技术领域technical field
本发明属于表面处理防护技术领域，更具体地，涉及一种高温耐磨自润滑TiB2基涂层及其制备方法和应用。The invention belongs to the technical field of surface treatment protection, and more particularly, relates to a high-temperature wear-resistant self-lubricating TiB2 -based coating and a preparation method and application thereof.
背景技术Background technique
TiB2是一类过渡族金属硼化物，具有一系列优异的物化性能，比如高的红硬性、高熔点、高的耐磨性和耐腐蚀性、优异的化学稳定性和惰性，使得TiB2涂层在很多高温恶劣环境下具有巨大潜在应用优势，如钛合金切削、高温热压成形等方面。但TiB2涂层在高温环境易与氧反应，生成B2O3和TiO2等氧化产物。TiO2结构疏松，性能差；B2O3熔点低，高温易挥发，这使得TiB2涂层高温摩擦磨损性能较差，极大限制了其在实际工业上的应用。对工模具表面硬质保护涂层，对涂层要求一方面在高温下能起到润滑作用，降低摩擦系数；另一方面要求涂层具有很高的强韧性，能抵御磨损，延长零件使用寿命。这就要求涂层在高温下能保持很高的结构稳定性，维持机械强度，同时在摩擦过程中能在表面能形成软性的润滑层，降低摩擦系数，降低能耗。TiB2 is a class of transition metal borides with a series of excellent physical and chemical properties, such as high red hardness, high melting point, high wear resistance and corrosion resistance, excellent chemical stability and inertness, making TiB2 coated The layer has huge potential application advantages in many high temperature and harsh environments, such as titanium alloy cutting, high temperature hot pressing and so on. But TiB2 coating is easy to react with oxygen in high temperature environment to generate oxidation products such as B2 O3 and TiO2 . TiO2 has a loose structure and poor performance; B2 O3 has a low melting point and is volatile at high temperature, which makes the TiB2 coating poor in high temperature friction and wear performance, which greatly limits its practical industrial application. For the hard protective coating on the surface of the tool and die, on the one hand, the coating is required to be able to lubricate at high temperature and reduce the friction coefficient; . This requires the coating to maintain high structural stability and mechanical strength at high temperatures, and at the same time, during the friction process, a soft lubricating layer can be formed on the surface to reduce the friction coefficient and reduce energy consumption.
发明内容SUMMARY OF THE INVENTION
为了解决上述现有技术存在的不足和缺点，本发明提供了一种高温自润滑TiB2基涂层。In order to solve the above-mentioned deficiencies and shortcomings of the prior art, the present invention provides a high-temperature self-lubricating TiB2- based coating.
本发明的另一目的在于提供一种上述高温自润滑TiB2基涂层的制备方法。Another object of the present invention is to provide a preparation method of the above-mentioned high-temperature self-lubricating TiB2 -based coating.
本发明的再一目的在于提供上述高温自润滑TiB2基涂层的应用。Another object of the present invention is to provide the application of the above-mentioned high temperature self-lubricating TiB2 based coating.
本发明的目的通过下述技术方案来实现：The object of the present invention is achieved through the following technical solutions:
一种高温耐磨自润滑TiB2基涂层，所述TiB2基涂层是将x元素和y元素固溶在TiB2晶体中，所述x元素为钇或镧；所述y元素为钒、钼或钨。A high-temperature wear-resistant self-lubricating TiB2 -based coating, the TiB2 -based coating is a solid solution of x element and y element in TiB2 crystal, the x element is yttrium or lanthanum; the y element is vanadium , molybdenum or tungsten.
优选地，所述x元素含量为0.5～10％、y元素含量为0～5％，其余含量为TiB2晶体。Preferably, the content of the x element is 0.5-10%, the content of the y element is 0-5%, and the remaining content is TiB2 crystal.
