技术领域technical field
本发明涉及机电的转换器和用于制造机电的转换器的方法。The invention relates to an electromechanical converter and a method for producing an electromechanical converter.
背景技术Background technique
从WO 2013/120494 Al中已知电容式的机电的转换器，该转换器具有薄的聚合物层，该聚合物层嵌进两个能够导电的层之间，其中，所有的层在一个平行于所述层的方向上波纹状地构造。由此实现的是，此层系统垂直于波纹状的表现形式的方向拥有较大的刚度，尤其当所述能够导电的层由非弹性的材料、例如金属形成时。A capacitive electromechanical converter is known from WO 2013/120494 A1, which has a thin polymer layer embedded between two electrically conductive layers, wherein all layers are in a parallel The structure is corrugated in the direction of the layer. This achieves that the layer system has a greater stiffness perpendicular to the direction of the corrugated appearance, in particular when the electrically conductive layer is formed from a non-elastic material, for example metal.
发明内容Contents of the invention
发明优势Invention advantage
具有根据本发明的特征的根据本发明的机电的转换器（包括带有至少四个互相接续的平整的层的层序列的层系统）相应与此具有的优点在于，所述层系统的刚度在两个彼此正交的方向上（此两个方向平行于所述层系统的平面）基本上彼此独立地能够设定。能够例如实现的是，所述层系统在一个方向上柔韧和弹性，并且在与此正交的方向上不柔韧或拥有高的刚度。这点尤其在在层系统的制造过程期间的操作中并且在之后的使用或进一步使用所述层系统时有利。An electromechanical converter according to the invention having the features according to the invention (comprising a layer system with a layer sequence of at least four mutually successive planar layers) accordingly has the advantage that the stiffness of the layer system is between Two mutually orthogonal directions (both directions parallel to the plane of the layer system) can be set essentially independently of one another. It can be achieved, for example, that the layer system is flexible and elastic in one direction and inflexible or has high stiffness in a direction perpendicular thereto. This is especially advantageous during operation during the production process of the layer system and during subsequent use or further use of the layer system.
在一个方向上的柔韧性或在与此正交的方向上的刚度通过根据本发明的电的转换器来实现，该转换器包括带有至少四个互相接续的平整的层的层序列的层系统，其中，第一和第三层具有弹性的第一材料，并且第二和第四层具有弹性的第二材料，其中，所述弹性的第一材料能够导电，并且所述弹性的第二材料具有电介质，并且其中，第三材料以条带的形式如此地安设或置进到所述层序列的外部的层上和/或所述层序列的层的至少之一中：使得在所述条带的方向上提高所述层系统的刚度。Flexibility in one direction or stiffness in a direction perpendicular thereto is achieved by the electrical converter according to the invention comprising layers with a layer sequence of at least four mutually successive planar layers A system wherein the first and third layers have an elastic first material and the second and fourth layers have an elastic second material, wherein the elastic first material is electrically conductive and the elastic second The material has a dielectric, and the third material is applied or inserted in the form of strips on the outer layers of the layer sequence and/or in at least one of the layers of the layer sequence such that in the This increases the stiffness of the layer system in the direction of the strips.
将机电的转换器能够理解为包括带有各一个安设在所述电介的层的两个侧部上的能够导电的层的电介的弹性的层的装置，其中，通过在两个能够导电的层之间施加电压，在两个能够传导的层之间的静电的力如此地起作用：使得位于其间的弹性的电介的层被压合并且在此被拉伸。在此有利的是，所述弹性的电介的材料具有小的弹性模量、高的介电常数以及高的击穿强度。典型地，在大约30V/μm的场强中，能够实现大约20%至30%的弹性的电介的层的延展。所述弹性的电介的层的层厚通常位于大约20μm。能够考虑的是，所述层厚范围位于5μm和100μm之间。An electromechanical converter can be understood as a device comprising a dielectric elastic layer with an electrically conductive layer arranged on both sides of the dielectric layer, wherein, by means of two capable A voltage is applied between the electrically conductive layers, and electrostatic forces act between the two conductive layers in such a way that the elastic dielectric layers located between them are pressed together and stretched. It is advantageous here if the elastic, dielectric material has a low modulus of elasticity, a high dielectric constant and a high breakdown strength. Typically, at a field strength of approximately 30 V/μm, an expansion of the elastic dielectric layer of approximately 20% to 30% can be achieved. The layer thickness of the elastic dielectric layer is usually approximately 20 μm. It is conceivable that the layer thickness range lies between 5 μm and 100 μm.
也还能够使用机电的转换器，以便感测作用到其上的力。在此，在在两个能够导电的层上施加电压时，能够测定电压改变，当通过有待测量的力作用到机电的转换器上来改变所述弹性的电介的层的厚度时。It is also possible to use electromechanical transducers in order to sense the forces acting on them. In this case, when a voltage is applied across the two electrically conductive layers, a voltage change can be determined when the thickness of the elastic, dielectric layer is changed by the force to be measured acting on the electromechanical transducer.
机电的转换器能够例如在调节驱动装置中被使用作为线性执行器以用于使得有待驱动的调节元件移动预限定的行程，作为蠕动泵在医学技术中或微系统技术中或在触觉的显示器中用于通过能够改变的表面特性产生备选的和/或附加的信息通道。触觉的显示器能够尤其作为可变的显示器用于显示盲文。机电的转换器还能够用作力传感器。Electromechanical converters can be used, for example, in adjusting drives as linear actuators for moving an adjusting element to be driven by a predefined path, as peristaltic pumps in medical technology or in microsystems technology or in tactile displays For generating alternative and/or additional information channels by means of changeable surface properties. The tactile display can be used in particular as a variable display for displaying Braille. Electromechanical transducers can also be used as force sensors.
