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CN106442723B - A passive sensor network and sensing method suitable for material surface parameter monitoring - Google Patents

A passive sensor network and sensing method suitable for material surface parameter monitoring
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CN106442723B
CN106442723BCN201610769033.1ACN201610769033ACN106442723BCN 106442723 BCN106442723 BCN 106442723BCN 201610769033 ACN201610769033 ACN 201610769033ACN 106442723 BCN106442723 BCN 106442723B
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acoustic wave
ultrasonic transducer
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CN106442723A (en
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冯雪
付际
韩志远
苏红宏
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Tsinghua University
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Abstract

The invention discloses a kind of passive sensing networks and method for sensing suitable for material surface parameter monitoring.The present invention is based on a kind of Multi-angle ultrasound energy converters of multi-direction transmitting, multiple surface acoustic wave sensing units are arranged around the energy converter, with material surface sheet as acoustical signal transmission channel, Multi-angle ultrasound energy converter provides instantaneous operating power source for surface acoustic wave sensing unit, and it receives surface acoustic wave sensing unit and returns to the monitoring signals of coming, and then read the measured material surface parameter of analysis;The present invention uses material surface as ultrasound-transmissive channel, so solve decaying, wiring and it is anti-interference the problems such as;Using the instantaneous working characteristics of surface acoustic wave sensing unit, its operating power source is provided using instantaneous acoustical signal, so that sensor itself no longer needs battery supplied;It realizes the multiposition of material surface multiple parameters in conjunction with multiple surface acoustic wave sensing units using Multi-angle ultrasound energy converter while measuring, and form measurement network.

Description

A kind of passive sensing network and method for sensing suitable for material surface parameter monitoring
Technical field
The invention belongs to detect sensory field, and in particular to a kind of passive sensing net suitable for material surface parameter monitoringNetwork and method for sensing.
Background technique
The physiological parameter of body surface includes temperature, humidity, amount of sweat, pH value and is caused by heartbeat, breathing and pulseBody surface deformation etc. indexs.These physiological parameters have directly reacted the state of human life activity, pass through the standard to these parametersReally measurement, can be monitored human health status, or carry out diagnosis and guided operation and medication to human body diseases.
Traditionally, external instrument, such as thermometer, hygrometer are depended on more to the method for this kind of body surface physiological parameter measurementOr sphygmomanometer etc..The use of this quasi-instrument needs the manual operation of user more, and the degree of automation and accuracy are relatively low, andThe data of single point in time, single position and single parameter can only be measured every time.And in recent years, with the development of science and technology, outThe a large amount of wearable smart machine, such as Intelligent bracelet, wrist-watch etc. for being used for body surface physiological compensation effects is showed.This kind of intelligence canThe characteristics of wearable device, is, automatic measurement and the storage of body surface physiological parameter may be implemented, and has reachedA relatively high accuracy.
However, the equipment of these current wearable devices haves the shortcomings that following two is great:
1, it can be only done the parameter measurement of the single position at wearable device and skin contact, and can not achieve multiple spot multidigitIt acquires or measures while setting, or measurement network cannot be formed;
2, this kind of acquisition equipment needs lasting power supply to supply, it is therefore desirable to built-in power, but due to wearable deviceVolume and weight cannot be excessive, therefore the power-on time of power supply is extremely limited, and then the working sensor time is caused to be limitedSystem.
Summary of the invention
In order to solve the problems, such as body surface multi-physiological-parameter multimetering, and solves the energy supply that sensor continues working and askTopic, the invention proposes the passive sensing networks for being suitable for material surface physiological compensation effects.The present invention is based on a kind of multi-directionThe Multi-angle ultrasound energy converter of transmitting arranges multiple surface acoustic wave sensing units, around the energy converter with material surface itselfFor acoustical signal transmission channel, Multi-angle ultrasound energy converter provides instantaneous operating power source, and reception sound for surface acoustic wave sensing unitSurface wave sensing unit returns to the monitoring signals of coming, and then reads the measured material surface supplemental characteristic of analysis.
An object of the present invention is to provide a kind of passive sensing networks suitable for material surface parameter monitoring.
Passive sensing network suitable for material surface parameter monitoring of the invention includes: control circuit, Multi-angle ultrasoundEnergy converter and multiple surface acoustic wave sensing units;Wherein, control circuit is electrically connected to Multi-angle ultrasound energy converter;Multi-angle is superSonic transducer half is embedded in detected materials surface;Multiple abutting measured material surfaces are arranged on the periphery of Multi-angle ultrasound energy converterSurface acoustic wave sensing unit;Control circuit issues control signal to multi-angle ultrasonic transducer, and the form for controlling signal is telecommunicationsNumber;Using Multi-angle ultrasound energy converter as communication node, using detected materials surface as communication channel, using acoustical signal as energy andThe carrier of signal carries out energy with each surface acoustic wave sensing unit for being arranged in Multi-angle ultrasound energy converter periphery or information passesIt is defeated;Multi-angle ultrasound energy converter converts the electrical signal to acoustical signal;Acoustical signal propagates surface acoustic wave sensing along detected materials surfaceUnit receives acoustical signal, perceives the measured material surface parameter around position, and will carry measured material surface parameter letterThe acoustical signal of breath is back to Multi-angle ultrasound energy converter by measured material surface;Multi-angle ultrasound energy converter changes acoustical signalAt control circuit is transmitted to after electric signal, the information on measured material surface is analyzed and extracted to control circuit, and then realizes to testedIt is monitored while material surface multiple spot multi-parameter.
