技术领域technical field
本发明涉及空间光学成像和光谱测量技术领域，具体为空间自调焦激光差动共焦拉曼光谱成像探测方法与装置。The invention relates to the technical field of spatial optical imaging and spectral measurement, in particular to a detection method and device for spatial self-adjusting laser differential confocal Raman spectral imaging.
背景技术Background technique
激光共焦拉曼光谱测试技术是将空间成像技术与拉曼光谱分析技术结合起来的新技术，它将入射激光通过自调焦望远系统聚焦到样品上，从而可以在较远的距离上在不受周围物质干扰的情况下，获得所照样品的物质成分结构和组成等，提供较好的分子“指纹”特征。它不仅可以观测样品同一层面内不同微区的拉曼光谱信号，还能分别观测样品空间深度不同的层面的拉曼信号，对被测样品进行空间扫描，从而在不损伤样品的情况下达到进行图谱探测的效果。激光共焦拉曼光谱测试技术由于其无损光谱层析成像能力及高分辨率，已广泛应用于物理、化学、生物医学、石油化工、环境科学、材料科学、地质、邢侦、考古和珠宝鉴定等领域。Laser confocal Raman spectroscopy testing technology is a new technology that combines spatial imaging technology and Raman spectroscopy analysis technology. In the case of interference from surrounding substances, the structure and composition of the material components of the photographed sample can be obtained, providing better molecular "fingerprint" features. It can not only observe the Raman spectrum signals of different micro-regions in the same layer of the sample, but also observe the Raman signals of different layers of the sample space depth, and perform spatial scanning on the sample to be tested, so as to achieve the goal of carrying out the test without damaging the sample. The effect of map detection. Laser confocal Raman spectroscopy testing technology has been widely used in physics, chemistry, biomedicine, petrochemical industry, environmental science, material science, geology, Xing investigation, archaeology and jewelry identification due to its non-destructive spectral tomography capability and high resolution and other fields.
目前，典型的激光共焦拉曼光谱探测仪的原理如图1所示，激光器发出光束后，经第一聚光镜、第一针孔后，经第二聚光镜后扩束成为平行光，透过第一分光系统、四分之一波片、第六聚光镜后，聚焦在被测样品上，激发出载有样品光谱特性的拉曼散射光，移动被测样品，使对应被测样品区域的拉曼散射光通过第六聚光镜、四分之一波片后，并被第一分光系统反射，经第七聚光镜聚焦到第三针孔后，由第八聚光镜汇聚到第二光谱仪，从而，测得载有被测样品光谱信息的拉曼光谱。At present, the principle of a typical laser confocal Raman spectrometer is shown in Figure 1. After the laser emits a beam, it passes through the first condenser lens, the first pinhole, and the second condenser lens expands the beam to become parallel light. After a spectroscopic system, a quarter-wave plate, and the sixth condenser, it focuses on the sample to be measured, and excites the Raman scattered light carrying the spectral characteristics of the sample, and moves the sample to make the Raman of the area corresponding to the sample to be measured The scattered light passes through the sixth condenser and the quarter-wave plate, and is reflected by the first spectroscopic system. After being focused by the seventh condenser to the third pinhole, it is converged by the eighth condenser to the second spectrometer. Raman spectrum with spectral information of the measured sample.
现有激光共焦拉曼光谱仪存在以下问题：1、采用了显微系统，限制了系统可探测的范围；2、采用了三维移动平台作为样品承载平台，限制了样品尺寸和存在状态；3、在进行样品探测前，需要对样品进行处理；4、为了减小拉曼散射光的能量损失，系统中选用的针孔通常在150um-200um之间，系统利用共焦方式进行焦点定位，针孔尺寸直接影响共焦轴向定位曲线的半高宽，针孔尺寸较大导致系统定焦精度降低，即降低了系统空间分辨力；5、利用弱的拉曼散射光进行定位，降低了系统的定焦灵敏度；6、在长时间光谱探测过程中，系统容易受环境等因素影响发生漂移，产生离焦，降低系统长期工作的可靠性；7、系统只可进行光谱探测，模式单一；8、测量过程中需要遮避光，工作环境受到限制。上述原因限制了共焦拉曼光谱系统探测空间物质的能力，制约了共焦拉曼光谱技术的进一步发展。The existing laser confocal Raman spectrometer has the following problems: 1. The use of a microscopic system limits the detectable range of the system; 2. The use of a three-dimensional mobile platform as a sample carrying platform limits the size and state of the sample; 3. Before sample detection, the sample needs to be processed; 4. In order to reduce the energy loss of Raman scattered light, the pinhole selected in the system is usually between 150um-200um, and the system uses confocal mode for focus positioning. The size directly affects the FWHM of the confocal axial positioning curve, and the larger pinhole size leads to a decrease in the system's focus accuracy, which reduces the system's spatial resolution; 5. Using weak Raman scattered light for positioning reduces the system's Fixed focus sensitivity; 6. During the long-term spectral detection process, the system is prone to drift due to environmental and other factors, resulting in defocusing, which reduces the reliability of the system's long-term work; 7. The system can only perform spectral detection with a single mode; 8. The measurement process needs to be protected from light, and the working environment is restricted. The above reasons limit the ability of the confocal Raman spectroscopy system to detect space matter, and restrict the further development of confocal Raman spectroscopy technology.
发明内容Contents of the invention
(一)解决的技术问题(1) Solved technical problems
针对现有技术的不足，本发明提供了空间自调焦激光差动共焦拉曼光谱成像探测方法与装置，解决了限制了共焦拉曼光谱系统探测空间物质的能力，制约了共焦拉曼光谱技术的进一步发展的问题。Aiming at the deficiencies of the prior art, the present invention provides a space self-adjusting laser differential confocal Raman spectroscopy imaging detection method and device, which solves the problem of limiting the ability of the confocal Raman spectroscopy system to detect space substances and restricts the confocal Raman spectroscopy. Questions for the further development of Mann spectroscopy techniques.
