技术领域technical field
本发明涉及机械加工设备检测领域，尤其涉及一种测量五轴机床平动轴误差的测量系统及测量方法。The invention relates to the field of mechanical processing equipment detection, in particular to a measurement system and a measurement method for measuring the error of a translation axis of a five-axis machine tool.
背景技术Background technique
随着全球制造业水平的不断提高和精密加工技术的广泛应用，五轴数控机床的应用领域不断扩大，对其加工精度的要求也日益提高。数控机床自身的精度是影响加工件精度的重要因素，目前对服役期间的五轴联动机床精度的保持最直接有效的方法是：定期对机床进行几何误差检测、辨识计算并实施补偿。With the continuous improvement of the global manufacturing level and the wide application of precision machining technology, the application fields of five-axis CNC machine tools continue to expand, and the requirements for machining accuracy are also increasing. The precision of the CNC machine tool itself is an important factor affecting the precision of the workpiece. At present, the most direct and effective way to maintain the precision of the five-axis linkage machine tool during service is to regularly perform geometric error detection, identification calculation and compensation on the machine tool.
误差检测是对机床进行有效的误差补偿的重要前提，不论采取何种误差辨识算法和后期补偿手段，都需要完成对机床的误差检测。目前，一般使用激光干涉仪对五轴数控机床平动轴进行误差检测；同时，基于激光干涉仪国内外学者也提出了许多误差辨识方法。不论是12线法、14线法、15线法、22线法等传统辨识算法，还是新近提出的13线法，都需要进行两轴或三轴联动轨迹即面对角线或体对角线定位精度的检测。Error detection is an important prerequisite for effective error compensation of the machine tool. No matter what error identification algorithm and post-compensation means are adopted, the error detection of the machine tool needs to be completed. At present, the laser interferometer is generally used to detect the error of the translational axis of the five-axis CNC machine tool; at the same time, domestic and foreign scholars have also proposed many error identification methods based on the laser interferometer. Whether it is the traditional identification algorithm such as 12-line method, 14-line method, 15-line method, 22-line method, or the newly proposed 13-line method, it is necessary to carry out two-axis or three-axis linkage trajectory, that is, face diagonal or body diagonal Detection of positioning accuracy.
普通激光干涉仪主要由激光干涉仪、反射镜、干涉镜、安装镜柄、磁性表座、微调平台以及三脚架等组成，由于不包含通用的夹具，将给误差检测带来诸多不便。进行单轴误差检测时，一般通过磁性表座将反射镜固定在主轴上进行一次检测，接着多次变更反射镜的位置，沿该轴方向测量多组数据。这种手动变换磁性表座的位置最主要的弊端是：不能对各个不同测点精确定位，而测点之间的相对位置不精确将直接降低误差辨识结果的准确性。更大的问题在于：进行YZ、ZX、或者XYZ多轴联动直线轨迹误差检测时，由于该测量轨迹与水平面呈一定夹角设为α，需要调整激光干涉仪和反射镜使其光路方向与水平面呈α夹角，这个对光调节过程即便经验丰富的操作人员也耗时相当冗长，经验欠缺的操作者可能总也调不好，这不仅不能满足高效的生产要求，而且会因为测量时间跨度过大机床温度发生变化而降低各组测量数据的等温性。Ordinary laser interferometers are mainly composed of laser interferometers, mirrors, interferometers, mounting mirror handles, magnetic bases, fine-tuning platforms, and tripods. Since they do not include general-purpose fixtures, it will bring a lot of inconvenience to error detection. When performing single-axis error detection, the mirror is generally fixed on the main shaft by a magnetic base for one inspection, and then the position of the mirror is changed multiple times to measure multiple sets of data along the axis. The main disadvantage of this manual change of the position of the magnetic watch base is that it is impossible to accurately locate each different measuring point, and the inaccurate relative position between the measuring points will directly reduce the accuracy of the error identification result. The bigger problem is: when performing YZ, ZX, or XYZ multi-axis linkage linear trajectory error detection, since the measurement trajectory has a certain angle with the horizontal plane and is set to α, it is necessary to adjust the laser interferometer and reflector so that the optical path direction is in line with the horizontal plane. The light adjustment process is time-consuming even for experienced operators, and inexperienced operators may not always be able to adjust it well. This not only fails to meet the requirements of efficient production, but also causes the measurement time span to be too long. The temperature of the large machine tool changes and reduces the isothermal properties of each group of measurement data.
发明内容Contents of the invention
本发明提供了一种五轴机床平动轴误差的测量系统及测量方法，旨在解决采用现有技术进行YZ、ZX、或者XYZ多轴联动直线轨迹误差检测时，光调节过程耗时较长的问题。The present invention provides a measuring system and measuring method for translational axis errors of a five-axis machine tool, aiming to solve the time-consuming light adjustment process when using the prior art to detect YZ, ZX, or XYZ multi-axis linkage linear track errors The problem.
为了解决以上技术问题，本发明通过以下技术方案实现：In order to solve the above technical problems, the present invention is realized through the following technical solutions:
一种五轴机床平动轴误差的测量系统，包括一号夹持组件、反射镜、可调干涉仪楔块、三脚架、激光干涉仪和微调平台；一号夹持组件包括夹持轴杆和安装镜柄，安装镜柄通过螺纹连接在夹持轴杆的下方；反射镜通过可拆的方式设置在安装镜柄上，微调平台设置在可调干涉仪楔块上，可调干涉仪楔块设置在三脚架上，激光干涉仪设置在微调平台上且垂直于反射镜的镜面发射激光。A measuring system for translation axis error of a five-axis machine tool, including No. 1 clamping assembly, mirror, adjustable interferometer wedge, tripod, laser interferometer and fine-tuning platform; No. 1 clamping assembly includes clamping shaft and Install the mirror handle, which is threaded under the clamping shaft; the reflector is detachably set on the mounting mirror handle, the fine-tuning platform is set on the adjustable interferometer wedge, and the adjustable interferometer wedge Set on a tripod, the laser interferometer is set on a fine-tuning platform and emits laser light perpendicular to the mirror surface of the reflector.
进一步，五轴机床轴误差的测量系统还包括二号夹持组件，二号夹持组件包括固定板、连接螺栓、水平仪、圆柱镜柄和调节架；固定板为正方形的平板，固定板的四个角上均设有定位孔，四个定位孔分别位于正方形的四个角上；调节架包括圆柱形的连接座和均布在连接座外侧壁上的四根支杆；每根支杆均通过连接螺栓连接在固定板的上表面，每根支杆与固定板之间均设有橡胶垫圈；连接座的上方设有安装轴，连接座与安装轴同轴且轴线垂直穿过固定板的中心；圆柱镜柄插接在定位孔内，圆柱镜柄上设有刻度，圆柱镜柄的上端通过螺纹连接有蝶型螺母，蝶型螺母搭接在固定板的上表面上；固定板的上表面设有水平仪放置平台，水平仪放置在水平仪放置平台上。Furthermore, the measurement system for the axis error of the five-axis machine tool also includes the No. 2 clamping assembly. The No. 2 clamping assembly includes a fixed plate, a connecting bolt, a level, a cylindrical mirror handle and an adjustment frame; the fixed plate is a square flat plate, and the four sides of the fixed plate Each corner is provided with positioning holes, and the four positioning holes are respectively located on the four corners of the square; the adjustment frame includes a cylindrical connection seat and four support rods evenly distributed on the outer wall of the connection seat; each support rod has a It is connected to the upper surface of the fixed plate by connecting bolts, and rubber gaskets are provided between each pole and the fixed plate; there is an installation shaft above the connection seat, and the connection seat is coaxial with the installation shaft and the axis passes through the fixed plate vertically. center; the cylindrical mirror handle is plugged into the positioning hole, the cylindrical mirror handle is provided with a scale, the upper end of the cylindrical mirror handle is connected with a wing nut through a thread, and the wing nut is lapped on the upper surface of the fixing plate; the upper end of the fixing plate A level is placed on the surface, and the level is placed on the level.
