The content of the invention
It is an object of the invention to provide a kind of three axis MEMS gyro, the three axis MEMS gyro can solve volume compared withGreatly, the higher problem of cost.
To achieve the above object, the present invention provides a kind of three axis MEMS gyro, including the X-axis being arranged in X-directionTest section, Y-axis test section and Z axis test section, and be connected with each other between above three test section by external mass block, andAnd it is connected between the external mass block and above three test section by some connecting spring beams.
Relative to above-mentioned background technology, three axis MEMS gyro provided by the invention, mainly include an X-axis test section,One Y-axis test section and a Z axis test section；Direction at left and right sides of Y-axis test section is defined as X-direction, Y-axis test sectionUpper and lower two side direction is defined as Y direction, and X-axis test section, Y-axis test section and Z axis test section are set in turn in X-directionOn；And the core of the present invention is to utilize connecting spring beam and external mass block by X-axis test section, Y-axis test section and Z axisTest section connect, so as to realize when gyroscope have along X-axis, along Y-axis or the angular velocity of rotation along Z-direction when, X-axis detectionPortion, Y-axis test section and Z axis test section can produce corresponding motion, to detect the size of X-axis, Y-axis or Z axis angular speed；Using mode is set as above, whole movable structure is driven using a set of driving part on outside mass, just canEnough angular velocity detections realized for X-axis, Y-axis and Z axis, so as to save the inner space of gyroscope, reduce cost.
Preferably, have between above three test section to set the gap of anchor point, the external mass block, which is set, to be usedWith the external part for stretching into the gap and being connected with the anchor point.
Preferably, connected between the external part and the anchor point by anchoring spring beam.
Preferably, the X-axis test section includes in the Y direction vertical with the X-direction and is connected with each other3rd mass and the 4th mass, the 3rd mass are located at the top of the 4th mass；The Y-axis test section bagThe 5th mass and the 6th mass in X-direction and being connected with each other are included, the 5th mass is located at the described 6thThe left side of mass；The Z axis test section includes in Y direction and the 7th mass being connected with each other and the 8th massBlock, the 7th mass are located at the top of the 8th mass；The external mass block is specially to be set along Y directionFirst mass and the second mass, first mass are located at the top of second mass；And first matterGauge block by first group of connecting spring beam respectively with the 3rd mass, the 5th mass, the 6th mass and7th mass is connected；Second mass by second group of connecting spring beam respectively with the 4th mass, instituteState the 5th mass, the 6th mass is connected with the 8th mass.
Preferably, above three test section is so that its respective horizontal center line and vertical centerline be symmetrical above and below and left and rightSymmetrically.
Preferably, the 9th mass, the 9th matter are also set up between the 3rd mass and the 4th massThe upper and lower ends of gauge block set the first U-shaped beam to be connected with the 3rd mass and the 4th mass respectively；With/Or,
The tenth mass, a left side for the tenth mass are also set up between 5th mass and the 6th massRight both sides set the second U-shaped beam to be connected with the 5th mass and the 6th mass respectively；And/or
Set between 7th mass and the 8th mass in closed and be connected with each other four buckstays, positionIt is connected respectively between the 7th mass and the 8th mass by the 3rd U-shaped beam in the buckstay of upper and lower ends.
Preferably, in first group of connecting spring beam, with the 5th mass and with the 6th mass phaseConnecting spring beam even includes L-shaped the first L buckstays and the first end spring positioned at the first L buckstays both endsBeam, and/or in second group of connecting spring beam, with the 5th mass and the connection being connected with the 6th massSpring beam includes L-shaped the 2nd L buckstays and the second short spring beam positioned at the 2nd L buckstays both ends.
Preferably, in addition to：
To provide alternating voltage to realize the driving electric capacity of above-mentioned six masses motion；
To detect the X-axis of X-axis angular speed detection electric capacity,
To detect the Y-axis of Y-axis angular speed detection electric capacity,
To detect the Z axis of Z axis angular speed detection electric capacity.
Preferably, in addition to：
Electric capacity is detected to demarcate the driving of the drive amplitude of the driving electric capacity.
