A kind of calibration system and method for mass flow controllerTechnical field
The present invention relates to semiconductor technology control technology fields, more particularly to a kind of MFC's (mass flow controller)Calibration system and method.
Background technology
The production process of semiconductor is related to reacting for gas and semiconductor chip, and the flow of gas will be to process resultsIt has an important influence on.Therefore, in order to enable the semiconductor of production to reach higher yields, it is necessary to flowing into gas to chamberFlow is accurately controlled.In particular with the continuous improvement of semiconductor technology integrated level, to the error requirements of gas flowIt further increases.
Wherein, mass flow controller (Mass Flow Controller, MFC) is a kind of for being carried out to gas flowThe accurate device for measuring, controlling.In the routine maintenance procedure of MFC, need using MFC calibration flow detection MFC accuracy beNo decline, the i.e. survey calculation to the accuracy for the gas to chamber flow for entering semiconductor manufacturing equipment, to detect whether MFC needsIt adjusts.
That is, semiconductor equipment, which is substantially all, can be equipped with MFC (gas flow controller), to control process gas streamAmount, to meet the requirement of technique, which just needs to calibrate every one section of period, and otherwise gas flow will have partially with setting valueDifference.The usual way of MFC calibrations at this stage is to measure MFC operating voltages, if being higher than certain numerical value, it is necessary to it resets, it is realNow calibrate, and the step of this process, especially measurement voltage, take a long time, an equipment, for having ten MFC,Board MFC prover times need 10 hours, time-consuming and laborious.
Invention content
In order to overcome the deficiencies of the above existing technologies, purpose of the present invention is to provide the calibration system of MFC a kind of andMethod is controlled by will be all drawn out on integrated manipulator at the voltage jointer of all MFC using controller realization one by oneEvery MFC is made, when needing to calibrate certain MFC, is pushed the control of this MFC switch using controller control " state of on "To realize the voltage measurement of this MFC, and when the voltage value measured is higher than setting value, by controller end control shouldThe control switch of MFC pushes the end " Zero " and realizes clearing, has been effectively saved the prover time of MFC.
In view of the above and other objects, the present invention proposes a kind of calibration system of MFC, including：
The voltage jointer of N MFC, each MFC are all connected to integrated manipulator, and control each MFC by the integrated manipulatorControl switch；
Integrated manipulator, the control for controlling each MFC one by one switchs so that each MFC is in calibration state, acquisition one by oneThe voltage value that each MFC is measured, and the control switch for corresponding to MFC is controlled according to the voltage value of each MFC of acquisition.
Further, which includes：
Voltage value acquiring unit, the voltage value measured for obtaining each MFC；
Control unit, the control for controlling each MFC one by one switchs so that each MFC is in calibration state, and root one by oneIt is judged that the control switch of the judging result control MFC of unit；
The voltage value that each MFC is measured is compared by judging unit with preset setting value, and by comparison result send toThe control unit.
Further, when the judging result of the judging unit is that the voltage value that certain MFC is measured is more than preset setting valueWhen, the control switch of the corresponding MFC of control unit control makes the MFC be converted to cleared condition by calibration state.
Further, which switchs the state for pushing " ON " with reality by controlling one by one by the control of each MFCThe now voltage measurement of every MFC.
Further, which pushes the state of " Zero " to realize by controlling to switch the control of corresponding MFCThe MFC is set to be converted to cleared condition by calibration state.
Further, which further includes computer end, which connects the integrated manipulator, to obtain the integrated controlThe voltage value that each MFC that device obtains is measured, and shown.
In order to achieve the above objectives, the present invention also provides a kind of calibration method of MFC, include the following steps：
Step 1 will all lead to an integrated manipulator, by the integrated control at all MFC voltage jointers to be calibratedDevice controls the control switch of all MFC；
Step 2, the control which controls each MFC one by one switchs so that each MFC is in calibration shape one by oneState, and obtain the voltage value that each MFC is measured；
Each MFC of the acquisition voltage values measured are compared with preset setting value by step 3 respectively, according to comparingOutput control corresponds to the control switch of MFC.
Further, in step 3, when the voltage value that certain MFC of acquisition is measured is higher than preset setting value, controlThe control switch of the corresponding MFC of system makes the MFC be in cleared condition.
Further, in step 2, the control of each MFC is switched into the state for pushing " ON " with reality by controlling one by oneThe now voltage measurement of every MFC.
Further, in step 3, the state of " Zero " is pushed to realize by controlling to switch the control of corresponding MFCThe MFC is set to be converted to cleared condition by calibration state.
Compared with prior art, the calibration system and method for a kind of MFC of the present invention is by will be at the voltage jointer of all MFCIt is all drawn out on integrated manipulator, every MFC is controlled one by one using controller realization, when needing to calibrate certain MFC, profitThe control of this MFC switch is pushed with controller control " state of on " is to realize the voltage measurement of this MFC, and in measuringVoltage value when being higher than setting value, the control of this MFC switch pushed into the end " Zero " by controller end control realize and reset,It has been effectively saved the prover time of MFC.