二号夹持组件具有很高的加工精度，可保证其下表面与水平仪放置台平行而与其侧面垂直；相邻的四个侧面相互保持垂直；四个定位定位孔的间距相等且为某一定值，利于后期的误差辨识计算。水平仪可以直接放置在固定板的圆形放置凸台上，也可以通过螺钉固定。当夹持轴杆与机床主轴装配夹紧后，通过连接螺栓来实现固定板空间方位的调节，调整至水平仪呈水平状态后，这时固定板的下表面即为水平。能便捷的实现五轴数控机床平动轴几何精度检测。固定板的主体呈正方形板状，加工精度很高，其上表面有小凸台用于放置水平仪，下表面与上表面的水平仪放置台平行而与四个侧面垂直，四个侧面相互之间保持垂直或平行关系，其四角对称的开有定位孔，各定位孔间距一定，用于固定圆柱镜柄并实现圆柱镜柄的精确定位。固定板的主体部分通过四个螺纹孔与夹持轴部件连接，二者之间放置有橡胶垫圈，使用时通过夹持轴与机床主轴连接紧固，且可通过调节螺栓的松紧实现固定板下表面呈水平。圆柱镜柄呈阶梯轴状，最大端上标有刻度，反射镜安装其上可精确调节位置；中间段与固定板上定位孔呈微小间隙配合，实现定位和保障安装镜柄与固定板垂直；最小端攻有螺纹，起螺栓的作用，通过蝶形螺母使圆柱镜柄固定在固定板上。The No. 2 clamping component has high processing accuracy, which can ensure that its lower surface is parallel to the level table and perpendicular to its side; the four adjacent sides are kept perpendicular to each other; the distance between the four positioning holes is equal and a certain value , which is beneficial to the later error identification calculation. The spirit level can be directly placed on the circular placement boss of the fixing plate, or can be fixed by screws. After the clamping shaft is assembled and clamped with the machine tool spindle, the adjustment of the spatial orientation of the fixed plate is realized by connecting the bolts. After the level is adjusted to a horizontal state, the lower surface of the fixed plate is level. It can conveniently realize the geometric accuracy detection of the translational axis of the five-axis CNC machine tool. The main body of the fixed plate is in the shape of a square plate with high processing precision. There is a small boss on the upper surface for placing the level. The lower surface is parallel to the level setting platform on the upper surface and perpendicular to the four sides. The four sides are kept mutually. Vertical or parallel relationship, the four corners are symmetrically provided with positioning holes, and the distance between each positioning hole is fixed, which is used to fix the cylindrical mirror handle and realize the precise positioning of the cylindrical mirror handle. The main part of the fixing plate is connected with the clamping shaft parts through four threaded holes, and a rubber gasket is placed between the two. When in use, the clamping shaft is connected with the main shaft of the machine tool, and the fixing plate can be lowered by adjusting the tightness of the bolts. The surface is level. The cylindrical mirror handle is in the shape of a stepped shaft, the largest end is marked with a scale, and the position of the reflector can be adjusted precisely on it; the middle section is matched with the positioning hole on the fixing plate with a small gap to realize positioning and ensure that the mirror handle is perpendicular to the fixing plate; The smallest end is tapped with thread, which acts as a bolt, and the cylindrical mirror handle is fixed on the fixed plate through a wing nut.
夹持轴杆为一圆柱棒，一端通过刀柄与机床主轴相连，另一端开有螺纹孔可与激光干涉仪配套安装镜柄相连。可调干涉仪楔块本质上是一个斜楔，但相比固定倾角的斜楔它的倾斜角度可调，参照其上所标刻度可以呈现[-40°，40°]量程内的任意倾斜角，调节过程是通过一个蜗轮蜗杆机构完成的，因此具有自锁功能，可保证倾角的稳定性。可调干涉仪楔块底面开有螺纹孔可以固定在三脚架上，而上表面装有螺柱以连接固定激光干涉仪的调节平台，可使激光干涉仪精确倾斜特定角度，在检测空间倾斜直线定位误差时能实现快速对光。使用千分表对固定板侧面沿X轴或Y轴打表，通过调节机床主轴的转动角度，确保固定板的侧面相对X轴或Y轴平行安装；固定板上用于定位圆柱镜柄的定位孔的加工基准为固定板的侧面，相邻两个定位孔中心连线与侧面平行，即也相对X轴或Y轴平行。The clamping shaft is a cylindrical rod, one end of which is connected to the main shaft of the machine tool through a tool handle, and the other end has a threaded hole which can be connected with the supporting mirror handle of the laser interferometer. The adjustable interferometer wedge is essentially an oblique wedge, but its inclination angle is adjustable compared with the oblique wedge with fixed inclination angle. Referring to the scale marked on it, it can present any inclination angle within the range of [-40°, 40°] , The adjustment process is completed through a worm gear mechanism, so it has a self-locking function to ensure the stability of the inclination angle. The bottom surface of the adjustable interferometer wedge has threaded holes to be fixed on a tripod, and the upper surface is equipped with studs to connect to the adjustment platform of the fixed laser interferometer, which can make the laser interferometer tilt at a specific angle precisely and position it in a straight line in the detection space Fast light alignment can be achieved when there is an error. Use a dial gauge to measure the side of the fixed plate along the X-axis or Y-axis, and ensure that the side of the fixed plate is installed parallel to the X-axis or Y-axis by adjusting the rotation angle of the machine tool spindle; the fixed plate is used to position the cylindrical mirror handle The machining reference of the hole is the side of the fixed plate, and the line connecting the centers of two adjacent positioning holes is parallel to the side, that is, it is also parallel to the X axis or the Y axis.
一种采用上述五轴机床平动轴误差的测量系统的测量五轴机床平动轴误差方法，包括X轴和Z轴联动轨迹定位精度的检测方法；X轴和Z轴联动轨迹定位精度的检测方法包括以下步骤：A method for measuring the translational axis error of a five-axis machine tool using the above-mentioned measuring system for the translational axis error of the five-axis machine tool, including a detection method for the positioning accuracy of the X-axis and Z-axis linkage trajectory; and a detection method for the positioning accuracy of the X-axis and Z-axis linkage trajectory The method includes the following steps:
A、将夹持轴杆与五轴机床主轴装配加紧；A. Assemble and tighten the clamping shaft with the spindle of the five-axis machine tool;
B、五轴机床主轴从竖直状态沿Y轴转动，转动角度为α，使反射镜的镜面垂线与X轴之间夹角为α，且反射镜的镜面垂线位于机床ZX平面内；B. The spindle of the five-axis machine tool rotates along the Y axis from the vertical state, and the rotation angle is α, so that the angle between the mirror vertical line of the mirror and the X axis is α, and the mirror vertical line of the mirror is located in the ZX plane of the machine tool;
C、通过三脚架调整激光干涉仪的高度，通过可调干涉仪楔块调整激光干涉仪的角度，然后通过微调平台调整激光干涉仪，使激光干涉仪发射的激光垂直照射在反射镜的镜面上；C. Adjust the height of the laser interferometer through the tripod, adjust the angle of the laser interferometer through the adjustable interferometer wedge, and then adjust the laser interferometer through the fine-tuning platform, so that the laser emitted by the laser interferometer is vertically irradiated on the mirror surface of the mirror;
D、五轴机床主轴带动放射镜沿着反射镜的镜面垂线方向移动；主轴沿该方向移动，测量N个点，这N个点的理论的移动距离分别为S(1)～S(N)，激光干涉仪测得这N个点的实际移动距离分别为S'(1)～S'(N)；N为大于等于1的整数，具体值根据测量需要进行设定，下面的N也一样。D. The main shaft of the five-axis machine tool drives the radiation mirror to move along the vertical direction of the mirror surface of the mirror; the main shaft moves along this direction to measure N points, and the theoretical moving distances of these N points are S(1)～S(N ), the actual moving distances of the N points measured by the laser interferometer are S'(1)～S'(N); N is an integer greater than or equal to 1, and the specific value is set according to the measurement needs. The following N is also Same.
