技术领域technical field
本申请涉及传感器技术领域，具体涉及一种光纤光栅六维力传感器及其主体结构和测量方法。The present application relates to the field of sensor technology, in particular to a fiber grating six-dimensional force sensor, its main structure and measurement method.
背景技术Background technique
随着机器人技术的飞速发展，消防机器人、救援机器人等工作于特殊、恶劣环境中的特种机器人的研发越来越受到人们的重视。六维力传感器作为机器人最为重要的力觉传感器，其在特种机器人恶劣工作环境中的适用性和测量准确性就显得尤为重要。With the rapid development of robot technology, people pay more and more attention to the research and development of special robots such as fire-fighting robots and rescue robots that work in special and harsh environments. As the most important force sensor of robots, the six-dimensional force sensor is particularly important for its applicability and measurement accuracy in the harsh working environment of special robots.
目前现有的六维力传感器多是基于电阻应变片组桥测量原理而设计的，电阻应变片受温度、潮湿等影响产生的零点漂移大，弱电信号难以抵抗复杂环境中存在的电磁干扰等。At present, most of the existing six-dimensional force sensors are designed based on the principle of bridge measurement of resistance strain gauges. The zero point drift of resistance strain gauges due to the influence of temperature and humidity is large, and weak current signals are difficult to resist electromagnetic interference in complex environments.
此外，一般的六维力传感器由于结构设计、加工误差、贴片误差等，导致单一维度的力或力矩同样会对其他维度的测量输出有影响，即为维间耦合，这将降低传感器的测量精度。即使目前对六维力传感器维间耦合的解耦方法的研究非常多，但能够实现结构自解耦、检测信息输出自解耦的传感器则可降低对解耦算法的依赖，更能保证传感器的测量精度。In addition, due to structural design, processing errors, and patch errors of general six-dimensional force sensors, the force or moment of a single dimension will also affect the measurement output of other dimensions, that is, inter-dimensional coupling, which will reduce the measurement of the sensor. precision. Even though there are many researches on decoupling methods of inter-dimensional coupling of six-dimensional force sensors, sensors that can realize structural self-decoupling and detection information output self-decoupling can reduce the dependence on decoupling algorithms, and can better ensure the sensor’s stability. measurement accuracy.
发明内容Contents of the invention
本申请提供一种新型的光纤光栅六维力传感器及其主体结构，同时也提供一种光纤光栅六维力传感器的测量方法。The application provides a novel fiber grating six-dimensional force sensor and its main structure, and also provides a measuring method of the fiber grating six-dimensional force sensor.
本申请提供的光纤光栅六维力传感器的主体结构,其特征在于，包括：The main structure of the fiber grating six-dimensional force sensor provided by the present application is characterized in that it includes:
上弹性盘，所述上弹性盘包括外圆环体、四个梁组件和与外圆环体同心的内圆环筒，所述主体结构具有相互垂直的第一轴向、第二轴向和第三轴向形成三维坐标系，所述外圆环体和内圆环筒的对称中心线方向为第三轴，所述四个梁组件连接于外圆环体的内壁与内圆环筒的外壁之间，且四个梁组件之间分别间隔90°，使其中两个梁组件沿第二轴方向设置，另两个梁组件沿第一轴向设置；所述梁组件包括连接于外圆环体的外矩形梁、连接于内圆环筒的内矩形梁和连接于两者之间的传力块；An upper elastic disc, the upper elastic disc includes an outer annular body, four beam assemblies and an inner annular cylinder concentric with the outer annular body, the main structure has a first axis, a second axis and a The third axis forms a three-dimensional coordinate system, the direction of the center line of symmetry between the outer torus and the inner torus is the third axis, and the four beam assemblies are connected to the inner wall of the outer torus and the inner torus of the inner torus between the outer walls, and the four beam assemblies are separated by 90°, so that two of the beam assemblies are arranged along the second axis direction, and the other two beam assemblies are arranged along the first axis; the beam assemblies include The outer rectangular beam of the ring body, the inner rectangular beam connected to the inner circular cylinder and the force transmission block connected between the two;
下弹性筒，所述下弹性筒连接于内圆环筒的下方，所述内圆环筒具有腔体，所述下弹性筒具有内圆孔，所述腔体通过中心通孔与内圆孔连通；所述下弹性筒上开设有沿第三轴向排布的三层切孔组，每层切孔组包括四个径向贯通的切孔且均沿周向均匀分布，所述弹性筒的外壁中部径向凹陷形成中间薄壁，第一层切孔位于中间薄壁的上方，且所述内圆孔的最上端与第一层切孔的最上端平齐，所述第二层切孔位于中间薄壁之上，第三层切孔位于中间薄壁的下方，所述第一层切孔与第三层切孔位置一一对应，所述第二层切孔与第一层切孔沿周向错开45°；The lower elastic cylinder, the lower elastic cylinder is connected to the bottom of the inner circular cylinder, the inner circular cylinder has a cavity, the lower elastic cylinder has an inner circular hole, and the cavity passes through the central through hole and the inner circular hole connected; the lower elastic cylinder is provided with three layers of cut holes arranged along the third axial direction, each layer of cut holes includes four radial through holes and are evenly distributed along the circumferential direction, the elastic cylinder The middle part of the outer wall is radially depressed to form an intermediate thin wall, the first layer of cut holes is located above the middle thin wall, and the uppermost end of the inner circular hole is flush with the uppermost end of the first layer of cut holes, and the second layer of cut holes The holes are located on the middle thin wall, the third layer of cut holes is located below the middle thin wall, the positions of the first layer of cut holes correspond to the positions of the third layer of cut holes, and the positions of the second layer of cut holes correspond to the positions of the first layer of cut holes. The holes are staggered by 45° along the circumference;
底座，所述底座包括连接于下弹性筒的下方，且具有与内圆孔连通的小轴心孔和与小轴心孔同心的大轴心孔；The base, the base is connected to the bottom of the lower elastic cylinder, and has a small axis hole communicating with the inner circular hole and a large axis hole concentric with the small axis hole;
以及封堵盖，所述封堵盖包括与小轴心孔配合的上圆台和与大轴心孔配合的下圆台，所述上圆台和下圆台具有贯通的中心孔和偏心孔。And a plugging cover, the plugging cover includes an upper circular platform matched with the small axial hole and a lower circular platform matched with the large axial hole, the upper circular platform and the lower circular platform have a through center hole and an eccentric hole.
作为所述主体结构的进一步改进，沿第一轴向设置的外矩形梁中，其沿第一轴向的长度大于其沿第二轴的长度；沿第二轴向设置的外矩形梁中，其沿第二轴向方的长度大于其沿第一轴向的长度；沿第一轴向设置的外矩形梁中，其沿第二轴向的长度为其沿第三轴向长度的3倍以上；沿第二轴向设置的外矩形梁中，其沿第一轴向的长度为沿第三轴向长度的3倍以上；As a further improvement of the main body structure, in the outer rectangular beam arranged along the first axis, its length along the first axis is greater than its length along the second axis; in the outer rectangular beam arranged along the second axis, Its length along the second axis is greater than its length along the first axis; in the outer rectangular beam arranged along the first axis, its length along the second axis is three times its length along the third axis above; among the outer rectangular beams arranged along the second axis, the length along the first axis is more than three times the length along the third axis;
沿第一轴向设置的内矩形梁中，其沿第一轴向的长度大于其沿第三轴向的长度；沿第二轴向设置的内矩形梁中，其沿第二轴向的长度大于其沿第三轴向的长度；沿第一轴向设置的内矩形梁中，其沿第三轴向的长度为其沿第二轴向长度的3倍以上；沿第二轴向设置的内矩形梁中，其沿第三轴向的长度为其沿第一轴向长度的3倍以上。In the inner rectangular beam arranged along the first axis, its length along the first axis is greater than its length along the third axis; in the inner rectangular beam arranged along the second axis, its length along the second axis greater than its length along the third axis; in the inner rectangular beam arranged along the first axis, its length along the third axis is more than three times its length along the second axis; In the inner rectangular beam, the length along the third axis is more than three times the length along the first axis.
作为所述主体结构的进一步改进，所述外矩形梁沿第三轴向的长度,与沿第一轴向布置的内矩形梁中沿第二轴向的长度相同；或者所述外矩形梁沿第三轴向的长度，与沿第二轴向布置的内矩形梁中沿第一轴向的长度相同；As a further improvement of the main body structure, the length of the outer rectangular beam along the third axis is the same as the length of the inner rectangular beam arranged along the first axis along the second axis; or the outer rectangular beam along the third axis The length in the axial direction is the same as the length along the first axis in the inner rectangular beam arranged along the second axis;
所述内矩形梁沿第三轴向的长度，与沿第一轴向布置的外矩形梁中沿第二轴向的长度相同，或者所述内矩形梁沿第三轴向的长度与沿第二轴向布置的外矩形梁中沿第一轴向的长度相同；The length of the inner rectangular beam along the third axis is the same as the length along the second axis of the outer rectangular beams arranged along the first axis, or the length of the inner rectangular beam along the third axis is the same as that along the second axis. The length along the first axis is the same in the outer rectangular beams arranged;
作为所述主体结构的进一步改进，所述传力块沿第一轴向设置时，其沿第一轴向的厚度为外矩形梁沿第三轴向长度的2倍以上；所述传力块的两个侧面与对应的外矩形梁的两个侧面平齐，且外矩形梁位于传力块沿第三轴向长度的中央；所述传力块的上下表面与内矩形梁的上下两个表面平齐，且沿第一轴向布置的内矩形梁位于对应传力块沿第二轴向长度的中央，沿第二轴向布置的内矩形梁位于对应传力块沿第一轴向长度的中央。As a further improvement of the main structure, when the force transmission block is arranged along the first axis, its thickness along the first axis is more than twice the length of the outer rectangular beam along the third axis; the force transmission block The two sides of the two sides of the corresponding outer rectangular beam are flush with the two sides of the corresponding outer rectangular beam, and the outer rectangular beam is located in the center of the force transmission block along the third axial length; The surface is even, and the inner rectangular beam arranged along the first axis is located at the center of the length of the corresponding force transmission block along the second axis, and the inner rectangular beam arranged along the second axis is located at the length of the corresponding force transmission block along the first axis. the central.