将层能够理解为扁平的对象，该对象在一个平面中伸展，该平面由两个彼此正交的方向撑开，并且该对象在相对于两个其它的方向正交的第三方向上拥有明显较小的伸展。将弹性的材料能够一般理解为带有较小的刚度的材料。一般，材料的刚度取决于所述材料的弹性的特性和所述材料的几何形状。尤其，在下文中简称为刚度的抗弯刚度是材料的弹性模量和材料的横截面的面惯性矩的乘积，其中，所述面转动惯量依赖于所述材料的横截面的形状的面惯性矩。因此可能的是，层或层系统在其机械的特性、尤其刚度中改变，办法是：例如把一个另外的材料以平行的条带为形式安设到所述层的或层系统的两个侧部之一上。在这里，它能够例如指的是所述层的相同的材料或所述层系统的材料之一。但是也能够考虑的是，它指的是其它的材料。所述层的或所述层系统的垂直于所述平行的条带的方向的刚度基本上不通过这些平行的条带进行改变。不同地，所述层的或所述层系统的刚度在平行于所述平行的条带的方向上依赖于所述单个的条带的横截面以及其彼此间距进行改变或提高。尤其，所述层的或所述层系统的刚度在所述条带的矩形的横截面的情况中依赖于在所述条带的高度和宽度之间的比例。A layer can be understood as a flat object that extends in a plane spanned by two directions that are perpendicular to each other and that has a distinctly smaller small stretches. An elastic material can generally be understood as a material with a low stiffness. In general, the stiffness of a material depends on the elastic properties of the material and the geometry of the material. In particular, the bending stiffness, hereinafter simply referred to as stiffness, is the product of the elastic modulus of the material and the surface moment of inertia of the cross-section of the material, wherein the surface moment of inertia depends on the surface moment of inertia of the shape of the cross-section of the material . It is therefore possible for a layer or layer system to change in its mechanical properties, especially stiffness, by, for example, attaching an additional material in parallel strips to both sides of the layer or layer system on one of the departments. Here, it can mean, for example, the same material of the layer or one of the materials of the layer system. However, it is also conceivable that it refers to other materials. The stiffness of the layer or of the layer system in a direction perpendicular to the parallel strips is substantially not altered by these parallel strips. Differently, the stiffness of the layer or of the layer system is changed or increased in a direction parallel to the parallel strips as a function of the cross-section of the individual strips and their distance from one another. In particular, the stiffness of the layer or of the layer system in the case of a rectangular cross-section of the strip depends on the ratio between the height and width of the strip.
能够考虑的是，第三材料的所述平行的条带安设在所述层的或所述层系统的两个侧部上。由此，所述层的或所述层系统的刚度能够有利地在一个平行于所述条带的方向上进一步提高。针对性地，在所述层的或所述层系统的一个侧部上安设的所述平行的条带具有相对于所述平行的条带的侧向的偏置，该条带安设在所述层的或所述层系统的另外的侧部上。还能够考虑的是，在所述层的或所述层系统的一个侧部上安设的所述条带具有相对于所述条带的方向偏置，该条带安设在所述层的或所述层系统的另外的侧部上。此外能够考虑的是，所述条带的横截面沿着所述条带改变。相邻的条带的间距还能够沿着所述条带改变。通过先前列举的变体方案，所述层的或所述层系统的刚度能够在一个平行于所述条带的方向上或在基本上平行于所述条带的方向范围中能够可变地设定。It is conceivable for the parallel strips of third material to be applied on both sides of the layer or of the layer system. As a result, the stiffness of the layer or of the layer system can advantageously be further increased in a direction parallel to the strip. Preferably, the parallel strips arranged on one side of the layer or the layer system have a lateral offset relative to the parallel strips, the strips being arranged on On the other side of the layer or the layer system. It is also conceivable that the strip attached on one side of the layer or of the layer system has a direction offset relative to the strip, which is attached on the side of the layer or on the other side of the layer system. Furthermore, it is conceivable that the cross section of the strip changes along the strip. The spacing of adjacent strips can also vary along the strip. Through the previously mentioned variants, the stiffness of the layers or of the layer system can be set variably in a direction parallel to the strips or in a range of directions substantially parallel to the strips. Certainly.
此外适当的是，另外的材料的平行的条带集成到所述层系统内的层中。这点能够例如由此实现，办法是：所述材料在所述层系统的层内以条带的方式交替。这意味着，在一个材料的条带的中间空间中存在另外的材料的条带。只要所述两个材料的弹性的特性足够不同，或一个材料和另外材料的弹性模量的差异足够大，则能够由此实现在所述条带的方向上的所述层的或所述整个层系统的经提高的刚度。Furthermore, it is suitable for parallel strips of further material to be integrated into the layers within the layer system. This can be achieved, for example, in that the material alternates in strips within the layers of the layer system. This means that in the interspace of a strip of material there is another strip of material. As long as the elastic properties of the two materials are sufficiently different, or the difference in the modulus of elasticity of one material and the other is sufficiently large, it can thus be achieved that the layer or the entire Increased stiffness of the layer system.
由于在优选实施例和其它实施例中列出的措施，在本发明中所说明的机电的转换器的有利的改型方案和改进方案是可行的。Due to the measures listed in the preferred and further exemplary embodiments, advantageous modifications and improvements of the electromechanical converter described in the present invention are possible.
针对性地，所述层系统围绕垂直于所述条带的轴线能够卷起为卷执行器。这意味着，所述平坦的层系统通过围绕垂直于所述条带的轴线进行的卷起能够任意频繁地彼此相叠地设置。由此，以有利的方式能够使得在垂直于一个平行于所述层的平面的所述方向上的压缩相应于彼此叠放的层系统的数量或层序列的数量而增大或这样所制造的执行器的延展能够增大。此外，通过基于平行的条带的所述层系统的卷起，产生了柱筒形的对象，该对象在所述条带的方向上或垂直于卷起轴线拥有高的刚度。通过层系统的通过所述卷起进行的倍增，有利地也实现了作用到所述卷执行器上的或出发的力的倍增。这点有利地能够用于：增大所述机电的转换器的应用领域，而不依赖于：是否所述机电的转换器作为执行器或作为发电机或传感器应用。Expediently, the layer system can be rolled up into a roll actuator about an axis perpendicular to the strip. This means that the flat layer systems can be arranged one above the other as often as desired by rolling up about an axis perpendicular to the strip. This advantageously enables the compression in the direction perpendicular to a plane parallel to the layers to be increased corresponding to the number of layer systems or layer sequences placed on top of one another or produced in this way The extension of the actuator can be increased. Furthermore, by rolling up the layer system based on parallel strips, a cylindrical object is produced which possesses a high stiffness in the direction of the strips or perpendicularly to the rolling axis. The multiplication of the layer system by the roll-up advantageously also results in a multiplication of the force acting on or originating from the roll actuator. This can advantageously be used to increase the field of application of the electromechanical converter independently of whether the electromechanical converter is used as an actuator or as a generator or as a sensor.
此外有利的是，所述弹性的第一材料构造为电极。由此，以简单的方式能够触接所述能够导电的层。此外适当的是，所述电介质构造为弹性体。因为弹性体相比于其它的电介的材料很轻并且它具有高的弹性的能量密度。由此，以有利的方式能够制造大的和同时轻的机电的转换器，该转换器具有高的效率。It is also advantageous if the elastic first material is formed as an electrode. The electrically conductive layer can thus be easily contacted. Furthermore, it is suitable for the dielectric to be designed as an elastomer. Because elastomer is very light compared to other dielectric materials and it has high elastic energy density. As a result, large and at the same time light electromechanical converters can advantageously be produced, which have high efficiencies.