E、根据S(1)～S(N)和S'(1)～S'(N)计算得出五轴机床主轴沿X轴和Z轴联动方向的移动误差。E. According to S(1)～S(N) and S'(1)～S'(N), the movement error of the spindle of the five-axis machine tool along the X-axis and Z-axis linkage direction is calculated.
进一步，测量五轴机床平动轴误差方法还包括Y轴和Z轴联动轨迹定位精度的检测方法；Y轴和Z轴联动轨迹定位精度的检测方法包括以下步骤：Further, the method for measuring the translational axis error of a five-axis machine tool also includes a detection method for the positioning accuracy of the Y-axis and Z-axis linkage trajectory; the detection method for the positioning accuracy of the Y-axis and Z-axis linkage trajectory includes the following steps:
A、将夹持轴杆与五轴机床主轴装配加紧；A. Assemble and tighten the clamping shaft with the spindle of the five-axis machine tool;
B、五轴机床主轴从竖直状态沿X轴转动，转动角度为α，使反射镜的镜面垂线与Y轴之间夹角为α，且反射镜的镜面垂线位于机床ZY平面内；B. The spindle of the five-axis machine tool rotates along the X axis from the vertical state, and the rotation angle is α, so that the angle between the mirror vertical line of the mirror and the Y axis is α, and the mirror vertical line of the mirror is located in the ZY plane of the machine tool;
C、通过三脚架调整激光干涉仪的高度，通过可调干涉仪楔块调整激光干涉仪的角度，然后通过微调平台调整激光干涉仪，使激光干涉仪发射的激光垂直照射在反射镜的镜面上；C. Adjust the height of the laser interferometer through the tripod, adjust the angle of the laser interferometer through the adjustable interferometer wedge, and then adjust the laser interferometer through the fine-tuning platform, so that the laser emitted by the laser interferometer is vertically irradiated on the mirror surface of the mirror;
D、五轴机床主轴带动放射镜沿着反射镜的镜面垂线方向移动；主轴沿该方向移动，测量N个点，这N个点的理论的移动距离分别为S(1)～S(N)，激光干涉仪测得这N个点的实际移动距离分别为S'(1)～S'(N)；D. The main shaft of the five-axis machine tool drives the radiation mirror to move along the vertical direction of the mirror surface of the mirror; the main shaft moves along this direction to measure N points, and the theoretical moving distances of these N points are S(1)～S(N ), the actual moving distances of the N points measured by the laser interferometer are S'(1)～S'(N);
E、根据S(1)～S(N)和S'(1)～S'(N)计算得出五轴机床主轴沿Y轴和Z轴联动方向的移动误差。E. According to S(1)～S(N) and S'(1)～S'(N), the movement error of the five-axis machine tool spindle along the Y-axis and Z-axis linkage direction is calculated.
进一步，测量五轴机床平动轴误差方法还包括X轴、Y轴和Z轴联动轨迹定位精度的检测方法，X轴、Y轴和Z轴联动轨迹定位精度的检测方法包括以下步骤：Further, the method for measuring the translational axis error of a five-axis machine tool also includes a detection method for the positioning accuracy of the X-axis, Y-axis and Z-axis linkage trajectory, and the detection method for the positioning accuracy of the X-axis, Y-axis and Z-axis linkage trajectory includes the following steps:
A、将夹持轴杆与五轴机床主轴装配加紧；A. Assemble and tighten the clamping shaft with the spindle of the five-axis machine tool;
B、转动五轴机床主轴，使反射镜的镜面垂线与XY面之间夹角为β，且反射镜的镜面垂线在XY面的投影与X轴之间夹角为γ；B. Turn the spindle of the five-axis machine tool so that the angle between the vertical line of the mirror surface and the XY plane is β, and the angle between the projection of the vertical line of the mirror surface on the XY plane and the X axis is γ;
C、通过三脚架调整激光干涉仪的高度，通过可调干涉仪楔块调整激光干涉仪的角度，然后通过微调平台调整激光干涉仪，使激光干涉仪发射的激光垂直照射在反射镜的镜面上；C. Adjust the height of the laser interferometer through the tripod, adjust the angle of the laser interferometer through the adjustable interferometer wedge, and then adjust the laser interferometer through the fine-tuning platform, so that the laser emitted by the laser interferometer is vertically irradiated on the mirror surface of the mirror;
D、五轴机床主轴带动放射镜沿着反射镜的镜面垂线方向移动；主轴沿该方向移动，测量N个点，这N个点的理论的移动距离分别为S(1)～S(N)，激光干涉仪测得这N个点的实际移动距离分别为S'(1)～S'(N)；D. The main shaft of the five-axis machine tool drives the radiation mirror to move along the vertical direction of the mirror surface of the mirror; the main shaft moves along this direction to measure N points, and the theoretical moving distances of these N points are S(1)～S(N ), the actual moving distances of the N points measured by the laser interferometer are S'(1)～S'(N);
E、根据S(1)～S(N)和S'(1)～S'(N)计算得出五轴机床主轴沿X轴、Y轴和Z轴联动方向的移动误差。E. According to S(1)～S(N) and S'(1)～S'(N), the movement error of the five-axis machine tool spindle along the X-axis, Y-axis and Z-axis linkage direction is calculated.
与现有技术相比本发明的优点是：Compared with prior art, the advantages of the present invention are:
1、五轴数控机床进行两轴或三轴联动直线轨迹定位精度检测时，采用现有的辅助夹具装夹反射镜，需要通过人工调整反射镜的角度，调整时间较长，而且误差较大；本发明中五轴机床轴可以通过控制安装镜柄从而调整反射镜的角度；提高了调节速度；此外，由于机床轴的误差小于人工安装的误差，可以提高测量精度。1. When the five-axis CNC machine tool is used to detect the positioning accuracy of the two-axis or three-axis linkage linear trajectory, the existing auxiliary fixture is used to clamp the reflector, and the angle of the reflector needs to be adjusted manually, which takes a long time to adjust and has a large error; In the present invention, the axis of the five-axis machine tool can adjust the angle of the reflector by controlling the installation of the mirror handle; the adjustment speed is improved; in addition, since the error of the machine tool axis is smaller than the error of manual installation, the measurement accuracy can be improved.
