技术领域technical field
本发明属于光干涉测量仪器技术领域，特别是一种泰曼型点源阵列异位同步移相干涉仪及其测量方法。The invention belongs to the technical field of optical interferometric measuring instruments, in particular to a Tyman-type point source array dislocation synchronous phase-shifting interferometer and a measuring method thereof.
背景技术Background technique
泰曼型干涉仪采用被测光束与参考光束的分光路设计，与斐索型共光路干涉仪相比，泰曼型干涉仪的结构简单。目前，泰曼型同步移相干涉仪的主要是采用偏振干涉技术，相比于时间移相干涉测试技术，它能够在同一时间、不同空间位置获得多幅移相干涉图，有效地抑制了振动、空气扰动等时变因素的影响。泰曼型同步移相干涉仪的基本结构是通过前置辅助组件产生两束偏振态正交的光，经偏振分光棱镜分别引入到参考臂和测试臂，在参考臂和测试臂放置相位延迟片，改变原路返回后参考光和测试光的偏振态，经偏振分光棱镜出射的两束正交偏振光无法形成干涉场，需在后续光路中通过辅助组件，产生多幅偏振移相干涉图。然而其偏振移相采集模块的制作相对困难且成本高，且结构复杂，从而导致仪器成本高。The Tyman interferometer adopts the split optical path design of the measured beam and the reference beam. Compared with the Fizeau type common optical path interferometer, the Tyman interferometer has a simple structure. At present, the Tieman-type synchronous phase-shifting interferometer mainly uses polarization interferometry technology. Compared with time-phase-shifting interferometry technology, it can obtain multiple phase-shifting interferograms at the same time and at different spatial positions, effectively suppressing vibration , air disturbance and other time-varying factors. The basic structure of the Tieman-type synchronous phase-shifting interferometer is to generate two beams of orthogonally polarized light through the front auxiliary component, which are respectively introduced into the reference arm and the test arm through the polarization beam splitter, and the phase retarder is placed on the reference arm and the test arm , after changing the polarization state of the reference light and the test light after returning from the original path, the two orthogonally polarized lights exiting the polarization beam splitter cannot form an interference field, and need to pass through auxiliary components in the subsequent optical path to generate multiple polarization phase-shifting interferograms. However, the fabrication of the polarization phase-shifting acquisition module is relatively difficult and costly, and the structure is complex, resulting in high instrument cost.
发明内容Contents of the invention
本发明的目的在于提供一种精度高、成本低、方便实用、可小型化的泰曼型点源阵列异位同步移相干涉仪及其测量方法。The object of the present invention is to provide a high-precision, low-cost, convenient, practical, and miniaturizable Tieman-type point source array out-of-position synchronous phase-shifting interferometer and its measuring method.
实现本发明目的技术解决方案为：一种泰曼型点源阵列异位同步移相干涉仪，其特征在于，包括：点光源及其分光组件、主干涉仪和分光成像组件，由点光源发出的球面波经分光组件分成四束后进入主干涉仪，最后通过分光成像组件在一个CCD上同时获取四幅相移干涉图，其中：The technical solution for realizing the object of the present invention is: a Tieman-type point source array dislocation synchronous phase-shifting interferometer, characterized in that it includes: a point light source and its spectroscopic component, a main interferometer and a spectroscopic imaging component, and the point source emits The spherical wave is divided into four beams by the spectroscopic component and then enters the main interferometer. Finally, four phase-shifted interferograms are simultaneously acquired on a CCD by the spectroscopic imaging component. Among them:
所述点光源及其分光组件用于产生四个复振幅相同但空间位置不同的发散球面波；The point light source and its light splitting component are used to generate four diverging spherical waves with the same complex amplitude but different spatial positions;
所述主干涉仪为泰曼型干涉仪，使从参考面反射回的参考光和测试面反射回的测试光形成干涉场；The main interferometer is a Tieman interferometer, so that the reference light reflected back from the reference surface and the test light reflected back from the test surface form an interference field;
所述分光成像组件用于将四个光源分别经参考面与测试面反射产生的干涉场在CCD靶面上分开，并且使得CCD靶面与测试面共轭。The spectroscopic imaging component is used to separate the interference fields generated by the reflection of the four light sources from the reference surface and the test surface on the CCD target surface, and make the CCD target surface and the test surface conjugate.
进一步地，所述分光组件包括顺次共光轴设置的第一准直物镜、棋盘光栅、第一会聚物镜和孔径光阑，所述孔径光阑滤出棋盘光栅的(±1，±1)级四束衍射光，并且滤除其它级次衍射光，所得的四束衍射光复振幅相同，并且分别位于正方形的四个顶点，该正方形位于第一会聚物镜的焦面，但中心不在主干涉仪的光轴上，该正方形的边长d即相邻发散球面波的横向错位距离，d由棋盘光栅与第一会聚物镜确定：Further, the light splitting assembly includes a first collimating objective lens, a checkerboard grating, a first converging objective lens and an aperture stop which are arranged on common optical axes in sequence, and the aperture stop filters out (±1, ±1) of the checkerboard grating The four diffracted lights of the first order and the other orders of diffracted light are filtered out. The obtained four diffracted lights have the same complex amplitude and are respectively located at the four vertices of the square. The square is located at the focal plane of the first converging objective lens, but the center is not in the main interferometer. On the optical axis of , the side length d of the square is the lateral dislocation distance of adjacent diverging spherical waves, and d is determined by the checkerboard grating and the first converging objective lens:
d＝2f1λ/Λd=2f1 λ/Λ
其中，f1为第一会聚物镜的焦距，λ为入射光波长，Λ为棋盘光栅的光栅周期。where f1 is the focal length of thefirst converging objective lens, λ is the wavelength of the incident light, and Λ is the grating period of the checkerboard grating.
