技术领域technical field
本发明属于光学检测技术领域，特别是一种基于多波长迭代算法的透射性元件缺陷检测装置及方法。The invention belongs to the technical field of optical detection, in particular to a defect detection device and method for a transmissive element based on a multi-wavelength iterative algorithm.
背景技术Background technique
随着集成电路技术日新月异地迅速发展，美国、欧洲、日本、韩国与中国台湾地区等对集成电路板刻线最小宽度精度有着越来越高的要求。在集成电路板的制造生产中，即使nm量级的灰尘污染、杂质颗粒、鼓包、凹坑出现在基底表面或埋藏在多层膜内部或掩模表面，都会造成光刻样品出现严重的缺陷，产生废品。集成电路板的缺陷控制，已经是下一代光刻技术发展的瓶颈之一，需要有效快捷的探测方法。因此，目前在光刻等行业商业化道路上，具备高速高分辨率的缺陷的检测和成像系统来保证无缺陷的掩模版是必不可少的，所以对于缺陷检测技术的研究也日益重要。With the rapid development of integrated circuit technology, the United States, Europe, Japan, South Korea and China Taiwan have higher and higher requirements for the minimum width accuracy of integrated circuit board engraving lines. In the manufacture of integrated circuit boards, even if dust pollution, impurity particles, bulges, and pits in the nanometer range appear on the surface of the substrate or are buried inside the multilayer film or on the surface of the mask, it will cause serious defects in the photolithography sample. Produce waste. The defect control of integrated circuit boards is already one of the bottlenecks in the development of next-generation lithography technology, and effective and fast detection methods are needed. Therefore, currently on the road to commercialization of lithography and other industries, it is essential to have a high-speed and high-resolution defect detection and imaging system to ensure a defect-free reticle, so the research on defect detection technology is becoming increasingly important.
非干涉法的相位恢复理论是指利用光的衍射理论，对输入面光场进行衍射计算，得到输出面光场分布，将其强度数据与实测输出面光场强度数据进行比较，以能量转换效率最大、误差最小为准则，通过算法计算找到最符合输入光场的相位分布。相比于传统干涉检测法，非干涉检测法具有以下优势：(1)完全基于光强信息测量；(2)只需测量单一光路无需检测多路空间光路的叠加；(3)非干涉法所得的光场信息比干涉条纹平滑，因此可以降低仪器分辨率要求而不丢失相关信息，属于简洁、稳定、可行、有效的方法。迭代法是目前应用最广泛的非干涉相位恢复方法，其本质是在空域和频域之间不断转换，并利用测得数据(多为光强信息)对空域、频域进行限制，控制算法误差不断减小至相位信息逐渐接近正确值。The phase recovery theory of the non-interference method refers to using the diffraction theory of light to calculate the diffraction of the input surface light field to obtain the output surface light field distribution, and compare its intensity data with the measured output surface light field intensity data to determine the energy conversion efficiency. The maximum and the minimum error are the criteria, and the phase distribution that best matches the input light field is found through algorithm calculation. Compared with the traditional interferometric detection method, the non-interferometric detection method has the following advantages: (1) It is completely based on the measurement of light intensity information; (2) It only needs to measure a single optical path without detecting the superposition of multiple spatial optical paths; (3) The non-interferometric method obtains The light field information of the method is smoother than the interference fringes, so the resolution requirement of the instrument can be reduced without losing relevant information, which is a simple, stable, feasible and effective method. The iterative method is currently the most widely used non-interference phase recovery method. Its essence is to continuously switch between the space domain and the frequency domain, and use the measured data (mostly light intensity information) to limit the space domain and frequency domain to control the algorithm error. Decrease until the phase information is gradually approaching the correct value.