作为所述主体结构的进一步改进，同一层的两个切孔之间的部分为支撑台，所述支撑台为三层，第一层支撑台设置于第一层切孔之间，第二层支撑台设置于第二层切孔之间，第三层支撑台设置于第三层切孔之间，每个所述切孔的周向长度为对应支撑台周向长度的2倍以上，且第一层支撑台以及和其对应的第三层支撑台分别沿位于第一轴向和第二轴向设置。As a further improvement of the main body structure, the part between the two cut holes on the same layer is a support platform, and the support platform has three layers. The first layer of support platforms is arranged between the first layer of cut holes, and the second layer The support platform is arranged between the cut holes of the second layer, the support platform of the third layer is arranged between the cut holes of the third layer, and the circumferential length of each of the cut holes is more than twice the circumferential length of the corresponding support platform, and The first-layer support platform and the corresponding third-layer support platform are arranged along the first axis and the second axis respectively.
作为所述主体结构的进一步改进，所述上弹性盘、下弹性筒和底座为弹性材料制成的一体式结构，所述的封堵盖与底座机械配合，并采用激光点焊固定。As a further improvement of the main structure, the upper elastic disc, lower elastic cylinder and base are an integrated structure made of elastic materials, and the sealing cover is mechanically matched with the base and fixed by laser spot welding.
作为所述主体结构的进一步改进，所述的封堵盖装入底座时，所述下圆台的上表面与大轴心孔的上表面平齐，所述上圆台的上表面低于第三层切孔。As a further improvement of the main body structure, when the blocking cover is installed in the base, the upper surface of the lower circular platform is flush with the upper surface of the large axis hole, and the upper surface of the upper circular platform is lower than the third layer cut holes.
本申请提供的光纤光栅六维力传感器，包括如上述任一项所述的主体结构和敏感检测元件，所述敏感检测元件为光纤光栅，在第一层支撑台和与其上下对应的第三层支撑台之间且平行于第三轴向的位置分别布置有第一光纤光栅(FBG1)、第二光纤光栅(FBG2)、第三光纤光栅(FBG3)和第四光纤光栅(FBG4)，且第一光纤光栅(FBG1)和第三光纤光栅(FBG3)位于第一轴向和第三轴向所在平面内，第二光纤光栅(FBG2)和第四光纤光栅(FBG4)位于第二轴向和第三轴向所在平面内；在沿第一轴向的两个外矩形梁靠近传力块的上表面处布置有沿上弹性盘的径向设置的第五光纤光栅(FBG5)和第七光纤光栅(FBG7)；在沿第二轴向的两个外矩形梁靠近传力块的上表面处布置有沿上弹性盘的径向设置的第六光纤光栅(FBG6)和第八光纤光栅(FBG8)；在任意一个内矩形梁靠近传力块的两侧面上对称布置有第九光纤光栅(FBG9)和第十光纤光栅(FBG10)；The fiber grating six-dimensional force sensor provided by the present application includes the main body structure and sensitive detection element as described in any one of the above, and the sensitive detection element is a fiber grating, on the first layer of support platform and the third layer corresponding to its upper and lower A first fiber Bragg grating (FBG1), a second fiber Bragg grating (FBG2), a third fiber Bragg grating (FBG3) and a fourth fiber Bragg grating (FBG4) are respectively arranged between the supporting tables and parallel to the third axis, and the first A fiber grating (FBG1) and a third fiber grating (FBG3) are located in the plane of the first axis and the third axis, and the second fiber grating (FBG2) and the fourth fiber grating (FBG4) are located in the plane of the second axis and the third axis In the plane where the three axes are located; the fifth fiber grating (FBG5) and the seventh fiber grating arranged along the radial direction of the upper elastic disc are arranged on the upper surface of the two outer rectangular beams along the first axis close to the force transmission block (FBG7); the sixth fiber grating (FBG6) and the eighth fiber grating (FBG8) arranged along the radial direction of the upper elastic disc are arranged on the upper surface of the two outer rectangular beams along the second axial direction close to the force transmission block ; A ninth fiber grating (FBG9) and a tenth fiber grating (FBG10) are arranged symmetrically on both sides of any inner rectangular beam close to the force transmission block;
若在沿第一轴向的内矩形梁上布置第九光纤光栅(FBG9)和第十光纤光栅(FBG10)，则第九光纤光栅(FBG9)和第十光纤光栅(FBG10)为平行于第一轴向布置；If the ninth fiber grating (FBG9) and the tenth fiber grating (FBG10) are arranged on the inner rectangular beam along the first axis, the ninth fiber grating (FBG9) and the tenth fiber grating (FBG10) are parallel to the first Axial arrangement;
若在沿第二轴向的内矩形梁上布置第九光纤光栅(FBG9)和第十光纤光栅(FBG10)，则第九光纤光栅(FBG9)和第十光纤光栅(FBG10)为平行于第二轴向布置；If the ninth fiber grating (FBG9) and the tenth fiber grating (FBG10) are arranged on the inner rectangular beam along the second axis, the ninth fiber grating (FBG9) and the tenth fiber grating (FBG10) are parallel to the second Axial arrangement;
在腔体内布置有第十一光纤光栅(FBG11)；在中心通孔和中心孔之间的内圆孔内沿第三轴向布置有第十二光纤光栅(FBG12)。An eleventh fiber grating (FBG11) is arranged in the cavity; a twelfth fiber grating (FBG12) is arranged in the inner circular hole between the central through hole and the central hole along the third axis.
作为所述光纤光栅六维力传感器的进一步改进，第一光纤光栅(FBG1)、第二光纤光栅(FBG2)、第三光纤光栅(FBG3)和第四光纤光栅(FBG4)处于预拉伸绷紧状态时，其两端的光纤固定粘贴于支撑台的外表面；第五光纤光栅(FBG5)、第六光纤光栅(FBG6)、第七光纤光栅(FBG7)、第八光纤光栅(FBG8)、第九光纤光栅(FBG9)和第十光纤光栅(FBG10)上刻有光栅处全部粘贴；第十一光纤光栅(FBG11)处于自由状态；第十二光纤光栅(FBG12)为预拉伸绷紧状态时，其两端的光纤分别固定粘贴于中心通孔和中心孔内；所述第五光纤光栅(FBG5)、第六光纤光栅(FBG6)、第七光纤光栅(FBG7)、第八光纤光栅(FBG8)距离第三轴向轴线的距离相等；所述第九光纤光栅(FBG9)和第十光纤光栅(FBG10)距离第三轴向轴线的距离相等。As a further improvement of the fiber grating six-dimensional force sensor, the first fiber grating (FBG1), the second fiber grating (FBG2), the third fiber grating (FBG3) and the fourth fiber grating (FBG4) are pre-tensioned In the state, the optical fibers at both ends are fixed and pasted on the outer surface of the support table; the fifth fiber grating (FBG5), the sixth fiber Bragg grating (FBG6), the seventh fiber Bragg grating (FBG7), the eighth fiber Bragg The fiber grating (FBG9) and the tenth fiber grating (FBG10) are all pasted at the engraved grating; the eleventh fiber grating (FBG11) is in a free state; when the twelfth fiber grating (FBG12) is in a pre-stretched state, The optical fibers at both ends are respectively fixed and pasted in the central through hole and the central hole; the distance between the fifth fiber Bragg grating (FBG5), the sixth fiber Bragg grating (FBG6), the seventh fiber Bragg grating (FBG7), and the eighth fiber Bragg grating (FBG8) The distances from the third axial axis are equal; the distances from the ninth fiber grating (FBG9) and the tenth fiber grating (FBG10) to the third axial axis are equal.
本申请提供的用于光纤光栅六维力传感器的测量方法，所述光纤光栅六维力传感器采用上述的光纤光栅六维力传感器，其中所述第一光纤光栅(FBG1)和第三光纤光栅(FBG3)的波长漂移量的差值信号Δλ13＝Δλ1-Δλ3，用于测量Fx信号；第二光纤光栅(FBG2)和第四光纤光栅(FBG4)的波长漂移量的差值信号Δλ24＝Δλ2-Δλ4，用于测量Fy信号；第五光纤光栅(FBG5)和第七光纤光栅(FBG7)的波长漂移量的差值信号Δλ57＝Δλ5-Δλ7，用于测量My信号；第六光纤光栅(FBG6)和第八光纤光栅(FBG8)的波长漂移量的差值信号Δλ68＝Δλ6-Δλ8，用于测量Mx信号；第九光纤光栅(FBG9)和第十光纤光栅(FBG10)的波长漂移量的差值信号Δλ910＝Δλ9-Δλ10，用于测量Mz；通过温度测试得出预拉伸后两端固定粘贴的第十二光纤光栅(FBG12)与处于自由状态的第十一光纤光栅(FBG11)的温度灵敏度系数的比值k后，第十二光纤光栅(FBG12)的波长漂移量与k倍的第十一光纤光栅(FBG11)的波长漂移量的差值信号Δλ1112＝Δλ11-k*Δλ12，用于测量Fz。The application provides the measurement method for the fiber grating six-dimensional force sensor, the fiber grating six-dimensional force sensor adopts the above-mentioned fiber grating six-dimensional force sensor, wherein the first fiber grating (FBG1) and the third fiber grating ( The difference signal Δλ13 of the wavelength drift of FBG3) = Δλ1 -Δλ3 , which is used to measure the Fx signal; the difference signal Δλ24 of the wavelength drift of the second fiber Bragg grating (FBG2) and the fourth fiber Bragg grating (FBG4) =Δλ2 -Δλ4 , for measuring the Fy signal; the difference signal Δλ57 of the wavelength shift of the fifth fiber Bragg grating (FBG5) and the seventh fiber Bragg grating (FBG7) =Δλ5 -Δλ7 , for measuring the My signal ; The difference signal Δλ68 =Δλ6 -Δλ8 of the wavelength drift of the sixth fiber grating (FBG6) and the eighth fiber Bragg grating (FBG8), used to measure the Mx signal; the ninth fiber grating (FBG9) and the tenth optical fiber The difference signal of the wavelength shift of the grating (FBG10) Δλ910 = Δλ9 -Δλ10 is used to measure Mz; the temperature test shows that the twelfth fiber grating (FBG12) with both ends fixedly pasted after pre-stretching is the same as the After the ratio k of the temperature sensitivity coefficient of the eleventh fiber grating (FBG11) in the free state, the difference between the wavelength shift of the twelfth fiber grating (FBG12) and k times the wavelength shift of the eleventh fiber grating (FBG11) The value signal Δλ1112 =Δλ11 −k*Δλ12 is used to measure Fz.