Preferably, the driving electric capacity is symmetrical set in the both sides of the three axis MEMS gyro；The X-axis detectionElectric capacity is symmetrical above and below to be arranged at the X-axis test section；Described Y-axis detection electric capacity or so is arranged at the Y-axis test section；The ZShaft detection electric capacity is symmetrical above and below to be arranged at the Z axis test section；The driving detection electric capacity is symmetrical above and below to be arranged at the Y-axis inspectionSurvey portion.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, completeSite preparation describes, it is clear that described embodiment is only part of the embodiment of the present invention, rather than whole embodiments.It is based onEmbodiment in the present invention, those of ordinary skill in the art are obtained every other under the premise of creative work is not madeEmbodiment, belong to the scope of protection of the invention.
In order that those skilled in the art more fully understand the present invention program, below in conjunction with the accompanying drawings and it is embodiedThe present invention is described in further detail for mode.
It refer to Fig. 1 to Fig. 5, the structural representation for the three axis MEMS gyro that Fig. 1 is provided by the embodiment of the present invention；Figure2 be schematic diagram of the three axis MEMS gyro under driving electric capacity effect in Fig. 1；Fig. 3 is the three axis MEMS gyro pair in Fig. 1Schematic diagram when X-axis is detected；Fig. 4 is the schematic diagram when three axis MEMS gyro in Fig. 1 detects to Y-axis；Fig. 5 isSchematic diagram when three axis MEMS gyro in Fig. 1 detects to Z axis.
Three axis MEMS gyro provided by the invention, including 1, Y-axis test section 2 of an X-axis test section and a Z axisTest section 3；The present invention will be defined as X-direction, X-axis test section 1, Y-axis test section 2 along the direction of the left and right sides of Y-axis test section 2X-direction is respectively positioned on Z axis test section 3, and X-axis test section 1, Y-axis test section 2 and Z axis test section 3 are arranged along X-axis successively.
As shown in Figure of description 1, three axis MEMS gyro also includes external mass block, external mass block and three detectionsConnected between portion by connecting spring beam.
Under connecting spring beam action, X-axis test section 1, Y-axis test section 2 and Z axis test section 3 are connected with each other, as long as onWhen any one stated in three test sections is disturbed, then other two just can move therewith, to realize for X-axis, Y-axisAnd the function of Z axis angular velocity detection.
Constructed for the concrete shape of external mass block and three test sections, The present invention gives a kind of preferred embodiment；X-axisGap is respectively provided between test section 1 and Y-axis test section 2 and between Y-axis test section 2 and Z axis test section 3, is set in the gapPut anchor point；External mass block has external part, and external part can coordinate with gap, and be connected with anchor point；External part and anchor point itBetween can use anchoring spring beam connection.
Specifically, X-axis test section 1 can include the 3rd mass 30 and the 4th mass 40, and the 3rd mass30 are located at the top of the 4th mass 40；Y-axis test section 2 can include the 5th mass 50 and the 6th mass being connected with each other60, the 5th mass 50 is located at the left side of the 6th mass 60；Z axis test section 3 includes the He of the 7th mass 70 being connected with each other8th mass 80, the 7th mass 70 are located at the top of the 8th mass 80；And external mass block is specially to be set along Y directionThe first mass 10 and the second mass 20 put, the first mass 10 are located at the top of the second mass 20；First mass10 by first group of connecting spring beam respectively with the 3rd mass 30, the 5th mass 50, the 6th mass 60 and the 7th massBlock 70 is connected；Second mass 20 by second group of connecting spring beam respectively with the 4th mass 40, the 5th mass 50,6th mass 60 is connected with the 8th mass 80.And first mass 10 and the second mass 20 with its it is respective it is horizontal inHeart line and vertical centerline are symmetrical above and below and symmetrical.
By taking Figure of description 1 as an example, pass through the first spring beam 31 and between the first mass 10 and the 3rd mass 30Three spring beams 33 connect；The top half of first mass 10 and the 5th mass 50 passes through the 31st spring beam 331, firstThe spring beam 327 of buckstay 41 and the 27th connects；The top half of first mass 10 and the 6th mass 60 passes through32 spring beams 332, the second buckstay 42 and the 28th spring beam 328 connect；First mass 10 and the 7th massBlock 70 is connected by the 41st spring beam 341 and the 43rd spring beam 343.
