技术领域technical field
本发明属于微细特种加工领域，涉及到微细盘状电极的微细电火花线切割在线制备与 微阵列结构在线微细电解周铣的加工方法。The invention belongs to the field of micro special processing, and relates to a micro electric discharge wire cutting online preparation of a micro disc electrode and a micro array structure online micro electrolytic peripheral milling processing method.
背景技术Background technique
随着微机械电子系统的发展，微零件加工受到国内外学者的广泛关注。微细电加工技 术(包括微细电火花加工技术和微细电化学加工技术)因其非接触加工、不存在加工应力、 加工材料广泛且特别适合加工硬脆性材料等优点，在微零件的加工中具有独特优势。以微 阵列结构为代表的微零件在半导体工业、亲疏水性、生物医学、仿生嗅觉等方面具有重要 应用，众多国内外学者开展了相关研究。With the development of micro-mechanical electronic systems, micro-part processing has attracted extensive attention from scholars at home and abroad. Micro-electromachining technology (including micro-EDM technology and micro-electrochemical machining technology) has unique advantages in the processing of micro parts due to its advantages of non-contact processing, no processing stress, a wide range of processing materials, and is especially suitable for processing hard and brittle materials. Advantage. Micro parts represented by microarray structures have important applications in the semiconductor industry, hydrophilicity and hydrophobicity, biomedicine, bionic olfaction, etc. Many domestic and foreign scholars have carried out related research.
对现有技术的文献检索发现，国内外己见诸报导的微阵列结构加工方法主要涉及光刻 技术、微细电加工技术、激光加工技术、微磨削加工技术和模具注塑技术等。2013年中国台湾高雄应用科技大学利用光刻技术进行微棱镜阵列的加工，但存在加工工艺复杂且有腐蚀液。2008年韩国国立首尔大学利用束电极进行掩膜板阵列方孔的微细电火花加工， 但加工中束电极存在严重损耗。2010年英国拉夫堡大学开展微槽阵列的激光加工研究， 得到的加工表面粗糙度较大且加工精度难以控制；2015年华南理工大学通过微磨削进行 薄膜电池弱光发电的微透镜阵列的加工，但微机械刀具存在“二次装夹”问题且加工中易磨 损。对于模具注塑法而言，虽然该工艺具有高效、成本低的优点，但微注塑成型加工表面 易出现缺陷。以上加工方法虽然都可以实现微阵列结构的加工，但存在加工精度低、电极 磨损或表面质量差等方面的问题。因此，以上问题亟需解决。The literature search of the prior art found that the microarray structure processing methods that have been reported at home and abroad mainly involve photolithography technology, micro-electromachining technology, laser processing technology, micro-grinding processing technology and mold injection molding technology. In 2013, Kaohsiung University of Applied Science and Technology in Taiwan, China used photolithography technology to process microprism arrays, but the processing technology was complicated and there was corrosive liquid. In 2008, the Seoul National University of South Korea used the beam electrode to process the micro-EDM of the square hole of the mask plate array, but the beam electrode was seriously worn out during processing. In 2010, Loughborough University in the United Kingdom carried out research on laser processing of micro-groove arrays, and the obtained surface roughness was large and the processing accuracy was difficult to control; in 2015, South China University of Technology used micro-grinding to process micro-lens arrays for low-light power generation of thin-film batteries , but the micromechanical tool has the problem of "secondary clamping" and is easy to wear during processing. For mold injection molding, although the process has the advantages of high efficiency and low cost, defects are prone to appear on the surface processed by micro-injection molding. Although the above processing methods can realize the processing of microarray structures, there are problems such as low processing accuracy, electrode wear or poor surface quality. Therefore, the above problems urgently need to be solved.
发明内容Contents of the invention
本发明是为了解决现有微阵列结构加工中存在“二次装夹”、加工表面质量差，同时 微阵列结构加工刀具易损耗等问题，本发明提出了一种基于微细盘状电极在线制备的微阵 列结构微细电解周铣加工方法。The present invention aims to solve the problems of "secondary clamping", poor surface quality and easy loss of microarray structure processing tools in the existing microarray structure processing. A micro-electrolytic peripheral milling method for a micro-array structure.
一种基于微细盘状电极在线制备的微阵列结构微细电解周铣加工方法，该方法包括如 下步骤：A kind of micro-array structure micro-electrolytic peripheral milling processing method based on micro-disk electrode on-line preparation, the method comprises the following steps:
步骤一、对盘状电极毛坯在线进行微细电火花线切割加工，制备出微细盘状电极；Step 1. Carry out fine wire electric discharge cutting processing on the disc-shaped electrode blank online to prepare a fine disc-shaped electrode;
步骤二、将制备完成的微细盘状电极作为工具电极对待加工工件在线进行微细电解周 铣加工，从而在待加工工件的表面上加工出微阵列结构。Step 2, using the prepared micro-disc electrode as a tool electrode to perform micro-electrolytic peripheral milling on-line on the workpiece to be processed, so as to process a microarray structure on the surface of the workpiece to be processed.