本发明提出种一种基于多波长迭代算法的透射性元件缺陷检测装置及方法，采用非接触式测量的方式在保证测量精度的条件下，避免了对待测球面镜表面的损伤。装置于固定位置采集衍射图，避免测量过程中移动光路。在传统多波长迭代算法基础上，引入角谱衍射传输理论和梯度加速函数，提出能对复杂光场进行快速高精度的相位恢复，实现精确检测。The invention proposes a transmissive element defect detection device and method based on a multi-wavelength iterative algorithm, which avoids damage to the surface of the spherical mirror to be measured by adopting a non-contact measurement method under the condition of ensuring measurement accuracy. The device collects the diffraction pattern at a fixed position to avoid moving the optical path during the measurement. Based on the traditional multi-wavelength iterative algorithm, the angle-spectrum diffraction transmission theory and gradient acceleration function are introduced, and a fast and high-precision phase recovery for complex light fields is proposed to achieve accurate detection.
发明内容Contents of the invention
本发明的目的在于提供一种基于多波长迭代算法的透射性元件缺陷检测装置及方法，采用多波长梯度加速相位恢复迭代算法相位恢复算法对采集的光强图进行入射光输入面波前相位面信息进行恢复；得到入射光输入面波前相位面信息进而推算得到缺陷的宽度、高度信息。本发明中算法恢复速度快，检测精度高，固定位置采集衍射图，避免了移动光路，适用于透射性元件的缺陷检测。The object of the present invention is to provide a transmissive element defect detection device and method based on a multi-wavelength iterative algorithm, which uses a multi-wavelength gradient acceleration phase recovery iterative algorithm phase recovery algorithm to perform incident light input surface wavefront phase surface on the collected light intensity map The information is restored; the wavefront phase surface information of the incident light input surface is obtained, and then the width and height information of the defect is calculated. In the invention, the recovery speed of the algorithm is fast, the detection precision is high, the diffraction pattern is collected at a fixed position, the moving optical path is avoided, and the method is suitable for the defect detection of the transmissive element.
实现本发明目的的技术方案为：The technical scheme that realizes the object of the present invention is:
一种基于多波长迭代算法的透射性元件缺陷检测装置，包括：可调谐固体激光器、激光准直扩束镜、光阑、待测透射元件、探测器；所有光学元件相对于基底同轴等高，即相对于光学平台或仪器底座同轴等高；可调谐固体激光器发出的固定波长光束，经激光准直扩束镜扩展为宽光束的准直平行光，经光阑限制后，投射到待测透射元件的表面上，经透射元件表面缺陷衍射后传输一段距离照射到探测器上，采集到衍射传输的光强图像。A transmissive element defect detection device based on a multi-wavelength iterative algorithm, including: a tunable solid-state laser, a laser collimator beam expander, an aperture, a transmissive element to be tested, and a detector; all optical elements are coaxial with respect to the base , that is, the coaxial height relative to the optical table or the base of the instrument; the fixed-wavelength beam emitted by the tunable solid-state laser is expanded into a wide-beam collimated parallel light by the laser collimator and beam expander. After being limited by the diaphragm, it is projected onto the On the surface of the transmission element, after being diffracted by the surface defects of the transmission element, it is transmitted for a certain distance and irradiated onto the detector, and the light intensity image transmitted by diffraction is collected.
所述的基于多波长迭代算法的透射性元件缺陷检测装置，其中可调谐固体激光器可调谐形成不同波长入射光，采集不同波长在同一位置所探测的光场强度图像。In the transmissive component defect detection device based on a multi-wavelength iterative algorithm, the tunable solid-state laser can be tuned to form incident light of different wavelengths, and collect light field intensity images detected at the same position with different wavelengths.
