non-slip grooveIt is equally spaced in a ring, is connected with non-slipping block in the non-slip groove, the non-slip groove of setting can increase connecing for axle sleeve and transmission shaftContacting surface product, has the function of anti-skidding.
Further, the inner wall of the sets of holes is equipped with limiting slot, the shape of the limiting slot be it is rectangular, in the limiting slotBe connected with limited block, the shape of the limited block be it is rectangular, when axle sleeve is socketed in the surface of transmission shaft, limited block has positioningThe installation effectiveness of staff can be improved in the effect of fool proof.
Further, the material of first elastic cushion is elastic pressure-resistant rubber, the left contact of first elastic cushionIt is connected with axle sleeve, the middle position of first elastic cushion is equipped with the second through-hole, and sliding sleeve is connected to transmission in second through-holeAxis has the function of compression elasticity when extruding of first elastic cushion by axle sleeve, and elastic force, which has axle sleeve, to be prevented from looseningFunction.
Further, the second elastic cushion is connected on the right side of the card slot, the material of second elastic cushion is that elasticity is resistance toRubber is pressed, is equipped with via hole in second elastic cushion, the right contact of second elastic cushion is connected with axle sleeve, when the second elasticityWhen padding the extruding by axle sleeve, have the function of that compression elasticity, elastic force make axle sleeve have the function of preventing from loosening.
Further, contact is connected with screw rod in the avoiding hollow groove, and the surface sliding sleeve of the screw rod is connected to spring pad, instituteThe surface sliding sleeve for stating screw rod is connected to connecting hole and via hole, and the screw rod has been connected through a screw thread threaded hole, the avoiding hollow groove of settingCan be exposed outside to avoid the left end of screw rod, it can in rotation, object touches screw rod and causes to loosen to avoid rotation axis.
Further, the left contact of the limit base is connected with axle sleeve, and the middle position of the limit base is equipped with firstThrough-hole, fixing sleeve is connected to transmission shaft in the first through hole, and when axle sleeve is socketed in the surface of transmission shaft, limit base has limitEffect.
3. beneficial effect
Compared with the prior art, the present invention has the advantages that
(1) axle sleeve of this programme setting has the function of anti-skidding, when axle sleeve is socketed in the surface of transmission shaft, non-slipping block cardIncrease the contact area between transmission shaft and axle sleeve in into non-slip groove, improves the connectivity robustness of cathode baffle, and be arrangedThe first elastic cushion and the second elastic cushion have the function of compression elasticity, can to avoid for a long time use rear axle housing there is left and right positionThe case where shifting, occurs, and improves the stability in use of cathode baffle.
(2) inner wall of sets of holes is equipped with non-slip groove, and the shape of non-slip groove is semicircle, and non-slip groove is equally spaced in a ring, preventsNon-slipping block is connected in sliding slot, the non-slip groove of setting can increase the contact area of axle sleeve and transmission shaft, have the function of anti-skidding.
(3) inner wall of sets of holes is equipped with limiting slot, the shape of limiting slot be it is rectangular, limited block is connected in limiting slot, is limitedThe shape of block be it is rectangular, when axle sleeve is socketed in the surface of transmission shaft, limited block have the function of positioning fool proof, work can be improvedMake the installation effectiveness of personnel.
The material of (4) first elastic cushions is elastic pressure-resistant rubber, and the left contact of the first elastic cushion is connected with axle sleeve, firstThe middle position of elastic cushion is equipped with the second through-hole, and sliding sleeve is connected to transmission shaft in the second through-hole, when the first elastic cushion is by axle sleeveExtruding when, have the function of compression elasticity, elastic force makes axle sleeve have the function of preventing from loosening.
(5) the second elastic cushion is connected on the right side of card slot, the material of the second elastic cushion is elastic pressure-resistant rubber, the second elasticityVia hole is equipped in pad, the right contact of the second elastic cushion is connected with axle sleeve, when extruding of second elastic cushion by axle sleeve, hasThe effect of compression elasticity, elastic force make axle sleeve have the function of preventing from loosening.