进一步地，所述主干涉仪包括共光轴设置的第二准直物镜、分光棱镜、参考面和测试面，由点光源发出的球面波经分光组件分成四束后进入主干涉仪，进入主干涉仪的四束光分别由第二准直物镜扩束，经分光棱镜后，分别通过参考面和测试面，其中每束光分别被参考面和测试面反射形成参考光和测试光，参考光和测试光沿原路返回并分别经分光棱镜透射和反射，进入分光成像组件。Further, the main interferometer includes a second collimating objective lens with a common optical axis, a beam splitting prism, a reference surface and a test surface. The four beams of the interferometer are respectively expanded by the second collimating objective lens, pass through the dichroic prism, and pass through the reference surface and the test surface respectively, wherein each beam is reflected by the reference surface and the test surface respectively to form a reference light and a test light, and the reference light The light and the test light return along the original path and are transmitted and reflected by the beam splitting prism respectively, and then enter the beam splitting imaging component.
进一步地，所述分光成像组件包括顺次共光轴设置的第二会聚物镜、透镜阵列、成像物镜、CCD，所述透镜阵列位于第二会聚物镜的焦面；Further, the spectroscopic imaging assembly includes a second converging objective lens, a lens array, an imaging objective lens, and a CCD arranged in sequence with common optical axes, and the lens array is located on the focal plane of the second converging objective lens;
经参考面与测试面反射回来的四组参考光与测试光，分别经过透镜阵列中各个透镜的物方主点，成像物镜将经过透镜阵列的四组参考光与测试光准直成平行光，该平行光在CCD的靶面上形成四个分开的光斑。The four groups of reference light and test light reflected by the reference surface and the test surface respectively pass through the object-side principal points of each lens in the lens array, and the imaging objective lens collimates the four groups of reference light and test light passing through the lens array into parallel light. The parallel light forms four separate light spots on the target surface of the CCD.
进一步地，所述透镜阵列为2×2负透镜阵列，每个负透镜的焦距f2满足f2＝-dF#，其中d为相邻发散球面波的横向错位距离，F#为主干涉仪中第二准直物镜的F数。Further, the lens array is a 2×2 negative lens array, and the focal length f2 of each negative lens satisfies f2 =-dF# , where d is the lateral misalignment distance of adjacent diverging spherical waves, and F# is the main interferometer The F number of the second collimating objective lens.
进一步地，所述成像物镜的前焦面与透镜阵列的像方主面重合，成像物镜的焦距f3满足f3≤LF#/2，其中L为CCD靶面的宽度。Further, the front focal plane of the imaging objective coincides with the image-side main surface of the lens array, and the focal length f3 of the imaging objective satisfies f3 ≤ LF# /2, where L is the width of the CCD target surface.
进一步地，所述CCD的靶面与主干涉仪中测试面共轭，CCD的靶面与成像物镜像方主面之间的距离l为Further, the target surface of the CCD is conjugate to the test surface in the main interferometer, and the distance l between the target surface of the CCD and the main surface of the mirror image of the imaging object is
一种基于权利要求1所述泰曼型点源阵列异位同步移相干涉仪的测量方法，其特征在于，包括以下步骤：A measurement method based on the Tieman type point source array heterolocation synchronous phase-shifting interferometer described in claim 1, is characterized in that, comprises the following steps:
步骤1，点光源通过分光组件产生四个复振幅相同但空间位置不同的发散球面波，该四个发散球面波分别位于正方形的四个顶点，该正方形的中心不在主干涉仪的光轴上，将被测件置于主干涉仪中作为测试面，调整测试面使测试光与参考光的光程，使得CCD上同时获取四幅相移干涉图；Step 1. The point light source generates four diverging spherical waves with the same complex amplitude but different spatial positions through the light splitting component. The four diverging spherical waves are respectively located at the four vertices of the square, and the center of the square is not on the optical axis of the main interferometer. Place the DUT in the main interferometer as the test surface, adjust the test surface to make the optical path of the test light and the reference light, so that four phase-shifted interferograms can be obtained on the CCD at the same time;
步骤2，令x、y分别为所述正方形中心与主干涉仪光轴之间距离在水平、竖直方向上的投影长度，且满足或者调节测试臂与参考臂长的差值D为或者得到相移量依次递增π/2的四幅干涉图，其中f4为主干涉仪中准直物镜的焦距，k＝2π/λ为波矢，λ为入射光波长；Step 2, let x, y be the projection lengths of the distance between the center of the square and the optical axis of the main interferometer in the horizontal and vertical directions respectively, and satisfy or Adjust the difference D between the test arm and the reference arm length as or Obtain four interferograms whose phase shifts increase successively by π/2, where f4 is the focal length of the collimating objective lens in the main interferometer, k=2π/λ is the wave vector, and λ is the wavelength of the incident light;
步骤3，从一帧CCD图像上提取出四幅干涉图，通过移相算法对四幅干涉图进行处理，恢复出测试面的面形或波像差。Step 3, extract four interferograms from one frame of CCD image, process the four interferograms by phase-shift algorithm, and restore the surface shape or wave aberration of the test surface.