优选的是，步骤一中，对盘状电极毛坯在线进行微细电火花线切割加工是在微细加工 机床的微细电极丝工位上实现；Preferably, in step 1, on-line micro electric discharge discharge processing is realized on the micro electrode wire station of micro machining machine tool to disk-shaped electrode blank;
步骤二中，将制备完成的微细盘状电极作为工具电极对待加工工件在线进行微细电解 周铣加工是在微细加工机床的分度旋转装置工位上实现。In the second step, the micro-disc-shaped electrode prepared as a tool electrode is used as the tool electrode to carry out micro-electrolytic peripheral milling on-line on the workpiece to be processed, which is realized on the indexing and rotating device station of the micro-machining machine tool.
优选的是，微细加工机床包括工控机、电火花加工短路检测系统、高频脉冲电源、高 速主轴、机床工作平台、电火花工作液循环系统、电火花工作液槽、微细电极丝、标准棒、伺服控制系统、电解工作液循环系统、电解工作液槽、电解加工短路检测系统、电解电源、 Z轴伺服装置、X/Y轴伺服装置和分度旋转装置；Preferably, the micromachining machine tool includes an industrial computer, an electric discharge machining short circuit detection system, a high-frequency pulse power supply, a high-speed spindle, a machine tool work platform, an EDM working fluid circulation system, an EDM working fluid tank, a fine electrode wire, a standard rod, Servo control system, electrolytic working fluid circulation system, electrolytic working fluid tank, electrolytic machining short circuit detection system, electrolytic power supply, Z-axis servo device, X/Y-axis servo device and indexing and rotating device;
高速主轴、电火花工作液槽和电解工作液槽固定在机床工作平台上；电火花工作液循 环系统用于将电火花工作液送至盘状电极毛坯所在的加工区域，并通过电火花工作液槽回 收利用；工控机通过伺服控制系统控制X/Y轴伺服装置运动，从而使机床工作平台在X 轴或Y轴方向运动；The high-speed spindle, EDM working fluid tank and electrolytic working fluid tank are fixed on the working platform of the machine tool; the EDM working fluid circulation system is used to send the EDM working fluid to the processing area where the disc-shaped electrode blank is located, and the EDM working fluid passes through Groove recycling; the industrial computer controls the movement of the X/Y-axis servo device through the servo control system, so that the machine tool working platform moves in the direction of the X-axis or Y-axis;
工控机还用于控制高速主轴的输出转速，高速主轴输出轴通过夹头与标准棒的一端连 接，标准棒的另一端与盘状电极毛坯或微细盘状电极相装配；The industrial computer is also used to control the output speed of the high-speed spindle. The output shaft of the high-speed spindle is connected to one end of the standard rod through the chuck, and the other end of the standard rod is assembled with the disc electrode blank or the fine disc electrode;
高频脉冲电源的正极通过高速主轴的夹头连接盘状电极毛坯；高频脉冲电源的负极与 微细电极丝连接；微细电极丝作为工具电极对盘状电极毛坯在线进行微细电火花线切割加 工；The positive pole of the high-frequency pulse power supply is connected to the disc-shaped electrode blank through the chuck of the high-speed spindle; the negative pole of the high-frequency pulse power supply is connected to the fine electrode wire; the fine electrode wire is used as a tool electrode to perform fine wire EDM processing on the disc-shaped electrode blank online;
电火花加工短路检测系统，用于检测微细电极丝和盘状电极毛坯之间的接触电压，并 将检测后的信号发送至工控机；EDM short-circuit detection system, which is used to detect the contact voltage between the fine electrode wire and the disc-shaped electrode blank, and send the detected signal to the industrial computer;
待加工工件通过分度旋转装置固定在Z轴伺服装置上，工控机通过伺服控制系统控 制Z轴伺服装置运动，从而使待加工工件在Z轴方向运动；The workpiece to be processed is fixed on the Z-axis servo device through the indexing and rotating device, and the industrial computer controls the movement of the Z-axis servo device through the servo control system, so that the workpiece to be processed moves in the Z-axis direction;
工控机还用于控制分度旋转装置进行分度转动，从而实现复杂微阵列结构的加工；The industrial computer is also used to control the indexing rotation device for indexing rotation, so as to realize the processing of complex microarray structures;
电解加工短路检测系统用于检测微细盘状电极与待加工工件之间的接触电压，并将检 测后的信号发送至工控机；The electrolytic machining short-circuit detection system is used to detect the contact voltage between the micro-disk electrode and the workpiece to be processed, and send the detected signal to the industrial computer;
电解电源的阴极通过高速主轴的夹头连接在线制备的微细盘状电极；电解电源的阳极 与待加工工件连接；微细盘状电极作为工具电极对待加工工件在线进行微细电解周铣加 工；The cathode of the electrolysis power supply is connected to the micro-disc electrode prepared online through the chuck of the high-speed spindle; the anode of the electrolysis power supply is connected to the workpiece to be processed; the micro-disk electrode is used as a tool electrode to perform micro-electrolytic peripheral milling on-line for the workpiece to be processed;
电解工作液循环系统用于将电解工作液送至待加工工件所在的加工区域，并通过电解 液槽回收利用。The electrolytic working fluid circulation system is used to send the electrolytic working fluid to the processing area where the workpiece to be processed is located, and recycle it through the electrolyte tank.