First group of connecting spring beam can include the first spring beam 31；3rd spring beam 33；31st spring beam 331,The entirety of first buckstay 41 and the 27th spring beam 327；32nd spring beam 332, the second buckstay 42 andThe entirety of 28 spring beams 328；41st spring beam 341 and this 6 part of the 43rd spring beam 343 are formed.FirstIn group connecting spring beam, the 31st spring beam 331, the first buckstay 41 and the 27th that are connected with the 5th mass 50In this entirety of spring beam 327, the first buckstay 41 can be used as the first L buckstays, and the both ends of the first L buckstays pointShe Zhi not first end spring beam, i.e. the 31st spring beam 331 and the 27th spring beam 327.
Therewith similarly, the spring beam of second spring beam 32 and the 4th is passed through between the second mass 20 and the 4th mass 4034 connections；The latter half of second mass 20 and the 5th mass 50 passes through the 33rd spring beam 333, the 3rd buckstay 43And the 29th spring beam 329 connect；The latter half of second mass 20 and the 6th mass 60 passes through the 30th springBeam 330, the 4th buckstay 44 and the 34th spring beam 334 connect；Second mass 20 passes through with the 8th mass 8042nd spring beam 342 and the 44th spring beam 344 connect.
Second group of connecting spring beam can include second spring beam 32；4th spring beam 34；33rd spring beam 333,The entirety of 3rd buckstay 43 and the 29th spring beam 329；30th spring beam 330, the 4th buckstay 44 andThe entirety of 34 spring beams 334；42nd spring beam 342 and this 6 part of the 44th spring beam 344 are formed.SecondIn group connecting spring beam, the 33rd spring beam 333, the 3rd buckstay 43 and the 29th that are connected with the 5th mass 50In this entirety of spring beam 329, the 3rd buckstay 43 can be used as the 2nd L buckstays, and the both ends of the 2nd L buckstays pointShe Zhi not second end spring beam, i.e. the 33rd spring beam 333 and the 29th spring beam 329.
As shown in Figure of description 1, X-axis test section 1, Y-axis test section 2 and Z axis test section 3 are with its respective levelHeart line and vertical centerline are symmetrical above and below and symmetrical.For X-axis test section 1, its 3rd mass 30 and the 4th mass9th mass 90 is set between 40；9th mass 90 has symmetrically arranged two the first U-shaped beams up and down, upper and lower two theOne U-shaped beam is connected with the 3rd mass 30 with the 4th mass 40 respectively；Wherein, the first U-shaped beam positioned at upper end can include9th spring beam 39 and the tenth spring beam 310；The first U-shaped beam positioned at lower end can include the 11st spring beam 311 and the tenthTwo spring beams 312.
Tenth mass 100 is set between the 5th mass 50 of Y-axis test section 2 and the 6th mass 60；Tenth massBlock 100 has two a second U-shaped beams in symmetrically arranged left and right, the second U-shaped beam of left and right two respectively with the 5th mass 50 and theSix masses 60 connect；Wherein, the second U-shaped beam positioned at left side can include the 19th spring beam 319 and the 21st springBeam 321；The second U-shaped beam positioned at right side can include the 20th spring beam 320 and the 22nd spring beam 322.
7th mass 70 of Z axis test section 3 and the 8th mass 80 are surrounded with hollow structure, in hollow structureIn closed, four buckstays, i.e. the 5th buckstay 45, the 6th buckstay 46, the 7th buckstay 47 and the 8th buckstay are set48；5th buckstay 45 and the 6th buckstay 46 are respectively positioned at hollow structure both sides up and down, and the 5th buckstay 45 and theSix buckstays 46 are connected by the 3rd U-shaped beam；Wherein, the 3rd U-shaped beam can include the 53rd spring beam the 353, the 54thSpring beam 354, the 55th spring beam 355 and the 56th spring beam 356；That is, the 5th buckstay 45 and the 53rd springThe spring beam 354 of beam 353 and the 54th connects, the 6th buckstay 46 and the 55th spring beam 355 and the 56th spring beam356 connections.
As shown in Figure of description 1, three axis MEMS gyro of the invention includes 10 masses altogether, 8 buckstays, dividesIt is not the first buckstay 41, the second buckstay 42, the 3rd buckstay 43, the 4th buckstay 44, the rigidity of the 5th buckstay the 45, the 6thBeam 46, the 7th buckstay 47 and the 8th buckstay 48.