2、本发明激光干涉仪通过可调干涉仪楔块调整角度，三脚架上设有测量可调干涉仪楔块倾斜角度的标尺，可以迅速将激光干涉仪调整至指定位置。可以根据需求调整以适应任意方向联动轨迹定位精度检测，因而适用于各种不同行程的机床。2. The laser interferometer of the present invention adjusts the angle through the adjustable interferometer wedge, and the tripod is provided with a scale for measuring the inclination angle of the adjustable interferometer wedge, so that the laser interferometer can be quickly adjusted to a designated position. It can be adjusted according to the needs to adapt to the detection of the positioning accuracy of the linkage trajectory in any direction, so it is suitable for various machine tools with different strokes.
3、本发明能显著减少检测前期准备时间，于是减小了机床温度变化和环境温度变化对测量数据的影响，提高各组测量数据的等温性，间接地提高了测量精度。3. The present invention can significantly reduce the pre-test preparation time, thereby reducing the impact of machine tool temperature changes and environmental temperature changes on the measurement data, improving the isothermal properties of each group of measurement data, and indirectly improving the measurement accuracy.
4、本发明能够适应各类不同行程的多轴数控机床平动轴几何精度检测，具有工具化的调节部件和程式化的调节过程，降低测量过程对工程师调节经验的依赖，可极大的缩短精度检测的时间和成本并能提高检测精度，具有广阔的应用价值。4. The present invention can adapt to the geometric accuracy detection of translational axes of multi-axis CNC machine tools with different strokes. It has tool-based adjustment components and a stylized adjustment process, which reduces the dependence of the measurement process on the engineer's adjustment experience, and can greatly shorten the measurement process. The time and cost of precision detection can be reduced and the detection accuracy can be improved, so it has broad application value.
附图说明Description of drawings
为了更清楚地说明本发明实施例的技术方案，下面将对实施例中所需要使用的附图作简单地介绍，应当理解，以下附图仅示出了本发明的某些实施例，因此不应看作是对范围的限定，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其它相关的附图。In order to illustrate the technical solutions of the embodiments of the present invention more clearly, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention, and thus It should be regarded as a limitation on the scope, and those skilled in the art can also obtain other related drawings based on these drawings without creative work.
图1为本发明中，一号夹持组件和反射镜配合时的结构示意图。Fig. 1 is a structural schematic view of the No. 1 clamping assembly and the reflector in cooperation in the present invention.
图2为本发明中，X轴和Z轴两轴联动直线轨迹定位精度检测的工作原理示意图。Fig. 2 is a schematic diagram of the working principle of X-axis and Z-axis two-axis linkage linear trajectory positioning accuracy detection in the present invention.
图3为本发明中，X、Y和Z轴三轴联动轨迹定位精度检测的工作原理示意图。Fig. 3 is a schematic diagram of the working principle of X, Y and Z axis three-axis linkage trajectory positioning accuracy detection in the present invention.
图4为本发明中，二号夹持组件的结构示意图。Fig. 4 is a schematic structural view of the No. 2 clamping assembly in the present invention.
图5为本发明中，圆柱镜柄及蝶形螺母配合时的结构示意图。Fig. 5 is a schematic diagram of the structure of the cylindrical mirror handle and the butterfly nut in the present invention.
图6为本发明中，单轴直线定位精度检测的工作原理示意图。FIG. 6 is a schematic diagram of the working principle of single-axis linear positioning accuracy detection in the present invention.
图7为本发明中，X轴和Y轴两轴联动直线轨迹定位精度检测的工作原理示意图。FIG. 7 is a schematic diagram of the working principle of X-axis and Y-axis two-axis linkage linear trajectory positioning accuracy detection in the present invention.
具体实施方式detailed description
在本发明的描述中，除非另有明确的规定和限定，术语“安装”、“相连”、“连接”、“固定”等术语应做广义理解，例如，可以是固定连接，也可以是可拆卸连接，或成一体；可以是机械连接，也可以是直接连接，也可以是通过中间媒介间接相连，可以是两个元件内部的连通或两个元件的相互作用关系。对于本领域普通技术人员而言，可以根据具体情况理解上述术语在本发明中的具体含义。In the description of the present invention, terms such as "installation", "connection", "connection" and "fixation" should be interpreted in a broad sense unless otherwise clearly specified and limited. Disassembled connection, or integration; it can be mechanical connection, direct connection, indirect connection through an intermediary, internal communication between two components or interaction relationship between two components. Those of ordinary skill in the art can understand the specific meanings of the above terms in the present invention according to specific situations.
实施例一：Embodiment one:
参阅图1至图7，一种五轴机床平动轴误差的测量系统，包括一号夹持组件、反射镜3、可调干涉仪楔块4、三脚架5、激光干涉仪6和微调平台；一号夹持组件包括夹持轴杆1和安装镜柄2，安装镜柄2通过螺纹连接在夹持轴杆1的下方。为了节约成本，本发明适用于更加经济的单频激光干涉仪。Referring to Fig. 1 to Fig. 7, a measurement system for the translational axis error of a five-axis machine tool includes a No. 1 clamping assembly, a mirror 3, an adjustable interferometer wedge 4, a tripod 5, a laser interferometer 6 and a fine-tuning platform; The No. 1 clamping assembly includes a clamping shaft 1 and a mounting mirror handle 2 , and the mounting mirror handle 2 is connected under the clamping shaft 1 through threads. In order to save cost, the present invention is applicable to a more economical single-frequency laser interferometer.
参阅图2，反射镜3通过可拆的方式设置在安装镜柄2上，微调平台设置在可调干涉仪楔块4上，可调干涉仪楔块4设置在三脚架5上，激光干涉仪6设置在微调平台上且垂直于反射镜3的镜面发射激光。可调干涉仪楔块4包括调节块、带有刻度的底座和用于使调节块绕着底座旋转的蜗轮蜗杆机构，底座设置在三脚架5上。本发明中在三角支架上使用的微调平台进行微调属于本领域内很成熟的现有技术，微调平台的具体结构这里不再赘述。Referring to Fig. 2, the reflector 3 is detachably arranged on the mounting mirror handle 2, the fine-tuning platform is arranged on the adjustable interferometer wedge 4, the adjustable interferometer wedge 4 is arranged on the tripod 5, and the laser interferometer 6 The laser is set on the fine-tuning platform and perpendicular to the mirror surface of the mirror 3 . The adjustable interferometer wedge 4 includes an adjustment block, a base with scales and a worm gear mechanism for rotating the adjustment block around the base, and the base is arranged on a tripod 5 . In the present invention, the fine-tuning of the fine-tuning platform used on the tripod belongs to the very mature prior art in this field, and the specific structure of the fine-tuning platform will not be repeated here.
