技术领域technical field
本发明涉及一种紧凑型双致动组件压电粘滑驱动装置及其驱动方法，属于精密驱动与定位技术领域。The invention relates to a piezoelectric stick-slip driving device and a driving method thereof of a compact dual-actuating component, and belongs to the technical field of precision driving and positioning.
背景技术Background technique
随着现代科学技术的迅猛发展，微纳加工、微纳操作、精密光学、生物医学工程、航空航天等诸多前沿高科技领域发生了日新月异的变化。这些领域不断进步的同时，对其核心支撑技术——超精密驱动技术提出了更高更新的要求。压电驱动技术是一种利用压电材料的逆压电效应将电能转化为机械能的新型驱动方式，压电驱动器在体积、精度、响应速度、输出力及功率密度等方面具有明显的综合优势，目前出现的各类新型精密驱动器极大地推动了精密驱动技术的发展，其中基于粘滑惯性驱动原理的压电驱动器由于结构紧凑、行程大、运动精度高、性能稳定可靠等优点具有良好的应用前景。但大部分压电粘滑驱动器无法在驱动过程中对摩擦力进行综合调控，导致压电粘滑驱动器的输出性能受限，限制了压电驱动器的应用和发展。With the rapid development of modern science and technology, many cutting-edge high-tech fields such as micro-nano processing, micro-nano manipulation, precision optics, biomedical engineering, and aerospace have undergone rapid changes. While these fields continue to progress, higher and newer requirements are put forward for its core supporting technology - ultra-precision drive technology. Piezoelectric drive technology is a new type of drive method that uses the inverse piezoelectric effect of piezoelectric materials to convert electrical energy into mechanical energy. Piezoelectric drives have obvious comprehensive advantages in terms of volume, precision, response speed, output force and power density. Various new types of precision drives appearing at present have greatly promoted the development of precision drive technology. Among them, piezoelectric drives based on the principle of stick-slip inertial drive have good application prospects due to their compact structure, large stroke, high motion accuracy, and stable and reliable performance. . However, most piezoelectric stick-slip actuators cannot comprehensively control the friction force during the driving process, resulting in limited output performance of piezoelectric stick-slip actuators, which limits the application and development of piezoelectric actuators.
发明内容Contents of the invention
为解决当前压电粘滑驱动器在驱动过程中摩擦力调节困难所导致的压电驱动器性能受限等技术问题，本发明公开了一种紧凑型双致动组件压电粘滑驱动装置及其驱动方法。In order to solve the technical problems of the current piezoelectric stick-slip driver, such as the limited performance of the piezoelectric driver caused by the difficulty in adjusting the friction force during the driving process, the present invention discloses a compact dual-actuation component piezoelectric stick-slip driver and its drive method.
本发明所采用的技术方案：The technical scheme adopted in the present invention:
所述紧凑型双致动组件压电粘滑驱动装置由工作台、双导轨动子、双驱动定子和螺纹加载器组成；所述双导轨动子固定安装在工作台的动子安装平面上，所述双驱动定子安装在定子安装平面上，所述螺纹加载器通过螺纹配合连接工作台和双驱动定子。The compact dual-actuation assembly piezoelectric stick-slip driving device is composed of a workbench, a double-rail mover, a double-drive stator and a thread loader; the double-guide mover is fixedly installed on the mover installation plane of the workbench, The double-drive stator is installed on the stator installation plane, and the threaded loader connects the workbench and the double-drive stator through thread fit.
所述工作台可采用不锈钢材料，所述工作台包括动子安装平面、动子安装螺孔、定子安装平面、滑动轨道Ⅰ、加载台、加载螺孔和滑动轨道Ⅱ，所述动子安装螺孔设置在动子安装平面上，所述动子安装螺孔通过与固定螺栓的螺纹连接将双导轨动子固定安装在动子安装平面，所述滑动轨道Ⅰ、加载台和滑动轨道Ⅱ设置在定子安装平面上，所述滑动轨道Ⅰ与双驱动定子的梯形槽Ⅰ接触配合，所述滑动轨道Ⅱ与双驱动定子的梯形槽Ⅱ接触配合，所述加载螺孔设置在加载台上，所述螺纹加载器一端与加载螺孔螺纹连接，另一端与双驱动定子固定连接。The workbench can be made of stainless steel, and the workbench includes a mover installation plane, a mover installation screw hole, a stator installation plane, a slide track I, a loading table, a load screw hole and a slide track II, and the mover installation screw The hole is set on the mover installation plane, and the mover installation screw hole is fixedly installed on the mover installation plane through the screw connection with the fixing bolt. The slide track I, loading table and slide track II are set on the On the stator installation plane, the sliding track I is in contact with the trapezoidal slot I of the double-drive stator, the sliding track II is in contact with the trapezoidal slot II of the double-drive stator, and the loading screw hole is set on the loading table. One end of the threaded loader is threadedly connected with the loading screw hole, and the other end is fixedly connected with the dual-drive stator.
