Summary of the invention
In view of this, the present disclosure proposes a kind of wearable device using flexible extending electrode acquisition EEG signals,The EEG signals of detected person can be acquired whenever and wherever possible in detected person moves, it is simple and easy to use, it is convenient for detected personActivity, and acquisition of the long period to EEG signals may be implemented.
According to the one side of the disclosure, it provides and a kind of is set using flexible extending electrode acquisition the wearable of EEG signalsIt is standby, flexible extending electrode is integrated on the wearable device,
The extending electrode of flexibility includes flexible extending substrate layer, electrode body and leads from what electrode body was drawnLine, the electrode body and the conducting wire are arranged on the extending substrate layer of flexibility；
The extending electrode of flexibility acquires the EEG signals of target object by the electrode body, and by the brain of acquisitionElectric signal gives acquisition equipment by the wire transmission.
In one possible implementation, the electrode body and the conducting wire are thin by metallic film and polyimides PIFilm is made.
In one possible implementation, the electrode body is extendable structure.
In one possible implementation, the electrode body includes reticular structure.
In one possible implementation, the metallic film includes the first metal layer and second metal layer；
Wherein, the first metal layer is used to second metal layer being bonded to polyimides PI film, and the polyimides PI is thinFilm and flexible extending substrate layer bond.
In one possible implementation, the polyimides PI film thickness is 3 μm~6 μm.
In one possible implementation,
The first metal layer includes one or both of crome metal, titanium；
The second metal layer includes one or more of metallic gold, platinum, iridium.
In one possible implementation,
The first metal layer with a thickness of 5~20nm；
The second metal layer with a thickness of 100~200nm.
In one possible implementation, the conducting wire is extendable structure.
In one possible implementation, the conducting wire is linear for the snakelike or watch chain that wriggles.
In one possible implementation, the wearable device is In-Ear Headphones, the extending electrode of flexibilityThe position that can be contacted with ear canal inner skin on the In-Ear Headphones is set；
Wherein, the conducting wire connects the acquisition equipment by enameled wire, and the enameled wire is worn from earphone cap preformed holeIt crosses and is arranged in earphone cable.
In one possible implementation,
The extending electrode of flexibility described in two-way, all the way flexible extending electrode conduct are integrated on every In-Ear HeadphonesReference electrode, test electrode of the flexible extending electrode of another way as EEG signals.
According to another aspect of the present disclosure, a kind of preparation method of extending electrode of flexibility is provided, which comprises
Sacrificial layer is prepared on hard substrate；
The coating polyimide PI solution on sacrificial layer, and be heating and curing as PI film；
Metallic film is formed on PI film；
Metallic film is patterned；
Etching sacrificial layer forms the ductile metals electrode being made of the metallic film after PI film and patterning；
Ductile metals electrode is transferred on flexible extending substrate layer, wherein PI film side and flexible extending liningBottom bonding；
Using the metallic film after patterning as exposure mask, using the PI of reactive ion etching technology etching ductile metals electrodeFilm obtains flexible extending electrode.
In one possible implementation, which is characterized in that metallic film is patterned, comprising:
Method is lifted away from using photoetching process or photo etched mask to pattern metallic film.
In one possible implementation, ductile metals electrode is transferred on flexible extending substrate layer, comprising:
Ductile metals electrode is transferred on flexible extending substrate layer using seal transfer printing or solution transfer printing.
The wearable device using flexible extending electrode acquisition EEG signals of the embodiment of the present disclosure, by wearableFlexible extending electrode is integrated in equipment, the electrode body of the extending electrode of flexibility and the conducting wire are arranged can in flexibilityOn extension substrate layer, the flexibility and ductility of flexible extending substrate layer guarantee flexible extending electrode and wearable device moreGood fitting, so that it is guaranteed that flexible extending electrode is more contacted with skin to obtain the EEG signals of excellent quality.Therefore,According to the wearable device of the disclosure, the EEG signals of detected person can be acquired whenever and wherever possible during exercise in detected person,It is simple and easy to use, convenient for detected person's activity, and acquisition of the long period to EEG signals may be implemented.
According to below with reference to the accompanying drawings to detailed description of illustrative embodiments, the other feature and aspect of the disclosure will becomeIt is clear.
