技术领域technical field
本发明属于微纳光学、光学聚焦以及衍射光学等领域，具体涉及一种二值相位的远场超衍射三维空心焦斑平面聚焦器件。The invention belongs to the fields of micro-nano optics, optical focusing, diffractive optics, etc., and in particular relates to a binary phase far-field super-diffraction three-dimensional hollow focal spot plane focusing device.
背景技术Background technique
由于衍射极限制约，传统光学系统分辨率无法突破理论极限0.5λ/NA(其中λ为波长，NA为光学系统数值孔径)。光学器件衍射极限严重制约了超高分辨光学系统的研制和发展。空心聚焦焦斑可用于光镊、超分辨显微、粒子操控等，受到人们越来越多的重视。在受激发射损耗显微技术(Stimulated Emission Depletion Microscopy，简记为STED)应用中，三维空心焦斑作为受激发射损耗显微的损耗光，可改善远场超分辨显微成像的分辨率。Due to the restriction of the diffraction limit, the resolution of traditional optical systems cannot break through the theoretical limit of 0.5λ/NA (where λ is the wavelength and NA is the numerical aperture of the optical system). The diffraction limit of optical devices severely restricts the research and development of ultra-high resolution optical systems. Hollow focal spots can be used in optical tweezers, super-resolution microscopy, particle manipulation, etc., and have received more and more attention. In the application of Stimulated Emission Depletion Microscopy (STED for short), the three-dimensional hollow focal spot serves as the depleted light of the STED microscope, which can improve the resolution of far-field super-resolution microscopy imaging.
(1)目前实现三维空心焦斑的技术手段，主要有采用拉盖尔-高斯径向偏振光，也称为double-ring-shaped径向偏振光(R-TEM11*mode beam)入射，通过高数值孔径的物镜聚焦获得了三维空心焦斑；采用圆偏振光和0～2π的涡旋相位板形成三维空心焦斑，该方法所使用的0～2π的涡旋相位板制备难度较大；利用0/π四象限相位板聚焦，结合径向偏振光在显微物镜的附近得到三维空心焦斑，然而，该方法需要精确的光路调节；相关文献有：(1) The current technical means to realize the three-dimensional hollow focal spot mainly adopts Laguerre-Gaussian radially polarized light, also known as double-ring-shaped radially polarized light (R-TEM11 *mode beam) incident, through The high numerical aperture objective lens is focused to obtain a three-dimensional hollow focal spot; the three-dimensional hollow focal spot is formed by using circularly polarized light and a 0-2π vortex phase plate, and the preparation of the 0-2π vortex phase plate used in this method is relatively difficult; Using 0/π four-quadrant phase plate focusing, combined with radially polarized light to obtain a three-dimensional hollow focal spot near the microscope objective lens, however, this method requires precise optical path adjustment; related literature:
●Y.Kozawz and S.Sato,“Focusing property of a double-ring-shapedradially polarized beam,”Opt,Lett.Vol.31,pp820-822(2006).●Y. Kozawz and S. Sato, "Focusing property of a double-ring-shaped radially polarized beam," Opt, Lett. Vol.31, pp820-822 (2006).
●Hell，“Far-field optical nanoscopy,Single Molecule Spectroscopy inChemistry”,Physics and BiologyVol.96,pp365-398(2010).●Hell, "Far-field optical nanoscopy, Single Molecule Spectroscopy in Chemistry", Physics and Biology Vol.96, pp365-398 (2010).
●Yi Xue,Cuifang Kuang,Xiang Hao,Zhaotai Gu and Xu Liu,“A method forgenerating a three-dimensional dark spot using a radially polarized beam,”Journal of optics.Vol.13,pp,125704-125713(2011).●Yi Xue, Cuifang Kuang, Xiang Hao, Zhaotai Gu and Xu Liu, “A method forgenerating a three-dimensional dark spot using a radially polarized beam,” Journal of optics. Vol.13, pp, 125704-125713 (2011).
(2)根据现有的采用高数值孔径物镜产生三维空心焦斑的方法，其物镜体积大、不利于集成(如文献：Y.Kozawz and S.Sato,“Focusing property ofa double-ring-shapedradially polarized beam,”Opt,Lett.Vol.31,pp820-822(2006))。(2) According to the existing method of using a high numerical aperture objective lens to generate a three-dimensional hollow focal spot, the objective lens has a large volume and is not conducive to integration (such as literature: Y.Kozawz and S.Sato, "Focusing property of a double-ring-shaped radially polarized beam," Opt, Lett. Vol. 31, pp820-822 (2006)).
(3)根据现有的基于4π聚焦系统的三维空心焦斑产生方法，需要依赖于两个高数值孔径的传统物镜，且需要对光路进行精细的对准，大大限制了其应用领域(如文献：BokorN,&Davidson N.Generation of a hollow hollow spherical spot by 4pi focusing ofa radially polarized Laguerre-Gaussian beam.Opt.Lett.Vol.31,149-151(2006))。(3) According to the existing three-dimensional hollow focal spot generation method based on the 4π focusing system, it needs to rely on two traditional objective lenses with high numerical aperture, and requires fine alignment of the optical path, which greatly limits its application field (such as literature : Bokor N, & Davidson N. Generation of a hollow hollow spherical spot by 4pi focusing of a radially polarized Laguerre-Gaussian beam. Opt. Lett. Vol.31, 149-151 (2006)).