优选的是，步骤一中，对盘状电极毛坯在线进行微细电火花线切割加工，制备出微细 盘状电极的具体过程为：Preferably, in step 1, the disc-shaped electrode blank is carried out on-line with fine wire electric discharge cutting processing, and the specific process of preparing the fine disc-shaped electrode is:
步骤一一、将盘状电极毛坯装配在标准棒带螺孔的一端，并通过螺钉紧固，盘状电极 毛坯与微细电极丝间留有加工间隙，设置盘状电极毛坯与微细电极丝之间的加工电压、充 电电容、充电电阻、进给速度及盘状电极毛坯的加工轨迹；Step 1. Assemble the disc-shaped electrode blank on the end of the standard rod with the screw hole, and fasten it with screws. There is a processing gap between the disc-shaped electrode blank and the fine electrode wire, and set the gap between the disc-shaped electrode blank and the fine electrode wire. The processing voltage, charging capacitance, charging resistance, feed speed and processing track of the disc-shaped electrode blank;
步骤一二、使高频脉冲电源给盘状电极毛坯与微细电极丝提供工作电压，盘状电极毛 坯根据预设的进给速度在机床工作平台5上运动，使微细电极丝作为工具电极对盘状电极 毛坯在线进行微细电火花线切割加工，根据盘状电极毛坯的加工轨迹完成加工，从而将盘 状电极毛坯制备成微细盘状电极；Step 1 and 2: Make the high-frequency pulse power supply provide the working voltage to the disc-shaped electrode blank and the fine electrode wire, and the disc-shaped electrode blank moves on the machine tool work platform 5 according to the preset feed speed, so that the fine electrode wire acts as a tool electrode against the disc The micro-wire EDM processing is carried out on-line, and the processing is completed according to the processing track of the disc-shaped electrode blank, so that the disc-shaped electrode blank is prepared into a fine disc-shaped electrode;
在微细电火花线切割加工的过程中，电火花工作液循环系统将工作液环流过加工间 隙，且当电火花加工短路检测系统检测微细电极丝和盘状电极毛坯间发生短路时，检测到 的短路信号发送至工控机，工控机控制盘状电极毛坯反向进给直至恢复正常加工状态。In the process of micro-wire EDM, the EDM working fluid circulation system circulates the working fluid through the machining gap, and when the EDM short-circuit detection system detects a short circuit between the micro electrode wire and the disc-shaped electrode blank, the detected The short-circuit signal is sent to the industrial computer, and the industrial computer controls the reverse feed of the disc-shaped electrode blank until the normal processing state is restored.
优选的是，盘状电极毛坯与微细电极丝之间的加工电压为120V、充电电容为2400pF、 充电电阻为1300Ω、进给速度为0.026mm/min。Preferably, the processing voltage between the disk-shaped electrode blank and the fine electrode wire is 120V, the charging capacitance is 2400pF, the charging resistance is 1300Ω, and the feed speed is 0.026mm/min.