参阅图4至图6，五轴机床轴误差测量系统还包括二号夹持组件，二号夹持组件包括固定板7、连接螺栓8、水平仪9、圆柱镜柄10和调节架；固定板7为正方形的平板，固定板7的四个角上均设有定位孔11，四个定位孔11分别位于正方形的四个角上；调节架包括圆柱形的连接座12和均布在连接座12外侧壁上的四根支杆13；每根支杆13均通过连接螺栓8连接在固定板7的上表面，每根支杆13与固定板7之间均设有橡胶垫圈14；连接座12的上方设有安装轴15，连接座12与安装轴15同轴且轴线垂直穿过固定板7的中心；圆柱镜柄10插接在定位孔11内，圆柱镜柄10上设有刻度，圆柱镜柄10的上端通过螺纹连接有蝶型螺母16，蝶型螺母16搭接在固定板7的上表面上；水平仪9安装在固定板7的上表面上。本发明中根据测量轨迹的不同需要，将选择一号夹持组件或二号夹持组件，对应的反光镜3安装在圆柱镜柄10或安装镜柄2上。Referring to Figures 4 to 6, the five-axis machine tool axis error measurement system also includes a No. 2 clamping assembly, which includes a fixed plate 7, a connecting bolt 8, a level 9, a cylindrical mirror handle 10, and an adjustment frame; the fixed plate 7 It is a square plate, and the four corners of the fixed plate 7 are provided with positioning holes 11, and the four positioning holes 11 are respectively located on the four corners of the square; Four struts 13 on the outer wall; each strut 13 is connected to the upper surface of the fixed plate 7 by a connecting bolt 8, and a rubber gasket 14 is arranged between each strut 13 and the fixed plate 7; the connecting seat 12 A mounting shaft 15 is provided above the top of the mounting shaft 15, and the connecting seat 12 is coaxial with the mounting shaft 15 and the axis passes through the center of the fixed plate 7 vertically; the cylindrical mirror handle 10 is plugged in the positioning hole 11, and the cylindrical mirror handle 10 is provided with a scale, and the cylindrical mirror handle 10 is provided with a scale. The upper end of the mirror handle 10 is threadedly connected with a wing nut 16 , and the wing nut 16 is lapped on the upper surface of the fixing plate 7 ; the spirit level 9 is installed on the upper surface of the fixing plate 7 . In the present invention, according to the different needs of the measurement track, the No. 1 clamping assembly or the No. 2 clamping assembly is selected, and the corresponding mirror 3 is installed on the cylindrical mirror handle 10 or the mounting mirror handle 2 .
实施例二：Embodiment two:
参阅图1至图7，一种采用实施例一所述五轴机床平动轴误差的测量系统的测量五轴机床平动轴误差方法，包括X轴平动定位精度的检测，Y轴平动定位精度的检测，Z轴平动定位精度的检测，X轴和Y轴联动轨迹定位精度的检测，X轴和Z轴联动轨迹定位精度的检测，Y轴和Z轴联动轨迹定位精度的检测，X 轴、Y轴和Z轴联动轨迹定位精度的检测。Referring to Figures 1 to 7, a method for measuring the translational axis error of a five-axis machine tool using the measurement system for the translational axis error of the five-axis machine tool described in Embodiment 1, including the detection of the positioning accuracy of the X-axis translation, and the detection of the translational axis error of the Y-axis Detection of positioning accuracy, detection of Z-axis translational positioning accuracy, detection of X-axis and Y-axis linkage trajectory positioning accuracy, detection of X-axis and Z-axis linkage trajectory positioning accuracy, detection of Y-axis and Z-axis linkage trajectory positioning accuracy, Detection of X-axis, Y-axis and Z-axis linkage trajectory positioning accuracy.
X轴和Z轴联动轨迹定位精度的检测步骤，X轴和Z轴联动轨迹定位精度的检测步骤，只需要使用一号夹持组件，不使用二号夹持组件。以对A/B摆角五轴机床21进行X轴和Z轴联动轨迹定位精度检测为例，该套激光干涉仪辅助夹具的装配如图2所示。将夹持轴杆1与机床主轴装配加紧，再通过螺纹连接激光干涉仪配套的安装镜柄2，也可选择连接该套夹具中带刻度的圆柱镜柄。设联动轨迹线与X轴之间夹角为α，保持机床平动轴静止仅调节其转动轴B摆，使本为竖直状态的夹持轴杆1绕Y轴旋转α角，则夹持轴杆1仍位于机床ZX平面且与X轴夹角为π/2-α，但与夹持轴杆1上反射镜面垂直的光路却是与X轴呈α夹角。然后将可调干涉仪楔块4的倾角调整为α，安装于三脚架5的安装平面和微调平台之间，通过螺纹连接紧固。接着将激光干涉仪6安装在微调平台上，此时发射激光方向与反射镜3大致垂直，只需调整三脚架5的高度并对微调平台的姿态略作调节，即可使发射激光和反射激光处于同一条直线上，从而进行X轴、Z轴联动定位精度检测。通常五轴数控机床的旋转轴精度在10-4rad以内，足以满足精度检测时手动调光需求。五轴机床主轴带动放射镜沿着反射镜的镜面垂线方向移动；主轴沿该方向移动，测量N个点，这N个点的理论的移动距离分别为S(1)～S(N)，激光干涉仪测得这N个点的实际移动距离分别为S'(1)～S'(N)；根据S(1)～S(N)和S'(1)～S'(N)计算得出五轴机床主轴沿X轴和Z轴联动方向的移动误差。The detection steps of the positioning accuracy of the X-axis and Z-axis linkage trajectory, and the detection steps of the X-axis and Z-axis linkage trajectory positioning accuracy, only need to use the No. 1 clamping component, and do not use the No. 2 clamping component. Taking the detection of the X-axis and Z-axis linkage track positioning accuracy of the A/B swing angle five-axis machine tool 21 as an example, the assembly of the laser interferometer auxiliary fixture is shown in Figure 2. Assemble and tighten the clamping shaft 1 with the spindle of the machine tool, and then connect the matching mounting mirror handle 2 of the laser interferometer through threads, or connect the graduated cylindrical mirror handle in the set of fixtures. Set the angle between the linkage trajectory line and the X-axis as α, keep the translational axis of the machine tool stationary and only adjust the pendulum of its rotating axis B, so that the clamping shaft 1 in the vertical state rotates around the Y-axis by an angle of α, then the clamping The shaft 1 is still located on the ZX plane of the machine tool and the included angle with the X axis is π/2-α, but the optical path perpendicular to the mirror surface on the clamped shaft 1 is at an angle α with the X axis. Then adjust the inclination angle of the adjustable interferometer wedge 4 to α, install it between the installation plane of the tripod 5 and the fine-tuning platform, and fasten it by threaded connection. Then the laser interferometer 6 is installed on the fine-tuning platform. At this time, the laser emission direction is roughly perpendicular to the reflector 3. Only the height of the tripod 5 and the attitude of the fine-tuning platform need to be adjusted slightly, so that the emitted laser and the reflected laser can be in the same position. On the same straight line, so as to perform X-axis and Z-axis linkage positioning accuracy detection. Usually, the precision of the rotation axis of the five-axis CNC machine tool is within 10-4rad, which is enough to meet the need for manual dimming during precision testing. The spindle of the five-axis machine tool drives the radiation mirror to move along the vertical direction of the mirror surface of the mirror; the spindle moves along this direction to measure N points, and the theoretical moving distances of these N points are S(1)～S(N), respectively. The actual moving distances of the N points measured by the laser interferometer are S'(1)～S'(N); calculated according to S(1)～S(N) and S'(1)～S'(N) The movement error of the five-axis machine tool spindle along the X-axis and Z-axis linkage direction is obtained.
类似的，进行Y轴、Z轴联动轨迹定位精度检测时，可参考X轴、Z轴联动轨迹定位精度检测方法对激光干涉仪及该辅助夹具进行调整和安装。这里不再赘述。Similarly, when performing Y-axis and Z-axis linkage trajectory positioning accuracy detection, the laser interferometer and the auxiliary fixture can be adjusted and installed with reference to the X-axis and Z-axis linkage trajectory positioning accuracy detection method. I won't go into details here.