所述的高温耐磨自润滑TiB2基涂层的制备方法，包括以下具体步骤：The preparation method of the high-temperature wear-resistant self-lubricating TiB2 -based coating comprises the following specific steps:
S1.用酒精超声清洗基体，再用去离子水漂洗，干燥压缩氮气吹干；S1. ultrasonically clean the substrate with alcohol, rinse with deionized water, dry with compressed nitrogen and blow dry;
S2.将基体置于真空室的工件支架上，真空室抽真空至真空度6.0×10–3～5.0 ×10–3Pa，开启离子源，向离子源通入120sccm氩气，设置离子源功率1～2kW，设置工件支架偏压为800～1000V，工作时间为20～40min分钟进行离子束刻蚀；S2. Place the substrate on the workpiece support of the vacuum chamber, evacuate the vacuum chamber to a vacuum degree of 6.0×10-3 ～5.0 ×10-3 Pa, turn on the ion source, pass 120sccm argon gas into the ion source, and set the power of the ion source 1~2kW, set the bias voltage of the workpiece support to 800~1000V, and the working time is 20~40min for ion beam etching;
S3.向真空室通入氩气，同时开启离子源和三个磁控溅射源，其中一个磁控溅射源装载TiB2靶材，另两个磁控溅射源装载金属靶材A和金属靶材B；控制真空室整体气压为0.4～0.6Pa；设置磁控溅射功率1kW～2kW；将基体的偏压设置为60～80V，沉积时间为3～4小时，沉积得高温耐磨自润滑TiB2基涂层；S3. Pour argon gas into the vacuum chamber, and turn on the ion source and three magnetron sputtering sources at the same time, one of which is loaded with TiB2 target, and the other two magnetron sputtering sources are loaded with metal target A and Metal target B; control the overall air pressure of the vacuum chamber to be 0.4-0.6Pa; set the magnetron sputtering power to 1kW-2kW; set the bias voltage of the substrate to 60-80V, the deposition time is 3-4 hours, and the deposited high temperature wear-resistant Self-lubricating TiB2 -based coating;
S4.关闭电源，待真空室的温度降至室温，打开真空室取出基体，在基体表面形成高温耐磨自润滑TiB2基涂层。S4. Turn off the power supply, wait for the temperature of the vacuum chamber to drop to room temperature, open the vacuum chamber to take out the substrate, and form a high-temperature wear-resistant self-lubricating TiB2- based coating on the surface of the substrate.
优选地，步骤S3中所述金属靶材A为钇靶或镧靶；所述金属靶材B为钒靶、钼靶或钨靶。Preferably, in step S3, the metal target A is a yttrium target or a lanthanum target; the metal target B is a vanadium target, a molybdenum target or a tungsten target.
优选地，步骤S3中所述金属靶材A和金属靶材B的纯度为99.2％～99.8％。Preferably, the purity of the metal target material A and the metal target material B in step S3 is 99.2%-99.8%.
述的高温耐磨自润滑TiB2基涂层在机械零部件、刀具或模具表面防护领域中的应用。The application of the high-temperature wear-resistant self-lubricating TiB2 -based coating described above in the field of surface protection of mechanical parts, tools or molds.
与现有技术相比，本发明具有以下有益效果：Compared with the prior art, the present invention has the following beneficial effects:
1.本发明在TiB2基涂层中同时引入x金属元素和y金属元素，在增强涂层的柔韧性和附着力的同时，改善涂层高温抗摩擦磨损性能和抗氧化性能，使得涂层适用于更苛刻的应用环境，如机械零部件、刀具、模具等产品表面的防护。1. The present invention simultaneously introduces x metal elements and y metal elements into the TiB2 -based coating, and at the same time enhances the flexibility and adhesion of the coating, improves the high temperature friction and wear resistance and oxidation resistance of the coating, making the coating It is suitable for more harsh application environments, such as the protection of product surfaces such as mechanical parts, tools, molds, etc.
2.本发明TiB2基涂层表面具有抗粘结、高温自润滑等功能，降低TiB2涂层刀具在高速切削钛合金时的摩擦磨损和金属粘着，使得涂层更适用于更苛刻的应用环境，实现更佳的表面防护效果。2. The surface of the TiB2- based coating of the present invention has functions such as anti-adhesion, high temperature self-lubrication, etc., which reduces the friction and wear and metal adhesion of the TiB2- coated tool when cutting titanium alloys at high speed, making the coating more suitable for harsher applications. environment for better surface protection.
