A kind of preparation method of the micro-fluidic pneumatic micro valve of integrated polyurethane filmTechnical field
The present invention relates to micro-fluidic pneumatic micro valve preparation method, in particular to a kind of micro-fluidic gas of integrated polyurethane filmThe preparation method of dynamic micro-valve.
Background technique
Miniflow microflow control technique is one and is related to fluid physics, chemistry, microelectronics, materialogy, biology and biologyThe emerging cross discipline of engineering in medicine.It include that microfluidic channel is because the technology has many characteristics, such as micromation, integratedSystem is commonly known as micro-fluidic chip, the also referred to as laboratory on chip or micro-total analysis system.Microflow control technique is in biologyThere is huge development potentiality and broad application prospect in medical research.
Pith of the micro-valve as microflow control technique can be used to manipulate and control microfluid.Pneumatic micro valve is micro-valveCommon form, this kind of micro-valve can control the deformation of film by gas pressure, be flowed with this to reach in control microchannelThe purpose of body.Micro-fluidic pneumatic micro valve is usually prepared by soft lithography, is broadly divided into two kinds according to structure: open type withClosed type.Open type has Quake Valve, Plunger Valve, Lateral Deflection Valve etc., and closed type hasDoormat Valve, Curtain Valve, Check Valve etc..Dimethyl silicone polymer (PDMS) has excellent opticsThe features such as characteristic, bio-compatibility, easy processing molding, be one of the common used material of current micro-fluidic chip, while being also micro-valveThe common selection of middle elastic film.But the elastic film that PDMS material is obtained by spin coating is thicker, elongation is poor after film forming,Biggish air pressure is needed when controlling the film deformation in pneumatic micro valve, is easily broken after multiple deformation, while PDMSBubble is formed due to the cavernous structure of own material, with gas permeability, the fluid that high pressure gas can be made to enter in microchannel, gasThe presence of bubble can change fluid environment locating for organism, influence the test to organism, and the bubble in microfluidic channelThe problems such as causing diffraction optically, reflection, refraction, it is unfavorable for the microscopic observation to organism.
Summary of the invention
Goal of the invention: it is an object of the present invention to provide a kind of preparation sides of the micro-fluidic pneumatic micro valve of integrated polyurethane filmMethod, this method products air tightness is good, and test performance can be improved.
Technical solution: the present invention provides a kind of preparation method of the micro-fluidic pneumatic micro valve of integrated polyurethane film, includingFollowing steps:
(1) the pneumatic control layer based on PDMS is taken, cleaning, drying are spare；
(2) Silicon Wafer is taken, in the uniform spin coating dispersions of polyurethanes in its surface, is heating and curing, elastic polyurethane film is formed；
(3) by the pneumatic control layer and elastic polyurethane film that treated step (1) and (2) based on PDMS carry out etc. fromDaughter processing；
(4) by after step (3) corona treatment based on PDMS pneumatic control layer and elastic polyurethane film be bondedFace presses and heats after being aligned rapidly, and pneumatic control layer surface is made to integrate elastic polyurethane film；
(5) the microfluidic channel layer based on PDMS is taken, cleaning, drying carry out plasma with the product of the step (4)Processing；
(6) the microfluidic channel layer based on PDMS after step (5) corona treatment is bonded with the product of step (4)Face presses and heats after being aligned rapidly, so that the surface of step (4) is bonded the microfluidic channel layer based on PDMS, completes gas circuitIt is closed with fluid path.
Further, cleaning is first to be cleaned with isopropanol, then wash away remained on surface liquid with deionized water in the step (1)Body.Wherein, cleaning is first to be cleaned with isopropanol, then wash away remained on surface liquid with deionized water.
Further, step (3) the plasma processing is by the pneumatic control layer and poly- ammonia based on PDMSEster elastomer film is put into oxygen plasma cleaning machine, is passed through the mixed gas of oxygen and air, and air pressure maintains in cabin350mtorr~400mtorr starts plasma cleaner, radio-frequency power is adjusted to 30W, the processing time is 30s~60s.