Specific embodiment
Various exemplary embodiments, feature and the aspect of the disclosure are described in detail below with reference to attached drawing.It is identical in attached drawingAppended drawing reference indicate element functionally identical or similar.Although the various aspects of embodiment are shown in the attached drawings, removeIt non-specifically points out, it is not necessary to attached drawing drawn to scale.
Dedicated word " exemplary " means " being used as example, embodiment or illustrative " herein.Here as " exemplary "Illustrated any embodiment should not necessarily be construed as preferred or advantageous over other embodiments.
In addition, giving numerous details in specific embodiment below to better illustrate the disclosure.It will be appreciated by those skilled in the art that without certain details, the disclosure equally be can be implemented.In some instances, forMethod, means, element and circuit well known to those skilled in the art are not described in detail, in order to highlight the purport of the disclosure.
The present disclosure proposes a kind of wearable devices using flexible extending electrode acquisition EEG signals, set wearableFlexible extending electrode is integrated on standby to carry out the acquisition of EEG signals.
Flexible extending electrode may include: flexible extending substrate layer, electrode body 11 and draw from electrode bodyConducting wire 13, Fig. 1 show the top view of the extending electrode of flexibility according to one embodiment of the disclosure.As shown in Figure 1, the electrode body11 and from the conducting wire 13 that electrode body is drawn, flexible extending substrate layer is not shown in the figure in vertical view, therefore in a top view can notSee the extending substrate layer of flexibility below electrode body 11 and conducting wire 13.Terminals 12 are also shown in Fig. 1, from electrode bodyThe conducting wire 13 of extraction can also be attached by the object that this terminals is capable of conduction with other, such as enameled wire.Flexibility canExtension electrode acquires the EEG signals of target object by electrode body, and the EEG signals of acquisition are adopted by wire transmissionCollect equipment.
The wearable device using flexible extending electrode acquisition EEG signals of the embodiment of the present disclosure, by wearableFlexible extending electrode is integrated in equipment, the electrode body of the extending electrode of flexibility and the conducting wire are arranged can in flexibilityOn extension substrate layer, the flexibility and ductility of flexible extending substrate layer guarantee flexible extending electrode and wearable device moreGood fitting, so that it is guaranteed that flexible extending electrode is more contacted with skin to obtain the EEG signals of excellent quality.Therefore,According to the wearable device of the disclosure, the EEG signals of detected person can be acquired whenever and wherever possible in detected person moves, madeWith convenient and simple, convenient for detected person's activity, and acquisition of the long period to EEG signals may be implemented.
In one possible implementation, extendable structure can be made in electrode body and/or conducting wire.Wherein, electricThe selection of the pattern of pole main body 11, which can be, all has certain ductility energy in multiple directions, in one example, can be withCertain ductility energy is provided with based on two mutually perpendicular directions；Axial direction can be considered in the selection of 13 pattern of conducting wireDuctility.Such as reticular structure can be made in electrode body, it is linear etc. that conducting wire is made to the snakelike or watch chain that wriggles, thisThe ductility structure of sample can make flexible extending electrode and wearable device, skin all realize that effective fitting area is maximumChange, is conducive to more accurately acquire EEG signals.
It should be noted that the shape of electrode body and the shape of conducting wire are not limited to above-mentioned example, those skilled in the artThe shape of electrode body and conducting wire can be arranged in member according to actual application, reticulate for example, electrode body can be arranged,It is netted may include: triangle, it is quadrangle, various polygons, quincunx and any can make webbed figure.Conducting wireShape can be set into, including snakelike, S-shaped, grid-shaped, star and quincunx can also be that other are easy to flexible extensionShape.
In one possible implementation, in order to realize the flexibility and ductility of flexible extending electrode, electrode masterBody and conducting wire can be made of metallic film and polyimides PI film.Wherein, metallic film may include the first metal layerAnd second metal layer, the first metal layer are used to second metal layer being bonded to polyimides PI film, polyimides PI film withFlexible extending substrate layer bonding, flexible extending substrate layer can be by 3M transparent dressing or polydimethylsiloxane systemAt.
Since the first metal layer is mainly used for bonding second metal layer and polyimides PI film, so the first metal layer canTo select one or both of the metal, such as crome metal, titanium with caking property, the thickness of the first metal layer can for 5~20nm, such as the first metal layer select crome metal, with a thickness of 10nm；Second metal layer can select biologically inert metal, such asOne or more of gold, platinum, iridium, second metal layer thickness can be 100~200nm, such as second metal layer selects metalGold, with a thickness of 150nm；The thickness of polyimides PI film can be 3 μm~6 μm.
