The optical film layer preparation method of Five-channel multi-color filterTechnical field
The present invention relates to Deposition Techniques for Optical Thin Films fields, and in particular to a kind of optical film layer of Five-channel multi-color filterPreparation method.
Background technique
In multispectral, the full spectrum imaging system of current remote sensing system, need one kind can satisfy 150 ±5~510 ± 6nm, 510 ± 6~580 ± 6nm, 630 ± 7~690 ± 7nm, 770 ± 8~895 ± 9nm, 450 ± 5~800 ±Transmitance reaches 90% optical filter in this five spectral coverage channels 9nm, and has within the scope of 300~1100nm and inhibit optical signalEffect, to reduce the influence of signal noise.
However, since the coating film area of each passband of optical filter under the requirement is relatively narrow, within 3 ㎜, therefore plated filmThe difficulty of technique is larger, and the membrane system that the product is related to is more, be related to it is complex, according to traditional mentality of designing, respectivelyIt is coated with that different long waves is logical and short-pass membrane system on the two sides of substrate, needs to be coated with 10 membrane systems in total, and each membrane system is being platedIt is both needed to protect non-plated film area when processed, process is complex, and yield rate is very low.
Summary of the invention
For the deficiencies in the prior art, it is an object of the present invention to provide a kind of optical films of Five-channel multi-color filterLayer preparation method, the spectral characteristic of the multi-color filter is realized using 6 membrane systems, reduces the quantity of membrane system, reduces productionThe development difficulty of product, improves the yield rate of product, answers it extensively in the optical systems such as space multi-spectral, full spectrumWith.
In order to solve the above technical problems, present invention provide the technical scheme that
Include the following steps:
S1: using sapphire as substrate, the indoor impurity of vacuum is removed using dust catcher, dehydrated alcohol is dipped in absorbent gauze and wipesThe inner wall of clean vacuum chamber is wiped, then microwave ultrasound 15min is successively carried out to substrate respectively using anhydrous propanone and dehydrated alcohol, andWith absorbent cotton by substrate wiped clean, finally clean substrate is installed on fixture and is quickly packed into vacuum chamber, is evacuated to 3×10-5Torr；
S2: substrate is heated to 200 DEG C, and keeps 30min；
S3: substrate 10min is cleaned by the way of ion beam bombardment；
S4: using the electron gun evaporation method of Assisted by Ion Beam in the layer-by-layer alternating deposit titanium oxide layer in the side of substrate and twoMembranous layer of silicon oxide forms membrane system 1, and in the other side of substrate, layer-by-layer alternating deposit titanium oxide layer and silica coating form filmIt is 2, membrane system 3, membrane system 4, membrane system 5 and membrane system 6；
S5: to substrate cooled to room temperature, the product being prepared is taken out；
S6: product is tested for the property under the low temperature environment of 300K using spectrophotometer, and is marked according to the Ministry of Aerospace IndustryIt is tested in quasi- " QJ1697-89 " about film surface quality, adhesive force and Environmental test requirements document.
Further, step S1 to S6 is all made of the full-automatic optical coating machine system system of model Intergrity-39It is standby.
Further, the CC-105 of the ion source model Hall source type used in step s3, wherein ion source worksGas is argon gas, gas flow 17sccm.
Further, the CC-105 of the ion source model Hall source type used in step s 4, wherein ion source worksGas is argon gas, gas flow 17sccm, and the deposition rate of titanium oxide layer remains 1.0nm/s, silica coatingDeposition rate remains 0.8nm/s.
Further, in step s 4, using quartz crystal film-thickness monitoring to titanium oxide layer and silica coatingThickness be monitored.
