技术领域technical field
本发明涉及工件表面形貌质量检测技术领域，特别涉及一种测量力可控的电磁轴承自倾斜式微位移传感器系统。The invention relates to the technical field of workpiece surface topography quality detection, in particular to an electromagnetic bearing self-tilting micro-displacement sensor system with controllable measuring force.
背景技术Background technique
接触式位移传感器是形貌测量仪器的核心器件，广泛地用于工业在线和离线工件的表面形貌测量检测和表征。The contact displacement sensor is the core device of the shape measuring instrument, which is widely used in the surface shape measurement, detection and characterization of industrial online and offline workpieces.
对于实体探针接触式形貌测量仪器，实体探针与被测工件之间测量力将直接影响被测工件在检测过程中的损失程度以及实体探针的使用寿命。若测量力过大，探针尖端容易磨损和折断，降低测量精度和缩短探针的使用寿命，同时被测工件表面易被探针形成永久性损伤；若测量力较小，探针运动无法与被测工件保持良好接触，容易出现探针的跳动，粘滑失稳等现象，降低探针对被测工件表面变化的跟随能力和测量精度。因此针对不同材质和不同面型特征的被测工件，应该控制不同的测量力，以获得最佳的检测质量。For the physical probe contact shape measuring instrument, the measurement force between the physical probe and the measured workpiece will directly affect the loss degree of the measured workpiece during the detection process and the service life of the physical probe. If the measurement force is too large, the tip of the probe is easy to wear and break, reducing the measurement accuracy and shortening the service life of the probe. At the same time, the surface of the workpiece to be measured is easily damaged by the probe; if the measurement force is small, the movement of the probe cannot If the workpiece under test is kept in good contact, it is prone to jumping of the probe, stick-slip instability and other phenomena, which will reduce the ability of the probe to follow the surface changes of the workpiece under test and the measurement accuracy. Therefore, for the measured workpieces of different materials and different surface characteristics, different measuring forces should be controlled to obtain the best detection quality.
当前实体探针接触式形貌测量仪器的测量力实现方式主要有以下几种：①探针与弹性元件连接，利用弹性元件的弹力提供所需的测量力。在这种方式中，测量力会随着工件表面形貌的变化而改变，不能恒定保持和自主调节。②利用音圈电机与弹性元件结合的复合式结构提供和调节测量力。在这种方式中，通过电感线圈的反馈电压改变音圈电机的输入电压调节探针与被测工件之间的相对位置，从而改变测量力。虽然此种方式能够得到较小且相对恒定的测量力，但需要引入实时反馈控制系统，系统结构复杂且测量过程耗时。There are mainly the following ways to realize the measurement force of the current physical probe contact shape measuring instrument: ①The probe is connected to the elastic element, and the elastic force of the elastic element is used to provide the required measurement force. In this way, the measurement force will change with the change of the surface topography of the workpiece, and cannot be kept constant and adjusted autonomously. ②The composite structure combining the voice coil motor and the elastic element is used to provide and adjust the measuring force. In this way, the feedback voltage of the inductance coil changes the input voltage of the voice coil motor to adjust the relative position between the probe and the workpiece to be measured, thereby changing the measurement force. Although this method can obtain a small and relatively constant measurement force, it needs to introduce a real-time feedback control system, the system structure is complex and the measurement process is time-consuming.
发明内容Contents of the invention
为解决以上实体探针接触式形貌测量仪器在测量力调节方面的技术难题，实现对测量力的灵活调控，发明人发明了一种测量力可控的电磁轴承自倾斜式微位移传感器系统。该传感器系统采用的技术方案如下：In order to solve the above-mentioned technical problems in the measurement force adjustment of the physical probe contact type shape measuring instrument and realize the flexible control of the measurement force, the inventor invented an electromagnetic bearing self-tilting micro-displacement sensor system with controllable measurement force. The technical scheme adopted by the sensor system is as follows:
本发明涉及一种测量力可控的电磁轴承自倾斜式微位移传感器系统，主要包括：测头模块、测头支撑模块、位移检测模块、测量力调节模块、轴承控制模块、位移信号采集模块、信号分析处理模块等。所述的测头模块包括用于接触工件表面并感知其表面凹凸变化的探针(1)和探杆(2)，探针(1)固定连接在探杆(2)一侧的端面上，探杆(2)设置在侧头支承模块内。The invention relates to an electromagnetic bearing self-tilting micro-displacement sensor system with controllable measurement force, which mainly includes: a probe module, a probe support module, a displacement detection module, a measurement force adjustment module, a bearing control module, a displacement signal acquisition module, a signal Analysis processing module, etc. The probe module includes a probe (1) and a probe rod (2) for contacting the surface of the workpiece and sensing the unevenness of the surface, and the probe (1) is fixedly connected to the end face of the probe rod (2), The probe rod (2) is arranged in the side head support module.
