技术领域technical field
本发明属于传感器技术领域，尤其涉及一种具有弹性体结构的六维力传感器。The invention belongs to the technical field of sensors, in particular to a six-dimensional force sensor with an elastic body structure.
背景技术Background technique
六维力传感器测量的是笛卡尔坐标系三维空间的三维正交力(Fx,Fy,Fz)和三维正交力矩(Mx,My,Mz)，由于其测力信息丰富、测量精度高等特点，主要应用在力及力-位控制场合，如机器人末端执行器，汽车行驶过程轮力检测，轮廓跟踪，精密装配，双手协调等，尤其在航空机器人，宇宙空间站对接仿真等场合发挥了极其重要的作用。The six-dimensional force sensor measures the three-dimensional orthogonal force (Fx, Fy, Fz) and three-dimensional orthogonal moment (Mx, My, Mz) in the three-dimensional space of the Cartesian coordinate system. Due to its rich force measurement information and high measurement accuracy, It is mainly used in force and force-position control occasions, such as robot end effectors, wheel force detection during vehicle driving, contour tracking, precision assembly, hand coordination, etc., especially in aerospace robots, space station docking simulations, etc. It plays an extremely important role effect.
十字梁型结构是目前六维力传感器采用最多的一种形式，而电阻应变式测力原理是目前六维力传感器中应用最多的一种。专利CN103528746A中公开了一种十字梁式六维力传感器弹性体，它由四个内梁、四个外梁和四个过载保护梁等组成，可以提高灵敏度，减小维间耦合，但是结构相对复杂。专利CN205333238U中公开了一种结构紧凑的应变式六维力传感器，它包括底座弹性体、十字梁弹性体等，底座弹性体具有一腔体，十字梁弹性体设于腔体内，整体结构较为紧凑。The cross-beam structure is the most widely used form of the six-dimensional force sensor at present, and the principle of resistance strain force measurement is the most widely used one in the current six-dimensional force sensor. Patent CN103528746A discloses a cross-beam type six-dimensional force sensor elastic body, which is composed of four inner beams, four outer beams and four overload protection beams, which can improve sensitivity and reduce inter-dimensional coupling, but the structure is relatively complex. Patent CN205333238U discloses a strain-type six-dimensional force sensor with a compact structure, which includes a base elastic body, a cross beam elastic body, etc., the base elastic body has a cavity, and the cross beam elastic body is arranged in the cavity, and the overall structure is relatively compact .
国际上对多维力/力矩传感器的研究热点多在检测原理、方法创新和新型弹性体结构设计等方面。而多维力/力矩传感器特有的维间耦合成为多维力/力矩传感器存在的主要问题，制约着测量精度，从而直接影响后续的力反馈与力控制性能。The research hotspots of multi-dimensional force/torque sensors in the world are mostly in the aspects of detection principle, method innovation and new elastic body structure design. However, the unique inter-dimensional coupling of multi-dimensional force/torque sensors has become the main problem of multi-dimensional force/torque sensors, which restricts the measurement accuracy and directly affects the subsequent force feedback and force control performance.
发明内容Contents of the invention
发明目的：为了减小六维力传感器的测量误差，本发明提供一种具有弹性体结构的六维力传感器。Purpose of the invention: In order to reduce the measurement error of the six-dimensional force sensor, the present invention provides a six-dimensional force sensor with an elastic body structure.
技术方案：一种具有弹性体结构的六维力传感器，包括水平弹性梁、中心垂直弹性梁、加载轴及外圈固定台，所述水平弹性梁为十字形结构，水平弹性梁包括四个等长分支，所述中心垂直弹性梁的一端固定在水平弹性梁十字形结构的中心位置，且与十字形结构所在的面垂直，所述加载轴安装在中心垂直弹性梁的另一端，所述外圈固定台为套设在水平弹性梁外侧的圆环状部件，外圈固定台包括内侧面，水平弹性梁的四个分支的末端固定在外圈固定台的内侧面上，水平弹性梁的四个分支的末端均为S型结构，所述水平弹性梁和/或中心垂直弹性梁上还贴覆有应变片。Technical solution: A six-dimensional force sensor with an elastic body structure, including a horizontal elastic beam, a central vertical elastic beam, a loading shaft and an outer ring fixing table, the horizontal elastic beam is a cross-shaped structure, and the horizontal elastic beam includes four etc. For the long branch, one end of the central vertical elastic beam is fixed at the center of the cross-shaped structure of the horizontal elastic beam, and is perpendicular to the surface where the cross-shaped structure is located, the loading shaft is installed at the other end of the central vertical elastic beam, and the outer The ring fixing platform is a ring-shaped part sleeved on the outside of the horizontal elastic beam. The outer ring fixing platform includes the inner surface. The ends of the four branches of the horizontal elastic beam are fixed on the inner surface of the outer ring fixing platform. The four branches of the horizontal elastic beam The ends of the branches are all S-shaped structures, and the horizontal elastic beams and/or the central vertical elastic beams are also covered with strain gauges.
