技术领域technical field
本发明涉及一种带上下盘冷却式高精密双面研磨机。The invention relates to a high-precision double-sided grinding machine with upper and lower plates for cooling.
背景技术Background technique
研磨机作为一种研磨设备，在2D、2.5D玻璃、蓝宝石、金属以及其它硬、脆材料的表表面中广泛应用。As a kind of grinding equipment, the grinding machine is widely used in the surface of 2D, 2.5D glass, sapphire, metal and other hard and brittle materials.
目前，由于设计上存在的不足，还没有一种带上下盘冷却式高精密双面研磨机。At present, due to the deficiencies in the design, there is no high-precision double-sided grinding machine with cooling on the upper and lower plates.
发明内容Contents of the invention
本发明所要解决的技术问题是，提供一种带上下盘冷却式高精密双面研磨机。The technical problem to be solved by the present invention is to provide a high-precision double-sided grinding machine with cooling on the upper and lower plates.
本发明解决其技术问题所采用的技术方案是：带上下盘冷却式高精密双面研磨机，包括箱体部件、主传动系统、上料系统、电控箱、上盘传动系统、上盘偏摆系统和砂液系统；所述砂液系统和上料系统分别位于箱体部件的左右两侧；所述主传动系统、上盘传动系统、上盘偏摆系统以及电控箱安装在箱体部件上。The technical solution adopted by the present invention to solve its technical problems is: a high-precision double-sided grinding machine with upper and lower disc cooling, including box parts, main transmission system, feeding system, electric control box, upper disc transmission system, upper disc bias pendulum system and sand liquid system; the sand liquid system and feeding system are respectively located on the left and right sides of the box body; the main drive system, upper plate drive system, upper plate yaw system and electric control box are installed in the box parts.
进一步，还设有按钮箱，所述按钮箱安装于电控箱上。Further, a button box is also provided, and the button box is installed on the electric control box.
进一步，所述砂液系统具备有砂液循环功能，可以实现工作过程中砂液的循环使用；具备有砂液的过滤功能，可以对回流后的砂液进行过滤并对杂质进行回收。Further, the sand liquid system has a sand liquid circulation function, which can realize the recycling of the sand liquid in the working process; has a sand liquid filtration function, and can filter the returned sand liquid and recover impurities.
进一步，所述砂液系统上安装有一台冷却机，可以不间断的向上盘传动系统的上盘和主传动系统的下盘提供冷却水。Further, a cooling machine is installed on the sand liquid system, which can continuously provide cooling water to the upper plate of the upper plate drive system and the lower plate of the main drive system.
进一步，所述上料系统具备有工作台精准调平功能，能够实现被研磨工件整盘的上下料。Further, the loading system has the function of precise leveling of the workbench, which can realize loading and unloading of the entire plate of the workpiece to be ground.
工作过程中主传动系统带动工件在上下盘中间做行星运动同时具有下盘冷却功能，上盘传动系统带动上盘旋转，同时利用气缸实现上盘的上升和下降且具有上盘冷却功能；工件在上料系统上摆好后整体上料；当抛光结束后上盘上升，上盘偏摆系统先带动上盘传动系统沿上料系统另一侧偏摆然后取料；砂液系统可以实现对上下盘冷却水的供应，可以实现砂液的过滤回收和循环使用。During the working process, the main transmission system drives the workpiece to perform planetary motion in the middle of the upper and lower plates, and it also has the function of cooling the lower plate. The transmission system of the upper plate drives the rotation of the upper plate. After the loading system is set up, the material is loaded as a whole; when the upper plate rises after polishing, the upper plate yaw system first drives the upper plate drive system to swing along the other side of the feeding system and then takes out the material; the sand liquid system can realize the upper and lower plate The supply of cooling water can realize the filtration recovery and recycling of sand liquid.