(二)技术方案(2) Technical solutions
为实现以上目的，本发明通过以下技术方案予以实现：空间自调焦激光差动共焦拉曼光谱成像探测方法，具体包括以下步骤：In order to achieve the above objectives, the present invention is realized through the following technical solutions: a spatial self-adjusting laser differential confocal Raman spectral imaging detection method, specifically comprising the following steps:
步骤1、通过激光光束产生系统产生激发光，经过二向色分光系统、望远调焦系统后，照射在被测样品上，并激发出瑞利散射光和载有样品光谱特性的拉曼散射光；Step 1. The excitation light is generated by the laser beam generation system. After passing through the dichroic spectroscopic system and the telescopic focusing system, it is irradiated on the sample to be tested, and the Rayleigh scattered light and Raman scattering carrying the spectral characteristics of the sample are excited. Light;
步骤2、通过望远调焦机构，使差动共焦探测系统的响应到达过零点，完成激发光束自动聚焦在样品上，同时获得样品的位置信息[α、β、l]；Step 2. Make the response of the differential confocal detection system reach the zero-crossing point through the telephoto focusing mechanism, complete the automatic focusing of the excitation beam on the sample, and obtain the position information [α, β, l] of the sample at the same time;
步骤3、使对应被测样品区域的瑞利散射光及拉曼散射光再次经过望远调焦系统，并被望远调焦系统整形成平行光透射至二向色分光系统，经二向色分光系统对瑞利散射光和拉曼散射光进行分离；Step 3. Make the Rayleigh scattered light and Raman scattered light corresponding to the sample area to be measured pass through the telephoto focusing system again, and be adjusted by the telephoto focusing system to form parallel light, which is transmitted to the dichroic spectroscopic system, and passed through the dichroic The spectroscopic system separates Rayleigh scattered light and Raman scattered light;
步骤4、部分瑞利散射光及自然光被二向色分光系统透射，经第一分光系统反射进入差动共焦探测系统，利用差动共焦探测系统中的第一探测器，差动共焦探测系统中的第四探测器，测得反映样品位置信息的强度响应I[α、β、l]，即可进行望远调焦系统焦点位置的判定，从而完成望远调焦系统的自动调焦，将激发光束聚焦在样品上；Step 4. Part of the Rayleigh scattered light and natural light are transmitted by the dichroic spectroscopic system and reflected by the first spectroscopic system into the differential confocal detection system. Using the first detector in the differential confocal detection system, the differential confocal The fourth detector in the detection system measures the intensity response I[α, β, l] that reflects the position information of the sample, and then can determine the focus position of the telephoto focusing system, thereby completing the automatic adjustment of the telephoto focusing system Focus, focus the excitation beam on the sample;
步骤5、拉曼散射光经二向色分光系统透射，经第一分光系统透射进入拉曼光谱探测系统，利用拉曼光谱探测系统测得载有被测样品特性的拉曼散射信号I(λ)，即可进行光谱测试，其中λ为波长；Step 5, the Raman scattered light is transmitted through the dichroic spectroscopic system, and then enters the Raman spectrum detection system through the first spectroscopic system, and the Raman scattering signal I(λ ), the spectral test can be carried out, where λ is the wavelength;
步骤6、自然光经第一分光系统部分反射，经第二分光系统反射进入成像光学系统，获取目标区域图像信息；Step 6. The natural light is partially reflected by the first spectroscopic system, then reflected by the second spectroscopic system and enters the imaging optical system to obtain image information of the target area;
步骤7、将I(λ)传送到数据处理模块进行数据处理，从而获得包含被测样品对应区域位置的光谱信息I(λ)，物体位置信息[α、β、l]；Step 7. Send I(λ) to the data processing module for data processing, so as to obtain spectral information I(λ) including the position of the corresponding area of the measured sample, and object position information [α, β, l];
步骤8、转动探测系统，对空间进行沿α、β方向扫描，望远调焦系统进行沿l方向扫描调焦，重复上述步骤测得对应物镜焦点位置的一组n个包含位置信息[α、β、l]和I(λ)的序列测量信息[I(λ)、α、β、l]；Step 8. Rotate the detection system to scan the space along the α and β directions, and the telephoto focusing system scans and adjusts the focus along the l direction. Repeat the above steps to measure a group of n items containing position information corresponding to the focal position of the objective lens [α, β, l] and sequence measurement information of I(λ) [I(λ), α, β, l];
步骤9、利用可分辨区域δn对应的位置信息[α、β、l]，找出对应δn区域的光谱信息In(λ)值，再根据与空间坐标[α、β、l]的关系，重构反映被测物微区δn三维结构和光谱特性的信息In(αn、βn、ln、λn)，即实现了微区δmin的光谱探测和三维几何位置探测，以及对应的图像信息；Step 9. Use the position information [α, β, l] corresponding to the resolvable area δn to find out the spectral information In(λ) value corresponding to the δn area, and then according to the relationship with the space coordinates [α, β, l], re- Construct the information In(αn, βn, ln, λn) that reflects the three-dimensional structure and spectral characteristics of the micro-area δn of the measured object, that is, realize the spectral detection and three-dimensional geometric position detection of the micro-area δmin, as well as the corresponding image information;
步骤10、对应最小可分辨区域δmin的三维尺度和光谱特性由下式确定：Step 10, the three-dimensional scale and spectral characteristics corresponding to the minimum resolvable area δmin are determined by the following formula:
优选的，所述差动共焦响应曲线过零点O处对应望远调焦系统焦点F，此处聚焦光斑尺寸最小，探测的区域最小，差动共焦响应曲线其他位置对应望远调焦系统的离焦区域，在焦前或焦后区域内的聚焦光斑尺寸随离焦量增大而增大，利用此特点，通过调整望远调焦系统的望远调焦机构，精确的将激发光束聚焦在样品上。Preferably, the zero-crossing point O of the differential confocal response curve corresponds to the focal point F of the telephoto focusing system, where the focus spot size is the smallest and the detected area is the smallest, and other positions of the differential confocal response curve correspond to the telephoto focusing system In the defocused area, the focus spot size in the pre-focus or post-focus area increases with the increase of the defocus amount. Using this feature, by adjusting the telephoto focusing mechanism of the telephoto focusing system, the excitation beam can be accurately focused Focus on the sample.
优选的，所述激发光束可以是偏振光束：线偏振、圆偏振、径向偏振光等，还可以是由光瞳滤波技术生成的结构光束，其与偏振调制技术联用可以压缩测量聚焦光斑的尺寸，提高系统角向分辨力。Preferably, the excitation beam can be a polarized beam: linearly polarized, circularly polarized, radially polarized, etc., and can also be a structured beam generated by pupil filtering technology, which can be used in conjunction with polarization modulation technology to compress the measurement focus spot size, improve the angular resolution of the system.
本发明还公开了空间自调焦激光差动共焦拉曼光谱成像探测装置，包括激发光束产生系统、望远调焦系统、二向色分光系统、第一分光系统、拉曼光谱探测系统、差动共焦探测系统、光学成像系统、及数据处理模块及计算机控制系统，其中，激发光束产生系统、望远调焦系统、沿光路依次放置在二向色分光系统的反射方向，第一分光系统处于二向色分光系统的透射方向，拉曼光谱探测系统位于第一分光系统的透射方向，差动共焦探测系统位于第一分光系统的反射方向，光学成像系统位于第二分光系统的反射方向，数据处理模块与拉曼光谱探测系统和差动共焦探测系统及望远调焦系统和空间周视扫描系统连接，用于融合并处理拉曼光谱探测系统与差动共焦探测系统采集到的数据及完成望远调焦系统的自动调焦。The invention also discloses a space self-adjusting laser differential confocal Raman spectrum imaging detection device, including an excitation beam generation system, a telescopic focusing system, a dichroic spectroscopic system, a first spectroscopic system, a Raman spectroscopic detection system, A differential confocal detection system, an optical imaging system, a data processing module and a computer control system, wherein the excitation beam generation system, the telescopic focusing system, and the reflection direction of the dichroic spectroscopic system are placed in sequence along the optical path, and the first spectroscopic The system is in the transmission direction of the dichroic spectroscopic system, the Raman spectroscopy detection system is in the transmission direction of the first spectroscopic system, the differential confocal detection system is in the reflection direction of the first spectroscopic system, and the optical imaging system is in the reflection direction of the second spectroscopic system. Direction, the data processing module is connected with the Raman spectrum detection system, the differential confocal detection system, the telescopic focusing system, and the spatial peripheral scanning system, and is used to fuse and process the acquisitions of the Raman spectrum detection system and the differential confocal detection system The received data and the automatic focusing of the telephoto focusing system are completed.
优选的，所述激发光束产生系统还可以包括偏振调制器及光瞳滤波器，用于产生偏振光及空间结构光束，用于提高系统的光学性能。Preferably, the excitation beam generation system may further include a polarization modulator and a pupil filter for generating polarized light and spatially structured beams for improving the optical performance of the system.
