The content of the invention
It is a primary object of the present invention to overcome the deficiencies in the prior art, there is provided a kind of integrated life based on ridge optical waveguideChange sensor, can be with the direct efficient coupling of optical fiber, easy to process, high sensitivity, anti-electromagnetic-radiation, environment resistance are strong, easilyIntegrated in being miniaturized, cost is cheap.
To achieve the above object, the present invention uses following technical scheme：
A kind of integrated biochemical sensor based on ridge optical waveguide, is included in the MZI that formation is processed on same soi wafer(Mach-Zehnder interferometer, Mach-Zehnder interferometer) detection chip, structure of fiber_optic, it is bonded in the MZI inspectionsSurvey multiple polymer cavitys that the polymer of chip surface is formed, the miniflow formed by a part for the multiple polymer cavityRoad system and the photodetector set in another part of the multiple polymer cavity and detection circuit, the MZI inspectionsSurveying chip includes ridge optical waveguide, sample cell, media slot beam splitter and media slot bundling device, and optical fiber is by described through structure of fiber_opticWith the end coupling of the input of the ridge optical waveguide, the ridge optical waveguide is two waveguides in propagation path top setArm, forms two light propagation passages, and the output end of the ridge optical waveguide is coupled to the photodetector and detection circuit, instituteA waveguide arm for stating ridge optical waveguide is coupled to the sample cell, and the micro sprue system connects the sample cell, for moreThe sample changed in the sample cell, the light transmitted by the input of the ridge optical waveguide resolve into two by media slot beam splitterIndividual branch beam, a branch beam realize phase as reference signal, another branch beam by the sample in the sample cellPosition modulation, and output beam is merged into through the media slot bundling device respectively along after two waveguide arms propagation, from the ridgedFiber waveguide output end outgoing, by the photodetector and detection circuit probe output intensity change and be converted into telecommunicationsNumber, realize to detection of the sample in the sample cell about composition or concentration.
Further：
The MZI detection chips are included in the first medium groove that formation is processed on the soi wafer, preferably air groove,The first medium groove is engaged to form the media slot beam splitter with the T-shaped bifurcation of the ridge optical waveguide, with using entirelyLight beam is divided into two beams by internal reflection, is propagated respectively along described two light propagation passages and is completed sample detection.
The ridge optical waveguide has 90 ° of many places bending structure, and the MZI detection chips are included on the soi waferProcess the multiple second medium grooves formed, preferably air groove, the bending place of the second medium groove and the ridge optical waveguideIt is engaged to change the direction of propagation of the light in MZI detection chips by predefined paths using total internal reflection, so that light is by described pre-Determine propagated and complete sample detection.
One waveguide arm directly contacts with the sample in the sample cell.
Described two light propagation passages are symmetricly set on the both sides of the input/output terminal waveguide axis of the ridge optical waveguide.
The polymer is PDMS, it is preferred to use the micro-nano technology technique cavity formed therein that of impressing.
The ridge waveguide is single mode waveguide, the waveguides sections of the ridge optical waveguide protrude from the surface of base material andIn ridged.
The input end of the structure of fiber_optic and the ridge waveguide is in same axis, through soi wafer surface deep etching shapeInto size is suitable with single-mode fiber covering；Preferably, the photodetector is in the axis of the output end of the ridge waveguideOn.
The micro sprue system includes inlet, liquid feeding end liquid storage tank, liquid outlet and outlet end liquid storage tank, the inletThe liquid feeding end liquid storage tank is connected, the liquid feeding end liquid storage tank connects the liquid feeding end of the sample cell, and the sample cell goes out liquidEnd connects the outlet end liquid storage tank, and the outlet end liquid storage tank connects the liquid outlet；Preferably, by the fluid channelThe mode that negative pressure is produced in system realizes the circulation of liquid.
With multigroup the MZI detection chips, the micro sprue system and the photodetector and detection circuit, formedDetected while array is to realize different samples.
Beneficial effects of the present invention：
The present invention is proposed with a kind of integrated biochemical sensor based on ridge optical waveguide, the sensor detection sensitivityHeight, anti-electromagnetic-radiation, environment resistance are strong, easy to process, and cost is cheap, are easy to be miniaturized integrated.When sample in sample cellWhen concentration or composition change, the effective refractive index of former waveguide arm is changed so that the phase difference of two waveguide arms changesBecome, in output end because interference causes output intensity that significant change occurs, the change of light intensity is detected by the sensor to be obtainedKnow sample variation.Present invention employs the transmission that ridge optical waveguide is used for light field, it is preferable that coordinates the beam splitter based on air grooveAnd bending structure, the beam splitting of light intensity and the change of the direction of propagation in feasible system, light beam splitting can ensure the phase of two-beamThe uniformity of position, amplitude and polarization direction so that outgoing luminous energy forms stable interference.Above structure design and processing can be micro-Meter level is other, can carry out mass production by the micro-nano technology technique of maturation.Coordinate the fluid channel for being bonded in detection chip surfaceAnd structure of fiber_optic, photodetector, it is possible to achieve the detection of sample.If in addition, carrying out array to chip, optimize fluid channelStructure, it can carry out monitoring while different samples simultaneously, the detecting system after array can also be realized real using monochromatic sourceExisting quantitative analysis.