在进行X、Y和Z轴三轴联动轨迹定位精度检测时，只需要使用一号夹持组件，而不需要二号夹持组件。以对A/B摆角五轴机床21进行X轴、Y轴和Z轴联动直线轨迹定位精度检测为例，该套激光干涉仪辅助夹具的装配如图3所示。测量之前需先经过计算求得：联动轨迹与水平面之间的夹角β，与机床YZ平面的夹角γ以及其在YZ平面的投影与Z轴的夹角θ。机床主轴与夹持轴杆1装配加紧后，保持机床平动轴静止仅调节其转动轴A/B摆：先使初始摆角为0的A摆转动θ角，后使初始摆角为0的B摆转动γ角。调整后夹持轴杆1将与联动轨迹共面且垂直，此时与夹持轴杆1上反射镜面垂直的光路与联动轨迹平行。另一方面，将可调干涉仪楔块即斜楔的倾角设定为β，并通过螺纹连接将调好角度的可调干涉仪楔块安装于三脚架的安装平面和微调平台之间。最后将激光干涉仪安装在微调平台上，此时发射激光方向与反射镜3大致垂直，只需调整三脚架的高度以及微调平台的姿态，使发射激光和反射激光处于同一条直线上，即可进行X轴、Y轴和Z轴三轴联动定位精度检测。五轴机床主轴带动放射镜沿着反射镜的镜面垂线方向移动；主轴沿该方向移动，测量N个点，这N个点的理论的移动距离分别为S(1)～S(N)，激光干涉仪测得这N个点的实际移动距离分别为S'(1)～S'(N)；根据S(1)～S(N)和S'(1)～S'(N)计算得出五轴机床主轴沿X轴、Y轴和Z轴联动方向的移动误差。When performing X, Y, and Z-axis three-axis linkage trajectory positioning accuracy detection, only the No. 1 clamping assembly is required, and the No. 2 clamping assembly is not required. Taking the X-axis, Y-axis, and Z-axis linkage linear trajectory positioning accuracy detection of the A/B swing angle five-axis machine tool 21 as an example, the assembly of the laser interferometer auxiliary fixture is shown in Figure 3. Before the measurement, it needs to be calculated and obtained: the angle β between the linkage trajectory and the horizontal plane, the angle γ between the linkage track and the YZ plane of the machine tool, and the angle θ between its projection on the YZ plane and the Z axis. After the machine tool spindle and the clamping shaft 1 are assembled and tightened, keep the translational axis of the machine tool stationary and only adjust the A/B pendulum of its rotation axis: first make the A pendulum with the initial swing angle of 0 rotate by θ angle, and then make the A pendulum with the initial swing angle of 0 B pendulum turns γ angle. After adjustment, the clamping shaft 1 will be coplanar and perpendicular to the linkage track, and at this time, the optical path perpendicular to the mirror surface on the clamping shaft 1 is parallel to the linkage track. On the other hand, the inclination angle of the adjustable interferometer wedge, that is, the oblique wedge, is set to β, and the adjusted adjustable interferometer wedge is installed between the mounting plane of the tripod and the fine-tuning platform through a threaded connection. Finally, install the laser interferometer on the fine-tuning platform. At this time, the direction of the laser emission is roughly perpendicular to the reflector 3. You only need to adjust the height of the tripod and the attitude of the fine-tuning platform so that the emitted laser and the reflected laser are on the same straight line. X-axis, Y-axis and Z-axis three-axis linkage positioning accuracy detection. The spindle of the five-axis machine tool drives the radiation mirror to move along the vertical direction of the mirror surface of the mirror; the spindle moves along this direction to measure N points, and the theoretical moving distances of these N points are S(1)～S(N), respectively. The actual moving distances of the N points measured by the laser interferometer are S'(1)～S'(N); calculated according to S(1)～S(N) and S'(1)～S'(N) The movement error of the five-axis machine tool spindle along the X-axis, Y-axis and Z-axis linkage direction is obtained.
本实施例以典型A/B摆角五轴数控机床的单轴定位精度以及多轴联动定位精度的检测安装方法为例进行了本发明的应用说明，对于A/C摆角五轴联动数控机床等其它五轴机床同样适用。This embodiment takes the single-axis positioning accuracy of a typical A/B swing angle five-axis CNC machine tool and the detection and installation method of multi-axis linkage positioning accuracy as an example to illustrate the application of the present invention. For A/C swing angle five-axis linkage CNC machine tools It is also applicable to other five-axis machine tools.
参阅图6，X轴平动定位精度的检测步骤包括：将固定板的安装轴15与机床主轴连接紧固，然后将带刻度的圆柱镜柄10装配到固定板7的定位孔11之中并用蝶形螺母16拧紧。接着将水平仪9放置在固定板7上表面的水平仪放置平台17上，通过调整固定板7上的四个连接螺栓8的松紧程度来使水平仪9调平。待水平仪9调平后，可保证固定板7的下表面水平，也使得圆柱镜柄10呈竖直状态。使用千分表对固定板7侧面沿X轴打表，通过调节机床主轴的转动角度，确保固定板7的侧面相对X轴平行安装。在测量时，变换反射镜3在圆柱镜柄10上的位置，使反射镜3依次处于图6中的三个位置图6中为一个反射镜3所处的三个不同位置，而并非三个反射镜，图6中箭头方向为X轴方向，分别进行检测。由于固定板7上用于定位圆柱镜柄10的定位孔11的加工基准为固定板7的侧面。主轴沿该方向移动，测量N个点，这N个点的理论的移动距离分别为S(1)～S(N)，激光干涉仪测得这N个点的实际移动距离分别为S'(1)～S'(N)；根据S(1)～S(N)和S'(1)～S'(N)计算得出五轴机床主轴沿X轴方向的移动误差。Referring to Fig. 6, the detection steps of X-axis translational positioning accuracy include: fastening the installation shaft 15 of the fixed plate with the machine tool spindle, and then assembling the graduated cylindrical mirror handle 10 into the positioning hole 11 of the fixed plate 7 and using Wing nut 16 is tightened. Then the level 9 is placed on the level placement platform 17 on the upper surface of the fixed plate 7, and the level 9 is leveled by adjusting the tightness of the four connecting bolts 8 on the fixed plate 7. After the spirit level 9 is leveled, the lower surface of the fixed plate 7 can be guaranteed to be level, and the cylindrical mirror handle 10 can be vertical. Use a dial indicator to measure the side of the fixed plate 7 along the X axis, and ensure that the side of the fixed plate 7 is installed parallel to the X axis by adjusting the rotation angle of the machine tool spindle. When measuring, change the position of the reflector 3 on the cylindrical mirror handle 10, so that the reflector 3 is in the three positions in Fig. 6 in turn. In Fig. 6, there are three different positions where one reflector 3 is located, not three Mirrors, the direction of the arrow in Figure 6 is the direction of the X-axis, and are tested separately. Since the processing reference of the positioning hole 11 for positioning the cylindrical mirror handle 10 on the fixing plate 7 is the side surface of the fixing plate 7 . The main axis moves along this direction and measures N points. The theoretical moving distances of these N points are respectively S(1)～S(N). The actual moving distances of these N points measured by the laser interferometer are S'( 1)～S'(N); According to S(1)～S(N) and S'(1)～S'(N), the movement error of the spindle of the five-axis machine tool along the X-axis direction is calculated.
