A kind of preparation method of the flexible micro-nano pressure sensor based on mode of printingTechnical field
The invention belongs to sensor technical field, especially a kind of flexible micro-nano pressure sensor based on mode of printingPreparation method.
Background technique
It the use of flexibility function material production electronic device is current research hotspot, but there is also the systems of such as nano materialStandby complicated, at high price, unstable, the effect of organic semiconducting materials structure, which are paid no attention to, to be thought of same material molecular weight difference etc. and asksTopic.The selection of polymer material is more single, is generally used together with nano material with organic semiconducting materials, as flexible linerBottom or intermediate material are more.And high, electrochemical conditions harshness is required for chemical deposition ambient in the method for attachment, use processIn pollutant process it is time-consuming and laborious, it is high that requirement for equipment is deposited, and can not achieve extensive, but plating can generally reachThe experiment effect of relative ideal, but lower for industrialized production referential, for ink-jet mode its to ink and setStandby is more demanding, is favored because inkjet printing is theoretically able to achieve large-scale addition production method by researcher, grinds in recent yearsStudy carefully for exploitation can not blocking sprayer and environmental-friendly functional ink be the hot spot of its research be also difficult point, and the mode transferred is thenBe by various silicon substrate templates by with micro-nano structure dielectric layer or piezoelectric layer be transferred in conductive layer or flexible substrate,This method requires height for the production and selection of template, and silica-base material patterning is generally divided into chemical method and physical method, and chemistry is logicalChemical reagent corrosion is crossed, the method controllability is poor, and environmental factor dependence is stronger, and physical laws are etched by High-performance lasers,High requirement is proposed for equipment.And be concentrated mainly in the research of material in the research of entire pliable pressure sensor, greatlyIt is mostly performance in the sensor to the combination research of various functional materials or functional material performance boost research, aboutThe technical study of building process is relatively fewer.
Compared to traditional production method, the advantage that printing process prepares pressure sensor is: the importing of printing technologySimplify process for manufacturing electronic product and period；Compared to conventional method, this method can greatly reduce the pollution of environment, while techniqueControllability also reinforced；Final products are frivolous, flexible, reduce volume and weight, realize the characteristic of flexibility；It savesExpect saving of labor, reduces cost；Pliable pressure sensor polymer material, nano material, organic semiconducting materials etc., in maximum journeyThe demand that flexibility is realized on degree can shorten the production cycle compared to chemical etching method, and machining process is simple；GreenProduction, favorable environment protection；Printed electronics production waste is few, belongs to the increasing material manufacturing required on demand, is a clean manufacturingTechnology；Push the transition and upgrade of printing enterprise；Printing Industry is generally concentrated at the basic livings such as packaging, books, fabric useProduct field, estate income are relatively low compared to the electronic field at high tip, and the development of printed electronic is then to a certain extentPrinting Industry is redefined.
By retrieval, patent publication us relevant to present patent application is not yet found.
Summary of the invention
It is an object of the invention to provide a kind of flexible micro-nano based on mode of printing in place of overcome the deficiencies in the prior artThe preparation method of pressure sensor, this method use for reference the pressure sensing of printing plate manufacturing process production micro-nano structure in flexographic printingDevice obtains a kind of controllable and easy to operate micro-nano structure by simple technique, cheap cost, and this method has augmented micro-nanoThe blank of sensor process technique study realizes that the manufacture of large area industrialization pliable pressure sensor has important grind to itStudy carefully and application value.
The present invention solves its technical problem and adopts the following technical solutions to achieve:
A kind of preparation method of the flexible micro-nano pressure sensor based on mode of printing, the method is to micro-nano layer and conductionLayer is constructed:
Micro-nano layer by the way that the film of designed micro-nano pattern is exposed with polyacrylonitrile film, development treatment obtainsTo the solidification photoresists with micro-nano structure, and unprotected region is carried out with the n,N-Dimethylformamide of energy dissolving filmsPartly be melt through etching, then is ultrasonically treated to it, removes cured photoresists, obtains the film with concaveconvex structure；Conductive layerMulti-walled carbon nanotube is attached on film by liquid phase method by lifting mode then, and carries out device group using opposite two-by-twoDress, obtains the flexible micro-nano pressure sensor based on mode of printing.
