Summary of the invention
The disclosure is directed to the actuator for the platform for having electrical connector for mobile or positioning.One embodiment of actuatorIncluding one or more Comb drive actuators for applying control force between inner frame and outer framework.The platform may includeOptoelectronic device or imaging sensor.Comb drive actuators in some embodiments of the present disclosure using MEMS comb actuator andTechnique is to realize high-caliber micromation, precision and power efficiency.Therefore, the actuator of the disclosure is to be highly applicable to as exampleCamera in the environment (smart phone etc.) of space-bound provides optical image stabilization and automatic focusing capability.
According to one embodiment of the disclosure, a kind of actuator for the mobile platform with electrical connector includes by oneA or more spring element is connected to the outer framework of inner frame.MEMS technology manufacture actuator can be used.In this embodimentSpring element be it is conductive.In an example is implemented, spring element routes electric signal between outer framework and inner frame.?In another example, each spring element includes first end and the second end.First end, which is connected to, to be placed on outer frameworkFirst electrical contact pad, and the second end is connected to the second electrical contact pad being placed on inner frame.Spring element may include siliconAnd/or metal and can be flexible on all one-movement-freedom-degrees.
Actuator also includes one or more pectination driving actuatings for applying control force between outer framework and inner frameDevice.In one embodiment, the first Comb drive actuators apply control force in a first direction, and the driving of the second pectination causesDynamic device applies control force in a second direction.In an example of actuator is implemented, first direction is substantially normal to secondDirection.Each Comb drive actuators may include one or more comb actuators (for example, electrostatic comb drive).?In one example, each Comb drive actuators include the first comb actuator of the first length and the second pectination of the second lengthDriver.First length is different from the second length.In another embodiment, each Comb drive actuators include motion controlPart and inner frame is connected to by deflection member.
In an example embodiment of actuator, Comb drive actuators are attached to solid by machinery relative to outer frameworkFixed center fixed structure.In one example, center fixed structure is mechanically fixed against by platform relative to outer framework.At oneIn embodiment, platform is made of silicon and is optoelectronic device or imaging sensor.
According to another embodiment of the present disclosure, a kind of actuator of encapsulation includes circuit board, MEMS actuator, is mounted onOptoelectronic device in MEMS actuator, and capping.Cover package of MEMS actuator and optoelectronic device.Capping is attached to circuit board simultaneouslyAnd including window.In one embodiment, optoelectronic device is the imaging sensor for being coupled to MEMS actuator.In the actuating of encapsulationIn one example embodiment of device, MEMS actuator is number of substantially flat in the planes.In this example, MEMS actuatorIt is configured to move on two linear DOFs in the planes.In various embodiments, various MEMS actuators can be usedAny amount of freedom degree is realized in configuration.In another example, MEMS actuator is further configured in the planes oneIt is moved on a rotary freedom.Further embodiment can use different MEMS actuator configurations to realize additional rotation certainlyBy spending.
In an additional embodiment of the actuator of encapsulation, MEMS actuator includes one or more fixing to centerStructure applies the Comb drive actuators of control force, which is mechanically fastened relative to outer framework.Each combIt includes one or more comb actuators that shape, which drives actuator,.Further, MEMS actuator include by it is one or more canThe outer framework of inner frame is connected to conductive spring element.
The disclosure also includes a kind of method for the mobile platform with electrical connector, and wherein the platform has to being electrically connectedThe routing of fitting.This method includes that outer framework is connected to inner frame using one or more electrically conductive spring elements.Method further comprises generating control force using one or more Comb drive actuators, and each Comb drive actuators wrapInclude one or more comb actuators.Additionally, method, which is included between outer framework and inner frame, applies control force.At oneIn embodiment, control force includes the first force component and the second force component, and the first force component and the second power in this embodimentComponent substantially orthogonal to.
In one embodiment, method further comprises being mechanically fixed against center fixed structure relative to outer framework.?In this embodiment, control force is applied to center fixed structure.In another example embodiment, including pass through spring elementElectric signal is routed to the optoelectronic device for being attached to center fixed structure.In this example, optoelectronic device is by center fixed structureIt is mechanically fixed against relative to outer framework.