优选的是，步骤二中，将制备完成的微细盘状电极作为工具电极对待加工工件在线进 行微细电解周铣加工，从而在待加工工件的表面上加工出微阵列结构的具体过程为：Preferably, in step 2, the micro-disc electrode that has been prepared is used as a tool electrode to carry out micro-electrolytic peripheral milling on-line on the workpiece to be processed, so that the specific process of processing the microarray structure on the surface of the workpiece to be processed is:
步骤二一、设置微细盘状电极与待加工工件间的加工间隙、加工电压，待加工工件的 进给速度、待加工工件的加工轨迹及分度旋转装置的分度转角；Step 21, setting the processing gap between the micro-disc electrode and the workpiece to be processed, the processing voltage, the feed speed of the workpiece to be processed, the processing track of the workpiece to be processed and the indexing angle of the indexing rotary device;
步骤二二、电解电源给待加工工件提供工作电压，根据待加工工件的加工轨迹、进给 速度及分度旋转装置的分度转角，使待加工工件在Z轴方向运动，微细盘状电极作为工具电极对待加工工件进行微细电解周铣加工，从而使待加工工件的加工面上形成微阵列结构，最终完成微阵列结构的制备；Step 22: The electrolytic power supply provides working voltage to the workpiece to be processed, and the workpiece to be processed moves in the Z-axis direction according to the processing track, feed speed and indexing angle of the indexing rotary device, and the fine disc electrode acts as The tool electrode performs micro-electrolytic peripheral milling on the workpiece to be processed, so that a microarray structure is formed on the processing surface of the workpiece to be processed, and finally the preparation of the microarray structure is completed;
在微细电解周铣加工过程中，电解工作液循环系统使电解液流过加工间隙，且当电解 加工短路检测系统检测微细盘状电极与待加工工件间发生短路时，检测到的短路信号发送 至工控机，工控机控制待加工工件反向进给直至加工状态恢复正常。During the micro-electrolytic week milling process, the electrolytic working fluid circulation system makes the electrolyte flow through the machining gap, and when the electrolytic machining short-circuit detection system detects a short-circuit between the micro-disk electrode and the workpiece to be processed, the detected short-circuit signal is sent to Industrial computer, the industrial computer controls the reverse feed of the workpiece to be processed until the processing state returns to normal.
优选的是，微细盘状电极与待加工工件之间的加工电压为8V、脉宽为0.5μs、脉间为 2.5μs，Z轴进给速度为1.5μm/s。Preferably, the machining voltage between the micro-disk electrode and the workpiece to be machined is 8V, the pulse width is 0.5μs, the pulse-to-pulse is 2.5μs, and the Z-axis feed speed is 1.5μm/s.
本发明带来的有益效果是，本发明利用微细加工机床的微细电火花线切割加工系统在 线制备出微细盘状电极，然后在线移动到微细加工机床的分度旋转装置工位，该方法解决 了“二次装夹”问题，可保证微细盘状电极与高速主轴的同轴度以及微细盘状电极后续微阵 列结构加工的精度。The beneficial effect brought by the present invention is that the present invention utilizes the micro electric discharge machining system of the micro machining machine tool to prepare the micro disc electrode online, and then moves it to the indexing and rotating device station of the micro machining machine tool online. The "secondary clamping" problem can ensure the coaxiality of the micro-disk electrode and the high-speed spindle and the precision of the subsequent microarray structure processing of the micro-disk electrode.
利用微细盘状电极进行在线微细电解周铣加工，可避免微细盘状电极损耗，保证微阵 列机构加工尺寸一致性，同时微细电解周铣加工后可获得良好表面质量。On-line micro-electrolytic peripheral milling using micro-disk electrodes can avoid the loss of micro-disk electrodes and ensure the consistency of the processing size of the micro-array mechanism. At the same time, good surface quality can be obtained after micro-electrolytic peripheral milling.
通过分度旋转装置分度运动的灵活性，可加工出任意夹角的微阵列结构，提高微细电 解周铣加工能力。另外，相对于微细圆柱电极电解端铣，微细盘状电极电解周铣具有更高 的加工效率。Through the flexibility of the indexing movement of the indexing and rotating device, the microarray structure with any included angle can be processed, and the processing capability of micro-electrolytic peripheral milling can be improved. In addition, compared with the electrolytic end milling of the micro cylindrical electrode, the electrolytic peripheral milling of the micro disc electrode has higher processing efficiency.
附图说明Description of drawings
图1为微细加工机床的结构示意图；Fig. 1 is the structure schematic diagram of micromachining machine tool;
图2为微细盘状电极的在线微细电火花线切割加工示意图；Fig. 2 is the schematic diagram of the online micro electric discharge wire cutting processing of the micro disc electrode;
图3为利用微细盘状电极在线进行微阵列结构微细电解周铣加工示意图。Fig. 3 is a schematic diagram of micro-electrolytic peripheral milling of a micro-array structure using a micro-disk electrode on-line.