本发明的有益效果：Beneficial effects of the present invention:
1.该机器是一种带上下盘冷却式高精密双面研磨机，机器主传动系统利用两个直驱的减速电机实现被抛光工件的公转与自转，同时具备有盘面冷却功能；1. The machine is a high-precision double-sided grinding machine with upper and lower disc cooling. The main drive system of the machine uses two direct-drive geared motors to realize the revolution and rotation of the polished workpiece, and it also has the disc cooling function;
2.上盘传动系统采用一个减速电机直驱，并利用气缸实现上盘的升降，同时上盘传动系统也具备盘面的冷却功能；2. The upper plate drive system is directly driven by a geared motor, and the upper plate is lifted by the cylinder, and the upper plate drive system also has the cooling function of the plate surface;
3.上盘偏摆系统当工件抛光结束后可以将上盘传动系统偏摆一定的角度，便于取片和上料；3. The upper plate yaw system can deflect the upper plate transmission system at a certain angle after the workpiece is polished, which is convenient for taking and loading;
4.上料系统具有高度精密调节功能可以在上料平台上摆好片后整盘上下料，提高可抛光效率；4. The feeding system has a highly precise adjustment function. After placing the sheet on the feeding platform, the entire plate can be loaded and unloaded to improve the polishing efficiency;
5.砂液系统具备有砂液循环、砂液过滤、砂液冷却以及杂质回收功能；5. The sand liquid system has the functions of sand liquid circulation, sand liquid filtration, sand liquid cooling and impurity recovery;
6.机器整体结构紧凑。6. The overall structure of the machine is compact.
附图说明Description of drawings
图1为本发明实施例的结构示意图；Fig. 1 is the structural representation of the embodiment of the present invention;
图中：1.箱体部件，2.主传动系统，3.上料系统，4.按钮箱，5.电控箱，6.上盘传动系统，7.上盘偏摆系统，8.砂液系统。In the figure: 1. Cabinet components, 2. Main drive system, 3. Feeding system, 4. Button box, 5. Electric control box, 6. Upper plate transmission system, 7. Upper plate yaw system, 8. Sand liquid system.
具体实施方式Detailed ways
以下结合附图及实施例对本发明作进一步说明。The present invention will be further described below in conjunction with the accompanying drawings and embodiments.
参照图1，一种带上下盘冷却式高精密双面研磨机，包括1套箱体部件1，1套主传动系统2，1套上料系统3，1套按钮箱4，1套电控箱5，1套上盘传动系统6，1套上盘偏摆系统7和1套砂液系统8；所述砂液系统8和上料系统3分别位于箱体部件1的左右两侧；所述主传动系统2、上盘传动系统6、上盘偏摆系统7以及电控箱5安装在箱体部件1上；所述按钮箱4安装于电控箱5上。Referring to Figure 1, a high-precision double-sided grinding machine with upper and lower disc cooling, including 1 set of box parts 1, 1 set of main drive system 2, 1 set of feeding system 3, 1 set of button box 4, and 1 set of electric control Box 5, 1 set of upper plate transmission system 6, 1 set of upper plate yaw system 7 and 1 set of sand liquid system 8; the sand liquid system 8 and the feeding system 3 are respectively located on the left and right sides of the box body part 1; The main transmission system 2 , the upper disk transmission system 6 , the upper disk yaw system 7 and the electric control box 5 are installed on the box body part 1 ; the button box 4 is installed on the electric control box 5 .
实际工作时，主传动系统2带动下盘旋转和工件的行星运动，主传动系统2通过砂液系统8中冷却机中冷却水在下盘迷宫冷却槽内循环流动实现工作过程中下盘的冷却；During actual work, the main transmission system 2 drives the rotation of the bottom plate and the planetary motion of the workpiece, and the main transmission system 2 circulates the cooling water in the cooling machine in the sand liquid system 8 in the labyrinth cooling groove of the bottom plate to cool the bottom plate during the working process;
上盘传动系统6带动上盘的旋转同时利用气缸实现上盘的升降实现研磨过程中的加压动作，并利用砂液系统8中冷却机中冷却水在上盘迷宫冷却槽内循环流动实现工作过程中下盘的冷却。The upper plate transmission system 6 drives the upper plate to rotate, and at the same time, the cylinder is used to realize the lifting of the upper plate to realize the pressurization action during the grinding process, and the cooling water in the cooler in the sand liquid system 8 is used to circulate in the labyrinth cooling tank of the upper plate to realize the work. Cooling of the lower plate during the process.
上料系统3具备有工作台精准调平功能，能够实现被研磨工件整盘的上下料。The loading system 3 has the function of precise leveling of the workbench, which can realize the loading and unloading of the entire plate of the workpiece to be ground.
