本申请要求于2014年7月2日提交至韩国知识产权局的第10-2014-0082532号韩国专利申请的权益，该韩国专利申请的全部公开通过引用包含于此。This application claims the benefit of Korean Patent Application No. 10-2014-0082532 filed with the Korean Intellectual Property Office on Jul. 2, 2014, the entire disclosure of which is hereby incorporated by reference.
技术领域technical field
一个或更多个示例性实施例涉及缺陷检查设备和方法，更具体地讲，涉及利用单个装置来测量多种类型的缺陷并区分多种类型的缺陷的缺陷检查设备和方法。One or more exemplary embodiments relate to defect inspection apparatuses and methods, and more particularly, to defect inspection apparatuses and methods that measure and distinguish multiple types of defects using a single device.
背景技术Background technique
当检查透明或者不透明的物体是否存在缺陷时，通常来说，装置通过发射将要入射在物体上的光然后测量并分析透射光或反射光来检查物体是否存在缺陷。When inspecting a transparent or opaque object for defects, generally, a device inspects the object for defects by emitting light to be incident on the object and then measuring and analyzing the transmitted or reflected light.
然而，为了检测缺陷，沿一个方向发射将要入射在物体上的光的各个发光装置都需要载物台和相机，这导致了用于检查多种类型的缺陷的检查装置的尺寸过度地增大。However, in order to detect defects, each light emitting device emitting light to be incident on an object in one direction requires a stage and a camera, which results in an excessive increase in size of an inspection device for inspecting various types of defects.
此外，由于从每个载物台独立地获取图像，所以可能难以区分缺陷。Furthermore, since images are acquired independently from each stage, it may be difficult to distinguish defects.
发明内容Contents of the invention
一个或多个示例性实施例包括一种具有很小的尺寸并可以测量并在多种类型的缺陷之间进行区分的缺陷检查设备。One or more exemplary embodiments include a defect inspection apparatus that has a small size and can measure and distinguish between various types of defects.
另外的方面将在随后的描述中部分地阐述，且部分地将通过描述而变得显而易见，或者可以通过实施提供的示例性实施例而了解。Additional aspects will be set forth in part in the description which follows and, in part, will be apparent from the description, or may be learned by practice of the exemplary embodiments provided.
根据一个或多个示例性实施例，一种缺陷检查设备包括：载物台，支撑物体；第一发光单元，发射将入射在物体上的光；反射器，将由第一发光单元发射并被物体反射的光再次反射到物体上；第二发光单元，设置在关于载物台与第一发光单元相反的方向上，并发射将入射在物体上的光；相机，包括接收被反射器反射、入射在物体上、且随后被物体反射的光以及从第二发光单元入射在物体上并穿过物体的光的成像器件；第三发光单元，被设置为靠近反射器，并发射将入射在物体上的光。第三发光单元发射的光以与反射器反射的光的角度不同的角度入射在物体上，成像器件接收从第三发光单元发射并入射在物体上的光中的被物体散射的光的一部分。According to one or more exemplary embodiments, a defect inspection apparatus includes: a stage supporting an object; a first light emitting unit emitting light to be incident on the object; a reflector to be emitted by the first light emitting unit and illuminated by the object. The reflected light is reflected on the object again; the second light-emitting unit is arranged on the direction opposite to the first light-emitting unit with respect to the stage, and emits the light that will be incident on the object; the camera includes receiving light reflected by the reflector, incident An imaging device for light that is on the object and is subsequently reflected by the object and light that is incident on the object and passes through the object from the second light emitting unit; the third light emitting unit is arranged close to the reflector and emits light that will be incident on the object of light. Light emitted by the third light emitting unit is incident on the object at an angle different from that of light reflected by the reflector, and the imaging device receives a portion of light scattered by the object among the light emitted from the third light emitting unit and incident on the object.
由相机的光轴和垂直于物体的线形成的角度与将反射器连接到物体的线和垂直于物体的线形成的角度可以基本相同。The angle formed by the optical axis of the camera and the line perpendicular to the object may be substantially the same as the angle formed by the line connecting the reflector to the object and the line perpendicular to the object.
反射器可以是后向反射器。The reflector may be a retroreflector.
由相机的光轴和垂直于物体的线形成的角度与将第二发光单元连接到物体的线和垂直于物体的线形成的角度可以基本相同。An angle formed by an optical axis of the camera and a line perpendicular to the object may be substantially the same as an angle formed by a line connecting the second light emitting unit to the object and a line perpendicular to the object.
所述设备还可以包括：第四发光单元，被设置为靠近第二发光单元并以与第二发光单元发射的光的角度不同的角度将光发射在物体上。The apparatus may further include a fourth light emitting unit disposed close to the second light emitting unit and emitting light on the object at an angle different from an angle of light emitted by the second light emitting unit.
第三发光单元可以包括设置在基于反射器的两个方向上并以不同的角度将光发射在物体上的多个照明源，第四发光单元可以包括设置在基于第二发光单元的两个方向上并以不同的角度将光发射在物体上的多个照明源。The third light-emitting unit may include a plurality of illumination sources arranged in two directions based on the reflector and emit light on the object at different angles, and the fourth light-emitting unit may include a plurality of illumination sources arranged in two directions based on the second light-emitting unit. Multiple illumination sources that emit light on an object at different angles.
所述设备还可以包括：阻挡单元，设置在成像器件的前方，并根据被反射器反射、入射在物体上且随后被物体反射的光的角度来阻挡入射在成像器件上的光的一部分或全部。The apparatus may further include: a blocking unit disposed in front of the imaging device, and blocking part or all of light incident on the imaging device according to an angle of light reflected by the reflector, incident on the object, and then reflected by the object .
所述设备还可以包括：第五发光单元，设置在关于载物台与第二发光单元的方向相同的方向上，并沿与物体垂直的方向发射光；垂直相机，接收由第五发光单元发射并被物体反射的光。The device may further include: a fifth light emitting unit arranged in the same direction as the second light emitting unit with respect to the object stage, and emit light in a direction perpendicular to the object; a vertical camera receiving light emitted by the fifth light emitting unit And the light reflected by the object.
反射器和第三发光单元可以被设置为使得基于被物体反射的光入射所处的区域形成10°至40°的角度。The reflector and the third light emitting unit may be disposed such that an angle of 10° to 40° is formed based on an area where light reflected by the object is incident.
所述设备还可以包括：第六发光单元，被载物台支撑，并朝向物体的侧表面发射光。The apparatus may further include: a sixth light emitting unit supported by the stage and emitting light toward a side surface of the object.
根据一个或多个示例性实施例，一种缺陷检查方法包括：在载物台上设置物体；通过使用第一发光单元发射将入射在物体上的光；通过使用反射器将由第一发光单元发射且随后被物体反射的光反射到物体上、以及使用成像器件接收通过反射器再次入射在物体上且随后从物体反射的光，来获得第一图像；通过使用设置在关于载物台与第一发光单元相对的方向上的第二发光单元发射将入射在物体上的光；通过使用成像器件接收由第二发光单元发射并穿过物体的光来获得第二图像；通过使用被设置为靠近反射器的第三发光单元以与由反射器反射的光的角度不同的角度发射将入射在物体上的光；通过使用成像器件接收由第三发光单元入射在物体上并被物体散射的光来获得第三图像；匹配从第一图像至第三图像中选择的至少两种图像的坐标；从具有匹配的坐标的所述至少两种图像检测缺陷并区分缺陷的类型。According to one or more exemplary embodiments, a defect inspection method includes: setting an object on a stage; emitting light to be incident on the object by using a first light emitting unit; and emitting light to be emitted by the first light emitting unit by using a reflector. And then the light reflected by the object is reflected on the object, and the light that is re-incident on the object through the reflector and then reflected from the object is received using an imaging device to obtain a first image; A second light emitting unit in a direction opposite to the light emitting unit emits light that will be incident on the object; a second image is obtained by using an imaging device to receive light emitted by the second light emitting unit and passing through the object; The third light-emitting unit of the reflector emits light that will be incident on the object at an angle different from that of light reflected by the reflector; obtained by using an imaging device to receive light incident on the object by the third light-emitting unit and scattered by the object a third image; matching coordinates of at least two images selected from the first image to the third image; detecting defects and distinguishing types of defects from the at least two images having matched coordinates.
所述方法还可以包括：通过使用由载物台支撑的第六发光单元朝向物体的侧表面发射光；通过使用成像器件接收由第六发光单元发射并被物体散射的光来获得第五图像；匹配所述至少两种图像的坐标和第五图像的坐标；从具有匹配的坐标的至少三种图像检测缺陷并区分缺陷的类型。The method may further include: emitting light toward a side surface of the object by using a sixth light emitting unit supported by the stage; obtaining a fifth image by receiving light emitted by the sixth light emitting unit and scattered by the object using an imaging device; matching the coordinates of the at least two images with the coordinates of the fifth image; detecting defects and distinguishing types of defects from at least three images having matched coordinates.
所述方法还可以包括：通过使用被设置在关于载物台与第二发光单元的方向相同的方向上的第五发光单元沿与物体垂直的方向发射光；通过使用垂直相机接收由第五发光单元发射并被物体反射的光来获得第四图像。The method may further include: emitting light in a direction perpendicular to the object by using a fifth light emitting unit disposed in the same direction as the second light emitting unit with respect to the stage; receiving light emitted by the fifth light emitting unit by using a vertical camera. The light emitted by the unit and reflected by the object is used to obtain the fourth image.
