CN109807767B - Material holding device and material detection method - Google Patents

Abstract

The invention provides a material fixing device and a material detection method, wherein the material fixing device comprises a positioning plate, a material fixing mechanism, a switching board card, a base and a universal interface, wherein the positioning plate is arranged on the base, and the base is provided with the universal interface so as to realize butt joint with external detection equipment; the switching board card is used for connecting a detection interface of a material with external detection equipment. Through the general interface of material fixing device realizes automatic, quick butt joint with external detection equipment, and material fixing device need not to be connected with external equipment when carrying out centre gripping and removal to the material and just can realize the centre gripping, has improved and has detected production line work efficiency.

Description

Material holding device and material detection method

Technical Field

The invention relates to the field of microelectronic equipment, in particular to a material fixing device and a material detection method.

Background

In the microelectronic equipment manufacturing industry, it is often necessary to perform a series of operations, such as machining, moving, and inspecting a workpiece, using various machines. The operation requires that the workpiece be clamped and positioned before machining and inspection can be performed.

In the production of microelectronic products, generally, in order to ensure the quality of products or semi-finished products, defect detection (such as OTP detection, electrical detection, etc.) needs to be performed on the products (materials). The flow chart of the material detection flow line is shown in fig. 1: firstly, a detection object (hereinafter also referred to as a material) is conveyed to a position A by a conveying device to be clamped and connected with a detection device, the material is unlocked after the detection of the position A is completed, the material is conveyed to a next position B by the conveying device to be clamped, communicated and detected after the unlocking, and the material is unlocked after the detection is completed; and so on to the next station C, D, and so on.

Moreover, the conventional operation mode has the following characteristics:

(1) a set of clamping devices is required at each detection station;

(2) when each station is detected, the material is required to be clamped with the clamping device of the current station, connected with a detection circuit interface, unlocked and the like;

(3) when the material size changes, need change in the clamping device of every detection station.

Therefore, the traditional detection mode needs more manual operations and has high operation repeatability, and the detection times are more and need to be repeatedly operated for multiple times, so that the working efficiency of the detection production line is greatly reduced, and the operation of the mechanized large-scale production line is greatly hindered.

It is noted that the information disclosed in this background section is only for enhancement of understanding of the general background of the invention and should not be taken as an acknowledgement or any form of suggestion that this information forms the prior art already known to a person skilled in the art.

Disclosure of Invention

In view of the above-mentioned shortcomings of the prior art, the present invention provides a material holding device and a material detecting method, which can quickly connect, detect and move materials with external detecting equipment.

In order to achieve the above object, in one aspect of the present application, a material holding device is provided, which includes a positioning plate, a material fixing mechanism, a switch board, a base, and a universal interface, wherein the positioning plate is disposed on the base,

the base is provided with a universal interface to realize butt joint with external detection equipment; the switching board card is used for connecting a detection interface of a material with external detection equipment.

In some embodiments, the material securing mechanism comprises a chuck mechanism and/or a suction cup for adsorbing material, the chuck mechanism being disposed about the suction cup and for clamping the material to the suction cup.

In some embodiments, the adapter card is disposed within the base.

In some embodiments, the size and model of the locator plate is consistent with the size or material of the material.

In some embodiments, the adapter board card has an adapter board card interface for interfacing with the detection interface of the material.

In some embodiments, the chuck mechanism includes a chuck, a cylinder piston, an elastic member, a force sensor, an adjusting member, and a pressure sensor, the pressure sensor is connected to the adjusting member, the force sensor is connected to one end of the elastic member, and the chuck is connected to the cylinder piston and moves under the driving of the cylinder piston.

In some embodiments, the resilient member is a spring.

In some embodiments, the adjustment member is an adjustment screw.

In some embodiments, the material is moved by moving a material holding device holding the material.

In some embodiments, the clamping force of the collet is adjusted by adjusting the adjustment member.