进一步地，步骤1所述CCD上同时获取四幅相移干涉图，忽略常数相移因子-2Dk，每幅干涉图的相移量δ(r)满足：Further, four phase-shift interferograms are simultaneously acquired on the CCD described in step 1, ignoring the constant phase-shift factor -2Dk, and the phase shift δ(r) of each interferogram satisfies:
δ(r)＝Dk(r/f4)2δ(r)=Dk(r/f4 )2
其中，D为参考臂与测试臂长的差值，k＝2π/λ为波矢，为发散球面波到主干涉仪光轴之间的错位距离，f4为主干涉仪中准直物镜的焦距。Among them, D is the difference between the length of the reference arm and the test arm, k=2π/λ is the wave vector, is the misalignment distance between the diverging spherical wave and the optical axis of the main interferometer, andf4 is the focal length of the collimating objective lens in the main interferometer.
进一步地，步骤3所述移相算法为随机移相算法或者四步移相算法。Further, the phase-shifting algorithm described in step 3 is a random phase-shifting algorithm or a four-step phase-shifting algorithm.
本发明与现有技术相比，其显著优点在于：(1)可实现泰曼同步移相干涉测量；(2)仅用一个普通点光源即可实现移相，成本较低；(3)无需其它偏振元件，结构紧凑；(4)测试过程简单，调整方便，对环境的要求较低，使测试更容易实现。Compared with the prior art, the present invention has significant advantages in that: (1) it can realize Teiman synchronous phase shifting interferometry; (2) it can realize phase shifting with only one common point light source, and the cost is low; (3) it does not need Other polarizing elements have a compact structure; (4) The test process is simple, easy to adjust, and has low requirements on the environment, making the test easier to implement.
附图说明Description of drawings
图1是本发明泰曼型点源阵列异位同步移相干涉仪的结构示意图。Fig. 1 is a schematic structural diagram of a Tyman-type point source array out-of-position synchronous phase-shifting interferometer of the present invention.
图2是本发明泰曼型点源阵列异位同步移相干涉仪用于测量球面镜的结构示意图。Fig. 2 is a schematic diagram of the structure of a Tieman-type point source array out-of-position synchronous phase-shifting interferometer used to measure a spherical mirror of the present invention.
图3是点光源存在横向偏移导致准直光产生倾斜的光路示意图。Fig. 3 is a schematic diagram of an optical path in which collimated light is tilted due to lateral offset of a point light source.
图4是倾斜光入射在干涉光场间引入相移的示意图。Fig. 4 is a schematic diagram of oblique light incidence introducing a phase shift between interfering light fields.
图5是四个点光源与准直物镜焦点的相对位置示意图。Fig. 5 is a schematic diagram of the relative positions of the four point light sources and the focal point of the collimating objective lens.
图中：1、点光源；2、分光组件；3、第一准直物镜；4、棋盘光栅；5、第一会聚物镜；6、孔径光阑；7、第二准直物镜；8、分光棱镜；9、参考面；10、测试面；11、分光成像组件；12、第二会聚物镜；13、透镜阵列；14、成像物镜；15、CCD。In the figure: 1. Point light source; 2. Spectroscopic component; 3. First collimating objective lens; 4. Checkerboard grating; 5. First converging objective lens; 6. Aperture diaphragm; 7. Second collimating objective lens; 8. Spectroscopic prism; 9. reference surface; 10. test surface; 11. spectroscopic imaging component; 12. second converging objective lens; 13. lens array; 14. imaging objective lens; 15. CCD.
具体实施方式detailed description
结合图1，本发明泰曼型点源阵列异位同步移相干涉仪，其特征在于，包括：点光源1及其分光组件2、主干涉仪和分光成像组件11，由点光源1发出的球面波经分光组件2分成四束后进入主干涉仪，最后通过分光成像组件11在一个CCD上同时获取四幅相移干涉图，其中：In conjunction with Fig. 1, the Tieman-type point source array dislocation synchronous phase-shifting interferometer of the present invention is characterized in that it comprises: a point light source 1 and its spectroscopic component 2, a main interferometer and a spectroscopic imaging component 11, and the light emitted by the point source 1 The spherical wave is divided into four beams by the spectroscopic component 2 and then enters the main interferometer, and finally four phase-shifted interferograms are simultaneously acquired on a CCD by the spectroscopic imaging component 11, wherein:
(1)所述点光源1及其分光组件2用于产生四个复振幅相同但空间位置不同的发散球面波；(1) The point light source 1 and its light splitting assembly 2 are used to generate four divergent spherical waves with the same complex amplitude but different spatial positions;
所述分光组件2包括顺次共光轴设置的第一准直物镜3、棋盘光栅4、第一会聚物镜5和孔径光阑6，所述孔径光阑6滤出棋盘光栅4的(±1，±1)级四束衍射光，并且滤除其它级次衍射光，所得的四束衍射光复振幅相同，并且分别位于正方形的四个顶点，该正方形位于第一会聚物镜5的焦面，但该正方形的中心不在主干涉仪的光轴上，该正方形的边长d即相邻发散球面波的横向错位距离，d由棋盘光栅4与第一会聚物镜5确定：Described spectroscopic assembly 2 comprises the first collimating objective lens 3 that common optical axis arranges sequentially, checkerboard grating 4, the first converging objective lens 5 and aperture stop 6, and described aperture stop 6 filters out the (±1 , ±1) order four beams of diffracted light, and filter out other orders of diffracted light, the complex amplitudes of the four beams of diffracted light obtained are the same, and are respectively located at the four vertices of the square, the square is located at the focal plane of the first converging objective lens 5, but The center of the square is not on the optical axis of the main interferometer, and the side length d of the square is the lateral dislocation distance of adjacent diverging spherical waves, and d is determined by the checkerboard grating 4 and the first converging objective lens 5:
d＝2f1λ/Λd=2f1 λ/Λ
其中，f1为第一会聚物镜5的焦距，λ为入射光波长，Λ为棋盘光栅4的光栅周期。Wherein, f1 is the focal length of the first converging objective lens 5, λ is the wavelength of the incident light, and Λ is the grating period of the checkerboard grating 4.