Moreover, steps are as follows:
(1) the production of transparent PAN film；
(2) micro-nano patterning is realized；
(3) the dispersion of carbon nanotube；
(4) the attachment of carbon nanotube；
(5) the encapsulation of sensor.
Moreover, the step (1) in the production of transparent PAN film specific step is as follows:
0.5g, 1g, 1.5g, 2g, 3g, 4g polyacrylonitrile solid powder are weighed by electronic balance, is respectively put into 6Spare in 100mL beaker, adhesive label paper is to show difference；The DMF of 50ml is separately added into load weighted polyacrylonitrile beakerSolution, and solution is put in water-bath and carries out heating water bath, temperature is set as 70 DEG C, to guarantee that DMF can cmpletely dissolvePowder, setting time are 1 hour；By dissolved yellow solution, 15ml is taken to pour into the glass plate of 12 × 12cm respectively, andGlass plate is placed in draught cupboard and is heated, to guarantee that rate of volatilization is gentle, sets heating temperature as 45 DEG C, PAN is moltenSolvent volatilization in liquid, finally obtains the transparent PAN film of different-thickness.
Moreover, (2) micro-nano patterning realizes that specific step is as follows to the step:
By step, (1) transparent PAN film obtained attaches to by polyimides double faced adhesive tape the sheet glass of 2.5 × 8cmOn；One layer of photoresists will be coated on sheet glass in a dark environment, it is 65 DEG C dry that the sheet glass of coating, which is put into set temperature,It is dried in dry case；By after drying film and designed patterning film carry out it is compound；To the compound film and thinFilm is exposed processing；Film after exposure is rinsed in clear water, will have after cleaning solidify the films of photoresists intoRow naturally dry；By what is obtained there is the film for solidifying photoresists to carry out DMF etching, using diluted DMF solution on filmCoating is volatilized by 50 DEG C of heating, obtains having etching depth and solidify the film of photoresists；To have etching depth and solidificationThe film of photoresists is ultrasonically treated in ultrasonic disperse machine, and removal solidification photoresists obtain the PAN film of micro-nano structure.
Moreover, described in a dark environment by the photoresists on sheet glass in one layer of photoresists of coating with a thickness of 50 ± 5 μm；The mass concentration of the diluted DMF solution is 3%；The sonication treatment time control is in 1 ± 0.2h.
Moreover, specific step is as follows for the dispersion of the step (3) carbon nanotube:
Weigh the multi-walled carbon nanotube of 5 parts of different qualities with electronic balance, quality be respectively 0.1mg, 0.2mg,0.3mg,0.4mg,0.5mg；Being mixedly configured into concentration with DMF solution and weighed 5 parts of multi-wall carbon nano-tube pipe powders is 0.1mg/The initial soln of ml, 0.2mg/ml, 0.3mg/ml, 0.4mg/ml, 0.5mg/ml；By configured solution on magnetic stirring apparatusCarry out tentatively being dispersed with stirring for 1h；The solution being stirred is put into the ultrasonic disperse for carrying out 12h in ultrasonic disperse machine, obtains multi wallCarbon nano tube dispersion liquid, for use.