优选的，所述用于压缩激发光斑的光瞳滤波器可以位于偏振控制器与二向色分光系统之间，还可以位于二向色分光系统与望远调焦系统之间。Preferably, the pupil filter for compressing the excitation spot can be located between the polarization controller and the dichroic beam splitting system, or between the dichroic beam splitting system and the telephoto focusing system.
优选的，所述激发光束产生系统还可以放在二向色分光系统的透射方向，望远调焦系统依次放置在二向色分光系统的透射方向，第一分光系统依次放置在二向色分光系统的反射方向，拉曼光谱探测系统位于第一分光系统的透射方向，差动共焦探测系统位于第一分光系统的反射方向，成像光学系统可以位于第二分光系统的反射方向，数据处理模块连接差动共焦探测系统与拉曼光谱探测系统及望远调焦系统。Preferably, the excitation beam generation system can also be placed in the transmission direction of the dichroic spectroscopic system, the telephoto focusing system is placed in the transmission direction of the dichroic spectroscopic system in turn, and the first spectroscopic system is placed in the dichroic spectroscopic system in turn. The reflection direction of the system, the Raman spectrum detection system is located in the transmission direction of the first spectroscopic system, the differential confocal detection system is located in the reflection direction of the first spectroscopic system, the imaging optical system can be located in the reflection direction of the second spectroscopic system, and the data processing module Connect the differential confocal detection system with the Raman spectrum detection system and the telescopic focusing system.
优选的，所述拉曼光谱探测系统可以是普通的拉曼光谱探测系统，包括沿光路依次放置的第五聚光镜，位于第五聚光镜焦点位置的第一光谱仪及位于第一光谱仪后的第二探测器，用于被测样品的表面光谱的探测，还可以是共焦拉曼光谱探测系统，包括沿光路依次放置的第七聚光镜，位于第七聚光镜焦点位置的第三针孔，位于第三针孔后的第八聚光镜，位于第八聚光镜焦点位置的第二光谱仪及位于第二光谱仪后的第三探测器，用于提高系统信噪比和空间分辨力，完成对被测样品的光谱探测。Preferably, the Raman spectrum detection system may be a common Raman spectrum detection system, comprising a fifth condenser lens placed in sequence along the optical path, a first spectrometer positioned at the focal point of the fifth condenser lens and a second detector behind the first spectrometer The detector is used for the detection of the surface spectrum of the sample to be measured, and it can also be a confocal Raman spectrum detection system, including the seventh condenser lens placed in sequence along the optical path, the third pinhole located at the focal point of the seventh condenser lens, and the third pinhole located at the third pinhole The eighth condenser behind the hole, the second spectrometer at the focal position of the eighth condenser and the third detector behind the second spectrometer are used to improve the signal-to-noise ratio and spatial resolution of the system and complete the spectral detection of the measured sample.
优选的，所述数据处理模块包括用于处理位置信息的差动共焦数据处理模块和用于处理位置信息和光谱信息的数据融合模块，还包括用于控制望远调焦系统调焦的数据控制模块、用于图像信息获取的图像传感模块。Preferably, the data processing module includes a differential confocal data processing module for processing position information and a data fusion module for processing position information and spectral information, and also includes data for controlling the focusing of the telephoto focusing system A control module and an image sensing module for image information acquisition.
(三)有益效果(3) Beneficial effects
本发明提供了空间自调焦激光差动共焦拉曼光谱成像探测方法与装置。具备以下有益效果：The invention provides a space self-adjusting laser differential confocal Raman spectrum imaging detection method and device. Has the following beneficial effects:
(1)、该空间自调焦激光差动共焦拉曼光谱成像探测方法与装置，通过利用现有共焦拉曼光谱探测系统收集到的样品散射光中的强于样品拉曼散射光1e3-1e6倍的瑞利散射光束对聚焦光斑的焦点进行实时空间位置跟踪调整，使激光光斑精确聚焦在样品上，拉曼光谱探测系统利用系统收集到的样品散射光中的拉曼散射光进行光谱探测，通过成像光学系统，利用目标反射的自然光，获取目标的图像信息，然后再将差动共焦探测系统信号与拉曼光谱信号、空间图像信息有机融合，利用自调焦望远系统，提高系统拉曼散射光收集能力，大幅度提高系统可探测距离，从而实现激光差动共焦拉曼光谱成像系统大空间范围的自动物质光谱探测、图像获取。(1) In the spatial self-adjusting laser differential confocal Raman spectroscopy imaging detection method and device, the sample scattered light collected by the existing confocal Raman spectroscopy detection system is stronger than the sample Raman scattered light 1e3 The -1e6 Rayleigh scattered light beam performs real-time spatial position tracking and adjustment of the focus of the focused spot, so that the laser spot can be precisely focused on the sample. The Raman spectrum detection system uses the Raman scattered light in the sample scattered light collected by the system to perform spectrum analysis. Detection, through the imaging optical system, uses the natural light reflected by the target to obtain the image information of the target, and then organically integrates the signal of the differential confocal detection system with the Raman spectrum signal and spatial image information, and uses the self-adjusting telescopic system to improve the system pull The ability to collect Mann scattered light greatly increases the detectable distance of the system, thereby realizing automatic material spectrum detection and image acquisition in a large spatial range of the laser differential confocal Raman spectroscopy imaging system.
(2)、该空间自调焦激光差动共焦拉曼光谱成像探测方法与装置，通过利用望远系统，提高了系统光收集能力，提高了系统探测距离；利用差动共焦响应曲线控制望远调焦系统，完成激发光束自动聚焦在样品上。(2) The space self-adjusting laser differential confocal Raman spectral imaging detection method and device, through the use of the telescopic system, improve the light collection capability of the system and the detection distance of the system; use the differential confocal response curve to control The telephoto focusing system completes the automatic focusing of the excitation beam on the sample.
(3)、该空间自调焦激光差动共焦拉曼光谱成像探测方法与装置，通过利用差动共焦系统轴向响应曲线的过零点与望远系统焦点位置精确对应这一特性，通过响应曲线过零点来精确获取激发光斑焦点位置的光谱信息，实现大空间范围的光谱探测。(3) The space self-adjusting laser differential confocal Raman spectral imaging detection method and device utilizes the characteristic that the zero-crossing point of the axial response curve of the differential confocal system corresponds to the focus position of the telescopic system precisely, through The response curve crosses the zero point to accurately obtain the spectral information of the focal position of the excitation spot, and realize the spectral detection of a large spatial range.
(4)、该空间自调焦激光差动共焦拉曼光谱成像探测方法与装置，通过利用第一分光装置对系统收集到的瑞利散射光和载有被测样品光谱信息的拉曼散射光进行分光，瑞利散射光进入差动共焦探测系统，拉曼散射光进入拉曼光谱探测系统，实现光能的完全利用，使微弱的拉曼散射光能够无损的进入拉曼光谱探测系统，提高系统光谱探测能力。(4) The spatial self-adjusting laser differential confocal Raman spectral imaging detection method and device, by using the first spectroscopic device to collect the Rayleigh scattered light collected by the system and the Raman scattering carrying the spectral information of the measured sample The light is split, the Rayleigh scattered light enters the differential confocal detection system, and the Raman scattered light enters the Raman spectrum detection system to realize the full utilization of light energy, so that the weak Raman scattered light can enter the Raman spectrum detection system without loss , to improve the system's spectral detection capability.