类似的可以进行Y轴的单轴定位精度检测，这里不再赘述。Similarly, single-axis positioning accuracy detection of the Y-axis can be performed, and details will not be described here.
进行Z轴单轴定位精度检测时，只需使带刻度的圆柱镜柄10依次安装在固定板7上的三个定位孔11中，而不用改变反射镜在圆柱镜柄10上的位置，再分别进行检测。When performing Z-axis uniaxial positioning accuracy detection, it is only necessary to install the graduated cylindrical mirror handle 10 in the three positioning holes 11 on the fixed plate 7 in sequence, without changing the position of the reflector on the cylindrical mirror handle 10, and then Tested separately.
因为X、Y轴联动轨迹与水平面平行，故而X轴和Y轴联动轨迹定位精度的检测方法与X轴单轴定位精度检测方法类似，可参照X轴的检测方法对激光干涉仪6和激光干涉仪辅助夹具进行调整和安装，如图7所示，这里不再赘述，图7中箭头方向为激光发射方向。Because the X-axis and Y-axis linkage trajectory is parallel to the horizontal plane, the detection method of the X-axis and Y-axis linkage trajectory positioning accuracy is similar to the X-axis single-axis positioning accuracy detection method. The laser interferometer 6 and laser interferometer can be compared with the X-axis detection method. Adjust and install the instrument auxiliary fixture, as shown in Figure 7, which will not be repeated here, and the direction of the arrow in Figure 7 is the direction of laser emission.
由于进行单轴定位精度检测时，反射镜3和激光干涉仪6都处于水平状态，通过可调干涉仪楔块4调整激光干涉仪6的角度，然后通过微调平台调整激光干涉仪6，确保发射激光和反射激光在同一直线上即可实施单轴定位精度检测。反射镜3的调节和激光干涉仪6的调节属于现有技术，此处不再赘述。Since both the reflector 3 and the laser interferometer 6 are in a horizontal state during the detection of single-axis positioning accuracy, the angle of the laser interferometer 6 is adjusted through the adjustable interferometer wedge 4, and then the laser interferometer 6 is adjusted through the fine-tuning platform to ensure that the emission Single-axis positioning accuracy detection can be implemented when the laser and reflected laser are on the same line. The adjustment of the reflecting mirror 3 and the adjustment of the laser interferometer 6 belong to the prior art, and will not be repeated here.
以上所述仅为本发明的具体实施例，但本发明的技术特征并不局限于此，任何本领域的技术人员在本发明的领域内，所作的变化或修饰皆涵盖在本发明的专利范围之中。The above is only a specific embodiment of the present invention, but the technical characteristics of the present invention are not limited thereto, any changes or modifications made by those skilled in the art within the field of the present invention are covered by the patent scope of the present invention among.
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710147058.2ACN106931915A (en) | 2017-03-13 | 2017-03-13 | A kind of measuring system and measuring method of five-axis machine tool translation axis error |
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710147058.2ACN106931915A (en) | 2017-03-13 | 2017-03-13 | A kind of measuring system and measuring method of five-axis machine tool translation axis error |
| Publication Number | Publication Date |
|---|---|
| CN106931915Atrue CN106931915A (en) | 2017-07-07 |
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710147058.2APendingCN106931915A (en) | 2017-03-13 | 2017-03-13 | A kind of measuring system and measuring method of five-axis machine tool translation axis error |
| Country | Link |
|---|---|
| CN (1) | CN106931915A (en) |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107511938A (en)* | 2017-09-25 | 2017-12-26 | 华侨大学 | Precision ultrasonic puncher and its tool heads angle adjusting method |
| CN107621601A (en)* | 2017-08-07 | 2018-01-23 | 大族激光科技产业集团股份有限公司 | The test system and its method of testing of the positioning precision of the kinematic axis of flying probe tester |
| CN108759799A (en)* | 2018-07-17 | 2018-11-06 | 中国水利水电第五工程局有限公司 | A kind of laser orientation system and application method for side slope sash beam setting-out |
| CN111189390A (en)* | 2020-01-09 | 2020-05-22 | 陕西科技大学 | A device for measuring geometric errors of machine tools based on the principle of laser interference |
| CN111665784A (en)* | 2020-05-15 | 2020-09-15 | 成都飞机工业（集团）有限责任公司 | Siemens subsystem-based spatial positioning error compensation method |
| CN111857047A (en)* | 2020-06-15 | 2020-10-30 | 广东长盈精密技术有限公司 | Four-axis linkage machining method and device, computer equipment and storage medium |
| CN112558547A (en)* | 2021-02-19 | 2021-03-26 | 成都飞机工业（集团）有限责任公司 | Quick optimization method for geometric error compensation data of translational shaft of five-axis numerical control machine tool |
| CN112621387A (en)* | 2020-12-28 | 2021-04-09 | 齐重数控装备股份有限公司 | Method for detecting parallelism of vertical tool rest moving on working table of heavy vertical lathe |
| CN111251072B (en)* | 2020-03-30 | 2021-04-27 | 成都飞机工业（集团）有限责任公司 | Reflector group clamp for detecting precision of numerical control machine tool |
| CN113369997A (en)* | 2021-06-25 | 2021-09-10 | 成都飞机工业（集团）有限责任公司 | Numerical control machine tool swing angle precision checking method |
| CN113503813A (en)* | 2021-06-09 | 2021-10-15 | 北京航天控制仪器研究所 | Six-degree-of-freedom motion platform linear displacement positioning precision measurement and error compensation method |
| CN114248154A (en)* | 2021-11-05 | 2022-03-29 | 上海交通大学 | Five-axis machine tool space positioning precision detection device and method |
| CN116652696A (en)* | 2023-07-28 | 2023-08-29 | 成都飞机工业（集团）有限责任公司 | Device and method for rapidly detecting positioning precision of flexible wire machining center |
| CN116661163A (en)* | 2023-07-28 | 2023-08-29 | 成都飞机工业（集团）有限责任公司 | Collimation device and method for laser interferometer |
| CN116673792A (en)* | 2023-08-04 | 2023-09-01 | 成都飞机工业（集团）有限责任公司 | Machining center rotating shaft error source stripping feature and machining evaluation method |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3202162B2 (en)* | 1996-03-13 | 2001-08-27 | 株式会社東京精密 | Fully automatic measurement system for numerically controlled machine tools, fully automatic measuring method and numerically controlled machine tools |
| CN104729401A (en)* | 2015-03-16 | 2015-06-24 | 清华大学 | Auxiliary combination fixture for laser interferometer |
| CN105538038A (en)* | 2016-01-27 | 2016-05-04 | 清华大学 | Method for identifying geometric errors of machine tool translational shafts |
| CN205237713U (en)* | 2015-12-09 | 2016-05-18 | 襄阳华中科技大学先进制造工程研究院 | Laser interferometer assists utensil in location |
| CN106141814A (en)* | 2016-08-04 | 2016-11-23 | 天津大学 | Digit Control Machine Tool translation shaft geometric error based on LaserTRACER detection and discrimination method |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3202162B2 (en)* | 1996-03-13 | 2001-08-27 | 株式会社東京精密 | Fully automatic measurement system for numerically controlled machine tools, fully automatic measuring method and numerically controlled machine tools |
| CN104729401A (en)* | 2015-03-16 | 2015-06-24 | 清华大学 | Auxiliary combination fixture for laser interferometer |
| CN205237713U (en)* | 2015-12-09 | 2016-05-18 | 襄阳华中科技大学先进制造工程研究院 | Laser interferometer assists utensil in location |
| CN105538038A (en)* | 2016-01-27 | 2016-05-04 | 清华大学 | Method for identifying geometric errors of machine tool translational shafts |