Control circuit includes: that energy issues module and signal analysis module;Wherein, energy issues module and issues with energyControl signal, such as transient pulse etc., and be transmitted to Multi-angle ultrasound energy converter;Signal analysis module handles Multi-angle ultrasoundThe information on measured material surface is extracted and analyzed to the acoustical signal that energy converter receives.
Multi-angle ultrasound energy converter includes center mass layer, main piezo crystals lamella harmony matching layer;Wherein, center mass layerShape be polygon terrace with edge, the number of edges of polygon terrace with edge is 3~10, and center mass layer uses high density material;PolygonA piece of piezoelectric chip is respectively set in each side of the center mass layer of shape prismatic table shape, thus in the side of polygon terrace with edge oneWeek forms main piezo crystals lamella, keeps independent mutually in the piezoelectric chip of different directions;It is set in the outer surface of main piezo crystals lamellaSet one layer of acoustic matching layer;To form the Multi-angle ultrasound energy converter of polygon inverted trapezoidal shape, Multi-angle ultrasound energy converterUpper surface is less than lower surface, and the top half of Multi-angle ultrasound energy converter is embedded in measured material surface;Control circuit is electrically connected toMain piezo crystals lamella;Control circuit sends an electrical signal to main piezo crystals lamella, causes each mutual of center mass layer outer surfaceIndependent piezoelectric chip vibration, converts the electrical signal to acoustical signal, and center mass layer is guaranteed each mutually only by big inertiaFor vertical piezoelectric chip in vibration, Multi-angle ultrasound energy converter does not have big positional shift, and acoustic matching layer reduces acoustical signalEnergy attenuation when propagating from from Multi-angle ultrasound energy converter to measured material surface, improves propagation efficiency;When surface acoustic wave sensesWhen unit returns to the acoustical signal for carrying measured material surface parameter information by measured material surface, is reduced and passed by acoustic matching layerEnergy attenuation is broadcast, main piezo crystals lamella experiences vibration, converts acoustic signals into electric signal, and be transmitted to control circuit.
Surface acoustic wave sensing unit includes: surface acoustic wave transducing portion and surface acoustic wave transducing part, is passed through therebetweenConducting wire connection;Surface acoustic wave transducing portion receives the acoustical signal propagated along measured material surface, and acoustical signal is converted to telecommunicationsIt number is transmitted to surface acoustic wave transducing part, surface acoustic wave transducing part perceives the parameter on surrounding measured material surface, and will carryThe electric signal transmission of measured material surface parameter information to surface acoustic wave transducing portion, surface acoustic wave transducing portion turns electric signalIt is changed to acoustical signal, and Multi-angle ultrasound energy converter is transmitted to by measured material surface.The upper surface of surface acoustic wave transducing portionLess than lower surface, the top of surface acoustic wave transducing portion is partly embedded in measured material surface.
Surface acoustic wave transducing portion includes acoustic impedance matching layer, unit piezo crystals lamella and big quality structure layer;Wherein, existAcoustic impedance matching layer is arranged in the front surface of unit piezo crystals lamella, and big quality structure is arranged in the rear surface of unit piezo crystals lamellaLayer;Acoustic impedance matching layer faces Multi-angle ultrasound energy converter, so that low damply passing along the acoustical signal that measured material surface is propagatedSurface acoustic wave transducing portion is transported to, the receiving efficiency of surface acoustic wave transducing portion is improved;Unit piezo crystals lamella experiences vibrationAnd acoustical signal is converted into electric signal, it is transmitted to surface acoustic wave transducing part;Electric signal from surface acoustic wave transducing part drawsPlay the vibration of unit piezo crystals lamella, convert electrical signals to acoustical signal, big quality structure layer guarantee acoustical signal towards it is given forwardIt propagates in direction;Acoustic impedance matching layer makes acoustical signal is low damply to propagate to measured material surface, improves propagation efficiency.
Unit piezo crystals lamella is tabular, and the front surface of the rear surface of impedance matching layer and big quality structure layer is flatFace is separately positioned on the front surface and rear surface of unit piezo crystals lamella;The upper surface of impedance matching layer and big quality structure layerRespectively less than lower surface.The upper and lower surfaces of surface acoustic wave transducing portion are vertical with front surface and rear surface.
Surface acoustic wave transducing part includes piezoelectric sheet layer, sensitive layer and interdigital electrode;Wherein, piezoelectric sheet layer is as soundThe propagation medium of signal uses piezoelectric material;Sensitive layer and interdigital electrode are separately positioned on piezoelectric sheet layer;Interdigital electrode clothIt sets in the centre of piezoelectric sheet layer, or is arranged in the both ends for being located at sensitive layer on piezoelectric sheet layer;Interdigital electrode uses metalMaterial;The electric signal that unit piezo crystals lamella transmits is converted to acoustical signal and passed on the surface of piezoelectric sheet layer by interdigital electrodeIt broadcasts, sensitive layer perceives the parameter on surrounding measured material surface, when parameter (temperature, humidity) changes, sensitive layer and piezoelectricityLamella interaction, and influence acoustical signal surface wave propagation characteristic;Interdigital electrode will carry measured material surface parameter letterThe acoustical signal of breath is converted to electric signal, and is transmitted to unit piezo crystals lamella.
Measured material can be soft material, be also possible to hard material;If measured material is soft material, Multi-angle ultrasound is changedMeasured material surface is close in the upper surface of energy device and surface acoustic wave transducing portion, and applies in pressure indentation soft material, so that softMaterial deformation is recessed, so that the upper surface of Multi-angle ultrasound energy converter and surface acoustic wave transducing portion half is embedded in measured material tableIn face;It is preset with Multi-angle ultrasound energy converter harmony surface on measured material surface in advance if measured material is hard materialThe recess that wave transducing portion matches, so that the upper surface of the two half is embedded in measured material surface.