所述方法还可以包括：通过使用由载物台支撑的第六发光单元朝向物体的侧表面发射光；通过使用垂直相机接收由第六发光单元发射并被物体散射的光来获得第六图像；匹配所述至少两种图像的坐标和第六图像的坐标；从具有匹配的坐标的至少三种图像检测缺陷并区分缺陷的类型。The method may further include: emitting light toward a side surface of the object by using a sixth light emitting unit supported by the stage; obtaining a sixth image by receiving light emitted by the sixth light emitting unit and scattered by the object using a vertical camera; matching the coordinates of the at least two images with the coordinates of the sixth image; detecting defects and distinguishing types of defects from at least three images having matched coordinates.
本发明构思的效果Effects of the inventive concept
根据示例性实施例，缺陷检查设备可以是很小的，并且该设备和缺陷检查方法可用于检测和区分多种缺陷。According to an exemplary embodiment, the defect inspection apparatus can be small, and the apparatus and defect inspection method can be used to detect and distinguish various kinds of defects.
附图说明Description of drawings
通过下面结合附图的对示例性实施例的描述，这些和/或其他的方面将变得明显和更容易理解，在附图中：These and/or other aspects will become apparent and more readily understood from the following description of exemplary embodiments in conjunction with the accompanying drawings, in which:
图1是根据示例性实施例的缺陷检查设备的透视图；FIG. 1 is a perspective view of a defect inspection apparatus according to an exemplary embodiment;
图2是图1中的缺陷检查设备的示意图；Fig. 2 is a schematic diagram of the defect inspection device in Fig. 1;
图3A和图3B是包括在图1中的缺陷检查设备中的相机的特定元件的示意图；3A and 3B are schematic diagrams of specific elements of a camera included in the defect inspection apparatus in FIG. 1;
图4是根据另一示例性实施例的缺陷检查设备的示意图；4 is a schematic diagram of a defect inspection device according to another exemplary embodiment;
图5至图10是根据另一示例性实施例的缺陷检查设备的示意图；5 to 10 are schematic diagrams of a defect inspection device according to another exemplary embodiment;
图11是根据示例性实施例的缺陷检查方法的流程图；11 is a flowchart of a defect inspection method according to an exemplary embodiment;
图12A到图12H是根据图11中的缺陷检查方法的用于测量和区分缺陷的图像；12A to 12H are images for measuring and distinguishing defects according to the defect inspection method in FIG. 11;
图13是根据另一示例性实施例的缺陷检查方法的流程图；FIG. 13 is a flowchart of a defect inspection method according to another exemplary embodiment;
图14A和图14B是根据图13中的缺陷检查方法的用于测量和区分缺陷的图像。14A and 14B are images for measuring and distinguishing defects according to the defect inspection method in FIG. 13 .
具体实施方式detailed description
因为本发明构思允许存在多种改变和许多示例性实施例，所以将在附图中示出并在文字描述中详细描述特定的示例性实施例。然而，这不意在将本发明构思限制为特定的实施模式，且应该理解的是，在本发明构思中包括不脱离所述精神和技术范围的所有的改变，等同物和替换物。在描述中，当认为现有技术的某些详细的说明可能不必要地使本发明构思的本质变得模糊时，对现有技术的某些详细的说明进行了省略。如这里所使用的，术语“和/或”包括一个或多个相关所列项目的任意和所有组合。当诸如“……中的至少一个”的表达位于一系列元件之后时，其修饰的是整个系列的元件且不修饰该系列的独立的元件。Since the inventive concept allows for various changes and many exemplary embodiments, specific exemplary embodiments will be illustrated in the drawings and described in detail in the written description. However, this is not intended to limit the present inventive concept to a specific embodiment mode, and it should be understood that all changes, equivalents and substitutions that do not depart from the spirit and technical scope are included in the present inventive concept. In the description, some detailed descriptions of the prior art have been omitted when it is considered that they may unnecessarily obscure the essence of the inventive concept. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items. Expressions such as "at least one of," when preceding a list of elements, modify the entire list of elements and do not modify the individual elements of the list.
下文中，将参照附图来详细描述示例性实施例。在附图中，附图中相同的附图标记指示相同的元件，因此，将不重复它们的描述。Hereinafter, exemplary embodiments will be described in detail with reference to the accompanying drawings. In the drawings, the same reference numerals in the drawings denote the same elements, and thus, their descriptions will not be repeated.
虽然诸如“第一”、“第二”等的术语可以用于描述多种组件，但是这样的组件不必须被上述术语所限制。上述术语仅被用于将一个组件与另一个组件区分开来。Although terms such as 'first', 'second', etc. may be used to describe various components, such components are not necessarily limited by the above terms. The above terms are only used to distinguish one component from another.
在本说明书中使用的术语仅被用于描述特定的示例性实施例，且不意在限制本发明构思。除非在上下文中具有清楚的不同的含义，否则以单数形式使用的表达包括多数形式的表达。在本说明书中，应该理解的是，诸如“包括”、“具有”和“包含”的术语意在指示存在在说明书中公开的特征、数量、步骤、动作、组件、部件或它们的组合，且不意在排除可存在或可添加一个或多个其他的特征、数量、步骤、动作、组件、部件或它们的组合的可能性。Terms used in this specification are used to describe specific exemplary embodiments only, and are not intended to limit the inventive concept. Expressions used in the singular include expressions in the plural unless there are clearly different meanings in the context. In this specification, it should be understood that terms such as "comprising", "having" and "comprising" are intended to indicate that there are features, quantities, steps, acts, components, parts or combinations thereof disclosed in the specification, and It is not intended to exclude the possibility that one or more other features, quantities, steps, actions, components, components or combinations thereof may be present or may be added.
为了便于解释，可能夸大了在附图中的组件的尺寸。换句话说，因为为了便于解释而任意地示出了附图中的组件的尺寸和厚度，所以下面的示例性实施例不限于此。The size of components in the drawings may be exaggerated for convenience of explanation. In other words, since the size and thickness of components in the drawings are arbitrarily shown for convenience of explanation, the following exemplary embodiments are not limited thereto.
图1是根据示例性实施例的缺陷检查设备1的透视图。图2是图1中的缺陷检查设备1的示意图。图3A和图3B是包括在图1中的缺陷检查设备中的相机的特定元件的示意图。FIG. 1 is a perspective view of a defect inspection apparatus 1 according to an exemplary embodiment. FIG. 2 is a schematic diagram of the defect inspection device 1 in FIG. 1 . 3A and 3B are schematic diagrams of specific elements of a camera included in the defect inspection apparatus in FIG. 1 .
参照图1和图2，根据示例性实施例的缺陷检查设备1包括：载物台300，支撑物体100；第一发光单元230，发射将要入射在物体100上的光；反射器400，将由第一发光单元230发射并随后被物体100反射的光再次反射到物体100上；第二发光单元500，设置在关于载物台300与第一发光单元230相对的方向上并且发射将要入射在物体100上的光；相机200，包括接收被物体100反射且穿过物体100的光的成像器件211(见图3A和图3B)；第三发光单元600，设置为靠近反射器400并且发射将要入射在物体100上的光。1 and 2, a defect inspection apparatus 1 according to an exemplary embodiment includes: a stage 300 supporting an object 100; a first light emitting unit 230 emitting light to be incident on the object 100; a reflector 400 to be illuminated by a second A light emitting unit 230 emits and is then reflected by the object 100 on the object 100 again; the second light emitting unit 500 is arranged on the direction opposite to the first light emitting unit 230 with respect to the stage 300 and emits light that will be incident on the object 100 The light on the camera 200 includes an imaging device 211 (see FIG. 3A and FIG. 3B ) that receives the light reflected by the object 100 and passes through the object 100; the third light emitting unit 600 is arranged close to the reflector 400 and emits light that will be incident on the Light on object 100 .
载物台300支撑物体100，从而暴露物体100的上表面和下表面。物体100可为透明或不透明的膜，但不限于此。物体100可被设置为在载物台300上是可移动的。物体100可沿一个方向移动，且可在物体100的整个部分上执行检查。The stage 300 supports the object 100 such that upper and lower surfaces of the object 100 are exposed. Object 100 may be a transparent or opaque film, but is not limited thereto. The object 100 may be configured to be movable on the stage 300 . The object 100 can move in one direction, and inspection can be performed on the entire portion of the object 100 .
根据示例性实施例，缺陷检查设备1的第一发光单元230被包括在相机200中，并且相机200可包括主体210、镜筒220和第一发光单元230。然而，示例性实施例不限于此，第一发光单元230可不被包括在相机200中，而是可与相机200分开。According to an exemplary embodiment, the first light emitting unit 230 of the defect inspection apparatus 1 is included in the camera 200 , and the camera 200 may include a main body 210 , a lens barrel 220 and the first light emitting unit 230 . However, exemplary embodiments are not limited thereto, and the first light emitting unit 230 may not be included in the camera 200 but may be separated from the camera 200 .
