技术领域technical field
本发明涉及传感器技术领域，尤其涉及一种湿度传感器及其制作方法、电子设备。The invention relates to the technical field of sensors, in particular to a humidity sensor, a manufacturing method thereof, and electronic equipment.
背景技术Background technique
环境湿度对工业生产和人类生活具有重要影响。灵敏检测环境的湿度，对于安全生产及人类健康生活具有重要意义。目前商用湿度计主要基于水分挥发产生的温度变化及活性层吸水后产生的电导变化进行湿度的检测，其响应时间较长，在湿度检测过程中存在明显的滞后效应。此外，该类湿度计主要为刚性材料，携带不便。Environmental humidity has an important impact on industrial production and human life. Sensitive detection of humidity in the environment is of great significance for safe production and healthy life of human beings. At present, commercial hygrometers mainly detect humidity based on temperature changes caused by water volatilization and conductance changes after water absorption in the active layer. The response time is long, and there is an obvious hysteresis effect in the humidity detection process. In addition, this type of hygrometer is mainly made of rigid materials, which is inconvenient to carry.
近年来，基于柔性基底的湿度传感器相继被制出，柔性衬底诸如聚二甲基硅氧烷(PDMS，Polydimethylsiloxane)，聚对苯二甲酸类塑料(PET，Polyethyleneterephthalate)，聚酰亚胺(PI，Polyimide)等。其传感机制是基于其活性层(氧化石墨烯，二硫化钼等)与水分子相互作用，引起材料电学性质，如电阻，电子迁移率等的变化，从而实现对湿度的检测。然而，此类高分子基底很难被降解，废弃的电子器件对环境造成了不同程度的破坏。并且，此类高分子基底的透气性差，在可穿戴电子器件中的应用中受到限制。In recent years, humidity sensors based on flexible substrates have been produced one after another. Flexible substrates such as polydimethylsiloxane (PDMS, Polydimethylsiloxane), polyterephthalic acid plastics (PET, Polyethyleneterephthalate), polyimide (PI , Polyimide) etc. Its sensing mechanism is based on the interaction between its active layer (graphene oxide, molybdenum disulfide, etc.) and water molecules, causing changes in the electrical properties of the material, such as resistance, electron mobility, etc., thereby realizing the detection of humidity. However, such polymer substrates are difficult to degrade, and discarded electronic devices have caused varying degrees of damage to the environment. Moreover, the poor gas permeability of such polymer substrates limits their applications in wearable electronic devices.
因此，开发具有更好生物兼容性且可降解的柔性基底制作出的湿度传感器，对于开发可穿戴及环境友好的电子器件具有重要的意义。Therefore, the development of humidity sensors with better biocompatibility and degradable flexible substrates is of great significance for the development of wearable and environmentally friendly electronic devices.
发明内容Contents of the invention
有鉴于此，本发明实施例提供了一种湿度传感器及其制作方法、电子设备，用以解决现有的柔性湿度传感器生物兼容性差且不可降解的问题。In view of this, an embodiment of the present invention provides a humidity sensor, a manufacturing method thereof, and an electronic device, so as to solve the problem of poor biocompatibility and non-degradability of existing flexible humidity sensors.
因此，本发明实施例提供了一种湿度传感器，包括：纳米纸基底，位于所述纳米纸基底表面的导电薄膜，以及分别与所述导电薄膜相对的两端电连接的连接电极；Therefore, an embodiment of the present invention provides a humidity sensor, comprising: a nano-paper substrate, a conductive film located on the surface of the nano-paper substrate, and connecting electrodes electrically connected to opposite ends of the conductive film;
所述导电薄膜包括多个导电基元，相邻的所述导电基元之间相互搭接；The conductive film includes a plurality of conductive elements, and adjacent conductive elements overlap each other;
所述导电薄膜的电阻随着所述纳米纸基底在湿度变化环境中的膨胀变化而变化。The electrical resistance of the conductive film changes as the nanopaper substrate expands in an environment of changing humidity.
在一种可能的实现方式中，在本发明实施例提供的上述湿度传感器中，所述导电基元包括纳米棒和/或纳米片。In a possible implementation manner, in the above humidity sensor provided by the embodiment of the present invention, the conductive element includes nanorods and/or nanosheets.
在一种可能的实现方式中，在本发明实施例提供的上述湿度传感器中，所述纳米棒包括碳纳米管、Au纳米棒、Ag纳米棒和Cu纳米棒之一或组合。In a possible implementation manner, in the above humidity sensor provided by the embodiment of the present invention, the nanorods include one or a combination of carbon nanotubes, Au nanorods, Ag nanorods, and Cu nanorods.
在一种可能的实现方式中，在本发明实施例提供的上述湿度传感器中，所述纳米棒的直径为20nm-200nm，所述纳米棒的长度和直径之比为5-20。In a possible implementation manner, in the humidity sensor provided in the embodiment of the present invention, the diameter of the nanorods is 20 nm-200 nm, and the ratio of the length to the diameter of the nanorods is 5-20.