此外有利的是，所述第三材料相比于第一材料和/或第二材料具有至少一个以因数2更高的弹性模量，优选以因数10更高的弹性模量，尤其优选地以因数100更高的弹性模量并且非常尤其优选地以因数1000更高的弹性模量。It is also advantageous if the third material has at least one modulus of elasticity which is higher by a factor of 2, preferably by a factor of 10, particularly preferably by a factor of 10, compared to the first material and/or the second material. A higher modulus of elasticity by a factor of 100 and very particularly preferably a higher modulus of elasticity by a factor of 1000.
因为除了材料的横截面的面惯性矩，所述材料的弹性模量对于该材料的刚度是决定性的。经此，增大了在由第三材料形成的所述平行的条带的方向上的整个层系统的刚度。Because besides the surface moment of inertia of the material's cross-section, the modulus of elasticity of the material is decisive for the stiffness of the material. As a result, the stiffness of the entire layer system in the direction of the parallel strips formed of the third material is increased.
针对性地，所述弹性的能够导电的第一材料构造为复合材料，该复合材料具有确定机械特性的弹性的载体材料和确定电导的能够传导的组分，尤其金属颗粒和/或碳纳米管。通过装进确定所述电导的能够传导的组分，以有利的方式能够在某种范围中匹配所述材料的传导性，而不显著改变所述材料的机械特性。由此能够在制造机电的转换器中获得另外的自由度。The elastic, electrically conductive first material is expediently designed as a composite material with an elastic carrier material defining the mechanical properties and an electrically conductive, electrically conductive component, in particular metal particles and/or carbon nanotubes. . By incorporating a conductive component that determines the electrical conductance, it is advantageously possible to adapt the conductivity of the material to a certain extent without substantially changing the mechanical properties of the material. An additional degree of freedom can thus be obtained in the manufacture of the electromechanical converter.
此外有利的是，所述弹性的第二材料具有硅胶和/或丙烯酸树脂。因为硅胶或丙烯酸树脂具有尤其小的弹性模量，这造成其大的延性。此外，它具有高的介电常数和高的击穿强度，它们对于在机电的转换器中的使用是有帮助的。It is also advantageous if the second elastic material comprises silicone and/or acrylic resin. Since silicone or acrylic resins have a particularly low modulus of elasticity, this results in their great ductility. Furthermore, it has a high dielectric constant and a high breakdown strength, which are helpful for use in electromechanical converters.
此外有利的是，所述第一材料、第二材料和/或第三材料能够湿化学地处理和/或涂装。湿化学的处理步骤或制造步骤一般不是很耗费能量，因为该处理步骤或制造步骤能够在室温中实施并且不需要低压。此外，在经设立的方法步骤中能够很好地再现所述结果。由此能够有利地实现小的制造成本。It is also advantageous if the first material, the second material and/or the third material can be treated and/or coated wet-chemically. Wet-chemical processing steps or production steps are generally not very energy-intensive, since they can be carried out at room temperature and do not require low pressures. Furthermore, the results can be reproduced very well in the established method steps. Advantageously, low production costs can thus be achieved.
在用于制造机电的转换器的方法中，该转换器包括带有至少四个互相接续的平整的层的层序列的层系统，该方法带有步骤：将弹性的第一材料的第一层安设到承载层或载膜上；将弹性的第二材料的第二层安设到第一层上；将弹性的第一材料的第三层安设到第二层上；将弹性的第二材料的第四层安设到第三层上，其中，所述弹性的第一材料能够导电，并且所述弹性的第二材料具有电介质，设置的是，在安设所述第一层到所述载体材料上前，在安设最后的层后，和/或在安设所述层期间，将第三材料以条带的形式如此地安设到所述层序列的外部的层上和/或如此地置进所述层序列的所述层之一中：使得在所述条带的方向上提高所述层系统的刚度。此方法的优点类似于上述的实施方案此外在此可见：所述层系统的刚度在所述条带的方向上能够可变地构造。通过在所述条带的方向上提高所述层系统的刚度，能够例如更轻易地从所述载膜解除所述层系统。同样，所述层系统的可能的后续的进一步加工通过在所述层系统的方向上的刚度简化或所述层系统的后续的手工操作被简化。In a method for producing an electromechanical converter comprising a layer system with a layer sequence of at least four mutually successive planar layers, the method has the step of: applying a first layer of an elastic first material Attached to a carrier layer or film; attaching a second layer of elastic second material to the first layer; attaching a third layer of elastic first material to the second layer; attaching the elastic first A fourth layer of two materials is applied to the third layer, wherein the elastic first material is electrically conductive and the elastic second material has a dielectric, it is provided that after the first layer is applied to Before the carrier material is applied, after applying the last layer and/or during the application of the layer, a third material is applied in the form of a strip on the outer layer of the layer sequence and Or it is inserted into one of the layers of the layer sequence in such a way that the stiffness of the layer system is increased in the direction of the strips. The advantage of this method is similar to that of the above-described embodiments, but it can also be seen here that the stiffness of the layer system can be configured variably in the direction of the strips. By increasing the stiffness of the layer system in the direction of the strips, it is possible, for example, to release the layer system more easily from the carrier film. Likewise, possible subsequent further processing of the layer system is simplified by a reduction in stiffness in the direction of the layer system or subsequent manual handling of the layer system.
此外有利的是，所述方法步骤至少之一具有湿化学的方法步骤，尤其印刷工艺、例如凹版印刷方法、辊印方法和/或喷墨打印方法。这些经设立的印刷方法中，实现了所述层系统的在花费上有利的、快速的和精准的制造，并且尤其提供的可行方案是，二维地结构化有待制造的层，例如通过置进条带结构。It is also advantageous if at least one of the method steps has a wet-chemical method step, in particular a printing process, for example a gravure printing method, a roller printing method and/or an inkjet printing method. In these established printing methods, cost-effective, rapid and precise production of the layer system is achieved and in particular offers the possibility of two-dimensionally structuring the layer to be produced, for example by inserting Stripe structure.