第一发光单元230发射的光可入射在物体100上并被物体100反射。被物体100反射的光可被反射器400再次反射。反射器400可为后向反射器(retroreflector)。如果反射器400是后向反射器，则反射器400可基本沿着入射光的光路反射入射在反射器400上的光。因此，因为反射器400不具有入射在反射器400上的光因物体100的形状和外部振动而不返回到物体100的原始位置的问题，所以可改善缺陷测量的准确度。The light emitted by the first light emitting unit 230 may be incident on the object 100 and reflected by the object 100 . The light reflected by the object 100 may be reflected again by the reflector 400 . The reflector 400 may be a retroreflector. If reflector 400 is a retroreflector, reflector 400 may reflect light incident on reflector 400 substantially along the optical path of the incident light. Accordingly, since the reflector 400 does not have a problem that light incident on the reflector 400 does not return to the original position of the object 100 due to the shape of the object 100 and external vibrations, accuracy of defect measurement may be improved.
被反射器400反射并入射在物体100上的光可被物体100反射并被相机200所接收，即，在相机200中包括了成像器件211。The light reflected by the reflector 400 and incident on the object 100 may be reflected by the object 100 and received by the camera 200 , that is, the imaging device 211 is included in the camera 200 .
如果物体100不具有缺陷，则被物体100反射的光可入射在相机200上且可产生具有明视场的图像。即，由相机200的光轴与垂直于物体100的线所形成的角度θ1和由将反射器400和物体100(具体地将，是物体100的正被检测的位置)相连接的线与垂直于物体100的线所形成的角度θ2可在±10°的误差幅度内基本相同。If the object 100 has no defects, light reflected by the object 100 may be incident on the camera 200 and an image having a bright field may be produced. That is, the angle θ1 formed by the optical axis of the camera 200 and a line perpendicular to the object100 and by the line connecting the reflector 400 and the object 100 (in particular, the position of the object 100 being detected) and The angle θ2 formed by lines perpendicular to the object 100 may be substantially the same within a margin of error of ±10°.
尽管没有示出，但是可另外地将阻挡不必要的光区的覆盖层设置在物体100与反射器400之间的区域中和/或物体100与相机200之间的区域中。Although not shown, a cover layer blocking unnecessary light regions may be additionally provided in a region between the object 100 and the reflector 400 and/or in a region between the object 100 and the camera 200 .
如果物体100具有缺陷，则因被缺陷沿其他方向反射或散射而导致光路被改变的一部分光可能不入射在相机200上。即，物体100的缺陷可呈现为与在由相机200捕获的图像上的明视场相比相对暗的点。If the object 100 has a defect, a part of the light whose optical path is changed due to being reflected or scattered in other directions by the defect may not be incident on the camera 200 . That is, defects of object 100 may appear as relatively dark spots compared to bright field on an image captured by camera 200 .
第一发光单元230和反射器400可被用于检测在物体100的上表面上的诸如异物颗粒或污迹的缺陷，或者诸如裂纹的在制造过程期间造成的沿着周边的缺陷。The first light emitting unit 230 and the reflector 400 may be used to detect defects such as foreign particles or stains on the upper surface of the object 100 , or defects along the periphery such as cracks caused during the manufacturing process.
第三发光单元600可被设置在靠近反射器400的区域处。根据示例性实施例的第三发光单元600可包括设置在反射器400的两个方向上的多个照明源610、620、630、640、650和660。The third light emitting unit 600 may be disposed at a region close to the reflector 400 . The third light emitting unit 600 according to an exemplary embodiment may include a plurality of illumination sources 610 , 620 , 630 , 640 , 650 and 660 disposed in two directions of the reflector 400 .
由第三发光单元600发射的光可以以与由反射器400反射的光的角度不同的角度入射在物体100上。从第三发光单元600中的多个照明源610、620、630、640、650和660中选择的至少一些照明源可以以不同的角度入射在物体100上。The light emitted by the third light emitting unit 600 may be incident on the object 100 at an angle different from that of the light reflected by the reflector 400 . At least some of the illumination sources selected from the plurality of illumination sources 610, 620, 630, 640, 650, and 660 in the third light emitting unit 600 may be incident on the object 100 at different angles.
如果物体100不具有缺陷，则从第三发光单元600入射在物体100上并被物体100反射的光可不入射在相机200(即，成像器件211)上。即，暗视场可能形成在由相机200捕获的图像中。If the object 100 has no defect, light incident on the object 100 from the third light emitting unit 600 and reflected by the object 100 may not be incident on the camera 200 (ie, the imaging device 211 ). That is, a dark field may be formed in an image captured by the camera 200 .
然而，如果物体100具有缺陷，则因被缺陷沿其他方向反射或散射而导致光路被改变的一部分光可能入射在相机200上。即，物体100的缺陷可显示为与在相机200捕获的图像上的暗视场相比相对亮的点。However, if the object 100 has a defect, a part of the light whose optical path is changed due to being reflected or scattered by the defect in other directions may be incident on the camera 200 . That is, defects of the object 100 may appear as relatively bright spots compared to the dark field on the image captured by the camera 200 .
由于第三发光单元600包括以不同的角度发射将要入射在物体100上的光的多个照明源610、620、630、640、650和660，所以光可因形成在物体100上的缺陷而沿多个方向散射，并且散射的光可入射在相机200上。Since the third light emitting unit 600 includes a plurality of illumination sources 610, 620, 630, 640, 650, and 660 that emit light to be incident on the object 100 at different angles, the light may travel along the direction due to defects formed on the object 100. Multiple directions are scattered, and the scattered light may be incident on the camera 200 .
在反射器400和第三发光单元600之间的角度θ4(具体地讲，是连接反射器400和光入射在物体100上的位置的线与连接第三发光单元600和光入射在物体100上的位置的线之间的角度)可在从10°到40°的范围之内，所述角度根据光入射在物体100上的区域而变化。如果角度θ4小于10°，则由第三发光单元600发射并由不具有缺陷的物体100反射的光可能入射在相机200上并且可不产生暗视场。如果角度θ4大于40°，则由物体100的缺陷所散射的光可能不入射在相机200上，并因此可能检测不到缺陷。The angle θ4 between the reflector 400 and the third light emitting unit 600 (specifically, is the line connecting the reflector 400 and the position where the light is incident on the object 100 and the line connecting the third light emitting unit 600 and the position where the light is incident on the object 100 The angle between the lines of the position) may range from 10° to 40°, the angle varying according to the area where the light is incident on the object 100 . If the angle θ4 is less than10 °, light emitted by the third light emitting unit 600 and reflected by the object 100 having no defect may be incident on the camera 200 and a dark field may not be generated. If the angle θ4 is greater than 40°, light scattered by defects of the object 100 may not be incident on the camera 200 and thus the defects may not be detected.
根据示例性实施例，第三发光单元600包括在反射器400的两个方向中的每个方向上的三个照明源。然而，示例性实施例不限于此，且可以以多种方式来修改第三发光单元600的照明源的位置和数量。According to an exemplary embodiment, the third light emitting unit 600 includes three illumination sources in each of two directions of the reflector 400 . However, exemplary embodiments are not limited thereto, and the positions and numbers of illumination sources of the third light emitting unit 600 may be modified in various ways.
第三发光单元600可适于检测主要产生散射光的缺陷，诸如形成在物体100上的刮痕和凹痕。如上所述，由于第三发光单元600包括发射将以不同的角度入射在物体100上的光的多个照明源610、620、630、640、650和660，所以可准确地测量诸如沿多个方向形成的刮痕的缺陷。The third light emitting unit 600 may be adapted to detect defects that mainly generate scattered light, such as scratches and dents formed on the object 100 . As described above, since the third light emitting unit 600 includes a plurality of illumination sources 610, 620, 630, 640, 650, and 660 that emit light that will be incident on the object 100 at different angles, it is possible to accurately measure Defects formed by scratches in the direction.
第二发光单元500可以设置在关于载物台300与第一发光单元230相对的方向上，并可以发射将要入射在物体100上的光。如果物体100包括透明部分，则发射的将要入射在物体100上的光可以穿过物体100并可以入射在相机200(即，成像器件211)上。The second light emitting unit 500 may be disposed in a direction opposite to the first light emitting unit 230 with respect to the stage 300 and may emit light to be incident on the object 100 . If the object 100 includes a transparent portion, emitted light to be incident on the object 100 may pass through the object 100 and may be incident on the camera 200 (ie, the imaging device 211 ).
如果物体100不具有缺陷，则已经穿过物体100的光可以入射在相机200上，且可产生具有明视场的图像。即，由相机200的光轴与垂直于物体100的线所形成的角度θ1及由将第二发光单元500和物体100相连接的线与垂直于物体100的线所形成的角度θ3可在±5°误差的范围内基本相同。If the object 100 has no defects, light that has passed through the object 100 can be incident on the camera 200 and an image with a bright field can be generated. That is, the angle θ1 formed by the optical axis of the camera 200 and the line perpendicular to the object100 and the angleθ3 formed by the line connecting the second light emitting unit 500 and the object 100 and the line perpendicular to the object 100 may be It is basically the same within the range of ±5° error.
如果物体100具有缺陷，则被缺陷阻挡的光可能没有入射在相机200上。即，物体100的缺陷可显示为与由相机200捕捉的图像上的明视场相比相对暗的点。If the object 100 has a defect, light blocked by the defect may not be incident on the camera 200 . That is, defects of object 100 may appear as relatively dark spots compared to bright field on an image captured by camera 200 .