在一种可能的实现方式中，在本发明实施例提供的上述湿度传感器中，所述纳米片包括石墨烯纳米片、Au纳米片、Ag纳米片和Cu纳米片之一或组合。In a possible implementation manner, in the above humidity sensor provided by the embodiment of the present invention, the nanosheets include one or a combination of graphene nanosheets, Au nanosheets, Ag nanosheets, and Cu nanosheets.
在一种可能的实现方式中，在本发明实施例提供的上述湿度传感器中，所述纳米片的最大长度为20nm-2μm，所述纳米片的厚度为2nm-5nm。In a possible implementation manner, in the humidity sensor provided in the embodiment of the present invention, the maximum length of the nanosheets is 20 nm-2 μm, and the thickness of the nanosheets is 2 nm-5 nm.
在一种可能的实现方式中，在本发明实施例提供的上述湿度传感器中，所述导电薄膜的电阻在200欧姆-20000欧姆。In a possible implementation manner, in the humidity sensor provided in the embodiment of the present invention, the resistance of the conductive film is 200 ohms-20000 ohms.
另一方面，本发明实施例还提供了一种上述湿度传感器的制作方法，包括：On the other hand, an embodiment of the present invention also provides a method for manufacturing the above-mentioned humidity sensor, including:
分别形成纳米纸和导电薄膜；Respectively form nano paper and conductive film;
将所述导电薄膜转移至所述纳米纸的表面；transferring the conductive film to the surface of the nanopaper;
在所述导电薄膜的相对的两端固定连接电极。The electrodes are fixedly connected to opposite ends of the conductive film.
在一种可能的实现方式中，在本发明实施例提供的上述制作方法中，形成导电薄膜，具体包括：In a possible implementation manner, in the above manufacturing method provided by the embodiment of the present invention, forming a conductive film specifically includes:
将导电基元的乙醇分散液滴到水面上，随着所述乙醇挥发，所述导电基元自组装形成导电薄膜。The ethanol dispersion liquid of the conductive element is dropped on the water surface, and as the ethanol volatilizes, the conductive element self-assembles to form a conductive film.
在一种可能的实现方式中，在本发明实施例提供的上述制作方法中，将所述导电薄膜转移至所述纳米纸的表面，具体包括：In a possible implementation, in the above-mentioned manufacturing method provided by the embodiment of the present invention, transferring the conductive film to the surface of the nanopaper specifically includes:
利用硅片从水面上捞起所述导电薄膜；Using a silicon wafer to pick up the conductive film from the water surface;
吹干后采用热释放胶带固定所述导电薄膜；After drying, the conductive film is fixed with thermal release tape;
刻蚀去除所述硅片，得到所述导电薄膜和所述热释放胶带的复合结构；Etching and removing the silicon wafer to obtain a composite structure of the conductive film and the thermal release tape;
将所述复合结构转移至所述纳米纸的表面；transferring the composite structure to the surface of the nanopaper;
加热去除所述热释放胶带。Heat to remove the heat release tape.
另一方面，本发明实施例还提供了一种电子设备，包括本发明实施例提供的上述湿度传感器。On the other hand, an embodiment of the present invention further provides an electronic device, including the above-mentioned humidity sensor provided by the embodiment of the present invention.
本发明实施例的有益效果包括：The beneficial effects of the embodiments of the present invention include:
本发明实施例提供的一种湿度传感器及其制作方法、电子设备，包括：纳米纸基底，位于纳米纸基底表面的导电薄膜，以及分别与导电薄膜相对的两端电连接的连接电极；导电薄膜包括多个导电基元，相邻的导电基元之间相互搭接；环境中湿度越大，纳米纸基底膨胀的越大，导电薄膜中导电基元之间的搭接程度越低，导致导电薄膜的电阻越大，最终呈现导电薄膜的电阻随着纳米纸基底在湿度变化环境中的膨胀变化而变化。由于采用可降解的纳米纸作为基底，使得湿度传感器对环境更加友好；由于纳米纸透气性好，有利于应用于可穿戴设备。湿度传感器基于纳米纸基底的膨胀而引起导电薄膜导电性能发生变化，对于导电薄膜的种类选择不受限制，且对湿度具有快速响应和快速恢复的优异性能。A humidity sensor, a manufacturing method thereof, and an electronic device provided in an embodiment of the present invention include: a nano-paper substrate, a conductive film positioned on the surface of the nano-paper substrate, and connecting electrodes electrically connected to opposite ends of the conductive film; the conductive film It includes multiple conductive elements, and the adjacent conductive elements overlap each other; the greater the humidity in the environment, the greater the expansion of the nano-paper substrate, and the lower the degree of overlap between the conductive elements in the conductive film, resulting in conductive The greater the electrical resistance of the film, the electrical resistance of the resulting conductive film changes as the nanopaper substrate expands in an environment of varying humidity. Due to the use of degradable nano paper as the substrate, the humidity sensor is more friendly to the environment; due to the good air permeability of the nano paper, it is beneficial to be applied to wearable devices. The humidity sensor is based on the expansion of the nano-paper substrate to cause a change in the conductive properties of the conductive film. The selection of the type of conductive film is not limited, and it has excellent performance of fast response and fast recovery to humidity.