(5)、该空间自调焦激光差动共焦拉曼光谱成像探测方法与装置，通过将差动共焦探测系统与自动调焦技术结合在一起，实现了自动化的精密调焦。(5) The spatial self-adjusting laser differential confocal Raman spectral imaging detection method and device realizes automatic precision focusing by combining the differential confocal detection system with automatic focusing technology.
(6)、该空间自调焦激光差动共焦拉曼光谱成像探测方法与装置，通过将成像光学技术、差动共焦探测技术与拉曼光谱探测系统及周视扫描系统在结构和功能上相融合，既可实现样品几何参数的成像，又可实现样品的光谱探测，即同时实现三维空间成像，图谱成像和光谱测试三种模式；样品测试不在需要准备，实现了自动化的即见即测。(6) The space self-adjusting laser differential confocal Raman spectral imaging detection method and device, through the combination of imaging optical technology, differential confocal detection technology, Raman spectral detection system and peripheral scanning system in structure and function The fusion of the upper and lower phases can realize not only the imaging of the geometric parameters of the sample, but also the spectral detection of the sample, that is, the three modes of three-dimensional space imaging, map imaging and spectral testing can be realized at the same time; the sample test does not need to be prepared, and the automatic "see-and-see" is realized Measurement.
附图说明Description of drawings
图1为本发明共焦拉曼光谱成像方法示意图；Fig. 1 is a schematic diagram of the confocal Raman spectral imaging method of the present invention;
图2为本发明差动共焦响应曲线图；Fig. 2 is a differential confocal response curve diagram of the present invention;
图3为本发明空间自调焦激光差动共焦拉曼光谱成像探测方法示意图；Fig. 3 is a schematic diagram of the spatial self-adjusting laser differential confocal Raman spectral imaging detection method of the present invention;
图4为本发明空间自调焦激光差动共焦拉曼光谱成像探测装置示意图；Fig. 4 is a schematic diagram of a space self-adjusting laser differential confocal Raman spectral imaging detection device of the present invention;
图5为本发明空间自调焦激光差动共焦拉曼光谱成像探测方法与装置实施实例图；Fig. 5 is a diagram of an implementation example of the spatial self-adjusting laser differential confocal Raman spectral imaging detection method and device of the present invention;
图中，1-激发光束产生系统，2-激光器，3-第一负透镜，4-第一聚光镜，5-第二聚光镜，6-第一针孔，7-第三聚光镜，8-1/4波片，9-二向色分光系统，10-望远调焦系统，11-望远准直镜，12-望远调焦机构，13-望远调焦集光镜，14-样品，15-第一分光系统，16-第二分光系统17-焦后探测系统，18-第一探测器，19-第二针孔，20-第四聚光镜，21-共焦响应曲线，22-拉曼光谱探测系统，23-第二探测器，24-第五聚光镜，25-第一光谱仪，26-入射狭缝，27-平面反射镜，28-第一凹面反射聚光镜，29-第二凹面反射聚光镜，30-光谱光栅，31-图像传感系统，32-图像传感器，33-成像光学系统，34-数据融合模块，35-计算机控制系统，36-第三分光系统，37-第六聚光镜，38-第七聚光镜，39-第三针孔，40-第八聚光镜，41-第二光谱仪，42-第三探测器，43-共焦响应曲线二，44-三维移动平台，45焦前探测系统，46-第四探测器，47-第四针孔，48-第九聚光镜，49-差动共焦分光系统，50-焦前响应曲线，51-焦后响应曲线，52-差动共焦响应曲线，53-差动共焦探测系统，54-数据处理模块。In the figure, 1-excitation beam generation system, 2-laser, 3-first negative lens, 4-first condenser, 5-second condenser, 6-first pinhole, 7-third condenser, 8-1/ 4 wave plates, 9-dichroic beam splitting system, 10-telephoto focusing system, 11-telescopic collimator, 12-telephoto focusing mechanism, 13-telephoto focusing light collector, 14-sample, 15- First spectroscopic system, 16-second spectroscopic system, 17-post-focus detection system, 18-first detector, 19-second pinhole, 20-fourth condenser, 21-confocal response curve, 22-Raman spectrum Detection system, 23-second detector, 24-fifth condenser, 25-first spectrometer, 26-incidence slit, 27-plane mirror, 28-first concave reflective condenser, 29-second concave reflective condenser, 30-spectral grating, 31-image sensing system, 32-image sensor, 33-imaging optical system, 34-data fusion module, 35-computer control system, 36-third beam splitting system, 37-sixth condenser, 38- Seventh condenser, 39-third pinhole, 40-eighth condenser, 41-second spectrometer, 42-third detector, 43-confocal response curve two, 44-three-dimensional mobile platform, 45 pre-focus detection system, 46-the fourth detector, 47-the fourth pinhole, 48-the ninth condenser, 49-differential confocal spectroscopic system, 50-response curve before focus, 51-response curve after focus, 52-differential confocal response Curve, 53-differential confocal detection system, 54-data processing module.
具体实施方式Detailed ways
下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅仅是本发明一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
本发明的基本思想是利用望远系统提高系统的探测范围，利用调焦技术、差动共焦探测实现系统的自动聚焦，利用图像传感系统获取图像信息，并和拉曼探测相结合，完成空间自调焦的拉曼光谱成像探测。The basic idea of the present invention is to use the telescopic system to improve the detection range of the system, use the focusing technology and differential confocal detection to realize the automatic focus of the system, use the image sensing system to obtain image information, and combine it with Raman detection to complete Spatial self-focusing Raman spectroscopic imaging detection.
如图2所示，激发光束产生系统1产生激发光，经过二向色分光系统9反射，经望远系统10后，聚焦在被测样品14上，并在样品上激发出瑞利散射光和载有被测样品光谱特性的拉曼散射光，激发出的拉曼散射光和瑞利散射光及样品反射的自然光被系统收集回光路，经过望远系统10后，经二向色分光系统9透射后，拉曼散射光、自然光和部分瑞利散射光透射，经第一分光系统15分光，部分瑞利散射光被反射进入差动共焦探测系统53进行位置探测，拉曼散射光透射进入光谱探测系统22进行光谱探测，根据差动共焦响应曲线，数据处理模块控制望远调焦机构调焦，使激发光聚焦在样品上，使差动共焦响应曲线过零，完成激发光束的自动聚焦，自然光被第一分光系统反射后，又被第二分光系统反射到图像传感系统，图像传感系统利用自然光获取目标的图像信息。As shown in Figure 2, the excitation beam generation system 1 generates excitation light, which is reflected by the dichroic spectroscopic system 9, and after passing through the telescopic system 10, focuses on the sample 14 to be measured, and excites Rayleigh scattered light and light on the sample. The Raman scattered light carrying the spectral characteristics of the sample to be measured, the excited Raman scattered light and Rayleigh scattered light and the natural light reflected by the sample are collected back to the optical path by the system, and after passing through the telescopic system 10, the dichroic spectroscopic system 9 After transmission, the Raman scattered light, natural light and part of the Rayleigh scattered light are transmitted through the first spectroscopic system 15, and part of the Rayleigh scattered light is reflected into the differential confocal detection system 53 for position detection, and the Raman scattered light is transmitted into the The spectral detection system 22 performs spectral detection. According to the differential confocal response curve, the data processing module controls the telephoto focusing mechanism to focus, so that the excitation light is focused on the sample, and the differential confocal response curve crosses zero, completing the excitation beam. Automatic focusing, after the natural light is reflected by the first spectroscopic system, it is reflected by the second spectroscopic system to the image sensing system, and the image sensing system uses natural light to obtain the image information of the target.