附图说明Description of drawings
图1为本发明TiB2基涂层结构示意图。Figure 1 is a schematic diagram of the structure of the TiB2 -based coating of the present invention.
图2为实施例1所制备的TiB2基涂层常温和在500℃摩擦磨损试验图。FIG. 2 is a graph of the friction and wear test of the TiB2 -based coating prepared in Example 1 at room temperature and at 500°C.
图3为实施例1所制备的TiB2基涂层在500℃摩擦磨损形貌SEM照片。Figure 3 is a SEM photograph of the friction and wear morphology of the TiB2 -based coating prepared in Example 1 at 500°C.
具体实施方式Detailed ways
下面结合具体实施例进一步说明本发明的内容，但不应理解为对本发明的限制。若未特别指明，实施例中所用的技术手段为本领域技术人员所熟知的常规手段。除非特别说明，本发明采用的试剂、方法和设备为本技术领域常规试剂、方法和设备。The content of the present invention is further described below in conjunction with specific embodiments, but should not be construed as a limitation of the present invention. Unless otherwise specified, the technical means used in the examples are conventional means well known to those skilled in the art. Unless otherwise specified, the reagents, methods and equipment used in the present invention are conventional reagents, methods and equipment in the technical field.
实施例1Example 1
1.复合镀膜机准备：本实施选择采用复合磁控溅射镀膜机，包括一个真空室、三个磁控溅射源、一个离子源和同时能旋转的工件支架，工件支架安装在真空室内部；在其中两个磁控溅射源分别装载纯度为99.8％的钇靶和纯度为99.8％的钒靶，另外一个磁控溅射源装载纯度为99.8％的TiB2靶；1. Preparation of composite coating machine: In this implementation, a composite magnetron sputtering coating machine is selected, including a vacuum chamber, three magnetron sputtering sources, an ion source and a workpiece support that can be rotated at the same time. The workpiece support is installed inside the vacuum chamber. ; Two magnetron sputtering sources are loaded with 99.8% pure yttrium target and 99.8% pure vanadium target, and the other magnetron sputtering source is loaded with 99.8% pure TiB2 target;
2.样品预清洗处理：利用酒精超声波清洗待镀膜样品，然后用去离子水漂洗，用干燥压缩氮气吹干；2. Sample pre-cleaning treatment: use alcohol to ultrasonically clean the sample to be coated, then rinse with deionized water, and dry with dry compressed nitrogen;
3.将基体置于真空室的工件支架上，真空室抽真空，至真空度5.0×10–3Pa以下，开启离子源，向离子源通入120sccm氩气，设置离子源功率2kW，设置工件支架偏压1000V，工作时间为40min；3. Place the substrate on the workpiece support of the vacuum chamber, evacuate the vacuum chamber to a degree of vacuum below 5.0×10-3 Pa, turn on the ion source, pass 120sccm argon gas into the ion source, set the power of the ion source to 2kW, and set the workpiece The bracket bias is 1000V, and the working time is 40min;
4.同时开启装备有单质钇靶的磁控溅射、装备有单质钒靶的磁控溅射，同时向真空室通入氩气控制腔压为0.4Pa；设置磁控溅射功率2kW；将基体的偏压设置为60V，沉积时间为3h，制得钇和钒金属掺杂高温耐磨自润滑TiB2基涂层；4. Turn on the magnetron sputtering equipped with the elemental yttrium target and the magnetron sputtering equipped with the elemental vanadium target at the same time, and at the same time pass the argon gas into the vacuum chamber to control the chamber pressure to 0.4Pa; set the magnetron sputtering power to 2kW; set the magnetron sputtering power to 2kW; The bias voltage of the substrate was set to 60V, and the deposition time was 3h to obtain a yttrium and vanadium metal doped high-temperature wear-resistant self-lubricating TiB2 -based coating;
5.关闭电源，待真空室温度降至室温，打开真空室取出基体，该基体表面形成高温耐磨自润滑TiB2基涂层。5. Turn off the power supply, and when the temperature of the vacuum chamber drops to room temperature, open the vacuum chamber to take out the substrate, which forms a high-temperature wear-resistant self-lubricating TiB2- based coating on the surface of the substrate.
