A kind of multistation mobile model microscope inspection measurement equipmentTechnical field
The invention belongs to technical field of mechanical automation, specifically, more particularly to a kind of multistation mobile model microscopeDetection device.
Background technology
With development in science and technology, electronic industry is advanced by leaps and bounds, and chip is sealed in various integrated, control circuit demand sharp increasesThe demand of dress also increases rapidly, and chips are made of silicon wafer, and carrying out diversification detection to silicon wafer is to ensure that product qualityFinal purpose.Silicon wafer currently on the market mostly uses greatly manual control microscope and is detected, and not only accuracy of detection is by peopleWork influences greatly, and low production efficiency, meanwhile, some detections are needed in specific environment, such as high temperature, explosive, corrosion environmentUnder be detected, be easy staff is caused to damage.
Invention content
Present invention aims at provide a kind of multiplexing displacement of accuracy of detection height, silicon wafer losslessization, high degree of automationEjector half microscope inspection measurement equipment.
In order to achieve the above technical purposes, the technical solution that multistation mobile model microscope inspection measurement equipment of the present invention usesFor：
A kind of multistation mobile model microscope inspection measurement equipment, including pedestal, the susceptor surface are equipped with conveying silicon waferConveying device, end are equipped with the positioning fixture for clamping silicon wafer, and side is equipped with control cabinet, and the control cabinet inside is fixed to be connectedIt is connected to fixation bridge arm of the frame above conveying device, the bridge arm end is connected with multifunctional microscope, described multi-functional micro-Mirror is right against conveying device；
The conveying device include the Y-axis motion being axially moved along Y-axis being fixedly connected with the positioning fixture back side, withThe Z axis motion being axially moved along Z axis and be set up in the axial along X-axis of susceptor surface that Y-axis motion is fixedly connectedThe X-axis motion of movement, X-axis motion both sides are equipped with manual sliding equipment, and the Y-axis motion includes fixingIt is connected to first sliding block at the positioning fixture back side, first slider bottom is slidably connected with Y-axis sliding rail, and the Y-axis sliding rail is setIn positioning fixture bottom, and slideway is set on the inside of positioning fixture, and first slider back side is slidably connected with Z axis slide rail, the ZShaft movement mechanism includes the Z axis slide rail being set on the outside of positioning fixture, and the Z axis slide rail is vertically arranged, and its surface is slidably connectedFirst sliding block, the X-axis motion include the X-axis slide rail for being right against positioning fixture outlet, and the X-axis slide rail surface sliding connectsIt is connected to the second sliding block, second shoe surface is fixedly connected with the suction jig for being useful for absorption silicon wafer, the manual slidingMechanism includes the sliding platform set on X-axis slide rail both sides, and the sliding platform is axially arranged along X-axis, and bottom is equipped with for drivingThe mobile dish for making sliding platform slide, the mobile pan bottom are equipped with supporting rack, and support frame as described above is placed in above pedestal, the cunningMoving platform bottom is equipped with L-shaped link block, and L-shaped link block front end is equipped with the manual actuation of button for promoting sliding platform to move.
Preferably, the positioning fixture includes the box body for holding silicon wafer, and box surface is equipped with box cover, and box body side is equipped withDitch shape slot, barrier plate is inserted in ditch shape slot, and blocking plate surface is fixedly connected on the inside of the first sliding block.By the way that box is arrangedBody is stored with making silicon wafer steady ordered, while also being got ready by subsequent detection.
Preferably, the suction jig includes being fixed on the L-shaped ceramic bases in the second shoe surface section, ceramic basesThe upper and lower surface in front end is equipped with multiple dense micropores, and ceramic bases rear end is fixedly connected by screw with the second sliding block, intensive micro-Filled with the silica gel for adsorbing silicon wafer in hole.Using ceramic bases dense micropore upper and lower surfaces of, is formed and inhale physical absorptionProperty, the friction clamping performance of silica gel is recycled, silicon wafer is made to be stable at ceramic bases surface, promotes the accuracy of detection.
Preferably, it is equipped on the inside of the control cabinet to show the data display screen of test result.Utilize data display screenIntuitive displaying testing result.
Preferably, the control cabinet is internally provided with the RS232C communication datas interface and power supply for being used for transmission data.