此外有利的是，按照所述方法步骤至少之一，实现干燥步骤或硬化步骤。这点保证的是，所述单个的层在其几何形状中稳定，并且多个相叠地设置的层彼此接续或彼此贴靠地保持附着。例如能够考虑的是，所述干燥步骤或硬化步骤通过在炉中加热所述层系统或该层系统的单个的层而进行，在这些被安设后。在本发明的一个另外的构造方案中，多个层能够在该层被安设后例如通过UV光线来硬化。这点的前提是，单个的层或多个层包含组分，该组分通过UV光线的辐射而改变该组分的化学特性并且由此硬化。It is also advantageous if, according to at least one of the method steps, a drying step or a hardening step is carried out. This ensures that the individual layers are stable in their geometry and that a plurality of layers arranged one above the other continue or remain adhered to one another. It is conceivable, for example, to carry out the drying step or hardening step by heating the layer system or individual layers of the layer system in an oven after these have been installed. In a further embodiment of the invention, the layers can be hardened after the layers have been applied, for example by means of UV light. This presupposes that the individual layer or layers contain components whose chemical properties are changed by the irradiation with UV light and thus cured.
此外有利的是，所述层系统围绕平行于条带的轴线进行卷起。能够考虑的是，在层的或另外的层的每次安设后和可能后续的干燥过程后，为了进一步加工，所述层系统被卷起至卷。在后续的步骤中（在其中，所述接下来的层被安设），所述层系统能够于是从先前经卷起的卷再次卷开，有待涂装的层能够被安设，可能后续的干燥过程能够发生，并且所述层系统能够再者卷起为卷。因此能够考虑的是，例如在层的每次安设步骤后，所述层系统卷起为卷，并且在接下来的层的另外的安设步骤前，所述层系统从该卷再次卷开。例如也能够考虑的是，在结束所述层系统的制造过程后，所述层系统从所述载膜层离，办法是：所述层系统被卷起至卷，并且所述载膜被卷起至单独的卷。在此要注意的是，所述轴线（所述层系统围绕该轴线卷起）平行于所述在制造方法中所安设的条带。It is also advantageous if the layer system is rolled up about an axis parallel to the strip. It is conceivable for the layer system to be rolled up to a roll for further processing after each application of a layer or a further layer and possibly after a subsequent drying process. In a subsequent step in which the next layer is applied, the layer system can then be unrolled again from the previously rolled-up roll, the layer to be painted can be applied, possibly in a subsequent A drying process can take place and the layer system can be rolled up again into a roll. It is therefore conceivable, for example, that after each installation step of the layer, the layer system is rolled up into a roll and that the layer system is unrolled from the roll again before a further installation step of the next layer. . For example, it is also conceivable that the layer system is delaminated from the carrier film after the end of the production process of the layer system in that the layer system is wound up on a roll and the carrier film is rolled up up to a separate volume. It should be noted here that the axis around which the layer system is rolled is parallel to the strip applied during the production method.
从实施例的下述的说明中参照附图和从优选实施例和其它实施例中得到了另外的优点。Additional advantages emerge from the following description of exemplary embodiments with reference to the drawings and from preferred and further exemplary embodiments.
附图说明Description of drawings
图示：Graphic:
图1是根据本发明的机电的转换器的示意图，Figure 1 is a schematic diagram of an electromechanical converter according to the invention,
图2是根据本发明的机电的转换器的另外的构造方式的顶视图，FIG. 2 is a top view of a further configuration of the electromechanical converter according to the invention,
图3是根据本发明的机电的转换器的另外的构造方式的顶视图，3 is a top view of a further configuration of the electromechanical converter according to the invention,
图4是在经卷起的根据本发明的机电的转换器的示意图，以及Figure 4 is a schematic view of a rolled up electromechanical converter according to the invention, and
图5是用于制造机电的转换器的根据本发明的方法的示意图。FIG. 5 is a schematic illustration of the method according to the invention for producing an electromechanical converter.
具体实施方式detailed description
在图1中在透视图中示出了机电的转换器1，其包括在载膜2上的不同的层。此外，展示了带有三个彼此正交的轴线101、102和103的坐标系100。所述载膜2和机电的转换器1的层平行于由轴线101和102撑开的平面。所述层在该平面中的延展能够计为几个毫米、优选几个厘米并且尤其优选地几个分米。载膜2基本上平整、柔韧以及机械稳定和热稳定，并且在此特别是用作用于机电的转换器1的之后所安设的层的基体。FIG. 1 shows a perspective view of an electromechanical converter 1 comprising various layers on a carrier film 2 . Furthermore, a coordinate system 100 is shown with three mutually orthogonal axes 101 , 102 and 103 . The carrier film 2 and the layers of the electromechanical converter 1 are parallel to the plane spanned by the axes 101 and 102 . The extent of the layer in this plane can be measured as several millimeters, preferably several centimeters and especially preferably several decimeters. The carrier film 2 is substantially planar, flexible, mechanically and thermally stable, and serves here in particular as a substrate for the subsequently applied layers of the electromechanical converter 1 .
所述机电的转换器1在轴线103的方向上具有带有三个不同的材料的三个不同的层类型。第一层3直接安设在所述载膜2上。所述第一层3和第三层4由弹性的电介的材料形成，该材料能够具有大约15μm至50μm的厚度。在这里，它能够指的是这样的弹性体：其具有大的延性、高的介电常数以及高的击穿强度。它能够尤其指的是硅胶。The electromechanical converter 1 has three different layer types with three different materials in the direction of the axis 103 . The first layer 3 is applied directly on the carrier film 2 . The first layer 3 and the third layer 4 are formed from an elastic, dielectric material which can have a thickness of approximately 15 μm to 50 μm. Here, it can refer to an elastomer which has a high ductility, a high dielectric constant and a high breakdown strength. It can especially refer to silica gel.
在这里所使用的硅胶能够具有小于1 N/mm2的弹性模量、大于2.8的介电常数和大于20 kV/mm的击穿强度。The silica gel used here can have an elastic modulus of less than 1 N/mm2 , a dielectric constant of greater than 2.8, and a breakdown strength of greater than 20 kV/mm.
第二层5直接安设在第一层3上。所述第二层5和第四层6由弹性的能够导电的材料形成，该材料能够具有大约5μm至30μm的厚度。在这里，它又能够指的是这样的硅胶：其具有能够导电的材料的混合。在这里，能够导电的材料例如指的是由银、石墨、炭黑和/或碳纳米管形成的颗粒。在所述层的体积处的所述能够传导的材料的份额能够在此被如此选择：使得构造了在所述能够传导的材料的单个的颗粒之间的能够导电的连接。第三层4安设在第二层5上，并且第四层6安设在所述第三层4上。The second layer 5 is attached directly on the first layer 3 . The second layer 5 and the fourth layer 6 are formed from an elastic, electrically conductive material, which can have a thickness of approximately 5 μm to 30 μm. Here again, it can refer to a silicone gel which has a mixture of electrically conductive materials. In this context, electrically conductive materials are, for example, particles formed from silver, graphite, carbon black and/or carbon nanotubes. The proportion of the conductive material in the volume of the layer can be selected in such a way that an electrically conductive connection is formed between the individual particles of the conductive material. A third layer 4 is applied on the second layer 5 and a fourth layer 6 is applied on said third layer 4 .