图1为本发明TiB2基涂层结构示意图。其中，圆形代表掺杂元素x(x＝Y或La)，三角形代表掺杂元素y(y＝V、Mo或W)，其余部分为TiB2涂层。本实施例所形成的TiB2基涂层中，x金属元素钇的原子百分比含量为10％、y金属元素钒的原子百分比含量为5％，TiB2的原子百分比含量为85％；TiB2基涂层中TiB2以晶体形式存在，掺杂钇元素和钒元素以固溶形式存在TiB2晶体中。Fig. 1 is a schematic diagram of the structure of the TiB2 -based coating of the present invention. Among them, the circle represents the doping element x (x=Y or La), the triangle represents the doping element y (y=V, Mo or W), and the rest is theTiB coating. In the TiB2 -based coating formed in this example, the atomic percentage content of x metal element yttrium is 10%, the atomic percentage content of y metal element vanadium is 5%, and the atomic percentage content of TiB2 is 85%; The TiB2 in the coating exists in the form of crystal, and the doped yttrium and vanadium elements exist in the TiB2 crystal in the form of solid solution.
图2为本实施例所制备的TiB2基涂层常温和在500℃摩擦磨损试验图。从图2中可知，常温下TiVYB涂层相较于TiB2涂层的摩擦磨损系数略低，在500℃下TiVYB涂层的摩擦系数较TiB2涂层的摩擦磨损系数出现明显下降；图3为本实施例所制备的TiB2基涂层在500℃摩擦磨损形貌SEM照片。其中，(a)为TiB2，(b)为TiVYB，从图3中可知，TiB2涂层的磨痕形貌出现明显分层沟壑，TiVYB涂层相较于TiB2涂层磨痕形貌均匀，磨痕宽度也较窄。图2和图3说明掺杂V和Y元素在高温环境下形成了自润滑相，减低了涂层的磨损率，改善了TiB2基涂层的高温摩擦性能。FIG. 2 is a graph of the friction and wear test of the TiB2 -based coating prepared in this example at room temperature and at 500°C. It can be seen from Figure 2 that the friction and wear coefficient of TiVYB coating is slightly lower than that of TiB2 coating at room temperature, and the friction and wear coefficient of TiVYB coating is significantly lower than that of TiB2 coating at 500 °C; Figure 3 The SEM photograph of the friction and wear morphology of the TiB2 -based coating prepared in this example at 500 °C. Among them, (a) is TiB2 , (b) is TiVYB. It can be seen from Figure 3 that the wear scar morphology of TiB2 coating has obvious layered grooves. Compared with TiB2 coating, the wear scar morphology of TiVYB coating Uniform and narrow wear scar width. Figures 2 and 3 illustrate that the doping of V and Y elements forms a self-lubricating phase in a high temperature environment, which reduces the wear rate of the coating and improves the high temperature friction performance of the TiB2- based coating.