Description of the drawings
Fig. 1 is a kind of system architecture diagram of the calibration system of MFC of the present invention；
Fig. 2 is the structural schematic diagram of integrated manipulator in present pre-ferred embodiments；
Fig. 3 is a kind of step flow chart of the calibration method of MFC of the present invention.
Specific implementation mode
Below by way of specific specific example and embodiments of the present invention are described with reference to the drawings, those skilled in the art canUnderstand the further advantage and effect of the present invention easily by content disclosed in the present specification.The present invention can also pass through other differencesSpecific example implemented or applied, details in this specification can also be based on different perspectives and applications, without departing substantially fromVarious modifications and change are carried out under the spirit of the present invention.
Fig. 1 is a kind of system architecture diagram of the calibration system of MFC of the present invention.As shown in Figure 1, a kind of school of MFC of the present inventionBarebone, including：N number of MFC1-MFCN and integrated manipulator 10.
The voltage jointer of N number of MFC1-MFCN is all connected to integrated manipulator 10, and is controlled respectively by integrated manipulator 10The control of MFC switchs；Integrated manipulator 10 controls each MFC one by one, control one by one each MFC control switch so that each MFC one by oneIn calibration state, i.e., integrated manipulator 10 controls one by one pushes the state of " ON " with reality by the control switch of each MFCThe now voltage measurement of every MFC, and the voltage value that each MFC is measured is obtained, and it is higher than preset setting in the voltage value of acquisitionWhen value, controlling the control switch of corresponding MFC makes the MFC be in cleared condition, so that the calibration of this MFC is terminated, that is, when integrated controlWhen the voltage value that certain MFC that device 10 processed obtains is measured is more than preset value, the control switch for controlling this MFC pushes the end " Zero "It realizes and resets, the calibration of this MFC is terminated.
Fig. 2 is the structural schematic diagram of integrated manipulator in present pre-ferred embodiments.As shown in Fig. 2, integrated manipulator 10Further comprise：Voltage value acquiring unit 101, control unit 102 and judging unit 103, voltage value acquiring unit 101 are used forObtain the voltage value that each MFC is measured；Control unit 102, the control for controlling each MFC one by one switchs so that each MFC is in school one by oneQuasi-operating status, and switched according to the control of the judging result of judging unit 103 control MFC so that MFC is by calibration stateCleared condition is converted to, specifically, being preset when the judging result of judging unit 103 is more than for the voltage value that certain MFC is measuredSetting value when, control unit 102 then control corresponding MFC control switch so that the MFC is converted to clearing by calibration stateState makes the calibration of this MFC terminate；Judging unit 103 compares voltage value and preset setting value that each MFC is measuredCompared with, and comparison result is sent to control unit 102.
Preferably, the calibration system of the MFC of the present invention further includes computer end 20, which has display device, withIntegrated manipulator 10 connects, the voltage value that each MFC to obtain the acquisition of integrated manipulator 10 is measured, and is shown.
Fig. 3 is a kind of step flow chart of the calibration method of MFC of the present invention.As shown in figure 3, a kind of school of MFC of the present inventionQuasi- method, includes the following steps：
Step 301, an integrated manipulator will be all led at all MFC voltage jointers to be calibrated, and is integrated by thisController controls the control switch of all MFC.
Step 302, which controls the control switch of each MFC so that each MFC is in calibration one by one one by oneState, and obtain the voltage value that each MFC is measured.It is controlled one by one by the integrated manipulator and dials the control switch of each MFCTo the state of " ON " to realize the voltage measurement of every MFC, and obtain the voltage value that each MFC is measured.
Step 303, each MFC of the acquisition voltage values measured are compared with preset setting value respectively, according to thanCompared with the control switch that output control corresponds to MFC.Specifically, when the voltage value that certain MFC obtained is measured is set higher than presetWhen definite value, controlling the control switch of corresponding MFC makes the MFC be in cleared condition, so that the calibration of this MFC is terminated, that is, when integratedWhen the voltage value that certain MFC that controller obtains is measured is higher than preset setting value, the control switch for controlling this MFC pushesThe end " Zero ", which is realized, to reset, i.e., terminates to the calibration of this MFC.
As it can be seen that the calibration system and method for a kind of MFC of the present invention at the voltage jointer of all MFC by will all be drawn out toOn integrated manipulator, every MFC is controlled one by one using controller realization, when needing to calibrate certain MFC, utilizes controller controlSystem pushes the control of this MFC switch " state of on " is and high in the voltage value measured to realize the voltage measurement of this MFCWhen setting value, the control switch of this MFC is pushed into the end " Zero " by controller end control and realizes clearing, is effectively savedThe prover time of MFC, it is demonstrated experimentally that through the invention, the calibration of ten MFC only needs two hours, compared with prior art10 hours needed for calibrating mode, the present invention was effectively saved the prover time of MFC.
The above-described embodiments merely illustrate the principles and effects of the present invention, and is not intended to limit the present invention.AnyField technology personnel can without violating the spirit and scope of the present invention, and modifications and changes are made to the above embodiments.Therefore,The scope of the present invention, should be as listed in the claims.