所述双导轨动子为双列交叉滚柱导轨，所述双导轨动子包括静导轨、外置载台螺孔、动导轨、限位螺钉、导轨固定孔、固定螺栓和滚柱滑动板，所述外置载台螺孔阵列设置在动导轨上，所述外置载台螺孔可与外围载台连接，所述动导轨与双驱动定子滑动接触，所述动导轨的厚度为M，其中M的取值范围为6~9mm，所述动导轨接触端面涂有陶瓷类或玻璃纤维类摩擦材料，所述限位螺钉安装于静导轨和动导轨的两侧，所述滚柱滑动板分别与静导轨和动导轨滑动接触，所述导轨固定孔阵列设置在静导轨上，所述导轨固定孔通过固定螺栓与动子安装螺孔的螺纹连接将静导轨固定安装在工作台上。The double guide rail mover is a double row cross roller guide rail, and the double guide rail mover includes a static guide rail, an external carrier screw hole, a moving guide rail, a limit screw, a guide rail fixing hole, a fixing bolt and a roller sliding plate, The screw hole array of the external carrier is arranged on the moving guide rail, the screw holes of the external carrier can be connected with the peripheral carrier, the moving guide rail is in sliding contact with the double drive stator, the thickness of the moving guide rail is M, The value range of M is 6~9mm, the contact end surface of the moving guide rail is coated with ceramic or glass fiber friction material, the limit screw is installed on both sides of the static guide rail and the moving guide rail, and the roller slide plates are respectively In sliding contact with the static guide rail and the moving guide rail, the array of guide rail fixing holes is arranged on the static guide rail, and the guide rail fixing holes fix the static guide rail on the workbench through the threaded connection of the fixing bolts and the moving element mounting screw holes.
所述双驱动定子由三角双驱动机构、叠堆压电陶瓷、保护片和基米螺钉组成，所述三角双驱动机构采用5025铝合金、6061铝合金、7075铝合金、Ti-35A钛合金或Ti-13钛合金材料，所述三角双驱动机构设置有三角横梁、连接梁Ⅱ和底梁，所述三角横梁为等腰三角形，所述连接梁Ⅱ设置在三角双驱动机构中心，所述连接梁Ⅱ的两端分别与三角横梁和底梁刚性连接，所述三角双驱动机构的两侧对称设置有直圆柔性铰链Ⅰ、连接梁Ⅰ和直圆柔性铰链Ⅱ，所述连接梁Ⅰ前端通过直圆柔性铰链Ⅱ与三角横梁刚性连接，所述连接梁Ⅰ后端通过直圆柔性铰链Ⅰ与底梁刚性连接，所述三角横梁的底角为α，其中，底角α的取值范围为15°~45°，所述直圆柔性铰链Ⅰ和直圆柔性铰链Ⅱ的铰链厚度为h，其中，h的取值范围为0.2~0.8mm，所述三角横梁前端中心设置有半圆驱动头，所述半圆驱动头与动导轨滑动接触，所述半圆驱动头接触端面涂有陶瓷类或玻璃纤维类摩擦材料，所述半圆驱动头的竖直高度为N，其中，N=（M-2）mm，N<M可以保证有效接触面积，提高传动效率，所述底梁上设置有基米螺钉螺孔、梯形槽Ⅰ、加载通孔和梯形槽Ⅱ，所述基米螺钉安装于基米螺钉螺孔内，所述梯形槽Ⅰ和梯形槽Ⅱ对称设置在三角双驱动机构的底梁两侧，所述加载通孔内穿过螺纹加载器，所述叠堆压电陶瓷置于三角双驱动机构内，所述保护片安装于叠堆压电陶瓷与基米螺钉之间，所述保护片采用钨钢材料。The double-drive stator is composed of a triangular double-drive mechanism, stacked piezoelectric ceramics, protective sheets and Kimi screws, and the triangular double-drive mechanism is made of 5025 aluminum alloy, 6061 aluminum alloy, 7075 aluminum alloy, Ti-35A titanium alloy or Ti-13 titanium alloy material, the triangular double driving mechanism is provided with a triangular beam, connecting beam II and bottom beam, the triangular beam is an isosceles triangle, the connecting beam II is set at the center of the triangular double driving mechanism, and the connecting The two ends of the beam II are rigidly connected with the triangular beam and the bottom beam respectively, and the two sides of the triangular double driving mechanism are symmetrically provided with a straight circular flexible hinge I, a connecting beam I and a straight circular flexible hinge II, and the front end of the connecting beam I passes through The straight circular flexible hinge II is rigidly connected to the triangular beam, and the rear end of the connecting beam I is rigidly connected to the bottom beam through the straight circular flexible hinge I. The bottom angle of the triangular beam is α, and the value range of the bottom angle α is 15°~45°, the hinge thickness of the straight circular flexible hinge I and the straight circular flexible hinge II is h, wherein the value range of h is 0.2~0.8mm, and the center of the front end of the triangular beam is provided with a semicircular drive head, The semicircular driving head is in sliding contact with the moving guide rail, and the contact end surface of the semicircular driving head is coated with ceramic or glass fiber friction material. The vertical height of the semicircular driving head is N, where N=(M-2) mm, N<M can ensure the effective contact area and improve the transmission efficiency. The bottom beam is provided with Kimi screw screw holes, trapezoidal groove I, loading through hole and trapezoidal groove II, and the Kimi screw is installed on the Kimi screw In the screw hole, the trapezoidal groove I and the trapezoidal groove II are symmetrically arranged on both sides of the bottom beam of the triangular double drive mechanism, the loading through hole passes through the threaded loader, and the stacked piezoelectric ceramics are placed in the triangular double drive mechanism. In the mechanism, the protective sheet is installed between the stacked piezoelectric ceramics and the Kimi screw, and the protective sheet is made of tungsten steel.