第二发光单元500可以准确确定是否在物体100中形成有孔以及孔的位置或形状是否具有缺陷，且如果物体100被形成为多层，则可以检测设置在层之间的异物颗粒以及包括在物体100中的光学装置中的缺陷。The second light emitting unit 500 can accurately determine whether a hole is formed in the object 100 and whether the position or shape of the hole is defective, and if the object 100 is formed in multiple layers, it can detect foreign particles disposed between layers and Defects in optics in object 100 .
根据示例性实施例，缺陷检查设备1可以包括设置为靠近第二发光单元500并以与由第二发光单元500发射的光的角度不同的角度发射将要入射在物体100上的光的第四发光装置700。According to an exemplary embodiment, the defect inspection apparatus 1 may include a fourth light emitting unit disposed close to the second light emitting unit 500 and emitting light to be incident on the object 100 at an angle different from that of light emitted by the second light emitting unit 500 . Device 700.
第四发光装置700可以包括分别设置在第二发光单元500的两个方向上并沿不同的方向发射将要入射在物体100上的光的照明装置710和720。照明装置710和720中的每个可以包括由线形照明装置形成并发射平行光束的多个照明源700a。The fourth light emitting device 700 may include lighting devices 710 and 720 respectively disposed in two directions of the second light emitting unit 500 and emitting light to be incident on the object 100 in different directions. Each of the lighting devices 710 and 720 may include a plurality of lighting sources 700a formed by a linear lighting device and emitting parallel light beams.
由第四发光装置700发射的光可以以与由第二发光单元500发射的光的角度不同的角度入射在物体100上。如果物体100不具有缺陷，则由第四发光单元700发射、入射在物体100上并穿过物体100的光可以不入射在相机200(即，成像器件211)上。即，即，由相机200捕获的图像上可能形成暗视场。Light emitted by the fourth light emitting device 700 may be incident on the object 100 at an angle different from that of light emitted by the second light emitting unit 500 . If the object 100 has no defect, light emitted by the fourth light emitting unit 700 , incident on and passing through the object 100 may not be incident on the camera 200 (ie, the imaging device 211 ). That is, a dark field may be formed on an image captured by the camera 200 .
然而，如果物体100具有缺陷，则因被缺陷沿其他方向反射或散射而导致光路被改变的一部分光可能入射在相机200上。即，物体100的缺陷可显示为与在相机200捕获的图像上的暗视场相比相对亮的点。However, if the object 100 has a defect, a part of the light whose optical path is changed due to being reflected or scattered by the defect in other directions may be incident on the camera 200 . That is, defects of the object 100 may appear as relatively bright spots compared to the dark field on the image captured by the camera 200 .
根据示例性实施例，第四发光装置700包括线照明装置，该线照明装置包括多个照明源700a并分别被设置在第二发光单元500的两个方向上。然而，示例性实施例不限于此，可以以多种方式来修改第四发光装置700的位置和包括在第四发光装置700中的照明源的数量。According to an exemplary embodiment, the fourth light emitting device 700 includes a line lighting device including a plurality of lighting sources 700a and disposed in two directions of the second light emitting unit 500, respectively. However, exemplary embodiments are not limited thereto, and the position of the fourth light emitting device 700 and the number of illumination sources included in the fourth light emitting device 700 may be modified in various ways.
参照图3A，根据示例性实施例的相机200可以包括主体210、镜筒220和第一发光单元230。主体210可以包括接收光并将接收的光转换为电信号的成像器件211以及信号处理电路(未示出)。镜筒220可以包括在成像器件211上形成图像的光学系统221和222。第一发光单元230可以包括诸如发光二极管(LED)的照明源和将由照明源发射的光转换为平行光束的准直透镜232。Referring to FIG. 3A , a camera 200 according to an exemplary embodiment may include a body 210 , a lens barrel 220 and a first light emitting unit 230 . The main body 210 may include an imaging device 211 that receives light and converts the received light into an electrical signal, and a signal processing circuit (not shown). The lens barrel 220 may include optical systems 221 and 222 that form an image on the imaging device 211 . The first light emitting unit 230 may include an illumination source such as a light emitting diode (LED), and a collimator lens 232 converting light emitted by the illumination source into parallel beams.
已经穿过准直透镜232的光可以被反射镜233反射。然后，可以改变光的光路，因此光可以穿过光学系统222并被发射到外部。反射镜223的反射率可以为大约95％或者更高。反射镜223可以用作阻挡从外部入射在相机200上的光的一部分或所有部分从而不入射在成像器件211上的阻挡单元223。Light that has passed through the collimator lens 232 may be reflected by the mirror 233 . Then, the optical path of the light may be changed so that the light may pass through the optical system 222 and be emitted to the outside. The reflectivity of the mirror 223 may be about 95% or higher. The mirror 223 may serve as the blocking unit 223 that blocks a part or all of light incident on the camera 200 from the outside so as not to be incident on the imaging device 211 .
参照图3B，除了穿过准直透镜232的光可以被半反射镜224反射之外，所有的元件均与图3A相同。然后，可以改变光的光路，且光可以穿过光学系统222并被发射到外部。可以在半反射镜224和成像器件211之间单独地设置阻挡单元225。Referring to FIG. 3B , all elements are the same as in FIG. 3A except that light passing through the collimating lens 232 may be reflected by the half mirror 224 . Then, the optical path of the light may be changed, and the light may pass through the optical system 222 and be emitted to the outside. The blocking unit 225 may be separately provided between the half mirror 224 and the imaging device 211 .
根据由物体100反射的光的角度，在图3A和图3B中示出的阻挡单元223和225可以或者可以不阻挡入射在成像器件211上的全部的或一部分的光。The blocking units 223 and 225 shown in FIGS. 3A and 3B may or may not block all or a part of light incident on the imaging device 211 according to the angle of light reflected by the object 100 .
特别地，即使物体100具有缺陷，但是如果缺陷没有显著地改变光路，则由物体100反射的光也可能入射在相机200上。In particular, even if the object 100 has a defect, light reflected by the object 100 may be incident on the camera 200 if the defect does not significantly change the light path.
根据缺陷的3维(3D)形状，由缺陷的一部分反射的光可能沿相机200的光轴传播。光可以入射在成像器件211上，同时，沿相机200的光轴入射的光束中的大约一半可以被阻挡单元223和225阻挡。Depending on the 3-dimensional (3D) shape of the defect, light reflected by a portion of the defect may travel along the optical axis of the camera 200 . Light may be incident on the imaging device 211 , and at the same time, about half of light beams incident along the optical axis of the camera 200 may be blocked by the blocking units 223 and 225 .
由缺陷的另一部分反射的光可以沿完全在阻挡单元223和225之外的光路入射。在这样的情况下，光可能没有被阻挡单元223和225阻挡并入射在成像器件211上。由缺陷的另外的部分反射的光可能被阻挡单元223和225完全阻挡且不入射在成像装置211上。Light reflected by another part of the defect may be incident along an optical path completely outside the blocking units 223 and 225 . In this case, the light may not be blocked by the blocking units 223 and 225 and be incident on the imaging device 211 . Light reflected by another part of the defect may be completely blocked by the blocking units 223 and 225 and not incident on the imaging device 211 .
即，捕获的图像的亮度可能根据缺陷的3D形状而改变，因此，可以基于捕获的图像来还原3D形状。That is, the brightness of the captured image may change according to the 3D shape of the defect, and thus, the 3D shape can be restored based on the captured image.
如上所述，根据图1中示出的示例性实施例的具有简单结构的缺陷检查设备1可以检测多种缺陷。As described above, the defect inspection apparatus 1 having a simple structure according to the exemplary embodiment shown in FIG. 1 can detect various defects.
图4是根据另一示例性实施例的缺陷检查设备2的示意图。FIG. 4 is a schematic diagram of a defect inspection device 2 according to another exemplary embodiment.
下文中，将仅描述与图1的缺陷检查设备1的元件不同的元件。Hereinafter, only elements different from those of the defect inspection apparatus 1 of FIG. 1 will be described.
参照图4，根据另一示例性实施例的缺陷检查设备2可以包括：第一发光单元230，发射将要入射在物体100上的光；反射器400，将由第一发光单元230发射且随后被物体100反射的光反射到物体100上；第二发光单元500，设置在关于载物台300与第一发光单元230相对的方向上并且发射将要入射在物体100上的光；相机，接收被物体100反射且穿过物体100的光；第三发光单元600，设置为靠近反射器400并且发射将要入射在物体100上的光。Referring to FIG. 4 , a defect inspection apparatus 2 according to another exemplary embodiment may include: a first light emitting unit 230 emitting light to be incident on an object 100; a reflector 400 to be emitted by the first light emitting unit 230 and subsequently illuminated by the object The light reflected by 100 is reflected on the object 100; the second light-emitting unit 500 is arranged on the direction opposite to the first light-emitting unit 230 with respect to the stage 300 and emits light that will be incident on the object 100; The light reflected and passed through the object 100 ; the third light emitting unit 600 is disposed close to the reflector 400 and emits the light to be incident on the object 100 .