本申请的有益效果是：The beneficial effect of this application is:
本申请所提供的光纤光栅六维力传感器的主体结构，与现有的通过零部件的复杂装配实现无维间耦合的六维力传感器相比，本发明的主体结构对称性好，易于加工制造。The main structure of the fiber grating six-dimensional force sensor provided by this application, compared with the existing six-dimensional force sensor that realizes non-dimensional coupling through complex assembly of parts, the main structure of the present invention has good symmetry and is easy to process and manufacture .
本申请所提供的光纤光栅六维力传感器，其光纤光栅元件的数量仅为12个，与电阻应变计组桥测量原理的传感器一般需要24个应变片相比，敏感元件的数量减少了一倍。同时，光波长信息作为传感器的输出信号，具备了抗电磁干扰、无零漂等优势。The fiber grating six-dimensional force sensor provided by this application has only 12 fiber grating elements, which is doubled in number of sensitive elements compared with the 24 strain gauges generally required by the sensor of the resistance strain gauge group bridge measurement principle . At the same time, the optical wavelength information is used as the output signal of the sensor, which has the advantages of anti-electromagnetic interference and zero drift.
本申请提供的测量方法使用12个光纤光栅构成的六组光纤光栅的波长差值输出信息，实现了六维力和力矩测量信息的自动除耦输出，以及实现了温度自补偿。因此本发明减小了维间耦合，实现了自解耦测量三维力和三维力矩。The measurement method provided by this application uses the wavelength difference output information of six groups of fiber gratings composed of 12 fiber gratings to realize automatic decoupling output of six-dimensional force and torque measurement information, and realize temperature self-compensation. Therefore, the present invention reduces inter-dimensional coupling and realizes self-decoupling measurement of three-dimensional force and three-dimensional moment.
附图说明Description of drawings
图1为本发明的传感器整体结构示意图；Fig. 1 is a schematic diagram of the overall structure of the sensor of the present invention;
图2为本发明的传感器底视整体组成示意图；Fig. 2 is a schematic diagram of the overall composition of the bottom view of the sensor of the present invention;
图3为本发明的传感器装配后的示意图；Fig. 3 is the schematic diagram after the assembly of sensor of the present invention;
图4为本发明的传感器俯视图；Fig. 4 is a top view of the sensor of the present invention;
图5为本发明的传感器正视图；Fig. 5 is the sensor front view of the present invention;
图6为本发明的传感器正视剖视图；Fig. 6 is a front sectional view of the sensor of the present invention;
图7为传感器的下弹性筒布置的光纤光栅正视示意图；Fig. 7 is a schematic diagram of the front view of the fiber grating arranged in the lower elastic cylinder of the sensor;
图8为传感器的下弹性筒布置的光纤光栅后视示意图；Fig. 8 is a rear view schematic diagram of the fiber grating arranged in the lower elastic cylinder of the sensor;
图9为传感器的上弹性盘布置的光纤光栅俯视示意图；Fig. 9 is a schematic top view of the fiber grating arranged on the upper elastic disk of the sensor;
图10为传感器光纤光栅布置的正视剖视示意图Fig. 10 is a front view cross-sectional schematic diagram of sensor fiber grating arrangement
在图中有：上弹性盘1、下弹性筒2、底座3、封堵盖4、外圆环体11、外矩形梁12、传力块13、内矩形梁14、内圆环筒15、腔体16、中心通孔17、切孔21、支撑台22、中间薄壁23、内圆孔24、小轴心孔31、大轴心孔32、中心孔41、偏心孔42、上圆台43、下圆台44。In the figure, there are: upper elastic disc 1, lower elastic tube 2, base 3, plugging cover 4, outer ring body 11, outer rectangular beam 12, force transmission block 13, inner rectangular beam 14, inner ring tube 15, Cavity 16, central through hole 17, cut hole 21, support platform 22, middle thin wall 23, inner circular hole 24, small axis hole 31, large axis hole 32, center hole 41, eccentric hole 42, upper circular platform 43 , Lower round table 44.
具体实施方式Detailed ways
下面通过具体实施方式结合附图对本发明作进一步详细说明。本申请可以以多种不同的形式来实现，并不限于本实施例所描述的实施方式。提供以下具体实施方式的目的是便于对本申请公开内容更清楚透彻的理解，其中上、下、左、右等指示方位的字词仅是针对所示结构在对应附图中位置而言。The present invention will be further described in detail below through specific embodiments in conjunction with the accompanying drawings. The present application can be implemented in many different forms, and is not limited to the implementation manner described in this embodiment. The purpose of providing the following specific embodiments is to facilitate a clearer and more thorough understanding of the disclosure of the present application, wherein the words indicating orientation such as up, down, left, and right are only for the positions of the structures shown in the corresponding drawings.
然而，本领域的技术人员可能会意识到其中的一个或多个的具体细节描述可以被省略，或者还可以采用其他的方法、组件或材料。在一些例子中，一些实施方式并没有描述或没有详细的描述。However, those skilled in the art may recognize that description of one or more of the specific details may be omitted, or other methods, components or materials may also be used. In some instances, some implementations were not described or described in detail.
此外，本文中记载的技术特征、技术方案还可以在一个或多个实施例中以任意合适的方式组合。In addition, the technical features and technical solutions described herein can also be combined in any suitable manner in one or more embodiments.
实施例：Example:
如图1所示，传感器包括主体结构和敏感检测元件。As shown in Figure 1, the sensor includes a main body structure and sensitive detection elements.
该主体结构包括上弹性盘1、下弹性筒2、底座3和封堵盖4。The main structure includes an upper elastic disc 1 , a lower elastic cylinder 2 , a base 3 and a blocking cover 4 .
其中上弹性盘1、下弹性筒2和底座3为一体式加工而成整体型弹性结构，封堵盖4为独立零件，与底座3下方的孔配合后采用激光点焊固定，封堵盖4只起到固定光纤和引出尾纤的作用，而无弹性变形功能。图3是装配、固定完毕后的传感器示意图。Among them, the upper elastic plate 1, the lower elastic cylinder 2 and the base 3 are integrally processed to form an integral elastic structure. The sealing cover 4 is an independent part, which is fixed by laser spot welding after matching with the hole below the base 3. The sealing cover 4 It only plays the role of fixing the optical fiber and leading out the pigtail, but has no elastic deformation function. Fig. 3 is a schematic diagram of the sensor after assembly and fixing.
如图1中的标示，主体结构具有相互垂直的第一轴向、第二轴向和第三轴向形成三维坐标系(即以底座3的底面的圆心为原点0定义一个XYZ三维坐标系，X轴为第一轴，Y轴为第二轴，Z轴为第三轴)，外圆环体11和内圆环筒15的对称中心线方向为第三轴。As shown in Figure 1, the main structure has a first axis, a second axis and a third axis perpendicular to each other to form a three-dimensional coordinate system (that is, a XYZ three-dimensional coordinate system is defined with the center of the circle of the bottom surface of the base 3 as the origin 0, The X-axis is the first axis, the Y-axis is the second axis, and the Z-axis is the third axis), and the direction of the center line of symmetry between the outer annular body 11 and the inner annular cylinder 15 is the third axis.
图4为传感器俯视图，详细的展示了上弹性盘1的结构和位置关系，上弹性盘1包括有外圆环体11、外矩形梁12、传力块13、内矩形梁14、内圆环筒15、腔体16以及中心通孔17。Figure 4 is a top view of the sensor, which shows in detail the structure and positional relationship of the upper elastic disc 1. The upper elastic disc 1 includes an outer ring body 11, an outer rectangular beam 12, a force transmission block 13, an inner rectangular beam 14, and an inner ring Barrel 15, cavity 16 and central through hole 17.
其中，外矩形梁12、内矩形梁14和传力块13组成梁组件，本实施例共有四个梁组件，四个梁组件连接于外圆环体11的内壁与内圆环筒15的外壁之间，且四个梁组件之间分别间隔90°。Wherein, the outer rectangular beam 12, the inner rectangular beam 14 and the force transmission block 13 form a beam assembly. There are four beam assemblies in this embodiment, and the four beam assemblies are connected to the inner wall of the outer ring body 11 and the outer wall of the inner ring cylinder 15. between, and the four beam components are separated by 90°.
外圆环体11上设有与外矩形梁12对应的螺纹孔作为加载环，外圆环体11、外矩形梁12、传力块13、内矩形梁14、内圆环筒15依次连接。四个完全一致的外矩形梁12分别沿X轴或Y轴设置，四个完全一致内矩形梁14分别沿X轴或Y轴设置。上弹性盘1关于XOZ平面以及YOZ平面对称。The outer ring body 11 is provided with a threaded hole corresponding to the outer rectangular beam 12 as a loading ring, and the outer ring body 11, the outer rectangular beam 12, the force transmission block 13, the inner rectangular beam 14, and the inner ring cylinder 15 are sequentially connected. The four identical outer rectangular beams 12 are respectively arranged along the X axis or the Y axis, and the four identical inner rectangular beams 14 are respectively arranged along the X axis or the Y axis. The upper elastic disc 1 is symmetrical about the XOZ plane and the YOZ plane.