所述螺纹加载器包括加载螺栓、固定螺母、加载螺母和弹簧，所述加载螺栓穿过加载通孔，并与加载螺孔螺纹连接，所述固定螺母与加载螺栓螺纹连接将加载螺栓固定安装在双驱动定子上，所述弹簧套在加载螺栓上，并安装在固定螺母与加载台内平面之间，所述加载螺母与加载螺孔螺纹连接，安装在加载台外平面。The threaded loader includes a loading bolt, a fixing nut, a loading nut and a spring, the loading bolt passes through the loading through hole, and is threadedly connected with the loading screw hole, and the fixing nut is threadedly connected with the loading bolt to fix the loading bolt on the On the double-drive stator, the spring is sleeved on the loading bolt and installed between the fixed nut and the inner plane of the loading platform. The loading nut is threadedly connected with the loading screw hole and installed on the outer surface of the loading platform.
所述驱动方法中采用的复合激励电信号实现，复合激励电信号包括摩擦调控波和驱动波，通过将摩擦调控波复合叠加于驱动波的快速通电阶段，激发双驱动定子在快速变形阶段处于微副高频共振状态，基于超声减摩效应降低快速变形阶段双驱动定子与双导轨动子间的摩擦阻力；所述驱动波为锯齿波，所述摩擦调控波为正弦波，其中锯齿波的周期为T1，激励电压幅值为V1，对称性为S，正弦波周期为T2，激励电压幅值为V2，锯齿波与正弦波的周期比为T1/T2=100~20000，激励电压幅值比为V1/V2=2~6。The composite excitation electric signal adopted in the driving method is realized. The composite excitation electric signal includes the friction control wave and the driving wave. By superimposing the friction control wave on the fast energization stage of the driving wave, the double drive stator is excited to be in the microscopic state during the rapid deformation stage. Secondary high-frequency resonance state, based on the ultrasonic anti-friction effect to reduce the frictional resistance between the double-driven stator and the double-rail mover in the rapid deformation stage; the driving wave is a sawtooth wave, and the friction control wave is a sine wave, wherein the period of the sawtooth wave is T1 , the amplitude of the excitation voltage is V1 , the symmetry is S, the period of the sine wave is T2 , the amplitude of the excitation voltage is V2 , and the period ratio of the sawtooth wave to the sine wave is T1 /T2 =100~20000 , the excitation voltage amplitude ratio is V1 /V2 =2~6.
本发明的有益效果是：本发明采用具有摩擦力综合调控功能的三角双驱动机构，并采用寄生运动原理，可增大压电驱动器在“粘”阶段的驱动力，减小压电驱动器在“滑”阶段的摩擦阻力，实现了对压电驱动装置驱动过程摩擦力的综合调控，可显著提升压电驱动装置的输出性能，与现有技术相比，输出力提升30%以上，输出速度提升40%以上，闭环下定位精度可达纳米级。The beneficial effect of the present invention is: the present invention adopts the triangular double driving mechanism with the function of comprehensive regulation and control of friction, and adopts the principle of parasitic motion, which can increase the driving force of the piezoelectric actuator in the "sticky" stage and reduce the piezoelectric actuator in the "sticky" stage. The frictional resistance in the "slip" stage realizes the comprehensive control of the friction force in the driving process of the piezoelectric drive device, which can significantly improve the output performance of the piezoelectric drive device. Compared with the existing technology, the output force is increased by more than 30%, and the output speed is increased. More than 40%, the closed-loop positioning accuracy can reach nanometer level.
