Disclosure of Invention
Accordingly, it is necessary to provide a new array substrate to solve the problem that the conventional display panel is prone to have a defect such as a dark spot.
An array substrate comprises a plurality of exposed foot pad routing lines; the foot pad routing comprises a first titanium layer, an aluminum layer covering the first titanium layer and a second titanium layer covering the aluminum layer; in the extending direction of the foot pad wire, the foot pad wire is provided with a thick body part and a plurality of thin neck parts which are arranged at intervals with the thick body part, and the width of each thin neck part is smaller than that of the thick body part.
In the array substrate, in the extending direction of the foot pad routing, the foot pad routing is provided with a plurality of thin neck parts which are arranged at intervals; thereby preventing the occurrence of undesirable phenomena such as dark spots.
Optionally, the edge lines at two sides of the foot pad routing line are wavy lines, troughs of the wavy lines at two sides are close to each other, the thin neck portion is formed at the trough, the thick body portion is formed at the peak, or,
a serrated line, the thin neck portion being formed at a tooth root of the serrated line, and the thick body portion being formed at a tooth of the serrated line.
Optionally, the edge lines of the two sides of the foot pad routing line are symmetrically arranged.
Optionally, a plurality of first protrusions protruding outwards are arranged on one side edge of the foot pad routing wire; the other side edge of the foot pad routing wire is provided with a plurality of second bulges which protrude outwards; in the extending direction of the foot pad routing, the first bulges and the second bulges are alternately arranged in sequence, the thick body part comprises the first bulges and/or the second bulges, and the thin neck part is formed at the connecting part of the first bulges and the second bulges.
In one embodiment, the first protrusion and the second protrusion are both trapezoidal or triangular.
In one embodiment, the width of the footpad trace at the thin neck portion is 5-10 μm.
In one embodiment, in the foot pad trace, a ratio of a width of a widest point to a width of a narrowest point is 2: 1-5: 1.
in one embodiment, the thin necks are uniformly distributed along the extending direction of the foot pad trace.
In one embodiment, the distance between two adjacent thin necks is not more than 10 μm.
The invention also provides a display screen.
A display screen comprises the array substrate provided by the invention.
The display screen is not easy to generate bad phenomena such as dark spots and the like due to the adoption of the array substrate provided by the invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to specific embodiments. It should be understood that the detailed description and specific examples, while indicating the invention, are intended for purposes of illustration only and are not intended to limit the scope of the invention.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used herein in the description of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
The inventor of the present invention finds, through research, that the reasons why the display screen is prone to generating undesirable phenomena such as dark spots are as follows: in the anode wet etching process, the aluminum layer in the foot pad wire reacts with the anode etching solution, that is, in the anode wet etching process, the aluminum layer of the foot pad wire is etched, so that the second titanium layer on the foot pad wire is collapsed and then is broken, and no binding force exists between the broken titanium strip and the bottom layer; in the high-pressure water washing process after the anode wet etching, the broken titanium strip is flushed to a display area (AA area) by high pressure water, and if two ends of the titanium strip are lapped with the anodes of two adjacent sub-pixels, the anodes of the two sub-pixels are short-circuited, so that defects such as dark spots of a finally formed display screen are caused.
Referring to fig. 1 and 2, an array substrate according to a first embodiment of the invention includes a plurality ofpad traces 100. Thefoot pad wire 100 is electrically connected to a pixel driving switch circuit (not shown) in a display area (AA area) of the array substrate, and after the array substrate is bonded to the main board, the foot pad wire implements signal output or signal input of the main board to the pixel driving switch circuit.
Of course, it is understood that the array substrate includes other components besides the pad trace, such as a substrate, a barrier layer, a buffer layer, a Si layer, a gate layer, an interlayer insulating layer (ILD layer), a dielectric layer (CI layer), a gate insulating layer (GI layer), and the like. The above components may be arranged or not arranged by those skilled in the art according to actual situations, and suitable structures and materials of the components may be selected by those skilled in the art, which are not described herein again.
In the present invention, thefoot pad trace 100 is exposed, that is, other film layers are not covered on thefoot pad trace 100, but thefoot pad trace 100 is directly exposed. Thus facilitating subsequent bonding with the main board.
Referring to fig. 2, thefoot pad trace 100 includes afirst titanium layer 111, analuminum layer 112 covering thefirst titanium layer 111, and asecond titanium layer 113 covering thealuminum layer 112; that is, thefoot pad trace 100 includes, as viewed from one side of the substrate, afirst titanium layer 111, analuminum layer 112, and asecond titanium layer 113 in sequence. That is, the film structure of thepad trace 100 is Ti/Al/Ti.
In the anodic wet etching process, thefirst titanium layer 111 and thesecond titanium layer 113 do not react with the anodic etching solution, while thealuminum layer 112 reacts with the anodic etching solution; that is, thefirst titanium layer 111 and thesecond titanium layer 113 remain inert and are not etched during the whole anodic wet etching process; thealuminum layer 112 is etched away due to the reaction with the anodic etching solution.
Preferably, the thickness of thefirst titanium layer 111 is 50nm to 100 nm; the thickness of thealuminum layer 112 is 400nm to 600 nm; the thickness of thesecond titanium layer 113 is 50nm to 100 nm. Therefore, the titanium strip with longer length can be further prevented from being formed, and the probability of generating dark spots is further reduced.