根据另一示例性实施例的缺陷检查设备2还可以包括：第五发光单元830，在关于物体100与第二发光单元500相同的方向(即，在与第二发光单元500所处的相对于物体100的一侧相同的一侧)上发射将要沿垂直方向入射在物体100上的光；垂直相机800，接收由第五发光单元830发射并被物体100反射的光。第五发光单元830可以包括照明源810和将由照明源810发射的光的方向转换为与物体100垂直的方向的半反射镜820。The defect inspection device 2 according to another exemplary embodiment may further include: a fifth light emitting unit 830, positioned in the same direction as the second light emitting unit 500 with respect to the object 100 (that is, in the direction opposite to where the second light emitting unit 500 is located). The same side as one side of the object 100 ) emits the light that will be incident on the object 100 along the vertical direction; the vertical camera 800 receives the light emitted by the fifth light emitting unit 830 and reflected by the object 100 . The fifth light emitting unit 830 may include an illumination source 810 and a half mirror 820 converting a direction of light emitted by the illumination source 810 into a direction perpendicular to the object 100 .
第五发光单元830和垂直相机800可以用于准确检测物体100中的孔的缺陷，并确定物体100中包括的光学装置是否具有缺陷。The fifth light emitting unit 830 and the vertical camera 800 may be used to accurately detect a defect of a hole in the object 100 and determine whether an optical device included in the object 100 has a defect.
虽然没有示出，但是缺陷检查设备2可以另外地包括通过以预定的倾斜角度发射将要入射在物体100上的光来发射将入射在垂直相机800上的散射光的照明装置。Although not shown, the defect inspection apparatus 2 may additionally include an illumination device emitting scattered light to be incident on the vertical camera 800 by emitting the light to be incident on the object 100 at a predetermined oblique angle.
图5至图10是根据其他的示例性实施例的缺陷检查设备3至8的示意图。5 to 10 are schematic diagrams of defect inspection apparatuses 3 to 8 according to other exemplary embodiments.
参照图5，根据另一示例性实施例的缺陷检查设备3可以包括：载物台(未示出)，物体100设置在载物台上；第一发光单元230＇，发射将入射在物体100上的光；第二发光单元500，设置在关于载物台300与第一发光单元230＇相对的方向上并且发射将入射在物体100上的光；相机200＇，捕捉从第一发光单元230＇入射在物体100上且随后被物体100反射的光以及从第二发光单元500入射在物体100上且随后穿过物体100的光；第三发光单元600＇，设置为靠近第一发光单元230＇并且发射将入射在物体100上的光。Referring to FIG. 5, a defect inspection device 3 according to another exemplary embodiment may include: a stage (not shown), on which an object 100 is placed; the light on the object 100; the second light emitting unit 500 is arranged in the direction opposite to the first light emitting unit 230' with respect to the stage 300 and emits the light that will be incident on the object 100; the camera 200' captures light from the first light emitting unit 230 'The light that is incident on the object 100 and then reflected by the object 100 and the light that is incident on the object 100 from the second light emitting unit 500 and then passes through the object 100; ' and emit the light that will be incident on the object 100.
相机200＇可以包括将入射光转换为电信号的成像器件211和在成像器件211上形成像的光学系统226。与在图3A和图3B中示出的相机200不同，根据图5中示出的示例性实施例的相机200＇可以不包括阻挡部分或全部的入射光的阻挡单元223和225。The camera 200 ′ may include an imaging device 211 converting incident light into an electrical signal and an optical system 226 forming an image on the imaging device 211 . Unlike the camera 200 shown in FIGS. 3A and 3B , the camera 200' according to the exemplary embodiment shown in FIG. 5 may not include the blocking units 223 and 225 blocking part or all of incident light.
如果物体100不具有缺陷，则从第一发光单元230＇入射在物体100上的光可以入射在相机200＇上，且可产生具有明视场的图像。即，由相机200＇的光轴与垂直于物体100的线所形成的角度θ6和由将第一发光单元230＇和物体100相连接的线与垂直于物体100的线所形成的角度θ5可在±10°的误差幅度内基本相同。If the object 100 has no defect, light incident on the object 100 from the first light emitting unit 230' may be incident on the camera 200', and an image having a bright field may be generated. That is, the angleθ6 formed by the optical axis of the camera 200' and the line perpendicular to the object 100 and the angle θ formed by the line connecting the first light emitting unit 230' and the object 100 and the line perpendicular to the object 1005 can be substantially the same within a margin of error of ±10°.
如果物体100具有缺陷，则因被缺陷沿其他方向反射或散射而导致光路被改变的一部分光可能不入射在相机200＇上。即，物体100的缺陷可呈现为与在相机200＇捕获的图像上的明视场相比相对暗的点。If the object 100 has a defect, a part of the light whose optical path is changed due to being reflected or scattered by the defect in other directions may not be incident on the camera 200'. That is, defects of the object 100 may appear as relatively dark spots compared to the bright field on the image captured by the camera 200'.
阻挡由第一发光单元230＇发射的一部分光(例如，大约一半的光束)的阻挡单元910可以设置在第一发光单元230＇的前方。因阻挡单元910使得在入射在物体100上的光束中的仅由第一发光单元230＇发射的光束的大约一半可以被物体100反射。A blocking unit 910 blocking a portion of light (eg, about half of the light beam) emitted by the first light emitting unit 230' may be disposed in front of the first light emitting unit 230'. Only about half of the light beams emitted by the first light emitting unit 230 ′ among the light beams incident on the object 100 may be reflected by the object 100 due to the blocking unit 910 .
如果物体100具有弯曲形状的缺陷，则由相机200＇捕获的图像可以根据缺陷的形状而是明或暗的，且可以基于捕获的图像来还原缺陷的3D形状。If the object 100 has a defect of a curved shape, an image captured by the camera 200' may be bright or dark according to the shape of the defect, and the 3D shape of the defect may be restored based on the captured image.
第三发光单元600＇可以设置在靠近第一发光单元230＇的区域。由第三发光单元600＇发射的光可以以与由第一发光单元230＇发射的光的角度不同的角度入射在物体100上。The third light emitting unit 600' may be disposed in a region close to the first light emitting unit 230'. The light emitted by the third light emitting unit 600' may be incident on the object 100 at an angle different from that of the light emitted by the first light emitting unit 230'.
如果物体100不具有缺陷，则从第三发光单元600＇入射在物体100上并被物体100反射的光可以不入射在相机200＇上。即，可以在由相机200＇捕获的图像中形成暗视场。If the object 100 has no defect, light incident on the object 100 from the third light emitting unit 600' and reflected by the object 100 may not be incident on the camera 200'. That is, a dark field may be formed in an image captured by the camera 200'.
然而，如果物体100具有缺陷，则因被缺陷沿其他方向反射或散射而导致光路被改变的一部分光可能入射在相机200＇上。即，物体100的缺陷可呈现为与在相机200＇捕获的图像上的暗视场相比相对亮的点。However, if the object 100 has a defect, a part of the light whose optical path is changed due to being reflected or scattered in other directions by the defect may be incident on the camera 200'. That is, defects of the object 100 may appear as relatively bright spots compared to the dark field on the image captured by the camera 200'.
第三发光单元600＇可以包括分别设置在第一发光单元230＇的两个方向上的两个照明源670和680。第一发光单元230＇和第三发光单元600＇之间的角度θ8的范围可以为从10°至40°，但是不限于此。The third light emitting unit 600' may include two illumination sources 670 and 680 disposed in two directions of the first light emitting unit 230', respectively. The angleθ8 between the first light emitting unit 230' and the third light emitting unit 600' may range from 10° to 40°, but is not limited thereto.
第二发光单元500设置在关于物体100与第一发光单元230＇相对的方向上，并可以发射将要入射在物体100上的光。The second light emitting unit 500 is disposed in a direction opposite to the first light emitting unit 230 ′ with respect to the object 100 , and may emit light to be incident on the object 100 .
如果物体100包括透明部分，则发射的将入射在物体100上的光可以穿过物体100并可以入射在相机200＇上。If the object 100 includes a transparent portion, the emitted light to be incident on the object 100 may pass through the object 100 and may be incident on the camera 200'.
如果物体100不具有缺陷，则已经穿过物体100的光可以入射在相机200＇上，并可以产生具有明视场的图像。即，由相机200＇的光轴与垂直于物体100的线所形成的角度θ6以及由将第二发光单元500和物体100相连接的线与垂直于物体100的线所形成的角度θ7可在±5°的误差幅度内基本相同。If the object 100 has no defects, light that has passed through the object 100 may be incident on the camera 200', and an image with a bright field may be generated. That is, the angleθ6 formed by the optical axis of the camera 200' and the line perpendicular to the object 100 and the angleθ7 formed by the line connecting the second light emitting unit 500 and the object 100 and the line perpendicular to the object 100 They can be substantially the same within a margin of error of ±5°.
如果物体100具有缺陷，则被缺陷阻挡的光可能不入射在相机200＇上。即，物体100的缺陷可呈现为与在相机200＇捕获的图像上的明视场相比相对暗的点。If the object 100 has a defect, light blocked by the defect may not be incident on the camera 200'. That is, defects of the object 100 may appear as relatively dark spots compared to the bright field on the image captured by the camera 200'.