一种多波长梯度加速迭代相位恢复算法，在传统多波长迭代算法基础上，引入角谱衍射传输理论和梯度加速函数，能对复杂光场进行快速高精度的相位恢复，其实现步骤如下：A multi-wavelength gradient acceleration iterative phase recovery algorithm, based on the traditional multi-wavelength iterative algorithm, introduces the angle spectrum diffraction transmission theory and gradient acceleration function, which can perform fast and high-precision phase recovery for complex light fields. The implementation steps are as follows:
步骤(1)、已知n个波长在相同位置输出面光场振幅信息A1，A2……An；Step (1), it is known that n wavelengths output surface light field amplitude information A1 , A2 ... An at the same position;
步骤(2)、取λ1条件下输出光场振幅已知量A1，并随机给定初始相位φ1，得到输出光场U1；Step (2), take the known output light field amplitude A1 under the condition of λ1 , and randomly set the initial phase φ1 to obtain the output light field U1 ;
步骤(3)、将λ1条件下输出光场U1利用角谱传输逆运算传输回输入面，得到λ1条件下输入光场Uo1；Step (3), the output light field U1 under the condition of λ1 is transmitted back to the input surface by using the inverse operation of angular spectrum transmission, and the input light field Uo1 under the condition of λ1 is obtained;
步骤(4)、在输入面更新相位φo2，得到λ2条件下的输入光场Uo2；Step (4), update the phase φo2 on the input surface to obtain the input light field Uo2 under the condition of λ2 ;
步骤(5)、利用角谱传输运算传输到输出面，得到λ2条件下输出光场U2，并替换其振幅量为已知量A2，保留相位量不变；Step (5), using the angular spectrum transmission calculation to transmit to the output surface to obtain the output light field U2 under the condition of λ2 , and replace its amplitude with the known quantity A2 , keeping the phase quantity unchanged;
步骤(6)、依次传输至λn条件下输出光场Un；Step (6), sequentially transmitting to the output light field Un under the condition of λ n;
步骤(7)、将λn条件下输出光场Un利用角谱传输逆运算传输回输入面，得到λn条件下输入光场Uon；在输入面更新相位φo(n-1)，得到λn_1条件下的输入光场Uo(n-1)；Step (7), the output light field Un under the condition of λn is transmitted back to the input surface by the inverse operation of angular spectrum transmission, and the input light field Uon under the condition of λn is obtained; the phase φo(n-1) is updated on the input surface, Get the input light field Uo(n-1) under the condition of λn_1 ;
步骤(8)、利用角谱传输运算传输到输出面，得到λn_1条件下输出光场Un-1，并替换其振幅量为已知量An-1，保留相位量不变；Step (8), using the angular spectrum transmission operation to transmit to the output surface, obtain the output light field Un-1 under the condition of λn_1 , and replace its amplitude with the known quantity An-1 , and keep the phase quantity unchanged;
步骤(9)、依次传输回λ1，得到一次循环结束后的输出光场U'1，得到其相位替换振幅为已知量A1；Step (9), sequentially transmit back to λ1 , obtain the output light field U'1 after one cycle, and obtain its phase The replacement amplitude is a known quantity A1 ;
步骤(10)、将当次的相位迭代值与上次迭代值之差hk作为梯度方向，将αk作为迭代附加值，得到更新后λ1条件下输出光场相位加大算法梯度步长，从而加快收敛速度；Step (10), the current phase iteration value with the last iteration value The difference hk is used as the gradient direction, and αk is used as the iterative additional value to obtain the output light field phase under the condition of λ1 after updating Increase the gradient step size of the algorithm to speed up the convergence speed;
步骤(11)、重复步骤(2)-步骤(10)，直到振幅的误差达到设计精度或者达到设置的最大迭代次数时结束迭代，将最后得到的输出光场Uk+11传输回输入面迭代结束；得到输入面其相位值，并使用由matlab软件编写的PhaseUnwrapQMG相位解包函数对其进行计算，最后得到输入面的相位分布信息。Step (11), repeat step (2)-step (10), until the amplitude error reaches the design accuracy or reaches the set maximum number of iterations, the iteration ends, and the final output light field Uk+11 is transmitted back to the input surface The iteration is over; the phase value of the input surface is obtained, and the PhaseUnwrapQMG phase unwrapping function written by matlab software is used to calculate it, and finally the phase distribution information of the input surface is obtained.