Further, in step s 4, the structure of membrane system 1 is (0.5lh0.5l) ^12 (0.18h0.36l0.18h) ^10,Central wavelength is 1025nm, and the structure of membrane system 2 is (0.5lh0.5l) ^12 (0.60l1.20h0.60l) ^9(0.75l1.5h0.75l) ^8, central wavelength 600nm, the structure of membrane system 3 are (0.60l1.20h0.60l) ^7(0.495l0.99h0.495l) ^13 (0.305h0.610l0.395h) ^14, the structure of central wavelength 680nm, membrane system 4 are(0.50l1.0h0.50l) ^13 (0.330h0.660l0.330h) ^13 (0.30h0.60l0.30h) ^5, central wavelength are758nm, the structure of membrane system 5 are (0.50h1.00l0.50h) ^14 (0.38h0.76l0.38h) ^10, central wavelength 648nm,The structure of membrane system 6 is (0.5lh0.5l) ^12, central wavelength 928nm, finally using Macleod software to the thickness of membrane system intoRow optimization.
Further, in step s 6, the Lambda900 of PE company of the model U.S. production of the spectrophotometer of useThe spectrophotometer of model, and calculated with transmitted spectrum of the UVWINLAB software to measured optical filter.
The optical film layer preparation method of Five-channel multi-color filter of the present invention, using the complete of model Intergrity-39Prepared by automated optical coating machine system, first clean to vacuum chamber and substrate, then base is put into vacuum chamber and is taken outVacuum cleans substrate using ion beam bombardment after substrate is heated to 200 DEG C, then with electron gun evaporation respectively the one of substrateThe layer-by-layer alternating deposit titanium oxide layer in side and silica coating form membrane system 1, in the layer-by-layer alternating deposit oxidation titanium film in the other sideLayer and silica coating form membrane system 2, membrane system 3, membrane system 4, membrane system 5 and membrane system 6, take out after being cooled to room temperature, and useSpectrophotometer is tested, and is calculated using UVWINLAB software its spectrum line, according to space flight ministerial standard " QJ1697-It is tested, is prepared according to this method more about film surface quality, adhesive force and Environmental test requirements document in 89 "Colo(u)r filter can satisfy while in 150 ± 5~510 ± 6nm, 510 ± 6~580 ± 6nm, 630 ± 7~690 ± 7nm, 770Transmitance >=90% in this five spectral coverage channels ± 8~895 ± 9nm, 450 ± 5~800 ± 9nm, and penetrated within the scope of otherRate≤0.5% substantially increases the yield rate of product, reduces the cost of product, the full spectrum suitable for space remote sensing systemCamera etc..
Detailed description of the invention
Attached drawing is used to provide further understanding of the present invention, and constitutes part of specification, with reality of the inventionIt applies example to be used to explain the present invention together, not be construed as limiting the invention.In the accompanying drawings:
Fig. 1 is the flow diagram of the optical film layer preparation method of Five-channel multi-color filter of the present invention；
Fig. 2 is the light in the channel one being prepared according to the optical film layer preparation method of Five-channel multi-color filter of the present inventionSpectrogram；
Fig. 3 is the light in the channel two being prepared according to the optical film layer preparation method of Five-channel multi-color filter of the present inventionSpectrogram；
Fig. 4 is the light in the channel three being prepared according to the optical film layer preparation method of Five-channel multi-color filter of the present inventionSpectrogram；
Fig. 5 is the light in the channel four being prepared according to the optical film layer preparation method of Five-channel multi-color filter of the present inventionSpectrogram；
Fig. 6 is the light in the channel five being prepared according to the optical film layer preparation method of Five-channel multi-color filter of the present inventionSpectrogram.
Specific embodiment
Below in conjunction with attached drawing, preferable examples of the present invention will be described, it should be understood that preferred embodiment described hereinOnly for the purpose of illustrating and explaining the present invention and is not intended to limit the present invention.
As shown in Figure 1, the optical film layer preparation method of Five-channel multi-color filter of the present invention, using modelPrepared by the full-automatic optical coating machine system of Intergrity-39, first remove vacuum with dust catcher using sapphire as substrateIndoor impurity dips in the inner wall of dehydrated alcohol wiped clean vacuum chamber with absorbent gauze, then is divided with anhydrous propanone and dehydrated alcoholIt is other that microwave ultrasound 15min is carried out to substrate, and clean substrate is finally installed to fixture by base wiped clean with absorbent cottonIt above and quickly is packed into vacuum chamber, is evacuated to 3 × 10-5Substrate is then heated to 200 DEG C, and keeps 30min by Torr.