附图说明Description of drawings
图1a至图1c分别为本发明实施例提供的湿度传感器的结构示意图；Figures 1a to 1c are structural schematic diagrams of humidity sensors provided by embodiments of the present invention, respectively;
图2为本发明实施例提供的湿度传感器中导电薄膜的电阻变化随湿度变化的对应关系图；FIG. 2 is a graph showing the relationship between the resistance change of the conductive film and the change in humidity in the humidity sensor provided by the embodiment of the present invention;
图3为本发明实施例提供的测量湿度传感器的电阻随湿度变化的示意图；3 is a schematic diagram of measuring the resistance of the humidity sensor as the humidity changes according to the embodiment of the present invention;
图4为本发明实施例提供的湿度传感器中导电薄膜的电阻变化随湿度周期变化的对应关系图；Fig. 4 is a corresponding relationship diagram of the resistance change of the conductive film in the humidity sensor provided by the embodiment of the present invention and the change of the humidity cycle;
图5为本发明实施例提供的湿度传感器的制作方法的流程图；5 is a flowchart of a method for manufacturing a humidity sensor provided by an embodiment of the present invention;
图6为本发明实施例提供的湿度传感器的制作方法的具体流程图；FIG. 6 is a specific flow chart of a manufacturing method of a humidity sensor provided by an embodiment of the present invention;
图7为采用本发明实施例提供的制作方法制作出的湿度传感器的拉曼光谱表征图。Fig. 7 is a Raman spectrum characterization diagram of the humidity sensor manufactured by using the manufacturing method provided by the embodiment of the present invention.
具体实施方式Detailed ways
为了使本发明的目的、技术方案和优点更加清楚，下面将结合附图对本发明作进一步地详细描述，显然，所描述的实施例仅是本发明一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其它实施例，都属于本发明保护的范围。In order to make the purpose, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings. Obviously, the described embodiments are only some of the embodiments of the present invention, rather than all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
附图中各部件的形状和大小不反映真实比例，目的只是示意说明本发明内容。The shapes and sizes of the components in the drawings do not reflect the real scale, but are only intended to schematically illustrate the content of the present invention.
本发明实施例提供的一种湿度传感器，如图1a至图1c所示，包括：纳米纸基底100，位于纳米纸基底100表面的导电薄膜200，以及分别与导电薄膜200相对的两端电连接的连接电极300；A kind of humidity sensor that the embodiment of the present invention provides, as shown in Fig. 1a to Fig. 1c, comprises: nano paper base 100, the conductive film 200 that is positioned at the surface of nano paper base 100, and the two ends that are opposite to conductive film 200 are electrically connected respectively The connecting electrode 300;
导电薄膜200包括多个导电基元210，相邻的导电基元210之间相互搭接；The conductive film 200 includes a plurality of conductive elements 210, and adjacent conductive elements 210 overlap each other;
导电薄膜200的电阻随着纳米纸基底100在湿度变化环境中的膨胀变化而变化。The resistance of the conductive thin film 200 changes as the expansion of the nanopaper substrate 100 changes in an environment of changing humidity.
具体地，本发明实施例提供的湿度传感器的工作原理不同于现有的湿度计，纳米纸是一种新型的环境友好的透明柔性薄膜材料，纳米纸由可再生、可降解的纳米纤维素自组装而成，具有良好的生物兼容性，是一种理想的柔性基底材料。纳米纤维素表面含有大量的含氧官能团，使得纳米纸基底100在不同湿度环境下发生不同程度膨胀。因此，本发明实施例提供的湿度传感器的工作原理是基于纳米纸基底100的膨胀变化，从而引起其表面的导电薄膜200中相互搭接的导电基元210的导电性发生变化。环境中湿度越大，纳米纸基底100膨胀的越大，导电薄膜200中导电基元210之间的搭接程度越低，导致导电薄膜200的电阻越大。最终呈现出如图2所示，导电薄膜200的电阻随着纳米纸基底100在湿度变化环境中的膨胀变大而变大，因此可以根据导电薄膜200的电阻变化确定环境湿度。Specifically, the working principle of the humidity sensor provided by the embodiment of the present invention is different from that of the existing hygrometer. Nanopaper is a new type of environmentally friendly transparent flexible film material. Nanopaper is made of renewable and degradable nanocellulose. Assembled with good biocompatibility, it is an ideal flexible substrate material. The surface of the nanocellulose contains a large amount of oxygen-containing functional groups, which makes the nanopaper substrate 100 swell to different degrees under different humidity environments. Therefore, the working principle of the humidity sensor provided by the embodiment of the present invention is based on the expansion change of the nanopaper substrate 100 , which causes the conductivity of the overlapping conductive elements 210 in the conductive film 200 on its surface to change. The greater the humidity in the environment, the greater the expansion of the nanopaper substrate 100 , and the lower the degree of overlap between the conductive elements 210 in the conductive film 200 , resulting in a greater resistance of the conductive film 200 . Finally, as shown in FIG. 2 , the resistance of the conductive film 200 increases with the expansion of the nanopaper substrate 100 in a humidity-changing environment, so the ambient humidity can be determined according to the resistance change of the conductive film 200 .