本发明实施例提供空间自调焦激光差动共焦拉曼光谱成像探测方法，具体包括以下步骤：An embodiment of the present invention provides a spatial self-adjusting laser differential confocal Raman spectral imaging detection method, which specifically includes the following steps:
步骤1、通过激光光束产生系统1产生激发光，经过二向色分光系统9、望远调焦系统10后，照射在被测样品14上，并激发出瑞利散射光和载有样品14光谱特性的拉曼散射光；Step 1. The excitation light is generated by the laser beam generation system 1, and after passing through the dichroic spectroscopic system 9 and the telescopic focusing system 10, it is irradiated on the sample 14 to be tested, and the Rayleigh scattered light and the spectrum of the loaded sample 14 are excited. characteristic Raman scattered light;
步骤2、通过望远调焦机构12，使差动共焦探测系统53的响应到达过零点，完成激发光束自动聚焦在样品14上，同时获得样品14的位置信息[α、β、l]；Step 2. Make the response of the differential confocal detection system 53 reach the zero-crossing point through the telephoto focusing mechanism 12, complete the automatic focusing of the excitation beam on the sample 14, and simultaneously obtain the position information [α, β, l] of the sample 14;
步骤3、使对应被测样品区域的瑞利散射光及拉曼散射光再次经过望远调焦系统10，并被望远调焦系统10整形成平行光透射至二向色分光系统9，经二向色分光系统9对瑞利散射光和拉曼散射光进行分离；Step 3: Make the Rayleigh scattered light and Raman scattered light corresponding to the area of the sample to be measured pass through the telephoto focusing system 10 again, and be adjusted by the telephoto focusing system 10 to form parallel light transmitted to the dichroic spectroscopic system 9. The dichroic spectroscopic system 9 separates Rayleigh scattered light and Raman scattered light;
步骤4、部分瑞利散射光及自然光被二向色分光系统9透射，经第一分光系统15反射进入差动共焦探测系统53，利用差动共焦探测系统53中的第一探测器18，差动共焦探测系统53中的第四探测器46，测得反映样品14位置信息的强度响应I[α、β、l]，即可进行望远调焦系统10焦点位置的判定，从而完成望远调焦系统10的自动调焦，将激发光束聚焦在样品14上；Step 4. Part of the Rayleigh scattered light and natural light are transmitted by the dichroic spectroscopic system 9, reflected by the first spectroscopic system 15 and enter the differential confocal detection system 53, using the first detector 18 in the differential confocal detection system 53 , the fourth detector 46 in the differential confocal detection system 53 measures the intensity response I[α, β, l] reflecting the position information of the sample 14, and can then determine the focus position of the telephoto focusing system 10, thereby Complete the automatic focusing of the telephoto focusing system 10, and focus the excitation beam on the sample 14;
步骤5、拉曼散射光经二向色分光系统9透射，经第一分光系统15透射进入拉曼光谱探测系统22，利用拉曼光谱探测系统22测得载有被测样品14特性的拉曼散射信号I(λ)，即可进行光谱测试，其中λ为波长；Step 5, the Raman scattered light is transmitted through the dichroic spectroscopic system 9, then transmitted through the first spectroscopic system 15 and enters the Raman spectrum detection system 22, and the Raman spectrum carrying the characteristics of the sample 14 to be measured is measured by the Raman spectrum detection system 22. The scattering signal I(λ) can be used for spectral testing, where λ is the wavelength;
步骤6、自然光经第一分光系统15部分反射，经第二分光系统16反射进入成像光学系统33，获取目标区域图像信息；Step 6. The natural light is partially reflected by the first spectroscopic system 15, then reflected by the second spectroscopic system 16 and enters the imaging optical system 33 to obtain image information of the target area;
步骤7、将I(λ)传送到数据处理模块进行数据处理，从而获得包含被测样品14对应区域位置的光谱信息I(λ)，物体位置信息[α、β、l]；Step 7. Send I(λ) to the data processing module for data processing, so as to obtain spectral information I(λ) including the corresponding area position of the measured sample 14, and object position information [α, β, l];
步骤8、转动探测系统，对空间进行沿α、β方向扫描，望远调焦系统10进行沿l方向扫描调焦，重复上述步骤测得对应物镜焦点位置的一组n个包含位置信息[α、β、l]和I(λ)的序列测量信息[I(λ)、α、β、l]；Step 8. Rotate the detection system to scan the space along the α and β directions. The telephoto focusing system 10 scans and adjusts the focus along the l direction. Repeat the above steps to measure a group of n items containing position information [α , β, l] and sequence measurement information of I(λ) [I(λ), α, β, l];
步骤9、利用可分辨区域δn对应的位置信息[α、β、l]，找出对应δn区域的光谱信息In(λ)值，再根据与空间坐标[α、β、l]的关系，重构反映被测物微区δn三维结构和光谱特性的信息In(αn、βn、ln、λn)，即实现了微区δmin的光谱探测和三维几何位置探测，以及对应的图像信息；Step 9. Use the position information [α, β, l] corresponding to the resolvable area δn to find out the spectral information In(λ) value corresponding to the δn area, and then according to the relationship with the space coordinates [α, β, l], re- Construct the information In(αn, βn, ln, λn) that reflects the three-dimensional structure and spectral characteristics of the micro-area δn of the measured object, that is, realize the spectral detection and three-dimensional geometric position detection of the micro-area δmin, as well as the corresponding image information;
步骤10、对应最小可分辨区域δmin的三维尺度和光谱特性由下式确定：Step 10, the three-dimensional scale and spectral characteristics corresponding to the minimum resolvable area δmin are determined by the following formula:
如图4所示，空间自调焦激光差动共焦拉曼光谱成像探测方法，其测试步骤如下：As shown in Figure 4, the test steps of the spatial self-adjusting laser differential confocal Raman spectroscopy imaging detection method are as follows:
首先，激发光束产生系统1中的激光器2产生激发光，经过第一负透镜3发散扩束，经第一聚光镜4准直成为平行光束，经二向色分光系统9反射，经望远调焦镜11后发散，经望远调焦集光镜13后，聚焦在被测样品14上，并在样品上激发出瑞利散射光和载有被测样品光谱特性的拉曼散射光，激发出的拉曼散射光和瑞利散射光及物体反射的自然光被望远调焦集光镜13收集回光路，经过望远准直镜11后压缩光束口径，经二向色分光系统9透射后，拉曼散射光和部分瑞利散射光透射及自然光，经第一分光系统15分光，部分瑞利散射光和自然光被反射进入第二分光系统16，经第二分光系统分光后，部分瑞利散射光进入差动共焦探测系统53，部分自然光进入图像传感系统31，进入差动共焦探测系统53的部分瑞利散射光经差动共焦分光系统49透射，经第四聚光镜会聚20，经第二针孔19透射，在第一探测器18上形成焦后响应信号，部分被差动共焦分光系统49反射，经第九聚光镜，经过第四针孔47，在第四探测器46上形成焦前响应信号，并被传送到数据处理模块34，然后被处理后传送到计算机控制系统35，计算机控制系统35处理后，形成控制信号并传送给数据处理模块34，数据处理模块34产生调焦控制信号并控制望远调焦机构12进行调焦，同时第一探测器18、第四探测器46的信号也会跟踪变化，形成新的控制循环，这个过程继续下去，直到差动共焦响应曲线出现过零点，调焦机构12完成激发光的聚焦，此时拉曼散射光透射进入光谱探测系统22进行光谱探测，进入图像传感系统31的自然光形成图像信息。