工作原理：当传感器受到Y方向作用力Fy时，两个X向弹性梁分支发生弯曲变形，两个Y向弹性梁分支发生拉压形变且其变化量很小可忽略，此时其末端S型结构可看作柔性环节，Fy可通过粘贴于X向弹性梁左、右侧面的应变片组成的Wheatstone全桥电路测得；当传感器受到Z方向作用力矩Mz时，两个X向弹性梁分支发生弯曲变形，且两个X向弹性梁分支的左、右侧面的相同位置处产生的形变大小相等、方向相反，Mz即可通过粘贴于X向弹性梁左右侧面的应变片组成的Wheatstone全桥电路测得。Working principle: When the sensor is subjected to the force Fy in the Y direction, the two X-direction elastic beam branches undergo bending deformation, and the two Y-direction elastic beam branches undergo tension-compression deformation and the change is small and negligible. At this time, the S-shaped The structure can be regarded as a flexible link, and Fy can be measured by the Wheatstone full-bridge circuit composed of strain gauges pasted on the left and right sides of the X-direction elastic beam; when the sensor is subjected to the Z-direction acting torque Mz, the two X-direction elastic beams branch Bending deformation occurs, and the deformations produced at the same position on the left and right side of the two X-direction elastic beam branches are equal in size and opposite in direction, Mz can pass the whole Wheatstone composed of strain gauges pasted on the left and right sides of the X-direction elastic beam bridge circuit measured.
当传感器受到Z方向作用力Fz时，两个Y向弹性梁分支发生弯曲变形，且两个Y向弹性梁分支的上、下表面的相同位置处产生的形变大小相等、方向相反，Fz可通过粘贴于两个Y向弹性梁分支上、下表面的应变片组成的全桥电路测得；当传感器受到X方向力矩Mx时，两个Y向弹性梁分支发生弯曲变形，两个X向弹性梁分支发生扭转变形，且变形量很小可以忽略，Mx可通过粘贴于两个Y向弹性梁分支上下表面的应变片组成的全桥电路测得。When the sensor is subjected to the force Fz in the Z direction, the two Y-direction elastic beam branches are bent and deformed, and the deformations at the same position on the upper and lower surfaces of the two Y-direction elastic beam branches are equal in magnitude and opposite in direction, and Fz can be passed through Measured by a full-bridge circuit composed of strain gauges pasted on the upper and lower surfaces of two Y-direction elastic beam branches; when the sensor is subjected to X-direction torque Mx, the two Y-direction elastic beam branches undergo bending deformation, and the two X-direction elastic beams The branch is twisted and deformed, and the deformation is very small and can be ignored. Mx can be measured by a full-bridge circuit composed of strain gauges pasted on the upper and lower surfaces of the two Y-direction elastic beam branches.
当传感器受到X方向作用力Fx或Y方向力矩My时，中心垂直弹性梁发生较大弯曲变形，且中心垂直弹性梁的前、后侧面的相同位置处产生的应变大小相等、方向相反，Fx和My均可通过粘贴于中心垂直弹性梁前、后侧面的应变片组成的桥路测得。When the sensor is subjected to the force Fx in the X direction or the moment My in the Y direction, the central vertical elastic beam undergoes a large bending deformation, and the strains generated at the same position on the front and rear sides of the central vertical elastic beam are equal in size and opposite in direction, Fx and My can be measured through a bridge composed of strain gauges pasted on the front and rear sides of the central vertical elastic beam.