具体地，在本发明实施例提供的湿度传感器中，由于采用可降解的纳米纸作为基底，使得湿度传感器对环境更加友好；由于纳米纸透气性好，有利于应用于可穿戴设备。Specifically, in the humidity sensor provided by the embodiment of the present invention, since the degradable nano paper is used as the substrate, the humidity sensor is more friendly to the environment; due to the good air permeability of the nano paper, it is beneficial to be applied to wearable devices.
并且，本发明实施例提供的湿度传感器是基于纳米纸基底100的膨胀而引起导电薄膜200导电性能发生变化，因此，对于导电薄膜的种类选择不受限制。Moreover, the humidity sensor provided by the embodiment of the present invention is based on the expansion of the nanopaper substrate 100 causing the conductive property of the conductive film 200 to change, therefore, the selection of the type of the conductive film is not limited.
具体地，本发明实施例提供的湿度传感器对湿度具有快速响应和快速恢复的优异性能。如图3所示，将本发明实施例提供的湿度传感器A放置于两端连接气路的腔中，通过循环向腔中通入载有水蒸气的气流调控腔中的湿度，然后通入大量干燥气体使腔内湿度回复至初始值。将半导体特性分析仪调节到电阻模式，源漏两级分别连接本发明实施例提供的上述湿度传感器中的连接电极。通过对半导体特性分析仪中电阻值的实时记录，如图4所示，可以得到湿度传感器的电阻值随湿度变化的震荡，其响应时间可以达到几秒至几十秒的量级。并与商业湿度计B所测量得到的数据相符。Specifically, the humidity sensor provided by the embodiments of the present invention has excellent performances of fast response and fast recovery to humidity. As shown in Figure 3, the humidity sensor A provided by the embodiment of the present invention is placed in a cavity connected to an air circuit at both ends, and the humidity in the cavity is regulated by circulating an air flow carrying water vapor into the cavity, and then a large amount of The drying gas restores the humidity in the chamber to its original value. The semiconductor characteristic analyzer is adjusted to resistance mode, and the source and drain stages are respectively connected to the connecting electrodes in the humidity sensor provided by the embodiment of the present invention. Through the real-time recording of the resistance value in the semiconductor characteristic analyzer, as shown in Figure 4, the oscillation of the resistance value of the humidity sensor with the change of humidity can be obtained, and its response time can reach the order of several seconds to tens of seconds. And it is consistent with the data measured by commercial hygrometer B.
可选地，在本发明实施例提供的上述湿度传感器中，如图1a至图1c所示，导电基元210可以包括纳米棒211和/或纳米片212。Optionally, in the above humidity sensor provided by the embodiment of the present invention, as shown in FIGS. 1a to 1c , the conductive element 210 may include nanorods 211 and/or nanosheets 212 .
具体地，图1a示出了构成导电薄膜200的各导电基元210均为纳米棒211的结构，图1b示出了构成导电薄膜200的各导电基元210均为纳米片212的结构，图1c示出了构成导电薄膜200的各导电基元210为纳米棒211和纳米片212混合的结构。通过纳米棒211和/或纳米片212之间形成相互搭接的结构，可以使形成的导电薄膜200的电阻随着纳米纸基底100的膨胀变化而变化。Specifically, Fig. 1 a shows the structure in which each conductive unit 210 constituting the conductive film 200 is a nanorod 211 structure, and Fig. 1 b shows a structure in which each conductive unit 210 constituting the conductive film 200 is a nanosheet 212, Fig. 1c shows that each conductive element 210 constituting the conductive film 200 is a structure in which nanorods 211 and nanosheets 212 are mixed. By forming an overlapping structure between the nanorods 211 and/or the nanosheets 212 , the resistance of the formed conductive film 200 can be changed as the expansion of the nanopaper substrate 100 changes.
可选地，在本发明实施例提供的上述湿度传感器中，纳米棒211可以包括碳纳米管、Au纳米棒、Ag纳米棒和Cu纳米棒之一或组合，在此不做限定。Optionally, in the above humidity sensor provided by the embodiment of the present invention, the nanorods 211 may include one or a combination of carbon nanotubes, Au nanorods, Ag nanorods, and Cu nanorods, which is not limited herein.
可选地，在本发明实施例提供的上述湿度传感器中，纳米棒211的直径一般为20nm-200nm，纳米棒211的长度和直径之比一般为5-20。Optionally, in the above humidity sensor provided by the embodiment of the present invention, the diameter of the nanorods 211 is generally 20 nm-200 nm, and the ratio of the length to the diameter of the nanorods 211 is generally 5-20.
可选地，在本发明实施例提供的上述湿度传感器中，纳米片212可以包括石墨烯纳米片、Au纳米片、Ag纳米片和Cu纳米片之一或组合，在此不做限定。Optionally, in the above humidity sensor provided by the embodiment of the present invention, the nanosheets 212 may include one or a combination of graphene nanosheets, Au nanosheets, Ag nanosheets, and Cu nanosheets, which is not limited herein.