外矩形梁12、内矩形梁14均为薄壁结构，沿X轴方向设置的外矩形梁12中，其沿X轴方向的长度大于沿Y方向的长度。沿Y轴方向设置的外矩形梁12中，其沿Y轴方向的长度大于沿X方向的长度。沿X轴方向设置的外矩形梁12中，其沿Y轴方向的长度为沿Z轴方向长度的3倍以上。沿Y轴方向设置的外矩形梁12中，其沿X轴方向的长度为其沿Z轴方向厚度的3倍以上。The outer rectangular beam 12 and the inner rectangular beam 14 are thin-walled structures, and the outer rectangular beam 12 arranged along the X-axis direction has a length along the X-axis direction greater than that along the Y-axis direction. In the outer rectangular beam 12 arranged along the Y-axis direction, its length along the Y-axis direction is greater than that along the X-axis direction. In the outer rectangular beam 12 arranged along the X-axis direction, the length along the Y-axis direction is more than three times the length along the Z-axis direction. In the outer rectangular beam 12 arranged along the Y-axis direction, its length along the X-axis direction is more than three times its thickness along the Z-axis direction.
沿X轴方向设置的内矩形梁14中，其沿X轴方向的长度大于沿Z方向的长度。沿Y轴方向设置的内矩形梁14中，其沿Y轴方向的长度大于沿Z方向的长度。沿X轴方向设置的内矩形梁14中，其沿Z轴方向的长度为沿Y轴方向长度的3倍以上。沿Y轴方向设置的内矩形梁14中，其沿Z轴方向的长度为沿X轴方向厚度的3倍以上。Among the inner rectangular beams 14 arranged along the X-axis direction, the length along the X-axis direction is greater than the length along the Z-axis direction. In the inner rectangular beam 14 arranged along the Y-axis direction, the length along the Y-axis direction is greater than the length along the Z-axis direction. In the inner rectangular beam 14 arranged along the X-axis direction, the length along the Z-axis direction is more than three times the length along the Y-axis direction. In the inner rectangular beam 14 arranged along the Y-axis direction, the length along the Z-axis direction is more than three times the thickness along the X-axis direction.
外矩形梁12沿Z轴方向的长度与沿X轴方向布置的内矩形梁14沿Y轴方向的长度或者沿Y轴方向布置的内矩形梁14沿X轴方向的长度相同。The length of the outer rectangular beam 12 along the Z-axis direction is the same as the length of the inner rectangular beam 14 arranged along the X-axis direction or the length of the inner rectangular beam 14 arranged along the Y-axis direction along the X-axis direction.
内矩形梁14沿Z轴方向的长度与沿X轴方向布置的外矩形梁12沿Y轴方向的长度或者沿Y轴方向布置的外矩形梁12沿X轴方向的长度相同。The length of the inner rectangular beam 14 along the Z-axis direction is the same as the length of the outer rectangular beam 12 arranged along the X-axis direction or the length of the outer rectangular beam 12 arranged along the Y-axis direction along the X-axis direction.
沿X轴方向设置的传力块13沿X轴的长度与沿Y轴方向设置的传力块13沿Y轴的长度一致，且为外矩形梁12沿Z轴方向的长度的2倍以上。传力块13的两个侧面与外矩形梁12的两个侧面平齐，且外矩形梁12位于传力块13沿Z轴方向高度的中央；传力块13的上下表面与内矩形梁14的上下两个表面平齐，且沿X轴方向布置的内矩形梁14位于传力块13沿Y轴方向长度的中央，沿Y轴方向布置的内矩形梁14位于传力块13沿X轴方向长度的中央。The length of the force transmission block 13 arranged along the X axis is consistent with the length of the force transmission block 13 along the Y axis, and is more than twice the length of the outer rectangular beam 12 along the Z axis. The two sides of the force transmission block 13 are flush with the two sides of the outer rectangular beam 12, and the outer rectangular beam 12 is located at the center of the height of the force transmission block 13 along the Z-axis direction; the upper and lower surfaces of the force transmission block 13 are aligned with the inner rectangular beam 14 The upper and lower surfaces are even, and the inner rectangular beam 14 arranged along the X-axis direction is located in the center of the length of the force transmission block 13 along the Y-axis direction, and the inner rectangular beam 14 arranged along the Y-axis direction is located at the center of the force transmission block 13 along the X-axis The center of the direction length.
内圆环筒15的壁厚为外矩形梁12沿Z轴方向的长度的3倍以上；内圆环筒15的上表面与内矩形梁14的上表面平齐；外环圆壁11、传力块13、内矩形梁14、内圆环筒15的底面平齐。The wall thickness of the inner circular tube 15 is more than 3 times the length of the outer rectangular beam 12 along the Z-axis direction; the upper surface of the inner circular tube 15 is flush with the upper surface of the inner rectangular beam 14; The bottom surfaces of the force block 13, the inner rectangular beam 14, and the inner circular tube 15 are flush.
如图5所示，下弹性筒2包括有切孔21、支撑台22、中间薄壁23、内圆孔24。切孔21沿轴向自上而下等间隔共有三层，且每一层的切孔21有四个，且沿周向均有分布；第一层切孔21与第三层切孔21上下对应，第二层切孔21与第一层切孔21周向错开45°。支撑台22为每层的四个切孔21之间的部分，且切孔21的周向长度为支撑台22周向长度的2倍以上；第一层支撑台22和与其对应的第三层支撑台22分别沿X轴和Y轴设置。第一层切孔21与第三层切孔21之间的部分的外壁径向凹陷，使其外径要小些，形成薄壁结构。内圆孔24贯穿整个下弹性筒2，内圆孔24最上端与第一层切孔21平齐。As shown in FIG. 5 , the lower elastic cylinder 2 includes a cutout hole 21 , a support platform 22 , a middle thin wall 23 , and an inner circular hole 24 . There are three layers of cutting holes 21 at equal intervals from top to bottom in the axial direction, and there are four cutting holes 21 in each layer, and they are distributed along the circumferential direction; the first layer of cutting holes 21 corresponds to the third layer of cutting holes 21 up and down, The second layer of cut holes 21 and the first layer of cut holes 21 are circumferentially staggered by 45°. The support platform 22 is the part between the four cut holes 21 of each layer, and the circumferential length of the cut holes 21 is more than twice the circumferential length of the support platform 22; the support platform 22 of the first layer and the corresponding third layer The supporting tables 22 are respectively arranged along the X axis and the Y axis. The outer wall of the portion between the first layer of cut holes 21 and the third layer of cut holes 21 is radially recessed to make the outer diameter smaller, forming a thin-walled structure. The inner circular hole 24 runs through the entire lower elastic tube 2 , and the uppermost end of the inner circular hole 24 is flush with the first layer cut hole 21 .
如图6所示，底座3的中心设置有小轴心孔31、大轴心孔32，小轴心孔31与内圆孔24同轴且直径相同，即为同一个圆孔。As shown in FIG. 6 , the center of the base 3 is provided with a small axial hole 31 and a large axial hole 32 , the small axial hole 31 is coaxial with the inner circular hole 24 and has the same diameter, that is, the same circular hole.
如图6所示，封堵盖4上留有中心孔41、偏心孔42、上圆台43、下圆台44，上圆台43的外径与底座3的小轴心孔31的内径相同以实现机械配合；下圆台44的外径与大轴心孔32的内径相同以实现机械配合，并且下圆台44的厚度小于大轴心孔32的深度；封堵盖4与底座3配合后，下圆台44的上表面与大轴心孔32的上表面平齐，且上圆台43的上表面低于第三层切孔21的下表面。As shown in Figure 6, central hole 41, eccentric hole 42, upper round table 43, lower round table 44 are left on the plugging cover 4, and the outer diameter of upper round table 43 is identical with the inner diameter of the small axis hole 31 of base 3 to realize mechanical Coordination; the outer diameter of the lower round table 44 is the same as the inner diameter of the large axis hole 32 to achieve mechanical fit, and the thickness of the lower round table 44 is less than the depth of the large axis hole 32; after the plugging cover 4 is matched with the base 3, the lower round table 44 The upper surface of the upper circular platform 43 is flush with the upper surface of the large axis hole 32, and the upper surface of the upper circular platform 43 is lower than the lower surface of the third layer of the cut hole 21.
本发明传感器的敏感检测元件为光纤光栅，在传感器弹性结构的特定位置上布置光纤光栅后，利用光纤光栅的波长输出来测量三维力和三维力矩。The sensitive detection element of the sensor of the present invention is an optical fiber grating, and after the optical fiber grating is arranged on a specific position of the elastic structure of the sensor, the wavelength output of the optical fiber grating is used to measure three-dimensional force and three-dimensional moment.
如图7、8所示，在第一层支撑台22和与其上下对应的第三层支撑台22之间平行于Z轴方向分别布置有光纤光栅第一光纤光栅(FBG1)、第二光纤光栅(FBG2)、第三光纤光栅(FBG3)和第四光纤光栅(FBG4)，第一光纤光栅(FBG1)和第三光纤光栅(FBG3)位于XOZ平面内，第二光纤光栅(FBG2)和第四光纤光栅(FBG4)位于YOZ平面内，第一光纤光栅(FBG1)、第二光纤光栅(FBG2)、第三光纤光栅(FBG3)和第四光纤光栅(FBG4)均是在处于预拉伸绷紧状态时，光纤光栅两端的光纤通过玻璃焊料或者胶黏剂固定在支撑台22的外表面。As shown in Figures 7 and 8, fiber gratings, a first fiber grating (FBG1), and a second fiber grating are respectively arranged parallel to the Z-axis direction between the first support platform 22 and the third support platform 22 corresponding to its upper and lower sides. (FBG2), the third fiber Bragg grating (FBG3) and the fourth fiber Bragg grating (FBG4), the first fiber Bragg grating (FBG1) and the third fiber Bragg grating (FBG3) are located in the XOZ plane, the second fiber Bragg grating (FBG2) and the fourth The fiber Bragg grating (FBG4) is located in the YOZ plane, and the first fiber Bragg grating (FBG1), the second fiber Bragg grating (FBG2), the third fiber Bragg grating (FBG3) and the fourth fiber Bragg grating (FBG4) are all pre-tensioned In the state, the optical fibers at both ends of the fiber grating are fixed on the outer surface of the support table 22 by glass solder or adhesive.