It should be noted that the example of the above the first metal layer and second metal layer does not limit the disclosure in any way.
The wearable device using flexible extending electrode acquisition EEG signals of the embodiment of the present disclosure, by using havingFlexible and ductility metallic film, polyimides PI film and flexible extending substrate layer, and electrode body is carried outDesign with ductility structure, had both reduced the tensible rigidity and bending stiffness of flexible extending electrode, while also protectingDemonstrate,proved flexible extending electrode be closely bonded with wearable device, the effective area of flexible extending electrode and skin attachement mostBigization, therefore the EEG signals of excellent quality can be collected.
In one possible implementation, wearable device can be In-Ear Headphones, flexible extending electrode settingThe position that can be contacted with ear canal inner skin on In-Ear Headphones, such as by flexible extending electrode setting can either be with earThe position of machine cap surface good fit, but can with the position of ear canal inner skin good fit, and in order to keep enameled wire sudden and violent on a small quantityIt is exposed at outside earphone, can be by flexible extending electrode as close to preformed hole, such as position as shown in Figure 2 can be usedIt is bonded.Wherein, earphone cap can be printed by 3D printer and be produced, or the earphone cap sold in the market.
When flexible extending electrode adhesion earphone cap, the methods of liquid bandage, double-sided adhesive dressing, 502 glue can be selected；Wherein, the conducting wire connects the acquisition equipment by enameled wire, and the enameled wire passes through setting from earphone cap preformed hole and existsIn earphone cable.
In alternatively possible implementation, wearable device can be hard earphone, can be by flexible extending electricityPole is integrated with the hard earphone sold in the market.
Fig. 2 a and Fig. 2 b are shown respectively according to one embodiment of the disclosure using flexible extending electrode acquisition EEG signalsWearable device structural schematic diagram, be that 3D printer prints the earphone cap produced, wearing shown in Fig. 2 b shown in Fig. 2 aWearing equipment is the hard earphone sold in the market.
In one possible implementation, the flexible extending electrode of two-way is integrated on every In-Ear Headphones, it is soft all the wayProperty extending electrode as reference electrode, test electrode of the flexible extending electrode of another way as EEG signals.Acquire equipmentThe test signal of the reference signal and test electrode acquisition that can be acquired according to reference electrode determines EEG signals.
It in one possible implementation, can be by the reference electrode and test electricity on an earphone for the sake of beautifulThe two-way enameled wire and music transmission line of pole connection are integrated in same root earphone cable, but are finally divided into three-way joint, with reference to electricityThe connector of pole and test electrode can be respectively connected to detection device, and the connector of music transmission line can access setting for musicIt is standby, such as any music player devices that can connect such as mobile phone, detected person may be implemented in this way while listening to music,It can detecte the EEG signals of detected person.
The wearable device using flexible extending electrode acquisition EEG signals of the embodiment of the present disclosure, by entering at everyThe flexible extending electrode of two-way is integrated on aural headphone, realizes that the target object for being detected EEG signals can be same what is listened to musicWhen, the detection of EEG signals is carried out, and flexible extending electrode can be integrated with the earphone sold in the market, facilitate production.
Fig. 3 shows the flow chart of the preparation method of the extending electrode of flexibility according to one embodiment of the disclosure.Fig. 4 a, figure4b, Fig. 4 c, Fig. 4 d, Fig. 4 e, Fig. 4 f, Fig. 4 g and Fig. 4 h are shown respectively to exist according to the extending electrode of flexibility of one embodiment of the disclosureLayering schematic cross-section in preparation process.As shown in figure 3, the method comprising the steps of S41 to S47:
In step S41, sacrificial layer is prepared on hard substrate.After preparation as shown in fig. 4 a.
As an example, it can choose silicon wafer as hard substrate, polymetylmethacrylate(Polymethylmethacrylate, abbreviation PMMA) is used as sacrificial layer.In fig.4, including hard substrate 31 and sacrificial layer32。
In step S42, the coating polyimide PI solution on sacrificial layer, and be heating and curing as PI film.Preparation finishesIt is as shown in Figure 4 b afterwards, including hard substrate 31, sacrificial layer 32 and PI film 33.
