Echo wall die micro chamber device and its manufacturing method are coupled based on probe-type hollow-core fiberTechnical field
The present invention relates to one kind based on probe-type hollow-core fiber coupling echo wall die micro chamber device and its manufacturing method, belongs toOptical fibre device and preparation field.
Background technique
Optical microcavity (hereinafter referred to as " microcavity ") is a kind of optical resonator of size in micron dimension, and light energy is limitedIt is shaken in very little region, has that size is small, is easily integrated, many advantages, such as low in energy consumption and quality factor (Q value) is high.It is adjointThe continuous development of novel micro nanometer processing technology, microcavity have become base light physical study and photon technology application important loadBody, Eurytrema coelomatium, quantum photodynamics, Low threshold microlaser, highly sensitive bio-sensing, high-Q filter,There is great and wide application prospect in the fields such as miniature frequency comb, nonlinear optics, therefore microcavity has become photonicsOne of international forward position research theme.
Microcavity mainly includes the structures shapes such as method amber microcavity, Whispering-gallery-mode microcavity, micro annular microcavity, photon crystal micro cavityFormula.Echo wall die microcavity due to having many advantages, such as ultrahigh Q-value, compared with small mode volume, external environment minor alteration can bring about micro-Intracavitary portion's light field acute variation is, it can be achieved that various high sensitivity sensor measurings, such as temperature and refractive index sensing；And work as the Echo WallThe incorporation of mould microcavity or coating active material, spontaneous radiation characteristic is significantly modulated by local vacuum field, it can be achieved that Low thresholdLaser output characteristic.
In the theoretical and experimental study of echo wall die microcavity, how to efficiently couple light into is core key in microcavityProblem, it is through type that main method, which includes prism coupling, inclination angle fiber coupling method, micro-nano fiber pyrometric cone coupled method, at presentIt is not high to will lead to convenience degree in practical application for coupling scheme, and prism coupling and inclination angle fiber coupling method are not suitable for integrating,Furthermore the micro-nano fiber pyrometric cone mechanical performance in micro-nano fiber pyrometric cone coupled method is lower and easy by external environmental interference.Therefore it visitsA kind of integrated level of rope is high, stability is high, favorable repeatability microcavity coupled structure is always the important key of microcavity research fieldProblem.
Summary of the invention
The disadvantages of in order to overcome prior art convenience degree not high or be unsuitable integrated, the invention proposes one kind to be based onProbe-type hollow-core fiber couples echo wall die micro chamber device and its manufacturing method.The high q-factor having with echo wall die microcavityCharacteristic, hollow-core fiber coupling is possessed to couple the simple and high characteristic of mechanical robustness, the probe-type knot that integral device is realizedMonitoring possessed by structure facilitates characteristic with application.
In order to achieve the above objectives, the technical solution adopted by the present invention to solve the technical problems is:
One kind based on probe-type hollow-core fiber couple echo wall die micro chamber device, including standard single-mode fiber, micro-nano fiber pyrometric cone,Hollow-core fiber, microspheric Whispering-gallery-mode microcavity；The micro-nano fiber pyrometric cone is by standard single-mode fiber and hollow lightMade of fine welding and fused biconical taper, it is connected between standard single-mode fiber and hollow-core fiber；The microspheric echo wall dieThe chamber that declines is placed in hollow-core fiber；The micro-nano fiber pyrometric cone improves the stiffness of coupling of standard single-mode fiber and hollow-core fiber,The coupled modes of the hollow-core fiber and microspheric Whispering-gallery-mode microcavity improve the integration of Whispering-gallery-mode coupled apparatus,Stability, repeatability.
A kind of manufacturing method based on probe-type hollow-core fiber coupling echo wall die micro chamber device, for making above-mentioned baseEcho wall die micro chamber device is coupled in probe-type hollow-core fiber, operating procedure is as follows:
1) prepared by hollow-core fiber: being matched using the preparation of Modified Chemical Vapor Deposition technique with standard single-mode fiber refractive index and sizePrefabricated rods, by wire-drawer-tower draw hollow-core fiber, hollow-core fiber outer diameter be 125 μm, internal diameter declines with microspheric echo wall dieThe diameter of the Microsphere Cavities of chamber is suitable；
2) micro-nano fiber pyrometric cone is prepared using optical fiber splicer, the hollow-core fiber of standard single-mode fiber and step 1) preparation is carried outWelding then proceedes to carry out melting drawing cone to weld using optical fiber splicer, obtains micro-nano fiber pyrometric cone；
3) (such as erbium ytterbium is total for the passive microballoon or active microballoon that micro-nano fiber pyrometric cone passes through Electrostatic Absorption suitable dimension under the microscopeMix microballoon), microballoon is placed in by hollow-core fiber inner wall by precision three-dimensional adjustment frame, forms microspheric Whispering-gallery-mode microcavity.
The present invention is based on probe-type hollow-core fiber couple echo wall die micro chamber device, using single mode optical fiber, hollow-core fiber andMicroballoon is basic unit, basic herein by heat sealing machine by the conical region of hollow-core fiber and single mode optical fiber welding formation ruleIt is upper to carry out secondary micro Process, conical region is carried out to draw cone so that micro-nano fiber pyrometric cone-hollow-core fiber coupling performance reachesTo best.The reflective devices, which are integrated with, outputs and inputs coupling unit, is embedded in Fibre Optical Sensor and laser for very convenientIn system.The novel coupling structure that the present invention takes has functionization must for the cone coupling of through type micro-nano fiberThe advantages that coupling of palpus is simple, mechanical robustness is strong；Simultaneously compared with capillary coupling scheme, which has stabilityHigh, the advantages that Q value is high, frequency spectrum is succinct.