It is another object of the present invention to provide a kind of passive sensing networks suitable for material surface parameter monitoringMethod for sensing.
The method for sensing of passive sensing network suitable for material surface parameter monitoring of the invention, comprising the following steps:
1) control circuit issues control signal to multi-angle ultrasonic transducer, and the form for controlling signal is electric signal;
2) Multi-angle ultrasound energy converter converts the electrical signal to acoustical signal;
3) acoustical signal is propagated along detected materials surface;
4) surface acoustic wave sensing unit receives acoustical signal, and converts acoustic signals into electric signal;
5) the measured material surface parameter around surface acoustic wave sensing unit perception position;
6) acoustical signal for carrying measured material surface parameter information is passed through measured material surface by surface acoustic wave sensing unitIt is back to Multi-angle ultrasound energy converter;
7) Multi-angle ultrasound energy converter is transmitted to control circuit after acoustical signal is transformed into electric signal;
8) information on measured material surface is analyzed and extracted to control circuit, and then realizes and join to measured material surface multiple spot moreIt is monitored while number.
Wherein, in step 2), Multi-angle ultrasound energy converter converts the electrical signal to acoustical signal, specifically includes following stepIt is rapid:
A) electric signal sent from control circuit causes each mutual of center mass layer outer surface to main piezo crystals lamellaIndependent piezoelectric chip vibration, converts the electrical signal to acoustical signal;
B) center mass layer guarantees each mutually independent piezoelectric chip in vibration, multi-angle is super by big inertiaSonic transducer does not have big positional shift;
C) energy that acoustic matching layer reduces when acoustical signal is propagated from Multi-angle ultrasound energy converter to measured material surface declinesSubtract, improves propagation efficiency.
In step 3), the top half of Multi-angle ultrasound energy converter and surface acoustic wave transducing portion is embedded in measured material surfaceIt is interior, so that main piezo crystals lamella carries out acoustical signal communication propagation and unit piezoelectricity by acoustic matching layer and measured material surfaceWafer layer carries out acoustical signal communication by acoustic impedance matching layer and measured material surface and propagates.
In step 4), surface acoustic wave sensing unit receives acoustical signal, and converts acoustic signals into electric signal, specifically includesFollowing steps:
A) acoustic impedance matching layer faces Multi-angle ultrasound energy converter, so that low declining along the acoustical signal that measured material surface is propagatedIt is transmitted to surface acoustic wave transducing portion with subtracting;
B) unit piezo crystals lamella, which is experienced, vibrates and acoustical signal is converted to electric signal, is transmitted to surface acoustic wave detecting meansPoint.
In step 5), surface acoustic wave sensing unit perceives measured material surface parameter, specifically includes the following steps:
A) electric signal that unit piezo crystals lamella transmits is converted to acoustical signal and in the table of piezoelectric sheet layer by interdigital electrodeIt propagates in face;
B) parameter on sensitive layer perception surrounding measured material surface, when parameter changes, sensitive layer and piezoelectric sheetLayer interaction, and influence acoustical signal surface wave propagation characteristic;
C) acoustical signal for carrying measured material surface parameter information is converted to electric signal by interdigital electrode, and is transmitted to listFirst piezo crystals lamella.
In step 6), acoustical signal is back to Multi-angle ultrasound by measured material surface and changed by surface acoustic wave sensing unitEnergy device, specifically includes the following steps:
A) electric signal from surface acoustic wave transducing part causes unit piezo crystals lamella to vibrate, and converts electrical signals to soundSignal;
B) big quality structure layer guarantees that acoustical signal is propagated towards assigned direction;
C) acoustic impedance matching layer makes acoustical signal is low damply to propagate to measured material surface, improves propagation efficiency.
In step 7), acoustical signal is transformed into after electric signal by Multi-angle ultrasound energy converter is transmitted to control circuit, specificallyThe following steps are included:
A) acoustical signal of the carrying measured material surface parameter information returned by measured material surface, passes through acoustic matching layerSo that propagating to main piezoelectric chip with reducing energy attenuation;
B) main piezo crystals lamella experiences vibration, converts acoustic signals into electric signal, and be transmitted to control circuit.
In step 8), control circuit processing analysis extracts the information on measured material surface, specifically includes: control electricityThe acoustical signal that receives of signal analysis module processing Multi-angle ultrasound energy converter on road, the acoustical signal medium wave peak returned by monitoring itBetween time difference or the spectral characteristic of acoustical signal judge the feature of the inner material on measured material surface.
Passive sensing network of the invention can be used for the physiological parameter of engineering structure surface parameter measurement or human body surfaceMonitoring.
Advantages of the present invention:
Using the acoustical signal small feature of propagation attenuation on the surface of the material, use material surface as ultrasound-transmissive channel, intoAnd solve decaying, wiring and it is anti-interference the problems such as;Using the instantaneous working characteristics of surface acoustic wave sensing unit, instantaneous sound is usedSignal provides its operating power source, so that sensor itself no longer needs battery supplied;Using Multi-angle ultrasound energy converter, in conjunction with moreA surface acoustic wave sensing unit realizes the multiposition of material surface multiple parameters while measuring, and forms measurement network.
Detailed description of the invention
Fig. 1 is the schematic diagram of the passive sensing network suitable for material surface parameter monitoring of the invention;
Fig. 2 is the signal connection and acoustic-electric conversion of the passive sensing network suitable for material surface parameter monitoring of the inventionThe structural block diagram of mode;
Fig. 3 is the Multi-angle ultrasound energy converter of the passive sensing network suitable for material surface parameter monitoring of the inventionSchematic diagram, wherein (a) is shaft side figure, (b) is side view;
Fig. 4 be the passive sensing network suitable for material surface parameter monitoring of the invention Multi-angle ultrasound energy converter andThe schematic diagram of surface acoustic wave sensing unit communication;
Fig. 5 is the surface acoustic wave sensing unit of the passive sensing network suitable for material surface parameter monitoring of the inventionSchematic diagram, wherein (a) is top view, (b) is side view;
Fig. 6 is the song that the passive sensing network suitable for material surface parameter monitoring of the invention is used to detect human body temperatureLine chart.