附图说明Description of drawings
图1所示为本发明提出的一种紧凑型双致动组件压电粘滑驱动装置的结构示意图；Fig. 1 shows a structural schematic diagram of a compact dual-actuating component piezoelectric stick-slip driving device proposed by the present invention;
图2所示为本发明提出的一种紧凑型双致动组件压电粘滑驱动装置的工作台结构示意图；Fig. 2 is a schematic structural diagram of a workbench of a compact dual-actuating component piezoelectric stick-slip driving device proposed by the present invention;
图3所示为本发明提出的一种紧凑型双致动组件压电粘滑驱动装置的双导轨动子结构示意图；Fig. 3 is a schematic diagram of the structure of the dual-rail mover of a compact dual-actuator assembly piezoelectric stick-slip driving device proposed by the present invention;
图4所示为本发明提出的一种紧凑型双致动组件压电粘滑驱动装置的双驱动定子结构示意图；Fig. 4 is a structural schematic diagram of a dual-drive stator of a compact dual-actuator assembly piezoelectric stick-slip driving device proposed by the present invention;
图5所示为本发明提出的一种紧凑型双致动组件压电粘滑驱动装置的三角双驱动机构俯视图；Fig. 5 is a top view of a triangular double drive mechanism of a compact double actuator assembly piezoelectric stick-slip driving device proposed by the present invention;
图6所示为本发明提出的一种紧凑型双致动组件压电粘滑驱动装置的三角双驱动机构正视图；Fig. 6 is a front view of a triangular double drive mechanism of a compact double actuator assembly piezoelectric stick-slip drive device proposed by the present invention;
图7所示为本发明提出的一种紧凑型双致动组件压电粘滑驱动装置的螺纹加载器结构示意图；Fig. 7 is a structural schematic diagram of a thread loader of a compact dual-actuating component piezoelectric stick-slip driving device proposed by the present invention;
图8所示为本发明提出的一种紧凑型双致动组件压电粘滑驱动装置的复合激励信号波形示意图。FIG. 8 is a schematic diagram of a composite excitation signal waveform of a compact dual-actuation component piezoelectric stick-slip driving device proposed by the present invention.
具体实施方式Detailed ways
具体实施方式一：结合图1~图7说明本实施方式，本实施方式提供了一种紧凑型双致动组件压电粘滑驱动装置的具体实施方式，所述一种紧凑型双致动组件压电粘滑驱动装置的具体实施方式表述如下：Specific Embodiment 1: This embodiment is described with reference to FIGS. 1 to 7. This embodiment provides a specific embodiment of a compact dual-actuation assembly piezoelectric stick-slip drive device. The compact dual-actuation assembly The specific implementation of the piezoelectric stick-slip driving device is described as follows:
所述一种紧凑型双致动组件压电粘滑驱动装置由工作台1、双导轨动子2、双驱动定子3和螺纹加载器4组成；所述双导轨动子2固定安装在工作台1的动子安装平面1-1上，所述双驱动定子2安装在定子安装平面1-3上，所述螺纹加载器4通过螺纹配合连接工作台1和双驱动定子3。The compact dual-actuation assembly piezoelectric stick-slip driving device is composed of a workbench 1, a double-rail mover 2, a double-drive stator 3 and a thread loader 4; the double-rail mover 2 is fixedly installed on the workbench The mover of 1 is installed on the plane 1-1, the double drive stator 2 is installed on the stator installation plane 1-3, and the threaded loader 4 is connected to the workbench 1 and the double drive stator 3 through screw fit.
所述工作台1可采用不锈钢材料，所述工作台1包括动子安装平面1-1、动子安装螺孔1-2、定子安装平面1-3、滑动轨道Ⅰ1-4、加载台1-5、加载螺孔1-6和滑动轨道Ⅱ1-7，所述动子安装螺孔1-2设置在动子安装平面1-1上，所述动子安装螺孔1-2通过与固定螺栓2-6的螺纹连接将双导轨动子2固定安装在动子安装平面1-1，所述滑动轨道Ⅰ1-4、加载台1-5和滑动轨道Ⅱ1-7设置在定子安装平面1-3上，所述滑动轨道Ⅰ1-4与滑动轨道Ⅱ1-7配合限定双驱动定子3在定子安装平面1-3上的滑动方向，所述加载螺孔1-6设置在加载台1-5上，所述加载螺孔1-6用于安装螺纹加载器4。The workbench 1 can be made of stainless steel, and the workbench 1 includes a mover installation plane 1-1, a mover installation screw hole 1-2, a stator installation plane 1-3, a sliding track I1-4, a loading table 1- 5. Loading screw holes 1-6 and sliding track II 1-7, the mover installation screw holes 1-2 are set on the mover installation plane 1-1, and the mover installation screw holes 1-2 pass through the fixing bolts The thread connection of 2-6 fixedly installs the double guide rail mover 2 on the mover installation plane 1-1, and the sliding track I1-4, loading table 1-5 and sliding track II1-7 are set on the stator installation plane 1-3 Above, the sliding track I1-4 cooperates with the sliding track II1-7 to define the sliding direction of the dual drive stator 3 on the stator installation plane 1-3, and the loading screw hole 1-6 is set on the loading table 1-5, The loading screw holes 1-6 are used for installing the threaded loader 4 .