可选地，在本发明实施例提供的上述湿度传感器中，纳米片212的最大长度一般为20nm-2μm，纳米片212的厚度一般为2nm-5nm。Optionally, in the above humidity sensor provided by the embodiment of the present invention, the maximum length of the nanosheet 212 is generally 20nm-2μm, and the thickness of the nanosheet 212 is generally 2nm-5nm.
可选地，在本发明实施例提供的上述湿度传感器中，导电薄膜200的电阻一般在200欧姆-20000欧姆。Optionally, in the above-mentioned humidity sensor provided by the embodiment of the present invention, the resistance of the conductive film 200 is generally 200 ohms-20000 ohms.
基于同一发明构思，本发明实施例还提供了一种上述湿度传感器的制作方法，由于该制作方法解决问题的原理与前述一种湿度传感器相似，因此该制作方法的实施可以参见湿度传感器的实施，重复之处不再赘述。Based on the same inventive concept, the embodiment of the present invention also provides a manufacturing method of the aforementioned humidity sensor. Since the problem-solving principle of the manufacturing method is similar to that of the aforementioned humidity sensor, the implementation of the manufacturing method can refer to the implementation of the humidity sensor. Repeated points will not be repeated.
具体地，本发明实施例还提供的一种上述湿度传感器的制作方法，如图5所示，可以具体包括以下步骤：Specifically, the embodiment of the present invention also provides a method for manufacturing the above-mentioned humidity sensor, as shown in FIG. 5 , which may specifically include the following steps:
S501、分别形成纳米纸和导电薄膜；S501, forming nano paper and conductive film respectively;
S502、将导电薄膜转移至纳米纸的表面；S502, transferring the conductive film to the surface of the nano paper;
S503、在导电薄膜的相对的两端固定连接电极。S503. Fix and connect electrodes to opposite ends of the conductive film.
可选地，在本发明实施例提供的上述制作方法中，步骤S501中的形成导电薄膜，如图6所示，可以具体采用以下步骤实现：Optionally, in the above-mentioned manufacturing method provided by the embodiment of the present invention, the formation of the conductive film in step S501, as shown in FIG. 6 , can be implemented by specifically adopting the following steps:
S601、将导电基元的乙醇分散液滴到水面上，随着乙醇挥发，导电基元自组装形成导电薄膜。S601. Drop the ethanol dispersion of the conductive elements onto the water surface, and as the ethanol volatilizes, the conductive elements self-assemble to form a conductive film.
可选地，在本发明实施例提供的上述制作方法中，步骤S503将导电薄膜转移至纳米纸的表面，如图6所示，可以具体采用以下步骤实现：Optionally, in the above-mentioned manufacturing method provided by the embodiment of the present invention, step S503 transfers the conductive film to the surface of the nano paper, as shown in FIG. 6, which can be implemented by specifically adopting the following steps:
S602、利用硅片从水面上捞起导电薄膜；S602, using the silicon wafer to pick up the conductive film from the water surface;
S603、吹干后采用热释放胶带固定导电薄膜；S603, after drying, fix the conductive film with thermal release tape;
S604、刻蚀去除硅片，得到导电薄膜和热释放胶带的复合结构；S604, etching and removing the silicon wafer to obtain a composite structure of the conductive film and the thermal release tape;
S605、将复合结构转移至纳米纸的表面；S605, transferring the composite structure to the surface of the nano paper;
S606、加热去除热释放胶带。S606, removing the thermal release tape by heating.
下面通过几个具体的实施例说明采用本发明实施例提供的上述制作方法制作出的湿度传感器的参数。The parameters of the humidity sensor manufactured by using the above-mentioned manufacturing method provided by the embodiment of the present invention will be described below through several specific examples.
实施例1：柔性湿度传感器的制作方法如下：Embodiment 1: The manufacturing method of the flexible humidity sensor is as follows:
1、将浓度为5％(质量分数)的石墨烯纳米片的乙醇分散液2mL滴到培养皿中的水面上制备石墨烯薄膜；1, the ethanol dispersion liquid 2mL of the graphene nanosheet that concentration is 5% (mass fraction) is dropped on the water surface in the petri dish and prepares graphene film;
2、利用硅片将石墨烯薄膜从水中捞起，吹干后用热释放胶带固定；2. Use a silicon wafer to pick up the graphene film from the water, dry it and fix it with heat release tape;
3、刻蚀除去硅片，释放石墨烯/热释放胶带的复合结构；3. Etching and removing the silicon wafer to release the composite structure of graphene/thermal release tape;
4、将复合结构加热干燥后转移至纳米纸基底上，加热除去热释放胶带；4. After heating and drying the composite structure, transfer it to the nano paper substrate, and remove the thermal release tape by heating;
5、在石墨烯薄膜两端固定上连接电极，得到湿度传感器。5. Fix and connect electrodes at both ends of the graphene film to obtain a humidity sensor.