Further, step (5) the plasma processing is by the microfluidic channel layer based on PDMS and stepSuddenly the product of (4) is put into plasma washing machine, is passed through the mixed gas of oxygen and air, and air pressure maintains 350mtorr in cabin~400mtorr starts plasma cleaner, radio-frequency power is adjusted to 30W, the processing time is 30s~60s.
Further, the time to press in the step (4) is 15min~20min.The temperature of heating is 70 DEG C~110DEG C, heating time is 2 hours or more.
It is good based on PDMS polyurethane film air-tightness, it is not easy to penetrate high pressure gas when preparing Pneumatic diaphragm valve with itPDMS film enters in fluid channel, to improve the performance of PDMS Pneumatic diaphragm valve, prolongs the service life；Elastic polyurethaneForming thin film is uniform and thinner, and elongation is prominent, and resilience performance is excellent, and air-tightness is good
The utility model has the advantages that pneumatic micro valve sealing strength of the invention is high, it is not likely to produce leakage, and do not need to apply biggish controlAir pressure processed, bubble-free generate, and are greatly improved the test effect of organism, the service life is long, at low cost.
Detailed description of the invention
Fig. 1 is flow chart of the present invention；
Fig. 2 is top view of the present invention；
Fig. 3 is cross-sectional view of the present invention；
Appended drawing reference: the pneumatic control layer 202 based on PDMS, microfluidic channel layer 201, elastic polyurethane based on PDMSFilm 203, cavity 101, microfluidic channel 102.
Specific embodiment
Embodiment 1
As shown in Figure 1-3, the preparation method of the micro-fluidic pneumatic micro valve of the integrated polyurethane film of the present embodiment, including such asLower step:
(1) take the pneumatic control layer 202 based on PDMS, inside have a cavity 101, cleaning, drying, spare, cleaning is firstIt is cleaned with isopropanol, then washes away remained on surface liquid with deionized water.Drying is dried up using nitrogen gun.
(2) Silicon Wafer is taken, in the uniform spin coating dispersions of polyurethanes in its surface, is heating and curing, elastic polyurethane film is formed203, dispersions of polyurethanes is anion aqueous aliphatic polyurethane dispersion, and solid content is greater than 35%.
(3) treated step (1) and (2) pneumatic control layer and elastic polyurethane film 203 are carried out at plasmaReason, corona treatment are that pneumatic control layer and elastic polyurethane film 203 are put into oxygen plasma cleaning machine, are passed through oxygenWith the mixed gas of air, air pressure maintains 350mtorr in cabin, starts plasma cleaner, radio-frequency power is adjusted to 30W, locatesThe reason time is 60s.
(4) by after step (3) corona treatment pneumatic control layer and 203 bonding face of elastic polyurethane film it is right rapidlyIt presses and heats after standard, pneumatic control layer surface is made to integrate elastic polyurethane film 203, wherein the time of pressure is 15min.The temperature of heating is 80 DEG C, and heating time is 2 hours.
(5) take the microfluidic channel layer 201 based on PDMS, inside have a microfluidic channel 102, cleaning, drying, with step(4) product carries out corona treatment, corona treatment be the product of microfluidic channel layer and step (4) is put into etc. fromDaughter cleaning machine is passed through the mixed gas of oxygen and air, and air pressure maintains 350mtorr in cabin, starts plasma cleaner,Radio-frequency power is adjusted to 30W, the processing time is 30s.
(6) the microfluidic channel layer after step (5) corona treatment is aligned rapidly with the product bonding face of step (4)After press and heat, so that the surface of step (4) is bonded the internal microfluidic structures for having microfluidic channel 102, complete gas circuitIt is closed with fluid path.
Embodiment 2
As shown in Figure 1-3, the preparation method of the micro-fluidic pneumatic micro valve of the integrated polyurethane film of the present embodiment, including such asLower step:
(1) take the pneumatic control layer 202 based on PDMS, inside have a cavity 101, cleaning, drying, spare, cleaning is firstIt is cleaned with isopropanol, then washes away remained on surface liquid with deionized water.Drying is dried up using nitrogen gun.