Specific embodiment
With reference to the accompanying drawing, by specific embodiment, the present invention is further explained.
As shown in Figure 1, the passive sensing network suitable for material surface parameter monitoring of the present embodiment includes: control circuit3, Multi-angle ultrasound energy converter 1 and multiple surface acoustic wave sensing units 2;Wherein, control circuit is electrically connected to Multi-angle ultrasoundEnergy converter 1;Multi-angle ultrasound energy converter 1 half is embedded in detected materials surface 4;On the periphery of Multi-angle ultrasound energy converter, arrangement is multipleIt is close to the surface acoustic wave sensing unit 2 on measured material surface.Signal connection and acoustic-electric conversion regime are as shown in Figure 2.
As shown in figure 3, Multi-angle ultrasound energy converter includes center mass layer 13, main piezo crystals lamella 12 and acoustic matching layer11;Wherein, the shape of center mass layer 13 is 8 side shape terrace with edges, and center mass layer 13 uses high density material;In polygon terrace with edgeA piece of piezoelectric chip is respectively set in each side of the center mass layer of shape, to be formed within one week in the side of polygon terrace with edgeMain piezo crystals lamella 12 keeps independent mutually in the piezoelectric chip of different directions;It is arranged one in the outer surface of main piezo crystals lamellaLayer acoustic matching layer 13;To form the Multi-angle ultrasound energy converter of polygon inverted trapezoidal shape, Multi-angle ultrasound energy converter it is upperSurface is less than lower surface.In the present embodiment, the upper surface of the centrally disposed quality layers 13 of control circuit 3.
As shown in figure 4, Multi-angle ultrasound energy converter 1 using measured material surface as communication channel, is sensed with surface acoustic waveThe transmission of 2 acoustical signal of unit.
As shown in figure 5, surface acoustic wave sensing unit includes: surface acoustic wave transducing portion and surface acoustic wave transducing part;SoundSurface wave transducing portion includes acoustic impedance matching layer 21, unit piezo crystals lamella 22 and big quality structure layer 23;Wherein, in unitAcoustic impedance matching layer 21 is arranged in the front surface of piezo crystals lamella 22, and big quality structure is arranged in the rear surface of unit piezo crystals lamellaLayer 23.Surface acoustic wave transducing part includes piezoelectric sheet layer 24, sensitive layer 25 and interdigital electrode 26;Wherein, piezoelectric sheet layer 24Propagation medium as acoustical signal uses piezoelectric material;Sensitive layer 25 and interdigital electrode 26 are separately positioned on piezoelectric sheet layer;Interdigital electrode 26 is arranged in the both ends for being located at sensitive layer 25 on piezoelectric sheet layer.
Passive sensing network can be affixed on body surface, such as abdomen, back, upper limb or lower limb position, sensing networkCentral node is Multi-angle ultrasound transducer architecture 1, which is responsible for providing pulse energy and processing returns to the acoustical signals come.?Around Multi-angle ultrasound transducer architecture 1, it is furnished with multiple surface acoustic wave sensing units 2,1 harmony of Multi-angle ultrasound transducer architectureUsing human body as communication channel between surface wave sensing unit 2, energy is carried out as the carrier of energy and signal using sound wave or information passesIt is defeated.Surface acoustic wave sensing unit 2 can realize the measurement to a variety of physiological parameters, by taking abdomen as an example, the parameter that can be monitored include butIt is not limited to body temperature, heartbeat signal, breath signal, bladder signal etc..
When human body physiological parameter generation quantitatively changes, it will lead to the object properties of the sensitive layer of surface acoustic wave transducing partVariation, or directly result in surface acoustic wave transducing part physical characteristic itself and change, thus lead to surface acoustic wave detecting meansCorresponding quantitative variation can also occur for the velocity of wave or resonant frequency divided, therefore can pass through the acoustical signal medium wave peak of monitoring returnBetween time difference or the spectral characteristic of acoustical signal judge the characteristic of physiological signal.In addition, when interdigital electrode is arranged in pressureVelocity of wave variation when being located at the both ends of sensitive layer on electric lamella, in detectable signal;When interdigital electrode is arranged in piezoelectric sheetThe variation of resonant frequency when centre of layer, in detectable signal.
Here by taking the detection to human body temperature as an example, illustrate that surface acoustic wave sensing unit is to body surface signal used in the present inventionTesting principle:
When body surface temperature changes, the acoustic velocity that will lead to surface acoustic wave transducing part constituent material occursChange, the geometry spacing of interdigital electrode can also occur to change accordingly on surface acoustic wave transducing part.These variations will lead to soundQuantitative variation occurs for the resonant frequency of surface wave transducing part, also results in surface acoustic wave transducing part and is returning to energy converterSignal in, the time difference (that is, velocity of wave) between wave crest and wave crest changes.And as shown in fig. 6, the variation of shell temperature,It is in quantitative relationship between the frequency variation or the variation of velocity of wave of surface acoustic wave sensing unit, therefore can be passed from surface acoustic waveIt is poor by spectrum analysis or measurement peak peak time in the signal that sense part returns, carry out inverse body surface temperature.