Moreover, specific step is as follows for the attachment of the step (4) carbon nanotube:
(3) multi-walled carbon nanotube dispersion liquid that step obtains is centrifuged 10min under conditions of 2000r/min, after taking centrifugationSupernatant liquor, be slowly added dropwise into the beaker equipped with deionized water of 250ml, formed in water and Air Interface uniform, thoroughly thinMulti-walled carbon nanotube conductive layer；Sided corona treatment is carried out to the PAN film of (2) micro-nano structure that step obtains, increases its surfaceCan, it prepares for carbon nanotube attachment；It with micro-nano structure and the film on glass will be attached to slowly is inserted into water, with 45 °Angle slowly lifts thin slice, and the carbon nanotube layer on surface is allowed to be attached on film；The film of multi-walled carbon nanotube will be attached withIn an oven with the deionized water on its surface of 60 DEG C of temperature heating evaporation；The film for needing to adhere to 2 layers or more is repeated above-mentionedStep；
To guarantee rate of addition in whole process, remain a constant speed, be added dropwise from the edge close to beaker, while liftingGuarantee that slowly hand is not shaken in journey, shake is easy the aggregation for the fracture or attachment for adhering to conductive layer, guarantees external environmentIt is clean and closed.
Moreover, specific step is as follows for the encapsulation of the step (5) sensor:
It is obtaining with micro-nano structure and after being attached to the film of conductive layer, will sticked by polyimides double faced adhesive tapeFilm on glass is attached in transparent PVC film, and two measurement electricity are drawn by copper foil in the both sides of the layer filmPole, will have mutually isostructural MWCNTs/PAN/PVC/ copper foil membrane by sandwich structure facing each other assemble to getTo the final flexible micro-nano pressure sensor based on mode of printing.
It is sensed made from the preparation method of the flexible micro-nano pressure sensor based on mode of printing as described aboveApplication of the device in pressure change context of detection.
Moreover, the application be medical detection, physical training, sealing propertytest field pressure change context of detection inApplication.
The advantages of present invention obtains and good effect are:
1, the method for the present invention uses for reference the pressure sensor of printing plate manufacturing process production micro-nano structure in flexographic printing, passes through letterTechnique, the cheap cost of list obtain a kind of controllable and easy to operate micro-nano structure, and this method has augmented micro-nano sensor workThe blank of process research realizes that the manufacture of large area industrialization pliable pressure sensor has important research and application to itValue.
2, the importing of printing technology simplifies process for manufacturing electronic product and period；It can be with compared to conventional method the method for the present inventionThe pollution of environment is greatly reduced, while the controllability of technique is also reinforced；Final products are frivolous, flexible, reduce volumeWith weight, the characteristic of flexibility is realized；Material-saving saving of labor reduces cost；Pliable pressure sensor polymer material, nanometer materialMaterial, organic semiconducting materials etc. realize the demand of flexibility to the full extent, can shorten production compared to chemical etching methodPeriod, and machining process is simple；Green production, favorable environment protection；Printed electronics production waste is few, belongs on demandIt is required that increasing material manufacturing, be a process for cleanly preparing technology；Push the transition and upgrade of printing enterprise；Printing Industry is generally concentrated atThe basic livings articles such as packaging, books, fabric field, estate income are relatively low compared to the electronic field at high tip, and printThe development of brush electronics then to a certain extent redefines Printing Industry.
3, the method for the present invention is mainly the flexible compression layer that a kind of wiener structure is constructed by way of printing, then by leadingThe attachment of electric layer obtains the pressure sensor of " sandwich ".The present invention mainly obtains patterned wiener knot by new modeStructure, carries out pressure sensor production, and the main technique by using for reference printing plate production in offset printing obtains the wiener of concaveconvex structureLayer, then conductive layer is attached to patterned micro-nano structure layer by way of lifting compound obtains micro-nano by two layersThe structure of layer/conductive layer, then micro-nano layer/conductive layer composite layer protection insulation is got up by protective layer, and by opposite two-by-twoMode, it is compound by two layers of same structure, be aided with test electrode obtain final device.This method is by changing two conductionsThe contact area of layer realizes the variation of resistance, reaches the detection function of device.
The measurement of device is obtained: there is best spirit when micro-nano shape is diamond shape, and micro-nano cell spacing is 90 micronsSensitivity, the sensitivity of low pressure area are 0.458kPa-1, High Voltage area is then 0.033kPa-1, response time 0.032s, andFor the device of final molding, its transmissivity is then 60% or so.
