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CN109590035A - The preparation method and microfluid drive of micro-fluidic chip - Google Patents

The preparation method and microfluid drive of micro-fluidic chip
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CN109590035A
CN109590035ACN201811473133.5ACN201811473133ACN109590035ACN 109590035 ACN109590035 ACN 109590035ACN 201811473133 ACN201811473133 ACN 201811473133ACN 109590035 ACN109590035 ACN 109590035A
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micro
mixture
glass plate
microfluidic chip
fluidic chip
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CN109590035B (en
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林建涵
蔡杲哲
陈奇
王禹贺
汪思源
戚武振
薛丽
王蕾
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China Agricultural University
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China Agricultural University
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Abstract

The present invention relates to biochemical analysis technical fields, provide the preparation method and microfluid drive of a kind of micro-fluidic chip, and the preparation method of micro-fluidic chip includes the following steps: for polydimethylsiloxane prepolymer object and curing agent to be mixed;Micron soft magnetic granules are added into mixture to be mixed;Obtained mixture is poured in the mold of microchannel, vacuumizes to place into baking oven after bubble removing and toast;Mold is put into dehydrated alcohol and is impregnated, the magnetic rheology elastic body of tape channel is removed;It is blown off, is put into plasma cleaning instrument with nitrogen;Glass plate taking-up in acetone will be impregnated, is placed in plasma cleaning instrument and cleans;The magnetic rheology elastic body and glass plate of tape channel are taken out, and is bonded connection, is put into after toasting aging in baking oven and takes out.Microfluid drive, including micro-fluidic chip, substrate, driving motor and bracket.Structure is simple, at low cost, micro-fluidic chip will not residual liquid, guarantee test and analyze result accuracy.

Description

The preparation method and microfluid drive of micro-fluidic chip
Technical field
The present invention relates to biochemical analysis technical fields, more particularly to the preparation method and microfluid of a kind of micro-fluidic chipDriving device.
Background technique
Micro-fluidic chip is a kind of novel analysis platform, can grasp the experiments such as sample preparation, reaction, separation, detectionBe integrated on the chip of one piece of square centimeter grade, have sample and reagent consumption less, analysis speed is fast and operation automation etc.Advantage.As the power source of fluid transmission, micro fluid dynamcis has become a key of micro-fluidic chip, receives extensive passNote.
Currently, Micropump of the micro fluid dynamcis frequently with outside, due to being subject to cross contamination, still in practical applicationIt faces big challenge.In recent years, it is driven studies have reported that microfluid may be implemented using microeffects such as capillarity, electrowettingsDynamic, flow velocity is can be controlled within the scope of μ L/min~mL/min, may alternatively be integrated on micro-fluidic chip.However, electrowetting Micropump orThe processing technology of capillary Micropump is very complicated, and at high cost.Therefore, simple, the inexpensive micro fluid dynamcis technology pair of researchMicro-fluidic chip research is of great significance.
Summary of the invention
(1) technical problems to be solved
The object of the present invention is to provide a kind of micro-flow control chip preparation method and microfluid drives, to solve on chipThe problem of micro fluid dynamcis design complexity, higher cost.
(2) technical solution
In order to solve the above technical problem, the present invention provides a kind of preparation methods of micro-fluidic chip, include the following steps:
Step 1, when setting is mixed by weight 20:1~15:1 in polydimethylsiloxane prepolymer object and curing agentBetween, it is put into vacuum drying ware and vacuumizes to remove the bubble in mixture;
Step 2, is added micron soft magnetic granules into mixture, the weight ratio of micron soft magnetic granules and mixture be 4:1~Setting time is mixed in 1:1, places into vacuum drying ware and vacuumizes to remove the bubble in mixture;
Step 3 pours mixture obtained in step 2 in the mold of microchannel, places into vacuum drying ware and takes outVacuum is then placed in the baking oven of set temperature to remove bubble removing and toasts setting time;
Mold is put into after impregnating setting time in dehydrated alcohol, removes from the mold the magnetic current with microchannel by step 4Become elastomer;
Magnetic rheology elastic body is blown off with nitrogen, magnetic rheology elastic body is put into plasma cleaning instrument by step 5, is led toIt places up in road;
Step 6, the glass plate that will impregnate setting time in acetone take out, and wash with water and with after being dried with nitrogen, placementIn plasma cleaning instrument, setting time is cleaned;
Step 7 takes out the magnetic rheology elastic body and glass plate of tape channel, carries out and is bonded connection, and is put into set temperatureBaking oven in toast aging setting time after take out.