In addition to for human body surface, which can also be used in engineering structure surface, such as: the measurement network can be setIn on aircraft, for detect flight each section whether by bird collisions or damage;The network can be set to long-span bridgeOn the drag-line of beam, for detecting the pulling force and Vibration Condition of drag-line;It can will change network on petroleum pipeline, for detecting oil leakAnd oil mass transmits situation.
It is finally noted that the purpose for publicizing and implementing example is to help to further understand the present invention, but this fieldTechnical staff be understood that without departing from the spirit and scope of the invention and the appended claims, it is various replacement and repairIt is all possible for changing.Therefore, the present invention should not be limited to embodiment disclosure of that, and the scope of protection of present invention is to weighSubject to the range that sharp claim defines.

Claims (10)

Translated fromChinese
1.一种适用于材料表面参数监测的无源传感网络,其特征在于,所述无源传感网络包括:控制电路、多角度超声换能器和多个声表面波传感单元;其中,所述控制电路电学连接至多角度超声换能器;所述多角度超声换能器半嵌入待测材料表面;在多角度超声换能器的周边布置多个紧贴被测材料表面的声表面波传感单元;所述控制电路发出控制信号至多角度超声换能器,控制信号的形式是电信号;以多角度超声换能器为通讯节点,以待测材料表面作为通讯信道,以声波作为能量和信号的载体与布置在多角度超声换能器周边的各个声表面波传感单元进行能量或信号传输;多角度超声换能器将电信号转换成声信号;声信号沿待测材料表面传播,声表面波传感单元接收声信号,感知所在位置周围的被测材料表面参数,并将携带被测材料表面参数信息的声信号通过被测材料表面返回至多角度超声换能器;所述多角度超声换能器将声信号转变成电信号后传输至控制电路,控制电路分析并提取被测材料表面参数信息,进而实现对被测材料表面多点多参数的同时监测。1. A passive sensor network suitable for monitoring material surface parameters, wherein the passive sensor network comprises: a control circuit, a multi-angle ultrasonic transducer and a plurality of surface acoustic wave sensing units; wherein , the control circuit is electrically connected to the multi-angle ultrasonic transducer; the multi-angle ultrasonic transducer is semi-embedded on the surface of the material to be measured; a plurality of acoustic surfaces that are close to the surface of the material to be measured are arranged around the multi-angle ultrasonic transducer wave sensing unit; the control circuit sends a control signal to the multi-angle ultrasonic transducer, and the control signal is in the form of an electrical signal; the multi-angle ultrasonic transducer is used as a communication node, the surface of the material to be tested is used as a communication channel, and the sound wave is used as a The carrier of energy and signal performs energy or signal transmission with each surface acoustic wave sensing unit arranged around the multi-angle ultrasonic transducer; the multi-angle ultrasonic transducer converts the electrical signal into an acoustic signal; the acoustic signal follows the surface of the material to be tested. Propagation, the surface acoustic wave sensing unit receives the acoustic signal, perceives the surface parameters of the tested material around the location, and returns the acoustic signal carrying the surface parameter information of the tested material to the multi-angle ultrasonic transducer through the surface of the tested material; the The multi-angle ultrasonic transducer converts the acoustic signal into an electrical signal and transmits it to the control circuit. The control circuit analyzes and extracts the surface parameter information of the measured material, thereby realizing the simultaneous monitoring of multiple points and multi-parameters on the surface of the measured material.2.如权利要求1所述的无源传感网络,其特征在于,所述多角度超声换能器包括中心质量层、主压电晶片层和声匹配层;其中,所述中心质量层的形状为多边形棱台,多边形棱台的边数为3~10个,所述中心质量层采用高密度材料;在多边形棱台形的中心质量层的每一个侧面分别设置一片压电晶片,从而在多边形棱台的侧面一周形成主压电晶片层,在不同方向的压电晶片保持互相独立;在主压电晶片层的外表面设置一层声匹配层;从而形成多边形倒梯台形状的多角度超声换能器,所述多角度超声换能器的上表面小于下表面,多角度超声换能器的上部半嵌入被测材料表面;所述控制电路电学连接至主压电晶片层;控制电路发出电信号至主压电晶片层,引起中心质量层外表面的各个互相独立的压电晶片振动,将电信号转换成声信号,中心质量层通过大的惯性,保证各个相互独立的压电晶片在振动时,多角度超声换能器不偏移,声匹配层降低声信号从多角度超声换能器向被测材料表面传播时的能量衰减;当声表面波传感单元通过被测材料表面返回携带被测材料表面参数信息的声信号时,通过声匹配层降低传播能量衰减,主压电晶片层感受到振动,将声信号转换成电信号,并传输至控制电路。2. The passive sensor network according to claim 1, wherein the multi-angle ultrasonic transducer comprises a central mass layer, a main piezoelectric wafer layer and an acoustic matching layer; wherein, the central mass layer has a The shape is a polygonal prism, the number of sides of the polygonal prism is 3 to 10, and the central mass layer is made of high-density materials; a piezoelectric wafer is respectively arranged on each side of the central mass layer of the polygonal prism, so that the A main piezoelectric wafer layer is formed around the side of the prism, and the piezoelectric wafers in different directions are kept independent of each other; an acoustic matching layer is arranged on the outer surface of the main piezoelectric wafer layer; thus a multi-angle ultrasonic wave in the shape of a polygonal inverted terrace is formed. transducer, the upper surface of the multi-angle ultrasonic transducer is smaller than the lower surface, and the upper part of the multi-angle ultrasonic transducer is half embedded in the surface of the material to be tested; the control circuit is electrically connected to the main piezoelectric wafer layer; the control circuit sends out The electrical signal is sent