砂液系统8具备有砂液循环功能，可以实现工作过程中砂液的循环使用；具备有砂液的过滤功能，可以对回流后的砂液进行过滤并对杂质进行回收；同时，砂液系统8上安装有一台冷却机可以不间断的向上盘传动系统6的上盘和主传动系统2的下盘提供冷却水。The sand liquid system 8 has a sand liquid circulation function, which can realize the recycling of the sand liquid in the working process; it has a sand liquid filtration function, which can filter the backflow sand liquid and recycle impurities; at the same time, the sand liquid system 8, a cooling machine is installed to provide cooling water to the upper plate of the upper plate drive system 6 and the lower plate of the main drive system 2 without interruption.
当工件研磨结束后，上盘传动系统6中的气缸带动上盘上升，上盘偏摆系统7带动上盘传动系统6沿上料系统3的反方向旋转，不仅节约空间而且便于上下料。When the workpiece is ground, the cylinder in the upper plate transmission system 6 drives the upper plate to rise, and the upper plate yaw system 7 drives the upper plate drive system 6 to rotate in the opposite direction of the feeding system 3, which not only saves space but also facilitates loading and unloading.
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810400331.2ACN108637889A (en) | 2018-04-28 | 2018-04-28 | The band high-accuracy twin grinder of upper lower burrs cooled |
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810400331.2ACN108637889A (en) | 2018-04-28 | 2018-04-28 | The band high-accuracy twin grinder of upper lower burrs cooled |
| Publication Number | Publication Date |
|---|---|
| CN108637889Atrue CN108637889A (en) | 2018-10-12 |
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810400331.2APendingCN108637889A (en) | 2018-04-28 | 2018-04-28 | The band high-accuracy twin grinder of upper lower burrs cooled |
| Country | Link |
|---|---|
| CN (1) | CN108637889A (en) |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113696091A (en)* | 2021-10-27 | 2021-11-26 | 江苏华兴激光科技有限公司 | Rapid grinding method and device for epitaxial wafer |
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| CN203696666U (en)* | 2014-03-07 | 2014-07-09 | 宇环数控机床股份有限公司 | Double-faced precise grinding and polishing combined machine tool |
| CN106926113A (en)* | 2017-04-22 | 2017-07-07 | 湖南磨王科技智造有限责任公司 | A kind of high accuracy double-faced grinding and polishing machine |
| CN107639518A (en)* | 2017-11-01 | 2018-01-30 | 湖南宇晶机器股份有限公司 | Planer-type high precision polishing machine with temperature control system |
| CN107855894A (en)* | 2017-11-01 | 2018-03-30 | 湖南宇晶机器股份有限公司 | Upper disk for Twp-sided polishing machine is swung and positioner |
| CN107877339A (en)* | 2017-11-01 | 2018-04-06 | 湖南宇晶机器股份有限公司 | High-accuracy sapphire Double side high pressure polishing machine |
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101722447A (en)* | 2008-10-22 | 2010-06-09 | 硅电子股份公司 | Device for the double-sided treatment of flat workpieces and method for the simultaneous double-sided material-removing treatment of a plurality of semiconductor wafers |
| CN203696666U (en)* | 2014-03-07 | 2014-07-09 | 宇环数控机床股份有限公司 | Double-faced precise grinding and polishing combined machine tool |
| CN106926113A (en)* | 2017-04-22 | 2017-07-07 | 湖南磨王科技智造有限责任公司 | A kind of high accuracy double-faced grinding and polishing machine |
| CN107639518A (en)* | 2017-11-01 | 2018-01-30 | 湖南宇晶机器股份有限公司 | Planer-type high precision polishing machine with temperature control system |
| CN107855894A (en)* | 2017-11-01 | 2018-03-30 | 湖南宇晶机器股份有限公司 | Upper disk for Twp-sided polishing machine is swung and positioner |
| CN107877339A (en)* | 2017-11-01 | 2018-04-06 | 湖南宇晶机器股份有限公司 | High-accuracy sapphire Double side high pressure polishing machine |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113696091A (en)* | 2021-10-27 | 2021-11-26 | 江苏华兴激光科技有限公司 | Rapid grinding method and device for epitaxial wafer |
| CN113696091B (en)* | 2021-10-27 | 2022-02-08 | 江苏华兴激光科技有限公司 | Rapid grinding method and device for epitaxial wafer |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
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| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication | Application publication date:20181012 |