As an example, can in a manner of spin coating on sacrificial layer coating polyimide PI solution, and be heating and curingFor PI film, the thickness of PI film can be 3 μm~6 μm.
In step S43, metallic film is formed on PI film.After preparation as illustrated in fig. 4 c, including hard substrate31, sacrificial layer 32, PI film 33, the first metal layer 34 and second metal layer 35.
As an example, film growth techniques, such as vapour deposition method can be used, gold is carried out on the PI film madeBelong to the growth of layer material, forms metallic film.Wherein, metallic film may include the first metal layer and second metal layer, and firstMetal layer is used to second metal layer being bonded to polyimides PI film.
Since the first metal layer is mainly used for bonding second metal layer and polyimides PI film, so the first metal layer canTo select one or both of crome metal, titanium, the thickness of the first metal layer can be 5~20nm, such as the first metal layer isCrome metal, with a thickness of 10nm；Second metal layer can select one or more of biologically inert metal, such as gold, platinum, iridium,Second metal layer thickness can be 100~200nm, such as second metal layer is metallic gold, with a thickness of 150nm.
In step S44, metallic film is patterned.After preparation as shown in figure 4d, including hard substrate 31,The second metal layer 35 after the first metal layer 34 and patterning after sacrificial layer 32, PI film 33, patterning.
In one possible implementation, carrying out patterning to metallic film may include: to utilize photoetching process or lightIt carves exposure mask to be lifted away from method and pattern metallic film, electrode body can be made by reticular structure by patterning, by conducting wireIt is linear that the snakelike or watch chain that wriggles is made, so that electrode body and conducting wire have ductility.
In step S45, etching sacrificial layer forms the extending gold being made of the metallic film after PI film and patterningBelong to electrode.After preparation as shown in fig 4e, including the after the first metal layer 34 and patterning after PI film 33, patterningTwo metal layers 35.
In step S46, ductile metals electrode is transferred on flexible extending substrate layer, wherein PI film side withFlexible extending substrate layer bonding.After preparation as shown in fig. 4f, including the first metal layer after PI film 33, patterning34, second metal layer 35 and flexible extending substrate layer 36 after patterning.
In one possible implementation, ductile metals electrode is transferred on flexible extending substrate layer, includingDuctile metals electrode is transferred on flexible extending substrate layer using seal transfer printing or solution transfer printing.
As an example, flexible extending substrate layer can be by 3M transparent dressing or polydimethylsiloxane systemAt.
In step S47, using the metallic film after patterning as exposure mask, etched using reactive ion etching technology extendingThe PI film of metal electrode obtains flexible extending electrode.After preparation as shown in figure 4g, including the PI film after etching33, the second metal layer 35 and the extending substrate layer 36 of flexibility after the first metal layer 34, patterning after patterning.
In one possible implementation, conducting wire can also be in addition to above structure composition mode in the second metalThe building form of one layer of the 2nd PI film 37 is coated on layer, the effect of the 2nd PI film 37 is to prevent electrode body from usingThe injury such as it is oxidized or wears in journey.After preparation as shown in figure 4h, including etching after PI film 33, patterning afterSecond metal layer 35, flexible extending substrate layer 36 and the 2nd PI film 37 after the first metal layer 34, patterning.
For the sake of convenient device preparation, above-mentioned preparation method sequence of steps is preferred, it is clear that without obvious between some stepsPrecedence relationship, be based on above-mentioned preparation step, those of ordinary skill in the art are obtained without making creative workAll other schemes for being different from above-mentioned preparation method step obtained, belong to the scope of the present invention.
The preparation method of a kind of extending electrode of flexibility of the embodiment of the present disclosure, by using micro-nano semiconducter processMetallic film is prepared, the thickness of metallic film can be made accurately in nanoscale, greatly reduce the thickness of metallic film.
The presently disclosed embodiments is described above, above description is exemplary, and non-exclusive, andIt is not limited to disclosed each embodiment.Without departing from the scope and spirit of illustrated each embodiment, for this skillMany modifications and changes are obvious for the those of ordinary skill in art field.The selection of term used herein, purportIn the principle, practical application or technological improvement to the technology in market for best explaining each embodiment, or lead this technologyOther those of ordinary skill in domain can understand each embodiment disclosed herein.