Preferably, the multifunctional microscope bottom is equipped with quick change eyepiece mechanism, and quick change eyepiece mechanism includes set on micro-The rotating disk of mirror bottom, rotating disk are evenly equipped with multiple eyepieces.By the way that quick change eyepiece mechanism is arranged, make microscope according to testing requirementsIt is replaced, to enable use scope be expanded.
Preferably, be equipped with grating scale in the multifunctional microscope, grating scale include the rice wordline being set on focal plane plate andDotted line.Using rice wordline, there is accurate lubber-line when enabling observation, when avoiding using straight line observation, the inaccurate problem of benchmark.
Preferably, it is additionally provided with focus tracker in the multifunctional microscope, microscope is made to be directed at focus always.
Preferably, the bridge arm bottom is equipped with the inductor for incuding silicon wafer.
Compared with prior art, the beneficial effects of the invention are as follows：
1, the present invention utilizes conveying device, is accurately delivered under microscope after so that silicon wafer is passed through multiple station movements, noOnly conveying direction diversification, accurate positioning, and work of the staff under the environment such as high temperature, explosive, corrosion is avoided,Improve the safety of personnel；
2, the present invention to silicon wafer attract and be diverted from one use to another using suction jig, so that silicon wafer is stablized transport, but also keep awayWhen manpower-free takes silicon wafer, silicon wafer is polluted, to cause to measure the problem of declining, improves the precision of measurement；
3, stand, column are the rigid body consolidated in the present invention, and the linear movement mechanism of Gao Zhidu is equipped in conveying device,Improve the accuracy of instrument；
4, it is conveyed in the present invention and detection is all made of automation control, alleviate the labor intensity of operating personnel, led to simultaneouslyIt crosses and manual sliding equipment is set, when enabling equipment automatically control breaking down, may continue to be detected, ensure equipment stablizes fortuneRow.
Description of the drawings
Fig. 1 is the structural schematic diagram of the present invention；
Fig. 2 is the structural schematic diagram of ceramic bases in the present invention.
In figure：1. pedestal；2. control cabinet；3. bridge arm；4. multifunctional microscope；5. the first sliding block；6.Y axis sliding rails；7.Z axisSliding rail；8.X axis sliding rails；9. the second sliding block；10. sliding platform；11. mobile dish；12. supporting rack；13.L shape link blocks；14. handDynamic start button；15. box body；16. box cover；17. barrier plate；18. ceramic bases；19. micropore；20. data display screen；21. rotationTurntable；22. eyepiece；23. inductor.
Specific implementation mode
With reference to the accompanying drawings and detailed description, the present invention is furture elucidated, it should be understood that these embodiments are only used forIllustrate the present invention rather than limit the scope of the invention, after having read the present invention, those skilled in the art are to the present inventionThe modifications of various equivalent forms fall within the application range as defined in the appended claims.
As shown in Fig. 1-Fig. 2, a kind of multistation mobile model microscope inspection measurement equipment, including pedestal 1,1 surface of the pedestalConveying device equipped with conveying silicon wafer, end are equipped with the positioning fixture for clamping silicon wafer, and side is equipped with control cabinet 2, instituteIt states 2 inside of control cabinet and is fixedly connected with fixation bridge arm 3 of the frame above conveying device, 3 end of the bridge arm is connected with multi-functionalMicroscope 4,3 bottom of the bridge arm are equipped with the inductor 23 for incuding silicon wafer, and the multifunctional microscope 4 is right against conveyingDevice, the positioning fixture include the box body 15 for holding silicon wafer, and 15 surface of box body is equipped with box cover 16, and 15 side of box body is equipped with ditchShape slot, barrier plate 17 is inserted in ditch shape slot, and 17 surface of barrier plate is fixedly connected on 5 inside of the first sliding block, the control2 inside of case is equipped with to show the data display screen 20 of test result, and the control cabinet 2, which is internally provided with, is used for transmission dataRS232C communication datas interface and power supply；
