技术领域technical field
本发明属于传感器制作和封装技术领域，尤其涉及一种柔性可穿戴式电子应变传感器及其制备方法。The invention belongs to the technical field of sensor manufacturing and packaging, and in particular relates to a flexible wearable electronic strain sensor and a preparation method thereof.
背景技术Background technique
随着信息时代的应用需求越来越高，对被测量信息的范围、精度和稳定情况等各性能参数的期望值和理想化要求逐步提高。运用到可穿戴设备的传感器系统在一些运用上逐渐表现出其局限性，包括目前的传感器柔性不足，不能做到真正的可拉伸，一旦应变或弯曲角度过大，整个传感器的结构将会得到破坏而失效；灵敏度低，容易受到人体生理信号噪声的干扰，造成信号采集模糊和不完整。As the application requirements of the information age are getting higher and higher, the expectations and ideal requirements for various performance parameters such as the range, accuracy and stability of the measured information are gradually increasing. The sensor system applied to wearable devices has gradually shown its limitations in some applications, including that the current sensor is not flexible enough to be truly stretchable. Once the strain or bending angle is too large, the structure of the entire sensor will be lost. Failure due to damage; low sensitivity, susceptible to interference from human physiological signal noise, resulting in blurred and incomplete signal acquisition.
自2012年谷歌公司召开开发者大会，推出的“谷歌眼镜”极大地推动刺激了市场对可穿戴设备的兴趣。短短几年内各种各样的可穿戴设备的出现，给我们生活带来了各种各样的便利。例如智能手表体温脉搏检测和计步功能、高灵敏度的电子皮肤向大脑传递皮肤触觉信息、利用三维微电极实现大脑皮层控制假肢等。而传感器作为核心部件之一，将影响可穿戴设备的功能设计与未来发展。在可穿戴设备实际使用过程中，许多时候要求传感器透明、柔韧、延展、可自由弯曲甚至折叠、高灵敏度等特点，特别是工作环境直接是在各个变形量较大的人体复杂不规则皮肤表面，例如关节的变形检测等。Since Google held a developer conference in 2012, the launch of "Google Glass" has greatly promoted and stimulated the market's interest in wearable devices. The emergence of various wearable devices in just a few years has brought various conveniences to our lives. For example, smart watches have body temperature pulse detection and step counting functions, high-sensitivity electronic skins transmit skin tactile information to the brain, and use three-dimensional microelectrodes to realize cerebral cortex-controlled artificial limbs, etc. As one of the core components, the sensor will affect the functional design and future development of wearable devices. In the actual use of wearable devices, the sensor is often required to be transparent, flexible, extensible, freely bendable or even foldable, and high-sensitivity, especially when the working environment is directly on the complex and irregular skin surface of the human body with large deformation. For example, deformation detection of joints, etc.
现有技术中的柔性传感器主要采用以下方式制备。Flexible sensors in the prior art are mainly prepared in the following ways.
1.使用接触印刷法利用半导体纳米线依附于柔性材料制作成场效应晶体管，其源电极通过压敏橡胶接地，外部压力导致压敏电阻的导电性变化，从而改变晶体管的性质，通过检测输出信号的改变获得相应的负载。1. Use the contact printing method to make a field-effect transistor by attaching semiconductor nanowires to flexible materials. The source electrode is grounded through the pressure-sensitive rubber. External pressure causes the conductivity of the piezoresistor to change, thereby changing the nature of the transistor. By detecting the output signal The change gets the corresponding load.
2.利用碳纳米管喷涂于PDMS薄片形成矩形导电阵列制作了透明度良好的电容式传感器阵列，蜷曲的碳纳米管以及由其形成的网状结构使宏观的导线能够随着弹性材料的拉伸而伸长同时保证导电性。2. A capacitive sensor array with good transparency is produced by spraying carbon nanotubes on PDMS sheets to form a rectangular conductive array. The curled carbon nanotubes and the network structure formed by them enable the macroscopic wires to expand with the stretching of the elastic material. Elongation while maintaining electrical conductivity.
3.借助导电纺织品，将其制作成柔性电极嵌入PDMS之中，上层单电极与底层四个电极分别产生电容，通过测量四个电容值的相对变化能够实现对多维力的探测。3. With the help of conductive textiles, it is made into flexible electrodes and embedded in PDMS. The upper single electrode and the bottom four electrodes generate capacitance respectively, and the detection of multidimensional force can be realized by measuring the relative changes of the four capacitance values.
4.以类似皮肤机械特性的多孔尼龙作为基质，在基体内电化学沉积聚吡咯作为导电掺杂剂，当载荷加载时，传感器的导电性会增加，以此测得外界载荷。4. Using porous nylon with similar mechanical properties as the skin as a matrix, polypyrrole is electrochemically deposited in the matrix as a conductive dopant. When the load is loaded, the conductivity of the sensor will increase, so as to measure the external load.
5.采用高弹性和耐用的伸缩螺旋电极，以PDMS作为主要的结构材料。制作高度扭曲的触觉传感器阵列。可以适应复杂的工作表面而不破坏该传感器结构和金属互连上的感知阵列。5. Using highly elastic and durable telescopic spiral electrodes, with PDMS as the main structural material. Make highly twisted tactile sensor arrays. Complex work surfaces can be adapted without disrupting the sensor structure and sensing array on metal interconnects.