In some embodiments, the adapter plate card interface is disposed at a left or upper portion or a right or lower portion of the material holding device.

In another aspect of the present application, there is also provided a material detecting method using the material holding device of the above one aspect, including:

s1: the detection interface of the switching board card and the material is butted;

s2: handing over the material to the material holding device;

s3: the material holding device holds the material.

In some embodiments, the S2 further comprises: and handing over the materials on the material holding device and at a position close to the positioning plate.

In some embodiments, the S3 further comprises: the material holding device realizes holding of the material in a vacuum adsorption and/or clamping mode.

In another aspect of the present application, there is also provided a material detection method, including:

step a: the material holding device of the above one aspect is adopted to hold the material;

step b: connecting the material holding device holding the materials with external detection equipment through the universal interface;

step c: and disconnecting the universal interface from the external detection equipment after the detection is finished.

In some embodiments, the material detection method further comprises:

step d: moving the material holding device holding the material to another detection station for detection through a conveying device;

step e: and c, repeating the steps b, c and d until the whole detection production line is detected.

In some embodiments, when a plurality of materials are detected, a plurality of material holding devices are provided correspondingly, the materials are held respectively, and when one material holding device holding the materials is moved to the next detection station for detection after the detection of one detection station, another material holding device holding the materials is connected to the detection station for detection.

The invention has the beneficial effects that: the invention provides a material holding device and a material detection method, which can realize automatic and rapid butt joint with external detection equipment through a universal interface of the material holding device, and can realize clamping without being connected with the external equipment when the material holding device clamps and moves materials, thereby improving the working efficiency of a detection production line. In addition, the material holding device can realize the function of holding materials with different sizes, and the holding force of the material holding device is adjustable, so that the material holding device can play a role in safety protection for holding objects with different materials and different sizes.

Drawings

Other features and advantages of the present invention will be apparent from, or are set forth in more detail in, the accompanying drawings, which together with the description serve to explain certain principles of the invention.

FIG. 1 shows a schematic diagram of a conventional microelectronic product inspection mode;

FIG. 2 shows a top view of a material holding device according to an embodiment of the invention;

FIG. 3 shows a side view of a material holding device according to an embodiment of the invention;

FIG. 4 is a schematic diagram of the internal structure of the base of the material holding device according to the embodiment of the present invention;

FIG. 5 shows a schematic view of a material being tested according to an embodiment of the invention;

FIG. 6 is a schematic diagram of a chuck mechanism of a material holding device according to an embodiment of the present invention;

fig. 7a and 7b are schematic structural diagrams respectively illustrating a material holding device using positioning plates of different models according to an embodiment of the present invention.

It should be understood that the drawings are not necessarily to scale, showing the particular construction of the invention, and that illustrative features in the drawings, which are used to illustrate certain principles of the invention, may also be somewhat simplified. Specific design features of the invention disclosed herein, including, for example, specific dimensions, orientations, locations, and configurations, will be determined in part by the particular intended application and use environment.

Like reference characters designate like or equivalent parts throughout the several views of the drawings.

Detailed Description

In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein.

Hereinafter, specific embodiments of the present invention will be described with reference to the accompanying drawings. Referring to fig. 1-6, the present invention provides a material holding device.

Fig. 2 and 3 show a top view and a side view, respectively, of a material holding device according to an embodiment of the invention. The material fixing device mainly comprises apositioning plate 1, a material fixing mechanism, a switching board card 54 (figure 4), abase 5, auniversal interface 6 and the like. The material fixing mechanism comprises achuck mechanism 2 and/or asucker 3. Thepositioning plate 1 is arranged on thebase 5, thesucker 3 is used for adsorbing materials, thechuck mechanism 2 is arranged around thesucker 3 and used for clamping the materials on thesucker 3, thebase 5 is provided with a plurality ofuniversal interfaces 6 which can be 1, 2, 3 or more, and the technical personnel in the field can configure according to actual needs. Theadapter card 54 has anadapter card interface 4. The locating plate can have different size models, applicable centre gripping material of different size, different material, i.e. the size and the model of locating plate can be selected according to the size or the material of material for the size and the model of locating plate keep unanimous with the size or the material of material.