(2)所述主干涉仪为泰曼型干涉仪，使从参考面反射回的参考光和测试面反射回的测试光形成干涉场；(2) the main interferometer is a Teiman interferometer, so that the reference light reflected back from the reference surface and the test light reflected back from the test surface form an interference field;
所述主干涉仪包括共光轴设置的第二准直物镜7、分光棱镜8、参考面9和测试面10，由点光源1发出的球面波经分光组件2分成四束后进入主干涉仪，进入主干涉仪的四束光分别由第二准直物镜7扩束，经分光棱镜8后，分别通过参考面9和测试面10，其中每束光分别被参考面9和测试面10反射形成参考光和测试光，参考光和测试光沿原路返回并分别经分光棱镜8透射和反射，进入分光成像组件11。The main interferometer includes a second collimating objective lens 7 with a common optical axis, a dichroic prism 8, a reference surface 9 and a test surface 10. The spherical wave emitted by the point light source 1 is divided into four beams by the light splitting assembly 2 and then enters the main interferometer. , the four beams of light entering the main interferometer are respectively expanded by the second collimating objective lens 7, and after passing through the beam splitter 8, pass through the reference surface 9 and the test surface 10 respectively, wherein each beam of light is reflected by the reference surface 9 and the test surface 10 respectively The reference light and the test light are formed, and the reference light and the test light return along the original path and are respectively transmitted and reflected by the beam splitting prism 8 and enter the spectroscopic imaging component 11 .
(3)所述分光成像组件11用于将四个光源分别经参考面与测试面反射产生的干涉场在CCD靶面上分开，并且使得CCD靶面与测试面共轭。(3) The spectroscopic imaging component 11 is used to separate the interference fields generated by the reflection of the four light sources from the reference surface and the test surface on the CCD target surface, and make the CCD target surface and the test surface conjugate.
所述分光成像组件包括顺次共光轴设置的第二会聚物镜12、透镜阵列13、成像物镜14、CCD15，所述透镜阵列13位于第二会聚物镜12的焦面；经参考面与测试面反射回来的四组参考光与测试光，分别经过透镜阵列13中各个透镜的物方主点，成像物镜14将经过透镜阵列13的四组参考光与测试光准直成平行光，该平行光在CCD15的靶面上形成四个分开的光斑。Described spectroscopic imaging assembly comprises the second converging objective lens 12, lens array 13, imaging objective lens 14, CCD15 that common optical axis is arranged in sequence, and described lens array 13 is positioned at the focal plane of second converging objective lens 12; The four groups of reference light and test light reflected back pass through the object-side principal points of each lens in the lens array 13 respectively, and the imaging objective lens 14 collimates the four groups of reference light and test light passing through the lens array 13 into parallel light, and the parallel light Four separate light spots are formed on the target surface of CCD15.
所述透镜阵列13为2×2负透镜阵列，每个负透镜的焦距f2满足f2＝-dF#，其中d为相邻发散球面波的横向错位距离，F#为主干涉仪中第二准直物镜7的F数。The lens array 13 is a 2×2 negative lens array, and the focal length f2 of each negative lens satisfies f2 =-dF# , where d is the lateral displacement distance of adjacent diverging spherical waves, and F# is the first in the main interferometer The F number of the second collimating objective lens 7.
所述成像物镜14的前焦面与透镜阵列13的像方主面重合，成像物镜14的焦距f3满足f3≤LF#/2，其中L为CCD15靶面的宽度。The front focal plane of the imaging objective lens 14 coincides with the image side main surface of the lens array 13, and the focal lengthf3 of the imaging objective lens 14 satisfies f3≤LF# /2 , where L is the width of the target surface of the CCD15.
所述CCD15的靶面与主干涉仪中测试面10共轭，CCD15的靶面与成像物镜14像方主面之间的距离l为The target surface of the CCD15 is conjugate to the test surface 10 in the main interferometer, and the distance l between the target surface of the CCD15 and the image side main surface of the imaging objective lens 14 is
本发明基于泰曼型点源阵列异位同步移相干涉仪的测量方法，包括以下步骤：The present invention is based on the measurement method of the Teiman type point source array dislocation synchronous phase shifting interferometer, comprises the following steps:
步骤1，点光源通过分光组件产生四个复振幅相同但空间位置不同的发散球面波，该四个发散球面波分别位于正方形的四个顶点，该正方形的中心不在主干涉仪的光轴上，将被测件置于主干涉仪中作为测试面，调整测试面使测试光与参考光的光程大致相等，使得CCD上同时获取四幅相移干涉图；所述CCD上同时获取四幅相移干涉图，忽略常数相移因子-2Dk，每幅干涉图的相移量δ(r)满足：Step 1. The point light source generates four diverging spherical waves with the same complex amplitude but different spatial positions through the light splitting component. The four diverging spherical waves are respectively located at the four vertices of the square, and the center of the square is not on the optical axis of the main interferometer. Place the DUT in the main interferometer as the test surface, adjust the test surface so that the optical paths of the test light and the reference light are roughly equal, so that four phase-shifted interferograms are simultaneously acquired on the CCD; four phase-shifted interferograms are simultaneously acquired on the CCD Figure, ignoring the constant phase shift factor -2Dk, the phase shift δ(r) of each interferogram satisfies:
δ(r)＝Dk(r/f4)2δ(r)=Dk(r/f4 )2
其中，D为参考臂与测试臂长的差值，k＝2π/λ为波矢，为发散球面波到主干涉仪光轴之间的错位距离，f4为主干涉仪中准直物镜的焦距。Among them, D is the difference between the length of the reference arm and the test arm, k=2π/λ is the wave vector, is the misalignment distance between the diverging spherical wave and the optical axis of the main interferometer, andf4 is the focal length of the collimating objective lens in the main interferometer.