第二层5和第四层6能够构造为电极，经过外置的电压供应部7能够将电压安设给所述电极。由此，在所述第二层5和所述第四层6之间类似于电容器在所述轴线103的方向上构造了静电的力，该力将第三层4压合。在这里，所述电场能够计为大约90 V/μm。因为所述第三层4由几乎不可压缩的材料例如硅胶形成，则所述第三层4在所述层平面中平行于轴线101和102延展。在所述轴线101和102的方向上的此延展效果和/或在轴线103上的压缩效果能够被用于安设以及用于感测机械的力。The second layer 5 and the fourth layer 6 can be formed as electrodes to which a voltage can be applied via an external voltage supply 7 . As a result, an electrostatic force is formed between the second layer 5 and the fourth layer 6 similar to a capacitor in the direction of the axis 103 , which presses the third layer 4 together. Here, the electric field can be counted as approximately 90 V/μm. Since the third layer 4 is formed from an almost incompressible material such as silicone, the third layer 4 extends parallel to the axes 101 and 102 in the layer plane. This extension effect in the direction of said axes 101 and 102 and/or a compression effect on axis 103 can be used for mounting and for sensing mechanical forces.
在所述第四层6上平行于轴线102安设了平行的条带8。所述平行的条带8能够例如由漆来制造，该漆具有相比于在所述层3、4、5、6的材料比较高的例如大于2000 N/mm2的弹性模量。所述平行的条带8具有横截面9，该横截面除了所使用的材料的弹性模量还确定了在所述轴线102的方向上的所述平行的条带8的刚度。所述横截面9能够例如是正方形或矩形。在矩形的横截面9中，所述平行的条带8的在所述轴线103的方向上的长度能够有利地大于所述平行的条带8的在所述轴线101的方向上的长度，以便实现在所述轴线102的方向上的所述平行的条带8的和由此整个机电的转换器1的尽可能高的刚度。Parallel strips 8 are applied on the fourth layer 6 parallel to the axis 102 . The parallel strips 8 can be produced, for example, from a lacquer that has a relatively high modulus of elasticity, for example greater than 2000 N/mm2 , compared to the material in the layers 3 , 4 , 5 , 6 . The parallel strips 8 have a cross section 9 which, in addition to the modulus of elasticity of the material used, determines the stiffness of the parallel strips 8 in the direction of the axis 102 . The cross section 9 can be, for example, square or rectangular. In a rectangular cross section 9, the length of the parallel strips 8 in the direction of the axis 103 can advantageously be greater than the length of the parallel strips 8 in the direction of the axis 101, so that The highest possible stiffness of the parallel strips 8 and thus of the entire electromechanical converter 1 is achieved in the direction of the axis 102 .
还能够考虑的是，所述平行的条带8在所述轴线101的方向上的横截面9可变地构造和/或也能够在所述轴线102的方向上改变。It is also conceivable that the cross-section 9 of the parallel strips 8 in the direction of the axis 101 can be configured variably and/or can also be changed in the direction of the axis 102 .
所述平行的条带8在所述轴线101的方向上的间距能够均匀地构造。能够考虑的是，例如两个相邻的平行的条带8的间距等于在所述轴线101的方向上的平行的条带8的长度。还能够考虑的是，在所述平行的条带8之间的在所述轴线101的方向上的间距可变地构造和/或也能够在所述轴线102的方向上改变。The spacing of the parallel strips 8 in the direction of the axis 101 can be uniform. It is conceivable, for example, that the distance between two adjacent parallel strips 8 is equal to the length of the parallel strips 8 in the direction of the axis 101 . It is also conceivable that the spacing between the parallel strips 8 in the direction of the axis 101 is variably configured and/or can also be changed in the direction of the axis 102 .
此外，在本发明的一个备选的构造方案中能够考虑的是，所述第一层3和所述第三层4由弹性的能够导电的材料形成，并且所述第二层5和所述第四层6具有所述弹性的电介的材料。Furthermore, in an alternative embodiment of the invention it is conceivable that the first layer 3 and the third layer 4 are formed from an elastic, electrically conductive material, and that the second layer 5 and the The fourth layer 6 comprises the elastic, dielectric material.
在图2中在侧视图中示出了根据本发明的机电的转换器1的另一个实施方式。展示了平行于所述轴线101和103的机电的转换器1的横截面。所述机电的转换器1的层系统再次安设在所述载膜2上。与图1中的实施例的区别在于，所述平行的条带8不安设在所述第四层6上，而是位于所述第一层3下或内。可能的是，所述平行的条带8直接安设到载膜9上，并且在后续的过程步骤中，所述第一层3涂装到所述平行的条带8上。可能的是，在这里，所述第一层3的材料也挤进所述平行的条带8的中间空间10中并且部分地或完全地填充这些中间空间。在一个备选的构造方案中，在与在所述载膜2上的所述平行的条带8相同的定向中的所述平行的条带8的额外的层部任选地安设到所述第四层6上，以便进一步提高所述机电的转换器1的刚度。Another embodiment of the electromechanical converter 1 according to the invention is shown in side view in FIG. 2 . A cross-section of the electromechanical converter 1 parallel to said axes 101 and 103 is shown. The layer system of the electromechanical converter 1 is again mounted on the carrier film 2 . The difference from the embodiment in FIG. 1 is that the parallel strips 8 are not arranged on the fourth layer 6 , but under or in the first layer 3 . It is possible to apply the parallel strips 8 directly to the carrier film 9 and to apply the first layer 3 to the parallel strips 8 in a subsequent process step. It is possible here also for the material of the first layer 3 to squeeze into the interspaces 10 of the parallel strips 8 and to partially or completely fill these interspaces. In an alternative configuration, an additional layer of the parallel strips 8 in the same orientation as the parallel strips 8 on the carrier film 2 is optionally attached to the on the fourth layer 6 in order to further increase the stiffness of the electromechanical converter 1 .
在本发明的一个备选的实施方式中可能的是，所述第一层3被所述平行的条带8代替，其中，所述后续的第二层5、第三层4和第四层6的次序不被改变。经此保证的是，所述作为电极起作用的第二层5和第四层6在将所述机电的转换器8卷起为卷执行器时保持电流分离。In an alternative embodiment of the invention it is possible that the first layer 3 is replaced by the parallel strips 8, wherein the subsequent second layer 5, third layer 4 and fourth layer The order of 6 is not changed. This ensures that the second layer 5 and the fourth layer 6 acting as electrodes remain galvanically separated when rolling the electromechanical converter 8 to form a roll actuator.