所述双导轨动子2为双列交叉滚柱导轨，所述双导轨动子2包括静导轨2-1、外置载台螺孔2-2、动导轨2-3、限位螺钉2-4、导轨固定孔2-5、固定螺栓2-6和滚柱滑动板2-7，所述外置载台螺孔2-2阵列设置在动导轨2-3上，所述外置载台螺孔2-2可与外围载台连接，所述动导轨2-3与双驱动定子3滑动接触，所述动导轨2-3的厚度为M，其中M的取值范围为6~9mm，本具体实施方式中M=8mm，所述动导轨2-3接触端面涂有陶瓷类或玻璃纤维类摩擦材料，所述限位螺钉2-4安装于静导轨2-1和动导轨2-3的两侧，所述限位螺钉2-4用于动导轨2-3的运动限位，所述滚柱滑动板2-7分别与静导轨2-1和动导轨2-3滑动接触，所述导轨固定孔2-5阵列设置在静导轨2-1上，所述导轨固定孔2-5通过固定螺栓2-6与动子安装螺孔1-2的螺纹连接将静导轨2-1固定安装在工作台1上。The double guide rail mover 2 is a double-row cross roller guide rail, and the double guide rail mover 2 includes a static guide rail 2-1, an external carrier screw hole 2-2, a moving guide rail 2-3, and a limit screw 2- 4. Guide rail fixing holes 2-5, fixing bolts 2-6 and roller sliding plates 2-7, the screw holes 2-2 of the external carrier are arranged in an array on the moving guide rail 2-3, and the external carrier The screw hole 2-2 can be connected with the peripheral carrier, the moving guide rail 2-3 is in sliding contact with the double drive stator 3, the thickness of the moving guide rail 2-3 is M, and the value range of M is 6~9mm, In this specific embodiment, M=8mm, the contact end surface of the moving guide rail 2-3 is coated with ceramic or glass fiber friction material, and the limit screw 2-4 is installed on the bottom of the static guide rail 2-1 and the moving guide rail 2-3. On both sides, the limit screw 2-4 is used to limit the movement of the moving guide rail 2-3, and the roller sliding plate 2-7 is in sliding contact with the static guide rail 2-1 and the moving guide rail 2-3 respectively. The guide rail fixing holes 2-5 are arranged in an array on the static guide rail 2-1, and the guide rail fixing holes 2-5 are fixedly installed on the static guide rail 2-1 through the screw connection of the fixing bolt 2-6 and the mover installation screw hole 1-2 on workbench 1.
所述双驱动定子3由三角双驱动机构3-1、叠堆压电陶瓷3-2、保护片3-3和基米螺钉3-4组成，所述三角双驱动机构3-1采用5025铝合金、6061铝合金、7075铝合金、Ti-35A钛合金或Ti-13钛合金材料，所述三角双驱动机构3-1设置有三角横梁3-1-4、连接梁Ⅱ3-1-6和底梁3-1-7，所述三角横梁3-1-4为等腰三角形，所述连接梁Ⅱ3-1-6设置在三角双驱动机构3-1中心，所述连接梁Ⅱ3-1-6的两端分别与三角横梁3-1-4和底梁3-1-7刚性连接，所述三角双驱动机构3-1的两侧对称设置有直圆柔性铰链Ⅰ3-1-1、连接梁Ⅰ3-1-2和直圆柔性铰链Ⅱ3-1-3，所述连接梁Ⅰ3-1-2前端通过直圆柔性铰链Ⅱ3-1-3与三角横梁3-1-4刚性连接，所述连接梁Ⅰ3-1-2后端通过直圆柔性铰链Ⅰ3-1-1与底梁3-1-7刚性连接，所述三角横梁3-1-4的底角为α，其中，底角α的取值范围为15°~45°，本具体实施方式中，α=15°，所述直圆柔性铰链Ⅰ3-1-1和直圆柔性铰链Ⅱ3-1-3的铰链厚度为h，其中，h的取值范围为0.2~0.8mm，本具体实施方式中，h=0.2mm，所述三角横梁3-1-4前端中心设置有半圆驱动头3-1-5，所述半圆驱动头3-1-5与动导轨2-3滑动接触，所述半圆驱动头3-1-5接触端面涂有陶瓷类或玻璃纤维类摩擦材料，所述半圆驱动头3-1-5的竖直高度为N，其中，N=（M-2）mm，N<M可以保证有效接触面积，提高传动效率，本具体实施方式中，N=6mm，所述底梁3-1-7上设置有基米螺钉螺孔3-1-8、梯形槽Ⅰ3-1-9、加载通孔3-1-10和梯形槽Ⅱ3-1-11，所述基米螺钉3-4安装于基米螺钉螺孔3-1-8内，通过改变基米螺钉3-4的旋合圈数来实现对叠堆压电陶瓷3-2的轴向预紧力的调节，所述梯形槽Ⅰ3-1-9和梯形槽Ⅱ3-1-11对称设置在三角双驱动机构3-1的底梁3-1-7两侧，所述梯形槽Ⅰ3-1-9与滑动轨道Ⅰ1-4接触配合，所述梯形槽Ⅱ3-1-11与滑动轨道Ⅱ1-7接触配合，所述加载通孔3-1-10用于安装螺纹加载器4，所述叠堆压电陶瓷3-2置于三角双驱动机构3-1内，所述保护片3-3安装于叠堆压电陶瓷3-2与基米螺钉3-4之间，其中，所述叠堆压电陶瓷3-2可采用PI或NEC公司的产品，所述保护片3-3采用钨钢材料，其用于保护叠堆压电陶瓷3-2，防止其产生切应变或局部受力不均。The double-drive stator 3 is composed of a triangular double-drive mechanism 3-1, stacked piezoelectric ceramics 3-2, a protective sheet 3-3 and Kimi screws 3-4, and the triangular double-drive mechanism 3-1 is made of 5025 aluminum alloy, 6061 aluminum alloy, 7075 aluminum alloy, Ti-35A titanium alloy or Ti-13 titanium alloy material, the triangular double drive mechanism 3-1 is provided with a triangular beam 3-1-4, a connecting beam II 3-1-6 and The bottom beam 3-1-7, the triangular beam 3-1-4 is an isosceles triangle, the connecting beam II 3-1-6 is set at the center of the triangular double drive mechanism 3-1, and the connecting beam II 3-1- The two ends of 6 are respectively rigidly connected with the triangular beam 3-1-4 and the bottom beam 3-1-7, and the two sides of the triangular double driving mechanism 3-1 are symmetrically provided with straight circular flexible hinges I3-1-1, connecting Beam I 3-1-2 and straight circular