所述的测头支撑模块包括传感器基座(3)和电磁悬浮式轴承(4)，所述的传感器基座(3)固定在测量力调节模块(6)的微调平台(6-1)上，所述的电磁悬浮式轴承(4)固定安装在传感器基座(3)上，并通过轴承控制模块(8)与信号分析处理模块(10)连接。The probe support module includes a sensor base (3) and an electromagnetic suspension bearing (4), and the sensor base (3) is fixed on the fine-tuning platform (6-1) of the measurement force adjustment module (6) , the electromagnetic suspension bearing (4) is fixedly installed on the sensor base (3), and is connected with the signal analysis and processing module (10) through the bearing control module (8).
所述的位移检测模块为一种精密光栅，包括读数头(5-1)和标尺光栅(5-2)，所述的标尺光栅嵌套在探杆(2)上，可跟随探杆移动；所述的读数头与标尺光栅(5-2)对应，安装在传感器基座(3)上，并通过位移信号采集模块(9)与信号分析处理模块(10)连接，用来读取探杆的位移量。The displacement detection module is a precision grating, including a reading head (5-1) and a scale grating (5-2), and the scale grating is nested on the probe rod (2), and can follow the probe rod to move; The reading head corresponds to the scale grating (5-2), is installed on the sensor base (3), and is connected with the signal analysis and processing module (10) through the displacement signal acquisition module (9) to read the probe rod the amount of displacement.
所述的测量力调节模块(6)为一种角度可调的倾斜平台，包括微调平台(6-1)，调节轴(6-2)和底座(6-3)，所述的底座(6-3)沿水平方向固定在测量设备上；所述的微调平台(6-1)通过所述的调节轴(6-2)与底座(6-3)连接，并与水平面成β角度设置，其中β角的大小可通过调节轴(6-2)进行调节；在所述的微调平台(6-1)的上端面，固定连接有所述的传感器基座(3)。The measuring force adjustment module (6) is an angle-adjustable inclined platform, including a fine-tuning platform (6-1), an adjustment shaft (6-2) and a base (6-3), and the base (6-3) -3) fixed on the measuring device along the horizontal direction; the fine-tuning platform (6-1) is connected to the base (6-3) through the adjustment shaft (6-2), and is set at an angle of β to the horizontal plane, The size of the β angle can be adjusted through the adjustment shaft (6-2); the sensor base (3) is fixedly connected to the upper end surface of the fine-tuning platform (6-1).
如上所述的一种测量力可控的电磁轴承自倾斜式微位移传感器系统，更近一步说明为：所述的探针(1)和探杆(2)同轴连接，其轴心与电磁悬浮式轴承(4)的轴心重合并与微调平台(6-1)平行，与水平面成β角度。所述的探杆(2)为磁性材质，与所述的电磁悬浮式轴承(4)之间存在径向支持力。通过将传感器基座(3)与微调平台(6-1)固定连接，可使传感器基座(3)、电磁悬浮式轴承(4)、探针(1)和探杆(2)一起跟随微调平台(6-1)的移动而移动。A kind of electromagnetic bearing self-tilting micro-displacement sensor system with controllable measuring force as described above is further explained as follows: the probe (1) and the probe rod (2) are coaxially connected, and the axis is connected to the electromagnetic levitation The axes of the type bearings (4) coincide and are parallel to the fine-tuning platform (6-1), forming an angle of β with the horizontal plane. The probe rod (2) is made of magnetic material, and there is a radial support force between it and the electromagnetic suspension bearing (4). By fixedly connecting the sensor base (3) with the fine-tuning platform (6-1), the sensor base (3), electromagnetic suspension bearing (4), probe (1) and probe rod (2) can be fine-tuned together The movement of the platform (6-1) moves.