Wherein, it is 5~10 minutes that setting time, which is mixed,.
Wherein, the set temperature of baking oven is 50~70 DEG C.
Wherein, the setting time toasted in the step 3 is 12~24 hours.
Wherein, the partial size of the micron soft magnetic granules be 2~5 μm, the glass plate with a thickness of 0.2~1mm.
Wherein, baking aging setting time is 1~2 hour.
The present invention also provides a kind of microfluid drives, including the system with the micro-fluidic chip as described in any of the above itemMicro-fluidic chip, substrate, driving motor and the bracket of Preparation Method preparation, the substrate are fastened in the mounting hole of the bracket,The first end face of the substrate is equipped with the groove that adaptation is connect with the driving end of the driving motor, the second end face of the substrateAt least two pairs of group of magnets are installed, the micro-fluidic chip is set on the bracket on the upside of the group of magnets week.
Wherein, each pair of group of magnets includes two magnet monomers that homopolarity is affixed setting, to form gradient magnetic.
Wherein, the second end face of the substrate is equipped with cover board, to the fixation group of magnets.
Wherein, the micro-fluidic chip includes glass plate and is bonded the magnetic rheology elastic body composition of connection with the glass plateChannel, the arrival end in the channel is connected to sample cell.
(3) beneficial effect
The present invention provides a kind of preparation method of micro-fluidic chip and microfluid drive, micro-fluidic chip preparationsMethod is simple, and cost is relatively low, and polydimethylsiloxane prepolymer object transparency is high, and waterproofness and hydrophobicity are good, mix with curing agentMagnetic rheology elastic body can be formed by adding micron soft magnetic granules again afterwards, and magnetic rheology elastic body can generate quickly under external magnetic fieldsThe accurate driving of microfluid is realized in deformation, and structure is simple, at low cost, micro-fluidic chip will not residual liquid, guarantee test and analyzeAs a result accuracy.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of microfluid drive of the embodiment of the present invention;
Fig. 2 is the connection schematic diagram of substrate of the embodiment of the present invention and driving motor;
Fig. 3 is the structural schematic diagram of micro-fluidic chip of the embodiment of the present invention.
In figure, 1: bracket;2: driving motor;3: micro-fluidic chip;4: cover board;5: substrate;6: threaded hole;7: group of magnets;8: main channel;9: subchannel;10: sample cell;11: channel outlet;12: glass plate.
Specific embodiment
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present inventionIn attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment isA part of the embodiments of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, ordinary skill peopleMember's every other embodiment obtained without making creative work, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " installation ", " phaseEven ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected;It canTo be mechanical connection, it is also possible to be electrically connected;It can be directly connected, can also can be indirectly connected through an intermediaryConnection inside two elements.For the ordinary skill in the art, above-mentioned term can be understood at this with concrete conditionConcrete meaning in invention.
In addition, in the description of the present invention, unless otherwise indicated, " multiple ", " more ", " multiple groups " be meant that two orTwo or more, " several ", " several ", " several groups " are meant that one or more.