有益效果：本发明提供的一种具有弹性体结构的六维力传感器，水平弹性梁分支的末端设计为S型结构，使其在受到相应方向的作用力时作为柔性环节；相比较现有的十字梁型六维力传感器，多了一个中心垂直弹性梁，用以感受X方向的作用力Fx和Y方向的转矩My；除了在四个水平弹性梁分支上粘贴应变片外，在中心垂直弹性梁朝向Y向弹性梁分支的两个侧面也贴覆有两对应变片，减小了测量误差；现有的十字梁型六维力传感器在三个及三个以上方向间存在耦合(如Fy,Mz,Fx之间，Fz,Mx,My之间)，而本专利具有弹性体结构的六维力传感器只在两个方向间存在耦合(如Fy,Mz之间，Fz,Mx之间，Fx,My之间)，减小维间耦合，从而简化了解耦算法，提高测量精度。Beneficial effects: the invention provides a six-dimensional force sensor with an elastic body structure, the end of the horizontal elastic beam branch is designed as an S-shaped structure, so that it acts as a flexible link when it is subjected to a force in the corresponding direction; compared with the existing The cross-beam type six-dimensional force sensor has an additional central vertical elastic beam to feel the force Fx in the X direction and the torque My in the Y direction; in addition to pasting strain gauges on the four horizontal elastic beam branches, vertical The two sides of the elastic beam facing the Y-direction elastic beam branch are also covered with two pairs of strain gauges, which reduces the measurement error; the existing cross-beam type six-dimensional force sensor has coupling between three and more than three directions (such as Between Fy, Mz, Fx, between Fz, Mx, My), while the six-dimensional force sensor with an elastic body structure in this patent only has coupling between two directions (such as between Fy, Mz, between Fz, Mx , between Fx,My), reduce the inter-dimensional coupling, thereby simplifying the decoupling algorithm and improving the measurement accuracy.
附图说明Description of drawings
图1为本发明的具有弹性体结构的六维力传感器整体结构示意图。FIG. 1 is a schematic diagram of the overall structure of a six-dimensional force sensor with an elastic body structure according to the present invention.
具体实施方式detailed description
下面结合附图和具体实施例对本发明作进一步说明。The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.
如图1所示，为方便描述方向，建立一个如图所示的空间笛卡尔坐标系。As shown in Figure 1, in order to facilitate the description of the direction, a spatial Cartesian coordinate system is established as shown in the figure.
如图1所示，具有弹性体结构的六维力传感器包括水平弹性梁1、中心垂直弹性梁2、加载轴3及外圈固定台4，所述水平弹性梁1为十字形结构，水平弹性梁1包括四个等长分支，所述中心垂直弹性梁2的一端固定在水平弹性梁1十字形结构的中心位置，且与十字形结构所在的面垂直，所述加载轴3安装在中心垂直弹性梁2的另一端，所述外圈固定台4为套设在水平弹性梁1外侧的圆环状部件，外圈固定台4包括内侧面41，水平弹性梁1的四个分支的末端固定在外圈固定台4的内侧面41上，水平弹性梁1的四个分支的末端均为S型结构，所述水平弹性梁和/或中心垂直弹性梁上还贴覆有应变片。所述S型结构的厚度为1mm。水平弹性梁分支的末端设计为S型结构，使其在受到相应方向的作用力时作为柔性环节，即起到浮动梁的作用。相比现有的十字梁型六维力传感器，本实施例多了一个中心垂直弹性梁2，用以感受X方向的作用力Fx和Y方向的转矩My。As shown in Figure 1, a six-dimensional force sensor with an elastic body structure includes a horizontal elastic beam 1, a central vertical elastic beam 2, a loading shaft 3 and an outer ring fixing platform 4, the horizontal elastic beam 1 is a cross-shaped structure, and the horizontal elastic The beam 1 includes four equal-length branches, one end of the central vertical elastic beam 2 is fixed at the center of the cross-shaped structure of the horizontal elastic beam 1, and is perpendicular to the surface where the cross-shaped structure is located, and the loading shaft 3 is installed in the center vertical The other end of the elastic beam 2, the outer ring fixing table 4 is an annular component sleeved on the outside of the horizontal elastic beam 1, the outer ring fixing table 4 includes an inner surface 41, and the ends of the four branches of the horizontal elastic beam 1 are fixed On the inner surface 41 of the outer ring fixing platform 4 , the ends of the four branches of the horizontal elastic beam 1 are all S-shaped structures, and the horizontal elastic beam and/or the central vertical elastic beam are also covered with strain gauges. The thickness of the S-shaped structure is 1 mm. The end of the branch of the horizontal elastic beam is designed as an S-shaped structure, so that it acts as a flexible link when it is subjected to a force in the corresponding direction, that is, it acts as a floating beam. Compared with the existing cross-beam type six-dimensional force sensor, this embodiment has an additional central vertical elastic beam 2 for sensing the force Fx in the X direction and the torque My in the Y direction.