Also include 60 spring beams, be the first spring beam 31, second spring beam 32, the 3rd spring beam 33, the 4th bullet respectivelySpring beam 34, the 5th spring beam 35, the 6th spring beam 36, the 7th spring beam 37, the 8th spring beam 38, the 9th spring beam the 39, the tenthSpring beam 310, the 11st spring beam 311, the 12nd spring beam 312, the 13rd spring beam 313, the 14th spring beam 314,15 spring beams 315, the 16th spring beam 316, the 17th spring beam 317, the 18th spring beam 318, the 19th spring beam319th, the 20th spring beam 320, the 21st spring beam 321, the 22nd spring beam 322, the 23rd spring beam 323,24 spring beams 324, the 25th spring beam 325, the 26th spring beam 326, the 27th spring beam the 327, the 20thEight spring beams 328, the 29th spring beam 329, the 30th spring beam 330, the 31st spring beam 331, the 32nd springBeam 332, the 33rd spring beam 333, the 34th spring beam 334, the 35th spring beam 335, the 36th spring beam336th, the 37th spring beam 337, the 38th spring beam 338, the 39th spring beam 339, the 40th spring beam 340,41 spring beams 341, the 42nd spring beam 342, the 43rd spring beam 343, the 44th spring beam the 344, the 40thFive spring beams 345, the 46th spring beam 346, the 47th spring beam 347, the 48th spring beam 348, the 49th bulletSpring beam 349, the 50th spring beam 350, the 51st spring beam 351, the 52nd spring beam 352, the 53rd spring beam353rd, the 54th spring beam 354, the 55th spring beam 355, the 56th spring beam 356, the 57th spring beam 357,58th spring beam 358, the 59th spring beam 359 and the 60th spring beam 360.
Also include 10 anchor points altogether.Above-mentioned 10 masses, 8 buckstays and 10 anchor points pass through 60 spring beam phasesConnect, integrally constitute the movable member of gyroscope.
3rd mass 30 and the 4th mass 40 pass through the first spring of spring beam beam 31, second spring beam 32, the 3rd bulletThe spring beam 34 of spring beam 33 and the 4th is connected with the first mass 10 with the second mass 20.
9th mass 90 passes through the 9th spring beam 39, the tenth spring beam 310, the 11st spring beam 311 and the 12nd bulletSpring beam 312 is connected with the 3rd mass 30 with the 4th mass 40, and passes through the anchor point 95 of spring beam 317 and 318 and the 5th andSix anchor points 96 connect.
5th mass 50 and the 6th mass 60 pass through the 27th spring beam 327, the 28th spring beam 328,29 spring beams 329, the 30th spring beam 330, the 31st spring beam 331, the 32nd spring beam the 332, the 33rdSpring beam 333 and the 34th spring beam 334 and the first buckstay 41, the second buckstay 42, the 3rd buckstay 43 and the 4th are firmProperty beam 44 is connected with the first mass 10 and the second mass 20.
Tenth mass 100 passes through the spring beam 319 of spring beam the 19th, the 20th spring beam 320, the 21st spring beam321st, the 22nd spring beam 322, the 23rd spring beam 323, the 24th spring beam 324, the and of the 25th spring beam 32526th spring beam 326 is connected with the 5th mass 50 and the 6th mass 60, and passes through the 39th spring beam 339 and40 spring beams 340 are connected with the 9th anchor point 99 and the tenth anchor point 910.
5th mass 50 and the 6th mass 60 pass through the 27th spring beam 327, the 28th spring beam 328,29 spring beams 329, the 30th spring beam 330, the 31st spring beam 331, the 32nd spring beam the 332, the 33rdSpring beam 333 and the 34th spring beam 334 and the first buckstay 41, the second buckstay 42, the 3rd buckstay 43 and the 4th are firmProperty beam 44 is connected with the first mass 10 and the second mass 20.