Firstly, the laser 2 in the excitation beam generation system 1 generates excitation light, diverges and expands the beam through the first negative lens 3, collimates it into a parallel beam through the first condenser lens 4, reflects it through the dichroic beam splitting system 9, and adjusts the focus through the telephoto Mirror 11 diverges, and after passing through the telescopic focusing lens 13, it focuses on the sample 14 to be measured, and excites Rayleigh scattered light and Raman scattered light carrying the spectral characteristics of the sample to be measured on the sample, and the excited Raman Mann scattered light, Rayleigh scattered light and natural light reflected by the object are collected back to the optical path by the telescopic focusing light collecting mirror 13, after passing through the telescopic collimating mirror 11, the beam aperture is compressed, and after being transmitted through the dichroic spectroscopic system 9, the Raman scattered light Part of the Rayleigh scattered light and natural light are split by the first spectroscopic system 15, and part of the Rayleigh scattered light and natural light are reflected into the second spectroscopic system 16. After being split by the second spectroscopic system, part of the Rayleigh scattered light enters the differential In the confocal detection system 53, part of the natural light enters the image sensing system 31, and part of the Rayleigh scattered light entering the differential confocal detection system 53 is transmitted through the differential confocal spectroscopic system 49, converged by the fourth condenser lens 20, and passed through the second pin The hole 19 transmits and forms a post-focus response signal on the first detector 18, part of which is reflected by the differential confocal spectroscopic system 49, passes through the ninth condenser, passes through the fourth pinhole 47, and forms a pre-focus response signal on the fourth detector 46 The response signal is sent to the data processing module 34, then processed and then sent to the computer control system 35. After the computer control system 35 processes it, it forms a control signal and sends it to the data processing module 34. The data processing module 34 generates a focus control signal And control the telephoto focusing mechanism 12 to adjust the focus, and at the same time the signals of the first detector 18 and the fourth detector 46 will track and change, forming a new control cycle, and this process continues until the differential confocal response curve appears At the zero point, the focusing mechanism 12 completes the focusing of the excitation light. At this time, the Raman scattered light is transmitted into the spectral detection system 22 for spectral detection, and the natural light entering the image sensing system 31 forms image information.
利用空间自调焦激光差动共焦拉曼光谱成像探测装置，通过差动共焦探测响应曲线使调焦机构12完成激发光的聚焦，此时拉曼散射光透射进入光谱探测系统22进行光谱探测，拉曼散射光被第五聚光镜24会聚进入第一光谱仪25，拉曼散射光经入射狭缝26，平面反射镜27和第一凹面反射聚光镜28反射后到达光谱光栅30，光束经过光谱光栅30衍射后，被第二凹面反射聚光镜29反射聚焦到第二探测器23。由于光栅的衍射作用，拉曼光谱中不同波长的光相互分离，从光谱仪出射出来的即是样品的拉曼光谱。Utilize the spatial self-adjusting laser differential confocal Raman spectrum imaging detection device, and through the differential confocal detection response curve, the focusing mechanism 12 completes the focusing of the excitation light. At this time, the Raman scattered light is transmitted into the spectrum detection system 22 for spectrum Detection, the Raman scattered light is converged by the fifth condenser lens 24 into the first spectrometer 25, the Raman scattered light reaches the spectral grating 30 after being reflected by the incident slit 26, the plane reflector 27 and the first concave reflective condenser mirror 28, and the light beam passes through the spectral grating After 30 diffraction, it is reflected and focused by the second concave reflective condenser 29 to the second detector 23 . Due to the diffraction effect of the grating, the light of different wavelengths in the Raman spectrum is separated from each other, and what comes out of the spectrometer is the Raman spectrum of the sample.
测量过程中，对被测样品14进行空间扫描时，差动共焦探测系统53，测得反应被测样品14距离变化的强度响应为I(α，β，l)，将所得强度响应I(α，β，l)传送到数据处理模块34进行处理。During the measurement process, when the sample under test 14 is spatially scanned, the differential confocal detection system 53 measures the intensity response reflecting the distance change of the sample under test 14 as I(α, β, l), and the obtained intensity response I( α, β, l) are sent to the data processing module 34 for processing.
拉曼光谱探测系统22中第二探测器23探测到的载有被测样品14光谱信息的拉曼散射光光谱信号为I(λ)，其中λ为波长，同时图像传感系统获取目标区域的图像信息IMG(α，β，l)；The Raman scattered light spectrum signal carrying the spectral information of the measured sample 14 detected by the second detector 23 in the Raman spectrum detection system 22 is I(λ), where λ is the wavelength, and the image sensing system acquires the target area Image information IMG(α, β, l);
将I(λ)，I(α，β，l)，IMG(α，β，l)传送到计算机控制系统35进行数据处理，从而获得包含被测样品14位置信息I(α，β，l)和光谱信息I(λ)的三维测量信息I(α，β，l，λ，IMG)。Send I(λ), I(α, β, l), and IMG (α, β, l) to the computer control system 35 for data processing, thereby obtaining position information I(α, β, l) containing the measured sample 14 and the three-dimensional measurement information I(α, β, l, λ, IMG) of the spectral information I(λ).
对被测样品14沿α，β向扫描，望远调焦机构12沿l向扫描，重复上述步骤测得对应物镜焦点位置附近的一组n个包含位置信息[α，β，l]和I(λ)的序列测量信息[I(λ)，α，β，l，IMG]。The measured sample 14 is scanned along the α and β directions, and the telescopic focusing mechanism 12 is scanned along the l direction, and the above steps are repeated to measure a group of n near the focal position of the corresponding objective lens containing position information [α, β, l] and I (λ) sequence measurement information [I(λ), α, β, l, IMG].
利用可分辨区域δn对应的位置信息[α，β，l]，找出对应δn区域的光谱信息In(λ)值，再根据与空间坐标[α，β，l]的关系，重构反映被测物微区δn三维结构和光谱特性的信息In(αn，βn，ln，λn)，即实现了微区δmin的光谱探测和三维几何位置探测.Use the position information [α, β, l] corresponding to the resolvable area δn to find out the spectral information In(λ) value corresponding to the δn area, and then reconstruct the reflected Measuring the information In(αn, βn, ln, λn) of the three-dimensional structure and spectral characteristics of the micro-area δn of the object, that is, the spectral detection and three-dimensional geometric position detection of the micro-area δmin are realized.
