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CN108387186A - A kind of three-dimensional scanner based on digital micro-mirror device coding - Google Patents

A kind of three-dimensional scanner based on digital micro-mirror device coding
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CN108387186A
CN108387186ACN201810240822.5ACN201810240822ACN108387186ACN 108387186 ACN108387186 ACN 108387186ACN 201810240822 ACN201810240822 ACN 201810240822ACN 108387186 ACN108387186 ACN 108387186A
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light
lens group
path adjustment
digital micromirror
micromirror device
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吴庆阳
李奇锋
陈顺治
陈泽锋
黄浩涛
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Shenzhen Technology University
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Shenzhen Technology University
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Abstract

Translated fromChinese

本发明适用于光学技术领域,提供了一种三维扫描装置,包括:投影单元,用于产生平行光并透射到光路调整单元,光路调整单元,用于对平行光进行光路调整,使得平行光按照预置角度入射至数字微镜装置,数字微镜装置,用于将平行光反射入可变焦镜头组,可变焦镜头组,用于将反射光进行聚焦后照射至待测量物,并将收集的漫反射光线透射至数字微镜装置,数字微镜装置还用于将漫反射光线反射至光路调整单元以进行调整,使漫反射光线入射至成像单元成像。本发明实施例利用对数字微镜装置进行编码实现同时对多个点进行探测,结合可变焦镜头组中镜头焦距和深度位置的对应关系,重建三维面型,提高了扫描速率,比现有技术提供的装置具有更高扫描速度和精度。

The present invention is applicable to the field of optical technology, and provides a three-dimensional scanning device, including: a projection unit for generating parallel light and transmitting it to the optical path adjustment unit, and an optical path adjustment unit for adjusting the optical path of the parallel light so that the parallel light follows The preset angle is incident to the digital micromirror device, and the digital micromirror device is used to reflect parallel light into the zoom lens group, and the zoom lens group is used to focus the reflected light and irradiate it to the object to be measured, and collect the collected The diffusely reflected light is transmitted to the digital micromirror device, and the digital micromirror device is also used to reflect the diffusely reflected light to the optical path adjustment unit for adjustment, so that the diffusely reflected light enters the imaging unit for imaging. The embodiment of the present invention utilizes the encoding of the digital micromirror device to detect multiple points at the same time, and combines the corresponding relationship between the focal length and the depth position of the lens in the variable focus lens group to reconstruct the three-dimensional surface shape and improve the scanning rate, compared with the prior art. The device provided has higher scanning speed and accuracy.

Description

Translated fromChinese
一种基于数字微镜装置编码的三维扫描装置A three-dimensional scanning device based on digital micromirror device coding

技术领域technical field

本发明属于光学技术领域,尤其涉及一种基于数字微镜装置编码的三维扫描装置。The invention belongs to the field of optical technology, in particular to a three-dimensional scanning device coded based on a digital micromirror device.

背景技术Background technique

随着微光、机、电技术的飞速发展,高精度、高效率探测物体精细结构已成为全球科研领域里的一大研究热点,如何更精确地获取物体三维点云数据是三维测量领域的热点。正是由于共焦测量技术具有轴向层析特性和非常高的深度分辨率,其三维成像能力具有非常高的精度,能够在医学,工业等领域得到广泛的应用。With the rapid development of low-light, electromechanical, and electrical technologies, high-precision and high-efficiency detection of the fine structure of objects has become a major research hotspot in the global scientific research field. How to more accurately obtain 3D point cloud data of objects is a hot spot in the field of 3D measurement . It is precisely because the confocal measurement technology has axial tomographic characteristics and very high depth resolution, its three-dimensional imaging capability has very high precision, and can be widely used in medical, industrial and other fields.

目前对于共焦测量的三维重建方法一般是通过引入共轭针孔产生点光源与点探测实现了轴向层析能力和高分辨率,移动透镜组来获得多个层析面,再对多个层析面进行分析,根据不同深度的像点的聚焦位置不一样,得出大量随着深度变化图像对焦区域变化的层析图片,然后根据深度和对焦点的关系重建出物体表面三维面型,但共轭针孔的使用导致一次仅能对一个被测点进行探测,重建速度慢,效率低。The current 3D reconstruction method for confocal measurement generally achieves axial tomography capability and high resolution by introducing conjugate pinholes to generate point light sources and point detection, and moves the lens group to obtain multiple tomographic planes. According to the different focus positions of image points at different depths, a large number of tomographic pictures that change with the depth of the focus area of the image are obtained, and then the three-dimensional surface shape of the object surface is reconstructed according to the relationship between the depth and the focus point. However, the use of conjugate pinholes leads to the detection of only one measured point at a time, resulting in slow reconstruction and low efficiency.