Substrate 10min is cleaned by the way of ion beam bombardment, wherein the CC-105 of ion source model Hall source type, workMaking gas is argon gas, and gas flow 17sccm is successively handed over using the electron gun evaporation method of Assisted by Ion Beam in the side of substrateMembrane system 1 is formed for deposition of titania film layer and silica coating, in the layer-by-layer alternating deposit titanium oxide layer in the other side of substrateWith silica coating membrane system 2, membrane system 3, membrane system 4, membrane system 5 and membrane system 6 are formed, wherein ion source model Hall source typeCC-105, ion source working gas are argon gas, and the deposition rate of gas flow 17sccm, titanium oxide layer remain 1.0nm/S, the deposition rate of silica coating remain 0.8nm/s, finally using quartz crystal film-thickness monitoring to titanium oxide layerIt is monitored with the thickness of silica coating, the structure for the membrane system 1 being prepared is (0.5lh0.5l) ^12(0.18h0.36l0.18h) ^10, central wavelength 1025nm, the structure of membrane system 2 are (0.5lh0.5l) ^12(0.60l1.20h0.60l) ^9 (0.75l1.5h0.75l) ^8, the structure of central wavelength 600nm, membrane system 3 are(0.60l1.20h0.60l) ^7 (0.495l0.99h0.495l) ^13 (0.305h0.610l0.395h) ^14, central wavelength are680nm, the structure of membrane system 4 are (0.50l1.0h0.50l) ^13 (0.330h0.660l0.330h) ^13(0.30h0.60l0.30h) ^5, central wavelength 758nm, the structure of membrane system 5 are (0.50h1.00l0.50h) ^14The structure of (0.38h0.76l0.38h) ^10, central wavelength 648nm, membrane system 6 are (0.5lh0.5l) ^12, and central wavelength is928nm can be used Macleod software and optimize to the thickness of membrane system.
It is taken out after substrate is cooled to room temperature, and uses the spectrophotometer of model Lambda900 in the low temperature of 300KProduct is tested for the property under environment, according to according in space flight ministerial standard " QJ1697-89 " about film surface quality, adhesive forceIt is tested with Environmental test requirements document, is finally counted with transmitted spectrum of the UVWINLAB software to measured optical filterIt calculates.
In conclusion the present invention is reduced to 6 by reducing membrane system quantity, by 10 conventional membrane systems, and use typeIt number is prepared, first vacuum chamber and substrate is cleaned, then for the full-automatic optical coating machine system of Intergrity-39Base is put into vacuum chamber and is vacuumized, substrate is cleaned using ion beam bombardment after substrate is heated to 200 DEG C, then use electron gunEvaporation forms membrane system 1 in the layer-by-layer alternating deposit titanium oxide layer in the side of substrate and silica coating respectively, in the other sideLayer-by-layer alternating deposit titanium oxide layer and silica coating form membrane system 2, membrane system 3, membrane system 4, membrane system 5 and membrane system 6, to be cooledIt takes out after to room temperature, and is tested using spectrophotometer, its spectrum line is calculated using UVWINLAB software, according toIt is tested in space flight ministerial standard " QJ1697-89 " about film surface quality, adhesive force and Environmental test requirements document, according toThe multi-color filter that this method is prepared can satisfy while in 150 ± 5~510 ± 6nm, 510 ± 6~580 ± 6nm, 630Transmitance >=90% in this five spectral coverage channels ± 7~690 ± 7nm, 770 ± 8~895 ± 9nm, 450 ± 5~800 ± 9nm,And transmitance≤0.5% within the scope of other, the yield rate of product is substantially increased, the cost of product is reduced, is suitable for skyBetween full spectrum camera etc. in remote sensing system.
Finally, it should be noted that being not intended to restrict the invention the foregoing is merely preferred embodiment of the invention, to the greatest extentPresent invention has been described in detail with reference to the aforementioned embodiments for pipe, for those skilled in the art, still can be withIt modifies the technical solutions described in the foregoing embodiments or equivalent replacement of some of the technical features.It is allWithin the spirit and principles in the present invention, any modification, equivalent substitution, improvement and etc. done should be included in guarantor of the inventionWithin the scope of shield.