(6) contact is connected with screw rod in avoiding hollow groove, and the surface sliding sleeve of screw rod is connected to spring pad, the surface sliding sleeve of screw rodIt is connected to connecting hole and via hole, screw rod has been connected through a screw thread threaded hole, and the avoiding hollow groove of setting can be exposed to avoid the left end of screw rodIt outside, can in rotation, object touches screw rod and causes to loosen to avoid rotation axis.
(7) left contact of limit base is connected with axle sleeve, and the middle position of limit base is equipped with first through hole, in first through holeFixing sleeve is connected to transmission shaft, and when axle sleeve is socketed in the surface of transmission shaft, limit base has the function of limit.
Detailed description of the invention
Fig. 1 is overall structure stereogram of the invention；
Fig. 2 is transmission shaft structure side view of the invention；
Fig. 3 is axle sleeve structure side view of the invention；
Fig. 4 is fastening holder structure cross-sectional view of the invention；
Fig. 5 is limit base structure sectional view of the invention.
Figure label explanation:
1 plate body, 2 axle sleeves, 21 sets of holes, 22 non-slip grooves, 23 limiting slots, 3 transmission shafts, 31 non-slipping blocks, 32 limited blocks, 33 screw threadsHole, 4 limit bases, 41 first through hole, 42 locating slots, 43 first elastic cushions, 44 second through-holes, 5 fastening seats, 51 card slots, 52 secondElastic cushion, 53 via holes, 54 avoiding hollow grooves, 55 screw rods, 56 spring pads, 57 connecting holes.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, completeSite preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based onEmbodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every otherEmbodiment shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that the instruction such as term " on ", "lower", "inner", "outside", " top/bottom end "Orientation or positional relationship be based on the orientation or positional relationship shown in the drawings, be merely for convenience of description the present invention and simplification retouchIt states, rather than the device or element of indication or suggestion meaning must have a particular orientation, be constructed and operated in a specific orientation,Therefore it is not considered as limiting the invention.In addition, term " first ", " second " are used for description purposes only, and cannot understandFor indication or suggestion relative importance.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " installation " " is setBe equipped with ", " be arranged/connect ", " connection " etc., shall be understood in a broad sense, such as " connection ", may be a fixed connection, be also possible to removableConnection is unloaded, or is integrally connected；It can be mechanical connection, be also possible to be electrically connected；It can be directly connected, it can also be inBetween medium be indirectly connected, can be the connection inside two elements.It for the ordinary skill in the art, can be specificSituation understands the concrete meaning of above-mentioned term in the present invention.
Embodiment 1:
Fig. 1-5, a kind of crank-rocker style magnetron sputtering apparatus cathode baffle, including plate body 1 are please referred to, Fig. 1-5 is please referred to,One end of plate body 1 is fixedly connected with axle sleeve 2, and the lower end of plate body 1 is hinged with another baffle, and plate body 1 is under the drive of transmission shaft 3Have the function of folding and unfolding, belong to the prior art, axle sleeve 2 is used to for plate body 1 connecting with the transmission shaft 3 of driving device motorGet up, allows transmission shaft 3 to drive plate body 1 mobile, driving device motor belongs to the prior art, and the interposition of axle sleeve 2 installsThere are sets of holes 21, sliding sleeve is connected to transmission shaft 3 in sets of holes 21, and the surface of transmission shaft 3 is fixedly connected with non-slipping block 31, non-slipping block 31Shape is semicircle, and when non-slipping block 31 sticks into non-slip groove 22, axle sleeve 2, which has, prevents transmission shaft 3 from skidding in sets of holes 21Phenomenon occurs, and non-slipping block 31 is equally spaced in a ring, and the surface of transmission shaft 3 is fixedly connected with limited block 32, is mounted in axle sleeve 2When on transmission shaft 3, limited block 32 can help staff to be rapidly performed by positioning, and the left end middle position of transmission shaft 3 is equipped withThreaded hole 33, threaded hole 33 are connected through a screw thread screw rod 55, for the position of fixed fastening seat 5, the surface fixing sleeve of transmission shaft 3It is connected to limit base 4, the left side of limit base 4 is equipped with locating slot 42, and the left side of locating slot 42 is connected with the first elastic cushion 43, axle sleeve 2Left end connect have fastening seat 5, fastening seat 5 right side be equipped with card slot 51, fastening seat 5 left side be equipped with avoiding hollow groove 54.