Detailed description of the invention
Fig. 1 is the comparison diagram of the sensitivity of different micro-nano shapes and different spacing in the present invention；
Fig. 2 is that difference adheres to the numbers of plies to the influence diagram of resistance in the present invention；
Fig. 3 is the stability test figure of device made from the method for the present invention；
Fig. 4 is sampling time partial enlarged view in the present invention.
Specific embodiment
Below with reference to the invention will be further described by specific embodiment, following embodiment be it is descriptive, noIt is restrictive, this does not limit the scope of protection of the present invention.
Raw material used in the present invention is unless otherwise specified conventional commercial product；Used in the present inventionMethod is unless otherwise specified the conventional method of this field.
Embodiment 1
A kind of preparation method of the flexible micro-nano pressure sensor based on mode of printing, steps are as follows:
(1) 0.5g, 1g, 1.5g, 2g, 3g, 4g polyacrylonitrile solid powder are weighed with electronic balance, is respectively put into 6Spare in 100mL beaker, adhesive label paper is to show difference；The DMF of 50ml is separately added into load weighted polyacrylonitrile beakerSolution, and solution is put in water-bath and carries out heating water bath, temperature is set as 70 DEG C, to guarantee that DMF can cmpletely dissolvePowder, setting time are 1 hour；By dissolved yellow solution, 15ml is taken to pour into the glass of 12 × 12cm with graduated cylinder respectivelyIn plate, and glass plate is placed in draught cupboard and is heated；By heater plate, the solvent in PAN solution volatilizees, mostThe transparent membrane of different-thickness is obtained eventually.To guarantee that rate of volatilization is gentle, heating temperature is set as 45 DEG C.
(2) obtained transparent membrane is attached on the sheet glass of 2.5 × 8cm by polyimides double faced adhesive tape；BlackOne layer of photoresists of very thin (50 μm or so best) will be coated in dark situation on sheet glass, the sheet glass of coating is put into setting temperatureIt is dried in the drying box that degree is 65 DEG C；By after drying film and designed patterning film carry out it is compound；To multipleThe film and film of conjunction are exposed processing；Film after exposure is rinsed in clear water, will there is solidification sense after cleaningThe film of optical cement carries out naturally dry；By what is obtained there is the film for solidifying photoresists to carry out DMF etching, uses diluted DMFSolution (mass concentration is that 3% effect is best) coats on film, is volatilized by 50 DEG C of heating, obtains with etching depth and consolidateThe film of allelopathic optical cement；By with etching depth and solidify photoresists film be ultrasonically treated in ultrasonic disperse machine (controlSystem is in 1h or so).Removal solidification photoresists, obtain the PAN film of micro-nano structure.
(3) weigh the multi-walled carbon nanotube of 5 parts of different qualities with electronic balance, quality be respectively 0.1mg, 0.2mg,0.3mg,0.4mg,0.5mg；Being mixedly configured into concentration with DMF solution and weighed 5 parts of multi-wall carbon nano-tube pipe powders is 0.1mg/The initial soln of ml, 0.2mg/ml, 0.3mg/ml, 0.4mg/ml, 0.5mg/ml；By configured solution on magnetic stirring apparatusCarry out tentatively being dispersed with stirring for 1h；The solution being stirred is put into the ultrasonic disperse for carrying out 12h in ultrasonic disperse machine, obtains multi wallCarbon nano tube dispersion liquid is stand-by.