参照图6，根据另一示例性实施例的缺陷检查设备4的元件与图5的缺陷检查设备3的元件相同，除了阻挡单元910之外。Referring to FIG. 6 , elements of a defect inspection apparatus 4 according to another exemplary embodiment are the same as those of the defect inspection apparatus 3 of FIG. 5 except for a blocking unit 910 .
图6的缺陷检查设备4不包括设置在第一发光单元230＇前方的阻挡单元910。可以将阻挡由第二发光单元500发射的光的一部分(例如，大约光束的一半)的阻挡单元920设置在包括在缺陷检查设备4中的第二发光单元500的前方。因阻挡单元920使得仅由第二发光单元500发射的大约一半的光束可以被物体100反射、穿过物体100且随后入射在相机200＇上。The defect inspection apparatus 4 of FIG. 6 does not include the blocking unit 910 disposed in front of the first light emitting unit 230'. A blocking unit 920 blocking a part (for example, about half of the light beam) of light emitted by the second light emitting unit 500 may be disposed in front of the second light emitting unit 500 included in the defect inspection apparatus 4 . Due to the blocking unit 920, only about half of the light beam emitted by the second light emitting unit 500 may be reflected by the object 100, pass through the object 100, and then be incident on the camera 200'.
如果物体100具有弯曲形状的缺陷，则由相机200＇捕获的图像可以根据缺陷的形状而是明或暗的，且可以基于捕获的图像来还原缺陷的3D形状。If the object 100 has a defect of a curved shape, an image captured by the camera 200' may be bright or dark according to the shape of the defect, and the 3D shape of the defect may be restored based on the captured image.
参照图7，除了阻挡单元910和第一发光单元230＇的位置之外，根据另一示例性实施例的缺陷检查设备5的元件与图5的缺陷检查设备3的元件相同。Referring to FIG. 7 , elements of a defect inspection apparatus 5 according to another exemplary embodiment are the same as those of the defect inspection apparatus 3 of FIG. 5 except for positions of the blocking unit 910 and the first light emitting unit 230 ′.
图7的缺陷检查设备5不包括阻挡单元910。包括在缺陷检查设备5中的第一发光单元230＇可以从与相机200＇的光轴OA的同轴的轴线CA对应的位置沿与同轴的轴线CA垂直的方向移位达预定的距离，并可以沿与同轴的轴线CA基本平行的方向发射光。The defect inspection apparatus 5 of FIG. 7 does not include the barrier unit 910 . The first light emitting unit 230' included in the defect inspection apparatus 5 may be displaced by a predetermined distance in a direction perpendicular to the coaxial axis CA from a position corresponding to the coaxial axis CA of the optical axis OA of the camera 200', And may emit light in a direction substantially parallel to the coaxial axis CA.
因此，由第一发光单元230＇发射的光可以像图5的第一发光单元230＇一样以角度θ5入射在物体100上，并可以沿与相机200＇的光轴OA垂直的方向移位达预定距离的方向入射在相机200＇上。Therefore, the light emitted by the first light emitting unit 230' can be incident on the object 100 at an angle θ5 like the first light emitting unit 230' of FIG.5 , and can be displaced in a direction perpendicular to the optical axis OA of the camera 200' A direction up to a predetermined distance is incident on the camera 200'.
即，仅由第一发光单元230＇发射的一部分光(例如，大约一半的光束)可以入射在相机200＇上。如果物体100具有弯曲形状的缺陷，则由相机200＇捕获的图像可以根据缺陷的形状而是明或暗的，且可以基于图像来还原缺陷的3D形状。That is, only a part of the light (for example, about half of the light beam) emitted by the first light emitting unit 230' may be incident on the camera 200'. If the object 100 has a defect of a curved shape, an image captured by the camera 200' may be bright or dark according to the shape of the defect, and the 3D shape of the defect may be restored based on the image.
参照图8，除了阻挡单元910和第二发光单元500的位置之外，根据另一示例性实施例的缺陷检查设备6的元件与图5的缺陷检查设备3的元件相同。Referring to FIG. 8 , elements of a defect inspection apparatus 6 according to another exemplary embodiment are the same as those of the defect inspection apparatus 3 of FIG. 5 except for positions of the blocking unit 910 and the second light emitting unit 500 .
图8的缺陷检查设备6不包括阻挡单元910。包括在缺陷检查设备6中的第二发光单元500可以从与相机200＇的光轴OA的同轴的轴线CA对应的位置沿与同轴的轴线CA垂直的方向移位达预定的距离，并可以沿与同轴的轴线CA基本平行的方向发射光。The defect inspection apparatus 6 of FIG. 8 does not include the blocking unit 910 . The second light emitting unit 500 included in the defect inspection apparatus 6 may be displaced by a predetermined distance in a direction perpendicular to the coaxial axis CA from a position corresponding to the coaxial axis CA of the optical axis OA of the camera 200', and Light may be emitted in a direction substantially parallel to the coaxial axis CA.
因此，由第二发光单元500发射的光可以像图5的第二发光单元500一样以角度θ7入射在物体100上，并可以沿与相机200＇的光轴OA垂直的方向移位达预定距离的方向入射在相机200＇上。Therefore, the light emitted by the second light emitting unit 500 may be incidenton the object 100 at an angle θ7 like the second light emitting unit 500 of FIG. The direction of the distance is incident on the camera 200'.
即，仅由第二发光单元500发射的一部分光(例如，大约一半的光束)可以入射在相机200＇上。如果物体100具有弯曲形状的缺陷，则由相机200＇捕获的图像可以根据缺陷的形状而是明或暗的，且可以基于图像来还原缺陷的3D形状。That is, only a part of the light emitted by the second light emitting unit 500 (for example, about half of the light beam) may be incident on the camera 200'. If the object 100 has a defect of a curved shape, an image captured by the camera 200' may be bright or dark according to the shape of the defect, and the 3D shape of the defect may be restored based on the image.
参照图9，除了另外设置了第六发光单元900之外，根据另一示例性实施例的缺陷检查设备7的元件与图1的缺陷检查设备1的元件相同。Referring to FIG. 9 , elements of a defect inspection apparatus 7 according to another exemplary embodiment are the same as those of the defect inspection apparatus 1 of FIG. 1 except that a sixth light emitting unit 900 is additionally provided.
第六发光单元900可以设置在载物台300上，可以朝向物体100的侧表面发射光，并可以包括分别设置在物体100的两侧的两个照明装置910和920。照明装置910和920中的每个不限于特定的类型，且可以包括单个照明源或多个照明源。第六发光单元900的位置不限于图9中示出的位置。第六发光单元900可以设置在物体100的前部和/或后部，并可以朝向物体100的其他的表面发射光。前部和后部可以分别与物体100的移动方向和与移动方向相反的方向对应。The sixth light emitting unit 900 may be disposed on the stage 300 , may emit light toward a side surface of the object 100 , and may include two illuminating devices 910 and 920 respectively disposed on both sides of the object 100 . Each of the lighting devices 910 and 920 is not limited to a specific type, and may include a single lighting source or a plurality of lighting sources. The position of the sixth light emitting unit 900 is not limited to the position shown in FIG. 9 . The sixth light emitting unit 900 may be disposed at the front and/or rear of the object 100 and may emit light toward other surfaces of the object 100 . The front and rear may correspond to a moving direction and a direction opposite to the moving direction of the object 100, respectively.
物体100可以被设置为在载物台300上是可移动的。可以在物体100沿载物台300的长度方向移动的同时对物体100的整个部分执行缺陷检查工艺。The object 100 may be configured to be movable on the stage 300 . The defect inspection process may be performed on the entire portion of the object 100 while the object 100 moves along the length direction of the stage 300 .
从第六发光单元900入射的光可以被物体100散射且随后入射在相机200中包括的成像器件211上。因为第六发光单元900朝向物体100的侧表面发射光，所以由第六发光单元900发射的光可能没有被包括在物体100中的光学装置中的缺陷(诸如刮痕、凹痕或污迹)所散射，而是可能主要被包括在物体100中的光学装置的表面上的灰尘或其他异物颗粒所散射。Light incident from the sixth light emitting unit 900 may be scattered by the object 100 and then incident on the imaging device 211 included in the camera 200 . Since the sixth light emitting unit 900 emits light toward the side surface of the object 100, the light emitted by the sixth light emitting unit 900 may not be included in defects in optical devices in the object 100 such as scratches, dents, or stains. Instead, it may be mainly scattered by dust or other foreign particles on the surface of the optical device included in the object 100 .
即，在由第六发光单元900发射光之后，仅灰尘或其他异物颗粒可能呈现在由相机200捕获的图像上。That is, after light is emitted by the sixth light emitting unit 900 , only dust or other foreign particles may appear on the image captured by the camera 200 .
因此，通过使用第一发光单元230、第二发光单元500或第三发光单元600产生的图像的坐标可以与通过使用第六发光单元900产生的图像的坐标进行匹配和比较，因此，可以对由灰尘或其他异物颗粒导致的缺陷和光学装置中的缺陷进行彼此的区分。这将随后在下面进行描述。Therefore, the coordinates of the image generated by using the first light emitting unit 230, the second light emitting unit 500, or the third light emitting unit 600 can be matched and compared with the coordinates of the image generated by using the sixth light emitting unit 900, and thus, the coordinates of the image generated by using the sixth light emitting unit 900 can be compared. Defects caused by dust or other foreign particles and defects in optical devices are distinguished from each other. This will be described later below.