虽然上述应变传感器具有一定的柔性，但是并不能做到真正的可拉伸，缺乏类似皮肤的柔弹性，不能够完全实现在覆盖三维复杂静/动态表面的条件下，完成对于外界载荷的测量。在应变或者弯曲角度较大时，整个系统将会破坏失效。同时相对于人体皮肤表面来说，仍表现出一定的刚性，会使人体产生一些不适应感，难以集成，极大的限制了测量的稳定性、精度和准确度。另外，人体生理信号很容易受到外界因素的干扰，如汗渍，肌肉收缩等，而用户又无法排除这些影响因素，造成数据采集模糊性和不完整性，可靠性欠佳。Although the above-mentioned strain sensor has a certain degree of flexibility, it cannot be truly stretchable, lacks skin-like flexibility, and cannot fully realize the measurement of external loads under the condition of covering three-dimensional complex static/dynamic surfaces. At large strains or bending angles, the entire system will fail. At the same time, relative to the surface of the human skin, it still shows a certain rigidity, which will cause some discomfort to the human body, and it is difficult to integrate, which greatly limits the stability, precision and accuracy of the measurement. In addition, human physiological signals are easily disturbed by external factors, such as sweat stains, muscle contraction, etc., and users cannot rule out these influencing factors, resulting in ambiguity, incompleteness and poor reliability of data collection.
发明内容Contents of the invention
本发明的目的在于克服上述现有技术的不足，提供了一种柔性可穿戴式电子应变传感器及其制备方法，其柔性可穿戴式电子应变传感器的稳定性、精度和准确度、可靠性佳。The purpose of the present invention is to overcome the deficiencies of the above-mentioned prior art and provide a flexible wearable electronic strain sensor and a preparation method thereof. The flexible wearable electronic strain sensor has good stability, precision, accuracy and reliability.
本发明的技术方案是：一种柔性可穿戴式电子应变传感器，包括柔性基体，所述柔性基体内具有柔性的微通道，所述微通道内设置有液态导体或半液态导体，所述微通道的两端设置有电极。The technical solution of the present invention is: a flexible wearable electronic strain sensor, including a flexible substrate, a flexible microchannel is provided in the flexible substrate, a liquid conductor or a semi-liquid conductor is arranged in the microchannel, and the microchannel Electrodes are provided at both ends.
可选地，所述柔性基体采用降解聚酯材料或硅橡胶材料。Optionally, the flexible base is made of degradable polyester material or silicon rubber material.
可选地，所述微通道内设置有液体导体共晶镓铟。Optionally, a liquid conductor eutectic gallium indium is arranged in the microchannel.
可选地，所述微通道呈条形、折线形、蛇形、圆形或弧形；或者/和，所述微通道设置有一个或至少两个。Optionally, the microchannels are in the shape of strips, zigzags, serpentines, circles or arcs; or/and, there are one or at least two microchannels.
本发明还提供了一种可穿戴设备，所述可穿戴设备具有上述的一种柔性可穿戴式电子应变传感器。The present invention also provides a wearable device, which has the above-mentioned flexible and wearable electronic strain sensor.
本发明还提供了一种柔性可穿戴式电子应变传感器的制备方法，包括以下步骤：The present invention also provides a preparation method of a flexible and wearable electronic strain sensor, comprising the following steps:
制备具有微通道的柔性基体；于所述微通道内注入液态导体或半液态导体，于所述微通道的两端插入电极。A flexible substrate with a microchannel is prepared; a liquid conductor or a semi-liquid conductor is injected into the microchannel, and electrodes are inserted at both ends of the microchannel.
可选地，制备所述柔性基体包括以下步骤：Optionally, preparing the flexible substrate comprises the following steps:
制备微通道模具和柔性材料溶液，将柔性材料溶液混合后去除气泡；Prepare the microchannel mold and the flexible material solution, and remove the air bubbles after mixing the flexible material solution;
向微通道模具中加入混合并去除气泡后的所述柔性材料溶液形成柔性基体主体；Adding the flexible material solution after mixing and removing air bubbles to the microchannel mold to form a flexible matrix body;
在基板上滴入混合并去除气泡后的柔性材料溶液，并使柔性材料溶液形成一层柔性材料薄膜；Dropping the flexible material solution after mixing and removing air bubbles on the substrate, and making the flexible material solution form a flexible material film;
将所述柔性基体主体压于未完全固化的所述柔性材料薄膜上，使所述柔性基体主体和柔性材料薄膜形成具有微通道的柔性基体。The flexible matrix main body is pressed on the incompletely cured flexible material film, so that the flexible matrix main body and the flexible material film form a flexible matrix with microchannels.
可选地，于所述微通道内注入液态导体或半液态导体包括以下步骤：Optionally, injecting a liquid conductor or a semi-liquid conductor into the microchannel includes the following steps:
可以采用两个注射器插入所述微通道的两端，其中一个注射器内具有液态导体；另一个注射器抽所述微通道中的空气，具有液态导体的注射器向所述微通道内注入液态导体，使液态导体充满微通道，拔出所述注射器。Can adopt two syringes to insert the two ends of described microchannel, wherein have liquid conductor in the syringe; The liquid conductor fills the microchannel and the syringe is withdrawn.
可选地，于所述微通道的两端插入电极包括以下步骤：Optionally, inserting electrodes at both ends of the microchannel includes the following steps:
将两个电极分别插入所述微通道的两端，使用柔性材料溶液密封微通道。Two electrodes are respectively inserted into the two ends of the microchannel, and a flexible material solution is used to seal the microchannel.