Referring to Fig. 3, the inner wall of sets of holes 21 is equipped with non-slip groove 22, the shape of non-slip groove 22 is semicircle, and non-slip groove 22 is inAnnular is equally spaced, and non-slipping block 31 is connected in non-slip groove 22, and the non-slip groove 22 of setting can increase axle sleeve 2 and transmission shaft 3Contact area, has the function of anti-skidding, and the inner walls of sets of holes 21 is equipped with limiting slot 23, and the shape of limiting slot 23 is rectangular, limiting slotBe connected with limited block 32 in 23, the shape of limited block 32 be it is rectangular, when axle sleeve 2 is socketed in the surface of transmission shaft 3, limited block 32Have the function of positioning fool proof, the installation effectiveness of staff can be improved.
Figure 4 and 5 are please referred to, the material of the first elastic cushion 43 is elastic pressure-resistant rubber, the left contact of the first elastic cushion 43It is connected with axle sleeve 2, the middle position of the first elastic cushion 43 is equipped with the second through-hole 44, and sliding sleeve is connected to transmission shaft in the second through-hole 443, when extruding of first elastic cushion 43 by axle sleeve 2, have the function of compression elasticity, elastic force, which has axle sleeve 2, prevents pineDynamic function, the right side of card slot 51 are connected with the second elastic cushion 52, and the material of the second elastic cushion 52 is elastic pressure-resistant rubber, and secondVia hole 53 is equipped in elastic cushion 52, the right contact of the second elastic cushion 52 is connected with axle sleeve 2, when the second elastic cushion 52 is by axle sleeveWhen 2 extruding, have the function of that compression elasticity, elastic force make axle sleeve 2 have the function of preventing from loosening.
Figure 4 and 5 are please referred to, contact is connected with screw rod 55 in avoiding hollow groove 54, and the surface sliding sleeve of screw rod 55 is connected to spring pad56, the surface sliding sleeve of screw rod 55 is connected to connecting hole 57 and via hole 53, and screw rod 55 has been connected through a screw thread threaded hole 33, settingAvoiding hollow groove 54 can be exposed outside to avoid the left end of screw rod 55, can to avoid rotation axis 3 rotation when object touch screw rod 55It causes to loosen, the left contact of limit base 4 is connected with axle sleeve 2, and the middle position of limit base 4 is equipped with first through hole 41, and first is logicalFixing sleeve is connected to transmission shaft 3 in hole 41, and when axle sleeve 2 is socketed in the surface of transmission shaft 3, limit base 4 has the function of limit.
When the crank-rocker style magnetron sputtering apparatus cathode baffle is installed, the alignment of limiting slot 23 that first axle sleeve 2 is arranged is passedThe limited block 32 of 3 surface of moving axis setting, then move right axle sleeve 2, and transmission shaft 3 packs into sets of holes 21 at this time, 31 He of non-slipping blockLimited block 32 is sticked into respectively in non-slip groove 22 and limiting slot 23, and the axle sleeve 2 of setting has the function of anti-skidding, improves cathode baffleConnectivity robustness, continue the axle sleeve 2 that moves right, plate body 1 moves right with axle sleeve 2, axle sleeve 2 move right squeeze the first bulletProperty pad 43, the first elastic cushion 43 forms compression elasticity, then will fasten seat 5 by screw rod 55 and be fastened on the left end of transmission shaft 3, suitableHour hands turn screw rod 55, and screw rod 55 drives fastening seat 5 to move right by screw thread, and fastening seat 5 moves right so that axle sleeve 2 squeezesSecond elastic cushion 52, the second elastic cushion 52 form compression elasticity, and screw rod 55 to fasten seat 5 for fixed hub 2 after tighteningLeft position, the first elastic cushion 43 and the second elastic cushion 52 of setting have the function of compression elasticity, can be to avoid making for a long timeThere is the generation of the case where left and right displacement with rear axle housing 2, improves the stability in use of cathode baffle.
The foregoing is intended to be a preferred embodiment of the present invention；But scope of protection of the present invention is not limited thereto.Anyone skilled in the art in the technical scope disclosed by the present invention, according to the technique and scheme of the present invention and itsIt improves design and is subject to equivalent substitution or change, should be covered by the scope of protection of the present invention.