基于多波长迭代算法的透射性元件缺陷检测方法，利用所述的基于多波长迭代算法的透射性元件缺陷检测装置，透射性元件缺陷检测步骤为：The method for detecting a defect in a transmissive element based on a multi-wavelength iterative algorithm, using the device for detecting a defect in a transmissive element based on a multi-wavelength iterative algorithm, the steps for detecting a defect in a transmissive element are as follows:
步骤(A1)、可调谐固体激光器分别产生波长为λ1，λ2……λ7七种入射光，经过测试光路得到经过待测物体的7幅衍射光强图。In step (A1), the tunable solid-state laser generates seven kinds of incident light with wavelengths λ1 , λ2 ... λ7 respectively, and obtains 7 diffraction light intensity patterns passing through the object to be measured through the test optical path.
步骤(A2)、将7幅衍射光强图由RGB图像转换为灰度图像，统一进行归一化处理至0到1，得到7种波长在相同位置输出面光场振幅信息A1，A2……A7。Step (A2), convert the 7 diffraction light intensity images from RGB images to grayscale images, and uniformly perform normalization processing to 0 to 1, and obtain the output surface light field amplitude information A1 and A2 of the 7 wavelengths at the same position ...A7 .
步骤(A3)、将输出面光场振幅信息A1，A2……A7带入多波长梯度加速迭代相位恢复算法，得到待测物体的相位分布信息△φm(x)。Step (A3 ), bringing the output surface light field amplitude informationA1 , A2 .
步骤(A4)、根据公式：Step (A4), according to the formula:
△φm(x)＝2π△h(x)/λm(nobj-nair)△φm (x)＝2π△h(x)/λm (nobj -nair )
计算可得待测物体尺寸信息△h(x)。式中nobj为样品折射率，nair为空气折射率。The size information △h(x) of the object to be measured can be obtained by calculation. where nobj is the refractive index of the sample, and nair is the refractive index of air.
本发明与现有技术相比，其显著优点：Compared with the prior art, the present invention has significant advantages:
(1)采用非接触式测量的方式在保证测量精度的条件下，避免了对待测球面镜表面的损伤。(1) The non-contact measurement method avoids damage to the surface of the spherical mirror to be measured under the condition of ensuring the measurement accuracy.
(2)采用非干涉检测方法无需多数光叠加，对测试光路相干性要求低，检测便捷。(2) The non-interference detection method does not require the superposition of multiple lights, and has low requirements for the coherence of the test light path, and the detection is convenient.
(3)装置于固定位置采集衍射图，避免测量过程中移动光路。(3) The device collects the diffraction pattern at a fixed position to avoid moving the optical path during the measurement.
(4)在传统多波长迭代算法基础上，引入角谱衍射传输理论和梯度加速函数，提出多波长梯度加速迭代相位恢复算法，与传统多波长迭代恢复算法进行对比，收敛速度上提高了2倍以上，复原精度的相对均方根值均达到10-3数量级。(4) On the basis of the traditional multi-wavelength iterative algorithm, the angular spectrum diffraction transmission theory and gradient acceleration function are introduced, and a multi-wavelength gradient accelerated iterative phase recovery algorithm is proposed. Compared with the traditional multi-wavelength iterative recovery algorithm, the convergence speed is increased by 2 times Above, the relative root mean square values of the restoration accuracy all reach the order of10-3 .
附图说明Description of drawings
图1是基于多波长迭代算法的透射性元件缺陷检测装置图；Figure 1 is a diagram of a defect detection device for a transmissive element based on a multi-wavelength iterative algorithm;
图2是多波长梯度加速相位恢复迭代算法算法流程图；Fig. 2 is the algorithm flowchart of multi-wavelength gradient accelerated phase recovery iterative algorithm;
图3是本发明实施例中字母e装片衍射光强图；Fig. 3 is a figure of diffraction light intensity of letter e mounted sheet in the embodiment of the present invention;
图4是本发明实施例中字母e装片相位面恢复结果；Fig. 4 is the recovery result of the phase plane of the letter e mounted film in the embodiment of the present invention;
图5是本发明实施例中修正后的字母e装片相位恢复结果。Fig. 5 is the recovery result of the letter e film loading phase after correction in the embodiment of the present invention.