在沿X轴方向的两个外矩形梁12靠近传力块13的上表面处沿上弹性盘1径向布置第五光纤光栅(FBG5)和第七光纤光栅(FBG7)，采用的是光栅处全部粘贴；同样地，在沿Y轴方向的两个外矩形梁12靠近传力块13的上表面处沿上弹性盘1径向布置有光纤光栅第六光纤光栅(FBG6)和第八光纤光栅(FBG8)；The fifth fiber grating (FBG5) and the seventh fiber grating (FBG7) are radially arranged along the upper elastic disk 1 at the upper surface of the two outer rectangular beams 12 along the X-axis direction close to the force transmission block 13, and the grating Paste all; similarly, fiber gratings, the sixth fiber grating (FBG6) and the eighth fiber grating are arranged radially along the upper elastic disc 1 at the upper surface of the two outer rectangular beams 12 along the Y-axis direction close to the force transmission block 13 (FBG8);
在任意一个内矩形梁14靠近传力块13的两侧面上对称布置光纤光栅第九光纤光栅(FBG9)和第十光纤光栅(FBG10)，并且第九光纤光栅(FBG9)和第十光纤光栅(FBG10)沿上弹性盘1的径向布置；The ninth fiber grating (FBG9) and the tenth fiber grating (FBG10) are symmetrically arranged on both sides of any inner rectangular beam 14 near the force transmission block 13, and the ninth fiber grating (FBG9) and the tenth fiber grating ( FBG10) arranged radially along the upper elastic disk 1;
FBG11处于自由状态布置在空腔16内，在中心通孔17和中心孔41之间的内圆孔24内沿Z轴轴线布置有第十二光纤光栅(FBG12)，第十二光纤光栅(FBG12)是在处于预拉伸绷紧状态时，光纤光栅两端的光纤通过玻璃焊料或者胶黏剂固定在中心通孔17和中心孔41内。The FBG11 is arranged in the cavity 16 in a free state, and a twelfth fiber grating (FBG12) is arranged in the inner circular hole 24 between the central through hole 17 and the central hole 41 along the axis of the Z axis. The twelfth fiber grating (FBG12 ) means that the optical fibers at both ends of the fiber grating are fixed in the central through hole 17 and the central hole 41 by glass solder or adhesive when in a pre-stretched state.
第五光纤光栅(FBG5)、第六光纤光栅(FBG6)、第七光纤光栅(FBG7)、第八光纤光栅(FBG8)距离Z轴轴线的距离相等，第九光纤光栅(FBG9)和第十光纤光栅(FBG10)距离Z轴轴线的距离相等。The fifth fiber Bragg grating (FBG5), the sixth fiber Bragg grating (FBG6), the seventh fiber Bragg grating (FBG7), the eighth fiber Bragg grating (FBG8) are at the same distance from the Z-axis axis, the ninth fiber Bragg grating (FBG9) and the tenth fiber The grating (FBG10) is equidistant from the Z-axis axis.
如图7、8、9、10所示，第一光纤光栅(FBG1)的尾端光纤，上端尾纤穿过第一层的某一切孔21后进入内圆孔24，再穿过封堵盖4上的偏心孔42后引出，作为传感器的一个引出光纤信号端头；第一光纤光栅(FBG1)的下端尾纤与第二光纤光栅(FBG2)的下端尾纤连接，第二光纤光栅(FBG2)的上端尾纤与第三光纤光栅(FBG3)的上端尾纤连接，第三光纤光栅(FBG3)的下端尾纤与第四光纤光栅(FBG4)的下端尾纤连接，第四光纤光栅(FBG4)的上端尾纤穿过上弹性盘1后与第五光纤光栅(FBG5)的左端尾纤连接，第五光纤光栅(FBG5)的右端尾纤与第六光纤光栅(FBG6)的上端尾纤连接，第六光纤光栅(FBG6)的下端尾纤与第七光纤光栅(FBG7)的左端尾纤连接，第七光纤光栅(FBG7)的右端尾纤与第八光纤光栅(FBG8)的下端尾纤连接，第八光纤光栅(FBG8)的上端尾纤与第九光纤光栅(FBG9)的上端尾纤连接，第九光纤光栅(FBG9)的下端尾纤与第十光纤光栅(FBG10)的下端尾纤连接，第十光纤光栅(FBG10)的上端尾纤与第十一光纤光栅(FBG11)的上端尾纤连接，第十光纤光栅(FBG10)的下端尾纤与第十二光纤光栅(FBG12)的上端尾纤连接；第十二光纤光栅(FBG12)的下端尾纤穿过中心孔41后引出，作为传感器的另一个引出光纤信号端头。As shown in Figures 7, 8, 9, and 10, the tail fiber of the first fiber grating (FBG1), the upper end of the tail fiber passes through a certain cut hole 21 in the first layer and then enters the inner circular hole 24, and then passes through the sealing cover The eccentric hole 42 on 4 is drawn out behind, as a lead-out optical fiber signal end of the sensor; ) is connected with the upper pigtail of the third Fiber Bragg Grating (FBG3), the lower pigtail of the third Fiber Bragg Grating (FBG3) is connected with the lower pigtail of the fourth Fiber Bragg Grating (FBG4), and the fourth Fiber Bragg Grating (FBG4 ) through the upper elastic disc 1 and then connected to the left pigtail of the fifth fiber grating (FBG5), the right pigtail of the fifth fiber grating (FBG5) is connected to the upper pigtail of the sixth fiber grating (FBG6) , the lower end fiber of the sixth fiber Bragg grating (FBG6) is connected to the left end fiber of the seventh fiber Bragg grating (FBG7), and the right end fiber of the seventh fiber Bragg grating (FBG7) is connected to the lower end of the eighth fiber Bragg grating (FBG8). , the upper pigtail of the eighth fiber grating (FBG8) is connected to the upper pigtail of the ninth fiber Bragg grating (FBG9), and the lower pigtail of the ninth fiber Bragg grating (FBG9) is connected to the lower pigtail of the tenth fiber grating (FBG10) , the upper end fiber of the tenth fiber grating (FBG10) is connected to the upper end fiber of the eleventh fiber grating (FBG11), and the lower end fiber of the tenth fiber grating (FBG10) is connected to the upper end of the twelfth fiber grating (FBG12). fiber connection; the tail fiber at the lower end of the twelfth fiber grating (FBG12) passes through the central hole 41 and is drawn out as another fiber optic signal end of the sensor.
第一光纤光栅(FBG1)和第三光纤光栅(FBG3)的波长漂移量的差值信号Δλ13＝Δλ1-Δλ3，用于测量Fx；The difference signal Δλ13 =Δλ1 -Δλ3 of the wavelength shift of the first fiber Bragg grating (FBG1) and the third fiber Bragg grating (FBG3) is used to measure Fx;
第二光纤光栅(FBG2)和第四光纤光栅(FBG4)的波长漂移量的差值信号Δλ24＝Δλ2-Δλ4，用于测量Fy；The difference signal Δλ24 =Δλ2 -Δλ4 of the wavelength shift of the second fiber Bragg grating (FBG2) and the fourth fiber Bragg grating (FBG4), is used to measure Fy;
第五光纤光栅(FBG5)和第七光纤光栅(FBG7)的波长漂移量的差值信号Δλ57＝Δλ5-Δλ7，用于测量My；The difference signal Δλ57 =Δλ5 -Δλ7 of the wavelength shift of the fifth fiber Bragg grating (FBG5) and the seventh fiber Bragg grating (FBG7) is used to measure My;
第六光纤光栅(FBG6)和第八光纤光栅(FBG8)的波长漂移量的差值信号Δλ68＝Δλ6-Δλ8，用于测量Mx；The difference signal Δλ68 =Δλ6 -Δλ8 of the wavelength shift of the sixth fiber Bragg grating (FBG6) and the eighth fiber Bragg grating (FBG8) is used to measure Mx;
第九光纤光栅(FBG9)和第十光纤光栅(FBG10)的波长漂移量的差值信号Δλ910＝Δλ9-Δλ10，用于测量MzThe difference signal Δλ910 ＝Δλ9 -Δλ10 of the wavelength shift of the ninth fiber Bragg grating (FBG9) and the tenth fiber Bragg grating (FBG10) is used to measure Mz
通过温度测试得出预拉伸后两端固定粘贴的第十二光纤光栅(FBG12)与处于自由状态的第十一光纤光栅(FBG11)的温度灵敏度系数的比值k后，第十二光纤光栅(FBG12)的波长漂移量与k倍的第十一光纤光栅(FBG11)的波长漂移量的差值信号Δλ1112＝Δλ11-k*Δλ12，用于测量Fz。After the ratio k of the temperature sensitivity coefficient of the twelfth fiber grating (FBG12) fixed at both ends after pre-stretching and the eleventh fiber grating (FBG11) in a free state is obtained through temperature testing, the twelfth fiber grating ( The difference signal Δλ1112 =Δλ11 −k*Δλ12 of the wavelength shift of FBG12) and k times the wavelength shift of the eleventh fiber grating (FBG11 ) is used to measure Fz.