(2) Silicon Wafer is taken, in the uniform spin coating dispersions of polyurethanes in its surface, is heating and curing, elastic polyurethane film is formed203, dispersions of polyurethanes is anion aqueous aliphatic polyurethane dispersion, solid content 36%.
(3) treated step (1) and (2) pneumatic control layer and elastic polyurethane film 203 are carried out at plasmaReason, corona treatment are that pneumatic control layer and elastic polyurethane film 203 are put into oxygen plasma cleaning machine, are passed through oxygenWith the mixed gas of air, air pressure maintains 360mtorr in cabin, starts plasma cleaner, radio-frequency power is adjusted to 30W, locatesThe reason time is 30s.
(4) by after step (3) corona treatment pneumatic control layer and 203 bonding face of elastic polyurethane film it is right rapidlyIt presses and heats after standard, pneumatic control layer surface is made to integrate elastic polyurethane film 203, wherein the time of pressure is 15min.The temperature of heating is 90 DEG C, and heating time is 2 hours.
(5) take the microfluidic channel layer 201 based on PDMS, inside have a microfluidic channel 102, cleaning, drying, with step(4) product carries out corona treatment, corona treatment be the product of microfluidic channel layer and step (4) is put into etc. fromDaughter cleaning machine is passed through the mixed gas of oxygen and air, and air pressure maintains 360mtorr in cabin, starts plasma cleaner,Radio-frequency power is adjusted to 30W, the processing time is 30s.
(6) the microfluidic channel layer after step (5) corona treatment is aligned rapidly with the product bonding face of step (4)After press and heat, so that the surface of step (4) is bonded the internal microfluidic structures for having microfluidic channel 102, complete gas circuitIt is closed with fluid path.
Embodiment 3
As shown in Figure 1-3, the preparation method of the micro-fluidic pneumatic micro valve of the integrated polyurethane film of the present embodiment, including such asLower step:
(1) take the pneumatic control layer 202 based on PDMS, inside have a cavity 101, cleaning, drying, spare, cleaning is firstIt is cleaned with isopropanol, then washes away remained on surface liquid with deionized water.Drying is dried up using nitrogen gun.
(2) Silicon Wafer is taken, in the uniform spin coating dispersions of polyurethanes in its surface, is heating and curing, elastic polyurethane film is formed203, dispersions of polyurethanes is anion aqueous aliphatic polyurethane dispersion, solid content 37%.
(3) treated step (1) and (2) pneumatic control layer and elastic polyurethane film 203 are carried out at plasmaReason, corona treatment are that pneumatic control layer and elastic polyurethane film 203 are put into oxygen plasma cleaning machine, are passed through oxygenWith the mixed gas of air, air pressure maintains 400mtorr in cabin, starts plasma cleaner, radio-frequency power is adjusted to 30W, locatesThe reason time is 60s.
(4) by after step (3) corona treatment pneumatic control layer and 203 bonding face of elastic polyurethane film it is right rapidlyIt presses and heats after standard, pneumatic control layer surface is made to integrate elastic polyurethane film 203, wherein the time of pressure is 20min.The temperature of heating is 110 DEG C, and heating time is 3 hours.
(5) take the microfluidic channel layer 201 based on PDMS, inside have a microfluidic channel 102, cleaning, drying, with step(4) product carries out corona treatment, corona treatment be the product of microfluidic channel layer and step (4) is put into etc. fromDaughter cleaning machine is passed through the mixed gas of oxygen and air, and air pressure maintains 400mtorr in cabin, starts plasma cleaner,Radio-frequency power is adjusted to 30W, the processing time is 60s.
(6) the microfluidic channel layer after step (5) corona treatment is aligned rapidly with the product bonding face of step (4)After press and heat, so that the surface of step (4) is bonded the internal microfluidic structures for having microfluidic channel 102, complete gas circuitIt is closed with fluid path.