Tenth mass 100 passes through the 19th spring beam 319, the 20th spring beam 320, the 21st spring beam 321,22 spring beams 322, the 23rd spring beam 323, the 24th spring beam 324, the 25th spring beam 325 and the 20thSix spring beams 326 are connected with the 5th mass 50 and the 6th mass 60, and pass through the 39th spring beam 339 and the 40th bulletSpring beam 340 is connected with the 9th anchor point 99 and the tenth anchor point 910.
7th mass 70 and the 8th mass 80 pass through the 41st spring beam 341, the 42nd spring beam 342,43 spring beams 343 are connected with the 44th spring beam 344 and the first mass 10 and the second mass 20.
5th buckstay 45 and the 6th buckstay 46 pass through the 53rd spring beam 353, the 54th spring beam 354,55 spring beams 355 and the 56th spring beam 356 are connected with the 7th mass 70 and the 8th mass 80, pass through the 50thSeven spring beams 357, the 58th spring beam 358, the 59th spring beam 359 and the 60th spring beam 360 and the 7th buckstay47 and the 8th buckstay 48 connect, the 7th buckstay 47 and the 8th buckstay 48 pass through the 49th spring beam 349 and the 50thTwo spring beams 352 are connected with the 7th anchor point 97 and the 8th anchor point 98.
It should be noted that the set-up mode shown in by Figure of description 1, those skilled in the art understand that this hairBright three axis MEMS gyro shape design, thus herein for above-mentioned buckstay, spring beam and anchor point set-up mode no longerRepeat.Certainly, in order to ensure the normal operation of three axis MEMS gyro of the present invention, above-mentioned each part can also use such as accompanying drawing 1Outside other modes set.
The three axis MEMS gyro of the present invention also includes driving electric capacity, X-axis detection electric capacity, Y-axis detection electric capacity and Z axis inspectionElectric capacity is surveyed, as shown in Figure of description 1.
Three axis MEMS gyro includes 22 electrodes altogether, respectively from 51~522；Whole electrodes are fixed；2222 electric capacity are formd between the movable member of electrode and above-mentioned gyroscope.22 electric capacity can be divided into 10 groups, respectively firstDrive electric capacity and the second driving electric capacity, the first driving detection electric capacity and the second driving detection electric capacity, the first X-axis detection electric capacity and theTwo X-axis detect electric capacity, the first Y-axis detection electric capacity, the second Y-axis detection electric capacity, the first Z axis detection electric capacity, the second Z axis detection electricityHold.
Wherein first driving electric capacity is by first electrode 51, second electrode 52, the 5th electrode 55, the 6th electrode 56 and movable partFormed between part；Second driving electric capacity is by the 3rd electrode 53, the 4th electrode 54, the 7th electrode 57, the 8th electrode 58 and movable partFormed between part.
First driving detection electric capacity is by the 9th electrode 59, the tenth electrode 510, the 13rd electrode 513, the 14th electrode 514Formed between movable member；Second driving detection electric capacity is by the 11st electrode 511, the 12nd electrode 512, the 15th electrode515th, formed between the 16th electrode 516 and movable member.
First X-axis detects electric capacity by being formed between the 17th electrode 517 and movable member；Second X-axis detects electric capacity by theFormed between 18 electrodes 518 and movable member.
First Y-axis detects electric capacity by being formed between the 19th electrode 519 and movable member；First Y-axis detects electric capacity by theFormed between 20 electrodes 520 and movable member.
First Z axis detects electric capacity by being formed between the 21st electrode 521 and movable member；First Z axis detect electric capacity byFormed between 22nd electrode 522 and movable member.
As shown in Figure of description 2, when three axis MEMS gyro is driven the driving of electric capacity, first driving electric capacity andWhen the both ends of second driving electric capacity apply alternating voltage in opposite direction, alternation electrostatic force can be produced so that the first mass 10Moved back and forth with the second mass 20 along Y-axis；Because the first mass 10 and the second mass 20 pass through spring beam and the 3rdMass 30, the 4th mass 40, the 7th mass 70 are connected with the 8th mass 80, therefore can transfer the motion to the 3rd matterGauge block 30, the 4th mass 40, the 7th mass 70 and the 8th mass 80 so that the 3rd mass 30, the 4th mass 40,7th mass 70 and the 8th mass 80 move back and forth along Y-axis；And the first mass 10 and the second mass 20 pass through firstBuckstay 41, by the second buckstay 42, by the 3rd buckstay 43 and by the 4th buckstay 44, it can also transfer the motion to5th mass 50 and the 6th mass 60, and 90 ° of rotational motion directions, cause the 5th mass 50 and the edge of the 6th mass 60X-axis moves back and forth.The present invention also needs to the first driving detection electric capacity and the in order to controlling drive amplitude exactly in structureTwo drivings detect electric capacity to demarcate the amplitude of driving.