可选地，将柔性材料溶液混合和去除气泡包括以下步骤：Optionally, mixing and removing air bubbles from the flexible material solution includes the following steps:
可以采用Ecoflex系列硅橡胶溶液放入离心混合器的容器中，所述离心混合器的转速为300-400rpm，保持时间为10-15s后，所述离心混合器的转速提高到1400-1600rpm，保持时间为25-30s，得到混合后的硅橡胶溶液；The Ecoflex series silicone rubber solution can be put into the container of the centrifugal mixer. The rotating speed of the centrifugal mixer is 300-400rpm. The time is 25-30s, and the mixed silicone rubber solution is obtained;
把混合后的硅橡胶溶液放入真空抽滤装置中，开启所述真空抽滤装置的真空泵，得到去除气泡后的硅橡胶溶液；Put the mixed silicone rubber solution into the vacuum suction filtration device, open the vacuum pump of the vacuum suction filtration device, obtain the silicone rubber solution after the air bubbles are removed;
形成柔性基体主体包括以下步骤：Forming the flexible matrix body includes the following steps:
在所述微通道模具表面喷至少一层脱模剂薄膜，接着使用移液器往所述微通道模具中填充去除气泡后的硅橡胶溶液；Spray at least one layer of release agent film on the surface of the microchannel mold, and then use a pipette to fill the microchannel mold with the silicone rubber solution after removing air bubbles;
将所述微通道模具移到烤箱中，在80摄氏度的条件下烘烤45-60min，脱模后得到柔性基体主体；The microchannel mold is moved to an oven, baked for 45-60 minutes at 80 degrees Celsius, and the flexible matrix body is obtained after demoulding;
在基板上滴入去除气泡后的硅橡胶溶液，放入匀胶机中旋转形成一层硅橡胶薄膜，匀胶机转速设置为350-400rpm，匀胶时间为25-30秒；Drop the silicone rubber solution after removing the air bubbles on the substrate, put it into the homogenizer and rotate to form a layer of silicone rubber film, the speed of the homogenizer is set at 350-400rpm, and the homogenization time is 25-30 seconds;
在硅橡胶薄膜处于半凝固状态时把脱模后的柔性基体主体压在硅橡胶薄膜上，待柔性基体主体与硅橡胶薄膜粘接密封完好时放在室温静置45-60min，得到具有微通道的柔性基体。When the silicone rubber film is in a semi-solidified state, press the flexible matrix main body after demoulding on the silicone rubber film, and when the flexible matrix main body and the silicone rubber film are bonded and sealed, leave it at room temperature for 45-60 minutes to obtain microchannels. flexible base.
本发明所提供的一种柔性可穿戴式电子应变传感器及其制备方法，其该应变传感器以高度柔性的Ecoflex系列材料作为基本材料。倒入事先由光刻工艺制备的微型模具中倒模出内部的微通道或微通道阵列，接着旋涂一层同样材料的薄膜密封整个微通道。注入液体导体共晶镓铟充满整个通道。最后在微通道的两端插入电极再次密封即完成制备。在该传感器工作时，由于外部载荷的作用造成微通道长度和横截面的改变，从而改变电阻。在电极两端加上恒流源。把电阻信号变为方便测量的电压信号，通过对电压信号的分析得到相应的应变值。该柔性传感器在应变达到300％时仍能正常工作，几乎能与任何复杂的三维表面集成工作。The invention provides a flexible and wearable electronic strain sensor and a preparation method thereof. The strain sensor uses highly flexible Ecoflex series materials as basic materials. The internal microchannel or microchannel array is poured into the micro-mold prepared by photolithography process, and then a thin film of the same material is spin-coated to seal the entire microchannel. Inject the liquid conductor eutectic gallium indium to fill the entire channel. Finally, electrodes are inserted at both ends of the microchannel and sealed again to complete the preparation. When the sensor is working, the length and cross-section of the microchannel change due to the external load, thereby changing the resistance. Add a constant current source across the electrodes. The resistance signal is changed into a voltage signal that is convenient for measurement, and the corresponding strain value is obtained through the analysis of the voltage signal. The flexible sensor can still work normally when the strain reaches 300%, and can be integrated with almost any complex three-dimensional surface.
附图说明Description of drawings
为了更清楚地说明本发明实施例中的技术方案，下面将对实施例中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following will briefly introduce the accompanying drawings that need to be used in the embodiments. Obviously, the accompanying drawings in the following description are only some embodiments of the present invention. For Those of ordinary skill in the art can also obtain other drawings based on these drawings without making creative efforts.