具体实施方式Detailed ways
具体实施方式一：本实施方式所述一种基于微细盘状电极在线制备的微阵列结构微 细电解周铣加工方法，该方法包括如下步骤：Specific embodiment one: a kind of microarray structure micro-electrolytic peripheral milling processing method based on micro-disk electrode online preparation described in this embodiment, this method comprises the following steps:
步骤一、对盘状电极毛坯11在线进行微细电火花线切割加工，制备出微细盘状电极 20；Step 1. Perform fine wire electric discharge cutting processing on the disc-shaped electrode blank 11 online to prepare a fine disc-shaped electrode 20;
步骤二、将制备完成的微细盘状电极20作为工具电极对待加工工件19在线进行微细 电解周铣加工，从而在待加工工件19的表面上加工出微阵列结构。Step 2, using the prepared fine disk-shaped electrode 20 as a tool electrode to perform micro-electrolytic peripheral milling on the workpiece 19 to be processed online, so as to process a microarray structure on the surface of the workpiece 19 to be processed.
本实施方式，本发明首先在线制备微细盘状电极20，将制备完成的微细盘状电极20 作为工具电极对待加工工件19在线进行微细电解周铣加工。In this embodiment, the present invention firstly prepares the micro-disk electrode 20 on-line, and uses the prepared micro-disk electrode 20 as a tool electrode to perform micro-electrolytic peripheral milling on-line on the workpiece 19 to be processed.
具体实施方式二：参见图1说明本实施方式，本实施方式与具体实施方式一所述的一种基于微细盘状电极在线制备的微阵列结构微细电解周铣加工方法的区别在于，步骤一中，对盘状电极毛坯11在线进行微细电火花线切割加工是在微细加工机床的微细电极丝 8工位上实现；Specific embodiment 2: Referring to Fig. 1 to illustrate this embodiment, the difference between this embodiment and the micro-array structure micro-electrolytic peripheral milling method based on the micro-disk electrode online preparation described in the specific embodiment 1 is that in step 1 , the online micro-wire-cutting of the disc-shaped electrode blank 11 is realized on the micro-electrode wire 8 station of the micro-machining machine tool;
步骤二中，将制备完成的微细盘状电极20作为工具电极对待加工工件19在线进行微 细电解周铣加工是在微细加工机床的分度旋转装置18工位上实现。In step 2, using the prepared micro-disc electrode 20 as a tool electrode to carry out micro-electrolytic peripheral milling on-line on the workpiece 19 to be processed is realized on the indexing and rotating device 18 station of the micro-machining machine tool.
本实施方式，发明首先在微细加工机床的微细电极丝8工位上在线制备微细盘状电极 20，然后在线移动到微细加工机床的分度旋转装置工位，该方法解决了“二次装夹”问题， 可保证微细盘状电极与高速主轴的同轴度以及微细盘状电极后续微阵列结构加工的精度。In this embodiment, the invention first prepares the micro-disc electrode 20 online on the micro-electrode wire 8 station of the micro-processing machine tool, and then moves online to the indexing and rotating device station of the micro-processing machine tool. This method solves the problem of "secondary clamping" "problem, can ensure the coaxiality of the micro-disk electrode and the high-speed spindle and the precision of the subsequent microarray structure processing of the micro-disk electrode.
利用微细盘状电极进行在线微细电解周铣加工，可避免微细盘状电极损耗，保证微阵 列机构加工尺寸一致性，同时微细电解周铣加工后可获得良好表面质量。On-line micro-electrolytic peripheral milling using micro-disk electrodes can avoid the loss of micro-disk electrodes and ensure the consistency of the processing size of the micro-array mechanism. At the same time, good surface quality can be obtained after micro-electrolytic peripheral milling.
通过分度旋转装置分度运动的灵活性，可加工出任意夹角的微阵列结构，提高微细电 解周铣加工能力。另外，相对于微细圆柱电极电解端铣，微细盘状电极电解周铣具有更高 的加工效率。Through the flexibility of the indexing movement of the indexing and rotating device, the microarray structure with any included angle can be processed, and the processing capability of micro-electrolytic peripheral milling can be improved. In addition, compared with the electrolytic end milling of the micro cylindrical electrode, the electrolytic peripheral milling of the micro disc electrode has higher processing efficiency.