发明内容Contents of the invention
本发明的目的是针对现有技术的不足，提供一种远场超衍射三维空心焦斑平面聚焦器件，该器件是基于同心介质圆环阵列的远场超衍射三维空心焦斑平面聚焦器件；入射光束从基底一侧垂直入射，入射光束光轴与远场超衍射三维空心焦斑平面聚焦器件同轴；所述入射光束为柱矢量光束(角向偏振光与径向偏振光的线性叠加态)，光束波长为λ，光束偏振；所述入射柱矢量光束，可由线偏振高斯光束通过S玻片产生，通过控制线偏振高斯光束的偏振方向，可以调整柱矢量光束中角向偏振分量与径向偏振分量的比例AP/RP。通过控制介质圆环结构单元的厚度实现对入射光的相位调控；利用由介质圆环结构单元构成的同心介质圆环阵列，实现远场超衍射三维空心焦斑所需要的聚集器件相位空间分布，从而实现远场超衍射三维空心焦斑。The purpose of the present invention is to address the deficiencies of the prior art, to provide a far-field super-diffraction three-dimensional hollow focal spot plane focusing device, which is a far-field super-diffraction three-dimensional hollow focal spot plane focusing device based on a concentric medium ring array; The beam is incident vertically from one side of the substrate, and the optical axis of the incident beam is coaxial with the far-field superdiffraction three-dimensional hollow focal spot plane focusing device; the incident beam is a cylindrical vector beam (linear superposition state of angularly polarized light and radially polarized light) , the wavelength of the beam is λ, and the beam is polarized; the incident cylindrical vector beam can be generated by a linearly polarized Gaussian beam through an S glass plate, and by controlling the polarization direction of the linearly polarized Gaussian beam, the angular polarization component and the radial polarization component in the cylindrical vector beam can be adjusted. The ratio AP/RP of the polarization component. The phase regulation of the incident light is realized by controlling the thickness of the dielectric ring structural unit; the concentric dielectric ring array composed of the dielectric ring structural unit is used to realize the phase space distribution of the gathering device required for the far-field super-diffraction three-dimensional hollow focal spot, In this way, the far-field super-diffraction three-dimensional hollow focal spot is realized.
本发明通过以下技术方案来加以实现：The present invention is realized through the following technical solutions:
一种远场超衍射三维空心焦斑平面聚焦器件，其包括基底以及位于基底上的同心介质圆环阵列。A far-field super-diffraction three-dimensional hollow focal spot plane focusing device includes a base and a concentric medium ring array on the base.
所述同心介质圆环阵列是由N个同心的介质圆环结构单元构成，N为正整数。所述介质圆环结构单元是中心半径为ri、宽度为w、厚度为ti、折射率为nd的圆环形介质结构，i表示从中心向外第i个同心介质环，第i个介质圆环形结构单元的厚度ti＝[ψ(ri)×λ]/2π(nd-n0)，ψ(ri)是远场超衍射三维空心焦斑平面聚焦器件相位空间分布，n0为出射方介质折射率，nd为介质材料D的折射率。The concentric dielectric ring array is composed of N concentric dielectric ring structural units, where N is a positive integer. The dielectric ring structural unit is a ring-shaped dielectric structure with a central radius of ri , a width of w, a thickness of ti , and a refractive index of nd. i represents the i-th concentric dielectric ring from the center outward, and the i-th Thickness ti of a dielectric ring structure unit =[ψ(ri )×λ]/2π(nd -n0 ), ψ(ri ) is the phase space of the far-field superdiffraction three-dimensional hollow focal spot plane focusing device distribution, n0 is the refractive index of the outgoing medium, and nd is the refractive index of the medium material D.
采用所述同心介质圆环阵列形成的远场超衍射三维空心焦斑平面聚焦器件半径为Rlens＝N×w，其光斑聚焦光场呈三维空心焦斑分布，分布状态为：焦斑中心光场最低，甚至接近于零；以焦斑中心强度最低点为中心，沿各方向，强度先增大，后减小为零；其焦斑中心强度最低点处，与光轴垂直的平面内，光强度分布呈空心圆环状，其内径的半高全宽小于光学衍射极限0.5λ/NA，其中λ是入射波长，NA＝n0×sin(atan(Rlens/f))为超衍射三维空心焦斑平面聚焦器件的数值孔径，其中n0为出射方介质折射率，sin()和atan()分别为正弦函数和反正切函数，f为聚焦器件焦距。The far-field super-diffraction three-dimensional hollow focal spot plane focusing device formed by the concentric medium ring array has a radius of Rlens =N×w, and its spot focusing light field is distributed in a three-dimensional hollow focal spot, and the distribution state is: focal spot center light The field is the lowest, even close to zero; with the lowest point of the central intensity of the focal spot as the center, along all directions, the intensity first increases and then decreases to zero; at the lowest point of the central intensity of the focal spot, in a plane perpendicular to the optical axis, The light intensity distribution is in the shape of a hollow ring, and the full width at half maximum of its inner diameter is less than the optical diffraction limit of 0.5λ/NA, where λ is the incident wavelength, and NA=n0 ×sin(atan(Rlens /f)) is the super-diffraction three-dimensional hollow focus The numerical aperture of the spot plane focusing device, where n0 is the refractive index of the exit medium, sin() and atan() are the sine function and arctangent function respectively, and f is the focal length of the focusing device.
在本发明中，通过调整介质圆环结构厚度ti，获得不同出射光相位出射光相位可为0，对应ti＝0，即在基底上表面半径ri处不放置介质圆环结构单元；出射光相位可不为0，对应即在基底上表面半径ri处放置厚度为ti介质圆环结构单元。本发明确定介质圆环厚度ti的方法如下：In the present invention, by adjusting the thickness ti of the medium ring structure, different outgoing light phases can be obtained Outgoing light phase It can be 0, corresponding to ti =0, that is, no medium ring structural unit is placed at the radius ri of the upper surface of the substrate; the phase of the outgoing light Can not be 0, corresponding to That is, a dielectric ring structure unit with a thickness ti is placed at the radius ri on the upper surface of the substrate. The present invention determines the method for medium annulus thicknessti as follows:
(1)对于选定的介质材料D，为实现远场超衍射三维空心焦斑平面聚焦器件相位空间分布ψ(ri)，介质圆环结构厚度由公式ti＝[ψ(ri)×λ]/2π(nd-n0)确定，其中λ是入射波长，nd为介质材料D的折射率，n0为出射方介质折射率；(1) For the selected dielectric material D, in order to realize the phase space distribution ψ(ri ) of the far-field superdiffraction three-dimensional hollow focal spot plane focusing device, the thickness of the dielectric ring structure is given by the formula ti =[ψ(ri )× λ]/2π(nd -n0 ), where λ is the incident wavelength, nd is the refractive index of the medium material D, and n0 is the refractive index of the outgoing medium;
(2)根据远场超衍射三维空心焦斑平面聚焦器件所要求的相位空间分布ψ(ri)，确定中心半径为ri位置处的介质圆环结构厚度ti，由此在基底上形成对应的介质同心圆环阵列，实现远场超衍射三维空心焦斑平面聚焦器件。(2) According to the phase space distribution ψ(ri ) required by the far-field superdiffraction three-dimensional hollow focal spot plane focusing device, determine the thickness ti of the dielectric ring structure at the position where the central radius is ri , and thus form a The corresponding medium concentric ring array realizes the far-field super-diffraction three-dimensional hollow focal spot plane focusing device.