图1是本发明实施例提供的一种柔性可穿戴式电子应变传感器的平面示意图；Fig. 1 is a schematic plan view of a flexible wearable electronic strain sensor provided by an embodiment of the present invention;
图2是本发明实施例提供的一种柔性可穿戴式电子应变传感器中微通道呈蛇形时的平面示意图；Fig. 2 is a schematic plan view of a flexible wearable electronic strain sensor provided in an embodiment of the present invention when the microchannel is serpentine;
图3是本发明实施例提供的一种柔性可穿戴式电子应变传感器的制备方法中制备硅橡胶溶液的平面示意图；3 is a schematic plan view of preparing a silicone rubber solution in a method for preparing a flexible wearable electronic strain sensor provided by an embodiment of the present invention;
图4是本发明实施例提供的一种柔性可穿戴式电子应变传感器的制备方法中硅橡胶溶液混合后的平面示意图；Fig. 4 is a schematic plan view of a mixed silicone rubber solution in a method for preparing a flexible wearable electronic strain sensor provided by an embodiment of the present invention;
图5是本发明实施例提供的一种柔性可穿戴式电子应变传感器的制备方法中硅橡胶溶液去除气泡后的平面示意图；5 is a schematic plan view of a silicon rubber solution after removing air bubbles in a method for preparing a flexible wearable electronic strain sensor provided by an embodiment of the present invention;
图6是本发明实施例提供的一种柔性可穿戴式电子应变传感器的制备方法中在微通道模具上填充硅橡胶溶液时的平面示意图；6 is a schematic plan view of filling a microchannel mold with a silicone rubber solution in a method for preparing a flexible wearable electronic strain sensor provided by an embodiment of the present invention;
图7是本发明实施例提供的一种柔性可穿戴式电子应变传感器的制备方法中在微通道模具上填充硅橡胶溶液后经烘烤后的平面示意图；7 is a schematic plan view of a microchannel mold filled with silicone rubber solution and baked in a method for preparing a flexible wearable electronic strain sensor provided by an embodiment of the present invention;
图8是本发明实施例提供的一种柔性可穿戴式电子应变传感器的制备方法中在基板上滴入硅橡胶溶液后的平面示意图；Fig. 8 is a schematic plan view of a method of manufacturing a flexible wearable electronic strain sensor provided by an embodiment of the present invention after dropping a silicone rubber solution on the substrate;
图9是本发明实施例提供的一种柔性可穿戴式电子应变传感器的制备方法中将柔性基体主体与薄膜压合时的平面示意图；Fig. 9 is a schematic plan view of laminating the flexible matrix body and the film in the method of manufacturing a flexible wearable electronic strain sensor provided by an embodiment of the present invention;
图10是本发明实施例提供的一种柔性可穿戴式电子应变传感器的制备方法中得到的柔性可穿戴式电子应变传感器的平面示意图。Fig. 10 is a schematic plan view of a flexible wearable electronic strain sensor obtained in a method for preparing a flexible wearable electronic strain sensor according to an embodiment of the present invention.
具体实施方式detailed description
为了使本发明的目的、技术方案及优点更加清楚明白，以下结合附图及实施例，对本发明进行进一步详细说明。应当理解，此处所描述的具体实施例仅仅用以解释本发明，并不用于限定本发明。In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.
需要说明的是，当元件被称为“固定于”或“设置于”另一个元件，它可以直接在另一个元件上或者可能同时存在居中元件。当一个元件被称为是“连接于”另一个元件，它可以是直接连接到另一个元件或者可能同时存在居中元件。It should be noted that when an element is referred to as being “fixed on” or “disposed on” another element, it may be directly on the other element or there may be an intervening element at the same time. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or intervening elements may also be present.
还需要说明的是，本发明实施例中的左、右、上、下等方位用语，仅是互为相对概念或是以产品的正常使用状态为参考的，而不应该认为是具有限制性的。It should also be noted that the orientation terms such as left, right, up, and down in the embodiments of the present invention are only relative concepts or refer to the normal use state of the product, and should not be regarded as restrictive .
如图1所示，本发明实施例提供的一种柔性可穿戴式电子应变传感器，包括柔性基体1，柔性基体1可以采用硅橡胶材料(例如Ecoflex系列)等制成。所述柔性基体1内具有柔性的微通道，柔性的微通道其长度和横截面可在外力作用下改变，且微通道10为封闭腔体，所述微通道10内设置有半液态导体或液态导体3，半液态导体或液态导体3可以充满微通道10。所述微通道10的两端设置有电极2，电板的端部与微通道10内的半液态导体或液态导体3接触，在该传感器工作时，由于外部载荷的作用造成微通道10的长度和横截面改变，从而改变半液态导体或液态导体3的电阻。在两端的电极2加上恒流电源。把电阻信号变为方便测量的电压信号，通过对电压信号的分析得到相应的应变值，该传感器在工作时主要采集密封的微通道10中液体导体或半液态导体电阻变化信号，具有高度挠性、可拉伸性和薄的几何特点，使之能直接与任何柔性执行机构集成，且灵敏度高，抗干扰能力强，该柔性传感器在应变达到300％时仍能正常工作，特别适用于可穿戴设备领域尤其是大变形情况等，且稳定性、精度、准确度和可靠性高。As shown in FIG. 1 , a flexible wearable electronic strain sensor provided by an embodiment of the present invention includes a flexible base 1 , and the flexible base 1 can be made of silicone rubber materials (such as Ecoflex series). There is a flexible microchannel in the flexible matrix 1, the length and cross section of the flexible microchannel can be changed under the action of external force, and the microchannel 10 is a closed cavity, and the microchannel 10 is provided with a semi-liquid conductor or a liquid conductor. The conductor 3 , semi-liquid conductor or liquid conductor 3 can fill the microchannel 10 . The two ends of described microchannel 10 are provided with electrode 2, and the end of electric plate is in contact with semi-liquid conductor or liquid conductor 3 in microchannel 10, and when this sensor works, the length of microchannel 10 is caused by the effect of external load. and the cross-section changes, thereby changing the resistance of the semi-liquid conductor or liquid conductor 3 . A constant current power supply is applied to the electrodes 2 at both ends. Change the resistance signal into a voltage signal that is convenient for measurement, and obtain the corresponding strain value through the analysis of the voltage signal. When the sensor is working, it mainly collects the resistance change signal of the liquid conductor or semi-liquid conductor in the sealed microchannel 10, and is highly flexible. , Stretchability and thin geometric characteristics, so that it can be directly integrated with any flexible actuator, and has high sensitivity and strong anti-interference ability. The flexible sensor can still work normally when the strain reaches 300%, especially suitable for wearable In the field of equipment, especially in the case of large deformation, etc., and the stability, precision, accuracy and reliability are high.