如上所述的一种测量力可控的电磁轴承自倾斜式微位移传感器系统，更近一步说明为：所述的测头模块的径向支承力由测头支撑模块中的电磁悬浮式轴承(4)提供，所述的电磁悬浮式轴承由信号分析处理模块(10)经过轴承控制模块(8)控制，可产生一种较大且稳定的径向力，支承探针(1)和探杆(2)，保证测头模块及与其连接的标尺光栅(5-2)保持径向稳定。A self-tilting micro-displacement sensor system with controllable measuring force as described above is further explained as follows: the radial support force of the probe module is controlled by the electromagnetic suspension bearing (4 ), the electromagnetic suspension bearing is controlled by the signal analysis and processing module (10) through the bearing control module (8), which can generate a large and stable radial force to support the probe (1) and probe rod ( 2), ensuring that the probe module and the scale grating (5-2) connected to it remain radially stable.
如上所述的一种测量力可控的电磁轴承自倾斜式微位移传感器系统，更近一步说明为：所述的探针(1)与被测工件(7)之间的测量力F如图2所示，由探针(1)，探杆(2)和标尺光栅(5-2)的总重力G沿探杆轴线方向的分量产生：F＝G×sinβ。测量力调整模块(6)调整传感器基座(3)与水平面之间的夹角β，实现对测量力F的调整。A self-tilting micro-displacement sensor system of electromagnetic bearing with controllable measurement force as described above is further explained as follows: the measurement force F between the probe (1) and the measured workpiece (7) is shown in Figure 2 As shown, it is generated by the component of the total gravity G of the probe (1), probe rod (2) and scale grating (5-2) along the axis of the probe rod: F=G×sinβ. The measurement force adjustment module (6) adjusts the angle β between the sensor base (3) and the horizontal plane to realize the adjustment of the measurement force F.
如上所述的一种测量力可控的电磁轴承自倾斜式微位移传感器系统，更近一步说明为：当被测工件进行Y向或X向进行形貌测量时，由于传感器系统位移检测方向与水平面之间存在夹角β即传感器系统位移检测方向与X向之间的夹角为β，因此位移传感器输出中包含测量误差，此测量误差通过如下方式进行分离。如图2所示，测量被测工件表面某一点时，若探针和探杆沿其轴线方向的位移变化为Δa，则被测点的X坐标变化和Z坐标变化分别为Δx＝Δa×cosβ，Δz＝Δa×sinβ。所述的信号分析处理模块会根据基准点的坐标值和被测点的坐标变化值，重构出被测工件表面形貌。A self-tilting micro-displacement sensor system of electromagnetic bearing with controllable measurement force as described above is further explained as follows: when the measured workpiece is measured in the Y-direction or X-direction, due to the displacement detection direction of the sensor system and the horizontal plane There is an angle β between them, that is, the angle between the displacement detection direction of the sensor system and the X direction is β, so the output of the displacement sensor contains measurement errors, and the measurement errors are separated by the following method. As shown in Figure 2, when measuring a certain point on the surface of the workpiece to be measured, if the displacement of the probe and the probe rod along its axial direction is Δa, the X coordinate change and Z coordinate change of the measured point are Δx=Δa×cosβ , Δz=Δa×sinβ. The signal analysis and processing module will reconstruct the surface topography of the measured workpiece according to the coordinate value of the reference point and the coordinate change value of the measured point.
本发明的有益效果Beneficial effects of the present invention
本发明采用倾斜平台，来调节接触式位移传感器的测量力，其带来的有益效果是：The present invention adopts the inclined platform to adjust the measuring force of the contact displacement sensor, and the beneficial effects brought by it are:
改变了传统接触式位移传感器中测量力不可控的技术缺陷。在测量不同材质和不同面型特征工件表面形貌时，可通过测量力调节模块(6)改变传感器与水平面之间的夹角β来调整实体探针与被测工件表面的测量力，以保证探针对被测工件表面形貌变化的跟随性，保护被测工件表面不被划伤，并降低探针尖端的磨损和延长其工作寿命。The technical defect of uncontrollable measurement force in the traditional contact displacement sensor has been changed. When measuring the surface topography of workpieces with different materials and different surface features, the measurement force between the solid probe and the surface of the workpiece to be measured can be adjusted by changing the angle β between the sensor and the horizontal plane through the measurement force adjustment module (6), so as to ensure The ability of the probe to follow the surface topography of the measured workpiece protects the surface of the measured workpiece from being scratched, reduces the wear of the probe tip and prolongs its working life.