步骤2，令x、y分别为所述正方形中心与主干涉仪光轴之间距离在水平、竖直方向上的投影长度，且满足或者调节测试臂与参考臂长的差值D为或者得到相移量依次递增π/2的四幅干涉图，其中f4为准直物镜的焦距，k＝2π/λ为波矢，λ为入射光波长；Step 2, let x, y be the projection lengths of the distance between the center of the square and the optical axis of the main interferometer in the horizontal and vertical directions respectively, and satisfy or Adjust the difference D between the test arm and the reference arm length as or Obtain four interferograms whose phase shifts increase successively by π/2, where f4 is the focal length of the collimating objective lens, k=2π/λ is the wave vector, and λ is the wavelength of the incident light;
步骤3，从一帧CCD图像上提取出四幅干涉图，通过移相算法对四幅干涉图进行处理，恢复出测试面的面形或波像差；所述移相算法为随机移相算法或者四步移相算法。Step 3, extract four interferograms from one frame of CCD image, process the four interferograms through a phase-shifting algorithm, and restore the surface shape or wave aberration of the test surface; the phase-shifting algorithm is a random phase-shifting algorithm or a four-phase Phase shift algorithm.
实施例1Example 1
本发明泰曼型点源阵列异位同步移相干涉仪光路结构如图1所示，包括了，The optical path structure of the Tieman-type point source array out-of-position synchronous phase-shifting interferometer of the present invention is shown in Figure 1, including,
1)点光源1及其分光组件2用于产生四个复振幅相同但空间位置不同的发散球面波。分光组件包括第一准直物镜3、棋盘光栅4、第一会聚物镜5、孔径光阑6。点光源1经过第一准直物镜3与棋盘光栅4后产生多个衍射级次，经会聚物镜5会聚后，孔径光阑6滤出棋盘光栅4的(±1，±1)级四支光，并且滤除其它级次衍射光。这四个点光源分别位于正方形的四个顶点，且其所构成的正方形的中心不在主干涉仪的光轴上。正方形的边长d由棋盘光栅与会聚物镜确定。满足d＝2f1λ/Λ，其中f1为第一会聚物镜的焦距，λ为入射光波长，Λ为棋盘光栅的光栅周期。1) The point light source 1 and its light splitting component 2 are used to generate four diverging spherical waves with the same complex amplitude but different spatial positions. The beam splitting assembly includes a first collimating objective lens 3 , a checkerboard grating 4 , a first converging objective lens 5 , and an aperture stop 6 . The point light source 1 produces multiple diffraction orders after passing through the first collimating objective lens 3 and the checkerboard grating 4, and after being converged by the converging objective lens 5, the aperture diaphragm 6 filters out the (±1, ±1) order four beams of the checkerboard grating 4 , and filter out other orders of diffracted light. The four point light sources are respectively located at the four vertices of the square, and the center of the square formed by them is not on the optical axis of the main interferometer. The side length d of the square is determined by the checkerboard grating and the converging objective. Satisfy d=2f1 λ/Λ, where f1 is the focal length of the first converging objective lens, λ is the wavelength of the incident light, and Λ is the grating period of the checkerboard grating.
2)主干涉仪，所述主干涉仪为泰曼型干涉仪，使分别从参考面和测试面反射回的两束光波形成干涉场，所述主干涉仪包括第二准直物镜7、分光棱镜8、参考面9和测试面10，进入主干涉仪的四束光分别由第二准直物镜7扩束，经分光棱镜8后，分别通过参考面9和测试面10，其中每束光分别被参考面9和测试面10反射沿各自原光路返回并分别经分光棱镜8透射和反射，进入分光成像组件11。2) the main interferometer, the main interferometer is a Tieman type interferometer, so that the two beams of light waves reflected back from the reference surface and the test surface respectively form an interference field, and the main interferometer includes a second collimating objective lens 7, a beam splitter Prism 8, reference surface 9 and test surface 10, the four beams of light entering the main interferometer are respectively expanded by the second collimating objective lens 7, and after passing through the beam splitter 8, respectively pass through the reference surface 9 and the test surface 10, wherein each beam of light They are respectively reflected by the reference surface 9 and the test surface 10 and return along their respective original optical paths, respectively transmitted and reflected by the beam splitting prism 8, and then enter the spectroscopic imaging component 11.