According to another embodiment of the present disclosure, a kind of method for encapsulating micro-actuator includes by MEMS actuatorIt is mechanically and electrically connected on flat (or printing) circuit board (PCB)；Imaging sensor is mechanically and electrically connected toIn MEMS actuator；And use the capping package of MEMS actuator and imaging sensor with window.In one embodiment,Solder is used to MEMS actuator being attached to PCB.In another embodiment, conductive epoxy resin is used for imaging sensor is attachedIt is connected to MEMS actuator.Imaging sensor for being attached to by the ink of the metallic with nano-scale in another exampleMEMS actuator.
Specific embodiment
The disclosure be directed to for the mobile system of platform with electrical connector, the various embodiments of method and apparatus andIncluding their encapsulation.System in the disclosure, some example embodiments of method and apparatus are elaborated in the following descriptionDetails.For those skilled in the art, according to the examination to this specification, attached drawing, example and claimed range, this public affairsOther feature, target and the advantage opened will be obvious.It is intended to (the packet such as all such spare systems, method, apparatus, feature and advantageInclude the modification to them) it is included in this specification including within the scope of this disclosure, and by appended claimedOne or more protections in range.
According to embodiment described further herein, various actuators are provided.These actuators are (including their envelopeDress) it can be used in a series of different environment, for example, portable electronic device, miniature camera, optics telecommunication portionPart and medical instrument.The feature of disclosed actuator allows generally for the with high accuracy multiple degrees of freedom in these varying environmentsMobile or locating platform simultaneously realizes low power consumption and is highly compact.Therefore, the disclosed embodiments surmount conventional solutionCertainly scheme, provides significant benefit, and for example, optical image stabilization and automatic focusing capability provides significant benefit.
Referring now to the drawings, Fig. 1 shows a kind of plane of comb actuator 10 according to an example embodiment of the present disclosureFigure.Comb actuator 10 can be electrostatic comb drive.Comb actuator 10 may include comb teeth array 15 and comb teeth array16, MEMS technology (such as photoetching and etching) can be used and manufacture the comb teeth array on silicon.
As shown in Figure 1, comb teeth array 16 includes comb teeth 11 and the spine 12 that comb teeth 11 is connected to each other.Similarly, comb teethArray 15 includes comb teeth 13 and the spine 14 that comb teeth 13 is connected to each other.Comb teeth 11 and comb teeth 13 can cross one another, so that combSpace 17 of the tooth 11 substantially between comb teeth 13 is aligned, and space 18 of the comb teeth 13 substantially between comb teeth 13 is aligned.
When applying voltage between comb teeth 11 and comb teeth 13, comb teeth array 16 and comb teeth array 15 are by the voltage with applicationSquare proportional electrostatic force attract one another or repel.The electrostatic force can cause 16 direction of comb teeth array 15 and comb teeth arrayIt each other or is moved away from each other, this depends on the polarity of electrostatic force (or voltage).Additionally, comb teeth array 15 and comb teeth array 16The speed being moved relative to each other can depend on the electrostatic force applied.In general, the design of comb actuator 10 is so that comb teeth 11And comb teeth 13 can pull into overlap condition by the electrostatic force between comb teeth array 15 and comb teeth array 16 or push open from overlap condition.When comb teeth array 15 and comb teeth array 16 are overlapped, comb teeth 11 is at least partly resided in the space 17 of comb teeth array 15, andComb teeth 13 at least partly resides in the space 18 of comb teeth array 16.
Can choose the ratio of comb teeth width and depth to avoid comb teeth 11 and comb teeth 13 overlapping when comb teeth 11 bend to combIn tooth 13.For example, comb teeth 11 and/or comb teeth 13 can be about 6 microns wide and about 150 microns long.In general, comb teeth 11 and/Or comb teeth 13 can about 1 micron and 10 microns wide with about 20 microns between 500 microns of length.Become again when by electrostatic forceWhen overlapping state, the distance between two adjacent fingers 11 (or 13) are subtracted by one width in corresponding comb teeth 13 (or 11) and setThe total backlash between comb teeth 11 and comb teeth 13 is determined.In some instances, it may be desirable that the total backlash is relatively small to be combed to increaseElectrostatic force between tooth 11 and comb teeth 13.Furthermore, it may also be desirable to which total backlash is sufficiently large to cope with comb teeth caused by technique change11 and/or comb teeth 13 change width.For example, total backlash can be about 5 microns to 10 microns.