实施例2Example 2
1.镀膜机准备：本实施选择采用的离子束复合磁控溅射镀膜机，包括一个真空室、三个磁控溅射源、一个离子源和同时能旋转的工件支架，工件支架安装在真空室内部；在其中两个磁控溅射源分别装载纯度为99.5％的镧靶和纯度为99.5％的钼靶，另外一个磁控溅射源装载纯度为99.5％的TiB2靶；1. Preparation of coating machine: The ion beam composite magnetron sputtering coating machine selected for this implementation includes a vacuum chamber, three magnetron sputtering sources, an ion source and a workpiece support that can rotate at the same time. The workpiece support is installed in the vacuum chamber. Inside the chamber; two magnetron sputtering sources are loaded with 99.5% pure lanthanum target and 99.5% pure molybdenum target, and the other magnetron sputtering source is loaded with 99.5% pure TiB2 target;
2.样品(基体)预清洗处理：利用酒精超声波清洗待镀膜样品(基体)，然后用去离子水漂洗，用干燥压缩氮气吹干；2. Sample (substrate) pre-cleaning treatment: use alcohol to ultrasonically clean the sample (substrate) to be coated, then rinse with deionized water, and dry with dry compressed nitrogen;
3.将基体置于真空室的工件支架上，真空室抽真空，至真空度5.0×10–3Pa以下，开启离子源，向离子源通入120sccm氩气，设置离子源功率1.5kW，设置工件支架偏压900V，工作时间为30min；3. Place the substrate on the workpiece support of the vacuum chamber, evacuate the vacuum chamber to a degree of vacuum below 5.0×10-3 Pa, turn on the ion source, pass 120sccm argon into the ion source, set the power of the ion source to 1.5kW, set The bias voltage of the workpiece support is 900V, and the working time is 30min;
4.同时开启装备有单质镧靶、装备有单质钨靶和装备TiB2靶的磁控溅射源，同时向真空室通入氩气，控制腔体气压为0.5Pa；磁控溅射功率3kW；将基体的偏压设置为70V，沉积时间为4h，制得镧和钼金属掺杂高温自润滑TiB2基涂层；4. Turn on the magnetron sputtering source equipped with elemental lanthanum target, elemental tungsten target and TiB2 target at the same time, and at the same time pass argon gas into the vacuum chamber, and control the pressure of the chamber to 0.5Pa; the magnetron sputtering power is 3kW ; The bias voltage of the substrate is set to 70V, and the deposition time is 4h to obtain a lanthanum and molybdenum metal doped high-temperature self-lubricating TiB2- based coating;
5.关闭电源，待真空室温度降至室温，打开真空室取出基体，该基体表面形成高温耐磨自润滑TiB2基涂层。5. Turn off the power supply, and when the temperature of the vacuum chamber drops to room temperature, open the vacuum chamber to take out the substrate, which forms a high-temperature wear-resistant self-lubricating TiB2- based coating on the surface of the substrate.
本实施例所形成的TiB2基涂层中，x金属元素镧的原子百分比含量为8％、y金属元素钼的原子百分比含量为4％，TiB2的原子百分比含量为88％；TiB2基涂层中TiB2以晶体形式存在，掺杂镧元素和钼元素以固溶形式存在TiB2晶体中。In the TiB2 -based coating formed in this example, the atomic percentage content of x metal element lanthanum is 8%, the atomic percentage content of y metal element molybdenum is 4%, and the atomic percentage content of TiB2 is 88%; The TiB2 in the coating exists in the form of crystals, and the doped lanthanum and molybdenum elements exist in the TiB2 crystal in the form of solid solution.
实施例3Example 3
1.复合镀膜机准备：本实施选择采用的离子束复合磁控溅射镀膜机，包括一个真空室、两个磁控溅射源、一个离子源和同时能旋转的工件支架，工件支架安装在真空室内部；在其中两个磁控溅射源分别装载纯度为99.6％的钇靶和纯度为99.6％的钨靶，另外一个磁控溅射源装载纯度为99.6％的TiB2靶；1. Preparation of composite coating machine: The ion beam composite magnetron sputtering coating machine selected for this implementation includes a vacuum chamber, two magnetron sputtering sources, an ion source and a workpiece support that can rotate at the same time. Inside the vacuum chamber; two magnetron sputtering sources are loaded with 99.6% pure yttrium target and 99.6% pure tungsten target, and the other magnetron sputtering source is loaded with 99.6% pure TiB2 target;
2.样品(基体)预清洗处理：利用酒精超声波清洗待镀膜样品(基体)，然后用去离子水漂洗，用干燥压缩氮气吹干；2. Sample (substrate) pre-cleaning treatment: use alcohol to ultrasonically clean the sample (substrate) to be coated, then rinse with deionized water, and dry with dry compressed nitrogen;
3.将基体置于真空室的工件支架上，真空室抽真空，至真空度5.0×10–3Pa以下，开启离子源，向离子源通入120sccm氩气，设置离子源功率1kW，设置工件支架偏压800V，工作时间为30min；3. Place the substrate on the workpiece support of the vacuum chamber, evacuate the vacuum chamber to a degree of vacuum below 5.0×10-3 Pa, turn on the ion source, pass 120sccm argon gas into the ion source, set the power of the ion source to 1kW, and set the workpiece The bracket bias is 800V, and the working time is 30min;
4.同时开启装备有单质钨靶、装备有单质镍靶和装备TiB2靶的磁控溅射源，同时向真空室氩气，控制腔体气压为0.6Pa，磁控溅射功率1.5kW，将基体的偏压设置为80V，沉积时间为3h，制得钇和钨金属掺杂高温耐磨自润滑TiB2基涂层：4. Turn on the magnetron sputtering source equipped with elemental tungsten target, elemental nickel target and TiB2 target at the same time, and at the same time supply argon gas to the vacuum chamber, control the air pressure of the chamber to 0.6Pa, and the magnetron sputtering power to 1.5kW. The bias voltage of the substrate is set to 80V, and the deposition time is 3h to prepare the yttrium and tungsten metal doped high-temperature wear-resistant self-lubricating TiB2 -based coating:
5.关闭电源，待真空室温度降至室温，打开真空室取出基体，该基体表面形成高温耐磨自润滑TiB2基涂层。5. Turn off the power supply, and when the temperature of the vacuum chamber drops to room temperature, open the vacuum chamber to take out the substrate, which forms a high-temperature wear-resistant self-lubricating TiB2- based coating on the surface of the substrate.