参照图10，除了另外设置了第六发光单元900之外，根据另一示例性实施例的缺陷检查设备8的元件与图4的缺陷检查设备2的元件相同。Referring to FIG. 10 , elements of a defect inspection apparatus 8 according to another exemplary embodiment are the same as those of the defect inspection apparatus 2 of FIG. 4 except that a sixth light emitting unit 900 is additionally provided.
第六发光单元900可以设置在载物台300上，并可以朝向物体100的侧表面发射光。第六发光单元900中不限于特定的类型，并可以包括单个照明源或多个照明源。The sixth light emitting unit 900 may be disposed on the stage 300 and may emit light toward a side surface of the object 100 . The sixth light emitting unit 900 is not limited to a specific type, and may include a single lighting source or a plurality of lighting sources.
由第六发光单元900发射的光可以被物体100散射并入射在垂直相机800上。因为第六发光单元900朝向物体100的侧表面发射光，所以由第六发光单元900发射的光可能没有被包括在物体100中的光学装置中的缺陷(诸如刮痕、凹痕或污迹)所散射，而是可能主要被包括在物体100中的光学装置的表面上的灰尘或其他异物颗粒所散射。Light emitted by the sixth light emitting unit 900 may be scattered by the object 100 and incident on the vertical camera 800 . Since the sixth light emitting unit 900 emits light toward the side surface of the object 100, the light emitted by the sixth light emitting unit 900 may not be included in defects in optical devices in the object 100 such as scratches, dents, or stains. Instead, it may be mainly scattered by dust or other foreign particles on the surface of the optical device included in the object 100 .
即，在由第六发光单元900发射光之后，仅灰尘或其他异物颗粒可能呈现在由垂直相机800得到的图像上。That is, after light is emitted by the sixth light emitting unit 900 , only dust or other foreign particles may appear on the image obtained by the vertical camera 800 .
因此，通过使用第一发光单元230、第二发光单元500、第三发光单元600或第五发光单元830产生的图像的坐标可以与通过使用第六发光单元900产生的图像的坐标进行匹配和比较，因此，可以对由灰尘或其他异物颗粒导致的缺陷和光学装置中的缺陷进行彼此的区分。这将随后在下面进行描述。Therefore, coordinates of an image generated by using the first light emitting unit 230, the second light emitting unit 500, the third light emitting unit 600, or the fifth light emitting unit 830 can be matched and compared with coordinates of an image generated by using the sixth light emitting unit 900. , and thus, defects caused by dust or other foreign particles and defects in the optical device can be distinguished from each other. This will be described later below.
图11是根据示例性实施例的缺陷检查方法的流程图。FIG. 11 is a flowchart of a defect inspection method according to an exemplary embodiment.
参照图11，根据示例性实施例的缺陷检查方法可以包括：将物体100设置在载物台300上(S110)；通过使用第一发光单元230发射将入射在物体100上的光、通过使用反射器400将由第一发光单元230发射且随后被物体100反射的光反射到物体100上、以及由成像器件211接收从反射器400再次入射在物体100上且随后被物体100反射的光来获得第一图像(S120)；通过使用设置在关于载物台300与第一发光单元230相对的方向上的第二发光单元500发射将入射在物体100上的光、且由成像器件211接收由第二发光单元500发射并穿过物体100的光来获得第二图像(S130)；通过使用设置为靠近反射器400的第三发光单元600以与由反射器400反射的光的角度不同的角度发射将入射在物体100上的光、且由成像器件211接收从第三发光单元600入射在物体100上并被物体100散射的光来获得第三图像(S140)。Referring to FIG. 11 , a defect inspection method according to an exemplary embodiment may include: setting an object 100 on a stage 300 (S110); emitting light to be incident on the object 100 by using the first light emitting unit 230; The reflector 400 reflects the light emitted by the first light emitting unit 230 and then reflected by the object 100 onto the object 100, and the light incident on the object 100 from the reflector 400 and then reflected by the object 100 is received by the imaging device 211 to obtain the first An image (S120); emitting light to be incident on the object 100 by using the second light emitting unit 500 disposed in a direction opposite to the first light emitting unit 230 with respect to the stage 300, and received by the imaging device 211 by the second light emitting unit 500 Light emitted by the light emitting unit 500 and passed through the object 100 to obtain a second image (S130); by using the third light emitting unit 600 disposed close to the reflector 400 to emit the light at an angle different from that of the light reflected by the reflector 400. Light incident on the object 100 and light incident on the object 100 from the third light emitting unit 600 and scattered by the object 100 are received by the imaging device 211 to obtain a third image (S140).
此外，获得第一图像至第三图像且随后对从第一图像至第三图像中选择的至少两个图像的坐标进行匹配(S160)且从匹配的图像检测缺陷并区分缺陷的类型(S170)。In addition, first to third images are obtained and coordinates of at least two images selected from the first to third images are then matched (S160) and defects are detected from the matched images and types of defects are distinguished (S170) .
可以通过匹配成像器件211的像素之间的间距、基于基础点重叠图像、或者通过使用其他的方法来匹配坐标。缺陷可以为刮痕、凹痕、突起、污迹、碎屑、物体100中的光学装置的缺陷、或者漂浮的异物颗粒。可以通过分析和比较图像来检测和区分缺陷。Coordinates may be matched by matching the pitch between pixels of the imaging device 211 , overlapping images based on base points, or by using other methods. Defects may be scratches, dents, protrusions, smudges, debris, defects in optics in object 100, or floating foreign particles. Defects can be detected and differentiated by analyzing and comparing images.
具体地讲，与其他的缺陷不同，可以容易地去除漂浮的异物颗粒。因此，必须从捕获的图像区分出由漂浮的异物颗粒导致的缺陷。Specifically, unlike other defects, floating foreign particles can be easily removed. Therefore, defects caused by floating foreign particles must be distinguished from captured images.
图12A至图12H是根据图11的缺陷检查方法的用于测量和区分缺陷的图像。12A to 12H are images for measuring and distinguishing defects according to the defect inspection method of FIG. 11 .
参照图12A至图12H，分别示出了包括凹痕缺陷、突起缺陷、刮痕缺陷、光学装置缺陷1、光学装置缺陷2、碎屑缺陷、漂浮的异物颗粒缺陷1、漂浮的异物颗粒缺陷2的捕获图像。Referring to FIG. 12A to FIG. 12H , the defects including dent, protrusion, scratch, optical device defect 1, optical device defect 2, debris defect, floating foreign particle defect 1, and floating foreign particle defect 2 are shown respectively. captured image.
图12A示出了通过使用第一发光单元230和第二发光单元500捕获的包括凹痕缺陷的图像。即，黑色的凹痕缺陷在通过使用第一发光单元230捕获的图像中是黑色的，且在通过使用第二发光单元500捕获的图像中是白色的。FIG. 12A shows an image including a dent defect captured by using the first light emitting unit 230 and the second light emitting unit 500 . That is, the black dent defect is black in an image captured by using the first light emitting unit 230 and is white in an image captured by using the second light emitting unit 500 .
图12B示出了通过使用第一发光单元230和第二发光单元500捕获的包括突起缺陷的图像。即，黑色的突起缺陷在通过使用第一发光单元230捕获的图像中是黑色的，且在通过使用第二发光单元500捕获的图像中是白色的。FIG. 12B shows an image including protrusion defects captured by using the first light emitting unit 230 and the second light emitting unit 500 . That is, a black protrusion defect is black in an image captured by using the first light emitting unit 230 and is white in an image captured by using the second light emitting unit 500 .
可以通过由第二发光单元500捕获的图像中的黑色部分和白色部分的位置来区分凹痕缺陷和突起缺陷。例如，如果缺陷的上部是黑色的且缺陷的下部是白色的，则缺陷可能是凹痕缺陷。如果缺陷的上部是白色的且缺陷的下部是黑色的，则缺陷可能是突起缺陷Dent defects and protrusion defects may be distinguished by positions of black and white parts in the image captured by the second light emitting unit 500 . For example, if the upper part of the defect is black and the lower part of the defect is white, the defect may be a dent defect. If the upper part of the defect is white and the lower part of the defect is black, the defect is probably a protruding defect
图12C示出了通过使用第一发光单元230和第二发光单元500捕获的包括刮痕缺陷的图像。刮痕缺陷可能仅显示在通过使用第一发光单元230捕获的图像中而不显示在通过使用第二发光单元500捕获的图像中。FIG. 12C shows an image including a scratch defect captured by using the first light emitting unit 230 and the second light emitting unit 500 . A scratch defect may be displayed only in an image captured by using the first light emitting unit 230 and not in an image captured by using the second light emitting unit 500 .
图12D示出了通过使用第一发光单元230和第二发光单元500捕获的包括光学装置缺陷1的图像。光学装置可以为诸如移动电话的物体100中的红外滤波器，光学装置缺陷1可以仅显示在通过使用第二发光单元500捕获的图像中而不显示在通过使用第一发光单元230捕获的图像中。FIG. 12D shows an image including an optical device defect 1 captured by using the first light emitting unit 230 and the second light emitting unit 500 . The optical device may be an infrared filter in the object 100 such as a mobile phone, and the optical device defect 1 may only be displayed in an image captured by using the second light emitting unit 500 and not in an image captured by using the first light emitting unit 230 .