The depth of comb teeth 11 and comb teeth 13 can be limited generally by used specific manufacturing process, and specifically by thisThe etching depth-to-width ratio of technique limits, this is because the general width that may expect the comb teeth 11 on top and comb teeth 13 substantially withComb teeth 11 and comb teeth 13 on bottom it is of same size.(in terms of the depth that comb teeth 11 and comb teeth 13 is not shown in Fig. 1, stillIt extends in the page or extends out from the page.) for example, the depth of comb teeth 11 and comb teeth 13 can about 50 microns extremely250 microns.Space 17 and space 18 can be completely etched away, or can be by known in MEMS micro-cutting manufacture fieldOther methods remove.
Fig. 2A shows a kind of plan view of Comb drive actuators according to an example embodiment of the present disclosure.Such as Fig. 2A instituteShow, shown Comb drive actuators include comb teeth array 15 and comb teeth array 16 (some details such as spine 12 and ridgePortion 14 is shown in FIG. 1 but is not shown in fig. 2), the first frame unit 21 and the second frame unit 19.Although not in fig. 2 in detailIt carefully shows, but comb teeth 11 in comb teeth array 15 and comb teeth array 16 and comb teeth 13 from left to right extend, vice versa.Comb teeth battle arrayThe spine 14 of column 15 can be attached to the second frame unit 19, and the spine 12 of comb teeth array 16 can be attached to the first frame unit21.Configured in this way, when comb teeth array 15 and comb teeth array 16 attract one another or repel each other so that occurring mobile, similarly drawIt is mobile (for example, in fig. 2 from left to right or vice versa) to play the first frame unit 21 and the second frame unit 19.
Fig. 2 B shows a kind of plan view of Comb drive actuators 20 according to the example embodiment in the disclosure.Such as Fig. 2 BShown, one embodiment of Comb drive actuators 20 includes one or more pectinations driving arranged in a manner of substantially parallelDevice 10.In the specific embodiment of Fig. 2 B, nine comb actuators 10, but the various embodiments of Comb drive actuators 20 are shownIt may include the comb actuator 10 of any quantity, size and shape.Comb drive actuators 20 further comprise the first frame22, the second frame 24 and motion control 26.First frame 22 is shown with stairstepping to consider Comb drive actuatorsThe various length of comb actuator 10 shown in 20 this specific embodiment.Even so, but in other embodiments, such asIn wherein all comb actuators 10 embodiment consistent in length, the shape of the first frame 22 can change to be attached to pectinationThe end of driver 10.In the embodiment illustrated, the correspondence of the stairstepping of the first frame 22 and comb actuator 10 is graduallyContracting length allows the occupied space of actuator 30 to reduce, such as will be shown in figure 3 a.10 length of comb actuator, shape, arrangementOther variations with configuration can be used to implement control force, the occupied space of all size of different degrees of, direction and/or precisionWith other characteristics, as those skilled in the art according to the disclosure research understand.
Although the details of each comb actuator 10 is not shown in fig. 2b, in the embodiment shown by Fig. 2 B, ridgePortion 12 is connected to the first frame 22 and spine 14 is connected to the second frame 24.Fig. 2A shows a kind of side that can wherein do soMethod.In various embodiments, the spine 14 of comb teeth array 15 and the spine 12 of comb teeth array 16 can be attached to different configurationsFirst frame 22 and the second frame 24 are to realize different purposes.For example, in one embodiment, for one group of comb actuatorEach comb actuator 10, spine 12 is attached to the first frame 22 and spine 14 is attached to the second frame 24.This configuration is put downThe cascade comb actuator 10 of row, this can increase the electrostatic force for being finally applied to the first frame 22 and the second frame 24.AnotherIn one example embodiment, comb actuator 10 is to arrange in back-to-back fashion to realize way moving.In this configuration, forFirst comb actuator 10, spine 12 is connected to the first frame 22 and spine 14 is connected to the second frame 24.However, forTwo comb actuators 10, spine 12 is connected to the second frame 24 and spine 14 is connected to the first frame 22.This configuration is permittedPerhaps the comb actuator 10 of way moving being placed back to back.