本实施例所形成的TiB2基涂层中，x金属元素钇的原子百分比含量为6％、y金属元素钨的原子百分比含量为3％，TiB2原子百分比含量为91％；TiB2基涂层中TiB2以晶体形式存在，掺杂钇元素和钨元素以固溶形式存在TiB2晶体中。In the TiB2 -based coating formed in this example, the atomic percentage content of the x metal element yttrium is 6%, the atomic percentage content of the y metal element tungsten is 3%, and the atomic percentage content of TiB2 is 91%; The TiB2 in the layer exists in the form of crystal, and the doped yttrium and tungsten elements exist in the TiB2 crystal in the form of solid solution.
实施例4Example 4
1.复合镀膜机准备：本实施选择采用的离子束复合磁控溅射镀膜机，包括一个真空室、三个磁控溅射源、一个离子源和同时能旋转的工件支架，工件支架安装在真空室内部；在其中两个磁控溅射源分别装载纯度为99.8％的镧靶和纯度为99.8％的钼靶，另外一个磁控溅射源装载纯度为99.8％的TiB2靶；1. Preparation of composite coating machine: The ion beam composite magnetron sputtering coating machine selected for this implementation includes a vacuum chamber, three magnetron sputtering sources, an ion source and a workpiece support that can rotate at the same time. Inside the vacuum chamber; two magnetron sputtering sources are loaded with 99.8% pure lanthanum target and 99.8% pure molybdenum target, and the other magnetron sputtering source is loaded with 99.8% pure TiB2 target;
2.样品(基体)预清洗处理：利用酒精超声波清洗待镀膜样品(基体)，然后用去离子水漂洗，用干燥压缩氮气吹干；2. Sample (substrate) pre-cleaning treatment: use alcohol to ultrasonically clean the sample (substrate) to be coated, then rinse with deionized water, and dry with dry compressed nitrogen;
3.将基体置于真空室的工件支架上，真空室抽真空，至真空度5.0×10–3Pa以下，开启离子源，向离子源通入120sccm氩气，设置离子源功率2kW，设置工件支架偏压1000V，工作时间为30min；3. Place the substrate on the workpiece support of the vacuum chamber, evacuate the vacuum chamber to a degree of vacuum below 5.0×10-3 Pa, turn on the ion source, pass 120sccm argon gas into the ion source, set the power of the ion source to 2kW, and set the workpiece The bracket bias is 1000V, and the working time is 30min;
4.同时开启装备有单质镧靶、装备有单质钼靶和装备TiB2靶的磁控溅射源，控制腔体气压0.5Pa；设置磁控溅射功率2kW；将基体的偏压设置为70V，沉积时间为2h，制得镧和钼金属掺杂高温耐磨自润滑TiB2基涂层；4. Turn on the magnetron sputtering source equipped with elemental lanthanum target, elemental molybdenum target and TiB2 target at the same time, control the air pressure of the cavity to 0.5Pa; set the magnetron sputtering power to 2kW; set the bias voltage of the substrate to 70V , the deposition time was 2h, and lanthanum and molybdenum metal doped high temperature wear-resistant self-lubricating TiB2 -based coatings were prepared;
5.关闭电源，待真空室温度降至室温，打开真空室取出基体，该基体表面形成高温耐磨自润滑TiB2基涂层。5. Turn off the power supply, and when the temperature of the vacuum chamber drops to room temperature, open the vacuum chamber to take out the substrate, which forms a high-temperature wear-resistant self-lubricating TiB2- based coating on the surface of the substrate.