The embodiment of the present invention provides a kind of preparation method of micro-fluidic chip, includes the following steps:
Polydimethylsiloxane prepolymer object and curing agent are mixed 5~10 by weight 20:1~15:1 by step 1Minute, after mixing evenly, it is put into vacuum drying ware and vacuumizes 10~30 minutes, remove the bubble in mixture, it is ensured that bubbleRemoval is complete;
Micron soft magnetic granules are added into mixture for step 2, and the partial size of micron soft magnetic granules is 2~5 μm, micron soft magnetismThe weight ratio of particle and mixture is 4:1~1:1, is mixed 5~10 minutes, after mixing evenly, is put into vacuum drying wareIt vacuumizes 10~30 minutes, removes the bubble in mixture, it is ensured that bubble removal is complete;
Step 3 slowly pours mixture obtained in step 2 in the mold of microchannel, places into vacuum drying wareIn vacuumize 10~30 minutes, to remove the bubble in mixture, it is ensured that bubble removal is complete, places into the baking oven of set temperatureMiddle baking setting time, oven temperature are 50~70 DEG C, and the time of baking is 12~24 hours;
Mold is put into dehydrated alcohol and impregnates 0.5~1.5 hour, slowly removes from channel die with micro- by step 4The magnetic rheology elastic body in channel;
Magnetic rheology elastic body is blown off with nitrogen, magnetic rheology elastic body is put into plasma cleaning instrument by step 5, is led toIt places up in road;
Step 6 takes out the glass plate for impregnating setting time in acetone, and soaking time is 12~24 hours, and use is ultrapureAfter water cleans up and uses and be dried with nitrogen, be placed in plasma cleaning instrument, glass plate with a thickness of 0.2~1mm;
Magnetic rheology elastic body with microchannel and glass plate are cleaned 1~2 point by step 7 in plasma cleaning instrumentClock takes out rapidly, after the magnetic rheology elastic body of tape channel and glass plate are gently contacted realization bonding connection, is put into set temperatureBaking oven in toast aging setting time after take out, oven temperature be 50~70 DEG C, baking ageing time be 1~2 hour.
Embodiment 1
By polydimethylsiloxane prepolymer object and curing agent by weight 20:1, it is mixed 10 minutes, stirs evenly, putEnter to be dried in vacuo in ware and handle 30 minutes, removes the bubble in mixture, it is ensured that bubble removal is complete;Grain is added into mixtureThe weight ratio of the micron soft magnetic granules that diameter is 2 μm, micron soft magnetic granules and mixture is 4:1, is mixed 10 minutes, and stirring is equalIt is even, it is put into vacuum drying ware and handles 30 minutes, remove the bubble in mixture, it is ensured that bubble removal is complete;It is mixed by what is obtainedIt closes object slowly to pour in the mold of microchannel, is put into vacuum drying ware and vacuumizes 30 minutes, remove the bubble in mixture, reallyIt is complete to protect bubble removal, places into 70 DEG C of baking oven and toasts 24 hours;Mold after baking is put into dehydrated alcohol and is impregnated1.5 hours, the magnetic rheology elastic body of tape channel is slowly removed from channel die;With nitrogen by the magnetic rheology elastic body of tape channelIt blows off, the magnetic rheology elastic body of tape channel is put into plasma cleaning instrument, channel is placed up;It will impregnate in acetone12 hours glass plates take out, and after being cleaned up with ultrapure water and used and be dried with nitrogen, are placed in plasma cleaning instrument;By bandThe magnetic rheology elastic body and glass plate in channel clean 1 minute in plasma cleaning instrument, take out rapidly, by the magnetic current of tape channelBecome elastomer and glass plate gently contacts after realizing bonding connection, is put into after being toasted aging 2 hours in 70 DEG C of baking oven and takes out.
Embodiment 2
By polydimethylsiloxane prepolymer object and curing agent by weight 17.5:1, it is mixed 7.5 minutes, stirring is equalIt is even, it is put into vacuum drying ware and handles 20 minutes, remove the bubble in mixture, it is ensured that bubble removal is complete;Into mixturePartial size is added as 3.5 μm of micron soft magnetic granules, the weight ratio of micron soft magnetic granules and mixture is 2.5:1, is mixed 8 pointsClock stirs evenly, and is put into vacuum drying ware and vacuumizes 20 minutes, removes the bubble in mixture, it is ensured that bubble removal is complete;Obtained mixture is slowly poured in the mold of microchannel, is put into vacuum drying ware and vacuumizes 20 minutes, remove mixtureIn bubble, it is ensured that bubble removal is complete, places into 60 DEG C of baking oven and toasts 18 hours;Mold after baking is put into anhydrousIt is impregnated 1 hour in ethyl alcohol, the magnetic rheology elastic body of tape channel is slowly removed from channel die;With nitrogen by the magnetic current of tape channelBecome elastomer to blow off, the magnetic rheology elastic body of tape channel is put into plasma cleaning instrument, channel is placed up;It will impregnate16 hours glass plates take out in acetone, after being cleaned up with ultrapure water and used and be dried with nitrogen, are placed on plasma cleanIn instrument;The magnetic rheology elastic body of tape channel and glass plate are cleaned 1.5 minutes in plasma cleaning instrument, taken out rapidly, it willAfter the magnetic rheology elastic body and glass plate of tape channel gently contact realization bonding connection, it is put into 60 DEG C of baking oven and toasts agingIt is taken out after 1.5 hours.