具体实施方式三：参见图1至图3说明本实施方式，本实施方式与具体实施方式二所述的一种基于微细盘状电极在线制备的微阵列结构微细电解周铣加工方法的区别在于，微细加工机床包括工控机1、电火花加工短路检测系统2、高频脉冲电源3、高速主轴4、 机床工作平台(5)、电火花工作液循环系统6、电火花工作液槽7、微细电极丝8、标准棒 9、伺服控制系统10、电解工作液循环系统12、电解工作液槽13、电解加工短路检测系 统14、电解电源15、Z轴伺服装置16、X/Y轴伺服装置17和分度旋转装置18；Specific embodiment three: Refer to Fig. 1 to Fig. 3 to illustrate this embodiment mode, the difference between this embodiment mode and the micro-array structure micro-electrolytic peripheral milling method based on the micro-disk electrode online preparation described in the specific embodiment mode two is that, Micromachining machine tools include industrial computer 1, EDM short-circuit detection system 2, high-frequency pulse power supply 3, high-speed spindle 4, machine tool work platform (5), EDM working fluid circulation system 6, EDM working fluid tank 7, micro electrodes Wire 8, standard rod 9, servo control system 10, electrolytic working fluid circulation system 12, electrolytic working fluid tank 13, electrolytic machining short circuit detection system 14, electrolytic power supply 15, Z-axis servo device 16, X/Y-axis servo device 17 and Indexing rotating device 18;
高速主轴4、电火花工作液槽7和电解工作液槽13固定在机床工作平台(5)上；电火花工作液循环系统6用于将电火花工作液送至盘状电极毛坯11所在的加工区域，并通过 电火花工作液槽7回收利用；工控机1通过伺服控制系统10控制X/Y轴伺服装置17运 动，从而使机床工作平台(5)在X轴或Y轴方向运动；The high-speed spindle 4, the EDM working fluid tank 7 and the electrolytic working fluid tank 13 are fixed on the machine tool work platform (5); the EDM working fluid circulation system 6 is used to send the EDM working fluid to the processing machine where the disc-shaped electrode blank 11 is located. area, and recycle through the electric spark working liquid tank 7; the industrial computer 1 controls the movement of the X/Y axis servo device 17 through the servo control system 10, so that the machine tool working platform (5) moves in the direction of the X axis or the Y axis;
工控机1还用于控制高速主轴4的输出转速，高速主轴4输出轴通过夹头与标准棒9的一端连接，标准棒9的另一端与盘状电极毛坯11或微细盘状电极20相装配；The industrial computer 1 is also used to control the output speed of the high-speed spindle 4. The output shaft of the high-speed spindle 4 is connected to one end of the standard rod 9 through a chuck, and the other end of the standard rod 9 is assembled with the disc electrode blank 11 or the fine disc electrode 20. ;
高频脉冲电源3的正极通过高速主轴4的夹头连接盘状电极毛坯11；高频脉冲电源3 的负极与微细电极丝8连接；微细电极丝8作为工具电极对盘状电极毛坯11在线进行微细电火花线切割加工；The positive pole of the high-frequency pulse power supply 3 is connected to the disc-shaped electrode blank 11 through the chuck of the high-speed spindle 4; the negative pole of the high-frequency pulse power supply 3 is connected to the fine electrode wire 8; Micro EDM wire cutting;
电火花加工短路检测系统2，用于检测微细电极丝8和盘状电极毛坯11之间的接触电压，并将检测后的信号发送至工控机1；EDM short-circuit detection system 2, used to detect the contact voltage between the fine electrode wire 8 and the disc-shaped electrode blank 11, and send the detected signal to the industrial computer 1;
待加工工件19通过分度旋转装置18固定在Z轴伺服装置16上，工控机1通过伺服控制系统10控制Z轴伺服装置16运动，从而使待加工工件19在Z轴方向运动；The workpiece 19 to be processed is fixed on the Z-axis servo device 16 through the indexing and rotating device 18, and the industrial computer 1 controls the movement of the Z-axis servo device 16 through the servo control system 10, so that the workpiece 19 to be processed moves in the Z-axis direction;
工控机1还用于控制分度旋转装置18进行分度转动，从而实现复杂微阵列结构的加 工；The industrial computer 1 is also used to control the indexing rotary device 18 to carry out the indexing rotation, thereby realizing the processing of complex microarray structures;
电解加工短路检测系统14用于检测微细盘状电极20与待加工工件19之间的接触电 压，并将检测后的信号发送至工控机1；The electrolytic machining short-circuit detection system 14 is used to detect the contact voltage between the micro-disc electrode 20 and the workpiece 19 to be processed, and sends the detected signal to the industrial computer 1;
电解电源15的阴极通过高速主轴4的夹头连接在线制备的微细盘状电极20；电解电 源15的阳极与待加工工件19连接；微细盘状电极20作为工具电极对待加工工件19在线进行微细电解周铣加工；The cathode of the electrolysis power supply 15 is connected to the micro-disc electrode 20 prepared online through the chuck of the high-speed spindle 4; the anode of the electrolysis power supply 15 is connected to the workpiece 19 to be processed; the micro-disk electrode 20 is used as a tool electrode to perform micro-electrolysis on-line for the workpiece 19 to be processed Peripheral milling;
电解工作液循环系统12用于将电解工作液送至待加工工件19所在的加工区域，并通 过电解液槽13回收利用。The electrolytic working fluid circulation system 12 is used to send the electrolytic working fluid to the processing area where the workpiece 19 to be processed is located, and recycle it through the electrolytic solution tank 13.