本实施例所形成的TiB2基涂层中，x金属元素镧的原子百分比含量为4％、y金属元素钼的原子百分比含量为2％，TiB2原子的原子百分比含量为96％；TiB2基涂层中TiB2以晶体形式存在，掺杂镧元素和钼元素以固溶形式存在TiB2晶体中。In the TiB2 -based coating formed in this example, the atomic percentage content of the x metal element lanthanum is 4%, the atomic percentage content of the y metal element molybdenum is 2%, and the atomic percentage content of TiB2 is 96%; TiB2 In the base coating, TiB2 exists in the form of crystal, and the doped lanthanum and molybdenum elements exist in the TiB2 crystal in the form of solid solution.
上述实施例为本发明较佳的实施方式，但本发明的实施方式并不受上述实施例的限制，其他的任何未背离本发明的精神实质与原理下所作的改变、修饰、替代、组合和简化，均应为等效的置换方式，都包含在本发明的保护范围之内。The above-mentioned embodiments are preferred embodiments of the present invention, but the embodiments of the present invention are not limited by the above-mentioned embodiments, and any other changes, modifications, substitutions, combinations and The simplification should be equivalent replacement manners, which are all included in the protection scope of the present invention.
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811392291.8ACN109930108A (en) | 2018-11-21 | 2018-11-21 | A kind of high-temperature wear-resisting self-lubricating TiB2Base coating and its preparation method and application |
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811392291.8ACN109930108A (en) | 2018-11-21 | 2018-11-21 | A kind of high-temperature wear-resisting self-lubricating TiB2Base coating and its preparation method and application |
| Publication Number | Publication Date |
|---|---|
| CN109930108Atrue CN109930108A (en) | 2019-06-25 |
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811392291.8APendingCN109930108A (en) | 2018-11-21 | 2018-11-21 | A kind of high-temperature wear-resisting self-lubricating TiB2Base coating and its preparation method and application |
| Country | Link |
|---|---|
| CN (1) | CN109930108A (en) |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110484881A (en)* | 2019-08-15 | 2019-11-22 | 广东工业大学 | A kind of densification titanium diboride coating and its preparation method and application |
| CN112621125A (en)* | 2020-12-14 | 2021-04-09 | 桃江富硕精密机械有限公司 | High-lubrication wear-resistant mechanical arm guide rail |
| AT17511U1 (en)* | 2020-12-15 | 2022-06-15 | Plansee Se | TITANIUM-IBORIDE COATED REFRACTORY METAL COMPONENT |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1385552A (en)* | 2002-04-26 | 2002-12-18 | 邹庆化 | Carbon nitride ultrahard film plated target material and preparation method thereof |
| CN102965665A (en)* | 2012-12-09 | 2013-03-13 | 华北电力大学 | Powdered material used for preparing high-temperature wear-resistant cladding layer and preparation method thereof |
| CN103361591A (en)* | 2013-05-17 | 2013-10-23 | 山东科技大学 | Gradient wear-resistant coating for carrier roller of conveyor belt and preparation method of gradient wear-resistant coating |
| CN108251803A (en)* | 2016-12-29 | 2018-07-06 | 深圳先进技术研究院 | TiB2Self-lubricating coat in use and preparation method thereof and wear member |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1385552A (en)* | 2002-04-26 | 2002-12-18 | 邹庆化 | Carbon nitride ultrahard film plated target material and preparation method thereof |
| CN102965665A (en)* | 2012-12-09 | 2013-03-13 | 华北电力大学 | Powdered material used for preparing high-temperature wear-resistant cladding layer and preparation method thereof |
| CN103361591A (en)* | 2013-05-17 | 2013-10-23 | 山东科技大学 | Gradient wear-resistant coating for carrier roller of conveyor belt and preparation method of gradient wear-resistant coating |
| CN108251803A (en)* | 2016-12-29 | 2018-07-06 | 深圳先进技术研究院 | TiB2Self-lubricating coat in use and preparation method thereof and wear member |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110484881A (en)* | 2019-08-15 | 2019-11-22 | 广东工业大学 | A kind of densification titanium diboride coating and its preparation method and application |