flexible hinge II 3-1-3, the front end of the connecting beam I 3-1-2 is rigidly connected with the triangular beam 3-1-4 through the straight circular flexible hinge II 3-1-3, the The rear end of the connecting beam I3-1-2 is rigidly connected to the bottom beam 3-1-7 through a straight circular flexible hinge I3-1-1, and the bottom angle of the triangular beam 3-1-4 is α, wherein the bottom angle α The value range of α is 15°~45°. In this specific embodiment, α=15°, and the hinge thickness of the straight circular flexible hinge I3-1-1 and the straight circular flexible hinge II3-1-3 is h, where , the value range of h is 0.2 ~ 0.8mm, in this embodiment, h=0.2mm, the center of the front end of the triangular beam 3-1-4 is provided with a semicircle drive head 3-1-5, the semicircle drive head 3-1-5 is in sliding contact with the moving guide rail 2-3, the contact end surface of the semicircular driving head 3-1-5 is coated with ceramic or glass fiber friction material, the vertical of the semicircular driving head 3-1-5 The height is N, wherein, N=(M-2)mm, N<M can ensure the effective contact area and improve the transmission efficiency. In this specific embodiment, N=6mm, and the bottom beam 3-1-7 is provided with Kimi screw screw hole 3-1-8, trapezoidal groove Ⅰ 3-1-9, loading through hole 3-1-10 and trapezoidal groove Ⅱ 3-1-11, the Kimi screw 3-4 is installed on the Kimi screw In the hole 3-1-8, the adjustment of the axial pretightening force of the stacked piezoelectric ceramics 3-2 is realized by changing the number of turns of the Kimi screw 3-4, and the trapezoidal groove I 3-1-9 The trapezoidal groove II3-1-11 is symmetrically arranged on both sides of the bottom beam 3-1-7 of the triangular double drive mechanism 3-1, and the trapezoidal groove I3-1-9 is in contact with the sliding track I1-4, and the trapezoidal Groove II 3-1-11 is in contact with sliding track II 1-7, the loading through hole 3-1-10 is used to install the threaded loader 4, and the stacked piezoelectric ceramics 3-2 is placed in the triangular double drive mechanism 3 -1, the protective sheet 3-3 is installed between the stacked piezoelectric ceramics 3-2 and the Kimi screw 3-4, wherein the stacked piezoelectric ceramics 3-2 can be made of PI or NEC’s product, the protection sheet 3-3 is made of tungsten steel material, which is used to protect the stack pressure Electroceramic 3-2, prevent it from producing shear strain or uneven local force.
所述螺纹加载器4包括加载螺栓4-1、固定螺母4-2、加载螺母4-3和弹簧4-4，所述加载螺栓4-1穿过加载通孔3-1-10，并与加载螺孔1-6螺纹连接，所述固定螺母4-2与加载螺栓4-1螺纹连接将加载螺栓4-1固定安装在双驱动定子3上，所述弹簧4-4套在加载螺栓4-1上，并安装在固定螺母4-2与加载台1-5内平面之间，所述加载螺母4-3与加载螺孔1-6螺纹连接，安装在加载台1-5外平面，由于加载螺栓4-1与双驱动定子3固定，当旋转加载螺母4-3时弹簧4-4伸缩变形，使双驱动定子3随加载螺栓4-1的移动在定子安装平面1-3上直线滑动，实现双驱动定子3与双导轨动子2之间的预紧力调节。The threaded loader 4 includes a loading bolt 4-1, a fixing nut 4-2, a loading nut 4-3 and a spring 4-4, the loading bolt 4-1 passes through the loading through hole 3-1-10, and is connected with The loading screw hole 1-6 is threaded, the fixing nut 4-2 is threaded with the loading bolt 4-1, the loading bolt 4-1 is fixedly installed on the double drive stator 3, and the spring 4-4 is set on the loading bolt 4 -1, and installed between the fixed nut 4-2 and the inner plane of the loading table 1-5, the loading nut 4-3 is threadedly connected with the loading screw hole 1-6, and installed on the outer plane of the loading table 1-5, Since the loading bolt 4-1 is fixed to the double-drive stator 3, the spring 4-4 is stretched and deformed when the load nut 4-3 is rotated, so that the double-drive stator 3 moves in a straight line on the stator installation plane 1-3 with the movement of the load bolt 4-1 Sliding to realize the preload adjustment between the double-drive stator 3 and the double-rail mover 2.