Embodiment
Embodiments of the present invention are elaborated below.It is emphasized that what the description below was merely exemplary,The scope being not intended to be limiting of the invention and its application.
Refering to Fig. 1 to Fig. 5, in one embodiment, a kind of integrated biochemical sensor based on ridge optical waveguide, it is included inThe MZI detection chips of formation and structure of fiber_optic 1 are processed on same soi wafer, is bonded in polymerizeing for the MZI detection chips surfaceMultiple polymer cavitys that thing 10 is formed, by the micro sprue system that is formed of a part of the multiple polymer cavity and describedThe photodetector and detection circuit 9, the MZI detection chips set in another part of multiple polymer cavitys includes ridgedFiber waveguide 3, sample cell 8, media slot beam splitter 2 and media slot bundling device 5, optical fiber is by described through structure of fiber_optic 1 and the ridgeThe end coupling of the input of shape fiber waveguide 3, the output end of the ridge optical waveguide 3 are coupled to the photodetector and detectionCircuit 9, a waveguide arm of the ridge optical waveguide 3 are coupled to the sample cell 8, and the micro sprue system connects the samplePond 8, for changing the sample in the sample cell 8, the light transmitted by the input of the ridge optical waveguide 3 passes through the mediumGroove beam splitter 2 resolves into two branch beams, and a branch beam is as reference signal, and another branch beam is by the sampleSample in pond realizes phase-modulation, and is merged into one through media slot bundling device 5 respectively along after two waveguide arms propagationBeam, it is emitted from the output end of the ridge optical waveguide 3, is radiated on the photodetector and detection circuit 9, passes through the lightThe change that electric explorer and detection circuit 9 detect light intensity is simultaneously converted into electric signal, realize it is relevant to sample in the sample cell 8 intoPoint or concentration detection.
In a preferred embodiment, the MZI detection chips are included in the first medium that formation is processed on the soi waferGroove, preferably air groove, the first medium groove are engaged to form the medium with the T-shaped bifurcation of the ridge optical waveguide 3Groove beam splitter 2, so that light beam is divided into two beams using total internal reflection, is propagated respectively along described two light propagation passages and complete sampleProduct examine is surveyed.
In a preferred embodiment, the ridge optical waveguide 3 has 90 ° of many places bending structure, the MZI detection chips bagInclude multiple second medium grooves 4 that formation is processed on the soi wafer, preferably air groove, the first medium groove 4 with it is describedThe bending place of ridge optical waveguide 3 is engaged to change propagation of the light in MZI detection chips by predefined paths using total internal reflectionDirection, so that light is propagated by the predefined paths and completes sample detection.
In a preferred embodiment, a waveguide arm directly contacts with the sample in the sample cell 8, more preferably fromThe waveguide arm passes through out of described sample cell 8.
In a preferred embodiment, described two light propagation passages are symmetricly set on the input and output of the ridge optical waveguideHold the both sides of waveguide axis.
In a preferred embodiment, the polymer is PDMS, and the micro-nano technology technique of impressing can be used formed therein thatCavity.
In a preferred embodiment, the ridge waveguide is single mode waveguide.The waveguides sections of the ridge optical waveguide 2 protrudeIn the surface of base material be in ridged, as shown in Figure 3.
In a preferred embodiment, the structure of fiber_optic 1 passes through with the input end of the ridge waveguide in same axisSoi wafer surface deep etching is formed, and size is suitable with single-mode fiber covering；
In a preferred embodiment, the photodetector is on the axis of the output end of the ridge waveguide.
In a preferred embodiment, the micro sprue system includes inlet, liquid feeding end liquid storage tank 6, liquid outlet and goes out liquidLiquid storage tank 7 is held, the inlet connects the liquid feeding end liquid storage tank 6, and the liquid feeding end liquid storage tank 6 connects the sample cell 8Liquid feeding end, the outlet end of the sample cell 8 connect the outlet end liquid storage tank 7, the outlet end liquid storage tank 7 connect it is described go out liquidMouthful.
In a preferred embodiment, the stream of fluid sample is realized by way of producing negative pressure in the micro sprue systemIt is logical.