在图3中在侧视图中示出了根据本发明的机电的转换器1的另一个备选的实施方式。展示了平行于所述轴线101和103的机电的转换器1的横截面。所述机电的转换器1的层系统安设在所述载膜2上。与图1或图2中的实施例的区别在于，所述平行的条带8位于所述第二层5内。由此，所述第二层5具有条带形的复合层，该复合层包括所述第三材料的平行的条带8和另外的第二材料的填充所述平行的条带8的中间空间的平行的条带，该第二材料有弹性并且能够导电。有利地，所述能够导电的材料在所述轴线101的方向上的平行的条带例如通过在图3中未示出的横接片彼此相连，以便在在所述轴线101的方向上也保证所述电导。在将电压安设给第二层5和第四层6时，在两个层之间构造了静电的力，该力将第三层4压合。因为下部的电极（其在这里通过在第二层5中的条带形的能够导电的材料形成）不均匀和扁平，则在所述第三层4中的在所述轴线101的方向上的所述弹性的电介质的延展不同于在所述轴线102的方向上的延展。在本发明的一个备选的实施方式中可能的是，所述平行的条带8额外地和/或备选地集成在所述第四层6中，以便进一步提高在所述轴线102的方向上的所述机电的转换器1的刚度。Another alternative embodiment of the electromechanical converter 1 according to the invention is shown in side view in FIG. 3 . A cross-section of the electromechanical converter 1 parallel to said axes 101 and 103 is shown. The layer system of the electromechanical converter 1 is applied to the carrier film 2 . The difference from the embodiment in FIG. 1 or FIG. 2 is that the parallel strips 8 are located in the second layer 5 . The second layer 5 thus has a strip-shaped composite layer comprising parallel strips 8 of the third material and additional interspaces of the second material filling the parallel strips 8 Parallel strips of the second material are elastic and electrically conductive. Advantageously, the parallel strips of the electrically conductive material in the direction of the axis 101 are connected to each other, for example via crosspieces not shown in FIG. 3 , so that also in the direction of the axis 101 The conductance. When a voltage is applied to the second layer 5 and the fourth layer 6 , an electrostatic force is established between the two layers which presses the third layer 4 together. Since the lower electrode (which is here formed by a strip-shaped electrically conductive material in the second layer 5 ) is not uniform and flat, in the third layer 4 in the direction of the axis 101 The extent of the elastic dielectric differs from the extent in the direction of axis 102 . In an alternative embodiment of the invention it is possible that the parallel strips 8 are additionally and/or alternatively integrated in the fourth layer 6 in order to further increase the on the stiffness of the electromechanical converter 1 .
在图4中展示了被卷起为卷执行器20的机电的转换器1。此外，展示了带有三个彼此正交的轴线101、102和103的坐标系100。FIG. 4 shows the electromechanical converter 1 rolled up as a roll actuator 20 . Furthermore, a coordinate system 100 is shown with three mutually orthogonal axes 101 , 102 and 103 .
所述卷执行器20具有先前所说明的层3、4、5、6，该层对于按照功能地使用作为机电的转换器1是有帮助的。此外，根据本发明的平行的条带8简化地被展示作为另外的层。通过所述层多次地卷起为卷执行器20，所述压缩效果也倍增，在该压缩效果中，机电的转换器的所述第三层4被压合。此外，第一层3也被压合，因为通过所述卷起不仅所述第三层4以及所述第一层3被作为电极起作用的第二层5和第四层6包封。在将电压安设给第二层5和第四层6时，由此所述第一层3和所述第三层4被压合，并且所述卷执行器20在被轴线101和102撑开的平面中沿着径向方向压缩。所述平行的条带8（其平行于所述轴线102定向）赋予所述卷执行器20了在此方向上经提高的刚度，这易化了所述机电的转换器1成为卷执行器20的卷起过程也易化了所述卷执行器20的操作。The roll actuator 20 has the previously described layers 3 , 4 , 5 , 6 which are helpful for functional use as an electromechanical converter 1 . Furthermore, parallel strips 8 according to the invention are shown in simplified form as further layers. The compression effect in which the third layer 4 of the electromechanical converter is pressed together is also multiplied by the multiple roll-up of the layers into the roll actuator 20 . Furthermore, the first layer 3 is also pressed, since the rolling-up not only the third layer 4 but also the first layer 3 is surrounded by the second layer 5 and the fourth layer 6 , which function as electrodes. When the voltage is applied to the second layer 5 and the fourth layer 6, whereby the first layer 3 and the third layer 4 are pressed together and the roll actuator 20 is braced by the axes 101 and 102 Compression along the radial direction in the open plane. The parallel strips 8 , which are oriented parallel to the axis 102 , endow the roll actuator 20 with increased stiffness in this direction, which facilitates the conversion of the electromechanical converter 1 into a roll actuator 20 The rolling process also facilitates the operation of the roll actuator 20.
沿着径向方向的所述卷执行器20的压缩的效果或沿着轴向方向的所述卷执行器20的延展能够用于安设以及用于感测机械的力。The effect of the compression of the roll actuator 20 in the radial direction or the expansion of the roll actuator 20 in the axial direction can be used for mounting and for sensing mechanical forces.