Further relate to Comb drive actuators 20, in various examples, comb actuator spine 12 and spine 14 andFirst frame 22 and the second frame 24 can be designed to be sufficiently wide and enough depths to be under the electrostatic force of the range appliedRigidly and do not bend substantially.For example, spine 12 and spine 14 can be about it is 20 microns to 100 microns wide and about 50 microns extremely250 microns of depths, and the first frame 22 and the wide of the second frame 24 can be greater than about 50 microns and can be greater than about 50 microns deeplyTo 250 microns.
As mentioned above, one embodiment of Comb drive actuators 20 also includes motion control 26, will combThe movement of tooth array 15 and comb teeth array 16 is limited to be basically parallel to the length of comb teeth 11 and comb teeth 13 (for example, in fig. 2bFrom left to right).In an example embodiment of the disclosure, motion control 26 is double parallel flex motion control piece, allAs shown in figure 2b.Double parallel flex motion control piece can produce approximately linear movement, but there may be referred to as arcShape movement is slightly away from.Even so, between the gap on the side of comb teeth 11 can be not equal on the other side of comb teeth 11Gap, and this can in design advantageously correct influences, such as arcuate movement of double parallel flex motion control piece.
Referring again to the embodiment of Comb drive actuators 20 shown by Fig. 2 B, motion control 26 is double parallel flexureComponent.Even so, motion control 26 may include for controlling the other of the movement of the first frame 22 and the second frame 24Structure.Each motion control 26 in shown embodiment is included in relatively thin in the respective end of motion control 26Part 25 and thinner part 27.When being translated there are the first frame 22 relative to the second frame 24, thinner part 25 and thinner27 are divided to allow to be bent.In terms of size, the thicker portion of motion control 26 can be, for example, about 10 microns to 50 microns wide,And thinner part 25 and thinner part 27 can be about 1 micron to 10 microns wide.In various embodiments, it can according to needUse the control of motion control 26 of any several amount and type or the movement of limitation comb teeth array 15 and comb teeth array 16.Controlled fortuneThe dynamic overall accuracy that the movement of actuator 30 or locating platform 45 (referring to Fig. 3 A and Fig. 3 B) can be improved.
Fig. 3 A shows the plan view of actuator 30 according to an example embodiment of the present disclosure.Fig. 3 B is shown according to the disclosureThe cross-sectional view of the actuator 30 of example embodiment.As shown in Figure 3A, actuator 30 includes by one or more spring elements 33It is connected to the outer framework 32 of inner frame 34.Further, actuator 30 includes one or more in outer framework 32 and inner frame 34Between apply control force (for example, the electrostatic force formed by voltage) Comb drive actuators 20.Due to actuator 30 make it is accurate,Controlled and variable power can be applied to inner frame 34 and outer framework 32 with multiple degrees of freedom (e.g., including linear and rotate)Between and the occupied space of highly compact can be used to implement, the embodiment of actuator 30 is suitable for mobile having electrical connectorPlatform (for example, 45).Moreover, actuator 30, which can use MEMS device, reduces power.Therefore, actuator 30 surmounts conventional solutionCertainly scheme is by size, power, the optical image stabilization of cost and performance restriction on the parameters and automatic focusing application (such as this paper instituteIn the smart phone and other application stated) multiple benefits are provided.
As with reference to being explained Fig. 2 B, each Comb drive actuators 20 include one or more comb actuators 10.Spring element 33 can be conductive and can be flexible on all one-movement-freedom-degrees.In various embodiments, springElectric signal is routed to the electrical contact pad on inner frame 34 by element 33 from the electrical contact pad on outer framework 32.In example embodimentIn, spring element 33 in one direction, both direction, occur on three directions or all four directions from inner frame 34.