As shown in fig. 4, a switchingboard 54, acontrol line interface 50, a control line, andboard lines 55 and 56 for connecting the material detection interface 9 (fig. 5) of thematerial 7 to an external detection device are provided in thebase 5. Thecontrol line interface 50 is connected with a control medium in the form of gas, liquid, vacuum, etc., the control line includes avacuum line 51 andcontrol lines 52, 53, and thecontrol line 52 and/or thecontrol line 52 can be connected with a control medium in the form of gas, liquid, vacuum, etc. Preferably, the control lines are all configured as vacuum lines. Thecontrol pipeline 52 is used for connecting a cylinder in the adapterplate clamping interface 4, thevacuum pipeline 51 is used for connecting a sucker and/or a sucker cylinder, and thecontrol pipeline 53 is used for connecting thechuck cylinder 25.

FIG. 5 shows a schematic view of a material to be tested according to an embodiment of the invention. In the process of clamping the material, manually or automatically butting adetection interface 9 of the material with an adapterplate card interface 4 of a material fixing device, and simultaneously or later, controlling a cylinder in the adapterplate card interface 4 to clamp thedetection interface 9 through acontrol pipeline 52; then the material is placed on thebase 5 of the material holding device and thesuction cup 3, preferably, the material is close to the position of thepositioning plate 1. Finally, the detected material is fixedly held, thechuck mechanism 2 and thesucker 3 can independently clamp/adsorb and fix the detected material, thechuck mechanism 2 and thesucker 3 are preferably matched with each other to realize more stable fixation of the detected material in the embodiment, thechuck mechanism 2 clamps the material, and thesucker 3 is vacuumized through thevacuum pipeline 51 to adsorb the material.

Fig. 6 shows a schematic structural diagram of a chuck mechanism of a material holding device according to an embodiment of the invention. Thechuck mechanism 2 comprises achuck 20, acylinder 25, acylinder piston 21, an elastic member, aforce sensor 23, an adjusting component, a cylinder conduit 53 (fig. 4), apressure sensor 24 and the like. The resilient member may be rubber, a spring, or other combined resilient structure, in thisexample spring 22 is preferred, and the adjustment assembly in thisexample adjustment screw 26 is preferred, and one skilled in the art can select a suitable existing adjustment assembly to perform the same or similar function asadjustment screw 26 as desired. Thepressure sensor 24 is connected to an adjustingscrew 26 and theforce sensor 23 is connected to either end of thespring 22. Thechuck 20 is connected with acylinder piston 21 and moves under the driving of thecylinder piston 21. Theclip 20 may also include a layer of resilient damping material. Before clamping the material, the adjustingscrew 26 is adjusted to make the clamping force in a proper range. Considering the safety of the materials, when the materials are clamped, the clamping force cannot be too large, and the maximum clamping force born by different materials can be different. Therefore, when the material chuck mechanism is designed, when the material sensing is completed and the unclamping operation is performed, air is pressed by thevacuum conduit 53 connected to thechuck cylinder 25 to move thecylinder piston 21 to the right, thereby completing the unclamping operation.

The invention also provides a material detection method, as shown in fig. 1, when the material is detected on the production line, the material is clamped at the detection station A by adopting the material holding device described above, the material holding device with the material clamped therein can be connected with external detection equipment at the position A through theuniversal interface 6 on the material holding device, the material holding device is disconnected with the external detection equipment after the detection is finished, the material holding device with the material clamped therein is moved to the next detection station B through automatic transmission equipment on the detection production line for the next detection, then the same operation is respectively carried out on the detection stations C, D, and the detection is carried out by analogy until the detection of the whole detection production line is finished.