附图说明Description of drawings
图1是本发明一种测量力可控的电磁轴承自倾斜式微位移传感器系统的结构示意图。Fig. 1 is a structural schematic diagram of a self-tilting micro-displacement sensor system of an electromagnetic bearing with controllable measuring force according to the present invention.
图2是本发明一种测量力可控的电磁轴承自倾斜式微位移传感器系统的测量力计算及测量误差分离示意图。Fig. 2 is a schematic diagram of measurement force calculation and measurement error separation of an electromagnetic bearing self-tilting micro-displacement sensor system with controllable measurement force according to the present invention.
具体实施方式detailed description
本发明涉及一种测量力可控的电磁轴承自倾斜式微位移传感器系统，下面结合附图和具体实施例对本发明做进一步说明。The present invention relates to an electromagnetic bearing self-tilting micro-displacement sensor system with controllable measuring force. The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.
如图1所示，所述的一种测量力可控的电磁轴承自倾斜式微位移传感器系统包括：测头模块、测头支撑模块、位移检测模块、测量力调节模块、轴承控制模块、位移信号采集模块、信号分析处理模块等。所述的测头模块由探针1和探杆2同轴连接构成，可跟随被测工件表面的形貌变化而移动；所述的测头支撑模块包括传感器基座3和电磁悬浮式轴承4，用来给探针和探杆提供径向支持力；所述的位移检测模块为一种精密光栅，包括读数头5-1和标尺光栅5-2，可读取测头模块的位移信息；所述的测量力调节模块为一种角度可调的倾斜平台，包括微调平台6-1，调节轴6-2和底座6-3，所述的底座6-3沿X轴方向固定在测量设备上，所述的微调平台6-1通过所述的调节轴6-2与底座6-3连接，并与水平面成β角度设置，其中β角的大小可通过调节轴6-2进行调节；所述的信号分析处理模块10以计算机为例。As shown in Figure 1, the self-tilting micro-displacement sensor system of an electromagnetic bearing with controllable measurement force includes: a probe module, a probe support module, a displacement detection module, a measurement force adjustment module, a bearing control module, a displacement signal Acquisition module, signal analysis and processing module, etc. The probe module is composed of a coaxial connection between the probe 1 and the probe rod 2, which can move following the shape change of the surface of the workpiece to be measured; the probe support module includes a sensor base 3 and an electromagnetic suspension bearing 4 , used to provide radial support for the probe and the probe rod; the displacement detection module is a precision grating, including a reading head 5-1 and a scale grating 5-2, which can read the displacement information of the probe module; The measurement force adjustment module is an angle-adjustable tilting platform, including a fine-tuning platform 6-1, an adjustment shaft 6-2 and a base 6-3, and the base 6-3 is fixed on the measuring device along the X-axis direction Above, the fine-tuning platform 6-1 is connected to the base 6-3 through the adjustment shaft 6-2, and is set at an angle β to the horizontal plane, wherein the size of the β angle can be adjusted through the adjustment shaft 6-2; The signal analysis and processing module 10 described above takes a computer as an example.
本发明所涉及的一种测量力可控的电磁轴承自倾斜式微位移传感器系统，在测量被测工件7的表面形貌之前，根据不同工件的材料和探针的受力强度可事先确定一个处于合理范围的测量力F，由公式F＝Gsinβ可得到一个与其对应的倾斜角β，测量时只要将微调平台6-1的倾斜角调整为β就能保证测量力F大小恒定。The present invention relates to an electromagnetic bearing self-tilting micro displacement sensor system with controllable measuring force. For a measuring force F within a reasonable range, a corresponding inclination angle β can be obtained from the formula F=Gsinβ, and the measuring force F can be kept constant as long as the inclination angle of the fine-tuning platform 6-1 is adjusted to β during measurement.