可选地，柔性可穿戴式电子应变传感器的厚度可以小于1mm，即柔性基体1的厚度可以小于1mm，可以很好地适用于智能穿戴设备中。Optionally, the thickness of the flexible wearable electronic strain sensor can be less than 1 mm, that is, the thickness of the flexible substrate 1 can be less than 1 mm, which can be well suited for smart wearable devices.
可选地，所述柔性基体1可以采用降解聚酯材料或硅橡胶材料，本实施例中，柔性基体1采用Ecoflex系列的硅橡胶材料作为基本材料，具体应用中，可以采用德国BASF公司所制造的脂肪族芳香族无规共聚酯(Ecoflex)，其单体可为：己二酸、对苯二甲酸、1,4-丁二醇。可降解材料一般认为是一种通过太阳光辐射或土壤中微生物等方式使其能分解成为低分子物的塑料，它除具有可降解性外，还应有易于加工及满足使用要求的性能。完全生物降解性塑料在化学方法合成时用利用脂肪族聚脂、聚乙烯醇(PVA)和聚乙二醇生产容易降解。利用这些高分子易生物降解的特性对生物降解塑料进行研究开发，其中以对脂肪族聚脂的研究优为突出。在纵多的脂肪族聚脂的中，聚己内脂(PCL)应用甚广，它是一种热塑性结晶型聚脂，可以被脂肪酶水解成小分子，然后，进一步被微生物同化，可以用于外科用品、黏结膜、脱膜剂等产品。脂肪族聚脂与尼龙进行胺脂的交换反应，合成聚酰脂共聚物(CPAE)，在用动植物的天然高分子合成时，植物的纤维素、淀粉等，动物中的壳聚糖、聚氨基葡萄糖、动物胶以及海洋生物的藻类等，可以制造有价值的生物降解材料。生物可降解聚酯是一种新型高分子聚合材料，可通过发酵、化学方法和酶催化来合成。Optionally, the flexible base 1 can use degradable polyester material or silicone rubber material. In this embodiment, the flexible base 1 uses Ecoflex series silicone rubber material as the basic material. In specific applications, it can be manufactured by German BASF company The aliphatic aromatic random copolyester (Ecoflex), its monomers can be: adipic acid, terephthalic acid, 1,4-butanediol. Degradable materials are generally considered to be plastics that can be decomposed into low-molecular substances by solar radiation or microorganisms in the soil. In addition to being degradable, they should also be easy to process and meet the requirements of use. Fully biodegradable plastics are easily degraded by using aliphatic polyester, polyvinyl alcohol (PVA) and polyethylene glycol during chemical synthesis. The biodegradable properties of these polymers are used to research and develop biodegradable plastics, among which the research on aliphatic polyester is the most prominent. Among the many aliphatic polyesters, polycaprolactone (PCL) is widely used. It is a thermoplastic crystalline polyester that can be hydrolyzed into small molecules by lipase, and then further assimilated by microorganisms. Used in surgical supplies, mucous membranes, film release agents and other products. Aliphatic polyester and nylon carry out amine exchange reaction to synthesize polyacyl ester copolymer (CPAE). When synthesizing with natural polymers of animals and plants, cellulose, starch, etc. Glucosamine, animal glue, and algae from marine organisms can produce valuable biodegradable materials. Biodegradable polyester is a new type of polymer material that can be synthesized by fermentation, chemical methods and enzyme catalysis.
也可以利用化学方法与天然高分子共混技术来合成可降解塑料，主要品种有PHB/PCL，糊化淀粉/PCL等制品。它们的主要特点是可完全降解，同时通过共混提高其耐热性、耐水性以及降低成本，使其成为通用的降解性塑料。It is also possible to use chemical methods and natural polymer blending technology to synthesize degradable plastics. The main varieties are PHB/PCL, gelatinized starch/PCL and other products. Their main feature is that they can be completely degraded, and at the same time, their heat resistance, water resistance and cost reduction can be improved through blending, making them general-purpose degradable plastics.
可选地，所述微通道10内设置有液体导体共晶镓铟作为液态导体，当然，也可以设置其它液态金属导体。电极2可以从柔性基体1长度方向的两端或微通道10的两端插入至前端与微通道10内设置有半液态导体或液态导体3相接触。电极2与柔性基体1之间可以通过密封材料密封，以进一步提高其可靠性。密封材料可以为硅橡胶溶液材料(Ecoflex)。Optionally, the microchannel 10 is provided with a liquid conductor eutectic gallium indium as a liquid conductor, and of course, other liquid metal conductors may also be provided. The electrodes 2 can be inserted from both ends of the flexible substrate 1 in the length direction or both ends of the microchannel 10 to the front end and contact with the semi-liquid conductor or the liquid conductor 3 provided in the microchannel 10 . The electrode 2 and the flexible base 1 can be sealed by a sealing material to further improve its reliability. The sealing material may be a silicone rubber solution material (Ecoflex).
具体应用中，所述微通道10可以呈条形、折线形或蛇形，如图2所示，柔性可穿戴式电子应变传感器100中蛇形的微通道10呈往复弯折状，其更易变形，可用于相对较大面积处的人体皮肤表面，传感的精准度和稳定性得以进一步提高。当然，微通道10也可以呈其它的结构形状，例如圆形、弧形、渐开线形或异形等，均属于本发明的保护范围。In a specific application, the microchannel 10 can be strip-shaped, zigzag-shaped or serpentine-shaped. As shown in FIG. , can be used on a relatively large area of human skin surface, and the accuracy and stability of sensing can be further improved. Of course, the microchannel 10 can also be in other structural shapes, such as circular, arc, involute or special shape, etc., all of which belong to the protection scope of the present invention.