所述中心垂直弹性梁2和水平弹性梁1的四个分支均为横截面是正方形的四棱柱。所述加载轴3为圆柱体结构。所述外圈固定台4上设有8个上下通孔，用于固定传感器。The four branches of the central vertical elastic beam 2 and the horizontal elastic beam 1 are all quadrangular prisms with a square cross section. The loading shaft 3 is a cylindrical structure. The outer ring fixing table 4 is provided with 8 upper and lower through holes for fixing the sensor.
所述水平弹性梁1的四个分支包括两个X向弹性梁分支11和两个Y向弹性梁分支12，两个X向弹性梁分支11在一条直线上，两个Y向弹性梁分支12在一条直线上，两个X向弹性梁分支11上的S型结构的开口方向相同，两个Y向弹性梁分支12上的S型结构的开口方向相同且与X向弹性梁分支11上的S型结构的开口方向垂直。在本实施例中，所述X向弹性梁分支11末端的S型结构的开口方向为左右方向；所述Y向弹性梁分支12末端的S型结构的开口方向为上下方向。The four branches of the horizontal elastic beam 1 include two X-direction elastic beam branches 11 and two Y-direction elastic beam branches 12, the two X-direction elastic beam branches 11 are on a straight line, and the two Y-direction elastic beam branches 12 On a straight line, the opening directions of the S-shaped structures on the two X-direction elastic beam branches 11 are the same, and the opening directions of the S-shaped structures on the two Y-direction elastic beam branches 12 are the same as those on the X-direction elastic beam branches 11. The opening direction of the S-shaped structure is vertical. In this embodiment, the opening direction of the S-shaped structure at the end of the X-direction elastic beam branch 11 is the left-right direction; the opening direction of the S-shaped structure at the end of the Y-direction elastic beam branch 12 is the up-down direction.
除此之外，本实施例对应变片的贴覆位置也有所设计。In addition, this embodiment also has a design for the sticking position of the strain gauge.
所述两个X向弹性梁分支11结构完全相同且在对称的位置贴覆有相同的应变片；其中一个X向弹性梁分支11包括左侧面111和右侧面(图中被遮挡，未示出)，左侧面111的中心轴线上贴覆有第一应变片01和第二应变片02，右侧面上与第一应变片01和第二应变片02对应的位置分别贴覆有第三应变片和第四应变片(图中被遮挡，未示出)；另一个X向弹性梁分支11’上分别与第一应变片01、第二应变片02、第三应变片、第四应变片相对应的四个应变片记为第十三应变片013、第十四应变片014、第十五应变片、第十六应变片。The two X-direction elastic beam branches 11 have identical structures and are covered with the same strain gauges at symmetrical positions; one of the X-direction elastic beam branches 11 includes a left side 111 and a right side (blocked in the figure, not shown), the central axis of the left side 111 is pasted with the first strain gauge 01 and the second strain gauge 02, and the positions corresponding to the first strain gauge 01 and the second strain gauge 02 on the right side are respectively pasted with The third strain gauge and the fourth strain gauge (blocked in the figure, not shown); the other X-direction elastic beam branch 11' is respectively connected with the first strain gauge 01, the second strain gauge 02, the third strain gauge, the first strain gauge The four strain gauges corresponding to the four strain gauges are denoted as the thirteenth strain gauge 013 , the fourteenth strain gauge 014 , the fifteenth strain gauge, and the sixteenth strain gauge.