图中：1为可调谐固体激光器，2为激光准直扩束镜，3为光阑，4为待测透射元件，5为探测器。In the figure: 1 is a tunable solid-state laser, 2 is a laser collimator beam expander, 3 is a diaphragm, 4 is a transmission element to be tested, and 5 is a detector.
具体实施方式Detailed ways
下面结合附图以及具体实施方式对本发明作进一步详细描述。The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.
如图1所示，一种基于多波长迭代算法的透射性元件缺陷检测装置，包括：可调谐固体激光器1、激光准直扩束镜2、光阑3、待测透射元件4、探测器5；所有光学元件相对于基底同轴等高，即相对于光学平台或仪器底座同轴等高；可调谐固体激光器1发出的固定波长光束，经激光准直扩束镜2扩展为宽光束的准直平行光，经光阑3限制后，投射到待测透射元件4的表面上，经透射元件表面缺陷衍射后传输一段距离照射到探测器5上，采集到衍射传输的光强图像。As shown in Figure 1, a device for detecting defects in a transmissive element based on a multi-wavelength iterative algorithm includes: a tunable solid-state laser 1, a laser collimator beam expander 2, an aperture 3, a transmissive element to be tested 4, and a detector 5 ; all optical elements are coaxially high relative to the base, that is, coaxially high relative to the optical table or the instrument base; the fixed-wavelength beam emitted by the tunable solid-state laser 1 is expanded into a quasi-wide beam by the laser collimator beam expander 2 The straight parallel light is projected onto the surface of the transmission element 4 to be tested after being restricted by the aperture 3, and is transmitted for a certain distance after being diffracted by the surface defect of the transmission element to irradiate on the detector 5, and the light intensity image transmitted by diffraction is collected.
所述的基于多波长迭代算法的透射性元件缺陷检测装置，其中可调谐固体激光器1可调谐形成不同波长入射光，采集不同波长在同一位置所探测的光场强度图像。In the transmissive component defect detection device based on a multi-wavelength iterative algorithm, the tunable solid-state laser 1 can be tuned to form incident light of different wavelengths, and collect light field intensity images detected at the same position with different wavelengths.
一种多波长梯度加速迭代相位恢复算法，在传统多波长迭代算法基础上，引入角谱衍射传输理论和梯度加速函数，能对复杂光场进行快速高精度的相位恢复，其算法流程图如图2所示，具体步骤如下：A multi-wavelength gradient acceleration iterative phase recovery algorithm, based on the traditional multi-wavelength iterative algorithm, introduces the angle spectrum diffraction transmission theory and gradient acceleration function, which can perform fast and high-precision phase recovery for complex light fields. The algorithm flow chart is shown in the figure 2, the specific steps are as follows:
步骤(1)、已知n个波长在相同位置输出面光场振幅信息A1，A2……An；Step (1), it is known that n wavelengths output surface light field amplitude information A1 , A2 ... An at the same position;
步骤(2)、取λ1条件下输出光场振幅已知量A1，并随机给定初始相位φ1，得到输出光场U1；Step (2), take the known output light field amplitude A1 under the condition of λ1 , and randomly set the initial phase φ1 to obtain the output light field U1 ;
步骤(3)、将λ1条件下输出光场U1利用角谱传输逆运算传输回输入面，得到λ1条件下输入光场Uo1；Step (3), the output light field U1 under the condition of λ1 is transmitted back to the input surface by using the inverse operation of angular spectrum transmission, and the input light field Uo1 under the condition of λ1 is obtained;
步骤(4)、在输入面更新相位φo2，得到λ2条件下的输入光场Uo2；Step (4), update the phase φo2 on the input surface to obtain the input light field Uo2 under the condition of λ2 ;