本实施例得到的湿度传感器经万用表测量，所制备的石墨烯薄膜的方阻为2000Ω。经拉曼光谱表征，如图7所示，湿度传感器中石墨烯薄膜为多层结构，且缺陷很少。经扫描电镜表征，湿度传感器中的石墨烯纳米片的最大长度为20nm-2μm。The humidity sensor obtained in this embodiment is measured by a multimeter, and the square resistance of the prepared graphene film is 2000Ω. Characterized by Raman spectroscopy, as shown in Figure 7, the graphene film in the humidity sensor has a multi-layer structure with few defects. Characterized by a scanning electron microscope, the maximum length of the graphene nanosheets in the humidity sensor is 20nm-2μm.
实施例2：柔性湿度传感器的制作方法如下：Embodiment 2: The manufacturing method of the flexible humidity sensor is as follows:
1、将浓度为1％(质量分数)的石墨烯纳米片乙醇分散液1mL滴到培养皿中的水面上制备石墨烯薄膜；1, the concentration is 1% (mass fraction) graphene nanosheet ethanol dispersion 1mL is dropped on the water surface in the petri dish and prepares graphene film;
2、利用硅片将石墨烯薄膜从水中捞起，吹干后用热释放胶带固定；2. Use a silicon wafer to pick up the graphene film from the water, dry it and fix it with heat release tape;
3、刻蚀除去硅片，释放石墨烯/热释放胶带复合结构；3. Etching and removing the silicon wafer, releasing the composite structure of graphene/thermal release tape;
4、将复合结构加热干燥后转移至纳米纸基底上，加热除去热释放胶带；4. After heating and drying the composite structure, transfer it to the nano paper substrate, and remove the thermal release tape by heating;
5、在石墨烯薄膜两端固定上连接电极，得到湿度传感器。5. Fix and connect electrodes at both ends of the graphene film to obtain a humidity sensor.
本实施例得到的湿度传感器经万用表测量，所制备的石墨烯薄膜的方阻为6000Ω。The humidity sensor obtained in this embodiment is measured by a multimeter, and the square resistance of the prepared graphene film is 6000Ω.
实施例3：柔性湿度传感器的制作方法如下：Embodiment 3: The manufacturing method of the flexible humidity sensor is as follows:
1、将浓度为10％(质量分数)的银纳米棒乙醇分散液1mL滴到培养皿中的水面上制备银薄膜；1. Drop 1 mL of silver nanorod ethanol dispersion solution with a concentration of 10% (mass fraction) onto the water surface in the petri dish to prepare a silver film;
2、利用硅片将银薄膜从水中捞起，吹干后用热释放胶带固定；2. Use a silicon wafer to pick up the silver film from the water, dry it and fix it with heat release tape;
3、刻蚀除去硅片，释放银薄膜/热释放胶带复合结构；3. Etching and removing the silicon wafer, releasing the silver film/thermal release tape composite structure;
4、将复合结构加热干燥后转移至纳米纸基底上，加热除去热释放胶带；4. After heating and drying the composite structure, transfer it to the nano paper substrate, and remove the thermal release tape by heating;
5、在银薄膜两端固定上连接电极，得到湿度传感器。5. Fix and connect electrodes at both ends of the silver film to obtain a humidity sensor.
本实施例得到的湿度传感器经万用表测量，所制备银薄膜的方阻为200Ω。The humidity sensor obtained in this embodiment is measured by a multimeter, and the square resistance of the prepared silver film is 200Ω.
基于同一发明构思，本发明实施例还提供了一种电子设备，包括本发明实施例提供的上述湿度传感器。该电子设备可以是可穿戴设备、显示设备、车载设备等，在此不做限定。Based on the same inventive concept, an embodiment of the present invention further provides an electronic device, including the above-mentioned humidity sensor provided by the embodiment of the present invention. The electronic device may be a wearable device, a display device, a vehicle-mounted device, etc., which is not limited herein.
本发明实施例提供的上述湿度传感器及其制作方法、电子设备，包括：纳米纸基底，位于纳米纸基底表面的导电薄膜，以及分别与导电薄膜相对的两端电连接的连接电极；导电薄膜包括多个导电基元，相邻的导电基元之间相互搭接；环境中湿度越大，纳米纸基底膨胀的越大，导电薄膜中导电基元之间的搭接程度越低，导致导电薄膜的电阻越大，最终呈现导电薄膜的电阻随着纳米纸基底在湿度变化环境中的膨胀变化而变化。由于采用可降解的纳米纸作为基底，使得湿度传感器对环境更加友好；由于纳米纸透气性好，有利于应用于可穿戴设备。湿度传感器基于纳米纸基底的膨胀而引起导电薄膜导电性能发生变化，对于导电薄膜的种类选择不受限制，且对湿度具有快速响应和快速恢复的优异性能。The above-mentioned humidity sensor provided by the embodiments of the present invention, its manufacturing method, and electronic equipment include: a nano-paper substrate, a conductive film positioned on the surface of the nano-paper substrate, and connecting electrodes electrically connected to opposite ends of the conductive film; the conductive film includes Multiple conductive elements, adjacent conductive elements overlap each other; the greater the humidity in the environment, the greater the expansion of the nano-paper substrate, the lower the degree of overlap between the conductive elements in the conductive film, resulting in the conductive film The greater the resistance, the final resistance of the conductive film changes with the expansion of the nanopaper substrate in a humidity-changing environment. Due to the use of degradable nano paper as the substrate, the humidity sensor is more friendly to the environment; due to the good air permeability of the nano paper, it is beneficial to be applied to wearable devices. The humidity sensor is based on the expansion of the nano-paper substrate to cause a change in the conductive properties of the conductive film. The selection of the type of conductive film is not limited, and it has excellent performance of fast response and fast recovery to humidity.