可选地，所述微通道可以设置有一个或至少两个，微通道可以是一个，也可以是多个，至少两个微通道可以形成微通道阵列，微通道阵列中的微通道可以呈矩形阵列或环形阵列状等。Optionally, the microchannel can be provided with one or at least two, the microchannel can be one, or multiple, at least two microchannels can form a microchannel array, and the microchannels in the microchannel array can be rectangular array or circular array, etc.
在该柔性可穿戴式电子应变传感器的拉伸试验中，其灵敏度较高，且采集的信号表现出良好的线性度和可重复性，稳定性、精度、准确度和可靠性高。应变达到300％仍能正常工作，能较好的附着在复杂的三维动静态曲面，如大变形的人体关节处(肘关节、膝关节)，与皮肤亲和性好，对人正常工作学习几乎没影响。是可穿戴设备的理想柔性传感器。In the tensile test of the flexible wearable electronic strain sensor, its sensitivity is high, and the collected signal shows good linearity and repeatability, and the stability, precision, accuracy and reliability are high. It can still work normally when the strain reaches 300%, and can be well attached to complex three-dimensional dynamic and static surfaces, such as large deformed human joints (elbow joints, knee joints). No effect. It is an ideal flexible sensor for wearable devices.
本发明还提供了一种可穿戴设备，所述可穿戴设备具有上述的柔性可穿戴式电子应变传感器。可穿戴设备可以为智能手表、智能手环、智能眼镜、智能服装、虚拟现实头盔等。通过柔性可穿戴式电子应变传感器的应用，该柔性可穿戴式电子应变传感器的表现厚度不足1mm，且表现出非常好的柔弹性，拉伸应变达到300％仍能正常工作，足以和人体皮肤媲美，另外可以采用生物相容性的Ecoflex材料作为基本材料，在集成到穿戴式设备中人几乎没有不适应感。并且，该传感器采集的是密封微通道10电阻信号，排除了外界噪声对信号的干扰，采集数据较为准确。通过光刻工艺刻画的微通道10大大提高了传感器的灵敏度。当然，本发明实施例所提供的柔性可穿戴式电子应变传感器也可以应用于其它设备上，也属于本发明的保护范围。The present invention also provides a wearable device, which has the above-mentioned flexible and wearable electronic strain sensor. Wearable devices can be smart watches, smart bracelets, smart glasses, smart clothing, virtual reality helmets, etc. Through the application of a flexible wearable electronic strain sensor, the thickness of the flexible wearable electronic strain sensor is less than 1mm, and it exhibits very good flexibility. It can still work normally when the tensile strain reaches 300%, which is comparable to human skin. , In addition, biocompatible Ecoflex materials can be used as the basic material, and people have almost no discomfort when integrated into wearable devices. Moreover, the sensor collects the resistance signal of the sealed microchannel 10, which eliminates the interference of external noise on the signal, and the collected data is more accurate. The microchannel 10 carved by the photolithography process greatly improves the sensitivity of the sensor. Certainly, the flexible wearable electronic strain sensor provided by the embodiment of the present invention can also be applied to other devices, which also belongs to the protection scope of the present invention.
本发明实施例还提供了一种柔性可穿戴式电子应变传感器的制备方法，如图3至10所示，包括以下步骤：The embodiment of the present invention also provides a method for preparing a flexible and wearable electronic strain sensor, as shown in Figures 3 to 10, including the following steps:
制备具有密封的微通道10的柔性基体1；于所述微通道10内注入半液态导体或液态导体3，于所述微通道10的两端插入电极2。半液态导体或液态导体3可以充满微通道10内，电极2的端部与半液态导体或液态导体3接触。A flexible substrate 1 with a sealed microchannel 10 is prepared; a semi-liquid conductor or liquid conductor 3 is injected into the microchannel 10 , and electrodes 2 are inserted at both ends of the microchannel 10 . The semi-liquid conductor or liquid conductor 3 can fill the microchannel 10 , and the end of the electrode 2 is in contact with the semi-liquid conductor or liquid conductor 3 .
可选地，制备所述柔性基体1包括以下步骤：Optionally, preparing the flexible substrate 1 includes the following steps:
制备微通道模具41和柔性材料溶液，将柔性材料溶液混合后去除气泡；Prepare the microchannel mold 41 and the flexible material solution, remove the air bubbles after mixing the flexible material solution;
向微通道模具41中加入混合并去除气泡后的所述柔性材料溶液形成柔性基体主体11；Adding the flexible material solution after mixing and removing air bubbles to the microchannel mold 41 to form a flexible matrix body 11;
在基板42上滴入混合并去除气泡后的柔性材料溶液，并使柔性材料溶液形成一层柔性材料薄膜(硅橡胶薄膜12)；Drop the flexible material solution after mixing and removing air bubbles on the substrate 42, and make the flexible material solution form a layer of flexible material film (silicone rubber film 12);
将所述柔性基体主体11压于未完全固化的所述柔性材料薄膜(硅橡胶薄膜12)上，使所述柔性基体主体11和柔性材料薄膜(硅橡胶薄膜12)形成具有微通道10的柔性基体1；The flexible matrix main body 11 is pressed on the incompletely cured flexible material film (silicone rubber film 12), so that the flexible matrix main body 11 and the flexible material film (silicone rubber film 12) form a flexible microchannel 10. matrix1;
可选地，于所述微通道10内注入半液态导体或液态导体3包括以下步骤：Optionally, injecting the semi-liquid conductor or the liquid conductor 3 into the microchannel 10 includes the following steps:
可以采用两个注射器插入所述微通道10的两端，其中一个注射器内具有液态导体3；另一个注射器抽所述微通道10中的空气，具有液态导体3的注射器向所述微通道10内注入液态导体3，使液态导体3充满微通道10，拔出所述注射器。Two syringes can be used to insert into the two ends of the microchannel 10, one of which has a liquid conductor 3; Inject the liquid conductor 3 so that the liquid conductor 3 fills the microchannel 10, and pull out the syringe.