具体实施方式二：结合图8说明本实施方式，本实施方式提供了一种紧凑型双致动组件压电粘滑驱动装置驱动方法的具体实施方式，所述一种紧凑型双致动组件压电粘滑驱动装置驱动方法如下所示。Specific Embodiment 2: This embodiment is described with reference to FIG. 8. This embodiment provides a specific embodiment of a driving method for a compact dual-actuation assembly piezoelectric stick-slip drive device. The compact dual-actuation assembly pressure The driving method of the electroviscous-slip actuator is as follows.
所述驱动方法中采用的复合激励电信号实现，复合激励电信号包括摩擦调控波和驱动波，通过将摩擦调控波复合叠加于驱动波的快速通电阶段，激发双驱动定子在快速变形阶段处于微副高频共振状态，基于超声减摩效应降低快速变形阶段双驱动定子与双导轨动子间的摩擦阻力；所述驱动波为锯齿波，所述摩擦调控波为正弦波，其中锯齿波的周期为T1，激励电压幅值为V1，对称性为S，正弦波周期为T2，激励电压幅值为V2，锯齿波与正弦波的周期比为T1/T2=100~20000，激励电压幅值比为V1/V2=2~6。The composite excitation electric signal adopted in the driving method is realized. The composite excitation electric signal includes the friction control wave and the driving wave. By superimposing the friction control wave on the fast energization stage of the driving wave, the double drive stator is excited to be in the microscopic state during the rapid deformation stage. Secondary high-frequency resonance state, based on the ultrasonic anti-friction effect to reduce the frictional resistance between the double-driven stator and the double-rail mover in the rapid deformation stage; the driving wave is a sawtooth wave, and the friction control wave is a sine wave, wherein the period of the sawtooth wave is T1 , the amplitude of the excitation voltage is V1 , the symmetry is S, the period of the sine wave is T2 , the amplitude of the excitation voltage is V2 , and the period ratio of the sawtooth wave to the sine wave is T1 /T2 =100~20000 , the excitation voltage amplitude ratio is V1 /V2 =2~6.
工作原理：working principle:
本发明采用非对称锯齿波电信号作为激励信号，当对一个叠堆压电陶瓷施加非对称性的锯齿波形信号，另外一个叠堆压电陶瓷不施加激励信号时，叠堆压电陶瓷先缓慢伸长，后快速缩短，同时由于三角双驱动机构的三角轴向刚度分布不均匀，当叠堆压电陶瓷缓慢伸长时双驱动定子与双导轨动子间为静摩擦，此时为双驱动定子对双导轨动子施加了一个逐渐增大的斜向压力，这个斜向压力可分解为法向的正压力和切向的摩擦驱动力，由于法向正压力逐渐增大，摩擦驱动力也随之逐渐增大，即可增大“粘”阶段双导轨动子的输出特性；当快速缩短时双驱动定子与双导轨动子间为动摩擦，此时双驱动定子对双导轨动子的斜向压力逐渐减小，摩擦阻力也随之逐渐减小。重复以上步骤可使双导轨动子连续运动，若将非对称性的锯齿波形信号施加于另外一个叠堆压电陶瓷，可实现双导轨动子向相反方向的连续运动。The present invention uses an asymmetrical sawtooth wave electrical signal as an excitation signal. When an asymmetrical sawtooth waveform signal is applied to one stacked piezoelectric ceramics, and the other stacked piezoelectric ceramics does not apply an excitation signal, the stacked piezoelectric ceramics slows down first. Elongation and then rapid shortening. At the same time, due to the uneven distribution of the triangular axial stiffness of the triangular double-drive mechanism, when the stacked piezoelectric ceramics slowly elongate, there is static friction between the double-drive stator and the double-rail mover. At this time, it is a double-drive stator. A gradually increasing oblique pressure is applied to the double guide rail mover. This oblique pressure can be decomposed into normal positive pressure and tangential frictional driving force. As the normal positive pressure gradually increases, the frictional driving force also increases. Gradually increasing, the output characteristics of the dual-rail mover in the "sticky" stage can be increased; when rapidly shortening, there is dynamic friction between the double-drive stator and the double-rail mover, and the oblique pressure of the double-drive stator on the double-rail mover Gradually decreases, the frictional resistance also gradually decreases. Repeating the above steps can make the double-rail mover move continuously. If an asymmetrical sawtooth waveform signal is applied to another stacked piezoelectric ceramic, the double-rail mover can move in the opposite direction continuously.