to the main piezoelectric wafer layer, causing each independent piezoelectric wafer on the outer surface of the central mass layer to vibrate, converting the electrical signal into an acoustic signal. When vibrating, the multi-angle ultrasonic transducer does not shift, and the acoustic matching layer reduces the energy attenuation of the acoustic signal when it propagates from the multi-angle ultrasonic transducer to the surface of the measured material; when the surface acoustic wave sensing unit returns through the surface of the measured material When the acoustic signal carries the surface parameter information of the tested material, the attenuation of the propagating energy is reduced through the acoustic matching layer, and the main piezoelectric wafer layer feels the vibration, converts the acoustic signal into an electrical signal, and transmits it to the control circuit.3.如权利要求1所述的无源传感网络,其特征在于,所述声表面波传感单元包括:声表面波换能部分和声表面波传感部分,二者之间通过导线连接;所述声表面波换能部分接收沿被测材料表面传播的声信号,并将声信号转换为电信号传输至声表面波传感部分,所述声表面波传感部分感知周围被测材料表面的参数,并将携带被测材料表面参数信息的电信号传输至声表面波换能部分,声表面波换能部分将电信号转换为声信号,并通过被测材料表面传输至多角度超声换能器。3. The passive sensor network according to claim 1, wherein the surface acoustic wave sensing unit comprises: a surface acoustic wave transducing part and a surface acoustic wave sensing part, which are connected by wires The surface acoustic wave transducing part receives the acoustic signal propagating along the surface of the material to be tested, and converts the acoustic signal into an electrical signal and transmits it to the surface acoustic wave sensing part, and the surface acoustic wave sensing part senses the surrounding material to be tested The parameters of the surface, and transmit the electrical signal carrying the surface parameter information of the tested material to the surface acoustic wave transducing part. energy device.4.如权利要求3所述的无源传感网络,其特征在于,所述声表面波换能部分包括声阻抗匹配层、单元压电晶片层和大质量结构层;其中,在单元压电晶片层的前表面设置声阻抗匹配层,在单元压电晶片层的后表面设置大质量结构层;声阻抗匹配层面对多角度超声换能器,使得沿被测材料表面传播的声信号低衰减地传输至声表面波换能部分,提高声表面波换能部分的接收效率;单元压电晶片层感受到振动并将声信号转换为电信号,传输至声表面波传感部分;来自声表面波传感部分的电信号引起单元压电晶片层振动,将电信号转换为声信号,大质量结构层保证声信号向前传播;声阻抗匹配层使得声信号低衰减地传播至被测材料表面。4. The passive sensor network according to claim 3, wherein the surface acoustic wave transducing part comprises an acoustic impedance matching layer, a unit piezoelectric wafer layer and a large-mass structure layer; wherein, in the unit piezoelectric The front surface of the wafer layer is provided with an acoustic impedance matching layer, and the rear surface of the unit piezoelectric wafer layer is provided with a large-mass structure layer; the acoustic impedance matching layer faces the multi-angle ultrasonic transducer, so that the acoustic signal propagating along the surface of the tested material has low attenuation ground transmission to the surface acoustic wave transducing part to improve the receiving efficiency of the surface acoustic wave transducing part; the unit piezoelectric wafer layer senses the vibration and converts the acoustic signal into an electrical signal, and transmits it to the surface acoustic wave sensing part; from the acoustic surface The electrical signal of the wave sensing part causes the piezoelectric wafer layer to vibrate, and converts the electrical signal into an acoustic signal. The large-mass structure layer ensures that the acoustic signal propagates forward; the acoustic impedance matching layer enables the acoustic signal to propagate to the surface of the measured material with low attenuation. .5.如权利要求4所述的无源传感网络,其特征在于,所述声表面波传感部分包括压电薄片层、敏感层和叉指电极;其中,所述压电薄片层作为声信号的传播介质采用压电材料;所述敏感层和叉指电极分别设置在压电薄片层上;所述叉指电极布置在压电薄片层的中间,或者布置在压电薄片层上位于敏感层的两端;叉指电极采用金属材料;叉指电极将单元压电晶片层传来的电信号转换为声信号并在压电薄片层的表面传播,敏感层感知周围被测材料表面的参数,当参数发生变化时,敏感层与压电薄片层相互作用,并影响声信号表面波传播特性;叉指电极将携带有被测材料表面参数信息的声信号转化成电信号,并传输至单元压电晶片层。5. The passive sensor network according to claim 4, wherein the surface acoustic wave sensing part comprises a piezoelectric sheet layer, a sensitive layer and an interdigital electrode; wherein, the piezoelectric sheet layer acts as an acoustic The signal propagation medium adopts piezoelectric material; the sensitive layer and the interdigital electrode are respectively arranged on the piezoelectric sheet layer; The two ends of the layer; the interdigital electrode is made of metal material; the interdigital electrode converts the electrical signal from the unit piezoelectric wafer layer into an acoustic signal and propagates on the surface of the piezoelectric sheet layer, and the sensitive layer senses the parameters of the surface of the surrounding material to be measured. , when the parameters change, the sensitive layer interacts with the piezoelectric sheet layer and affects the surface wave propagation characteristics of the acoustic signal; the interdigital electrode converts the acoustic signal carrying the surface parameter information of the measured material into an electrical signal and transmits it to the unit Piezoelectric wafer layer.6.如权利要求1所述的无源传感网络,其特征在于,所述被测材料是软材料,或者是硬材料;如果被测材料是软材料,多角度超声换能器和声表面波换能部分的上表面紧贴被测材料表面,并施加压力压入软材料内,使得软材料变形发生凹陷,从而多角度超声换能器和声表面波换能部分的上面半嵌入被测材料表面内;如果被测材料是硬材料,则事先在被测材料表面预置与多角度超声换能器和声表面波换能部分相匹配的凹陷,从而使得二者的上面半嵌入被测材料表面内。