(4) obtained multi-walled carbon nanotube dispersion liquid is centrifuged 10min under conditions of 2000r/min, after centrifugationSolution draws supernatant liquor with liquid-transfering gun, is slowly added dropwise into the beaker equipped with deionized water of 250ml, in water and Air InterfaceForm uniform, saturating thin multi-walled carbon nanotube conductive layer；Sided corona treatment is carried out to the film with micro-nano structure, increases its surfaceCan, it prepares for carbon nanotube attachment；It with micro-nano structure and the film on glass will be attached to slowly is inserted into water, with 45 °Angle slowly lifts thin slice, and the carbon nanotube layer on surface is allowed to be attached on film；The film of multi-walled carbon nanotube will be attached withIn an oven with the deionized water on its surface of 60 DEG C of temperature heating evaporation；It repeats the above steps to 2 layers and 3 layers of film of attachment?.To guarantee rate of addition in whole process, remain a constant speed as far as possible, be added dropwise as far as possible from the edge close to glass beaker, togetherWhen during lifting as far as possible guarantee slowly, hand do not shake (shake be easy the fracture or attachment for adhering to conductive layer gatherCollection) guarantee the clean and closed of external environment as far as possible.
(5) it is obtaining with micro-nano structure and after being attached to the film of conductive layer, it is glutinous by polyimides double faced adhesive tapeThe film being attached on glass is attached in transparent PVC film, and two measurements are drawn by copper foil in the both sides of the layer filmElectrode will have mutually isostructural MWCNTs/PAN/PVC/ copper foil membrane to assemble by " sandwich " structure facing each otherFinal device is obtained to get the final flexible micro-nano pressure sensor based on mode of printing is arrived.
Embodiment 2
A kind of preparation method of the flexible micro-nano pressure sensor based on mode of printing, the method is to micro-nano layer and conductionLayer is constructed:
Micro-nano layer by the way that the film of designed micro-nano pattern is exposed with polyacrylonitrile film, development treatment obtainsTo the solidification photoresists with micro-nano structure, and unprotected region is carried out with the n,N-Dimethylformamide of energy dissolving filmsPartly be melt through etching, then is ultrasonically treated to it, removes cured photoresists, obtains the film with concaveconvex structure；Conductive layerMulti-walled carbon nanotube is attached on film by liquid phase method by lifting mode then, and carries out device group using opposite two-by-twoDress, obtains the flexible micro-nano pressure sensor based on mode of printing.
More preferably, steps are as follows:
(1) the production of transparent PAN film；
(2) micro-nano patterning is realized；
(3) the dispersion of carbon nanotube；
(4) the attachment of carbon nanotube；
(5) the encapsulation of sensor.
More preferably, the step (1) in the production of transparent PAN film specific step is as follows:
0.5g, 1g, 1.5g, 2g, 3g, 4g polyacrylonitrile solid powder are weighed by electronic balance, is respectively put into 6Spare in 100mL beaker, adhesive label paper is to show difference；The DMF of 50ml is separately added into load weighted polyacrylonitrile beakerSolution, and solution is put in water-bath and carries out heating water bath, temperature is set as 70 DEG C, to guarantee that DMF can cmpletely dissolvePowder, setting time are 1 hour；By dissolved yellow solution, 15ml is taken to pour into the glass plate of 12 × 12cm respectively, andGlass plate is placed in draught cupboard and is heated, to guarantee that rate of volatilization is gentle, sets heating temperature as 45 DEG C, PAN is moltenSolvent volatilization in liquid, finally obtains the transparent PAN film of different-thickness.
More preferably, (2) micro-nano patterning realizes that specific step is as follows to the step:
By step, (1) transparent PAN film obtained attaches to by polyimides double faced adhesive tape the sheet glass of 2.5 × 8cmOn；One layer of photoresists will be coated on sheet glass in a dark environment, it is 65 DEG C dry that the sheet glass of coating, which is put into set temperature,It is dried in dry case；By after drying film and designed patterning film carry out it is compound；To the compound film and thinFilm is exposed processing；Film after exposure is rinsed in clear water, will have after cleaning solidify the films of photoresists intoRow naturally dry；By what is obtained there is the film for solidifying photoresists to carry out DMF etching, using diluted DMF solution on filmCoating is volatilized by 50 DEG C of heating, obtains having etching depth and solidify the film of photoresists；To have etching depth and solidificationThe film of photoresists is ultrasonically treated in ultrasonic disperse machine, and removal solidification photoresists obtain the PAN film of micro-nano structure.