所述两个Y向弹性梁分支结构完全相同且在对称的位置贴覆有相同的应变片；其中一个Y向弹性梁分支12包括上表面121和下表面(图中被遮挡，未示出)，上表面121的中心轴线上贴覆有第五应变片05和第六应变片06，下表面上与第五应变片05和第六应变片06对应的位置分别贴覆有第七应变片和第八应变片(图中被遮挡，未示出)；另一个Y向弹性梁分支12’上分别与第五应变片05、第六应变片06、第七应变片、第八应变片(图中被遮挡，未示出)相对应的四个应变片记为第十七应变片017、第十八应变片018、第十九应变片、第二十应变片(图中被遮挡，未示出)。The two Y-direction elastic beam branches have identical structures and are covered with the same strain gauges at symmetrical positions; one of the Y-direction elastic beam branches 12 includes an upper surface 121 and a lower surface (blocked in the figure, not shown) The fifth strain gauge 05 and the sixth strain gauge 06 are pasted on the central axis of the upper surface 121, and the seventh strain gauge and the sixth strain gauge 06 are pasted on the lower surface corresponding to the fifth strain gauge 05 and the sixth strain gauge 06 respectively. The eighth strain gauge (blocked among the figure, not shown); On the other Y-direction elastic beam branch 12', it is respectively connected with the fifth strain gauge 05, the sixth strain gauge 06, the seventh strain gauge, and the eighth strain gauge (figure The corresponding four strain gauges are marked as the seventeenth strain gauge 017, the eighteenth strain gauge 018, the nineteenth strain gauge, and the twentieth strain gauge (covered in the figure, not shown out).
所述中心垂直弹性梁2包括前侧面21、后侧面(图中被遮挡，未示出)、左侧面22和右侧面(图中被遮挡，未示出)，前侧面21与后侧面分别朝向两个X向弹性梁分支11，前侧面21的中心轴线上贴覆有第九应变片09和第十应变片010，后侧面上与第九应变片09和第十应变片010对应的位置分别贴覆有第十一应变片和第十二应变片(图中被遮挡，未示出)。The central vertical elastic beam 2 includes a front side 21, a rear side (blocked in the figure, not shown), a left side 22 and a right side (blocked in the figure, not shown), the front side 21 and the rear side Facing the two X-direction elastic beam branches 11 respectively, the ninth strain gauge 09 and the tenth strain gauge 010 are pasted on the central axis of the front side 21, and the corresponding ninth strain gauge 09 and tenth strain gauge 010 are on the rear side. An eleventh strain gauge and a twelfth strain gauge (blocked in the figure, not shown) are pasted on the positions respectively.
所有的应变片均为相同的应变片。设第一应变片01到Y向弹性梁分支12的距离为d1，设第五应变片05到中心垂直弹性梁2的距离为d2，设第九应变片09到X向弹性梁分支11的距离为d3，其中d1＝d2＝d3；设第二应变片02到Y向弹性梁分支12的距离为d4，设第六应变片06到中心垂直弹性梁2的距离为d5，设第十应变片10到X向弹性梁分支11的距离为d6，其中d4＝d5＝d6；且第一应变片01到Y向弹性梁分支12的距离与第二应变片02到Y向弹性梁分支12的距离不相等，即d1≠d4。All strain gauges are the same strain gauge. Set the distance from the first strain gauge 01 to the Y-direction elastic beam branch 12 as d1, set the distance from the fifth strain gauge 05 to the central vertical elastic beam 2 as d2, and set the distance from the ninth strain gauge 09 to the X-direction elastic beam branch 11 It is d3, where d1=d2=d3; the distance from the second strain gauge 02 to the Y-direction elastic beam branch 12 is d4, the distance from the sixth strain gauge 06 to the central vertical elastic beam 2 is d5, and the tenth strain gauge The distance from 10 to the X-direction elastic beam branch 11 is d6, where d4=d5=d6; and the distance from the first strain gauge 01 to the Y-direction elastic beam branch 12 is the same as the distance from the second strain gauge 02 to the Y-direction elastic beam branch 12 Not equal, that is, d1≠d4.
这20个应变片一共组成了六组应变片组。每个应变片组通过电气连接组成一个Wheatstone全桥或半桥电路，用于测量空间一个维度的力或力矩。The 20 strain gauges constitute a total of six sets of strain gauges. Each strain gauge group is electrically connected to form a Wheatstone full-bridge or half-bridge circuit for measuring force or moment in one dimension of space.