发明内容Contents of the invention

本发明所要解决的技术问题在于提供一种基于数字微镜装置编码的三维扫描装置,旨在解决现有技术在进行三维重建时,因为使用共轭针孔导致一次仅能对一个被测点进行探测,重建速度慢,效率低的问题。The technical problem to be solved by the present invention is to provide a three-dimensional scanning device based on digital micromirror device coding, which aims to solve the problem of only one measured point at a time due to the use of conjugate pinholes when performing three-dimensional reconstruction in the prior art. Problems with slow detection and reconstruction and low efficiency.

本发明是这样实现的,一种基于数字微镜装置编码的三维扫描装置,包括投影单元、光路调整单元、数字微镜装置、可变焦镜头组和成像单元,所述数字微镜装置和所述成像单元的位置成共轭关系,其中:The present invention is achieved in this way, a three-dimensional scanning device based on digital micromirror device coding, including a projection unit, an optical path adjustment unit, a digital micromirror device, a zoom lens group and an imaging unit, the digital micromirror device and the The positions of the imaging units are in a conjugate relationship, where:

所述投影单元,用于产生平行光,并将所述平行光透射到所述光路调整单元;The projection unit is configured to generate parallel light and transmit the parallel light to the optical path adjustment unit;

所述光路调整单元,用于对所述平行光进行光路调整,使得光路调整后的平行光按照预置角度入射至所述数字微镜装置;The optical path adjustment unit is used to adjust the optical path of the parallel light, so that the parallel light after the optical path adjustment is incident on the digital micromirror device according to a preset angle;

所述数字微镜装置,用于对所述平行光进行反射,将反射光投射至所述可变焦镜头组,所述反射光中包含有互不干扰或者干扰少的光线;The digital micromirror device is used to reflect the parallel light, and project the reflected light to the zoom lens group, and the reflected light includes light that does not interfere with each other or has little interference;

所述可变焦镜头组,用于将所述反射光进行聚焦后照射至待测量物,以在所述待测量物的表面产生漫反射光线;还用于收集所述漫反射光线,将所述漫反射光线透射至所述数字微镜装置;The variable focus lens group is used to focus the reflected light and irradiate it to the object to be measured, so as to generate diffuse reflection light on the surface of the object to be measured; it is also used to collect the diffuse reflection light, and the Diffuse reflection light is transmitted to the digital micromirror device;

所述数字微镜装置,还用于将所述漫反射光线反射至所述光路调整单元,所述漫反射光线经所述光路调整单元进行光路调整后入射至所述成像单元;The digital micromirror device is also used to reflect the diffuse reflection light to the optical path adjustment unit, and the diffuse reflection light enters the imaging unit after the optical path adjustment by the optical path adjustment unit;

所述成像单元,用于根据所述漫反射光线进行成像。The imaging unit is configured to perform imaging according to the diffusely reflected light.

进一步地,所述投影单元包括投影光源、第一透镜和第二透镜;Further, the projection unit includes a projection light source, a first lens and a second lens;

所述投影光源,用于产生预置的光线;The projection light source is used to generate preset light;

所述预置的光线经所述第一透镜和所述第二透镜后形成平行光。The preset light rays form parallel light after passing through the first lens and the second lens.

进一步地,所述光路调整单元包括半透半反镜和平面镜;Further, the optical path adjustment unit includes a half mirror and a plane mirror;

所述平行光穿过所述半透半反镜后透射到所述平面镜,所述平面镜将所述平行光按照预置角度反射至所述数字微镜装置;The parallel light is transmitted to the plane mirror after passing through the half mirror, and the plane mirror reflects the parallel light to the digital micromirror device according to a preset angle;

所述平面镜将所述漫反射光线反射入所述半透半反射镜,所述半透半反射镜将所述漫反射光线按照预置角度反射至所述成像单元。The plane mirror reflects the diffuse reflection light into the half mirror, and the half mirror reflects the diffuse reflection light to the imaging unit according to a preset angle.