本发明的具体测量过程为：首先将工件7固定放置在位移平台上，将所述的测量力调节模块中的底座6-3安装在测量设备上保持静止，通过分析计算得出最佳测量力F和对应的倾斜角β，再通过位移平台的驱动调整工件7和探针1的相对位置使两者接触，确定接触后，调节倾斜平台的调节轴6-2，使微调平台6-1与水平面的夹角为β，这样就能保证探针与工件之间的测量力为F。其次在位移平台的作用下驱动工件沿Y轴方向移动，由于探针和工件之间存在微小接触力，所以工件表面的微观峰谷起伏将使探针和探杆沿其轴线方向移动，电磁悬浮式轴承为探杆提供的径向支承力可保证这种移动的低摩擦性，高顺应性和线性。最后所述的探针和探杆的位移信号会通过所述的光栅转换为电信号，再经过位移信号采集模块9传输到计算机10中，所述的计算机根据探针和探杆的位移变化计算出被测点的坐标改变量，然后再与基准坐标进行对比即可重构出工件表面微观形貌。The specific measurement process of the present invention is: firstly the workpiece 7 is fixedly placed on the displacement platform, the base 6-3 in the measurement force adjustment module is installed on the measurement equipment to keep it still, and the optimum measurement force is obtained through analysis and calculation F and the corresponding inclination angle β, and then adjust the relative position of the workpiece 7 and the probe 1 through the driving of the displacement platform to make the two contact. After confirming the contact, adjust the adjustment axis 6-2 of the inclination platform to make the fine-tuning platform 6-1 and The angle between the horizontal plane is β, so that the measuring force between the probe and the workpiece can be guaranteed to be F. Secondly, under the action of the displacement platform, the workpiece is driven to move along the Y-axis direction. Since there is a small contact force between the probe and the workpiece, the microscopic peak and valley fluctuations on the surface of the workpiece will make the probe and probe rod move along the axis direction, and the electromagnetic levitation The radial support force provided by the type bearing for the probe can ensure the low friction, high compliance and linearity of this movement. Finally, the displacement signals of the probes and probe rods will be converted into electrical signals through the grating, and then transmitted to the computer 10 through the displacement signal acquisition module 9, and the computer will calculate according to the displacement changes of the probes and probe rods. The coordinate change of the measured point can be obtained, and then compared with the reference coordinates, the microscopic topography of the workpiece surface can be reconstructed.
以上所述实例性说明中的信号分析处理模块10采用计算机，仅为本发明的较佳实施例，并不用以限制本发明；凡在本发明的思想和原则之内，所作的任何修改、等同替换、改进等，均应包含在本发明的保护范围之内。The signal analysis and processing module 10 in the above-mentioned exemplary description adopts a computer, which is only a preferred embodiment of the present invention, and is not intended to limit the present invention; within the ideas and principles of the present invention, any modifications made, equivalent Replacement, improvement, etc. should all be included within the protection scope of the present invention.
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510686621.4ACN105387810A (en) | 2015-10-20 | 2015-10-20 | Electromagnetic bearing self-tilting micrometric displacement sensor system with controllable measuring force |
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510686621.4ACN105387810A (en) | 2015-10-20 | 2015-10-20 | Electromagnetic bearing self-tilting micrometric displacement sensor system with controllable measuring force |
| Publication Number | Publication Date |
|---|---|
| CN105387810Atrue CN105387810A (en) | 2016-03-09 |
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510686621.4APendingCN105387810A (en) | 2015-10-20 | 2015-10-20 | Electromagnetic bearing self-tilting micrometric displacement sensor system with controllable measuring force |
| Country | Link |
|---|---|
| CN (1) | CN105387810A (en) |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110388860A (en)* | 2018-04-20 | 2019-10-29 | 株式会社三丰 | The control method of measuring device |
| CN111692984A (en)* | 2020-06-19 | 2020-09-22 | 南京工业大学 | Bridge dynamic deflection measuring device and measuring method based on magnetic suspension technology |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1484760A (en)* | 2001-09-07 | 2004-03-24 | ���ְ�˹��ѧ��ҵ��ʽ���� | Apparatus for measuring surface profile |
| US20110088273A1 (en)* | 2009-10-21 | 2011-04-21 | Mitutoyo Corporation | Measuring force control apparatus |
| CN203148391U (en)* | 2013-03-19 | 2013-08-21 | 昆山允可精密工业技术有限公司 | Contact measuring head |