图12E示出了通过使用第一发光单元230和第三发光单元600捕获的包括光学装置缺陷2的图像。光学装置缺陷2可以仅显示在通过使用第三发光单元600捕获的图像中而不显示在通过使用第一发光单元230捕获的图像中。FIG. 12E shows an image including an optical device defect 2 captured by using the first light emitting unit 230 and the third light emitting unit 600 . The optical device defect 2 may be displayed only in an image captured by using the third light emitting unit 600 and not in an image captured by using the first light emitting unit 230 .
图12F示出了通过使用第一发光单元230和第二发光单元500捕获的包括碎屑缺陷的图像。碎屑缺陷是用于指示可能在制造工艺期间在加工过的角落处产生的任何缺陷的术语。碎屑缺陷在通过使用第一发光单元230捕获的图像中是黑色的，且在通过使用第二发光单元500捕获的图像中是白色的。FIG. 12F shows an image including debris defects captured by using the first light emitting unit 230 and the second light emitting unit 500 . Debris defect is the term used to indicate any defect that may occur at machined corners during the manufacturing process. Debris defects are black in an image captured by using the first light emitting unit 230 and white in an image captured by using the second light emitting unit 500 .
图12G和12H分别示出了通过使用第一发光单元230和第二发光单元500捕获的包括漂浮的异物颗粒缺陷1和漂浮的异物颗粒缺陷2的图像。漂浮的异物颗粒指附着于物体100的表面或设置在物体100的内部装置之间的诸如灰尘的异物颗粒。因为漂浮的异物颗粒不是物体100自身的缺陷，所以漂浮的异物颗粒可以是很容易被去除的缺陷。12G and 12H show images including floating foreign particle defect 1 and floating foreign particle defect 2 captured by using the first light emitting unit 230 and the second light emitting unit 500 , respectively. The floating foreign particles refer to foreign particles such as dust attached to the surface of the object 100 or disposed between internal devices of the object 100 . Since the floating foreign particles are not a defect of the object 100 itself, the floating foreign particles may be defects that are easily removed.
漂浮的异物颗粒缺陷1和2在通过使用第一发光单元230捕获的图像和通过使用第二发光单元500捕获的图像中均可以是黑色的。The floating foreign particle defects 1 and 2 may be black in both the image captured by using the first light emitting unit 230 and the image captured by using the second light emitting unit 500 .
图13是根据另一示例性实施例的缺陷检查方法的流程图。FIG. 13 is a flowchart of a defect inspection method according to another exemplary embodiment.
参照图13，根据另一示例性实施例的缺陷检查方法可以包括：将物体100设置在载物台300上(S210)；通过使用第一发光单元230发射将入射在物体100上的光、使用反射器400将由第一发光单元230发射且随后被物体100反射的光反射到物体100上、以及由成像器件211接收从反射器400再次入射在物体100上且随后被物体100反射的光来获得第一图像(S220)；通过使用设置在关于载物台300与第一发光单元230相对的方向上的第二发光单元500发射将入射在物体100上的光、且由成像器件211接收由第二发光单元500发射并穿过物体100的光来得到第二图像(S230)；通过使用设置为靠近反射器400的第三发光单元600以与由反射器400反射的光的角度不同的角度发射将入射在物体100上的光、且由成像器件211接收从第三发光单元600入射在物体100上并被物体100散射的光来得到第三图像(S240)；通过使用由载物台300支撑的第六发光单元900朝向物体100的侧表面发射光且通过使用成像器件211或垂直相机800接收由第六发光单元900发射并被物体100散射的光来获得第五图像或第六图像(S250)。Referring to FIG. 13 , a defect inspection method according to another exemplary embodiment may include: setting the object 100 on the stage 300 (S210); emitting light to be incident on the object 100 by using the first light emitting unit 230, using The reflector 400 reflects the light emitted by the first light emitting unit 230 and then reflected by the object 100 onto the object 100, and the light incident on the object 100 from the reflector 400 and then reflected by the object 100 is received by the imaging device 211 to obtain First image (S220); emitting light to be incident on the object 100 by using the second light emitting unit 500 disposed in a direction opposite to the first light emitting unit 230 with respect to the stage 300, and received by the imaging device 211 by the second light emitting unit 500 The light emitted by the second light emitting unit 500 and passed through the object 100 to obtain a second image (S230); by using the third light emitting unit 600 disposed close to the reflector 400 to emit at an angle different from that of the light reflected by the reflector 400 The light incident on the object 100 and the light incident on the object 100 from the third light-emitting unit 600 and scattered by the object 100 are received by the imaging device 211 to obtain a third image (S240); The sixth light emitting unit 900 emits light toward the side surface of the object 100 and receives the light emitted by the sixth light emitting unit 900 and scattered by the object 100 by using the imaging device 211 or the vertical camera 800 to obtain a fifth image or a sixth image (S250 ).
可以通过使用设置在关于载物台300与第二发光单元相同的方向上的第五发光单元830来沿与物体100垂直的方向发射光，且垂直相机800可以接收由第五发光单元830发射并被物体100反射的光。可以由通过垂直相机800接收的光来获得第四图像。Light may be emitted in a direction perpendicular to the object 100 by using the fifth light emitting unit 830 disposed in the same direction as the second light emitting unit with respect to the stage 300, and the vertical camera 800 may receive light emitted by the fifth light emitting unit 830 and Light reflected by the object 100. A fourth image may be obtained from light received through the vertical camera 800 .
根据另一示例性实施例的缺陷检查方法可以包括：将从第一至第三图像中选择的至少两个图像的坐标与第五图像的坐标或第六图像的坐标进行匹配(S260)；从具有匹配的坐标的至少三个图像检测缺陷并区分缺陷的类型(S270)。The defect inspection method according to another exemplary embodiment may include: matching coordinates of at least two images selected from the first to third images with coordinates of the fifth image or coordinates of the sixth image (S260); At least three images with matched coordinates detect defects and distinguish types of defects (S270).
可以通过匹配相机200中的成像器件211的像素和/或垂直相机800中的成像器件(未示出)的像素之间的间距、基于基础点重叠图像、或者通过使用其他的方法来匹配坐标。缺陷可以为刮痕、凹痕、突起、污迹、碎屑、物体100中的光学装置的缺陷、或者漂浮的异物颗粒。可以通过分析和比较图像来检测和区分缺陷。Coordinates may be matched by matching the spacing between pixels of imaging device 211 in camera 200 and/or pixels of an imaging device (not shown) in vertical camera 800 , overlapping images based on base points, or by using other methods. Defects may be scratches, dents, protrusions, smudges, debris, defects in optics in object 100, or floating foreign particles. Defects can be detected and differentiated by analyzing and comparing images.
图14A至图14B是根据图13的缺陷检查方法的用于测量和在缺陷之间进行区分的图像。14A to 14B are images for measuring and distinguishing between defects according to the defect inspection method of FIG. 13 .
图14A示出了通过使用第一发光单元230和第六发光单元900捕获的包括污迹缺陷和漂浮的异物颗粒缺陷的图像。污迹缺陷可以仅显示在通过使用第一发光单元230捕获的图像中而不显示在通过使用第六发光单元900捕获的图像中。漂浮的异物颗粒缺陷可以显示在通过第一发光单元230和第六发光单元900分别捕获的两个图像中。FIG. 14A shows images including stain defects and floating foreign particle defects captured by using the first light emitting unit 230 and the sixth light emitting unit 900 . The smudge defect may be displayed only in an image captured by using the first light emitting unit 230 and not in an image captured by using the sixth light emitting unit 900 . Floating foreign particle defects may be displayed in two images respectively captured by the first light emitting unit 230 and the sixth light emitting unit 900 .
图14B示出了通过使用第三发光单元600和第六发光单元900捕获的包括刮痕缺陷和漂浮的异物颗粒缺陷的图像。刮痕缺陷可以仅显示在通过使用第三发光单元600捕获的图像中而不显示在通过使用第六发光单元900捕获的图像中。漂浮的异物颗粒缺陷可以显示在通过第三发光单元600和第六发光单元900分别捕获的两个图像中。FIG. 14B shows images including scratch defects and floating foreign particle defects captured by using the third light emitting unit 600 and the sixth light emitting unit 900 . The scratch defect may be displayed only in an image captured by using the third light emitting unit 600 and not in an image captured by using the sixth light emitting unit 900 . Floating foreign particle defects may be displayed in two images respectively captured by the third light emitting unit 600 and the sixth light emitting unit 900 .
如上所述，根据示例性实施例，缺陷检查设备可以是很小的，且缺陷检查方法和设备可以用于检测并在多种缺陷之间进行区分。As described above, according to exemplary embodiments, a defect inspection device may be small, and a defect inspection method and device may be used to detect and distinguish between various defects.
虽然已经参照附图描述了一个或多个示例性实施例，但是本领域普通技术人员应该理解的是，可以在不脱离由权利要求限定的精神和范围的情况下在此进行形式和细节方面的多种改变。Although one or more exemplary embodiments have been described with reference to the drawings, it will be understood by those of ordinary skill in the art that changes in form and details may be made therein without departing from the spirit and scope defined by the claims. Various changes.
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