6. The passive sensor network according to claim 1, wherein the measured material is a soft material or a hard material; if the measured material is a soft material, the multi-angle ultrasonic transducer and the acoustic surface The upper surface of the wave transducing part is close to the surface of the material to be measured, and pressure is applied to press it into the soft material, so that the soft material is deformed and dented, so that the upper surface of the multi-angle ultrasonic transducer and the surface acoustic wave transducing part are half embedded in the measured material. In the surface of the material; if the material to be tested is a hard material, a depression that matches the multi-angle ultrasonic transducer and the surface acoustic wave transduction part is preset on the surface of the tested material, so that the upper surface of the two is semi-embedded in the tested material. within the surface of the material.7.一种如权利要求1所述的适用于材料表面参数监测的无源传感网络的传感方法,其特征在于,所述传感方法包括以下步骤:7. A sensing method for a passive sensor network suitable for monitoring material surface parameters as claimed in claim 1, wherein the sensing method comprises the following steps:1)控制电路发出控制信号至多角度超声换能器,控制信号的形式是电信号;1) The control circuit sends a control signal to the multi-angle ultrasonic transducer, and the control signal is in the form of an electrical signal;2)多角度超声换能器将电信号转换成声信号;2) The multi-angle ultrasonic transducer converts electrical signals into acoustic signals;3)声信号沿待测材料表面传播;3) The acoustic signal propagates along the surface of the material to be tested;4)声表面波传感单元接收声信号,并将声信号转换成电信号;4) The surface acoustic wave sensing unit receives the acoustic signal and converts the acoustic signal into an electrical signal;5)声表面波传感单元感知所在位置周围的被测材料表面参数;5) The surface acoustic wave sensing unit senses the surface parameters of the measured material around the location;6)声表面波传感单元将携带被测材料表面参数信息的声信号通过被测材料表面返回至多角度超声换能器;6) The surface acoustic wave sensing unit returns the acoustic signal carrying the surface parameter information of the tested material to the multi-angle ultrasonic transducer through the surface of the tested material;7)多角度超声换能器将声信号转变成电信号后传输至控制电路;7) The multi-angle ultrasonic transducer converts the acoustic signal into an electrical signal and transmits it to the control circuit;8)控制电路分析并提取被测材料表面的信息,进而实现对被测材料表面多点多参数的同时监测。8) The control circuit analyzes and extracts the information on the surface of the tested material, thereby realizing the simultaneous monitoring of multiple points and multi-parameters on the surface of the tested material.8.如权利要求7所述的传感方法,其特征在于,在步骤2)中,多角度超声换能器将电信号转换成声信号,具体包括以下步骤:8 . The sensing method according to claim 7 , wherein, in step 2), the multi-angle ultrasonic transducer converts the electrical signal into an acoustic signal, which specifically includes the following steps: 9 .a) 从控制电路发来的电信号至主压电晶片层,引起中心质量层外表面的各个互相独立的压电晶片振动,将电信号转换成声信号;a) The electrical signal sent from the control circuit to the main piezoelectric wafer layer causes each independent piezoelectric wafer on the outer surface of the central mass layer to vibrate, converting the electrical signal into an acoustic signal;b) 中心质量层通过大的惯性,保证各个相互独立的压电晶片在振动时,多角度超声换能器不会有大的位置偏移;b) The central mass layer has a large inertia to ensure that the multi-angle ultrasonic transducer will not have a large position deviation when each independent piezoelectric wafer vibrates;c) 声匹配层降低了声信号从多角度超声换能器向被测材料表面传播时的能量衰减,提高传播效率。c) The acoustic matching layer reduces the energy attenuation of the acoustic signal when it propagates from the multi-angle ultrasonic transducer to the surface of the tested material, and improves the propagation efficiency.9.如权利要求7所述的传感方法,其特征在于,在步骤5)中,声表面波传感单元感知被测材料表面参数,具体包括以下步骤:9 . The sensing method according to claim 7 , wherein, in step 5), the surface acoustic wave sensing unit senses the surface parameters of the material to be measured, which specifically includes the following steps: 10 .a) 叉指电极将单元压电晶片层传来的电信号转换为声信号并在压电薄片层的表面传播;a) The interdigital electrode converts the electrical signal from the unit piezoelectric wafer layer into an acoustic signal and propagates on the surface of the piezoelectric sheet layer;b) 敏感层感知周围被测材料表面的参数,当参数发生变化时,敏感层与压电薄片层相互作用,并影响声信号表面波传播特性;b) The sensitive layer senses the parameters on the surface of the material to be measured. When the parameters change, the sensitive layer interacts with the piezoelectric thin layer and affects the surface wave propagation characteristics of acoustic signals;c) 叉指电极将携带有被测材料表面参数信息的声信号转化成电信号,并传输至单元压电晶片层;c) The interdigital electrode converts the acoustic signal carrying the surface parameter information of the tested material into an electrical signal, and transmits it to the unit piezoelectric wafer layer;所述声表面波传感单元包括:声表面波换能部分和声表面波传感部分,二者之间通过导线连接;所述声表面波换能部分接收沿被测材料表面传播的声信号,并将声信号转换为电信号传输至声表面波传感部分,所述声表面波传感部分感知周围被测材料表面的参数,并将携带被测材料表面参数信息的电信号传输至声表面波换能部分,声表面波换能部分将电信号转换为声信号,并通过被测材料表面传输至多角度超声换能器;所述声表面波换能部分包括声阻抗匹配层、单元压电晶片层和大质量结构层;其中,在单元压电晶片层的前表面设置声阻抗匹配层,在单元压电晶片层的后表面设置大质量结构层;声阻抗匹配层面对多角度超声换能器,使得沿被测材料表面传播的声信号低衰减地传输至声表面波换能部分,提高声表面波换能部分的接收效率;单元压电晶片层感受到振动并将声信号转换为电信号,传输至声表面波传感部分;来自声表面波传感部分的电信号引起单元压电晶片层振动,将电信号转换为声信号,大质量结构层保证声信号向前传播;声阻抗匹配层使得声信号低衰减地传播至被测材料表面。