本发明所述的远场超衍射三维空心焦斑平面聚焦器件，其基底是折射率为ns，厚度为ts的介质材料S，对入射光波长λ有较高透过率，且上下表面平行。The far-field super-diffraction three-dimensional hollow focal spot plane focusing device of the present invention, its substrate is a dielectric materialS with a refractive index of ns and a thickness ofts , which has a relatively high transmittance to the incident light wavelength λ, and the upper and lower surfaces parallel.
本发明所述的远场超衍射三维空心焦斑平面聚焦器件，在同心介质圆环阵列中，相邻介质圆环结构单元厚度不同，或者若干个相邻的介质圆环结构单元具有相同厚度，形成一个较宽的介质圆环结构。In the far-field superdiffraction three-dimensional hollow focal spot plane focusing device of the present invention, in the concentric dielectric ring array, the adjacent dielectric ring structural units have different thicknesses, or several adjacent dielectric ring structural units have the same thickness, Form a wider medium ring structure.
本发明所述的远场超衍射三维空心焦斑平面聚焦器件，入射光束从基底一侧垂直入射，入射光束光轴与远场超衍射三维空心焦斑平面聚焦器件同轴；所述入射光束为柱矢量光束(角向偏振光与径向偏振光的线性叠加态)，光束波长为λ，光束偏振；所述入射柱矢量光束，可由线偏振高斯光束通过S玻片产生，通过控制线偏振高斯光束的偏振方向，可以调整柱矢量光束中角向偏振分量与径向偏振分量的比例AP/RP。In the far-field super-diffraction three-dimensional hollow focal spot plane focusing device of the present invention, the incident beam is incident vertically from one side of the substrate, and the optical axis of the incident beam is coaxial with the far-field super-diffraction three-dimensional hollow focal spot plane focusing device; the incident beam is Cylindrical vector beam (linear superposition state of angularly polarized light and radially polarized light), the wavelength of the beam is λ, and the beam is polarized; the incident cylindrical vector beam can be generated by a linearly polarized Gaussian beam through an S glass plate, by controlling the linearly polarized Gaussian The polarization direction of the beam can adjust the ratio AP/RP of the angular polarization component and the radial polarization component in the cylindrical vector beam.
本发明所述的远场超衍射三维空心焦斑平面聚焦器件是一种平面聚焦器件，具有厚度薄、质量轻、厚度超薄的特点；聚焦器件半径为Rlens＝N×w，其中N为介质圆环结构单元的个数，w为介质圆环结构单元的宽度；可以在设计中，通过增大聚焦器件数值孔径NA或放大空心焦斑旁瓣比率(外围最强旁瓣与中央峰值强度之比值)，将空心焦斑内径尺寸进一步减小。The far-field superdiffraction three-dimensional hollow focal spot plane focusing device described in the present invention is a plane focusing device, which has the characteristics of thin thickness, light weight and ultra-thin thickness; the radius of the focusing device is Rlens = N × w, where N is The number of the dielectric ring structure unit, w is the width of the medium ring structure unit; in the design, by increasing the numerical aperture NA of the focusing device or enlarging the side lobe ratio of the hollow focal spot (the strongest side lobe in the periphery and the central peak intensity ratio), the inner diameter of the hollow focal spot is further reduced.
以下详细分析说明采用本发明所述的实现超衍射三维空心焦斑平面聚焦器件的优势：The following detailed analysis illustrates the advantages of using the plane focusing device for realizing super-diffraction three-dimensional hollow focal spot according to the present invention:
图1给出了远场超衍射远场超衍射三维空心焦斑平面聚焦器件结构示意图。三维空心焦斑平面聚焦器件由基底和介质圆环结构单元组成平面聚焦器件，具有厚度薄、质量轻和便于集成等优点。Figure 1 shows a schematic diagram of the far-field super-diffraction far-field super-diffraction three-dimensional hollow focal spot plane focusing device. The three-dimensional hollow focal spot plane focusing device is composed of a substrate and a dielectric ring structure unit, and has the advantages of thin thickness, light weight and easy integration.
图2给出了远场超衍射远场超衍射三维空心焦斑平面聚焦器件光学聚焦示意图。柱矢量光束从三维空心焦斑平面聚焦器件基底一侧垂直入射，柱矢量光束的光轴与聚焦器件的光轴同轴；入射光束透射三维空心焦斑平面聚焦器件后，在器件焦距处形成超衍射的三维空心焦斑。所述远场超衍射三维空心焦斑平面聚焦器件，可通过调整角向偏振态分量与径向偏振分量的比例，压缩焦平面内中心强度与主瓣峰值强度之比值，并提高空心焦斑空间光场分布的均匀性，提高三维空心焦斑的空间约束能力。Fig. 2 shows a schematic diagram of the optical focusing of the far-field super-diffraction far-field super-diffraction three-dimensional hollow focal spot plane focusing device. The cylindrical vector beam is incident vertically from the substrate side of the three-dimensional hollow focal spot plane focusing device, and the optical axis of the cylindrical vector beam is coaxial with the optical axis of the focusing device; after the incident beam transmits the three-dimensional hollow focal spot plane focusing device, a super Diffractive 3D hollow focal spot. The far-field superdiffraction three-dimensional hollow focal spot plane focusing device can compress the ratio of the central intensity in the focal plane to the peak intensity of the main lobe by adjusting the ratio of the angular polarization state component to the radial polarization component, and improve the space of the hollow focal spot. The uniformity of the light field distribution improves the spatial constraint ability of the three-dimensional hollow focal spot.