3)分光成像组件11，用于将四个光源分别经参考面9与测试面10反射产生的干涉场在CCD15靶面上分开，并且使得CCD15靶面与测试面10共轭。分光成像组件11包括第二会聚物镜12、透镜阵列13、成像物镜14、CCD15。经参考面9与测试面10反射回来的四组参考光与测试光，分别经过透镜阵列13中各个透镜的物方主点。透镜阵列13为2×2负透镜阵列，其每一个透镜的作用相当于场镜。焦距f2满足f2≈-dF#。其中F#为第二准直物镜7的F数。成像物镜14用于将经过透镜阵列13的四组参考光与测试光准直成平行光，并且使得在CCD15靶面上的四组光斑是分开的。成像物镜14的前焦面与透镜阵列13的像方主面重合。成像物镜14的焦距满足f3≤LF#/2，其中L为CCD15靶面的宽度。CCD15的靶面与测试面10共轭，与成像物镜14像方主面之间的距离近似为3) The spectroscopic imaging component 11 is used to separate the interference fields generated by the reflection of the four light sources from the reference surface 9 and the test surface 10 on the CCD15 target surface, and make the CCD15 target surface and the test surface 10 conjugate. The spectroscopic imaging assembly 11 includes a second converging objective lens 12 , a lens array 13 , an imaging objective lens 14 , and a CCD 15 . The four sets of reference light and test light reflected by the reference surface 9 and the test surface 10 respectively pass through the object-side principal points of the lenses in the lens array 13 . The lens array 13 is a 2×2 negative lens array, and each lens acts as a field lens. The focal length f2 satisfies f2 ≈-dF# . Wherein F# is the F number of the second collimating objective lens 7. The imaging objective lens 14 is used to collimate the four groups of reference light and the test light passing through the lens array 13 into parallel light, and to separate the four groups of light spots on the target surface of the CCD 15 . The front focal plane of the imaging objective lens 14 coincides with the image-side principal plane of the lens array 13 . The focal length of the imaging objective lens 14 satisfies f3 ≤ LF# /2, where L is the width of the target surface of the CCD 15 . The target surface of CCD15 is conjugate with test surface 10, and the distance between the main surface of imaging objective lens 14 image side is approximately
所述泰曼型点源阵列异位同步移相干涉仪原理如下：The principle of the Tieman-type point source array out-of-position synchronous phase-shifting interferometer is as follows:
如图3所示，当位于第二准直物镜7前焦面的四个点光源与其焦点存在一个横向错位距离r时，经过第二准直物镜7后的光束与光轴存在一个角度θ＝r/f4，其中f4为第二准直物镜7的焦距。从而在被参考面9与测试面10反射所产生的干涉场中引入一个常数相移量。如图4所示，根据几何光学性质其相移量为δ(r)＝k(AD-AB-BC)＝-2Dcosθ，由于θ很小，在小角度近似可以得到δ(r)＝Dk(r/f4)2，这里忽略了一个常数相移因子-2Dk，其中D为参考臂与测试臂长的差值，k＝2π/λ为波矢。As shown in Figure 3, when the four point light sources positioned at the front focal plane of the second collimating objective lens 7 have a lateral misalignment distance r with their focal points, there is an angle θ= r/f4 , where f4 is the focal length of the second collimating objective lens 7 . Thus, a constant phase shift is introduced into the interference field generated by the reflection of the reference surface 9 and the test surface 10 . As shown in Figure 4, according to the geometrical optics properties, its phase shift is δ(r)=k(AD-AB-BC)=-2Dcosθ, since θ is very small, approximation at small angles can get δ(r)=Dk( r/f4 )2 , a constant phase shift factor -2Dk is ignored here, where D is the difference between the length of the reference arm and the test arm, and k=2π/λ is the wave vector.
对于所述的泰曼型点源阵列异位同步移相干涉仪而言，点光源1通过分光组件2产生四个复振幅相同的点光源，如图5所示，以四个点光源的中心为坐标原点，第二准直物镜7的前焦点的坐标为(x,y)，不失一般性，我们假设0＜x≤y，此时每个点光源对应干涉图的相移量与其最小相移量之间差值从小到大依次为：0、采用随机移相算法重构相位。特别的，当(x,y)满足时，每幅干涉图的相移量与其最小相移量之间差值从小到大依次为0、π/2、π、3π/2，采用四步移相算法重构相位。For the Tieman-type point source array out-of-position synchronous phase-shifting interferometer, the point light source 1 generates four point light sources with the same complex amplitude through the light splitting component 2, as shown in Figure 5, with the center of the four point light sources is the origin of the coordinates, and the coordinates of the front focus of the second collimating objective lens 7 are (x, y). Without loss of generality, we assume that 0<x≤y, at this time, the phase shift of the interferogram corresponding to each point light source is the smallest The difference between phase shifts from small to large is: 0, The phase is reconstructed using a random phase shift algorithm. In particular, when (x,y) satisfies When , the difference between the phase shift of each interferogram and its minimum phase shift is 0, π/2, π, 3π/2 from small to large, and the phase is reconstructed using a four-step phase shift algorithm.
使用上述泰曼型点源阵列异位同步移相干涉仪测量的步骤为：The measurement steps of using the above-mentioned Tieman type point source array out-of-position synchronous phase-shifting interferometer are as follows:
1)打开点光源1并待其稳定；1) Turn on point light source 1 and wait for it to stabilize;
2)按泰曼干涉仪光路放置被测件，打开计算机及干涉图数据处理软件，调出实时采集到的干涉条纹；2) Place the test piece according to the optical path of the Tyman interferometer, open the computer and the interferogram data processing software, and call out the interference fringes collected in real time;
3)调节测试面10与参考面9相对分光棱镜的的距离差约为使得四幅干涉图之间从小到大依次产生约π/2相移量；3) Adjust the distance difference between the test surface 10 and the reference surface 9 relative to the dichroic prism to about Make the four interferograms produce about π/2 phase shift in order from small to large;
4)调整测试面10的位置和倾斜状态，使视场内条纹最少；4) Adjust the position and inclination of the test surface 10 to minimize the fringes in the field of view;
5)选取四幅干涉图的中心，在一帧CCD图像上提取出四幅干涉图；5) Select the centers of the four interferograms, and extract four interferograms on one frame of CCD image;
6)通过随机移相算法或者四步移相算法，对四幅干涉图进行计算，恢复出测试面面形或波像差。6) Calculate the four interferograms through the random phase shift algorithm or the four-step phase shift algorithm to recover the test surface shape or wave aberration.