本发明自解耦测量三维力和力矩信息的原理如下：The principle of self-decoupling measurement of three-dimensional force and moment information of the present invention is as follows:
FBG1和FBG3组合为一对测量单元，FBG1、FBG3各自波长漂移量的差值输出用于测量x方向的力Fx。FBG1、FBG3波长漂移量的差值输出只对Fx敏感，这是由于：FBG1 and FBG3 are combined into a pair of measurement units, and the difference output of the respective wavelength shifts of FBG1 and FBG3 is used to measure the force Fx in the x direction. The difference output of wavelength drift of FBG1 and FBG3 is only sensitive to Fx, which is because:
1.当有x方向的力Fx作用于作为加载环的外环壁上时，FBG1与FBG3分别处于下弹性筒的变形两侧，FBG1与FBG3的波长漂移大小相等但方向相反。将波长漂移量的差值作为测量单元的输出信号，不但提高了测量灵敏度，而且，由环境温度变化带来的波长同向、等值漂移经差值后消除；1. When the force Fx in the x direction acts on the outer ring wall as the loading ring, FBG1 and FBG3 are respectively located on both sides of the deformation of the lower elastic tube, and the wavelength shifts of FBG1 and FBG3 are equal in size but opposite in direction. Taking the difference of the wavelength drift as the output signal of the measurement unit not only improves the measurement sensitivity, but also eliminates the wavelength shift in the same direction and equivalent value caused by the change of the ambient temperature after the difference;
2.而当有y方向的力Fy作用时，FBG1、FBG3处于下弹性筒的中性层，波长无漂移，FBG1与FBG3波长漂移量的差值无输出；当有z方向的力Fz作用时，FBG1与FBG3波长漂移同向且等值，FBG1与FBG3波长漂移量的差值无输出；2. When the force Fy in the y direction acts, FBG1 and FBG3 are in the neutral layer of the lower elastic tube, the wavelength has no drift, and the difference between the wavelength shift of FBG1 and FBG3 has no output; when the force Fz in the z direction acts , the wavelength shifts of FBG1 and FBG3 are in the same direction and equal in value, and the difference between the wavelength shifts of FBG1 and FBG3 has no output;
3.当有绕X轴方向的力矩Mx作用时，变形主要集中在上弹性盘中沿Y轴布置的外矩形梁上，下弹性筒变形不明显，FBG1、FBG3的波长漂移对Mx不敏感，FBG1与FBG3波长漂移量的差值无输出；3. When there is a moment Mx around the X-axis direction, the deformation is mainly concentrated on the outer rectangular beam arranged along the Y-axis in the upper elastic disk, and the deformation of the lower elastic cylinder is not obvious. The wavelength drift of FBG1 and FBG3 is not sensitive to Mx. The difference between the wavelength shift of FBG1 and FBG3 has no output;
4.当有绕Y轴方向的力矩My作用时，变形主要集中在上弹性盘中沿X轴布置的外矩形梁上，下弹性筒变形不明显，FBG1、FBG3的波长漂移对My不敏感，FBG1与FBG3波长漂移量的差值无输出；4. When there is a moment My acting around the Y-axis direction, the deformation is mainly concentrated on the outer rectangular beam arranged along the X-axis in the upper elastic disk, and the deformation of the lower elastic cylinder is not obvious. The wavelength drift of FBG1 and FBG3 is not sensitive to My. The difference between the wavelength shift of FBG1 and FBG3 has no output;
5.当有绕Z轴方向的力矩Mz作用时，变形主要集中在上弹性盘中的内矩形梁上，下弹性筒变形不明显，FBG1、FBG3的波长漂移对Mz不敏感，而且即使下弹性筒变形有微扭转变形，FBG1与FBG3所处的变形状态也一致，波长漂移一致，FBG1与FBG3波长漂移量的差值无输出；5. When there is a moment Mz around the Z axis, the deformation is mainly concentrated on the inner rectangular beam in the upper elastic disk, and the deformation of the lower elastic cylinder is not obvious. The wavelength drift of FBG1 and FBG3 is not sensitive to Mz, and even the lower elastic The deformation of the barrel has slight torsional deformation, the deformation states of FBG1 and FBG3 are also consistent, the wavelength drift is consistent, and the difference between the wavelength drift of FBG1 and FBG3 has no output;
可见，FBG1和FBG3组成的测量单元的波长漂移量的差值输出实现了只对Fx敏感的自解耦测量。相同的分析方法，将传感器沿Z轴旋转90°，可知FBG2和FBG4组成的测量单元的波长漂移量的差值输出可实现只对Fy敏感的自解耦测量。It can be seen that the difference output of the wavelength drift of the measurement unit composed of FBG1 and FBG3 realizes the self-decoupling measurement that is only sensitive to Fx. With the same analysis method, the sensor is rotated 90° along the Z axis, and it can be seen that the difference output of the wavelength shift of the measurement unit composed of FBG2 and FBG4 can realize self-decoupling measurement that is only sensitive to Fy.
FBG5和FBG7组合为一对测量单元，FBG5、FBG7各自波长漂移量的差值输出用于测量绕Y轴方向的力矩My：FBG5 and FBG7 are combined into a pair of measurement units, and the difference output of the respective wavelength shifts of FBG5 and FBG7 is used to measure the moment My around the Y-axis direction:
1.当有绕Y轴方向的力矩My作用于作为加载环的外环壁上时，沿X轴方向的两个外矩形梁变形明显，FBG5与FBG7布置处产生大小相同、符号相反的应变，FBG5与FBG7的波长漂移大小相等但方向相反，波长漂移量的差值作为测量单元的输出信号，不仅提高了测量灵敏度，而且由环境温度变化带来的波长同向、等值漂移经差值后消除；1. When the moment My around the Y-axis acts on the outer ring wall as the loading ring, the two outer rectangular beams along the X-axis deform significantly, and the arrangement of FBG5 and FBG7 produces strains of the same magnitude and opposite signs. The wavelength drift of FBG5 and FBG7 is equal in size but opposite in direction, and the difference in wavelength drift is used as the output signal of the measurement unit, which not only improves the measurement sensitivity, but also causes the wavelength drift in the same direction and equivalent value caused by the change of ambient temperature after the difference. eliminate;
2.而当有x或y方向的力Fx或Fy作用时，变形主要发生于下弹性筒，上弹性盘仅起到传递力的作用而无明显变形，FBG5、FBG7的波长漂移对Fx和Fy不敏感，FBG5与FBG7波长漂移量的差值无输出；2. When there is a force Fx or Fy in the x or y direction, the deformation mainly occurs in the lower elastic tube, and the upper elastic disc only plays the role of transmitting force without obvious deformation. Insensitive, the difference between FBG5 and FBG7 wavelength drift has no output;
3.当有z方向的力Fz作用时，四个外矩形梁变形趋势一致，FBG5、FBG7布置处产生大小相同、符号相同的应变，FBG5与FBG7的波长漂移量经过差值处理后无输出；3. When the force Fz in the z direction acts, the four outer rectangular beams have the same deformation trend, and the arrangement of FBG5 and FBG7 produces strains with the same size and the same sign, and the wavelength shift of FBG5 and FBG7 has no output after difference processing;
4.当有绕X轴方向的力矩Mx作用时，FBG5和FBG7所在的沿X轴方向的两个外矩形梁所处的变形状态一致，FBG5、FBG7产生相同的波长漂移，FBG5与FBG7的波长漂移量经过差值处理后无输出；4. When there is a moment Mx around the X-axis direction, the two outer rectangular beams along the X-axis direction where FBG5 and FBG7 are located are in the same deformation state, FBG5 and FBG7 produce the same wavelength shift, and the wavelengths of FBG5 and FBG7 There is no output after the drift value is processed by the difference;
5.当有绕Z轴方向的力矩Mz作用时，FBG5和FBG7所在的沿X轴方向的两个外矩形梁无明显变形，而且即使产生微弱变形，FBG5、FBG7布置处的变形状态也一致，FBG5、FBG7产生相同的波长漂移，FBG5与FBG7的波长漂移量经过差值处理后无输出；5. When there is a moment Mz around the Z-axis direction, the two outer rectangular beams along the X-axis direction where FBG5 and FBG7 are located have no obvious deformation, and even if there is a slight deformation, the deformation states of FBG5 and FBG7 are consistent. FBG5 and FBG7 produce the same wavelength drift, and the wavelength drift of FBG5 and FBG7 has no output after difference processing;
可见，FBG5和FBG7组成的测量单元的波长漂移量的差值输出实现了只对My敏感的自解耦测量。相同的分析方法，将传感器沿Z轴旋转90°，可知FBG6和FBG8组成的测量单元的波长漂移量的差值输出可实现只对Mx敏感的自解耦测量。It can be seen that the difference output of the wavelength shift of the measurement unit composed of FBG5 and FBG7 realizes the self-decoupling measurement that is only sensitive to My. In the same analysis method, the sensor is rotated 90° along the Z axis, and it can be seen that the difference output of the wavelength drift of the measurement unit composed of FBG6 and FBG8 can realize self-decoupling measurement that is only sensitive to Mx.