表1.基于二值相位的远场超衍射三维空心焦斑平面聚焦器件相位分布Table 1. Phase distribution of far-field superdiffraction three-dimensional hollow focal spot plane focusing device based on binary phase
表2.柱矢量光束(不同角向偏振分量与径向偏振分量振幅比值)入射条件下，远场超衍射三维空心焦斑聚Table 2. Under the incident conditions of cylindrical vector beams (amplitude ratios of different angular polarization components and radial polarization components), far-field super-diffraction three-dimensional hollow focal spots focus
焦器件产生的空心焦斑在焦平面的光强度分布主要参数The main parameters of the light intensity distribution of the hollow focal spot produced by the focal device at the focal plane
以二值相位调控为例，即介质圆环结构单元的厚度只有两种取值0和1，对应的相位为0和π，给出了远场超衍射三维空心焦斑平面聚焦器件的示例。Taking binary phase control as an example, that is, the thickness of the dielectric ring structural unit has only two values of 0 and 1, and the corresponding phases are 0 and π. An example of a far-field superdiffraction three-dimensional hollow focal spot plane focusing device is given.
表1给出了基于二值相位的远场超衍射三维空心焦斑平面聚焦器件的相位空间分布ψ(ri)沿径向分布的十六进制表示，将十六进制表示转换为二进制表示后，其第i位二进制值给出了中心半径为ri、宽度为w的第i个介质圆环结构单元的相位(0或π)。Table 1 gives the hexadecimal representation of the phase space distribution ψ(ri ) along the radial distribution of the far-field superdiffraction three-dimensional hollow focal spot plane focusing device based on the binary phase, and convert the hexadecimal representation into binary After being expressed, its i-th binary value gives the phase (0 or π) of the i-th dielectric ring structural unit whose center radius is ri and width is w.
表2给出了基于二值相位的远场超衍射三维空心焦斑平面聚焦器件，在角向偏振分量与径向偏振分量振幅比值分别为0、0.6、0.8和1.0的柱矢量光束入射情况下，聚焦器件所产生的三维空心焦斑在焦平面上光强分布的主要参数：内径半高全宽、峰峰间距、中心强度/峰值强度、最大旁瓣强度/峰值强度和峰值强度。从表中参数可知，随着角向偏振态与径向偏振态分量振幅比值的增加，半高全宽仅增加了0.009λ，但仍低于衍射极限0.551λ(0.5λ/NA)，而峰峰间距保持不变；中心强度与峰值强度比值从16.25％下降至8.02％，改善了光学约束能力；横向最大旁瓣强度与峰值强度比值从41％下降至33％。横向峰值与轴向(z方向，即光轴方向)峰值(见图6)的比值从16.07％提升至32.56％。因此，可通过调整角向偏振态分量与径向偏振分量的比例，压缩焦平面内中心强度与主瓣峰值强度之比值，并提高空心焦斑空间光场分布的均匀性，提高三维空心焦斑的光学约束能力。Table 2 shows the far-field superdiffraction three-dimensional hollow focal spot plane focusing device based on the binary phase, under the incident conditions of the cylindrical vector beam whose amplitude ratios of the angular polarization component and the radial polarization component are 0, 0.6, 0.8 and 1.0 , the main parameters of the light intensity distribution on the focal plane of the three-dimensional hollow focal spot produced by the focusing device: the full width at half maximum of the inner diameter, the peak-to-peak distance, the central intensity/peak intensity, the maximum sidelobe intensity/peak intensity and the peak intensity. It can be seen from the parameters in the table that with the increase of the amplitude ratio of the angular polarization state and the radial polarization state component, the full width at half maximum only increases by 0.009λ, but it is still lower than the diffraction limit of 0.551λ (0.5λ/NA), while the peak-to-peak spacing Remains unchanged; the central intensity-to-peak intensity ratio decreases from 16.25% to 8.02%, improving optical confinement; the lateral maximum sidelobe intensity-to-peak intensity ratio decreases from 41% to 33%. The ratio of the lateral peak value to the axial (z direction, ie optical axis direction) peak value (see FIG. 6 ) increases from 16.07% to 32.56%. Therefore, by adjusting the ratio of the angular polarization state component to the radial polarization component, the ratio of the central intensity in the focal plane to the peak intensity of the main lobe can be compressed, and the uniformity of the spatial light field distribution of the hollow focal spot can be improved, and the three-dimensional hollow focal spot can be improved. optical confinement capabilities.
上述结果可见，本发明提供了一种远场超衍射远场超衍射三维空心焦斑平面聚焦器件，通过调整介质圆环结构单元的厚度实现相位调控，在透明基底上，采用介质圆环结构单元形成同心介质圆环阵列，实现远场超衍射三维空心焦斑平面聚焦器件所需要的相位空间分布；采用柱矢量光束作为入射光束(角向偏振光与径向偏振光的线性叠加态振态)从器件基底一端垂直入射器件，在平面聚焦器件焦距处形成三维空心焦斑，空心焦斑在焦平面内的横向内径半高全宽小于衍射极限；通过调整采用柱矢量光束中角向偏振分量与径向偏振分量的振幅比值，可进一步压缩焦平面内空心焦斑中心强度与主瓣峰值之比值；该三维空心焦斑平面聚焦器件具有加工工艺简单、厚度薄、质量轻和易于集成等优点。From the above results, it can be seen that the present invention provides a far-field super-diffraction far-field super-diffraction three-dimensional hollow focal spot plane focusing device, which realizes phase regulation by adjusting the thickness of the dielectric ring structural unit. On a transparent substrate, the dielectric ring structural unit is used Form a concentric medium ring array to realize the phase space distribution required by the far-field superdiffraction three-dimensional hollow focal spot plane focusing device; use a cylindrical vector beam as the incident beam (linear superposition of angularly polarized light and radially polarized light) The device is vertically incident from one end of the device substrate, and a three-dimensional hollow focal spot is formed at the focal length of the planar focusing device. The full width at half maximum of the inner diameter of the hollow focal spot in the focal plane is smaller than the diffraction limit; The amplitude ratio of the polarization component can further compress the ratio of the central intensity of the hollow focal spot in the focal plane to the peak value of the main lobe; the three-dimensional hollow focal spot plane focusing device has the advantages of simple processing technology, thin thickness, light weight and easy integration.