In one embodiment, actuator 30 is made using MEMS technology (such as photoetching and silicon etch).At oneIn embodiment, actuator 30 moves +/- 150 microns in the planes, and spring element 33 allow the motion range through design andBe not in contact with each other (for example, so as to routing individual electric signal on various spring elements 33).For example, spring element 33 canThink about 1 micron to 5 microns of thickness, it is wide about 2 microns to 20 microns and in the planes about 150 microns to 1000 microns multiplied by about150 microns to 1000 microns of S-shaped deflection member.
For 33 low resistance of spring element conductive, spring element 33 may include the polysilicon, silicon, gold of such as heavy dopingBelong to (for example, aluminium), their combination and other conductive materials, alloy etc..For example, spring element 33 can be made of polysiliconAnd it is coated with substantially 2000 angstroms thick of aluminium, the metal stack object of nickel and gold.In one embodiment, some 33 quilts of spring elementIt is designed to be different from other spring elements 33, to control the movement between outer framework 32 and inner frame 34.For example, four to eightThe device thickness that a (or some other quantity) spring element 33 can have is between about 50 microns and 250 microns.Such thicknessDegree can slightly limit flat out-of-plane movement of the outer framework 32 relative to inner frame 34.
In another embodiment, actuator 30 includes center fixed structure 36, and one or more pectinations driveActuator 20 applies control force between inner frame 34 and center fixed structure 36.In this embodiment, the first frame 22 connectsIt to center fixed structure 36 or is the component part of center fixed structure 36.One or more Comb drive actuators 20 can be withIt is otherwise attach to center fixed structure 36, and center fixed structure 36 can be relative to outer framework 32 by mechanically solidIt is fixed.In one example, the second frame 24 is connected to inner frame 34 by deflection member 35, which combs accordinglyShape driving actuator the direction of motion on be relative rigid and be in that orthogonal direction flexible relative.This can permit interiorFrame 34 carries out controlled motion relative to outer framework 32, and therefore allows more accurately to position.
In some embodiments of actuator 30, outer framework 32 discontinuously surrounds the periphery of actuator 30, and is divided intoTwo pieces, three pieces or more.For example, Fig. 3 C and Fig. 3 D show the plan view of actuator 30 according to an example embodiment of the present disclosureAnd cross-sectional view, wherein, outer framework 32 is divided into two segments and spring element 33 only occurs in both direction.Similarly,In various embodiments, inner frame 34 can be continuous or can be divided into segment.
As shown in Figure 3A, it amounts to and is being caused there may be four Comb drive actuators, 20-two Comb drive actuators 20It is activated on a direction in the plane of dynamic device 30 and other two Comb drive actuators 20 is in the plane of actuator 30Orthogonal direction on activate.The various other arrangements of Comb drive actuators 20 are possible.Such arrangement may include it is more orIt less Comb drive actuators 20 and can be activated in more or fewer freedom degrees (for example, triangular form, five sidesShape form, form of hexagons etc.), as those skilled in the art is readily apparent that according to the research to the disclosure.
In one embodiment, platform 45 is attached to outer framework 32 and is attached to center fixed structure 36.In this way,Platform 45 can be fixed (and/or vice versa) relative to center fixed structure 36 by outer framework 32.Then inner frame 34It can be relative to both outer framework 32 and center fixed structure 36 and mobile also relative to platform 45.In one embodiment,Platform 45 is silicon platform.In various embodiments, platform 45 is optoelectronic device or imaging sensor, such as charge-coupled device(CCD) or complementary metal oxide semiconductor (CMOS) imaging sensor.
The size of actuator 30 shown in Fig. 3 B can be substantially identical as the size of platform 45, and platform 45 can be attachedIt is connected to outer framework 32 and center fixed structure 36, therefore center fixed structure is mechanically fixed against relative to outer framework 32.OneIn a example embodiment, platform 45 is the OV8835 that the format optical of panoramic vision (omni vision) company is 1/3.2 "Imaging sensor.In this embodiment, the size of both actuator 30 and platform 45 can be equal to about 6.41mm multiplied by5.94mm.As shown in Figure 3D, in an embodiment of actuator 30, platform 45 is smaller than actuator 30, and platform 45 is attachedIt is connected to inner frame 34.In this particular embodiment.Outer framework 32 is fixed about inner frame 34, and inner frame 34 passes through various combsShape drives actuator 20 mobile.