| CN110484881B (en)* | 2019-08-15 | 2021-09-07 | 广东工业大学 | A kind of dense titanium diboride coating and its preparation method and application |
| CN112621125A (en)* | 2020-12-14 | 2021-04-09 | 桃江富硕精密机械有限公司 | High-lubrication wear-resistant mechanical arm guide rail |
| CN112621125B (en)* | 2020-12-14 | 2021-08-24 | 桃江富硕精密机械有限公司 | High-lubrication wear-resistant mechanical arm guide rail |
| AT17511U1 (en)* | 2020-12-15 | 2022-06-15 | Plansee Se | TITANIUM-IBORIDE COATED REFRACTORY METAL COMPONENT |
| Publication | Publication Date | Title |
|---|---|---|
| CN103409722B (en) | Method for preparing anti-erosion coating on surface of aero engine air compressor blade | |
| CN107523790B (en) | A kind of AlCrSiCuN nanometer multi-layer coating and preparation method thereof | |
| CN105112858A (en) | Nano composite cutting tool coating of multilayer structure | |
| CN111500999A (en) | A kind of self-lubricating superhard coating and preparation method thereof | |
| CN109735799A (en) | A kind of multi-layer gradient high-temperature wear-resistant coating on the surface of cutting tool and preparation method thereof | |
| CN108251797B (en) | TiAlN/CrN multilayer coating for titanium alloy cutting tool and preparation method thereof | |
| CN108796453B (en) | A kind of high temperature wear-resistant AlCrSiN nanocomposite coating and preparation method thereof | |
| CN106191794A (en) | The coating method of titanium alloy surface superhard anti-friction wear-resistant composite film and titanium alloy material | |
| CN109735804B (en) | Metal carbon compound coating and preparation method thereof | |
| CN109930108A (en) | A kind of high-temperature wear-resisting self-lubricating TiB2Base coating and its preparation method and application | |
| CN107083551A (en) | A kind of ternary doping nano composite multiple layer diamond-like coating and its preparation method and application | |
| CN116083870B (en) | A kind of three-phase nano-composite high-entropy thin film and its preparation method and application | |
| CN101469402A (en) | Preparation of fullerene-like carbon film | |
| CN113174571B (en) | Ultra-microcrystalline titanium diboride composite coating and preparation method and application thereof | |
| CN103938157B (en) | A kind of ZrNbAlN superlattice coating and preparation method | |
| CN115386828A (en) | MAX phase solid solution coating, preparation method and application thereof | |
| CN116676576A (en) | A friction-reducing and wear-resistant high-entropy carbonitride ceramic coating with single-phase rock salt structure and its preparation method | |
| CN106906442A (en) | A kind of coating with high rigidity and self lubricity and preparation method thereof | |
| CN116288219A (en) | A kind of FeCoNiCu high-entropy alloy doped amorphous carbon film and its preparation method and application | |
| CN106756816B (en) | VC/a-C:H nanocomposite coating on substrate surface and preparation method thereof | |
| CN108251803B (en) | TiB2 self-lubricating coating and its preparation method and wear-resistant component | |
| CN108611590B (en) | Method for preventing Ti alloy workpiece from being seized | |
| CN102644054B (en) | Composite surface treatment process for preparing amorphous-nanocrystalline molybdenum disilicide base abrasion resistant and corrosion resistant coatings on titanium alloy surfaces | |
| CN106467959B (en) | A solid lubricating composite coating on the surface of a substrate and its preparation method | |
| CN110484883A (en) | A kind of synthetic method and application of hard Zr-B-O nano compound film |
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication | Application publication date:20190625 |