具体实施方式四：参见图1至图3说明本实施方式，本实施方式与具体实施方式三所述的一种基于微细盘状电极在线制备的微阵列结构微细电解周铣加工方法的区别在于，步骤一中，对盘状电极毛坯11在线进行微细电火花线切割加工，制备出微细盘状电极20 的具体过程为：Specific Embodiment 4: Refer to FIG. 1 to FIG. 3 to illustrate this embodiment. The difference between this embodiment and the micro-array structure micro-electrolytic peripheral milling method based on the micro-disk electrode online preparation described in the specific embodiment 3 is that: In the first step, the disc-shaped electrode blank 11 is subjected to micro-wire electric discharge processing on-line, and the specific process of preparing the micro-disk-shaped electrode 20 is as follows:
步骤一一、将盘状电极毛坯11装配在标准棒9带螺孔的一端，并通过螺钉紧固，盘状电极毛坯11与微细电极丝8间留有加工间隙，设置盘状电极毛坯11与微细电极丝8 之间的加工电压、充电电容、充电电阻、进给速度及盘状电极毛坯11的加工轨迹；Step 11. Assemble the disc-shaped electrode blank 11 on the end of the standard rod 9 with a screw hole, and fasten it with screws. There is a processing gap between the disc-shaped electrode blank 11 and the fine electrode wire 8. Set the disc-shaped electrode blank 11 and The processing voltage between the fine electrode wires 8, charging capacitance, charging resistance, feed speed and the processing track of the disc-shaped electrode blank 11;
步骤一二、使高频脉冲电源3给盘状电极毛坯11与微细电极丝8提供工作电压，盘状电极毛坯11根据预设的进给速度在机床工作平台5上运动，使微细电极丝8作为工具 电极对盘状电极毛坯11在线进行微细电火花线切割加工，根据盘状电极毛坯11的加工轨 迹完成加工，从而将盘状电极毛坯11制备成微细盘状电极20；Step one and two, make the high-frequency pulse power supply 3 provide the working voltage to the disc-shaped electrode blank 11 and the fine electrode wire 8, and the disc-shaped electrode blank 11 moves on the machine tool work platform 5 according to the preset feed speed, so that the fine electrode wire 8 As a tool electrode, the disc-shaped electrode blank 11 is subjected to fine wire electric discharge cutting processing online, and the processing is completed according to the processing track of the disc-shaped electrode blank 11, so that the disc-shaped electrode blank 11 is prepared into a fine disc-shaped electrode 20;
在微细电火花线切割加工过程中，电火花工作液循环系统6将工作液环流过加工间 隙，且当电火花加工短路检测系统2检测微细电极丝8和盘状电极毛坯11间发生短路时，检测到的短路信号发送至工控机1，工控机1控制盘状电极毛坯11反向进给直至恢复正 常加工状态。During the micro-wire EDM process, the EDM working fluid circulation system 6 circulates the working fluid through the machining gap, and when the EDM short circuit detection system 2 detects a short circuit between the micro electrode wire 8 and the disc-shaped electrode blank 11, The detected short-circuit signal is sent to the industrial computer 1, and the industrial computer 1 controls the reverse feed of the disc-shaped electrode blank 11 until the normal processing state is restored.
具体实施方式五：参见图1至图3说明本实施方式，本实施方式与具体实施方式四所述的一种基于微细盘状电极在线制备的微阵列结构微细电解周铣加工方法的区别在于，盘状电极毛坯11与微细电极丝8之间的加工电压为120V、充电电容为2400pF、充电电 阻为1300Ω、进给速度为0.026mm/min。Specific Embodiment 5: Refer to Fig. 1 to Fig. 3 to illustrate this embodiment. The difference between this embodiment and the micro-array structure micro-electrolytic peripheral milling method based on micro-disk electrode online preparation described in Embodiment 4 is that: The machining voltage between the disk-shaped electrode blank 11 and the fine electrode wire 8 is 120V, the charging capacitance is 2400pF, the charging resistance is 1300Ω, and the feed speed is 0.026mm/min.