Embodiment 3
By polydimethylsiloxane prepolymer object and curing agent by weight 15:1, it is mixed 5 minutes, stirs evenly, putEnter to be dried in vacuo in ware and handle 10 minutes, removes the bubble in mixture, it is ensured that bubble removal is complete;Grain is added into mixtureThe weight ratio of the micron soft magnetic granules that diameter is 5 μm, micron soft magnetic granules and mixture is 1:1, is mixed 5 minutes, and stirring is equalIt is even, it is put into vacuum drying ware and vacuumizes 10 minutes, remove the bubble in mixture, it is ensured that bubble removal is complete;By what is obtainedMixture slowly pours in the mold of microchannel, is put into vacuum drying ware and vacuumizes 10 minutes, removes the bubble in mixture,Ensure that bubble removal is complete, places into 50 DEG C of baking oven and toast 12 hours;Mold after baking is put into dehydrated alcohol and is soakedBubble 0.5 hour, slowly removes the magnetic rheology elastic body of tape channel from channel die;With nitrogen by the magnetorheological elasticity of tape channelBody is blown off, and the magnetic rheology elastic body of tape channel is put into plasma cleaning instrument, channel is placed up;Acetone will be immersed inIn 24 hours glass plates take out, after being cleaned up with ultrapure water and used and be dried with nitrogen, be placed in plasma cleaning instrument;It willThe magnetic rheology elastic body and glass plate of tape channel clean 2 minutes in plasma cleaning instrument, take out rapidly, by the magnetic of tape channelAfter magnetorheological elastomer and glass plate gently contact realization bonding connection, it is put into after being toasted aging 1 hour in 50 DEG C of baking oven and takes out.
As shown in Figure 1 to Figure 3, the embodiment of the present invention also provides a kind of microfluid drive, including with such as above miniflowMicro-fluidic chip 3, substrate 5, driving motor 2 and the bracket 1 of the preparation method preparation of chip are controlled, substrate 5 is fastened on the peace of bracket 1It fills in hole, specifically, bracket 1, to support entire microfluid drive, the center of the support platform of bracket 1 is equipped with peaceHole is filled, to be clamped substrate 5, guarantees that substrate 5 can rotate in mounting hole.Substrate 5 is specially diameter 60mm, the circle of thickness 10mmShape organic glass.
Further, the first end face of substrate 5 is equipped with the groove that adaptation is connect with the driving end of driving motor 2, realizes baseThe synchronous rotation of plate 5 and driving motor 2.Driving motor 2 is specially 42 serial stepper motors, and bracket 1 is arranged in driving motor 2The lower section of support platform.
Wherein, at least two pairs of group of magnets 7 are installed, each pair of group of magnets 7 is affixed including homopolarity the second end face of substrate 5 equal weekTwo magnet monomers being arranged.Specifically, week is equipped at least two square grooves, each groove in the second end face of substrate 5Interior installation a pair of magnet group 7, group of magnets 7 includes two Neodymium-Iron-Boron super magnet monomers that homopolarity is affixed setting, to generate heightIntensity, high gradient linear magnetic field.In one example, the size of magnet monomer is high 3.2mm, width 3.2mm, long 12.7mm.
Further, the second end face of substrate 5 is equipped with cover board 4, sets in week on cover board 4 there are four through-hole, sets on substrate 5There are four fixed group of magnets 7 by the connection of bolt realization cover board 4 and substrate 5 with the one-to-one threaded hole 6 of through-hole.