When three axis MEMS gyro detects to X-axis, as shown in Figure of description 3；When there is X-axis turning rate inputWhen, the mass 30 of mass the 3rd to be moved reciprocatingly along Y-axis and the 4th mass 40 can be by the Coriolis of Z-directionPower so that the 3rd mass 30 and the 4th mass 40 can be surrounded on the horizontal line that the 5th anchor point 95 and the 6th anchor point 96 are fixedX-axis does reciprocating rotary movement, while drives the 9th mass 90 to do reciprocating rotary movement along X-axis by spring beam 39~312.The first X-axis detection electric capacity and the second X-axis detection electric capacity now corresponding with the 9th mass 90 can also produce mechanical periodicity, andThe differential variation of the two electric capacity is detected by subsequent conditioning circuit, it is possible to know the size of input X-axis angular speed.
When three axis MEMS gyro detects to Y-axis, as shown in Figure of description 4；When there is Y-axis turning rate inputWhen, the 5th mass 50 to be moved reciprocatingly along X-axis and the 6th mass 60 can be by the Coriolis forces of Z-direction so thatThe Y direction that 5th mass 50 and the 6th mass 60 can be fixed along the 9th anchor point 99 and the tenth anchor point 910 does reciprocating rotaryDynamic motion, while the two parts of the tenth mass 100 or so are driven along the 9th anchor point 99 and the tenth anchor by spring beam 319~322The Y direction that point 910 is fixed does reciprocating rotary movement, the first now corresponding with the 9th mass 90 Y-axis detection electric capacityMechanical periodicity can be also produced with the second Y-axis detection electric capacity.The differential variation of the two electric capacity is detected by subsequent conditioning circuit, it is possible toKnow the size of input Y-axis angular speed.
When three axis MEMS gyro detects to Z axis, as shown in Figure of description 5；When there is Z axis turning rate inputWhen, the 7th mass 70 to be moved reciprocatingly along Y-axis and the 8th mass 80 can be by the Coriolis forces of X-direction so that7th mass 70 and the 8th mass 80 can move reciprocatingly along X-axis, while drive buckstay by spring beam 353~35645 and 46 move reciprocatingly also along X-axis.In 45 and 46 both sides, buckstay 47 and 48 is separately added into, to ensure 45 and 46The direction of motion it is opposite.The first Z axis detection electric capacity and the second Z axis detection electric capacity now corresponding with buckstay 45 and 46 also canProduce mechanical periodicity.The change of the two electric capacity is detected by subsequent conditioning circuit, it is possible to know the size of input Z axis angular speed.
Three axis MEMS gyro provided by the invention, by the way that the mass of three axles is connected so that only need oneSet driving electric capacity (the first driving electric capacity and the second driving electric capacity) and a set of driving detect electric capacity, and (the first driving detects electric capacity and theTwo driving detection electric capacity) can realizes the drivings of three axles.This is saved compared with the three-axis gyroscope of traditional discrete qualityTwo sets of driving electric capacity and two set drivings detect electric capacity.The shared driving of the three axis MEMS gyro of the present invention and driving detection partMass, improve the utilization ratio of quality, improve sensitivity, thus save the area of gyroscope, reduce cost.
It should be noted that in this manual, such as first and second etc relational terms are used merely to oneEntity makes a distinction with other several entities, and not necessarily require or imply between these entities exist it is any this actualRelation or order.
Three axis MEMS gyro provided by the present invention is described in detail above.Specific case used hereinThe principle and embodiment of the present invention are set forth, the explanation of above example is only intended to help the side for understanding the present inventionMethod and its core concept.It should be pointed out that for those skilled in the art, the principle of the invention is not being departed fromUnder the premise of, some improvement and modification can also be carried out to the present invention, these are improved and modification also falls into the claims in the present inventionIn protection domain.