附图说明Description of drawings
图1是远场超衍射三维空心焦斑平面聚焦器件结构示意图；Figure 1 is a schematic diagram of the structure of a far-field superdiffraction three-dimensional hollow focal spot plane focusing device;
图2是远场超衍射三维空心焦斑平面聚焦器件聚焦示意图；Figure 2 is a schematic diagram of the focusing of a far-field superdiffraction three-dimensional hollow focal spot plane focusing device;
图3是在角向偏振分量与径向偏振分量振幅比值分别为0的柱矢量光束入射条件下，所产生三维空心焦斑在焦平面内的光场强度分布；Fig. 3 is the optical field intensity distribution of the three-dimensional hollow focal spot in the focal plane under the incident condition of the cylindrical vector beam whose amplitude ratio of the angular polarization component and the radial polarization component is 0 respectively;
图4是在角向偏振分量与径向偏振分量振幅比值分别为0、0.6、0.8和1.0的柱矢量光束入射条件下，远场超衍射三维空心焦斑平面聚焦器件所产生的三维空心焦斑在焦平面内光强度沿径向的分布；Figure 4 shows the three-dimensional hollow focal spot produced by the far-field super-diffraction three-dimensional hollow focal spot planar focusing device under the incident conditions of cylindrical vector beams with the amplitude ratios of the angular polarization component and the radial polarization component being 0, 0.6, 0.8 and 1.0 respectively The distribution of light intensity along the radial direction in the focal plane;
图5是在角向偏振分量与径向偏振分量振幅比值分别为0的柱矢量光束入射条件下，远场超衍射三维空心焦斑平面聚焦器件所产生的三维空心焦斑在传播面(xz面)内光强度分布；Figure 5 shows the three-dimensional hollow focal spot produced by the far-field superdiffraction three-dimensional hollow focal spot planar focusing device on the propagation plane (xz plane) under the condition that the amplitude ratio of the angular polarization component and the radial polarization component is 0 respectively. ) distribution of light intensity within;
图6是在角向偏振分量与径向偏振分量振幅比值分别为0、0.6、0.8和1.0的柱矢量光束入射条件下，远场超衍射三维空心焦斑平面聚焦器件所产生的三维空心焦斑光强度沿光轴的分布。Figure 6 shows the three-dimensional hollow focal spot produced by the far-field super-diffraction three-dimensional hollow focal spot planar focusing device under the incident conditions of the cylindrical vector beam with the amplitude ratios of the angular polarization component and the radial polarization component being 0, 0.6, 0.8 and 1.0 respectively The distribution of light intensity along the optical axis.
具体实施方式Detailed ways
以下结合附图对本发明的技术方案作进一步描述。The technical solution of the present invention will be further described below in conjunction with the accompanying drawings.
如图1所示，基于介质同心圆环结构远场超衍射三维空心焦斑平面聚焦器件包括基底1和介质圆环结构单元2构成的同心介质圆环阵列。As shown in FIG. 1 , the far-field superdiffraction three-dimensional hollow focal spot plane focusing device based on the dielectric concentric ring structure includes a concentric dielectric ring array composed of a substrate 1 and a dielectric ring structure unit 2 .
基底1是折射率为ns，厚度为ts的介质材料S，对入射光波长λ有较高透过率，且上下表面平行。The substrate 1 is a dielectric material S with a refractive index of ns and a thickness of ts , which has a relatively high transmittance to the incident light wavelength λ, and its upper and lower surfaces are parallel.
介质圆环结构单元2是位于基底上并紧贴基底上表面的圆环形介质结构，介质圆环结构单元2的中心半径为ri(i表示从中心向外第i个同心介质环，中心半径是指介质圆环内径和外径的平均值)、宽度为w、厚度为ti、折射率为nd，该结构对入射波长λ有较高透射率。通过调整介质圆环结构厚度ti，获得不同出射光相位出射光相位可为0，对应ti＝0，即在基底上表面半径ri处不放置介质圆环结构单元2；出射光相位可不为0，对应(其中n0为出射方介质折射率)，即在基底上表面半径ri处放置厚度为ti介质圆环结构单元2。The medium ring structure unit 2 is a ring-shaped medium structure located on the base and close to the upper surface of the base. The center radius of the medium ring structure unit 2 is ri (i represents the i-th concentric medium ring from the center outward, and the center The radius refers to the average value of the inner and outer diameters of the dielectric ring), the width is w, the thickness is ti , and the refractive index is nd . This structure has a relatively high transmittance to the incident wavelength λ. By adjusting the thickness ti of the dielectric ring structure, different outgoing light phases can be obtained Outgoing light phase It can be 0, corresponding to ti =0, that is, no medium ring structural unit 2 is placed at the radius ri of the upper surface of the substrate; the outgoing light phase Can not be 0, corresponding to (where n0 is the refractive index of the outgoing medium), that is, place a medium ring structure unit 2 with a thickness ti at the radius ri of the upper surface of the substrate.