The surface acoustic wave sensing unit includes: a surface acoustic wave transducing part and a surface acoustic wave sensing part, which are connected by a wire; the surface acoustic wave transducing part receives the acoustic signal propagating along the surface of the tested material , and convert the acoustic signal into an electrical signal and transmit it to the surface acoustic wave sensing part. The surface wave transducing part converts electrical signals into acoustic signals and transmits them to the multi-angle ultrasonic transducer through the surface of the material to be measured; the surface acoustic wave transducing part includes an acoustic impedance matching layer, a unit voltage The piezoelectric wafer layer and the large-mass structure layer; wherein, an acoustic impedance matching layer is arranged on the front surface of the unit piezoelectric wafer layer, and a large-mass structure layer is arranged on the rear surface of the unit piezoelectric wafer layer; the acoustic impedance matching layer faces the multi-angle ultrasonic transducer. The transducer enables the acoustic signal propagating along the surface of the material to be tested to be transmitted to the SAW transducing part with low attenuation, thereby improving the receiving efficiency of the SAW transducing part; the unit piezoelectric wafer layer senses the vibration and converts the acoustic signal into The electrical signal is transmitted to the SAW sensing part; the electrical signal from the SAW sensing part causes the unit piezoelectric wafer layer to vibrate, converts the electrical signal into an acoustic signal, and the large-mass structural layer ensures that the acoustic signal propagates forward; The impedance matching layer enables the acoustic signal to propagate to the surface of the measured material with low attenuation.10.如权利要求7所述的传感方法,其特征在于,在步骤6)中,声表面波传感单元将声信号通过被测材料表面返回至多角度超声换能器,具体包括以下步骤:10 . The sensing method according to claim 7 , wherein, in step 6), the surface acoustic wave sensing unit returns the acoustic signal to the multi-angle ultrasonic transducer through the surface of the material to be measured, and specifically includes the following steps: 11 .a) 来自声表面波传感部分的电信号引起单元压电晶片层振动,将电信号转换为声信号;a) The electrical signal from the surface acoustic wave sensing part causes the unit piezoelectric wafer layer to vibrate, converting the electrical signal into an acoustic signal;b) 大质量结构层保证声信号朝给定方向传播;b) The large-mass structural layer ensures that the acoustic signal propagates in a given direction;c) 声阻抗匹配层使得声信号低衰减地传播至被测材料表面,提高传播效率;c) The acoustic impedance matching layer enables the acoustic signal to propagate to the surface of the tested material with low attenuation, improving the propagation efficiency;所述声表面波传感单元包括:声表面波换能部分和声表面波传感部分,二者之间通过导线连接;所述声表面波换能部分接收沿被测材料表面传播的声信号,并将声信号转换为电信号传输至声表面波传感部分,所述声表面波传感部分感知周围被测材料表面的参数,并将携带被测材料表面参数信息的电信号传输至声表面波换能部分,声表面波换能部分将电信号转换为声信号,并通过被测材料表面传输至多角度超声换能器;所述声表面波换能部分包括声阻抗匹配层、单元压电晶片层和大质量结构层;其中,在单元压电晶片层的前表面设置声阻抗匹配层,在单元压电晶片层的后表面设置大质量结构层;声阻抗匹配层面对多角度超声换能器,使得沿被测材料表面传播的声信号低衰减地传输至声表面波换能部分,提高声表面波换能部分的接收效率;单元压电晶片层感受到振动并将声信号转换为电信号,传输至声表面波传感部分;来自声表面波传感部分的电信号引起单元压电晶片层振动,将电信号转换为声信号,大质量结构层保证声信号向前传播;声阻抗匹配层使得声信号低衰减地传播至被测材料表面。The surface acoustic wave sensing unit includes: a surface acoustic wave transducing part and a surface acoustic wave sensing part, which are connected by a wire; the surface acoustic wave transducing part receives the acoustic signal propagating along the surface of the tested material , and convert the acoustic signal into an electrical signal and transmit it to the surface acoustic wave sensing part. The surface wave transducing part converts electrical signals into acoustic signals and transmits them to the multi-angle ultrasonic transducer through the surface of the material to be measured; the surface acoustic wave transducing part includes an acoustic impedance matching layer, a unit voltage The piezoelectric wafer layer and the large-mass structure layer; wherein, an acoustic impedance matching layer is arranged on the front surface of the unit piezoelectric wafer layer, and a large-mass structure layer is arranged on the rear surface of the unit piezoelectric wafer layer; the acoustic impedance matching layer faces the multi-angle ultrasonic transducer. The transducer enables the acoustic signal propagating along the surface of the material to be tested to be transmitted to the SAW transducing part with low attenuation, thereby improving the receiving efficiency of the SAW transducing part; the unit piezoelectric wafer layer senses the vibration and converts the acoustic signal into The electrical signal is transmitted to the SAW sensing part; the electrical signal from the SAW sensing part causes the unit piezoelectric wafer layer to vibrate, converts the electrical signal into an acoustic signal, and the large-mass structural layer ensures that the acoustic signal propagates forward; The impedance matching layer enables the acoustic signal to propagate to the surface of the measured material with low attenuation.
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