FBG9和FBG10组合为一对测量单元，FBG9、FBG10各自波长漂移量的差值输出用于测量绕Z轴方向的力矩Mz：FBG9 and FBG10 are combined into a pair of measurement units, and the difference output of the respective wavelength shifts of FBG9 and FBG10 is used to measure the moment Mz around the Z-axis direction:
1.当有绕Z轴方向的力矩Mz作用于作为加载环的外环壁时，布置有FBG9和FBG10的内矩形梁发生主要形变，FBG9与FBG10布置处产生大小相同、符号相反的应变，FBG9与FBG10的波长漂移大小相等但方向相反，波长漂移量的差值作为测量单元的输出信号，提高了测量灵敏度，由环境温度变化带来的波长同向、等值漂移经差值后也被消除；1. When the moment Mz around the Z axis acts on the outer ring wall as the loading ring, the inner rectangular beam with FBG9 and FBG10 is mainly deformed, and the strains of the same magnitude and opposite signs are generated at the arrangement of FBG9 and FBG10, and the strain of FBG9 The wavelength drift of FBG10 is equal in size but opposite in direction, and the difference in wavelength drift is used as the output signal of the measurement unit, which improves the measurement sensitivity, and the wavelength drift in the same direction and equivalent value caused by the change of ambient temperature is also eliminated after the difference ;
2.而当有x或y或z方向的力Fx或Fy或Fz作用时，变形主要发生于下弹性筒，上弹性盘仅起到传递力的作用而无明显变形，FBG9、FBG10的波长漂移对Fx、Fy和Fz不敏感，FBG9与FBG10波长漂移量的差值无输出；2. When there is a force Fx or Fy or Fz in the direction of x, y or z, the deformation mainly occurs in the lower elastic cylinder, and the upper elastic disk only plays the role of transmitting force without obvious deformation, and the wavelength drift of FBG9 and FBG10 Insensitive to Fx, Fy and Fz, the difference between FBG9 and FBG10 wavelength drift has no output;
3.而当有绕X轴或Y轴方向的力矩Mx或My作用时，FBG9、FBG10布置处发生的变形状态一致，FBG9、FBG10产生相同的波长漂移，FBG5与FBG7的波长漂移量经过差值处理后无输出；3. When there is a moment Mx or My around the X-axis or Y-axis, the deformation state at the arrangement of FBG9 and FBG10 is the same, FBG9 and FBG10 produce the same wavelength shift, and the wavelength shift of FBG5 and FBG7 is the difference No output after processing;
可见，FBG9和FBG10组成的测量单元的波长漂移量的差值输出实现了只对Mz敏感的自解耦测量。It can be seen that the difference output of the wavelength drift of the measurement unit composed of FBG9 and FBG10 realizes the self-decoupling measurement that is only sensitive to Mz.
FBG11和FBG12组合为一对测量单元，用于测量z方向的力Fz：FBG11 and FBG12 are combined as a pair of measuring units for measuring the force Fz in the z direction:
1.当有z方向的力Fz作用于作为加载环的外环壁时，下弹性筒沿Z轴方向变形，布置于下弹性筒轴向中心的FBG12产生波长漂移，处于自由状态的FBG11为FBG12提供温度补偿，通过温度测试得出处于预拉伸后两端固定粘贴的FBG12与处于自由状态的FBG11的温度灵敏度系数的比值k后，将FBG12的波长漂移量与k倍的FBG11的波长漂移量的差值做为测量单元的输出信号，测量Fz，差值输出信号消除了由环境温度变化带来的FBG12的波长漂移；1. When the force Fz in the z-direction acts on the outer ring wall as the loading ring, the lower elastic cylinder deforms along the Z-axis direction, and FBG12 arranged in the axial center of the lower elastic cylinder produces a wavelength shift, and FBG11 in a free state is FBG12 Provide temperature compensation, after the ratio k of the temperature sensitivity coefficient of FBG12 fixed at both ends after pre-stretching and FBG11 in a free state is obtained through temperature testing, the wavelength drift of FBG12 is k times the wavelength drift of FBG11 The difference is used as the output signal of the measurement unit to measure Fz, and the difference output signal eliminates the wavelength drift of FBG12 caused by ambient temperature changes;
2.而当有沿x或y方向的力Fx或Fy，以及绕X轴或Y轴方向的力矩Mx或My作用时，FBG12处于下弹性筒的轴心，在中性层面上，不发生变形，FBG12波长无漂移；2. When there is a force Fx or Fy along the x or y direction, and a moment Mx or My around the X-axis or Y-axis, the FBG12 is at the axis of the lower elastic cylinder and does not deform on the neutral plane , FBG12 wavelength has no drift;
3.当有绕Z方向的力矩Mz作用时，下弹性筒变形不明显，即使下弹性筒有微扭转变形，也没有对FBG12产生拉伸或者压缩作用，FBG12波长无漂移量；3. When there is a moment Mz around the Z direction, the deformation of the lower elastic tube is not obvious. Even if the lower elastic tube has a slight torsional deformation, there is no stretching or compression effect on FBG12, and the wavelength of FBG12 has no drift;
可见，FBG11和FBG12组成的测量单元的输出实现了只对Fz敏感的自解耦测量。It can be seen that the output of the measurement unit composed of FBG11 and FBG12 realizes the self-decoupling measurement which is only sensitive to Fz.
以上内容是结合具体的实施方式对本发明所作的进一步详细说明，不能认定本发明的具体实施只局限于这些说明。对于本发明所属技术领域的普通技术人员来说，在不脱离本发明构思的前提下，还可以做出若干简单推演或替换。The above content is a further detailed description of the present invention in conjunction with specific embodiments, and it cannot be assumed that the specific implementation of the present invention is limited to these descriptions. Those of ordinary skill in the technical field to which the present invention belongs can also make some simple deduction or replacement without departing from the concept of the present invention.
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| CN201510697769.8ACN105181193B (en) | 2015-10-21 | 2015-10-21 | Fiber grating six-dimension force sensor and its agent structure and measuring method |
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|---|---|---|---|---|
| CN106248269A (en)* | 2016-07-29 | 2016-12-21 | 濮阳光电产业技术研究院 | Temperature-insensitive two-dimensional stress sensor based on fiber grating |
| CN106932123A (en)* | 2015-12-30 | 2017-07-07 | 佛山市禾才科技服务有限公司 | A kind of wrist sensor |
| CN107144275A (en)* | 2017-07-17 | 2017-09-08 | 四川知微传感技术有限公司 | Micro-mechanical inertial sensor temperature drift resistance structure |
| CN107351102A (en)* | 2017-09-13 | 2017-11-17 | 武汉科技大学 | Fiber grating force-touch sensor, robot and its manipulator finger tip |
| CN107389254A (en)* | 2017-08-24 | 2017-11-24 | 武汉科技大学 | Tire road surface three axis force measurement apparatus and its measuring method |
| CN107462352A (en)* | 2017-07-12 | 2017-12-12 | 中国航空工业集团公司西安飞行自动控制研究所 | The fiber grating stick force sensor and measuring method of a kind of temperature self-compensation |
| CN107860497A (en)* | 2017-11-23 | 2018-03-30 | 武汉科技大学 | Optical fibre grating three-dimensional power feels probe and manufacture method |
| CN108663160A (en)* | 2018-05-15 | 2018-10-16 | 哈尔滨工业大学 | A kind of optics compound sensor probe |
| CN109115380A (en)* | 2017-06-23 | 2019-01-01 | 中国科学院沈阳自动化研究所 | Three-dimensional force sensor for minimally invasive medical instrument |
| CN110057481A (en)* | 2019-05-28 | 2019-07-26 | 武汉理工大学 | Measuring device is transmitted based on fiber grating and two between centers torques of strain-ga(u)ge technique |
| CN110779651A (en)* | 2019-11-18 | 2020-02-11 | 重庆交通大学 | A Fiber Bragg Grating-based 3D Force Sensor with Double Cross Beams |
| CN110802595A (en)* | 2019-11-15 | 2020-02-18 | 山东大学 | Sensing device for robotic arm, robotic arm assembly and application |
| CN111558954A (en)* | 2020-04-17 | 2020-08-21 | 鲁班嫡系机器人（深圳）有限公司 | Force sensor assembly, measuring method, actuator comprising force sensor assembly and robot comprising force sensor assembly |
| CN112129449A (en)* | 2020-09-29 | 2020-12-25 | 河南大学 | A multi-dimensional force sensing device and method for robot fingers based on fiber grating |
| CN113188705A (en)* | 2021-04-30 | 2021-07-30 | 华力创科学(深圳)有限公司 | Small force sensor based on light path blocking method and six-axis force sensor |
| CN113188462A (en)* | 2021-05-08 | 2021-07-30 | 珠海澳大科技研究院 | Fiber grating sensing rod for three-dimensional deformation measurement and measurement method thereof |
| CN113607313A (en)* | 2021-07-09 | 2021-11-05 | 武汉理工大学 | Laminated fiber grating six-dimensional force-torque sensor based on C-shaped beam |
| CN113820062A (en)* | 2021-09-30 | 2021-12-21 | 浙江大学 | Temperature compensation method of six-dimensional force sensor |
| CN113848011A (en)* | 2021-09-23 | 2021-12-28 | 哈尔滨工程大学 | A structure decoupling six-dimensional force sensor and its measurement method |
| CN114152374A (en)* | 2021-11-09 | 2022-03-08 | 天津大学 | High-precision micro torque sensor based on fiber Bragg grating |
| CN114858336A (en)* | 2022-05-17 | 2022-08-05 | 重庆交通大学 | Low-coupling fiber grating three-dimensional force sensor |
| CN115507988A (en)* | 2022-09-27 | 2022-12-23 | 山东建筑大学 | A six-dimensional miniature force/torque sensor for laparoscopic surgery |
| CN117470428A (en)* | 2023-12-26 | 2024-01-30 | 武汉理工大学 | Three-dimensional force sensor, use method and minimally invasive surgery clamp |
| CN117470429A (en)* | 2023-12-27 | 2024-01-30 | 武汉理工大学 | Six-dimensional force sensor, drilling and milling robot for surgery and application of drilling and milling robot |
| CN120043457A (en)* | 2025-02-26 | 2025-05-27 | 山东省科学院激光研究所 | Optical fiber two-dimensional strain sensor |
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| CN101419102A (en)* | 2008-11-25 | 2009-04-29 | 中国科学院合肥物质科学研究院 | Ultrathin six-dimensional force sensor and method thereof for measuring three-dimensional force and three-dimensional moment information |
| CN101672705A (en)* | 2009-09-29 | 2010-03-17 | 西北工业大学 | Six-dimensional force sensor |