In a preferred embodiment, the integrated biochemical sensor has multigroup MZI detection chips, the fluid channelSystem and the photodetector and detection circuit, are detected while forming array to realize different samples.
The specific embodiment of the present invention is further described below in conjunction with accompanying drawing.
Refering to Fig. 1 to Fig. 5, the integrated biochemical sensor based on ridge optical waveguide include by ridge optical waveguide 3, air groove,MZI detection chips, micro sprue system, structure of fiber_optic 1, photodetector and the detection circuit 9 that sample cell 8 is formed.The MZI inspectionsSurvey chip, structure of fiber_optic 1 is the microstructure processed in same dielectric substrate on silicon (SOI) silicon chip；Micro sprue system existsIt is bonded in the polymer cavity body of chip surface, photodetector array and detection circuit are equally in the cavity of above-mentioned polymerIt is interior.The change of sample concentration in sample cell 8 or composition can be converted into the change of output intensity by the biochemical detection system, pass throughPhotodetector can detect the change of light intensity, and then obtain the change of sample in sample cell 8.The detecting system can directly with bandThe LASER Light Source and photodetector of single-mode fiber are used cooperatively, and pass through array, it is possible to achieve are examined while different samplesSurvey.Ridge waveguide is single mode waveguide in the MZI detection chips.The hollow tank structure of MZI detection chips is utilized in completeBeam splitter and bending waveguiding structure are realized in reflection, and light beam can be divided into two beams by beam splitter, the light intensity after beam splitting with beam splitter withThe relative position of ridge optical waveguide 3 changes, and bending waveguiding structure is used to change transmission direction of the light in chip, the change in direction byWaveguide and air groove axis relative angle determine.The structure of fiber_optic 1 and ridge waveguide input end are easy to pair in same axisStandard, formed through SOI pieces surface deep etching, size is suitable with single-mode fiber covering, can be packaged with the aggregation of bonding.
The polymer for being bonded in MZI detection chips surface is PDMS (dimethyl silicone polymer), can use the micro-nano of impressingProcessing technology cavity formed therein that, the PDMS after processing are bonded in detection chip surface.The fluid channel is in polymer cavityIn vivo, fluid channel has inlet and liquid outlet, and liquid storage tank, and the circulation of liquid can be carried out by producing negative pressure in runner,Micro sprue system is used to change the sample in sample cell 8.Photodetector is on the axis of ridge waveguide output end, can be passed throughPolymer is packaged.
The integrated biochemical sensor directly can be used cooperatively with the LASER Light Source with single-mode fiber and photodetector, and logicalCross array, it is possible to achieve detected while different samples.
As depicted in figs. 1 and 2, the light that light source is sent is through optical fiber at structure of fiber_optic 1 and the input end face coupling of ridge optical waveguide 3After conjunction, light field is transmitted into detection chip.Beam is punished in media slot beam splitter 2, after bending waveguide 4 changes transmission direction respectivelyBy two waveguide arms, wherein a waveguide arm directly contacts with the sample in sample cell 8, light is after reflection along ridged light waveExport is penetrated, and is radiated at photodetector and detection circuit 9, is completed transformation of the optical signal to electric signal.
Further illustrated below in conjunction with example：
Example 1
It it is 10 μm from top layer silicon thickness, insulating barrier silicon oxide thickness is 2 μm, and substrate silicon thickness is 475 μm of insulatorUpper silicon (SOI) is used as manufacture material.By deep UV lithography and inductively coupled plasma dry etching obtain ridge waveguide withAnd air slot structure.As shown in figure 4, input tunable laser, single-mode fiber is coordinated to form real-time protein solution concentrationDetecting system, by demarcation, exiting light beam intensity, test sample protein concentration are measured by photodetector.
Example 2
As shown in figure 5, to said detecting system carry out array, have multiple integrated biochemical sensors (MZI sensors 1,MZI sensors 2, MZI sensors 3 ... MZI sensors n)；Tunable laser can be replaced using mono-colour laser, and providedThe light λ of multi-wavelength1、λ2、λ3……λn.Meanwhile with the use of multiple photoelectric detector PDs 1, PD2, PD3 ... PDn.Pass throughThe array of detecting system, the measurement of determinand output intensity is realized, solution is changed and carries out quantitative analysis.
Above content is to combine specific/preferred embodiment further description made for the present invention, it is impossible to is recognizedThe specific implementation of the fixed present invention is confined to these explanations.For general technical staff of the technical field of the invention,Without departing from the inventive concept of the premise, it can also make some replacements or modification to the embodiment that these have been described,And these are substituted or variant should all be considered as belonging to protection scope of the present invention.