进一步地,所述可变焦镜头组包括若干液体镜头。Further, the variable focus lens group includes several liquid lenses.

进一步地,所述成像单元包括成像透镜组和图像传感器CCD;Further, the imaging unit includes an imaging lens group and an image sensor CCD;

所述漫反射光线经过所述成像透镜组后,入射至所述图像传感器CCD进行成像。After the diffusely reflected light passes through the imaging lens group, it enters the image sensor CCD for imaging.

本发明与现有技术相比,有益效果在于:本发明实施例通过光路调整单元将投影单元产生的平行光入射到数字微镜装置,该数字微镜装置对该平行光进行反射,得到的反射光包含互不干扰或者干扰少的光线,该反射光经可变焦镜头组后投射到待测量物,待测量物产生的漫反射光线经该可变焦镜头组后发射到数字微镜装置,数字微镜装置将漫反射光线反射到光路调整单眼,经光路调整单元后的漫反射光线将入射至成像单元进行成像。本发明实施例根据数字微镜装置可编程控制微镜片反射和可变焦镜头组变焦速度快的特性,将传统共焦三维测量与数字微镜装置、可变焦镜头组相结合,构建同轴显微的三维扫描装置,利用对数字微镜装置进行编码实现同时对多个点进行探测,结合可变焦镜头组中镜头焦距和深度位置的对应关系,重建三维面型,提高了扫描速率,比现有技术提供的装置具有更高扫描速度和精度。Compared with the prior art, the present invention has the beneficial effects that: in the embodiment of the present invention, the parallel light generated by the projection unit is incident on the digital micromirror device through the optical path adjustment unit, and the digital micromirror device reflects the parallel light, and the obtained reflection The light includes light that does not interfere with each other or has little interference. The reflected light is projected to the object to be measured after passing through the zoom lens group, and the diffuse reflection light generated by the object to be measured is transmitted to the digital micromirror device after passing through the zoom lens group. The mirror device reflects the diffuse reflection light to the optical path adjustment monocular, and the diffuse reflection light after passing through the optical path adjustment unit will enter the imaging unit for imaging. The embodiments of the present invention combine the traditional confocal three-dimensional measurement with the digital micromirror device and the variable focus lens group to construct a coaxial The 3D scanning device uses the coding of the digital micromirror device to detect multiple points at the same time, and combines the corresponding relationship between the focal length and the depth position of the lens in the variable focus lens group to reconstruct the 3D surface shape and improve the scanning rate. Compared with the existing The device provided by the technology has higher scanning speed and accuracy.

附图说明Description of drawings

图1是本发明实施例提供的一种基于数字微镜装置编码的三维扫描装置的结构示意图;Fig. 1 is a schematic structural diagram of a three-dimensional scanning device based on digital micromirror device coding provided by an embodiment of the present invention;

图2是本发明实施例提供的一种基于数字微镜装置编码的三维扫描装置的详细结构示意图;FIG. 2 is a schematic diagram of a detailed structure of a three-dimensional scanning device based on digital micromirror device coding provided by an embodiment of the present invention;

图3a是本发明实施例提供的待测量物处于离焦点位置的示意图;Fig. 3a is a schematic diagram of an object to be measured at a defocused position provided by an embodiment of the present invention;

图3b是本发明实施例提供的待测量物处于焦点位置的示意图;Fig. 3b is a schematic diagram of an object to be measured at a focus position provided by an embodiment of the present invention;

图3c是本发明实施例提供的待测量物处于离焦点位置的示意图。Fig. 3c is a schematic diagram of an object to be measured at a defocused position provided by an embodiment of the present invention.

具体实施方式Detailed ways

为了使本发明的目的、技术方案及优点更加清楚明白,以下结合附图及实施例,对本发明进行进一步详细说明。应当理解,此处所描述的具体实施例仅仅用以解释本发明,并不用于限定本发明。In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

图1示出了本发明实施例提供的一种基于数字微镜装置编码的三维扫描装置,包括投影单元101、光路调整单元102、数字微镜装置103、可变焦镜头组104和成像单元105,数字微镜装置103和成像单元105的位置成共轭关系,其中:FIG. 1 shows a three-dimensional scanning device based on a digital micromirror device code provided by an embodiment of the present invention, including a projection unit 101, an optical path adjustment unit 102, a digital micromirror device 103, a zoom lens group 104, and an imaging unit 105. The positions of the digital micromirror device 103 and the imaging unit 105 are in a conjugate relationship, wherein:

投影单元101,用于产生平行光,并将所述平行光透射到光路调整单元102;a projection unit 101, configured to generate parallel light, and transmit the parallel light to an optical path adjustment unit 102;

光路调整单元102,用于对所述平行光进行光路调整,使得光路调整后的平行光按照预置角度入射至数字微镜装置103;The optical path adjustment unit 102 is configured to adjust the optical path of the parallel light, so that the parallel light after the optical path adjustment is incident on the digital micromirror device 103 according to a preset angle;

数字微镜装置103,用于对所述平行光进行反射,将反射光投射至所述可变焦镜头组104,所述反射光中包含有互不干扰或者干扰少的光线;The digital micromirror device 103 is used to reflect the parallel light, and project the reflected light to the zoom lens group 104, and the reflected light includes light that does not interfere with each other or has little interference;

可变焦镜头组104,用于将所述反射光进行聚焦后照射至待测量物,以在待测量物的表面产生漫反射光线;还用于收集所述漫反射光线,将所述漫反射光线透射至数字微镜装置103;The variable focus lens group 104 is used to irradiate the object to be measured after focusing the reflected light to generate diffuse reflection light on the surface of the object to be measured; it is also used to collect the diffuse reflection light and convert the diffuse reflection light to the surface of the object to be measured. transmitted to the digital micromirror device 103;

数字微镜装置103,还用于将所述漫反射光线反射至光路调整单元102,所述漫反射光线经光路调整单元102进行光路调整后入射至成像单元105;The digital micromirror device 103 is also used to reflect the diffuse reflection light to the optical path adjustment unit 102, and the diffuse reflection light is incident to the imaging unit 105 after the optical path adjustment by the optical path adjustment unit 102;

成像单元105,用于根据所述漫反射光线进行成像。The imaging unit 105 is configured to perform imaging according to the diffusely reflected light.

进一步地,图2示出了本发明实施例提供的三维扫描装置的具体结构,其中:Further, Fig. 2 shows the specific structure of the three-dimensional scanning device provided by the embodiment of the present invention, wherein:

投影单元101包括投影光源LS、第一透镜LEN1和第二透镜LEN2,光路调整单元12包括半透半反镜M1和平面镜M2,可变焦镜头组104包括若干液体镜头,成像单元105包括成像透镜组LENS和图像传感器CCD;The projection unit 101 includes a projection light source LS, a first lens LEN1 and a second lens LEN2, the optical path adjustment unit 12 includes a half-mirror M1 and a plane mirror M2, the zoom lens group 104 includes several liquid lenses, and the imaging unit 105 includes an imaging lens group LENS and image sensor CCD;

投影光源LS,用于产生预置的光线,所述预置的光线经第一透镜LEN1和第二透镜LEN2后形成平行光,所述平行光穿过半透半反镜M1后透射到平面镜M2,平面镜M2将所述平行光按照预置角度反射至数字微镜装置DMD,平面镜M2将所述漫反射光线反射入半透半反射镜M1,半透半反射镜M1将所述漫反射光线按照预置角度反射至成像单元105。所述漫反射光线经过成像透镜组LENS后,入射至图像传感器CCD进行成像。The projection light source LS is used to generate preset light, and the preset light forms parallel light after passing through the first lens LEN1 and the second lens LEN2, and the parallel light passes through the half mirror M1 and then transmits to the plane mirror M2, The plane mirror M2 reflects the parallel light to the digital micromirror device DMD according to a preset angle, and the plane mirror M2 reflects the diffuse reflection light into the half mirror M1, and the half mirror M1 reflects the diffuse reflection light according to a preset angle. It is reflected to the imaging unit 105 at an angle. After the diffusely reflected light passes through the imaging lens group LENS, it enters the image sensor CCD for imaging.