在图5中展示了用于制造机电的转换器1的根据本发明的方法的实施例。任选的方法步骤通过虚线的框或箭头来表征。在一个任选的涂装步骤80中，把由带有高的弹性模量的漆的平行的条带8形成的层安设到柔韧的、机械稳定和热稳定的载膜2上。所述载膜2在此由一个卷卷开，所述平行的条带8例如经过喷墨方法在所述载膜2的运行方向上或垂直于轴线（所述载膜围绕该轴线卷开）被印到所述载膜2上。在任选的干燥步骤90中，所述平行的条带8或所述漆被干燥，办法是：所述载膜2例如导引通过炉，该炉被加热到依赖于所使用的材料的特定的温度上。接着是所述第一涂装步骤30，在该涂装步骤中，把由硅胶形成的第一层3经过辊压涂装安设到所述载膜2上或所述平行的条带8上。在后续的任选的干燥步骤91中，所述第一层3类似于先前所说明的过程被干燥。作为任选方案，此时能够实现额外的和/或备选的涂装步骤81，在该涂装步骤中，把由漆的平行的条带8形成的层经过喷墨方法在所述载膜2的运行方向上安设到所述第一层3上。作为任选方案，进行额外的和/或备选的干燥步骤92，在该干燥步骤中，所述平行的条带8类似于先前所说明的过程进行干燥。An exemplary embodiment of the method according to the invention for producing an electromechanical converter 1 is shown in FIG. 5 . Optional method steps are characterized by dashed boxes or arrows. In an optional coating step 80 , a layer of parallel strips 8 of varnish with a high modulus of elasticity is applied to the flexible, mechanically and thermally stable carrier film 2 . The carrier film 2 is here unwound from a reel, the parallel strips 8 being in the running direction of the carrier film 2 or perpendicular to the axis around which the carrier film is unwound, for example by means of an inkjet method. be printed onto the carrier film 2. In an optional drying step 90, the parallel strips 8 or the lacquer are dried by leading the carrier film 2, for example, through an oven heated to a specific temperature depending on the material used. temperature. This is followed by the first coating step 30 in which a first layer 3 of silica gel is applied by roll coating onto the carrier film 2 or onto the parallel strips 8 . In a subsequent optional drying step 91 , the first layer 3 is dried analogously to the process described previously. As an option, an additional and/or alternative coating step 81 can be realized at this time, in which the layer formed by the parallel strips 8 of paint is applied to the carrier film by the inkjet method. 2 on the first layer 3 in the running direction. Optionally, an additional and/or alternative drying step 92 is carried out in which the parallel strips 8 are dried analogously to the process described previously.
接着是所述第二涂装步骤40，在该涂装步骤中，把由来自硅胶和能够传导的银颗粒的复合材料形成的第二层5经过辊压涂装安设到由硅胶形成的平行的条带8或第一层3上。在后续的任选的干燥步骤93中，所述第二层5类似于先前所说明的过程被干燥。作为任选方案，此时能够实现额外的和/或备选的涂装步骤82，在该涂装步骤中，把由漆的平行的条带8形成的层经过喷墨方法在所述载膜2的运行方向上安设到所述第二层5上。作为任选方案，进行额外的和/或备选的干燥步骤94，在该干燥步骤中，所述平行的条带8类似于先前所说明的过程进行干燥。This is followed by the second coating step 40, in which the second layer 5 formed of a composite material from silica gel and conductive silver particles is applied by roll coating to the parallel coating formed from silica gel. The strip 8 or the first layer 3. In a subsequent optional drying step 93, the second layer 5 is dried analogously to the process previously described. As an option, an additional and/or alternative coating step 82 can be realized at this time, in which the layer formed by the parallel strips 8 of paint is applied to the carrier film by means of an inkjet method. 2 on the second layer 5 in the running direction. Optionally, an additional and/or alternative drying step 94 is carried out in which the parallel strips 8 are dried analogously to the process described previously.
接着是所述第三涂装步骤50，在该涂装步骤中，把由硅胶形成的第三层4经过辊压涂装安设到由来自硅胶和能够传导的银颗粒的复合材料形成的平行的条带8或第二层5上。在后续的任选的干燥步骤95中，所述第三层5类似于先前所说明的过程被干燥。作为任选方案，此时能够实现额外的和/或备选的涂装步骤83，在该涂装步骤中，把由漆的平行的条带8形成的层经过喷墨方法在所述载膜2的运行方向上安设到所述第三层4上。作为任选方案，进行额外的和/或备选的干燥步骤96，在该干燥步骤中，所述平行的条带8类似于先前所说明的过程进行干燥。This is followed by said third coating step 50, in which the third layer 4 formed of silica gel is applied by roll coating to a parallel layer formed of a composite material from silica gel and conductive silver particles. The strip 8 or the second layer 5. In a subsequent optional drying step 95, the third layer 5 is dried analogously to the process previously described. As an option, an additional and/or alternative coating step 83 can be realized at this time, in which the layer formed by the parallel strips 8 of lacquer is applied to the carrier film by the inkjet method. 2 in the running direction to the third layer 4. Optionally, an additional and/or alternative drying step 96 is carried out in which the parallel strips 8 are dried analogously to the process described previously.
接着是所述第四涂装步骤60，在该涂装步骤中，把把由来自硅胶和能够传导的银颗粒的复合材料形成的第四层6经过辊压涂装安设到由硅胶形成的平行的条带8或第三层4上。在后续的任选的干燥步骤97中，所述第四层6类似于先前所说明的过程被干燥。作为任选方案，此时能够实现额外的和/或备选的涂装步骤84，在该涂装步骤中，把由漆的平行的条带8形成的层经过喷墨方法在所述载膜2的运行方向上安设到所述第四层6上。作为任选方案，进行额外的和/或备选的干燥步骤98，在该干燥步骤中，所述平行的条带8类似于先前所说明的过程进行干燥。This is followed by said fourth coating step 60, in which a fourth layer 6 formed of a composite material from silica gel and conductive silver particles is applied by roll coating onto a coating formed from silica gel. Parallel strips 8 or on the third layer 4 . In a subsequent optional drying step 97, the fourth layer 6 is dried analogously to the process previously described. As an option, an additional and/or alternative coating step 84 can be realized at this time, in which the layer formed by the parallel strips 8 of lacquer is applied to the carrier film by the inkjet method. 2 is installed on the fourth layer 6 in the running direction. Optionally, an additional and/or alternative drying step 98 is carried out in which the parallel strips 8 are dried analogously to the process described previously.
能够考虑的是，在本发明的一个备选的实施方式中，所述干燥步骤90、91、92、93、94、95、96、97、98通过唯一的终结的干燥步骤来取代。此外可行的是，作为对干燥步骤90、91、92、93、94、95、96、97、98的备选方案或附加方案，在采用光敏感的材料时进行至少一个硬化步骤，优选通过利用紫外光线来辐射所述材料或所述经涂装的层。It is conceivable in an alternative embodiment of the invention that the drying steps 90 , 91 , 92 , 93 , 94 , 95 , 96 , 97 , 98 are replaced by a single final drying step. It is also possible, as an alternative or in addition to the drying steps 90, 91, 92, 93, 94, 95, 96, 97, 98, to carry out at least one hardening step when light-sensitive materials are used, preferably by using UV light is used to irradiate the material or the coated layer.
在一个后续的层离步骤85中，所述机电的转换器1从所述载膜2解除。此步骤有利地由此简化：即在所述机电的转换器1的至少一个层的下方、上面和/或里面安设或置进了带有高的弹性模量的漆的平行的条带8，该条带提高了在所述平行的条带8的方向上的机电的转换器1的刚度。从所述载膜2层离的机电的转换器1在后续的卷起步骤200中卷起为卷执行器20。In a subsequent delamination step 85 , the electromechanical converter 1 is detached from the carrier film 2 . This step is advantageously simplified by the fact that parallel strips 8 of lacquer with a high modulus of elasticity are arranged or inserted under, on and/or in at least one layer of the electromechanical converter 1 , this strip increases the stiffness of the electromechanical converter 1 in the direction of the parallel strips 8 . The electromechanical converter 1 detached from the carrier film 2 is rolled up into a roll actuator 20 in a subsequent rolling step 200 .