| CN104713496A (en)* | 2015-02-11 | 2015-06-17 | 四川大学 | Magnetic suspension contact pin type displacement sensor for micro-topography measurement |
| CN104897099A (en)* | 2015-06-19 | 2015-09-09 | 四川大学 | Measuring force-controllable contact probe type displacement sensor used for micro morphology detection |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1484760A (en)* | 2001-09-07 | 2004-03-24 | ���ְ�˹��ѧ��ҵ��ʽ���� | Apparatus for measuring surface profile |
| US20110088273A1 (en)* | 2009-10-21 | 2011-04-21 | Mitutoyo Corporation | Measuring force control apparatus |
| CN203148391U (en)* | 2013-03-19 | 2013-08-21 | 昆山允可精密工业技术有限公司 | Contact measuring head |
| CN104713496A (en)* | 2015-02-11 | 2015-06-17 | 四川大学 | Magnetic suspension contact pin type displacement sensor for micro-topography measurement |
| CN104897099A (en)* | 2015-06-19 | 2015-09-09 | 四川大学 | Measuring force-controllable contact probe type displacement sensor used for micro morphology detection |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110388860A (en)* | 2018-04-20 | 2019-10-29 | 株式会社三丰 | The control method of measuring device |
| CN110388860B (en)* | 2018-04-20 | 2022-10-04 | 株式会社三丰 | Control method of measuring device |
| CN111692984A (en)* | 2020-06-19 | 2020-09-22 | 南京工业大学 | Bridge dynamic deflection measuring device and measuring method based on magnetic suspension technology |
| Publication | Publication Date | Title |
|---|---|---|
| US7685733B2 (en) | Micro force measurement device, micro force measurement method, and micro surface shape measurement probe | |
| CN104897099B (en) | A kind of controllable contact pin type displacement sensor of measuring force for micromorphology detection | |
| CN108278979B (en) | A kind of blade in situ contact formula three-dimensional measuring apparatus and method | |
| CN105444695B (en) | The probe contact measuring head of dynamic characteristic is adjusted based on elastic element limit method | |
| US8281648B2 (en) | Material testing apparatus with non-contact sensor | |
| CN104266792B (en) | A kind of micro-nano force value standard set-up based on electromagnetic compensation balance and source tracing method thereof | |
| US11592278B2 (en) | Method and apparatus for determining a relative position of an axis of rotation of a rotary table for a coordinate measuring machine | |
| CN207132827U (en) | A kind of bearing roller detection means | |
| CN105397639B (en) | A kind of suspension polishing processes gap detection method | |
| CN110954019B (en) | Measurement method and device for large-inclination free-form surface based on datum plane comparison measurement | |
| He et al. | Tactile probing system based on micro-fabricated capacitive sensor | |
| CN107290085A (en) | The slight torque calibrating measuring device held based on elastic lifting | |
| CN100501336C (en) | A general-purpose precision displacement measurement auxiliary device | |
| CN103822588A (en) | Cabin cross section circumference measuring device and method based on non-contact profiling method | |
| CN103075952B (en) | Micro-touch measurement head for measuring micro-nano three-dimensional size | |
| CN105387810A (en) | Electromagnetic bearing self-tilting micrometric displacement sensor system with controllable measuring force | |
| CN204240974U (en) | A kind of contact sphere diameter gauge | |
| CN102680743B (en) | Template fast approximation and in-situ detection device and method in micro-nano instruments and equipment | |
| CN103075951B (en) | Three-dimensional micro touch probe based on capacitive sensor array | |
| CN103680641A (en) | Fix-freedom-degree precise positioning platform based on flexible structure | |
| CN204613051U (en) | Two-dimensional friction testing device | |
| CN105466339A (en) | Micro topography detection displacement sensor system based on standard mass block controlling measuring force | |
| CN203550937U (en) | Large-size meter-provided right angle verticality measurement gauge | |
| CN108557756B (en) | A kind of micromachined knife rest with force servo function | |
| CN109986367A (en) | It is a kind of for measuring the device of ultra-precision machine tool floating cushion rigidity |
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | Application publication date:20160309 | |
| RJ01 | Rejection of invention patent application after publication |