The hollow-core fiber coupling echo wall die micro chamber device structure that the present invention uses realizes probe-type integrated optical fiber device, isA kind of embedded coupled structure, belongs to new coupled structure in mechanism, and the coupled modes of mode are melted by traditional micro-nano fiberBore the coupling that the variation of evanescent field coupled modes is annular light field and echo wall die.With the single mode-hollow-core fiber knot for not drawing cone commonlyStructure is compared, and micro-nano fiber pyrometric cone-hollow-core fiber coupler is since thin diameter causes cone angle to reduce, and light field is in micro-nano fiber pyrometric coneThe energy coupling that larger proportion is realized with hollow-core fiber transition zone portion, improves coupling efficiency.
The present invention has the advantage that compared with the prior art
(1) use Whispering-gallery-mode microcavity, echo wall die microcavity due to having many advantages, such as ultrahigh Q-value, compared with small mode volume, outsideBoundary's environment minor alteration can bring about light field acute variation inside microcavity, it can be achieved that various high sensitivity sensor measurings；
(2) micro-nano fiber pyrometric cone-hollow-core fiber coupler is used, is machined using fused fiber splice, simple process, light field is micro-Nano fiber pyrometric cone and hollow-core fiber transition zone portion realize the energy coupling of larger proportion, improve coupling efficiency；
(3) using the reflective structure of the hollow-core fiber coupling Echo Wall, integrated level is higher, stability is higher, favorable repeatability.
Detailed description of the invention
Fig. 1 is the structural block diagram based on probe-type hollow-core fiber coupling echo wall die micro chamber device.
Fig. 2 is production micro-nano fiber pyrometric cone-hollow-core fiber coupler schematic diagram.
Fig. 3 is the schematic diagram for making hollow-core fiber coupling echo wall die microcavity.
Fig. 4 is hollow-core fiber analogous diagram (a) and pictorial diagram (b), (c).
Fig. 5 is prepared by hollow-core fiber and single-mode optical-fibre coupler, before (a) does not draw cone, (b) draws 200 μm of cone.
The reflectance spectrum of device when Fig. 6 is using different refractivity microballoon, wherein microballoon refractive index is (a) 1.48, (b) 1.93(illustration is respective devices).
Specific embodiment
With reference to the accompanying drawing, specific embodiments of the present invention are described further.
As shown in Figure 1, a kind of couple echo wall die micro chamber device, including standard single-mode fiber based on probe-type hollow-core fiber1, micro-nano fiber pyrometric cone 2, hollow-core fiber 3, microspheric Whispering-gallery-mode microcavity 4；The micro-nano fiber pyrometric cone 2 is by markMade of quasi-monomode fiber 1 and 3 welding of hollow-core fiber and fused biconical taper, be connected to standard single-mode fiber 1 and hollow-core fiber 3 itBetween；The microspheric Whispering-gallery-mode microcavity 4 is placed in hollow-core fiber 3；The micro-nano fiber pyrometric cone 2 improves standard single mode lightThe stiffness of coupling of fibre 1 and hollow-core fiber 3, the coupled modes of the hollow-core fiber 3 and microspheric Whispering-gallery-mode microcavity 4 improveThe integration of Whispering-gallery-mode coupled apparatus, stability, repeatability.
As shown in Figures 2 and 3, a kind of manufacturing method based on probe-type hollow-core fiber coupling echo wall die micro chamber device,Operating procedure is as follows:
1) hollow-core fiber 3 prepare: using Modified Chemical Vapor Deposition technique (MCVD) preparation with 1 refractive index of standard single-mode fiber andThe matched prefabricated rods of size draw hollow-core fiber 3 by wire-drawer-tower, and in the present embodiment, 3 outer diameter of hollow-core fiber is 125 μm, internal diameterIt is suitable with the diameter of Microsphere Cavities of microspheric Whispering-gallery-mode microcavity 4.As shown in figure 4, being passed in 3 ring core of theoretical calculation hollow-core fiberShown in defeated basic mode such as Fig. 4 (a), parameter used is emulated are as follows: 75 μm of internal diameter, 85 μm of ring core diameter, 125 μm of outer diameter, ring core foldingPenetrating rate is 1.4681, cladding index 1.4628.The top view and side view such as Fig. 4 (b) and 4 of the hollow-core fiber 3 drawn out(c) shown in.
2) micro-nano fiber pyrometric cone 2 is prepared using optical fiber splicer, using self-editing program by standard single-mode fiber 1 and step1) hollow-core fiber 3 prepared carries out welding and forms the structure of Fig. 5 (a), then proceed to using optical fiber splicer to weld intoCone is drawn in row melting, obtains micro-nano fiber pyrometric cone 2, forms Fig. 5 (b) structure.
3) the passive microballoon or active microballoon that micro-nano fiber pyrometric cone 2 passes through Electrostatic Absorption suitable dimension under the microscope are (such asErbium and ytterbium codoping), microballoon is placed in by 3 inner wall of hollow-core fiber by precision three-dimensional adjustment frame, forms microspheric Whispering-gallery-mode microcavity4。
As shown in fig. 6, coupling echo based on probe-type hollow-core fiber using the different microballoon production of two kinds of refractive indexThe device of wall mould microcavity, refractive index are respectively 1.48 borosilicate microballoon and 1.93 glass of high refractive index microballoon.From two kindsReflectance spectrum can be seen that echo wall die and obtain effective excitation under index microbeads, therefore device of the present invention is a kind of integratedDegree is high, stability is high, favorable repeatability novel microcavity coupled structure.