When the materials to be detected have different sizes or different materials or different interface positions, the material holding device with the positioning plates of different models can be selected. Fig. 7a and 7b are schematic structural diagrams respectively illustrating a material holding device using positioning plates of different models according to an embodiment of the present invention. In fig. 7a, the adapterplate card interface 4 in the material holding device is arranged at the left part of the material holding device and is suitable for detecting materials with theinterface 9 at the left side; and the connectingplate clamping interface 4 in the material holding device shown in fig. 7b is arranged at the upper part of the material holding device and is suitable for detecting the material with theinterface 9 at the upper part. The present invention is not limited to this, and the adapterplate card interface 4 may also be arranged at the right or lower part of the material holding device to adapt to the material at the right or lower part. Of course, the position of the adapter plate card can be flexibly changed according to the detection position of the detected material.

When materials with different sizes are detected, in order to improve the efficiency of the whole detection production line, a plurality of material holding devices are required to be prepared, the materials are clamped under the line, when one material holding device filled with the materials is detected at one station (such as the station A in the figure 1), the material holding device is moved to the next station for detection (such as the station B in the figure 1), the other material holding device filled with the materials can be connected to the position A for detection, and therefore the working efficiency of the whole production line can be improved.

The above embodiments are provided to illustrate the principle of the present invention and its efficacy, but the present invention is not limited to the above embodiments. Those skilled in the art will recognize that changes may be made in the above embodiments without departing from the spirit and scope of the invention, which is set forth in the following claims. Therefore, the scope of the present invention should be covered by the appended claims.

Claims (12)

1. A material detection method is characterized by comprising the following steps:

step a: fixing the materials by a material fixing device; wherein the material fixing device comprises a positioning plate, a material fixing mechanism, a switching board card, a base and a universal interface, the positioning plate is arranged on the base,

the base is provided with a universal interface to realize butt joint with external detection equipment;

the switching board card is used for connecting a detection interface of the material with external detection equipment;

the material fixing mechanism is arranged on the base;

step b: connecting the material holding device holding the materials with external detection equipment through the universal interface;

step c: disconnecting the universal interface from the external detection equipment after detection is finished;

step d: and moving the material holding device holding the material to another detection station for detection through a conveying device.

2. The material detection method according to claim 1, wherein when detecting a plurality of materials, a plurality of material holding devices are provided correspondingly, and the plurality of materials are held separately, and when one material holding device holding the materials is moved to the next detection station after the detection of one detection station, another material holding device holding the materials is connected to the detection station for detection.

3. The material detection method according to claim 1, wherein the material fixing mechanism comprises a chuck mechanism and/or a suction cup, the suction cup is used for adsorbing the material, and the chuck mechanism is arranged around the suction cup and is used for clamping the material on the suction cup.

4. The material detection method according to claim 3, wherein the chuck mechanism comprises a chuck, a cylinder piston, an elastic member, a force sensor, an adjusting member, and a pressure sensor, wherein the pressure sensor is connected to the adjusting member, the pressure sensor is connected to one end of the elastic member, and the chuck is connected to the cylinder piston and moves under the driving of the cylinder piston.

5. The material detection method as claimed in claim 4, wherein the elastic member is a spring.

6. The material detection method as claimed in claim 4, wherein the adjustment member is an adjustment screw.

7. The material detection method of claim 4, wherein the clamping force of the chuck is adjusted by adjusting the adjustment member.

8. The material detection method as claimed in claim 1, wherein the adapter card is disposed inside the base.

9. The material testing method of claim 1, wherein the size and model of said positioning plate is consistent with the size or material of the material.

10. The material detection method as claimed in claim 9, wherein the material is moved by moving a material holding device holding the material.

11. The material detection method according to claim 1, wherein the adapter board card has an adapter board card interface for interfacing with the detection interface of the material.

12. The material detection method as claimed in claim 11, wherein the adapter plate card interface is disposed at a left portion or an upper portion or a right portion or a lower portion of the material holding device.

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