Wherein, micro-fluidic chip 3 is set on the bracket 1 of 7 upside of group of magnets, and the magnetic field for guaranteeing that group of magnets 7 generates can act onIn micro-fluidic chip 3.Specifically, micro-fluidic chip 3 includes glass plate 12 and the magnetorheological elasticity for being bonded connection with glass plate 12The channel that body is constituted, channel by main channel 8 and positioned at 8 both ends of main channel and two subchannels 9 in communication, subchannel 9Arrival end is connected to sample cell 10, and sample cell 10 is to be added dropwise stored sample, by the wriggling in magnetic field in channel, sample warpChannel outlet 11 flows out.
The process flow of microfluid drive of the embodiment of the present invention is as follows:
Micro-fluidic chip 3 is seated on bracket 1, appropriate amount of sample is drawn with liquid-transfering gun and is added in sample cell, due to sampleProduct pond opening is larger, therefore can store a large amount of samples, and later on driving motor switch, driving motor drives coupled basePlate quickly rotates (rotation speed: 60rpm~120rpm), puts since two pieces of super magnet homopolarities are opposite, in two blocks of magnetBetween generate linear superpower high-gradient magnetic field and rotate;The magnetic rheology elastic body of main channel occurs for superpower rotating excitation fieldPeriodic deformation, deformation will cause main channel to generate mobile temporary enclosed chamber, and then pass through the sample in sample cell 11Subchannel and main channel are extruded to exit, and are used for the sample supply of duration.
The preparation method and microfluid drive of a kind of micro-fluidic chip provided by the invention, micro-fluidic chip preparationMethod is simple, and cost is relatively low, and polydimethylsiloxane prepolymer object transparency is high, and waterproofness and hydrophobicity are good, mix with curing agentMagnetic rheology elastic body can be formed by adding micron soft magnetic granules again afterwards;Magnetic rheology elastic body can generate quickly under external magnetic fieldsThe accurate driving of microfluid is realized in deformation, and structure is simple, at low cost, micro-fluidic chip will not residual liquid, guarantee test and analyzeAs a result accuracy.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the inventionWithin mind and principle, any modification, equivalent replacement, improvement and so on be should all be included in the protection scope of the present invention.

Claims (10)

Translated fromChinese
1.一种微流控芯片的制备方法,其特征在于,包括如下步骤:1. a preparation method of a microfluidic chip, is characterized in that, comprises the steps:步骤一,将聚二甲基硅氧烷预聚物与固化剂按重量比20:1~15:1混合搅拌设定时间,放入真空干燥皿中抽真空以去除混合物中的气泡;Step 1, the polydimethylsiloxane prepolymer and the curing agent are mixed and stirred for a set time in a weight ratio of 20:1 to 15:1, and then placed in a vacuum drying dish to be evacuated to remove air bubbles in the mixture;步骤二,向混合物中加入微米软磁颗粒,微米软磁颗粒与混合物的重量比为4:1~1:1,混合搅拌设定时间,再放入真空干燥皿中抽真空以去除混合物中的气泡;Step 2, add micron soft magnetic particles to the mixture, the weight ratio of the micron soft magnetic particles to the mixture is 4:1 to 1:1, mix and stir for a set time, and then put it into a vacuum drying dish and vacuumize to remove the particles in the mixture. bubble;步骤三,将步骤二中得到的混合物浇筑于微通道模具中,再放入真空干燥皿中抽真空以去除气泡,然后放入设定温度的烘箱中烘烤设定时间;In step 3, the mixture obtained in step 2 is poured into a micro-channel mold, then placed in a vacuum drying dish to be evacuated to remove air bubbles, and then placed in an oven with a set temperature and baked for a set time;步骤四,将模具放入无水乙醇中浸泡设定时间后,从模具上取下带微通道的磁流变弹性体;Step 4: After the mold is soaked in absolute ethanol for a set time, the magnetorheological elastomer with microchannels is removed from the mold;步骤五,用氮气将磁流变弹性体吹净,将磁流变弹性体放入等离子体清洗仪中,通道面朝上放置;Step 5, blow the magnetorheological elastomer clean with nitrogen, put the magnetorheological elastomer into the plasma cleaning apparatus, and place the channel face up;步骤六,将浸泡在丙酮中设定时间的玻璃板取出,用水清洗并用氮气吹干后,放置在等离子体清洗仪中,清洗设定时间;Step 6, take out the glass plate immersed in acetone for a set time, wash with water and blow dry with nitrogen, and place it in a plasma cleaner to clean for a set time;步骤七,取出磁流变弹性体和玻璃板,进行键合连接,并放入设定温度的烘箱中烘烤老化设定时间后取出。