Disclosure of Invention
The invention aims at overcoming the defects of the prior art and realizing an ion source which is characterized by comprising a bottom flange, a shell flange, a cathode flange, an insulating sleeve, a discharge column, an air inlet device and an ion generating device; the shell flange is fixed on the periphery of the bottom flange; fixing a cathode flange on the top of the shell flange; a plurality of discharge column mounting holes are formed in the top of the cathode flange; a discharge column is arranged in the discharge column mounting hole; the air inlet device is arranged at the center of the bottom flange; the air inlet device passes through the bottom flange; penetrating into the ion generating device and fixing; an insulating sleeve is arranged between the air inlet device and the ion generating device for isolation.
Further, the ion generating device also comprises an insulating sleeve ring, an insulating ring, a permanent magnet, an anode flange and a middle flange; an insulating lantern ring is arranged on the inner side of the shell flange; the anode flange is pressed below the insulating lantern ring; an insulating ring is arranged between the lower part of the anode flange and the middle flange; and the anode flange, the insulating ring and the intermediate flange are fixed by bolts; the discharge column is fixed on the middle flange through threads; round holes which are in one-to-one correspondence with the discharge column mounting holes are also arranged on the anode flange; a gap is arranged between the round hole and the discharge column; and a permanent magnet is sleeved on the insulating sleeve below the intermediate flange.
Further, the air inlet device also comprises a hollow tube, a sealing flange, a first fluororubber ring, a second fluororubber ring, a fastening flange, a conducting ring and an air pipe joint; the hollow tube is arranged in the middle of the insulating sleeve; one end of the hollow pipe is propped against the intermediate flange; the other end of the hollow pipe is sleeved with a sealing flange; a second fluorine rubber ring is arranged between the hollow pipe and the sealing flange; a first fluorine rubber ring is sleeved between the outer side of the sealing flange and the bottom flange; a fastening flange is sleeved at the lower end of the sealing flange; and fixing the fastening flange and the bottom flange; sleeving a conductive ring on the hollow pipe at the lower end of the fastening flange; and the hollow pipe is fixedly provided with an air pipe joint through threads.
Further; the insulating sleeve ring, the insulating ring and the insulating sleeve are made of ceramic; the permanent magnet is a neodymium-iron-boron magnet;
Further, the hollow tube and the fastening flange are made of 304 stainless steel.
Further, the sealing flange is polytetrafluoroethylene.
Further, the discharge columns are arranged in an annular array.
Further, two through holes are formed in one end of the hollow pipe in a mutually perpendicular mode.
The invention has the technical effects that the invention changes the cathode from a single part to a plurality of points uniformly distributed by utilizing the structural change, so that the emitted ions are changed into the whole surface from the prior runway form, and the ion beam current has large density, good uniformity and strong directivity. Meanwhile, due to the effect of the axial magnetic field, the ion energy is higher. No filament, grid and neutralization source, and can be stably operated and produced for a long time. With a very high average dead time and extremely low maintenance costs.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Referring to fig. 1, 2 and 3, the present embodiment provides an ion source, which includes a bottom flange 6, a shell flange 4, a cathode flange 1, an insulating sleeve 11, a discharge column 7, an air inlet device 20 and an ion generating device 30; the periphery of the bottom flange 6 is fixed with the shell flange 4; a cathode flange 1 is fixed on top of the shell flange 4; a plurality of discharge column mounting holes 18 are arranged at the top of the cathode flange 1; a discharge column 7 is arranged in the discharge column mounting hole 18; the air inlet device 20 is arranged at the center of the bottom flange 6; the air inlet device 20 passes through the bottom flange 6; penetrating into the ion generating device 30 and fixing; an insulating sleeve 11 is arranged between the air inlet device 20 and the ion generating device 30 for isolation; by disposing the air intake device 20 in the ion generating device 30. The cathode is changed into a plurality of points uniformly distributed from a single part, so that the emitted ions are changed into the whole surface from the conventional runway form, and the ion beam current is high in density, good in uniformity and strong in directivity. Meanwhile, due to the effect of the axial magnetic field, the ion energy is higher. No filament, grid and neutralization source, and can be stably operated and produced for a long time. With a very high average dead time and extremely low maintenance costs.