综合以上所述内容，本发明提供一种紧凑型双致动组件压电粘滑驱动装置及其驱动方法，以解决当前压电驱动器由于在驱动过程中摩擦力调节困难，很难实现大行程、高精度的精密运动。本发明所提出的紧凑型双致动组件压电粘滑驱动装置，兼具结构紧凑、装配方便、定位精度高及行程大等特点。通过使用具有摩擦调控功能的三角双驱动机构可显著提升其机械输出特性，在超精加工、精密光学等微纳精密驱动与定位技术领域能够得到广泛应用。Based on the above, the present invention provides a compact dual-actuation component piezoelectric stick-slip driving device and its driving method to solve the problem that the current piezoelectric driver is difficult to adjust the friction force during the driving process, and it is difficult to achieve a large stroke, High precision precision movement. The compact piezoelectric stick-slip driving device with double actuating components proposed by the present invention has the characteristics of compact structure, convenient assembly, high positioning accuracy and large stroke. By using the triangular double drive mechanism with friction control function, its mechanical output characteristics can be significantly improved, and it can be widely used in the fields of micro-nano precision drive and positioning technology such as ultra-finishing and precision optics.
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810176962.0ACN108306546B (en) | 2018-03-04 | 2018-03-04 | Compact dual-actuating component piezoelectric stick-slip driving device and its driving method |
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| CN201810176962.0ACN108306546B (en) | 2018-03-04 | 2018-03-04 | Compact dual-actuating component piezoelectric stick-slip driving device and its driving method |
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| CN201810176962.0AExpired - Fee RelatedCN108306546B (en) | 2018-03-04 | 2018-03-04 | Compact dual-actuating component piezoelectric stick-slip driving device and its driving method |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI699958B (en)* | 2019-01-11 | 2020-07-21 | 精浚科技股份有限公司 | Friction driving actuator and buffering frame thereof |
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| CN109995268A (en)* | 2019-03-29 | 2019-07-09 | 广东工业大学 | A piezoelectric stick-slip driving device with dual drivers sharing driving feet and a driving method thereof |
| CN110752768B (en)* | 2019-04-08 | 2022-12-27 | 浙江师范大学 | Piezoelectric precision driving device based on asymmetric triangular arc type flexible hinge mechanism |
| CN110829883A (en)* | 2019-07-25 | 2020-02-21 | 浙江师范大学 | An umbrella-shaped piezoelectric drive device |
| CN110829881A (en)* | 2019-07-25 | 2020-02-21 | 浙江师范大学 | An umbrella-type crawling piezoelectric drive platform |
| CN111245289B (en)* | 2020-01-08 | 2023-12-08 | 浙江师范大学 | Piezoelectric-driven rotary motion device and control method thereof |
| CN111750902B (en)* | 2020-06-24 | 2021-12-24 | 兰州理工大学 | Multi-sensitivity piezoelectric bolt loosening monitoring device and its use and identification method |
| CN112427937A (en)* | 2020-12-15 | 2021-03-02 | 天津职业技术师范大学(中国职业培训指导教师进修中心) | Intelligent nut device and method |
| CN119628456A (en)* | 2024-12-04 | 2025-03-14 | 哈尔滨工业大学 | A torsionally actuated piezoelectric stick-slip drive system and a drive method thereof |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2764285B2 (en)* | 1988-11-28 | 1998-06-11 | 京セラ株式会社 | Rotary positioning device |
| US20040113519A1 (en)* | 2002-12-12 | 2004-06-17 | Charles Mentesana | Micro-beam friction liner and method of transferring energy |
| CN101262182A (en)* | 2008-04-15 | 2008-09-10 | 华南农业大学 | Composite vibrator linear ultrasonic motor |
| CN104320016B (en)* | 2014-10-13 | 2016-08-24 | 吉林大学 | Tandem Three Degree Of Freedom Precision Piezoelectric based on stick-slip inertia drives platform |
| CN105897042B (en)* | 2016-06-06 | 2017-11-10 | 长春工业大学 | Asymmetric rhombus hinge quadrature drive type piezoelectricity stick-slip line motor and its complex incentive method |
| CN105827141B (en)* | 2016-06-06 | 2017-12-15 | 长春工业大学 | Inclined ladder shape moves change type precision piezoelectricity stick-slip line motor and its driving method |
| CN105827142B (en)* | 2016-06-06 | 2017-10-27 | 长春工业大学 | Unsymmetric structure precision piezoelectricity stick-slip line motor and its driving method |
| Publication number | Publication date |
|---|---|
| CN108306546A (en) | 2018-07-20 |
| Publication | Publication Date | Title |
|---|---|---|
| CN108306546B (en) | Compact dual-actuating component piezoelectric stick-slip driving device and its driving method | |
| CN108092545B (en) | Multi-degree-of-freedom piezoelectric stick-slip micro-nano positioning platform and driving method thereof | |
| CN108322090B (en) | External toggle type rotary piezoelectric stick-slip driver and driving method thereof | |
| CN105827141B (en) | Inclined ladder shape moves change type precision piezoelectricity stick-slip line motor and its driving method | |
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