具体实施方式六：参见图1至图3说明本实施方式，本实施方式与具体实施方式三所述的一种基于微细盘状电极在线制备的微阵列结构微细电解周铣加工方法的区别在于，步骤二中，将制备完成的微细盘状电极20作为工具电极对待加工工件19在线进行微细电解周铣加工，从而在待加工工件19的表面上加工出微阵列结构，其具体过程为：Specific Embodiment 6: Refer to Fig. 1 to Fig. 3 to illustrate this embodiment. The difference between this embodiment and the micro-array structure micro-electrolytic peripheral milling method based on micro-disk electrode online preparation described in Specific Embodiment 3 is that: In step 2, the prepared fine disk-shaped electrode 20 is used as a tool electrode to perform micro-electrolytic peripheral milling on the workpiece 19 to be processed, so as to process a microarray structure on the surface of the workpiece 19 to be processed. The specific process is as follows:
步骤二一、设置微细盘状电极20与待加工工件19间的加工间隙、加工电压，待加工工件19的进给速度、待加工工件19的加工轨迹及分度旋转装置18的分度转角；Step 21, setting the machining gap between the micro disc electrode 20 and the workpiece 19 to be processed, the processing voltage, the feed speed of the workpiece 19 to be processed, the machining track of the workpiece 19 to be processed and the indexing angle of the indexing rotary device 18;
步骤二二、电解电源15给待加工工件19提供工作电压，根据待加工工件19的加工轨迹、进给速度及分度旋转装置18的分度转角，使待加工工件19在Z轴方向运动，微 细盘状电极20作为工具电极对待加工工件19进行微细电解周铣加工，从而使待加工工件 19的加工面上形成微阵列结构，最终完成微阵列结构的制备；Step 22, the electrolysis power supply 15 provides the working voltage to the workpiece 19 to be processed, and according to the processing trajectory, the feed speed and the indexing angle of the indexing rotary device 18 of the workpiece 19 to be processed, the workpiece 19 to be processed is moved in the Z-axis direction, The micro-disc electrode 20 is used as a tool electrode to perform micro-electrolytic peripheral milling on the workpiece 19 to be processed, so that a micro-array structure is formed on the processing surface of the workpiece 19 to be processed, and finally the preparation of the micro-array structure is completed;
在微细电解周铣加工过程中，电解工作液循环系统12使电解液流过加工间隙，且当 电解加工短路检测系统14检测微细盘状电极20与待加工工件19间发生短路时，检测到的短路信号发送至工控机1，工控机1控制待加工工件19反向进给直至加工状态恢复正 常。During the micro-electrolytic milling process, the electrolytic working fluid circulation system 12 makes the electrolyte flow through the machining gap, and when the electrolytic machining short-circuit detection system 14 detects a short-circuit between the micro-disk electrode 20 and the workpiece 19 to be processed, the detected The short circuit signal is sent to the industrial computer 1, and the industrial computer 1 controls the reverse feed of the workpiece 19 to be processed until the processing state returns to normal.
具体实施方式七：参见图1至图3说明本实施方式，本实施方式与具体实施方式三所述的一种基于微细盘状电极在线制备的微阵列结构微细电解周铣加工方法的区别在于，微细盘状电极20与待加工工件19之间的加工电压为8V、脉宽为0.5μs、脉间为2.5μs，Z 轴进给速度为1.5μm/s。Specific embodiment 7: Referring to Fig. 1 to Fig. 3 to illustrate this embodiment, the difference between this embodiment and the micro-array structure micro-electrolytic peripheral milling method based on micro-disk electrode online preparation described in specific embodiment 3 is that, The machining voltage between the fine disc electrode 20 and the workpiece 19 to be machined is 8V, the pulse width is 0.5 μs, the pulse interval is 2.5 μs, and the Z-axis feed speed is 1.5 μm/s.
本实施方式中，以加工不锈钢材质的待加工工件为例，所用的工作介质为 1wt％NaNO3+0.5％EDTA电解液，加工中电解液从微细盘状电极与不锈钢待加工工件之间 的加工间隙流过，带走阳极溶解的产物和电解电流通过电解液时产生的热量。In this embodiment, taking the stainless steel workpiece to be processed as an example, the working medium used is 1wt% NaNO3+0.5% EDTA electrolyte, and the electrolyte is drawn from the processing gap between the fine disc electrode and the stainless steel workpiece to be processed during processing. It flows through and takes away the heat generated when the anode dissolved products and the electrolytic current pass through the electrolyte.
本发明所述一种基于微细盘状电极在线制备的微阵列结构微细电解周铣加工方法不 局限于上述各实施方式所记载的具体步骤，还可以是上述各实施方式所记载的技术特征的 合理组合。The micro-array structure micro-electrolytic peripheral milling method based on micro-disk electrodes prepared online in the present invention is not limited to the specific steps described in the above-mentioned embodiments, but can also be a reasonable combination of the technical features described in the above-mentioned embodiments. combination.
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| CN201810589032.8ACN108746896A (en) | 2018-06-08 | 2018-06-08 | A micro-electrolytic peripheral milling method for micro-array structures based on on-line preparation of micro-disk electrodes |
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