可选地，于所述微通道10的两端插入电极2包括以下步骤：Optionally, inserting electrodes 2 at both ends of the microchannel 10 includes the following steps:
将两个电极2分别插入所述微通道10的两端，使用柔性材料溶液密封微通道10。Two electrodes 2 are respectively inserted into the two ends of the microchannel 10, and the microchannel 10 is sealed with a flexible material solution.
可选地，将柔性材料溶液混合和去除气泡包括以下步骤：Optionally, mixing and removing air bubbles from the flexible material solution includes the following steps:
可以采用Ecoflex系列硅橡胶溶液放入离心混合器的容器中，所述离心混合器的转速为300-400rpm，保持时间为10-15s后，所述离心混合器的转速提高到1400-1600rpm，保持时间为25-30s，得到混合后的硅橡胶溶液；The Ecoflex series silicone rubber solution can be put into the container of the centrifugal mixer. The rotating speed of the centrifugal mixer is 300-400rpm. The time is 25-30s, and the mixed silicone rubber solution is obtained;
把混合后的硅橡胶溶液放入真空抽滤装置中，开启所述真空抽滤装置的真空泵，得到去除气泡后的硅橡胶溶液；可以理解地，柔性材料溶液不限于硅橡胶溶液。Put the mixed silicone rubber solution into the vacuum filtration device, turn on the vacuum pump of the vacuum filtration device, and obtain the silicone rubber solution after removing air bubbles; understandably, the flexible material solution is not limited to the silicone rubber solution.
形成柔性基体主体11包括以下步骤：Forming the flexible substrate body 11 includes the following steps:
在所述微通道模具41表面喷至少一层脱模剂薄膜，接着使用移液器往所述微通道模具41中填充去除气泡后的硅橡胶溶液；Spray at least one layer of release agent film on the surface of the microchannel mold 41, and then use a pipette to fill the microchannel mold 41 with the silicone rubber solution after removing air bubbles;
将所述微通道模具41移到烤箱中，在80摄氏度的条件下烘烤45-60min，脱模后得到柔性基体主体11；Move the microchannel mold 41 to an oven, bake for 45-60 minutes at 80 degrees Celsius, and obtain the flexible matrix main body 11 after demoulding;
在基板42上滴入去除气泡后的硅橡胶溶液，放入匀胶机中旋转形成一层硅橡胶薄膜12，匀胶机转速设置为350-400rpm，匀胶时间为25-30秒；Drop the silicone rubber solution after removing the air bubbles on the substrate 42, put it into a homogenizer and rotate to form a layer of silicone rubber film 12, the speed of the homogenizer is set to 350-400rpm, and the homogenization time is 25-30 seconds;
在硅橡胶薄膜12处于半凝固状态时把脱模后的柔性基体主体11压在硅橡胶薄膜12上，待柔性基体主体11与硅橡胶薄膜12粘接密封完好时放在室温静置45-60min，得到具有微通道10的柔性基体1。When the silicone rubber film 12 is in a semi-solidified state, press the demoulded flexible base body 11 on the silicone rubber film 12, and place it at room temperature for 45-60 minutes when the flexible base body 11 and the silicone rubber film 12 are bonded and sealed. , to obtain a flexible substrate 1 with microchannels 10 .
具体应用中，可以参考如下流程：In specific applications, you can refer to the following process:
通过光刻法制作好的微通道模具41(材料为SU-8光刻胶)；液体金属导体共晶镓铟((EGaIn)；具有高度柔性的Ecoflex系列材料；ease release 200脱模剂。具体包括以下步骤：The microchannel mold 41 (material is SU-8 photoresist) that is made by photolithography; liquid metal conductor eutectic gallium indium ((EGaIn); highly flexible Ecoflex series materials; ease release 200 release agent. Specific Include the following steps:
第一步：如图3和图4所示，可以分别取等质量的Ecoflex 1A和1B，放入离心混合器的容器中，为保证两种硅橡胶充分均匀混合。离心混合器转速为300-400rpm，保持时间为10-15s，接着转速提高到1400-1600rpm，保持时间为25-30s。Step 1: As shown in Figure 3 and Figure 4, you can take Ecoflex 1A and 1B of equal mass and put them into the container of a centrifugal mixer to ensure that the two silicone rubbers are fully and evenly mixed. The rotational speed of the centrifugal mixer is 300-400rpm, and the holding time is 10-15s, and then the rotating speed is increased to 1400-1600rpm, and the holding time is 25-30s.
第二步：如图4和图5所示，可以把第一步中的硅橡胶溶液放入真空抽滤装置中，打开真空泵，直到去除溶液中所有气泡。The second step: as shown in Figure 4 and Figure 5, the silicone rubber solution in the first step can be put into a vacuum filtration device, and the vacuum pump is turned on until all air bubbles in the solution are removed.