| CN106141814A (en)* | 2016-08-04 | 2016-11-23 | 天津大学 | Digit Control Machine Tool translation shaft geometric error based on LaserTRACER detection and discrimination method |
| Title |
|---|
| 郑剑锋: "《多轴数控机床误差测量与建模研究》", 《中国优秀硕士学位论文全文数据库 工程科技I辑》* |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107621601A (en)* | 2017-08-07 | 2018-01-23 | 大族激光科技产业集团股份有限公司 | The test system and its method of testing of the positioning precision of the kinematic axis of flying probe tester |
| CN107511938A (en)* | 2017-09-25 | 2017-12-26 | 华侨大学 | Precision ultrasonic puncher and its tool heads angle adjusting method |
| CN107511938B (en)* | 2017-09-25 | 2024-02-27 | 华侨大学 | Precise ultrasonic perforating machine and tool head angle adjusting method thereof |
| CN108759799A (en)* | 2018-07-17 | 2018-11-06 | 中国水利水电第五工程局有限公司 | A kind of laser orientation system and application method for side slope sash beam setting-out |
| CN108759799B (en)* | 2018-07-17 | 2024-02-20 | 中国水利水电第五工程局有限公司 | Laser positioning system for lofting of side slope frame grid beam and use method |
| CN111189390A (en)* | 2020-01-09 | 2020-05-22 | 陕西科技大学 | A device for measuring geometric errors of machine tools based on the principle of laser interference |
| CN111189390B (en)* | 2020-01-09 | 2021-08-10 | 陕西科技大学 | Machine tool geometric error measuring device based on laser interference principle |
| CN111251072B (en)* | 2020-03-30 | 2021-04-27 | 成都飞机工业（集团）有限责任公司 | Reflector group clamp for detecting precision of numerical control machine tool |
| CN111665784A (en)* | 2020-05-15 | 2020-09-15 | 成都飞机工业（集团）有限责任公司 | Siemens subsystem-based spatial positioning error compensation method |
| CN111857047A (en)* | 2020-06-15 | 2020-10-30 | 广东长盈精密技术有限公司 | Four-axis linkage machining method and device, computer equipment and storage medium |
| CN111857047B (en)* | 2020-06-15 | 2021-11-12 | 广东长盈精密技术有限公司 | Four-axis simultaneous machining method, device, computer equipment and storage medium |
| CN112621387A (en)* | 2020-12-28 | 2021-04-09 | 齐重数控装备股份有限公司 | Method for detecting parallelism of vertical tool rest moving on working table of heavy vertical lathe |
| CN112558547A (en)* | 2021-02-19 | 2021-03-26 | 成都飞机工业（集团）有限责任公司 | Quick optimization method for geometric error compensation data of translational shaft of five-axis numerical control machine tool |
| US12117796B2 (en) | 2021-02-19 | 2024-10-15 | Chengdu Aircraft Industrial (Group) Co., Ltd. | Methods for quickly optimizing geometric error compensation data of translational axes of five-axis numerically controlled machine tools |
| CN112558547B (en)* | 2021-02-19 | 2021-06-08 | 成都飞机工业（集团）有限责任公司 | Quick optimization method for geometric error compensation data of translational shaft of five-axis numerical control machine tool |
| CN113503813A (en)* | 2021-06-09 | 2021-10-15 | 北京航天控制仪器研究所 | Six-degree-of-freedom motion platform linear displacement positioning precision measurement and error compensation method |
| CN113369997A (en)* | 2021-06-25 | 2021-09-10 | 成都飞机工业（集团）有限责任公司 | Numerical control machine tool swing angle precision checking method |
| CN114248154A (en)* | 2021-11-05 | 2022-03-29 | 上海交通大学 | Five-axis machine tool space positioning precision detection device and method |
| CN116661163A (en)* | 2023-07-28 | 2023-08-29 | 成都飞机工业（集团）有限责任公司 | Collimation device and method for laser interferometer |
| CN116652696B (en)* | 2023-07-28 | 2023-11-10 | 成都飞机工业（集团）有限责任公司 | Device and method for rapidly detecting positioning precision of flexible wire machining center |
| CN116661163B (en)* | 2023-07-28 | 2023-12-08 | 成都飞机工业（集团）有限责任公司 | Collimation device and method for laser interferometer |
| CN116652696A (en)* | 2023-07-28 | 2023-08-29 | 成都飞机工业（集团）有限责任公司 | Device and method for rapidly detecting positioning precision of flexible wire machining center |
| CN116673792A (en)* | 2023-08-04 | 2023-09-01 | 成都飞机工业（集团）有限责任公司 | Machining center rotating shaft error source stripping feature and machining evaluation method |
| CN116673792B (en)* | 2023-08-04 | 2023-11-10 | 成都飞机工业（集团）有限责任公司 | Machining center rotating shaft error source stripping feature and machining evaluation method |
| Publication | Publication Date | Title |
|---|---|---|
| CN106931915A (en) | A kind of measuring system and measuring method of five-axis machine tool translation axis error | |
| CN106546167A (en) | For detecting the laser interferometer auxiliary clamp of lathe translation shaft error | |
| CN114719752B (en) | Method for Measuring Geometric Parameters of Precision Parts Based on Universal Tool Microscope and Measuring Probe | |
| CN107607041B (en) | One kind being used for six geometric error measuring devices of turntable | |
| CN104729401B (en) | A kind of laser interferometer Assisted Combinatorial fixture | |
| CN110926364A (en) | Leaf detection method based on line structured light | |
| CN109696121B (en) | Rapid calibration method based on laser interferometer detection light path | |
| CN107270837B (en) | Drilling machine spindle deflection test system and method | |
| CN209343185U (en) | A one-time installation detection device for the geometric error of the rotary table of a five-axis machine tool | |
| CN110514127A (en) | An automatic calibration method of beam direction based on section line method | |
| CN107813293B (en) | Six-degree-of-freedom adjustable base device used in environment of flexibly processing double manipulators | |
| CN112097613A (en) | Method for detecting rotation eccentricity of rotating shaft | |
| CN111707876B (en) | A diaxon straightness quick adjustment mechanism that hangs down for large-scale antenna near field tester | |
| CN104091748B (en) | Ionization chamber adjusting means | |
| CN109551520B (en) | High-efficiency six-degree-of-freedom parallel robot precision testing device | |
| CN109282721A (en) | Internal combustion engine cylinder body main bearing hole circle run-out detection tool and method | |
| CN111251072B (en) | Reflector group clamp for detecting precision of numerical control machine tool | |
| CN206113868U (en) | Nanometer displacement table 6 -degree of freedom calibrating device | |
| CN106091903B (en) | Large-scale radial arm deflection amount detection method and device based on biplane fixed reference | |
| CN112798015A (en) | Dynamic Angle Calibration Device | |
| CN118046254A (en) | Installation and adjustment method for revolving body shaft/aperture measuring device and auxiliary adjustment device | |
| CN110561540A (en) | adjusting device for optical centering instrument | |
| CN108051016B (en) | Multi-degree-of-freedom adjustment cradle head for calibrating handheld laser range finder | |
| CN216791126U (en) | Novel laser aiming device for autocollimator | |
| CN216206412U (en) | An optical calibration mechanism |
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication | Application publication date:20170707 |