同心介质圆环阵列由N个同心的介质圆环结构单元2构成，第i个介质圆环结构单元厚度为ti、中心半径ri、宽度为w，i＝1,...,N，N为正整数。同心介质圆环阵列包含出射光相位为0所对应的厚度为0的介质圆环结构单元2，还包含有出射光相位为(不为0)所对应的厚度为的介质圆环结构单元2。根据远场超衍射三维空心焦斑聚焦器件相位空间分布ψ(ri)，利用介质圆环结构单元的相位与介质厚度的关系，通过公式ti＝[ψ(ti)×λ]/2π(nd-n0)计算出第i个介质圆环形结构单元的厚度ti。采用所述同心介质圆环阵列，实现远场超衍射三维空心焦斑聚焦器件相位空间分布ψ(ri)，从而实现远场超衍射三维空心焦斑聚焦光场。The concentric dielectric ring array is composed of N concentric dielectric ring structural units 2, the thickness of the i-th dielectric ring structural unit is ti , the center radius ri , and the width is w, i=1,...,N, N is a positive integer. The concentric dielectric ring array includes the dielectric ring structural unit 2 with a thickness of 0 corresponding to the outgoing light phase of 0, and also includes the outgoing light phase of (not 0) the corresponding thickness is The medium torus structural unit 2 of . According to the phase space distribution ψ(ri ) of the far-field superdiffraction three-dimensional hollow focal spot focusing device, using the relationship between the phase of the dielectric ring structure unit and the thickness of the medium, the formula ti =[ψ(ti )×λ]/2π (nd -n0 ) Calculate the thickness ti of the i-th medium circular structure unit. The concentric medium ring array is used to realize the phase space distribution ψ(ri ) of the far-field super-diffraction three-dimensional hollow focal spot focusing device, thereby realizing the far-field super-diffraction three-dimensional hollow focal spot focusing light field.
以上超衍射三维空心焦斑平面聚焦器件，聚焦光斑光场呈三维空心焦斑分布(焦斑中心光场最低，甚至接近于零；以焦斑中心强度最低点为中心，沿各方向，强度先增大，后减小为零)；焦斑中心强度最低点处，与光轴垂直的平面内，光强度分布呈空心圆环状，其内径的半高全宽小于光学衍射极限0.5λ/NA，其中λ是入射波长，NA＝n0×sin(atan(Rlens/f))为超衍射三维空心焦斑平面聚焦器件的数值孔径，其中n0为出射端介质折射率，sin()和atan()分别为正弦函数和反正切函数，f为聚焦器件焦距，Rlens为聚焦器件半径。The above super-diffraction three-dimensional hollow focal spot plane focusing device, the focused spot light field presents a three-dimensional hollow focal spot distribution (the light field in the center of the focal spot is the lowest, even close to zero; centering on the lowest intensity point in the center of the focal spot, along each direction, the intensity first increase, and then decrease to zero); at the lowest point of the central intensity of the focal spot, in a plane perpendicular to the optical axis, the light intensity distribution is in the shape of a hollow ring, and the full width at half maximum of its inner diameter is less than the optical diffraction limit of 0.5λ/NA, where λ is the incident wavelength, NA=n0 ×sin(atan(Rlens /f)) is the numerical aperture of the superdiffraction three-dimensional hollow focal spot plane focusing device, where n0 is the refractive index of the medium at the exit end, sin() and atan( ) are the sine function and the arctangent function respectively, f is the focal length of the focusing device, and Rlens is the radius of the focusing device.
要实现以上的远场超衍射三维空心焦斑平面聚焦器件，需要具体确定材料和结构参数：To realize the above far-field superdiffraction three-dimensional hollow focal spot plane focusing device, it is necessary to specifically determine the material and structural parameters:
(1)基底材料的选择(1) Selection of base material
根据工作波长λ，选用材质透明、透射率高的介质材料作为基底。例如：对于工作波长λ＝632.8nm，可选用石英玻璃或蓝宝石玻璃作为基底材料。According to the working wavelength λ, a dielectric material with transparent material and high transmittance is selected as the substrate. For example: for the working wavelength λ=632.8nm, quartz glass or sapphire glass can be selected as the base material.
(2)介质圆环结构材料的选择(2) Selection of medium ring structure material
根据工作波长λ，选用材质透明、透射率高、折射率高的介质材料作为介质圆环结构单元的材料，折射率高的介质材料可减小介质圆环结构单元厚度。例如：对于工作波长λ＝632.8nm，可选用Si3N4作为介质圆环结构单元的材料。According to the working wavelength λ, a dielectric material with transparent material, high transmittance, and high refractive index is selected as the material of the dielectric ring structural unit. The dielectric material with high refractive index can reduce the thickness of the dielectric ring structural unit. For example: for the working wavelength λ=632.8nm, Si3 N4 can be selected as the material of the dielectric ring structure unit.
(3)介质圆环结构厚度的确定(3) Determination of the thickness of the dielectric ring structure
根据工作波长λ和介质材料D，为实现远场超衍射三维空心焦斑聚焦器件相位空间分布ψ(ri)，第i个介质圆环结构单元厚度由公式ti＝[ψ(ri)×λ]/2π(nd-n0)决定，其中λ是入射波长，nd为介质材料D的折射率，n0为出射端介质折射率；相位空间分布ψ(ri)可为0，对应ti＝0，即在基底对应位置ri处不放置介质圆环结构单元；出射光相位ψ(ri)可不为0，对应ti＝[ψ(ri)×λ]/2π(nd-n0)，即在基底对应位置ri处放置厚度为ti的介质圆环结构单元。According to the working wavelength λ and the dielectric material D, in order to realize the phase space distribution ψ(ri ) of the far-field superdiffraction three-dimensional hollow focal spot focusing device, the thickness of the i-th dielectric ring structural unit is given by the formula ti =[ψ(ri ) ×λ]/2π(nd -n0 ), where λ is the incident wavelength, nd is the refractive index of the dielectric material D, and n0 is the refractive index of the exit medium; the phase space distribution ψ(ri ) can be 0 , corresponding to ti =0, that is, no dielectric ring structural unit is placed at the corresponding position ri of the substrate; the phase of the outgoing light ψ(ri) may not be 0, corresponding to ti =[ψ(ri )×λ]/2π (nd -n0 ), that is, place a dielectric ring structure unit with a thickness ti at the position ri corresponding to the base.