Fig. 4 A shows a kind of cross-sectional view of the actuator 40 of encapsulation according to an example embodiment of the present disclosure.The actuating of encapsulationSome embodiments of device 40 can be worked in a manner of being substantially similar to actuator 30.Similarly, the actuator 40 of encapsulationIt can be used for moving with pinpoint accuracy, low-power and low cost and using compact occupied space and/or locating platform.CauseThis, the actuator 40 of encapsulation can be adapted in the camera of electronic apparatus, medical device etc., as described herein and abilityWhat the technical staff in domain was understood.Moreover, the actuator 40 of encapsulation surmounts conventional solution in this field and provides multiple benefitsPlace, as described above.In one embodiment of the actuator 40 of encapsulation, 42 (such as example of actuator 30 and other electric componentsSuch as capacitor, resistor or IC chip) it is attached to flat (or printing) circuit board (PCB) 41.For example, 41 PCBIt can be made of multi-layer ceramics or composite plastic material (such as FR4) and may include for electric signal to be routed through PCB41 copper tracing wire.
Fig. 4 A is shown, and in one embodiment, platform 45 (it can be such as imaging sensor) is attached to actuator 30,And the shell 47 with window 48 is attached to PCB 41.In this way, shell 47 encapsulates actuator 30 and platform 45.Shell47 can be made for black plastic shell or of various other materials or have other colors.
Fig. 4 B shows the first step of the actuator 40 according to the assembly encapsulation of one embodiment of the disclosure.Actuator 30 and itsIts electric component 42 can be attached to PCB 41 via electric contact 51 and electric contact 52.It is, for example, possible to use solders and standard scaleSurface mount technology (SMT) technique completes such attachment.Likewise it is possible to will weldering before actuator 30 is placed on PCB 41Cream is deposited on electric contact 51 and electric contact 52.Alternatively, soldering paste can be put after actuator 30 is placed on PCB 41It sets on the top of actuator 30.In other examples, these methods can use.
Then entire assembly parts can be placed in reflow soldering with melt soldering paste and make soldering paste flow and causing respectivelyReliable electric contact 51 and electric contact 52 are established between other electric components 42 and PCB 41 between dynamic device 30 and PCB 41.RingOxygen resin can be used for further strengthening the adherency between actuator 30 and PCB 41 after reflow, for some other electricityGas component 42 is executable.This SMT industry in be referred to as underfill (under fill) technique, and usually with upside-down mounting coreBlade technolgy is used together.
Fig. 4 C shows the second step of the actuator 40 according to the assembly encapsulation of one embodiment of the disclosure.As shown, flatPlatform 45 can be used conductive material 54 and be attached to actuator 30 to realize electrical contact close to the edge of platform.Additionally, the second materialMaterial 53 can be used for for platform 45 being connected to the center fixed structure 36 close to 45 center of platform.
In one embodiment, platform 45 is the imaging sensor for being able to bear reflux temperature, and conductive material 51 isSolder.In another embodiment, platform 45 is that the image with colour filter and the lenticule that cannot bear high reflux temperature passesSensor, so that lower temperature process can be preferably.In which case it is possible to use having the gold of nano-scaleBelong to the material of particle to utilize the relatively low melting temperature for the metal for being formed as small size particles.Such as material of gold nano ink can be withFor on the electric contact 51 and electric contact 52 that are injected on the actuator 40 of encapsulation and with about 100 degrees Celsius of low temperature refluxInk.Selective lower temperature process materials include such as anisotropic conductive film (ACF) and conductive epoxy resin.
In one embodiment, the second material 53 is material identical with conductive material 54.This, which can be reduced, is assigned to causeThe quantity of material on dynamic device 30.In another embodiment, the second material 53 is nonconducting.For example, the second material 53 canThink structural epoxy resin or adheres to the adhesive of silicon or silica.