先前所提到的涂装步骤30、40、50、60能够经过不同的经设立的印刷方法来实施，在该印刷方法中，所使用的材料在例如溶解有溶剂的、液态的状态中存在。除了喷墨方法，卷对卷方法、例如凹版印刷方法、凸版印刷方法、不间断印刷方法或平面印刷方法也算作此。The aforementioned coating steps 30 , 40 , 50 , 60 can be carried out via various established printing methods in which the materials used are present in a liquid state, for example dissolved in a solvent. In addition to inkjet methods, roll-to-roll methods, such as gravure printing methods, letterpress printing methods, continuous printing methods or planar printing methods also count here.
在本发明的一个备选的实施方式中可行的是，所述单个的层3、4、5、6通过所述单个的材料的共挤出而同时安设到所述载膜2上并且在一个后续的步骤中实现所述平行的条带8的涂装。In an alternative embodiment of the invention it is possible that the individual layers 3 , 4 , 5 , 6 are applied simultaneously to the carrier film 2 by coextrusion of the individual materials and The coating of the parallel strips 8 takes place in a subsequent step.
此外可行的是，所述单个的层3、4、5、6在单独的制造方法中制造，并且单个或共同地叠设到所述载膜2上。在这里，所述平行的条带8的涂装能够在一个后续的步骤中进行。It is also possible for the individual layers 3 , 4 , 5 , 6 to be produced in separate production methods and to be superimposed individually or collectively on the carrier film 2 . Here, the coating of the parallel strips 8 can take place in a subsequent step.
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102016200148.5 | 2016-01-08 | ||
| DE102016200148.5ADE102016200148A1 (en) | 2016-01-08 | 2016-01-08 | Electromechanical transducer and method of making an electromechanical transducer |
| Publication Number | Publication Date |
|---|---|
| CN107017335Atrue CN107017335A (en) | 2017-08-04 |
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710010252.6APendingCN107017335A (en) | 2016-01-08 | 2017-01-06 | Electromechanical converter and the method for manufacturing electromechanical converter |
| Country | Link |
|---|---|
| CN (1) | CN107017335A (en) |
| DE (1) | DE102016200148A1 (en) |
| FR (1) | FR3046675B1 (en) |
| IT (1) | IT201600131977A1 (en) |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10250165B2 (en)* | 2015-05-27 | 2019-04-02 | Snu R&Db Foundation | High speed actuator including active stiffness controller and method of driving the same |
| DE102020122923A1 (en) | 2020-09-02 | 2022-03-03 | Tdk Electronics Ag | Sensor element and method for manufacturing a sensor element |
| DE102022126523B3 (en) | 2022-10-12 | 2023-09-21 | Tdk Electronics Ag | Sensor element and method for producing a sensor element |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102064275A (en)* | 2009-11-12 | 2011-05-18 | 拜尔材料科学股份公司 | Two-layer or multi-layer ferroelectric electret and preparation method thereof |
| CN102420285A (en)* | 2010-08-11 | 2012-04-18 | 富士胶片株式会社 | Piezoelectric film, method of manufacturing the same, piezoelectric device, and liquid ejection apparatus |
| CN103985815A (en)* | 2014-05-30 | 2014-08-13 | 中南大学 | A cutting method for preparing piezoelectric fiber composite |
| CN104157783A (en)* | 2013-05-14 | 2014-11-19 | 罗伯特·博世有限公司 | Mixed film applied to energy converter |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104247067A (en) | 2012-02-14 | 2014-12-24 | 丹佛斯聚能公司 | A capacitive transducer and a method for manufacturing a transducer |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102064275A (en)* | 2009-11-12 | 2011-05-18 | 拜尔材料科学股份公司 | Two-layer or multi-layer ferroelectric electret and preparation method thereof |
| CN102420285A (en)* | 2010-08-11 | 2012-04-18 | 富士胶片株式会社 | Piezoelectric film, method of manufacturing the same, piezoelectric device, and liquid ejection apparatus |
| CN104157783A (en)* | 2013-05-14 | 2014-11-19 | 罗伯特·博世有限公司 | Mixed film applied to energy converter |
| CN103985815A (en)* | 2014-05-30 | 2014-08-13 | 中南大学 | A cutting method for preparing piezoelectric fiber composite |
| Publication number | Publication date |
|---|---|
| FR3046675A1 (en) | 2017-07-14 |
| FR3046675B1 (en) | 2020-01-17 |
| DE102016200148A1 (en) | 2017-07-13 |
| IT201600131977A1 (en) | 2018-06-29 |
| Publication | Publication Date | Title |
|---|---|---|
| US7880371B2 (en) | Dielectric composite and a method of manufacturing a dielectric composite | |
| US7548015B2 (en) | Multilayer composite and a method of making such | |
| US8181338B2 (en) | Method of making a multilayer composite | |
| EP1919072B1 (en) | A multilayer composite and a method of making such | |
| EP1919071B1 (en) | A dielectric composite and a method of manufacturing a dielectric composite | |
| US7518284B2 (en) | Dielectric composite and a method of manufacturing a dielectric composite | |
| CN100530931C (en) | Elastomeric actuator and method of manufacturing an actuator | |
| CN110892362B (en) | Active component structure | |
| Rosset et al. | Flexible and stretchable electrodes for dielectric elastomer actuators | |
| EP2819293B1 (en) | Gel actuator and method for producing same | |
| CN109417127B (en) | Shape changing device | |
| EP1919073B1 (en) | A direct acting capacitive transducer | |
| US7732999B2 (en) | Direct acting capacitive transducer | |
| JP5288419B2 (en) | Gel actuator and gel used therefor | |
| Kiil et al. | Scalable industrial manufacturing of DEAP | |
| WO2014062776A1 (en) | Method of metallizing dielectric film | |
| EP2301089A1 (en) | A transducer comprising a composite material and method of making such a composite material | |
| CN107017335A (en) | Electromechanical converter and the method for manufacturing electromechanical converter | |
| US8891222B2 (en) | Capacitive transducer and a method for manufacturing a transducer | |
| CN107026231B (en) | Method for producing a layer system of an electromechanical transducer, method for producing an electromechanical transducer and electromechanical transducer |
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication | Application publication date:20170804 |