下面进一步说明远场超衍射三维空心焦斑平面聚焦器件的设计：The following further explains the design of the far-field superdiffraction three-dimensional hollow focal spot plane focusing device:
首先，设定三维空心焦斑平面聚焦器件的结构参数和目标聚焦光场的参数(如器件的半径Rlens、焦距f、介质圆环单元的宽度w、三维空心焦斑横向内径半高全宽、三维空心焦斑轴向内径半高全宽、峰值强度等)，针对工作波长为λ的柱矢量光束，采用矢量角谱衍射计算方法(参见，陈刚*，温中泉，武志翔，光学超振荡与超振荡光学器件，物理学报(ActaPhys.Sin.)66(14)144205(2017))，计算入射场经过三维空心焦斑平面聚焦器件后在焦平面上的光场分布，并结合粒子群优化算法对三维空心焦斑平面聚焦器件的相位分布ψ(ri)进行优化设计，在所设定焦距处获得满足目标参数的三维空心焦斑。该计算方法参见E.T.F.Rogers,J.Lindberg,T.Roy,S.Savo,J.E.Chad,M.R.Dennis,and N.I.Zheludev,“Asuper-oscillatory lens optical microscope forsubwavelength imaging,”Nat.Mater.Vol.11,pp.432-435(2012)。First, set the structural parameters of the three-dimensional hollow focal spot plane focusing device and the parameters of the target focusing light field (such as the radius Rlens of the device, the focal length f, the width w of the medium ring unit, the full width at half maximum of the transverse inner diameter of the three-dimensional hollow focal spot, the three-dimensional Hollow focal spot axial inner diameter full width at half maximum, peak intensity, etc.), for cylindrical vector beams with a working wavelength of λ, the calculation method of vector angle spectrum diffraction is used (see, Chen Gang*, Wen Zhongquan, Wu Zhixiang, Optical Superoscillation and Superoscillatory Optical Devices, Acta Physics (ActaPhys.Sin.) 66(14)144205(2017)), calculate the light field distribution on the focal plane after the incident field passes through the three-dimensional hollow focal spot plane focusing device, and combine the particle swarm optimization algorithm to analyze the three-dimensional hollow focal spot The phase distribution ψ(ri ) of the planar focusing device is optimized to obtain a three-dimensional hollow focal spot meeting the target parameters at the set focal length. For this calculation method, see ETF Rogers, J.Lindberg, T.Roy, S.Savo, JEChad, MR Dennis, and NI Zheludev, "Asuper-oscillatory lens optical microscope for subwavelength imaging," Nat.Mater.Vol.11, pp.432-435( 2012).
然后，结合相位与介质厚度t的关系，根据优化得到的聚焦器件相位分布ψ(ri)，确定中心半径为ri的第i个介质圆环结构单元的厚度ti，由此在基底上形成由N个同心介质圆环结构单元构成的介质同心圆环阵列，与基底一起形成一种远场超衍射三维空心焦斑平面聚焦器件。相位分布ψ(ri)可为0，对应ti＝0，即在基底对应位置ri处不放置介质圆环结构单元；相位分布ψ(ri)可不为0，对应ti＝ψ(ri)×λ/[2π(nd-n0)]，即在基底对应位置ri处放置厚度为ti的介质圆环结构单元，其中λ为入射光波长，nd为介质材料D的折射率，n0为出射端介质折射率。Then, combine the phase relationship with the thickness t of the medium, according to the phase distribution ψ(ri ) of the focusing device obtained through optimization, the thickness ti of the i-th dielectric ring structural unit whose center radius is ri is determined, thus forming N pieces of The medium concentric ring array formed by the concentric dielectric ring structure unit forms a far-field super-diffraction three-dimensional hollow focal spot plane focusing device together with the substrate. The phase distribution ψ(ri ) can be 0, corresponding to ti =0, that is, no dielectric ring structural unit is placed at the corresponding position ri of the base; the phase distribution ψ(ri ) can be non-zero, corresponding to ti =ψ( ri )×λ/[2π(nd -n0 )], that is, a dielectric ring structure unit with a thickness of ti is placed at the corresponding position ri of the substrate, where λ is the wavelength of the incident light, and nd is the dielectric material D The refractive index, n0 is the refractive index of the exit medium.
以上获得的三维空心焦斑平面聚焦器件是一种平面聚焦器件，在其介质同心圆环阵列中，相邻介质圆环结构单元厚度不同，或者若干个相邻的介质圆环结构单元具有相同厚度，形成一个较宽的介质圆环结构。The three-dimensional hollow focal spot planar focusing device obtained above is a planar focusing device. In its medium concentric ring array, the thickness of adjacent dielectric ring structural units is different, or several adjacent dielectric ring structural units have the same thickness , forming a wider dielectric ring structure.
如图2所示，给出了远场超衍射远场超衍射三维空心焦斑平面聚焦器件光学聚焦示意图。柱矢量光束从三维空心焦斑平面聚焦器件基底一侧垂直入射，柱矢量光束的光轴与聚焦器件的光轴同轴；入射光束透射三维空心焦斑平面聚焦器件后，在器件焦距处形成超衍射的三维空心焦斑。As shown in Fig. 2, a schematic diagram of the optical focusing of the far-field super-diffraction far-field super-diffraction three-dimensional hollow focal spot plane focusing device is given. The cylindrical vector beam is incident vertically from the substrate side of the three-dimensional hollow focal spot plane focusing device, and the optical axis of the cylindrical vector beam is coaxial with the optical axis of the focusing device; after the incident beam transmits the three-dimensional hollow focal spot plane focusing device, a super Diffractive 3D hollow focal spot.