显然，本领域的技术人员可以对本发明进行各种改动和变型而不脱离本发明的精神和范围。这样，倘若本发明的这些修改和变型属于本发明权利要求及其等同技术的范围之内，则本发明也意图包含这些改动和变型在内。Obviously, those skilled in the art can make various changes and modifications to the present invention without departing from the spirit and scope of the present invention. Thus, if these modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalent technologies, the present invention also intends to include these modifications and variations.
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810384017.XACN108593717A (en) | 2018-04-26 | 2018-04-26 | A kind of humidity sensor and preparation method thereof, electronic equipment |
| PCT/CN2019/084019WO2019206167A1 (en) | 2018-04-26 | 2019-04-24 | Humidity sensor and manufacturing method therefor, and electronic device |
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810384017.XACN108593717A (en) | 2018-04-26 | 2018-04-26 | A kind of humidity sensor and preparation method thereof, electronic equipment |
| Publication Number | Publication Date |
|---|---|
| CN108593717Atrue CN108593717A (en) | 2018-09-28 |
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810384017.XAPendingCN108593717A (en) | 2018-04-26 | 2018-04-26 | A kind of humidity sensor and preparation method thereof, electronic equipment |
| Country | Link |
|---|---|
| CN (1) | CN108593717A (en) |
| WO (1) | WO2019206167A1 (en) |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109662694A (en)* | 2019-01-08 | 2019-04-23 | 京东方科技集团股份有限公司 | A kind of facial mask, mask, mobile terminal and system |
| WO2019206167A1 (en)* | 2018-04-26 | 2019-10-31 | 京东方科技集团股份有限公司 | Humidity sensor and manufacturing method therefor, and electronic device |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102279212A (en)* | 2011-07-18 | 2011-12-14 | 浙江大学 | Resistive moisture sensor capable of measuring humidity of low-humidity environment and manufacturing method thereof |
| CN103149246A (en)* | 2012-09-27 | 2013-06-12 | 中国石油大学(华东) | Graphene film humidity sensor |
| CN103323498A (en)* | 2013-07-09 | 2013-09-25 | 山东师范大学 | Resistance type relative humidity sensor based on graphene carbon nanotube composite material |
| CN103717186A (en)* | 2011-08-11 | 2014-04-09 | 3M创新有限公司 | Wetness sensors |
| CN104569079A (en)* | 2015-01-29 | 2015-04-29 | 重庆墨希科技有限公司 | Graphene nano wall resistance-type humidity sensor and preparation method thereof |
| CN105136860A (en)* | 2015-07-24 | 2015-12-09 | 浙江大学 | Humidity sensor based on graphene oxide/graphene/silicon and preparation method thereof |
| CN105136873A (en)* | 2015-08-19 | 2015-12-09 | 东南大学 | Flexible integrated sensor used for measuring temperature and humidity and preparation method thereof |
| CN107024510A (en)* | 2017-05-22 | 2017-08-08 | 清华大学 | A kind of graphene test paper and its preparation and the liquid analysis method based on the test paper |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103196955B (en)* | 2013-04-10 | 2015-01-07 | 中国人民解放军国防科学技术大学 | Silicon carbide nano paper sensor as well as production method and application thereof |
| GB2521193A (en)* | 2013-12-12 | 2015-06-17 | Nokia Technologies Oy | Electronic apparatus and associated methods |
| CN104502412A (en)* | 2014-12-08 | 2015-04-08 | 中国石油大学(华东) | Graphene-based ammonia sensitive material and preparation method thereof |
| CN107383845A (en)* | 2017-05-31 | 2017-11-24 | 广东工业大学 | A kind of water sensing conductive shapes memory polymer composite of adjustable type and its preparation method and application |
| CN108378990B (en)* | 2018-04-12 | 2021-10-22 | 京东方科技集团股份有限公司 | Paper diaper and urine detection system |
| CN108593717A (en)* | 2018-04-26 | 2018-09-28 | 京东方科技集团股份有限公司 | A kind of humidity sensor and preparation method thereof, electronic equipment |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102279212A (en)* | 2011-07-18 | 2011-12-14 | 浙江大学 | Resistive moisture sensor capable of measuring humidity of low-humidity environment and manufacturing method thereof |
| CN103717186A (en)* | 2011-08-11 | 2014-04-09 | 3M创新有限公司 | Wetness sensors |
| CN103149246A (en)* | 2012-09-27 | 2013-06-12 | 中国石油大学(华东) | Graphene film humidity sensor |
| CN103323498A (en)* | 2013-07-09 | 2013-09-25 | 山东师范大学 | Resistance type relative humidity sensor based on graphene carbon nanotube composite material |
| CN104569079A (en)* | 2015-01-29 | 2015-04-29 | 重庆墨希科技有限公司 | Graphene nano wall resistance-type humidity sensor and preparation method thereof |