More preferably, the photoresists that will be coated on sheet glass in one layer of photoresists in a dark environment with a thickness of 50 ±5μm；The mass concentration of the diluted DMF solution is 3%；The sonication treatment time control is in 1 ± 0.2h.
More preferably, specific step is as follows for the dispersion of the step (3) carbon nanotube:
Weigh the multi-walled carbon nanotube of 5 parts of different qualities with electronic balance, quality be respectively 0.1mg, 0.2mg,0.3mg,0.4mg,0.5mg；Being mixedly configured into concentration with DMF solution and weighed 5 parts of multi-wall carbon nano-tube pipe powders is 0.1mg/The initial soln of ml, 0.2mg/ml, 0.3mg/ml, 0.4mg/ml, 0.5mg/ml；By configured solution on magnetic stirring apparatusCarry out tentatively being dispersed with stirring for 1h；The solution being stirred is put into the ultrasonic disperse for carrying out 12h in ultrasonic disperse machine, obtains multi wallCarbon nano tube dispersion liquid, for use.
More preferably, specific step is as follows for the attachment of the step (4) carbon nanotube:
(3) multi-walled carbon nanotube dispersion liquid that step obtains is centrifuged 10min under conditions of 2000r/min, after taking centrifugationSupernatant liquor, be slowly added dropwise into the beaker equipped with deionized water of 250ml, formed in water and Air Interface uniform, thoroughly thinMulti-walled carbon nanotube conductive layer；Sided corona treatment is carried out to the PAN film of (2) micro-nano structure that step obtains, increases its surfaceCan, it prepares for carbon nanotube attachment；It with micro-nano structure and the film on glass will be attached to slowly is inserted into water, with 45 °Angle slowly lifts thin slice, and the carbon nanotube layer on surface is allowed to be attached on film；The film of multi-walled carbon nanotube will be attached withIn an oven with the deionized water on its surface of 60 DEG C of temperature heating evaporation；The film for needing to adhere to 2 layers or more is repeated above-mentionedStep；
To guarantee rate of addition in whole process, remain a constant speed, be added dropwise from the edge close to beaker, while liftingGuarantee that slowly hand is not shaken in journey, shake is easy the aggregation for the fracture or attachment for adhering to conductive layer, guarantees external environmentIt is clean and closed.
More preferably, specific step is as follows for the encapsulation of the step (5) sensor:
It is obtaining with micro-nano structure and after being attached to the film of conductive layer, will sticked by polyimides double faced adhesive tapeFilm on glass is attached in transparent PVC film, and two measurement electricity are drawn by copper foil in the both sides of the layer filmPole, will have mutually isostructural MWCNTs/PAN/PVC/ copper foil membrane by sandwich structure facing each other assemble to getTo the final flexible micro-nano pressure sensor based on mode of printing.
It is sensed made from the preparation method of the flexible micro-nano pressure sensor based on mode of printing as described aboveApplication of the device in pressure change context of detection.
More preferably, the application be medical detection, physical training, sealing propertytest field pressure change context of detectionIn application.
Coherent detection of the invention:
The contrasting detection of the sensitivity of different micro-nano shapes and different spacing, the different attachment numbers of plies are to resistance in the present inventionThe stability test of device made from detection, the method for the present invention is influenced, which can be used this fieldInterior conventional method is detected, therefore the present invention is not described in detail.
When micro-nano shape is diamond shape, and micro-nano cell spacing is 90 microns, there is optimum sensitivity, low pressure area is sensitiveDegree is 0.458kPa-1, High Voltage area is then 0.033kPa-1, response time 0.032s, and for the device of final moldingIts transmissivity is then 60% or so.