步骤(5)、利用角谱传输运算传输到输出面，得到λ2条件下输出光场U2，并替换其振幅量为已知量A2，保留相位量不变；Step (5), using the angular spectrum transmission calculation to transmit to the output surface to obtain the output light field U2 under the condition of λ2 , and replace its amplitude with the known quantity A2 , keeping the phase quantity unchanged;
步骤(6)、依次传输至λn条件下输出光场Un；Step (6), sequentially transmitting to the output light field Un under the condition of λ n;
步骤(7)、将λn条件下输出光场Un利用角谱传输逆运算传输回输入面，得到λn条件下输入光场Uon；在输入面更新相位φo(n-1)，得到λn-1条件下的输入光场Uo(n-1)；Step (7), the output light field Un under the condition of λn is transmitted back to the input surface by the inverse operation of angular spectrum transmission, and the input light field Uon under the condition of λn is obtained; the phase φo(n-1) is updated on the input surface, Get the input light field Uo(n-1) under the condition of λn-1 ;
步骤(8)、利用角谱传输运算传输到输出面，得到λn-1条件下输出光场Un-1，并替换其振幅量为已知量An-1，保留相位量不变；Step (8), using the angular spectrum transmission operation to transmit to the output surface, obtain the output light field Un- 1 under the condition of λn- 1, and replace its amplitude with the known quantity An-1 , and keep the phase quantity unchanged;
步骤(9)、依次传输回λ1，得到一次循环结束后的输出光场U'1，得到其相位替换振幅为已知量A1；Step (9), sequentially transmit back to λ1 , obtain the output light field U'1 after one cycle, and obtain its phase The replacement amplitude is a known quantity A1 ;
步骤(10)、将当次的相位迭代值与上次迭代值之差hk作为梯度方向，将αk作为迭代附加值，得到更新后λ1条件下输出光场相位加大算法梯度步长，从而加快收敛速度；Step (10), the current phase iteration value with the last iteration value The difference hk is used as the gradient direction, and αk is used as the iterative additional value to obtain the output light field phase under the condition of λ1 after updating Increase the gradient step size of the algorithm to speed up the convergence speed;
步骤(11)、重复步骤(2)-步骤(10)，直到振幅的误差达到设计精度或者达到设置的最大迭代次数时结束迭代，将最后得到的输出光场Uk+11传输回输入面迭代结束；得到输入面其相位值，并使用由matlab软件编写的PhaseUnwrapQMG相位解包函数对其进行计算，最后得到输入面的相位分布信息。Step (11), repeat step (2)-step (10), until the amplitude error reaches the design accuracy or reaches the set maximum number of iterations, the iteration ends, and the final output light field Uk+11 is transmitted back to the input surface The iteration is over; the phase value of the input surface is obtained, and the PhaseUnwrapQMG phase unwrapping function written by matlab software is used to calculate it, and finally the phase distribution information of the input surface is obtained.
基于多波长迭代算法的透射性元件缺陷检测方法，透射性元件缺陷检测步骤为：The defect detection method of the transmissive element based on the multi-wavelength iterative algorithm, the defect detection steps of the transmissive element are:
步骤(A1)可调谐固体激光器分别产生波长为λ1，λ2……λ7七种入射光，经过测试光路得到经过待测物体的7幅衍射光强图。Step (A1) The tunable solid-state laser generates seven kinds of incident light with wavelengths of λ1 , λ2 ... λ7 respectively, and obtains 7 diffraction light intensity patterns passing through the object to be measured through the test optical path.
步骤(A2)将7幅衍射光强图由RGB图像转换为灰度图像，统一进行归一化处理至0到1，得到7种波长在相同位置输出面光场振幅信息A1，A2……A7。Step (A2) Convert the 7 diffraction light intensity images from RGB images to grayscale images, and uniformly normalize them to 0 to 1 to obtain the output surface light field amplitude information A1 , A2 ... of the 7 wavelengths at the same position ... A7 .