Step 7, take out the magnetorheological elastomer and the glass plate, carry out bonding connection, and put them into an oven at a set temperature for baking and aging for a set time, and then take them out.2.如权利要求1所述的微流控芯片的制备方法,其特征在于,混合搅拌设定时间为5~10分钟。2 . The method for preparing a microfluidic chip according to claim 1 , wherein the setting time for mixing and stirring is 5-10 minutes. 3 .3.如权利要求1所述的微流控芯片的制备方法,其特征在于,烘箱的设定温度为50~70℃。3 . The method for preparing a microfluidic chip according to claim 1 , wherein the set temperature of the oven is 50-70° C. 4 .4.如权利要求1所述的微流控芯片的制备方法,其特征在于,所述步骤三中烘烤的设定时间为12~24小时。4 . The method for preparing a microfluidic chip according to claim 1 , wherein the setting time for baking in the step 3 is 12-24 hours. 5 .5.如权利要求1所述的微流控芯片的制备方法,其特征在于,所述微米软磁颗粒的粒径为2~5μm,所述玻璃板的厚度为0.2~1mm。5 . The method for preparing a microfluidic chip according to claim 1 , wherein the particle size of the micron soft magnetic particles is 2-5 μm, and the thickness of the glass plate is 0.2-1 mm. 6 .6.如权利要求1所述的微流控芯片的制备方法,其特征在于,烘烤老化设定时间为1~2小时。6 . The method for preparing a microfluidic chip according to claim 1 , wherein the setting time for baking and aging is 1-2 hours. 7 .7.一种微流体驱动装置,其特征在于,包括用如权利要求1~6任一项所述的微流控芯片的制备方法制备的微流控芯片、基板、驱动电机和支架,所述基板卡设在所述支架的安装孔内,所述基板的第一端面设有与所述驱动电机的驱动端连接适配的凹槽,所述基板的第二端面均周安装有至少两对磁铁组,所述微流控芯片设于所述磁铁组上侧的所述支架上。7. A microfluidic drive device, characterized in that it comprises a microfluidic chip, a substrate, a driving motor and a support prepared by the method for preparing a microfluidic chip according to any one of claims 1 to 6, the said The base plate is clamped in the mounting hole of the bracket, the first end surface of the base plate is provided with a groove that is connected and adapted to the driving end of the driving motor, and the second end surface of the base plate is circumferentially mounted with at least two pairs of A magnet group, the microfluidic chip is arranged on the bracket on the upper side of the magnet group.8.如权利要求7所述的微流体驱动装置,其特征在于,每对所述磁铁组包括同极相贴设置的两个磁铁单体,用以形成梯度磁场。8 . The microfluidic drive device according to claim 7 , wherein each pair of the magnet groups comprises two magnet units arranged with the same poles to form a gradient magnetic field. 9 .9.如权利要求7所述的微流体驱动装置,其特征在于,所述基板的第二端面设有盖板,用以固定所述磁铁组。9 . The microfluidic driving device according to claim 7 , wherein a cover plate is provided on the second end surface of the substrate for fixing the magnet group. 10 .10.如权利要求7所述的微流体驱动装置,其特征在于,所述微流控芯片包括玻璃板和与所述玻璃板键合连接的磁流变弹性体构成的通道,所述通道的入口端与样品池连通。10. The microfluidic drive device according to claim 7, wherein the microfluidic chip comprises a glass plate and a channel formed by a magnetorheological elastomer bonded and connected to the glass plate, and the channel is The inlet port communicates with the sample cell.
CN201811473133.5A2018-12-042018-12-04 Preparation method of microfluidic chip and microfluidic driving deviceActiveCN109590035B (en)

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何仲等: "功能软物质材料及其在微流控领域的应用", 《自然杂志》*

Cited By (2)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
CN112844503A (en)*2021-01-122021-05-28京东方科技集团股份有限公司Microfluidic device, stirring system and stirring method
CN112844503B (en)*2021-01-122022-07-15京东方科技集团股份有限公司 Microfluidic device, stirring system and stirring method

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