From figure 1 it appears that sensitivity is tended towards stability afterwards as the increase of pressure first increases, mainly due toThe increase of pressure, the power for acting on device surface is continuously increased, and forced area has not been changed, decrement not up to compress it is fullAnd when, conductive layer contacts rapidly, and resistance value rapidly changes, i.e. sensitivity relative increase is very fast, when pressure increase to certain value,Two conductive layers contact is more and more closer, and resistance no longer changes substantially.Therefore low pressure range high sensitivity is in High Voltage range.FromIt can be found that the sensitivity of low-pressure area and higher-pressure region when spacing is 90 microns, and micro-nano pattern is diamond shape all reaches in dataSimilar maximum value.And the shape of low-pressure area micro-nano structure is affected to sensitivity, and higher-pressure region is substantially unrelated with shape, andThe sensitivity of higher-pressure region and spacing correlation are larger.Mainly since being under pressure for low-pressure area micro-nano structure generates the more of deformationIt is few larger with the relationship of micro-nano structure, and reached in higher-pressure region since the compression of micro-nano structure has reached the i.e. contact area of saturationMaximum is arrived, the resistance of conductive layer no longer changes or varies less.
As can be seen from Figure 2 adhere to the device of the identical conduction number of plies, resistance overall variation amount is essentially identical, with micro-nanoStructural relation correlation is smaller, and mainly since when compression reaches saturation, i.e., conductive layer contact is complete, resistance is not changing,It could also be possible that diamond shape is more similar to square configuration, therefore the influence of micro-nano shape is unobvious, and leads for adhering to the different numbers of pliesThe device of electric layer, two layers the variable quantity of resistance is also big when Datong District than adhering to three layers of resistance starting resistance for attachment, mainly byIt is big compared to three layers in two layers of resistance, therefore two layers to three layer of starting resistance is big, and than three layers adhesive layer entirety of two layers of adhesive layerVariable quantity is big, and mainly not close compared to what three-layered node closed due to two layers of adhesive layer, the resistance of beginning is with regard to big, when the pressure is exertedThe variable quantity of the conductive layer contact area of two layers of adhesive layer is bigger than three layers, therefore whole two layers to three layer of adhesive layer of resistance changeGreatly.
From figure 3, it can be seen that maintain good consistency in low-pressure area device, in higher-pressure region, the stability of device is notSuch as area of low pressure, under low voltage situations, the contact of conductive layer is also insufficient, and the change of decrement can guarantee conductive layer wellChanges in contact is conductive layer due to using multi-walled carbon nanotube, in high pressure feelings when reaching higher-pressure region with the increase of pressureUnder condition, conductive layer, which is likely to occur, to be pressed into recess, or even the tomography of part occurs, leads to the unstable of resistance.But on the wholeAs can be seen that the variation of its repetition experiment resistance carried out has good consistency, therefore stability is preferable.
The detection method in sampling time is as follows in the present invention: microcomputer control universal electrical test machine, can record and applies objectPressure, the variation of the decrement of object and corresponding time, wherein one group of data (diamond shape, 90 micro-nano spacing, 2 layers of adhesive layer) is logical for selectionAbscissa will be set as the time by crossing in origin software, ordinate value is set as 1, and ordinate is meaningless herein, be only mappingIt needs, partial enlargement, the time precision responded then is carried out to abscissa.As a result as shown in Figure 4.
By in Fig. 4 as can be seen that calculate the microcomputer control universal electrical test machine sampling minimum time be 0.032s,Then the time is denoted as the response time of micro-nano sensor, i.e. the response time of the micro-nano sensor is 0.032s.
Although disclosing the embodiment of the present invention for the purpose of illustration, it will be appreciated by those skilled in the art that: notBe detached from the present invention and spirit and scope of the appended claims in, various substitutions, changes and modifications be all it is possible, therefore, thisThe range of invention is not limited to the embodiment disclosure of that.