Referring to fig. 1, in the extending direction of thefoot pad trace 100, thefoot pad trace 100 has athick portion 110 and a plurality ofthin neck portions 109 spaced from thethick portion 110, and the width of thethin neck portions 109 is smaller than the width of thethick portion 110.
Because the width of thethin neck part 109 is smaller than that of thethick body part 110 of the footpad routing line 100, after the aluminum layer is etched due to the reaction with the anodic etching solution, the second titanium layer on the aluminum layer collapses and breaks, the breakage is easily caused at thethin neck part 109, the breakage probability of the second titanium layer is increased, and the second titanium layer breaks into smaller titanium strips; in the high-pressure water washing process after the anode wet etching, even if the broken titanium strip is flushed to the display area (AA area) by high pressure water, because the titanium strip is short, two ends of the titanium strip cannot be simultaneously lapped with the anodes of two adjacent sub-pixels, the anode short circuit of the two sub-pixels is avoided, and the bad phenomenon of the formed dark spots of the display screen is reduced.
Preferably, the distance between two adjacentthin necks 109 is not more than 10 μm. The length of the broken titanium strips is further controlled, so that the bad phenomenon of the formed dark spots of the display screen can be further reduced.
Preferably, the width of thefootpad trace 100 at thethin neck portion 109 is 5 μm to 10 μm. Therefore, the breaking condition threshold at thethin neck 109 can be reduced, thethin neck 109 is more easily broken, the breaking probability of the second titanium layer is further improved, and the bad phenomenon of the formed display screen dark spot can be further reduced.
Preferably, in the footbed trace, the ratio of the width of the widest point to the width of the narrowest point is 2: 1-5: 1. therefore, the breaking ratio of the footpad routing line 100 at thethin neck part 109 can be increased, and the ratio of the shorter titanium strip can be further increased, so that the bad phenomenon of the formed dark spot of the display screen can be further reduced.
In the present embodiment, the edge lines of the both sides of thefoot pad trace 100 are zigzag lines.
More preferably, the edges of thefoot pad trace 100 are symmetrically disposed. Namely, the sawtooth lines on two sides are symmetrically arranged. Thethin neck part 109 is formed at the tooth root of the sawtooth line on two sides, thethick body part 110 is formed at the tooth part, so that the width of the thin neck part is smaller, and the stress distribution characteristic of the structure is easier to cause the second titanium layer to break at thethin neck part 109, thereby further reducing the bad phenomenon of the formed dark spot of the display screen.
Referring to fig. 3, fig. 3 is a partial top view of a foot pad trace according to a second embodiment of the invention. The difference between the present embodiment and the first embodiment is:
the edge lines on the two sides of the foot pad routing line of the embodiment are wavy lines, and the troughs of the wavy lines on the two sides are close to each other, namely, thethin neck part 109 is formed at the trough. Athick body 110 is formed at the peak.
Referring to fig. 4, fig. 4 is a partial top view of a foot pad trace according to a third embodiment of the invention. The present embodiment is different from the third embodiment in that:
the wave line trough of the both sides wave line of walking the line of callus on the sole of this embodiment keeps away from mutually, and the callus on the sole is walked the line and is formed calabash form, formsthin neck portion 109 at calabash and calabash junction. The gourd-shaped bulge forms athick body 110.
Referring to fig. 5, fig. 5 is a partial top view of a foot pad trace according to a fourth embodiment of the invention. The difference between the present embodiment and the first embodiment is:
in the present embodiment, the edge of one side (left side in fig. 5) of thefoot pad trace 100 has a plurality offirst protrusions 101 protruding outwards; the edge of the other side (right side in fig. 5) of thefoot pad trace 100 is provided with a plurality ofsecond protrusions 102 protruding outwards; in the extending direction (up-down direction in fig. 5) of thefoot pad trace 100, thefirst protrusions 101 and thesecond protrusions 102 are alternately arranged in sequence, thethick portion 110 includes thefirst protrusions 101 and/or thesecond protrusions 102, and thethin neck portion 109 is formed at the connection position of thefirst protrusions 101 and thesecond protrusions 102. That is, in the extending direction of thefoot pad trace 100, thefirst protrusion 101 is spaced between two adjacentsecond protrusions 102, and similarly, thesecond protrusions 102 are spaced between two adjacentfirst protrusions 101.
In this embodiment, the connection between thefirst protrusion 101 and thesecond protrusion 102 forms athin neck 109. This can further improve the conductivity of thefootpad trace 100.
In the present embodiment, thefirst protrusion 101 and thesecond protrusion 102 are both triangular.
Referring to fig. 6, fig. 6 is a partial top view of a fifth foot pad trace according to an embodiment of the invention. The difference from the fifth embodiment is that:
thefirst protrusion 101 and thesecond protrusion 102 of thefoot pad trace 100 of the embodiment are trapezoidal.
Of course, it is understood that thefirst protrusion 101 and thesecond protrusion 102 are not limited to a triangle or a trapezoid, and may be a semicircular protrusion or a square protrusion.
In the above embodiments, thethin necks 109 are uniformly distributed in the extending direction of thefoot pad trace 100. Of course, it is understood that thethin necks 109 may be unevenly distributed.
The invention also provides a display screen.
A display screen comprises the array substrate provided by the invention.
Of course, it is understood that the display screen includes other devices besides the array substrate, and the specific structures of the other devices and the connection relationship between the devices may be structures known to those skilled in the art, and are not described herein again.
The display screen is not easy to generate bad phenomena such as dark spots and the like due to the adoption of the array substrate provided by the invention.
The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.