In order to achieve the technical characteristics, as shown in fig. 3, the ion generating device 30 further comprises an insulating collar 2, an insulating ring 3, a permanent magnet 5, an anode flange 8 and a middle flange 9; an insulating collar 2 is arranged on the inner side of the shell flange 4; the anode flange 8 is pressed under the insulating collar 2; an insulating ring 3 is arranged between the lower part of the anode flange 8 and the intermediate flange 9; and the anode flange 8, the insulating ring 2 and the intermediate flange 9 are fixed by bolts; this isolates the cathode and anode rim collar 2, the insulating ring 3, makes ionization possible, and additionally secures the discharge column 7 by threading on the intermediate flange 9; circular holes 19 which are in one-to-one correspondence with the discharge column mounting holes 18 are also arranged on the anode flange 8; a gap is arranged between the round hole 19 and the discharge column 7; the gap is used for generating ionization space, ions have generated space in the gap, and meanwhile, the gap is smaller, so that ions with higher mass are easier to form; meanwhile, a permanent magnet 5 is sleeved on an insulating sleeve 11 below the intermediate flange 8; guiding action for attracting ions.
Meanwhile, the air inlet device 20 is also provided with a hollow pipe 10, a sealing flange 12, a first fluororubber ring 13, a second fluororubber ring 14, a fastening flange 15, a conducting ring 16 and an air pipe joint 17; the hollow tube 10 is arranged in the middle of the insulating sleeve 11; the end of the hollow pipe 10 is propped against the intermediate flange 8; a sealing flange 12 is sleeved at the other end of the hollow pipe 10; a second fluororubber ring 14 is arranged between the hollow tube 10 and the sealing flange 12; a first fluororubber ring 13 is sleeved between the outer side of the sealing flange 12 and the bottom flange 6; a fastening flange 15 is sleeved at the lower end of the sealing flange 12; and fixing the fastening flange 15 with the bottom flange 6; a conductive ring 16 is sleeved on the hollow tube 10 at the lower end of the fastening flange 15; an air pipe joint 17 is screwed on the hollow pipe 10. Thus, by applying a positive voltage to the conductive ring 16, the positive voltage is conducted to the anode flange 8 through the hollow tube 10, and the insulating collar 2, the insulating ring 3 and the insulating sleeve 11 are made of ceramics; insulating sleeve 11 insulates cathode flange 1; simultaneously, insulating lantern ring 2, insulating ring 3 are isolated cathode flange 1 and positive pole flange 8, simultaneously, have the clearance between discharge post 7 and the positive pole flange 8, simultaneously, have also kept apart positive and negative voltage difference. In the present invention, the sealing flange 12 is polytetrafluoroethylene; the insulating material is used for isolating positive voltage on the hollow tube 10 from the bottom flange 6, so that the hollow tube 10, the conducting ring 16, the air pipe joint 17 and the anode flange 8 are provided with negative voltage except for positive voltage; this allows the cathode and anode to be isolated while allowing the volume of the device to be greatly reduced.
In the invention, the permanent magnet 5 is a neodymium-iron-boron magnet; the material of the hollow tube 10 and the fastening flange 15 is 304 stainless steel. The sealing flange 12 is polytetrafluoroethylene.
Meanwhile, the discharge columns 7 are arranged in a ring-shaped array for increasing the effect of ionization. Two through holes are arranged at one end of the hollow tube 10 in a mutually perpendicular manner.
As a preferred embodiment of the present invention, it is apparent to those skilled in the art that the present invention is not limited to the details of the above-described exemplary embodiment, but that the present invention may be embodied in other specific forms without departing from the spirit or essential characteristics thereof, and is also the scope of the present invention. The present embodiments are, therefore, to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present disclosure describes embodiments, not every embodiment is provided with a separate embodiment, and that this description is provided for clarity only, and that the disclosure is not limited to the embodiments described in detail below, and that the embodiments described in the examples may be combined as appropriate to form other embodiments that will be apparent to those skilled in the art.