The conveying device include the Y-axis motion being axially moved along Y-axis being fixedly connected with the positioning fixture back side, withThe Z axis motion being axially moved along Z axis and be set up in the axial along X-axis of 1 surface of pedestal that Y-axis motion is fixedly connectedThe X-axis motion of movement, X-axis motion both sides are equipped with manual sliding equipment, and the Y-axis motion includes fixingIt is connected to first sliding block 5 at the positioning fixture back side, 5 bottom of the first sliding block is slidably connected with Y-axis sliding rail 6, the Y-axis sliding rail6 are set to positioning fixture bottom, and slideway is set on the inside of positioning fixture, and 5 back side of the first sliding block is slidably connected with Z axis slide rail 7,The Z axis motion includes the Z axis slide rail 7 being set on the outside of positioning fixture, and the Z axis slide rail 7 is vertically arranged, and its surface is slidedThe first sliding block 5 of dynamic connection, the X-axis motion include the X-axis slide rail 8 for being right against positioning fixture outlet, the X-axis slide rail 8Surface slidably connects the second sliding block 9, and 9 surface of the second sliding block is fixedly connected with the suction jig for being useful for absorption silicon wafer,The suction jig includes being fixed on the L-shaped ceramic bases 18 of 9 surface sections of the second sliding block, and 18 front end of ceramic bases is upper and lowerSurface is equipped with multiple dense micropores 19, and 18 rear end of ceramic bases is fixedly connected by screw with the second sliding block 9, dense micropore 19The interior silica gel filled with for adsorbing silicon wafer, the manual sliding equipment include the sliding platform set on 8 both sides of X-axis slide rail10, the sliding platform 10 is axially arranged along X-axis, and bottom is equipped with the mobile dish 11 for driving sliding platform 10 to slide, instituteIt states 11 bottom of mobile dish and is equipped with supporting rack 12, support frame as described above 12 is placed in 1 top of pedestal, and 10 bottom of the sliding platform is equipped with LShape link block 13,13 front end of L-shaped link block are equipped with the manual actuation of button 14 for promoting sliding platform 10 to move.Wherein, instituteIt states 4 bottom of multifunctional microscope and is equipped with quick change eyepiece mechanism, quick change eyepiece mechanism includes the rotating disk set on 4 bottom of microscope21, rotating disk 21 is evenly equipped with multiple eyepieces 22, and grating scale is equipped in the multifunctional microscope 4, and grating scale includes being set to focal planeRice wordline on plate and dotted line are additionally provided with focus tracker in the multifunctional microscope 4, microscope are made to be directed at focus always.
When the present invention works, control cabinet start button, the first sliding block 5 slides straight up along Z axis slide rail 7, drives firstThe barrier plate 17 at 5 back side of sliding block is skidded off out of ditch shape sliding slot, to enable single layer silicon wafer expose out of box body 15, the second sliding block 9It is close to box body 15 along X-axis slide rail 8, until single layer silicon wafer bottom is inserted into 18 front end of L-shaped ceramic bases, due to ceramic bases 18The front end of upper and lower surface is equipped with dense micropore 19, and micropore 19 forms physical absorption to silicon wafer, simultaneously because filling in micropore 19There is silica gel, further strengthen the absorption to silicon wafer, so that silicon wafer is stablized and be adsorbed in 18 surface of ceramic bases, subsequent second slidesBlock 9 is along 8 reverse slide of X-axis slide rail, until 3 lower section inductor sense 23 of bridge arm should arrive silicon wafer, to which the second sliding block 9 stops slidingDynamic, microscope 4 is detected silicon wafer, and grating scale is equipped in microscope 4 makes mirror using the rice wordline being arranged on focal plane plateHead preferably centring, more general straight line, coordinate is more accurate, and the RS232C communication data interfaces being arranged in control cabinet 2 willTesting result is transmitted to data display screen 20, and simultaneous transmission to outside controls computer, and after the completion of detection, the second sliding block 9 is slided along X-axis8 reverse slide of rail, until the silicon wafer on surface returns to box body 15；
When testing requirements difference, rotating disk 21 is rotated, replaces different size eyepiece 22, is realized such as metallographic detection, sizeThe plurality of specifications such as detection, the depth of parallelism, cleannes detect；
When automatic control system when something goes wrong, start manual actuation of button 14, make sliding platform 10 in mobile dish 11It is moved along X-direction under effect, consequently facilitating microscope 4 is detected.
Wherein, microscope 4 uses 10~50 times of object lens, when detection, first using rough focusing, during focus is aligned by momentThe heart, due to being equipped with focus tracker in microscope 4, with the progress of detection, it can be directed at focus always, without againFocusing.