以基于二值相位的远场超衍射三维空心焦斑平面聚焦器件为例，如表1给出了基于二值相位的远场超衍射三维空心焦斑平面聚焦器件的相位空间分布ψ(ri)沿径向分布的十六进制表示，将十六进制表示转换为二进制表示后，其第i位二进制值给出了中心半径为ri、宽度为w的第i个介质圆环结构单元的相位(0或π)Taking the far-field super-diffraction three-dimensional hollow focal spot plane focusing device based on binary phase as an example, Table 1 shows the phase space distribution ψ(ri ) along the radial distribution of the hexadecimal representation, after the hexadecimal representation is converted into a binary representation, its i-th binary value gives the i-th medium ring structure with a central radius of ri and a width of w Phase of the cell (0 or π)
如图3所示，以632.8nm波长为例，给出了基于二值相位的远场超衍射三维空心焦斑平面聚焦器件，在焦平面内形成的空心聚焦光场，其强度分布呈现空心环状分布，因此其在焦平面上实现了远场空心光场聚焦。As shown in Figure 3, taking the wavelength of 632.8nm as an example, a far-field superdiffraction three-dimensional hollow focal spot plane focusing device based on binary phase is given. The hollow focused light field formed in the focal plane has a hollow ring in its intensity distribution. shape distribution, so it realizes far-field hollow light field focusing on the focal plane.
如图4所示，以632.8nm波长为例，给出了基于二值相位的远场超衍射三维空心焦斑平面聚焦器件，在角向偏振分量与径向偏振分量振幅比值分别为0、0.6、0.8和1.0的柱矢量光束入射情况下，在焦平面上光强度沿径向的分布，其相应的参数列于表2中。从表中参数可知，随着角向偏振态与径向偏振态分量振幅比值的增加，半高全宽仅增加了0.009λ，但仍低于衍射极限0.551λ(0.5λ/NA)，而峰峰间距保持不变；中心强度与峰值强度比值从16.25％下降至8.02％，改善了光学约束能力；横向最大旁瓣强度与峰值强度比值从41％下降至33％。横向峰值与轴向(z方向，即光轴方向)峰值(见图6)的比值从16.07％提升至32.56％。因此，可通过调整角向偏振态分量与径向偏振分量的比例，压缩焦平面内中心强度与主瓣峰值强度之比值，并提高空心焦斑空间光场分布的均匀性，提高三维空心焦斑的光学约束能力。As shown in Figure 4, taking the wavelength of 632.8nm as an example, a far-field superdiffraction three-dimensional hollow focal spot plane focusing device based on binary phase is given, and the amplitude ratios of the angular polarization component and the radial polarization component are 0 and 0.6 respectively. , 0.8, and 1.0 cylindrical vector beam incidence, the distribution of light intensity along the radial direction on the focal plane, and its corresponding parameters are listed in Table 2. It can be seen from the parameters in the table that with the increase of the amplitude ratio of the angular polarization state and the radial polarization state component, the full width at half maximum only increases by 0.009λ, but it is still lower than the diffraction limit of 0.551λ (0.5λ/NA), while the peak-to-peak spacing Remains unchanged; the central intensity-to-peak intensity ratio decreases from 16.25% to 8.02%, improving optical confinement; the lateral maximum sidelobe intensity-to-peak intensity ratio decreases from 41% to 33%. The ratio of the lateral peak value to the axial (z direction, ie optical axis direction) peak value (see FIG. 6 ) increases from 16.07% to 32.56%. Therefore, by adjusting the ratio of the angular polarization state component to the radial polarization component, the ratio of the central intensity in the focal plane to the peak intensity of the main lobe can be compressed, and the uniformity of the spatial light field distribution of the hollow focal spot can be improved, and the three-dimensional hollow focal spot can be improved. optical confinement capabilities.
如图5所示，以632.8nm波长为例，给出了在角向偏振分量与径向偏振分量振幅比值分别为0的柱矢量光束入射条件下，远场超衍射三维空心焦斑平面聚焦器件所产生的三维空心焦斑在传播面(xz面)内光强度分布，其形成了中心光强为零的空心结构；As shown in Figure 5, taking the wavelength of 632.8nm as an example, the far-field superdiffraction three-dimensional hollow focal spot plane focusing device is given under the incident condition of the cylindrical vector beam with the amplitude ratio of the angular polarization component and the radial polarization component being 0. The generated three-dimensional hollow focal spot distributes light intensity in the propagation plane (xz plane), which forms a hollow structure with zero central light intensity;
如图6所示，以632.8nm波长为例，给出了在角向偏振分量与径向偏振分量振幅比值分别为0、0.6、0.8和1.0的柱矢量光束入射条件下，远场超衍射三维空心焦斑平面聚焦器件所产生的三维空心焦斑光强度沿光轴的分布。As shown in Figure 6, taking the wavelength of 632.8nm as an example, the far-field superdiffraction three-dimensional The distribution of the light intensity of the three-dimensional hollow focal spot along the optical axis generated by the hollow focal spot plane focusing device.
本发明提供的远场超衍射三维空心焦斑平面聚焦器件，不仅适用于光学波段，还可以拓展至其他电磁波波段。The far-field super-diffraction three-dimensional hollow focal spot plane focusing device provided by the present invention is not only applicable to the optical band, but also can be extended to other electromagnetic wave bands.
本发明申请人结合说明书附图对本发明的实施例做了详细的说明与描述，但是本领域技术人员应该理解，以上实施例仅为本发明的优选实施方案，详尽的说明只是为了帮助读者更好地理解本发明精神，而并非对本发明保护范围的限制，相反，任何基于本申请发明精神所作的任何改进或修饰都应当落在本发明的保护范围之内。The applicant of the present invention has explained and described the embodiment of the present invention in detail in conjunction with the accompanying drawings, but those skilled in the art should understand that the above embodiment is only a preferred embodiment of the present invention, and the detailed description is only to help readers better To understand the spirit of the present invention rather than to limit the protection scope of the present invention. On the contrary, any improvement or modification made based on the spirit of the present invention shall fall within the protection scope of the present invention.
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| CN201810220342.2ACN108363215A (en) | 2018-03-16 | 2018-03-16 | A kind of hollow focal spot flat focus device of the super diffraction three-dimensional in far field |
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| CN201810220342.2ACN108363215A (en) | 2018-03-16 | 2018-03-16 | A kind of hollow focal spot flat focus device of the super diffraction three-dimensional in far field |
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