实施例2Example 2
本发明泰曼型点源阵列异位同步移相干涉仪用于测量球面镜光路结构如图2所示，包括了，The Tieman-type point source array out-of-position synchronous phase-shifting interferometer of the present invention is used to measure the optical path structure of a spherical mirror as shown in Figure 2, including,
1)点光源1及其分光组件2用于产生四个复振幅相同但空间位置不同的发散球面波。分光组件包括第一准直物镜3、棋盘光栅4、第一会聚物镜5、孔径光阑6。点光源1经过第一准直物镜3与棋盘光栅4后产生多个衍射级次，经第一会聚物镜5会聚后，孔径光阑6滤出棋盘光栅4的(±1，±1)级四支光，并且滤除其它级次衍射光。这四个点光源分别位于正方形的四个顶点，且其所构成的正方形的中心不在主干涉仪的光轴上。正方形的边长d由棋盘光栅与会聚物镜确定。满足d＝2f1λ/Λ，其中f1为第一会聚物镜的焦距，λ为入射光波长，Λ为棋盘光栅的光栅周期。1) The point light source 1 and its light splitting component 2 are used to generate four diverging spherical waves with the same complex amplitude but different spatial positions. The beam splitting assembly includes a first collimating objective lens 3 , a checkerboard grating 4 , a first converging objective lens 5 , and an aperture stop 6 . The point light source 1 produces multiple diffraction orders after passing through the first collimating objective lens 3 and the checkerboard grating 4, and after being converged by the first converging objective lens 5, the aperture stop 6 filters out the (±1, ±1) order four of the checkerboard grating 4 branch light, and filter out other orders of diffracted light. The four point light sources are respectively located at the four vertices of the square, and the center of the square formed by them is not on the optical axis of the main interferometer. The side length d of the square is determined by the checkerboard grating and the converging objective. Satisfy d=2f1 λ/Λ, where f1 is the focal length of the first converging objective lens, λ is the wavelength of the incident light, and Λ is the grating period of the checkerboard grating.
2)主干涉仪，所述主干涉仪为泰曼型干涉仪，使分别从参考面和测试面反射回的两束光波形成干涉场，所述主干涉仪包括第二准直物镜7、分光棱镜8、参考面9和测试组件16，测试组件16包括显微物镜17和待测球面镜18。进入主干涉仪的四束光分别由第二准直物镜7扩束，经分光棱镜8后，通过参考面9并沿原光路返回的光作为参考光，通过显微物镜17会聚于待测球面镜18的球心，经球面镜18后沿原光路返回作为测试光，参考光和测试光分别经分光棱镜8透射和反射，进入分光成像组件11。2) the main interferometer, the main interferometer is a Tieman type interferometer, so that the two beams of light waves reflected back from the reference surface and the test surface respectively form an interference field, and the main interferometer includes a second collimating objective lens 7, a beam splitter The prism 8, the reference surface 9 and the test component 16, the test component 16 includes a microscope objective lens 17 and a spherical mirror 18 to be tested. The four beams of light entering the main interferometer are respectively expanded by the second collimating objective lens 7, and after passing through the dichroic prism 8, the light that passes through the reference surface 9 and returns along the original optical path is used as a reference light, and converges on the spherical mirror to be measured through the microscopic objective lens 17 The center of the sphere at 18 returns along the original optical path after passing through the spherical mirror 18 as test light.
3)分光成像组件11，用于将四个光源分别经参考面9与测试面10反射产生的干涉场在CCD15靶面上分开，并且使得CCD15靶面与测试面10共轭。分光成像组件11包括第二会聚物镜12、透镜阵列13、成像物镜14、CCD15。经参考面9与待测球面17反射回来的四组参考光与测试光，分别经过透镜阵列13中各个透镜的物方主点。透镜阵列13为2×2负透镜阵列，其每一个透镜的作用相当于场镜。焦距f2满足f2≈-dF#。其中F#为第二准直物镜7的F数。成像物镜14用于将经过透镜阵列13的四组参考光与测试光准直成平行光，并且使得在CCD15靶面上的四组光斑是分开的。成像物镜14的前焦面与透镜阵列13的像方主面重合。成像物镜14的焦距满足f3≤LF#/2，其中L为CCD15靶面的宽度。CCD15的靶面与待测球面17近似共轭，与成像物镜14像方主面之间的距离近似为3) The spectroscopic imaging component 11 is used to separate the interference fields generated by the reflection of the four light sources from the reference surface 9 and the test surface 10 on the CCD15 target surface, and make the CCD15 target surface and the test surface 10 conjugate. The spectroscopic imaging assembly 11 includes a second converging objective lens 12 , a lens array 13 , an imaging objective lens 14 , and a CCD 15 . The four sets of reference light and test light reflected by the reference surface 9 and the spherical surface 17 to be tested respectively pass through the object-side principal points of each lens in the lens array 13 . The lens array 13 is a 2×2 negative lens array, and each lens acts as a field lens. The focal length f2 satisfies f2 ≈-dF# . Wherein F# is the F number of the second collimating objective lens 7. The imaging objective lens 14 is used to collimate the four groups of reference light and the test light passing through the lens array 13 into parallel light, and to separate the four groups of light spots on the target surface of the CCD 15 . The front focal plane of the imaging objective lens 14 coincides with the image-side principal plane of the lens array 13 . The focal length of the imaging objective lens 14 satisfies f3 ≤ LF# /2, where L is the width of the target surface of the CCD 15 . The target surface of the CCD15 is approximately conjugate with the spherical surface to be measured 17, and the distance between the main surface of the image side of the imaging objective lens 14 is approximately
所述泰曼型点源阵列异位同步移相干涉仪用于测量球面镜的原理如下：The principle of the Tieman-type point source array out-of-position synchronous phase-shifting interferometer for measuring spherical mirrors is as follows:
如图3所示，当位于第二准直物镜7前焦面的四个点光源与其焦点存在一个横向错位距离r时，经过第二准直物镜7后的光束与光轴存在一个角度θ＝r/f4，其中f4为第二准直物镜7的焦距。从而在被参考面9与测试组件16反射所产生的干涉场中引入一个常数相移量。如图4所示，根据几何光学性质其相移量为δ(r)＝k(AD-AB-BC)＝-2Dcosθ，由于θ很小，在小角度近似可以得到δ(r)＝Dk(r/f4)2，这里忽略了一个常数相移因子-2Dk，其中D为参考臂与测试臂长的差值，k＝2π/λ为波矢。As shown in Figure 3, when the four point light sources positioned at the front focal plane of the second collimating objective lens 7 have a lateral misalignment distance r with their focal points, there is an angle θ= r/f4 , where f4 is the focal length of the second collimating objective lens 7 . A constant phase shift is thereby introduced into the interference field generated by reflections from the reference surface 9 and the test component 16 . As shown in Figure 4, according to the geometrical optics properties, its phase shift is δ(r)=k(AD-AB-BC)=-2Dcosθ, since θ is very small, approximation at small angles can get δ(r)=Dk( r/f4 )2 , a constant phase shift factor -2Dk is ignored here, where D is the difference between the length of the reference arm and the test arm, and k=2π/λ is the wave vector.