第三步：如图6所示，可以把微通道模具41表面喷上一层脱模剂薄膜12，接着使用移液器往模具中填充第二步中得到的硅橡胶溶液，如图6所示。The third step: as shown in Figure 6, the surface of the microchannel mold 41 can be sprayed with a layer of release agent film 12, and then use a pipette to fill the mold with the silicone rubber solution obtained in the second step, as shown in Figure 6 Show.
第四步：填充后的微通道模具41可以移到烤箱中，在80摄氏度的条件下烘烤45-60min，如图7所示，得到柔性基体主体11。Step 4: The filled microchannel mold 41 can be moved to an oven and baked at 80 degrees Celsius for 45-60 minutes, as shown in FIG. 7 , to obtain a flexible matrix body 11 .
第五步：可以在基板42上滴入适量的第二步中得到的硅橡胶溶液，放入匀胶机中旋转形成一层薄膜12，匀胶机转速设置为350-400rpm，匀胶时间为25-30s，如图8所示。Step 5: You can drop an appropriate amount of the silicone rubber solution obtained in the second step on the substrate 42, put it into a homogenizer and rotate to form a layer of film 12, the speed of the homogenizer is set to 350-400rpm, and the homogenization time is 25-30s, as shown in Figure 8.
第六步：在第五步中形成的薄膜12处于半凝固状态时，可以把脱模的微通道硅橡胶(柔性基体主体11)轻轻压在薄膜12上，待粘接密封完好时放在室温静置45-60min，如图9所示。Step 6: When the film 12 formed in the fifth step is in a semi-solidified state, the released microchannel silicone rubber (flexible matrix body 11) can be gently pressed on the film 12, and placed on the Stand at room temperature for 45-60min, as shown in Figure 9.
第七步：可以取两只微型注射器插入微通道10两端，一个注射器用来抽微通道10里面的空气，引流液体导体-EGaIn，一个注射器用来持续注入液体导体(EGaIn)到微通道10中。当液体导体(EGaIn)填充满整个微通道10时，插入电极2，取少量的硅橡胶溶液(第二步中得到)密封住端口，这样就可以得到柔性可拉伸电子应变传感器，如图10所示。该方法制备简单，可一次性实现批量生产，提高了时间和成本效益。特别适用于可穿戴设备领域尤其是大变形情况等。Step 7: Two micro-syringes can be inserted into both ends of the microchannel 10, one syringe is used to pump the air in the microchannel 10, and the liquid conductor-EGaIn is drained, and the other syringe is used to continuously inject the liquid conductor (EGaIn) into the microchannel 10 middle. When the liquid conductor (EGaIn) fills the entire microchannel 10, insert the electrode 2, take a small amount of silicone rubber solution (obtained in the second step) to seal the port, so that a flexible and stretchable electronic strain sensor can be obtained, as shown in Figure 10 shown. The method is simple to prepare and can be mass-produced at one time, which improves time and cost efficiency. It is especially suitable for the field of wearable devices, especially in the case of large deformation.
本发明实施例所提供的一种柔性可穿戴式电子应变传感器及其制备方法，该应变传感器以高度柔性的Ecoflex系列材料作为基本材料。可以倒入事先由光刻工艺制备的微型模具中倒模出内部的微通道10或微通道10阵列，接着旋涂一层同样材料的薄膜12密封整个微通道10。注入液体导体共晶镓铟充满整个通道。最后在微通道10的两端插入电极2再次密封即完成制备。在该传感器工作时，由于外部载荷的作用造成微通道10长度和横截面的改变，从而改变电阻。在电极2两端加上恒流源。把电阻信号变为方便测量的电压信号，通过对电压信号的分析得到相应的应变值。该柔性传感器在应变达到300％时仍能正常工作，几乎能与任何复杂的三维表面集成工作。The embodiments of the present invention provide a flexible and wearable electronic strain sensor and a preparation method thereof. The strain sensor uses highly flexible Ecoflex series materials as basic materials. The internal microchannel 10 or array of microchannels 10 can be poured into a micro-mold prepared in advance by photolithography, and then spin-coated with a thin film 12 of the same material to seal the entire microchannel 10 . Inject the liquid conductor eutectic gallium indium to fill the entire channel. Finally, the electrodes 2 are inserted into the two ends of the microchannel 10 and sealed again to complete the preparation. When the sensor is working, the length and cross-section of the microchannel 10 change due to the external load, thereby changing the resistance. Add a constant current source at both ends of electrode 2. The resistance signal is changed into a voltage signal that is convenient for measurement, and the corresponding strain value is obtained through the analysis of the voltage signal. The flexible sensor can still work normally when the strain reaches 300%, and can be integrated with almost any complex three-dimensional surface.
以上所述仅为本发明的较佳实施例而已，并不用以限制本发明，凡在本发明的精神和原则之内所作的任何修改、等同替换或改进等，均应包含在本发明的保护范围之内。The above descriptions are only preferred embodiments of the present invention, and are not intended to limit the present invention. Any modifications, equivalent replacements or improvements made within the spirit and principles of the present invention shall be included in the protection of the present invention. within range.
| Application Number | Priority Date | Filing Date | Title |
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| CN201710570331.2ACN107478148B (en) | 2017-07-13 | 2017-07-13 | Flexible wearable electronic strain sensor and preparation method thereof |
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| CN201710570331.2ACN107478148B (en) | 2017-07-13 | 2017-07-13 | Flexible wearable electronic strain sensor and preparation method thereof |
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| CN107478148B CN107478148B (en) | 2020-03-17 |
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| CN201710570331.2AActiveCN107478148B (en) | 2017-07-13 | 2017-07-13 | Flexible wearable electronic strain sensor and preparation method thereof |
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