第一应变片01、第三应变片、第十三应变片013和第十五应变片组成第一应变片组；第二应变片02、第四应变片、第十四应变片014和第十六应变片组成第二应变片组。当传感器受到Y方向的作用力或Z方向的力矩时，X方向的水平弹性梁会产生较大形变，因此，第一、二应变片组组成的Wheatstone电桥电路分别用于测量Y方向的作用力Fy和Z方向的力矩Mz的大小。The first strain gauge 01, the third strain gauge, the thirteenth strain gauge 013 and the fifteenth strain gauge form the first strain gauge group; the second strain gauge 02, the fourth strain gauge, the fourteenth strain gauge 014 and the tenth strain gauge Six strain gauges form the second strain gauge group. When the sensor is subjected to a force in the Y direction or a moment in the Z direction, the horizontal elastic beam in the X direction will have a large deformation. Therefore, the Wheatstone bridge circuit composed of the first and second strain gauge groups is used to measure the effect in the Y direction The magnitude of the force Fy and the moment Mz in the Z direction.
第五应变片05、第七应变片、第十七应变片017和第十九应变片组成第三应变片组；第六应变片06、第八应变片、第十八应变片018和第二十应变片组成第四应变片组。当传感器受到Z方向作用力或X方向的力矩时，Y方向的水平弹性梁产生较大形变，因此，第三、四应变片组组成的Wheatstone电桥电路分别用于测量Z方向作用力Fz和X方向的力矩Mx的大小。The fifth strain gauge 05, the seventh strain gauge, the seventeenth strain gauge 017 and the nineteenth strain gauge form the third strain gauge group; the sixth strain gauge 06, the eighth strain gauge, the eighteenth strain gauge 018 and the second The ten strain gauges make up the fourth strain gauge group. When the sensor is subjected to a force in the Z direction or a moment in the X direction, the horizontal elastic beam in the Y direction will have a large deformation. Therefore, the Wheatstone bridge circuit composed of the third and fourth strain gauge groups is used to measure the Z direction force Fz and The magnitude of the moment Mx in the X direction.
第九应变片09和背面的第十一应变片组成第五应变片组，第十应变片10和背面的第十二应变片组成第六应变片组。当传感器受到X方向作用力或Y方向力矩时，中心竖直弹性梁产生较大形变，因此，第五、六应变片组组成的Wheatstone电桥电路分别用于测量X方向作用力Fx和Y方向力矩My的大小。The ninth strain gauge 09 and the eleventh strain gauge on the back form the fifth strain gauge group, and the tenth strain gauge 10 and the twelfth strain gauge on the back form the sixth strain gauge group. When the sensor is subjected to the force in the X direction or the moment in the Y direction, the central vertical elastic beam will have a large deformation. Therefore, the Wheatstone bridge circuit composed of the fifth and sixth strain gauge groups is used to measure the force Fx in the X direction and the Y direction The magnitude of the moment My.
该结构除了在四个水平弹性梁分支的相应位置粘贴有应变片组外，在中心垂直弹性梁2朝向X向弹性梁分支的两个侧面也贴覆有两对应变片，测量误差相对较小。该传感器结构在两个方向间存在耦合(如Fy,Mz之间，Fz,Mx之间，Fx,My之间)，可以使解耦算法简单化，更加容易解耦。In addition to sticking strain gauge groups on the corresponding positions of the four horizontal elastic beam branches, this structure also has two pairs of strain gauges pasted on the two sides of the central vertical elastic beam 2 facing the X-direction elastic beam branch, and the measurement error is relatively small. . The sensor structure has coupling between two directions (such as between Fy and Mz, between Fz and Mx, between Fx and My), which can simplify the decoupling algorithm and make decoupling easier.
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710190373.3ACN107044898B (en) | 2017-03-28 | 2017-03-28 | Six-dimensional force sensor with elastomer structure |
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710190373.3ACN107044898B (en) | 2017-03-28 | 2017-03-28 | Six-dimensional force sensor with elastomer structure |
| Publication Number | Publication Date |
|---|---|
| CN107044898Atrue CN107044898A (en) | 2017-08-15 |
| CN107044898B CN107044898B (en) | 2022-11-29 |
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710190373.3AActiveCN107044898B (en) | 2017-03-28 | 2017-03-28 | Six-dimensional force sensor with elastomer structure |
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