步骤(A3)将输出面光场振幅信息A1，A2……A7带入多波长梯度加速迭代相位恢复算法，得到待测物体的相位分布信息△φm(x)。Step (A3) Bring the output surface light field amplitude information A1 , A2 ... A7 into the multi-wavelength gradient accelerated iterative phase recovery algorithm to obtain the phase distribution information Δφm (x) of the object to be measured.
步骤(A4)根据公式：Step (A4) according to the formula:
△φm(x)＝2π△h(x)/λm(nobj-nair)△φm (x)＝2π△h(x)/λm (nobj -nair )
计算可得待测物体尺寸信息△h(x)。式中nobj为样品折射率，nair为空气折射率。The size information △h(x) of the object to be measured can be obtained by calculation. where nobj is the refractive index of the sample, and nair is the refractive index of air.
实施例Example
本实施例中对一透射元件——字母e装片，该装片在玻璃板上镀有一定厚度，不透射的字母e区域。可调谐固体激光器发出的固定波长光束，经激光准直扩束镜扩展为宽光束的准直平行光，经光阑限制后，投射到待测字母e装片的表面上，经透射元件表面缺陷衍射后传输15mm照射到探测器上。In this embodiment, a transmissive element, the letter e, is mounted on a film, and the film is plated with a certain thickness on a glass plate, and an area of the letter e that does not transmit. The fixed-wavelength beam emitted by the tunable solid-state laser is expanded into collimated parallel light with a wide beam by the laser collimator beam expander. After diffraction, the 15mm radiation is transmitted to the detector.
所述的基于多波长迭代算法的透射性元件缺陷检测装置的测量方法，透射性元件缺陷检测步骤为：In the measurement method of the transmissive component defect detection device based on the multi-wavelength iterative algorithm, the transmissive component defect detection steps are:
(1)可调谐固体激光器分别产生波长为470nm、500nm、530nm、550nm、580nm、600nm、630nm七种入射光，经过测试光路得到经过待测物体的7幅衍射光强图，如图(3)所示。(1) The tunable solid-state laser generates seven kinds of incident light with wavelengths of 470nm, 500nm, 530nm, 550nm, 580nm, 600nm, and 630nm respectively. After testing the optical path, seven diffraction light intensity diagrams passing through the object to be measured are obtained, as shown in Figure (3) shown.
(2)将7幅衍射光强图由RGB图像转换为灰度图像，统一进行归一化处理至0到1，得到7种波长在相同位置输出面光场振幅信息A1，A2……A7。(2) Convert the 7 diffraction light intensity images from RGB images to grayscale images, and uniformly normalize them to 0 to 1, and obtain the amplitude information A1 , A2 of the output surface light field of the 7 wavelengths at the same position.A7 .
(3)将输出面光场振幅信息A1，A2……A7带入多波长梯度加速迭代相位恢复算法，得到待测物体的相位分布信息△φm(x)。针对470nm波长时，采用多波长梯度加速相位恢复迭代算法相位恢复算法对输入面相位形貌恢复结果如图(4)所示。减去波面相位信息所得修正后的分辨率板相位信息如图(5)所示。(3) Bring the output surface light field amplitude information A1 , A2 ... A7 into the multi-wavelength gradient accelerated iterative phase recovery algorithm to obtain the phase distribution information △φm (x) of the object to be measured. For the wavelength of 470nm, the phase recovery algorithm using the multi-wavelength gradient acceleration phase recovery iterative algorithm phase recovery algorithm restores the phase morphology of the input surface as shown in Figure (4). The corrected resolution plate phase information obtained by subtracting the wavefront phase information is shown in Figure (5).
(4)样品折射率nobj＝1.516，根据公式：(4) The refractive index of the sample nobj = 1.516, according to the formula:
△φm(x)＝2π△h(x)/λm(nobj-nair)△φm (x)＝2π△h(x)/λm (nobj -nair )
计算可得字母e的厚度信息为0.325μm。The thickness information of the letter e can be calculated to be 0.325 μm.
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