The last exemplary step for assembling the actuator 40 of encapsulation is to encapsulate actuator 30 using the shell 47 for including window 48With platform 45.In one embodiment, window 48, which has, such as filters off and will be detected by imaging sensor (for example, platform 45)To and cause color artifacts invisible infrared (IR) light filter properties.In one embodiment, shell 47 is blackSo that the transmission and reflection minimized of stray light.In various embodiments, shell 47 can be made by a variety of materials plastics etc.At and can be various colors.
Fig. 5 shows the embodiment of the method 500 for the mobile platform with electrical connector, and wherein platform has to being electrically connectedThe routing of fitting.The operation of method 500 is realized for example using electrostatic comb drive in such as intelligent hand of the environment of limited spaceIt high-precision and expeditiously moves and locating platform in machine.This allows to meet the cost of such environment, space and energy requirementOptical image stabilization and/or automatic focusing capability.
As illustrated in FIG. 5, method 500 includes, in operation 505, using the spring element 33 of one or more conductionsOuter framework 32 is connected to inner frame 34.In operation 510, method 500 includes using one or more Comb drive actuators20 generate control force, and each Comb drive actuators 20 include one or more comb actuators 10.Additionally, it is operating515, method 500, which is included between outer framework 32 and inner frame 34, applies control force.
The additional embodiment of method 500 includes, in operation 520, being routed to electric signal by spring element 33 and being attached toThe optoelectronic device (for example, platform 45) of center fixed structure 36.In this example, optoelectronic device is opposite by center fixed structure 36It is mechanically fixed against in outer framework 32.In one embodiment of method 500, control force includes the first force component and the second power pointAmount, and the first force component and the second force component are orthogonal to realize two freedom degrees.
In general, various systems as described herein and/or dress can be used in the various operations of method described herein 500The component or feature set and their corresponding components and subassembly are completed and can be associated.Moreover, in various realitiesIt applies in example, herein in regard to feature and function described in Fig. 1, Fig. 2A, Fig. 2 B, Fig. 3 A to Fig. 3 D and Fig. 4 A to Fig. 4 C in addition to by realityIt applies to may be implemented as operating method (for example, method 500) except the part of system or device.It is ground according to the disclosureStudy carefully, those skilled in the art will recognize that how to implement disclosed method using disclosed device, and vice versa.
The extension word and phrase occurred in some instances such as " one or more ", " at least ", " but being not limited to "Or other similar phrases be not to be read as referring to may be intended to or require in the example without such extension phrase it is relatively narrowSituation.
In addition, describing various embodiments described in this paper according to example block diagram, flow chart and other examples.It is readdingAfter reader text, it will become apparent that, reality can not be limited by illustrated example for those skilled in the artApply the various optinal plans of embodiment described and they.For example, block diagram and their corresponding description are not necessarily to be construed asIt is required that specific structure and configuration.
Although the various embodiments of the disclosure are described above, it will be appreciated that, they are only with the side of exampleFormula is presented, rather than is limited.Similarly, various figures can describe the exemplary construction or other configurations of the disclosure, do so and helpIt can be including feature and function in the disclosure in understanding.The present disclosure is not limited to illustrated exemplary construction or configurations, butA variety of selective structures and configuration are able to use to realize desired character.It really, for those skilled in the art will be obvious, how alternative function, logic or physical division and configuration realize the desired character of the disclosure.In addition, closingIn flow chart, operation description and claim to a method, unless context is it is further noted that the sequence of step presented herein should notIt asks and each embodiment is implemented to execute stated function with identical sequence.
Although describing the disclosure according to various example embodiments and embodiment above, it should be appreciated that at one or moreVarious features, aspect and function described in multiple separate embodiments are not limited to be applied to their specific embodiment of description, andBe can individually or with one or more other embodiments of various combined applications to the disclosure, no matter such embodiment whetherNo matter being described and whether such feature being provided as a part of the embodiment.Therefore, the range and model of the disclosureEnclosing should not be limited by any of example embodiment described above, and it will be appreciated by those skilled in the art that can be withVarious changes and modifications are made to previous description in required range.