对应最小可分辨区域δmin的三维尺度和光谱特性由下式确定：The three-dimensional scale and spectral characteristics corresponding to the minimum resolvable region δmin are determined by the following formula:
即实现了空间自调焦激光共焦拉曼光谱成像探测，微区图谱成像；That is, the spatial self-adjusting laser confocal Raman spectral imaging detection and micro-region imaging are realized;
Iσmin(α,β,l)＝In(α,β,l)三维形状成像Iσmin (α,β,l)=In (α,β,l) 3D shape imaging
Iσmin(α,β,l)＝In(λ)光谱测量Iσmin (α,β,l)=In (λ) Spectral measurement
从图4中可以看出，通过差动共焦探测系统53响应曲线52的过零点，可精确捕获激发光斑的焦点位置，从测量序列数据中，抽取对应焦点位置F的激发光谱，即实现了微区的光谱探测和三维几何位置探测，同时获取目标微区的图像信息。It can be seen from FIG. 4 that through the zero-crossing point of the response curve 52 of the differential confocal detection system 53, the focus position of the excitation spot can be accurately captured, and the excitation spectrum corresponding to the focus position F is extracted from the measurement sequence data, which realizes Spectral detection and three-dimensional geometric position detection of the micro-area, and image information of the target micro-area is obtained at the same time.
如图4所示，空间自调焦激光差动共焦拉曼光谱成像探测装置包括位于二向色分光系统9反射方向的激光光束产生系统1，位于二向色分光系统9透射方向沿光路依次放置的望远准直镜11，望远调焦集光镜13，被测样品14，位于二向色分光系统9透射方向的第一分光系统15，位于第一分光系统15透射方向的拉曼光谱探测系统22，位于第一分光系统反射方向的第二分光系统16，位于第二分光系统16透射方向的差动共焦探测系统53，位于第二分光系统16反射方向的图像传感系统，及位于差动共焦探测系统53与拉曼光谱探测系统22及望远调焦机构12的连接处的数据处理模块34；其中，激发光束产生系统1用于产生激发光束，包括沿光路依次放置的激光器2，第一负透镜3，第一聚光镜4；拉曼光谱探测系统包括沿光路依次放置的第五聚光镜24，位于第五聚光镜24焦点位置的第一光谱仪25及位于第一光谱仪25后的第二探测器23，其中，第一光谱仪25包括沿光路依次放置的入射狭缝26，平面反射镜27，第一凹面反射聚光镜28，光谱光栅30，第二凹面反射聚光镜29；差动共焦探测系统53包括焦后探测系统17、焦前探测系统45、差动共焦分光系统49，其中焦后探测系统27包括第四聚光镜20，位于第四聚光镜20焦平面后的第二针孔19，位于第二针孔19后的第一探测器18，焦前探测系统45包括第九聚光镜48，位于第九聚光镜48焦平面前的第四针孔47，位于第四针孔47后的第四探测器46；数据处理模块34，及计算机控制系统35，用于融合处理采集到的数据并产生控制信号。As shown in Figure 4, the spatial self-adjusting laser differential confocal Raman spectroscopy imaging detection device includes a laser beam generation system 1 located in the reflection direction of the dichroic spectroscopic system 9, and a laser beam generation system 1 located in the transmission direction of the dichroic spectroscopic system 9 along the optical path. Placed telescopic collimator 11, telescopic focusing light collector 13, measured sample 14, the first spectroscopic system 15 positioned in the transmission direction of the dichroic spectroscopic system 9, and the Raman spectrum detection positioned in the transmission direction of the first spectroscopic system 15 System 22, the second spectroscopic system 16 positioned in the reflection direction of the first spectroscopic system, the differential confocal detection system 53 positioned in the transmission direction of the second spectroscopic system 16, the image sensing system positioned in the reflection direction of the second spectroscopic system 16, and the The data processing module 34 at the connection between the differential confocal detection system 53, the Raman spectrum detection system 22 and the telescopic focusing mechanism 12; wherein the excitation beam generation system 1 is used to generate the excitation beam, including lasers placed in sequence along the optical path 2. The first negative lens 3, the first condenser lens 4; the Raman spectrum detection system includes the fifth condenser lens 24 placed in sequence along the optical path, the first spectrometer 25 positioned at the focal position of the fifth condenser lens 24 and the first spectrometer behind the first spectrometer 25 Two detectors 23, wherein the first spectrometer 25 includes an incident slit 26 placed in sequence along the optical path, a plane mirror 27, a first concave reflective condenser 28, a spectrum grating 30, and a second concave reflective condenser 29; differential confocal detection The system 53 includes a post-focus detection system 17, a pre-focus detection system 45, and a differential confocal spectroscopic system 49, wherein the post-focus detection system 27 includes a fourth condenser lens 20, a second pinhole 19 located behind the focal plane of the fourth condenser lens 20, The first detector 18 located behind the second pinhole 19, the pre-focus detection system 45 includes a ninth condenser lens 48, a fourth pinhole 47 located in front of the focal plane of the ninth condenser lens 48, and a fourth pinhole located behind the fourth pinhole 47. The detector 46; the data processing module 34, and the computer control system 35 are used for fusing and processing the collected data and generating control signals.
本发明中，差动共焦响应曲线52过零点O处对应望远调焦系统10焦点F，此处聚焦光斑尺寸最小，探测的区域最小，差动共焦响应曲线52其他位置对应望远调焦系统10的离焦区域，在焦前或焦后区域内的聚焦光斑尺寸随离焦量增大而增大，利用此特点，通过调整望远调焦系统10的望远调焦机构12，精确的将激发光束聚焦在样品14上。In the present invention, the zero-crossing point O of the differential confocal response curve 52 corresponds to the focal point F of the telephoto focusing system 10, where the focus spot size is the smallest and the detected area is the smallest, and other positions of the differential confocal response curve 52 correspond to the telephoto focusing system 10. In the out-of-focus area of the focus system 10, the focus spot size in the front-focus or back-focus area increases with the increase of the defocus amount. Using this feature, by adjusting the telephoto focus adjustment mechanism 12 of the telephoto focus adjustment system 10, Precisely focus the excitation beam on the sample 14.
本发明中，激发光束可以是偏振光束：线偏振、圆偏振、径向偏振光等，还可以是由光瞳滤波技术生成的结构光束，其与偏振调制技术联用可以压缩测量聚焦光斑的尺寸，提高系统角向分辨力。In the present invention, the excitation beam can be a polarized beam: linearly polarized, circularly polarized, radially polarized, etc., and can also be a structured beam generated by pupil filtering technology, which can be used in combination with polarization modulation technology to compress the size of the focused spot for measurement , to improve the angular resolution of the system.
本发明还公开了空间自调焦激光差动共焦拉曼光谱成像探测装置，包括激发光束产生系统1、望远调焦系统10、二向色分光系统9、第一分光系统15、拉曼光谱探测系统22、差动共焦探测系统53、光学成像系统33、及数据处理模块59及计算机控制系统35，其中，激发光束产生系统1、望远调焦系统10、沿光路依次放置在二向色分光系统9的反射方向，第一分光系统15处于二向色分光系统9的透射方向，拉曼光谱探测系统22位于第一分光系统15的透射方向，差动共焦探测系统53位于第一分光系统15的反射方向，光学成像系统33位于第二分光系统16的反射方向，数据处理模块59与拉曼光谱探测系统22和差动共焦探测系统53及望远调焦系统10和空间周视扫描系统54连接，用于融合并处理拉曼光谱探测系统22与差动共焦探测系统53采集到的数据及完成望远调焦系统10的自动调焦。The invention also discloses a space self-adjusting laser differential confocal Raman spectrum imaging detection device, including an excitation beam generation system 1, a telescopic focusing system 10, a dichroic spectroscopic system 9, a first spectroscopic system 15, a Raman The spectral detection system 22, the differential confocal detection system 53, the optical imaging system 33, the data processing module 59 and the computer control system 35, wherein the excitation beam generation system 1, the telescopic focus adjustment system 10, are placed in two sequentially along the optical path In the reflection direction of the chromatic spectroscopic system 9, the first spectroscopic system 15 is in the transmission direction of the dichroic spectroscopic system 9, the Raman spectrum detection system 22 is in the transmission direction of the first spectroscopic system 15, and the differential confocal detection system 53 is in the second The reflection direction of the first spectroscopic system 15, the optical imaging system 33 is located in the reflection direction of the second spectroscopic system 16, the data processing module 59 and the Raman spectrum detection system 22 and the differential confocal detection system 53 and the telescopic focusing system 10 and space The peripheral scanning system 54 is connected to fuse and process the data collected by the Raman spectrum detection system 22 and the differential confocal detection system 53 and to complete the automatic focusing of the telephoto focusing system 10 .