对于所述的泰曼型点源阵列异位同步移相干涉仪而言，点光源1通过分光组件2产生四个复振幅相同的点光源，如图5所示，以四个点光源的中心为坐标原点，第二准直物镜7的前焦点的坐标为(x,y)，不失一般性，我们假设0＜x≤y，此时每个点光源对应干涉图的相移量与其最小相移量之间差值从小到大依次为：0、采用随机移相算法重构相位。特别的，当(x,y)满足时，每幅干涉图的相移量与其最小相移量之间差值从小到大依次为0、π/2、π、3π/2，采用四步移相算法重构相位。For the Tieman-type point source array out-of-position synchronous phase-shifting interferometer, the point light source 1 generates four point light sources with the same complex amplitude through the light splitting component 2, as shown in Figure 5, with the center of the four point light sources is the origin of the coordinates, and the coordinates of the front focus of the second collimating objective lens 7 are (x, y). Without loss of generality, we assume that 0<x≤y, at this time, the phase shift of the interferogram corresponding to each point light source is the smallest The difference between phase shifts from small to large is: 0, The phase is reconstructed using a random phase shift algorithm. In particular, when (x,y) satisfies When , the difference between the phase shift of each interferogram and its minimum phase shift is 0, π/2, π, 3π/2 from small to large, and the phase is reconstructed using a four-step phase shift algorithm.
使用上述泰曼型点源阵列异位同步移相干涉仪测量的步骤为：The measurement steps of using the above-mentioned Tieman type point source array out-of-position synchronous phase-shifting interferometer are as follows:
1)打开点光源1并待其稳定；1) Turn on point light source 1 and wait for it to stabilize;
2)按泰曼干涉仪光路放置被测件，打开计算机及干涉图数据处理软件，调出实时采集到的干涉条纹；2) Place the test piece according to the optical path of the Tyman interferometer, open the computer and the interferogram data processing software, and call out the interference fringes collected in real time;
3)调节待测球面18与参考面9相对分光棱镜的的距离差约为使得四幅干涉图之间从小到大依次产生约π/2相移量；3) Adjust the distance difference between the spherical surface to be measured 18 and the reference surface 9 relative to the dichroic prism to be about Make the four interferograms produce about π/2 phase shift in order from small to large;
4)调整待测球面18的位置和倾斜状态，使视场内条纹最少；4) Adjust the position and inclination state of the spherical surface 18 to be tested so that the stripes in the field of view are at least;
5)选取四幅干涉图的中心，在一帧CCD图像上提取出四幅干涉图；5) Select the centers of the four interferograms, and extract four interferograms on one frame of CCD image;
6)通过随机移相算法或者四步移相算法，对四幅干涉图进行计算，恢复出测试面面形或波像差。6) Calculate the four interferograms through the random phase shift algorithm or the four-step phase shift algorithm to recover the test surface shape or wave aberration.
综上所述，本发明泰曼型点源阵列异位同步移相干涉仪，利用四个点光源与光轴的横向偏移在参考光与测试光的干涉场中引入相移，通过一帧图像恢复相位，实现了动态测量。由于没有偏振元件以及PZT等移相元件的引入，其成本低，结构紧凑，易于实现小型化。此外，测试过程简单，调整方便，对环境的要求较低，使测试更容易实现。To sum up, the Tieman-type point source array dislocation synchronous phase-shifting interferometer of the present invention uses four point light sources and the lateral offset of the optical axis to introduce a phase shift into the interference field of the reference light and the test light, and passes through a frame The image restores the phase and realizes the dynamic measurement. Since there is no polarizing element and the introduction of phase shifting elements such as PZT, its cost is low, its structure is compact, and it is easy to realize miniaturization. In addition, the test process is simple, easy to adjust, and has low requirements on the environment, making the test easier to implement.
| Application Number | Priority Date | Filing Date | Title |
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| CN201611187788.7ACN106643475A (en) | 2016-12-20 | 2016-12-20 | Twyman type point source array ectopic synchronous phase shift interferometer and measurement method thereof |
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| CN201611187788.7ACN106643475A (en) | 2016-12-20 | 2016-12-20 | Twyman type point source array ectopic synchronous phase shift interferometer and measurement method thereof |
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| CN201611187788.7APendingCN106643475A (en) | 2016-12-20 | 2016-12-20 | Twyman type point source array ectopic synchronous phase shift interferometer and measurement method thereof |
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