为了实现对显微物体表面面形的高精度测量,图2示出的三维扫描装置中,增加了吸光装置1和吸光装置2,图像传感器CCD和数字微镜装置DMD的位置成共轭关系,投影单元101投出平行光,穿过半透半反镜M1投射到平面镜M2上,平面镜M2将平行光反射到数字微镜装置DMD上,通过对数字微镜装置DMD的编码,使得数字微镜装置DMD将多个互不干扰或者干扰较小的光线反射后,经过可变焦镜头组104射到待测量物的物体表面,而被数字微镜装置DMD反射的另一个方向上的光则被吸光装置2所吸收。待测量物的物体表面经过漫反射,漫反射光线经过可变焦镜头组104后经过DMD的反射,最终被图像传感器CCD捕获,得到记录的图像。通过可变焦镜头组104的焦距变化可以获得多个层析图,物体表面位置和漫反射如图3a至图3c所示,待测量物的物体上的点只有处在焦点位置上,物体的漫反射通过可变焦镜头组104后,被数字微镜装置DMD反射到图像传感器CCD的光最多,图像传感器CCD捕获到的该点的光强最大。通过事前对可变焦镜头组104中液体镜头的焦距变化和深度关系的标定,从而获得镜头焦距和深度的映射关系,结合图像传感器CCD上获取的光强最大的点,可以得到具有深度信息三维空间点坐标,最终求取三维点云数据。In order to achieve high-precision measurement of the surface shape of microscopic objects, in the three-dimensional scanning device shown in Figure 2, light absorbing device 1 and light absorbing device 2 are added, and the positions of the image sensor CCD and the digital micromirror device DMD are in a conjugate relationship. The projection unit 101 projects parallel light, passes through the half-mirror M1 and projects onto the plane mirror M2, and the plane mirror M2 reflects the parallel light onto the digital micromirror device DMD, and by encoding the digital micromirror device DMD, the digital micromirror device After the DMD reflects a plurality of light rays that do not interfere with each other or have less interference, they are shot to the object surface of the object to be measured through the zoom lens group 104, and the light in another direction reflected by the digital micromirror device DMD is absorbed by the light absorbing device. 2 absorbed. The surface of the object to be measured is diffusely reflected, and the diffusely reflected light passes through the zoom lens group 104 and then is reflected by the DMD, and is finally captured by the image sensor CCD to obtain a recorded image. Multiple tomograms can be obtained by changing the focal length of the variable focus lens group 104. The position and diffuse reflection of the object surface are shown in Figures 3a to 3c. After being reflected by the variable focus lens group 104, the light reflected by the digital micromirror device DMD to the image sensor CCD is the most, and the light intensity at this point captured by the image sensor CCD is the largest. By pre-calibrating the focal length change and depth relationship of the liquid lens in the variable focus lens group 104, the mapping relationship between the lens focal length and depth is obtained, and combined with the point with the highest light intensity obtained on the image sensor CCD, a three-dimensional space with depth information can be obtained Point coordinates, and finally obtain 3D point cloud data.

本发明实施例将数字微镜装置DMD和共焦三维测量相结合,通过调节可变焦镜头组中的液体镜头能够对多个点进行扫描探测,不仅提高了探测速度,还可以针对不同需求调整点云密度。本发明实施例使用数字微镜装置DMD反射光线替代了点光源和共轭针孔,去除了点光源和针孔中心不在同一直线上所带来的误差。进一步地,数字微镜装置DMD的像素大小仅有几个微米,保证了测量的精度,而使用包含液体镜头的可变焦镜头组的焦距变化代替透镜移动,提高了扫描速度。在具体使用过程中,采用彩色图像传感器CCD可以同时获取牙齿表面的纹理信息,从而进行更深一步的处理。The embodiment of the present invention combines the digital micromirror device DMD with confocal three-dimensional measurement, and can scan and detect multiple points by adjusting the liquid lens in the variable focus lens group, which not only improves the detection speed, but also adjusts the points according to different needs cloud density. In the embodiment of the present invention, the reflected light of the digital micromirror device DMD is used to replace the point light source and the conjugate pinhole, and the error caused by the center of the point light source and the pinhole not being on the same straight line is eliminated. Furthermore, the pixel size of the digital micromirror device DMD is only a few microns, which ensures the accuracy of the measurement, and uses the focal length change of the variable focus lens group including the liquid lens to replace the lens movement, which improves the scanning speed. In the specific use process, the color image sensor CCD can simultaneously obtain the texture information of the tooth surface, so as to carry out further processing.

以上所述仅为本发明的较佳实施例而已,并不用以限制本发明,凡在本发明的精神和原则之内所作的任何修改、等同替换和改进等,均应包含在本发明的保护范围之内。The above descriptions are only preferred embodiments of the present invention, and are not intended to limit the present invention. Any modifications, equivalent replacements and improvements made within the spirit and principles of the present invention shall be included in the protection of the present invention. within range.

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