| CN201561825U (en)* | 2009-09-29 | 2010-08-25 | 西北工业大学 | A kind of elastic body of six-dimensional force sensor |
| CN102095534A (en)* | 2010-12-08 | 2011-06-15 | 上海交通大学 | Double rood beam high-sensitivity six-dimensional moment sensor |
| US20120079868A1 (en)* | 2010-10-05 | 2012-04-05 | Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.) | Calibration method for multi-component force measuring spindle unit used in tire testing machine |
| CN202720078U (en)* | 2012-05-29 | 2013-02-06 | 宁波柯力传感科技股份有限公司 | Strain type six-dimensional force sensor |
| US20130247657A1 (en)* | 2012-03-22 | 2013-09-26 | Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.) | Multi-component force measurement spindle unit of tire testing machine |
| WO2013169056A1 (en)* | 2012-05-10 | 2013-11-14 | 전자부품연구원 | Force torque sensor, force torque sensor frame, and force torque measurement method |
| CN103528726A (en)* | 2013-11-01 | 2014-01-22 | 哈尔滨工业大学 | Cross-beam-type six-dimensional force sensor with overload protection function |
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101419102A (en)* | 2008-11-25 | 2009-04-29 | 中国科学院合肥物质科学研究院 | Ultrathin six-dimensional force sensor and method thereof for measuring three-dimensional force and three-dimensional moment information |
| CN101672705A (en)* | 2009-09-29 | 2010-03-17 | 西北工业大学 | Six-dimensional force sensor |
| CN201561825U (en)* | 2009-09-29 | 2010-08-25 | 西北工业大学 | A kind of elastic body of six-dimensional force sensor |
| US20120079868A1 (en)* | 2010-10-05 | 2012-04-05 | Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.) | Calibration method for multi-component force measuring spindle unit used in tire testing machine |
| CN102095534A (en)* | 2010-12-08 | 2011-06-15 | 上海交通大学 | Double rood beam high-sensitivity six-dimensional moment sensor |
| US20130247657A1 (en)* | 2012-03-22 | 2013-09-26 | Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.) | Multi-component force measurement spindle unit of tire testing machine |
| WO2013169056A1 (en)* | 2012-05-10 | 2013-11-14 | 전자부품연구원 | Force torque sensor, force torque sensor frame, and force torque measurement method |
| CN202720078U (en)* | 2012-05-29 | 2013-02-06 | 宁波柯力传感科技股份有限公司 | Strain type six-dimensional force sensor |
| CN103528726A (en)* | 2013-11-01 | 2014-01-22 | 哈尔滨工业大学 | Cross-beam-type six-dimensional force sensor with overload protection function |
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106932123A (en)* | 2015-12-30 | 2017-07-07 | 佛山市禾才科技服务有限公司 | A kind of wrist sensor |
| CN106932123B (en)* | 2015-12-30 | 2019-07-09 | 佛山市禾才科技服务有限公司 | A kind of wrist sensor |
| CN106248269A (en)* | 2016-07-29 | 2016-12-21 | 濮阳光电产业技术研究院 | Temperature-insensitive two-dimensional stress sensor based on fiber grating |
| CN109115380A (en)* | 2017-06-23 | 2019-01-01 | 中国科学院沈阳自动化研究所 | Three-dimensional force sensor for minimally invasive medical instrument |
| CN107462352A (en)* | 2017-07-12 | 2017-12-12 | 中国航空工业集团公司西安飞行自动控制研究所 | The fiber grating stick force sensor and measuring method of a kind of temperature self-compensation |
| CN107144275A (en)* | 2017-07-17 | 2017-09-08 | 四川知微传感技术有限公司 | Micro-mechanical inertial sensor temperature drift resistance structure |
| CN107389254A (en)* | 2017-08-24 | 2017-11-24 | 武汉科技大学 | Tire road surface three axis force measurement apparatus and its measuring method |
| CN107351102A (en)* | 2017-09-13 | 2017-11-17 | 武汉科技大学 | Fiber grating force-touch sensor, robot and its manipulator finger tip |
| CN107860497B (en)* | 2017-11-23 | 2020-04-03 | 武汉科技大学 | Fiber Bragg Grating 3D Force Sensing Probe and Manufacturing Method |
| CN107860497A (en)* | 2017-11-23 | 2018-03-30 | 武汉科技大学 | Optical fibre grating three-dimensional power feels probe and manufacture method |
| CN108663160A (en)* | 2018-05-15 | 2018-10-16 | 哈尔滨工业大学 | A kind of optics compound sensor probe |
| CN108663160B (en)* | 2018-05-15 | 2020-07-03 | 哈尔滨工业大学 | Optical composite sensor probe |
| CN110057481B (en)* | 2019-05-28 | 2020-09-29 | 武汉理工大学 | Torque transmission measuring device between two shafts based on fiber bragg grating and strain gauge technology |
| CN110057481A (en)* | 2019-05-28 | 2019-07-26 | 武汉理工大学 | Measuring device is transmitted based on fiber grating and two between centers torques of strain-ga(u)ge technique |
| CN110802595A (en)* | 2019-11-15 | 2020-02-18 | 山东大学 | Sensing device for robotic arm, robotic arm assembly and application |
| CN110779651A (en)* | 2019-11-18 | 2020-02-11 | 重庆交通大学 | A Fiber Bragg Grating-based 3D Force Sensor with Double Cross Beams |
| CN111558954A (en)* | 2020-04-17 | 2020-08-21 | 鲁班嫡系机器人（深圳）有限公司 | Force sensor assembly, measuring method, actuator comprising force sensor assembly and robot comprising force sensor assembly |
| CN112129449A (en)* | 2020-09-29 | 2020-12-25 | 河南大学 | A multi-dimensional force sensing device and method for robot fingers based on fiber grating |
| CN113188705A (en)* | 2021-04-30 | 2021-07-30 | 华力创科学(深圳)有限公司 | Small force sensor based on light path blocking method and six-axis force sensor |
| CN113188705B (en)* | 2021-04-30 | 2022-11-25 | 华力创科学(深圳)有限公司 | Small force sensor based on light path blocking method and six-axis force sensor |
| CN113188462B (en)* | 2021-05-08 | 2022-01-25 | 珠海澳大科技研究院 | Fiber grating sensing rod for three-dimensional deformation measurement and measurement method thereof |
| CN113188462A (en)* | 2021-05-08 | 2021-07-30 | 珠海澳大科技研究院 | Fiber grating sensing rod for three-dimensional deformation measurement and measurement method thereof |
| CN113607313A (en)* | 2021-07-09 | 2021-11-05 | 武汉理工大学 | Laminated fiber grating six-dimensional force-torque sensor based on C-shaped beam |
| CN113848011A (en)* | 2021-09-23 | 2021-12-28 | 哈尔滨工程大学 | A structure decoupling six-dimensional force sensor and its measurement method |
| CN113820062A (en)* | 2021-09-30 | 2021-12-21 | 浙江大学 | Temperature compensation method of six-dimensional force sensor |
| CN114152374A (en)* | 2021-11-09 | 2022-03-08 | 天津大学 | High-precision micro torque sensor based on fiber Bragg grating |
| CN114152374B (en)* | 2021-11-09 | 2022-10-04 | 天津大学 | High-precision micro torque sensor based on fiber Bragg grating |
| CN114858336A (en)* | 2022-05-17 | 2022-08-05 | 重庆交通大学 | Low-coupling fiber grating three-dimensional force sensor |
| CN114858336B (en)* | 2022-05-17 | 2023-12-01 | 重庆交通大学 | Low-coupling fiber grating three-dimensional force sensor |
| CN115507988A (en)* | 2022-09-27 | 2022-12-23 | 山东建筑大学 | A six-dimensional miniature force/torque sensor for laparoscopic surgery |
| CN117470428A (en)* | 2023-12-26 | 2024-01-30 | 武汉理工大学 | Three-dimensional force sensor, use method and minimally invasive surgery clamp |
| CN117470428B (en)* | 2023-12-26 | 2024-04-05 | 武汉理工大学 | A three-dimensional force sensor, use method and minimally invasive surgical clamp |
| CN117470429A (en)* | 2023-12-27 | 2024-01-30 | 武汉理工大学 | Six-dimensional force sensor, drilling and milling robot for surgery and application of drilling and milling robot |
| CN117470429B (en)* | 2023-12-27 | 2024-04-05 | 武汉理工大学 | A six-dimensional force sensor, surgical drilling and milling robot and its application |
| CN120043457A (en)* | 2025-02-26 | 2025-05-27 | 山东省科学院激光研究所 | Optical fiber two-dimensional strain sensor |
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| EE01 | Entry into force of recordation of patent licensing contract | Application publication date:20151223 Assignee:Yixing Wuyi Hechuang Technology Co.,Ltd. Assignor:WUHAN University OF SCIENCE AND TECHNOLOGY Contract record no.:X2021420000035 Denomination of invention:Fiber Bragg grating six dimensional force sensor and its main structure and measurement method Granted publication date:20171010 License type:Common License Record date:20211209 | |
| EE01 | Entry into force of recordation of patent licensing contract | ||
| EE01 | Entry into force of recordation of patent licensing contract | Application publication date:20151223 Assignee:Wuhan Ouguang Technology Co.,Ltd. Assignor:WUHAN University OF SCIENCE AND TECHNOLOGY Contract record no.:X2022420000083 Denomination of invention:Fiber grating six-dimensional force sensor and its main structure and measurement method Granted publication date:20171010 License type:Common License Record date:20220908 | |
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| TR01 | Transfer of patent right | Effective date of registration:20241108 Address after:No. 3, 2nd Floor, Building 11, Optics Valley Science and Technology Port, No. 18 Huashiyuan North Road, Donghu New Technology Development Zone, Wuhan City, Hubei Province 430000 Patentee after:Huahe Optoelectronics (Wuhan) Co.,Ltd. Country or region after:China Address before:430081 No. 947 Heping Avenue, Qingshan District, Hubei, Wuhan Patentee before:WUHAN University OF SCIENCE AND TECHNOLOGY Country or region before:China |