如图3所示，本装置包括沿光路依次放置的激发光束产生系统1，二向色分光系统9，望远系统10，被测样品14，位于二向色分光系统9透射方向的第一分光系统15，位于第一分光系统15透射方向的光谱探测系统22及反射方向的第二反光系统16，位于第二分光系统16透射方向的差动共焦探测系统53，位于第二分光系统16反射方向的图像传感系统31，还包括连接光谱探测系统22和差动共焦探测系统53及望远系统10的数据处理模块34及计算机控制系统35。As shown in Figure 3, the device includes an excitation beam generating system 1 placed sequentially along the optical path, a dichroic spectroscopic system 9, a telescopic system 10, a sample to be tested 14, and a first spectrophotometer located in the transmission direction of the dichroic spectroscopic system 9. System 15, the spectral detection system 22 located in the transmission direction of the first spectroscopic system 15 and the second reflection system 16 in the reflection direction, the differential confocal detection system 53 located in the transmission direction of the second spectroscopic system 16, and the reflective system 53 located in the second spectroscopic system 16 The direction image sensing system 31 also includes a data processing module 34 and a computer control system 35 connected to the spectral detection system 22 , the differential confocal detection system 53 and the telescopic system 10 .
本发明中，激发光束产生系统1还可以包括偏振调制器及光瞳滤波器，用于产生偏振光及空间结构光束，用于提高系统的光学性能。In the present invention, the excitation beam generation system 1 may further include a polarization modulator and a pupil filter for generating polarized light and spatially structured light beams for improving the optical performance of the system.
本发明中，用于压缩激发光斑的光瞳滤波器可以位于偏振控制器与二向色分光系统9之间，还可以位于二向色分光系统9与望远调焦系统10之间。In the present invention, the pupil filter for compressing the excitation spot can be located between the polarization controller and the dichroic beam splitting system 9 , or between the dichroic beam splitting system 9 and the telephoto focusing system 10 .
本发明中，激发光束产生系统1还可以放在二向色分光系统9的透射方向，望远调焦系统10依次放置在二向色分光系统9的透射方向，第一分光系统15依次放置在二向色分光系统9的反射方向，拉曼光谱探测系统22位于第一分光系统15的透射方向，差动共焦探测系统53位于第一分光系统15的反射方向，成像光学系统33可以位于第二分光系统16的反射方向，数据处理模块59连接差动共焦探测系统53与拉曼光谱探测系统22及望远调焦系统10。In the present invention, the excitation beam generation system 1 can also be placed in the transmission direction of the dichroic spectroscopic system 9, the telephoto focusing system 10 is placed in the transmission direction of the dichroic spectroscopic system 9 in turn, and the first spectroscopic system 15 is placed in sequence The reflection direction of the dichroic spectroscopic system 9, the Raman spectrum detection system 22 is located in the transmission direction of the first spectroscopic system 15, the differential confocal detection system 53 is located in the reflection direction of the first spectroscopic system 15, and the imaging optical system 33 can be located in the second spectroscopic system 15. The reflection direction of the two-spectroscopic system 16 and the data processing module 59 are connected to the differential confocal detection system 53 , the Raman spectrum detection system 22 and the telescopic focusing system 10 .
本发明中，拉曼光谱探测系统22可以是普通的拉曼光谱探测系统，包括沿光路依次放置的第五聚光镜24，位于第五聚光镜24焦点位置的第一光谱仪25及位于第一光谱仪25后的第二探测器23，用于被测样品14的表面光谱的探测，还可以是共焦拉曼光谱探测系统22，包括沿光路依次放置的第七聚光镜38，位于第七聚光镜38焦点位置的第三针孔39，位于第三针孔39后的第八聚光镜40，位于第八聚光镜40焦点位置的第二光谱仪41及位于第二光谱仪41后的第三探测器42，用于提高系统信噪比和空间分辨力，完成对被测样品14的光谱探测。In the present invention, the Raman spectrum detection system 22 can be a common Raman spectrum detection system, comprising a fifth condenser lens 24 placed sequentially along the optical path, a first spectrometer 25 positioned at the focal position of the fifth condenser mirror 24 and a rear spectrometer 25 positioned at the first spectrometer 25. The second detector 23 is used for the detection of the surface spectrum of the measured sample 14, and can also be a confocal Raman spectrum detection system 22, including the seventh condenser lens 38 placed in sequence along the optical path, located at the focal point of the seventh condenser lens 38 The third pinhole 39, the eighth condenser 40 behind the third pinhole 39, the second spectrometer 41 positioned at the focal point of the eighth condenser 40 and the third detector 42 behind the second spectrometer 41 are used to improve system signal noise ratio and spatial resolution to complete the spectral detection of the sample 14 to be tested.
本发明中，数据处理模块59包括用于处理位置信息的差动共焦数据处理模块和用于处理位置信息和光谱信息的数据融合模块，还包括用于控制望远调焦系统10调焦的数据控制模块、用于图像信息获取的图像传感模块。In the present invention, the data processing module 59 includes a differential confocal data processing module for processing position information and a data fusion module for processing position information and spectral information, and also includes a function for controlling the focusing of the telephoto focusing system 10 A data control module and an image sensing module for image information acquisition.
需要说明的是，在本文中，诸如第一和第二等之类的关系术语仅仅用来将一个实体或者操作与另一个实体或操作区分开来，而不一定要求或者暗示这些实体或操作之间存在任何这种实际的关系或者顺序。而且，术语“包括”、“包含”或者其任何其他变体意在涵盖非排他性的包含，从而使得包括一系列要素的过程、方法、物品或者设备不仅包括那些要素，而且还包括没有明确列出的其他要素，或者是还包括为这种过程、方法、物品或者设备所固有的要素。It should be noted that in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply that there is a relationship between these entities or operations. There is no such actual relationship or order between them. Furthermore, the term "comprises", "comprises" or any other variation thereof is intended to cover a non-exclusive inclusion such that a process, method, article, or apparatus comprising a set of elements includes not only those elements, but also includes elements not expressly listed. other elements of or also include elements inherent in such a process, method, article, or device.
尽管已经示出和描述了本发明的实施例，对于本领域的普通技术人员而言，可以理解在不脱离本发明的原理和精神的情况下可以对这些实施例进行多种变化、修改、替换和变型，本发明的范围由所附权利要求及其等同物限定。Although the embodiments of the present invention have been shown and described, those skilled in the art can understand that various changes, modifications and substitutions can be made to these embodiments without departing from the principle and spirit of the present invention. and modifications, the scope of the invention is defined by the appended claims and their equivalents.
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