| CN105136860A (en)* | 2015-07-24 | 2015-12-09 | 浙江大学 | Humidity sensor based on graphene oxide/graphene/silicon and preparation method thereof |
| CN105136873A (en)* | 2015-08-19 | 2015-12-09 | 东南大学 | Flexible integrated sensor used for measuring temperature and humidity and preparation method thereof |
| CN107024510A (en)* | 2017-05-22 | 2017-08-08 | 清华大学 | A kind of graphene test paper and its preparation and the liquid analysis method based on the test paper |
| Title |
|---|
| 余森海 等: "高强度透明纳米纤维素纸的制备与性能表征", 《功能材料》* |
| 孙良彦 等: "结露型湿度敏感元件的研制", 《传感器技术》* |
| 张馨琪 等: "纳米微晶纤维素/石墨烯柔性导电薄膜的制备与表征", 《纸和造纸》* |
| 成万英 等: "湿敏元件的发展概况", 《山东工业大学学报》* |
| 李媛媛 等: "纳米纤维素基材料在电子器件领域的应用研究进展", 《纤维素科学与技术》* |
| 李树山: "电子式湿度传感器", 《仪表技术与传感器》* |
| 杨锦标: "石墨烯/金属网孔复合膜透明电极的制备及应用研究", 《中国优秀硕士学位论文全文数据库 工程科技Ⅰ辑（月刊）》* |
| 高玉荣，等.: "石墨烯/纤维素复合材料的制备及应用", 《化学进展》* |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019206167A1 (en)* | 2018-04-26 | 2019-10-31 | 京东方科技集团股份有限公司 | Humidity sensor and manufacturing method therefor, and electronic device |
| CN109662694A (en)* | 2019-01-08 | 2019-04-23 | 京东方科技集团股份有限公司 | A kind of facial mask, mask, mobile terminal and system |
| Publication number | Publication date |
|---|---|
| WO2019206167A1 (en) | 2019-10-31 |
| Publication | Publication Date | Title |
|---|---|---|
| Tachibana et al. | A printed flexible humidity sensor with high sensitivity and fast response using a cellulose nanofiber/carbon black composite | |
| Hong et al. | Roll‐to‐roll dry transfer of large‐scale graphene | |
| US8568027B2 (en) | Carbon nanotube temperature and pressure sensors | |
| Tang et al. | Fast response resistive humidity sensitivity of polyimide/multiwall carbon nanotube composite films | |
| Wang et al. | Exfoliation at the liquid/air interface to assemble reduced graphene oxide ultrathin films for a flexible noncontact sensing device | |
| Lipomi et al. | Skin-like pressure and strain sensors based on transparent elastic films of carbon nanotubes | |
| Wang et al. | Transparent, stretchable, carbon-nanotube-inlaid conductors enabled by standard replication technology for capacitive pressure, strain and touch sensors | |
| Pandey et al. | Pd-doped reduced graphene oxide sensing films for H2 detection | |
| CN104316086B (en) | A kind of air flow sensor and manufacturing method based on graphene nano wall | |
| CN104374486B (en) | A kind of flexibility temperature sensor and preparation method thereof based on graphene nano wall | |
| Wu et al. | Free‐standing and eco‐friendly polyaniline thin films for multifunctional sensing of physical and chemical stimuli | |
| Zhang et al. | Highly stable and stretchable graphene–polymer processed silver nanowires hybrid electrodes for flexible displays | |
| Wang et al. | Flexible, high-sensitive, and wearable strain sensor based on organic crystal for human motion detection | |
| CN106840483A (en) | Carbon nano-tube/poly aniline laminated film flexible force sensitive sensor and preparation method thereof | |
| Tang et al. | High-performance humidity sensor using Schottky-contacted SnS nanoflakes for noncontact healthcare monitoring | |
| CN104569078A (en) | Flexible graphene nano wall resistance-type humidity sensor and preparation method thereof | |
| CN110251110A (en) | Composite flexible carbon nanotube film, flexible pressure sensor and preparation method thereof | |
| CN103149245A (en) | Polyelectrolyte-carbon nanotube composite film humidity sensor | |
| CN106152930A (en) | A highly sensitive flexible wearable strain sensor and its low-cost fabrication method | |
| Jo et al. | Wearable multifunctional soft sensor and contactless 3D scanner using supersonically sprayed silver nanowires, carbon nanotubes, zinc oxide, and PEDOT: PSS | |
| CN108593717A (en) | A kind of humidity sensor and preparation method thereof, electronic equipment | |
| CN114354029A (en) | Flexible carbon nanotube composite film preparation method, flexible sensor and preparation method | |
| CN101793568B (en) | Temperature sensor based on zinc oxide nanowire | |
| CN107966586B (en) | Graphene oxide-based airflow sensor and preparation method and application thereof | |
| CN103196955B (en) | Silicon carbide nano paper sensor as well as production method and application thereof |
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