Embodiment
As shown in Figure 1, a kind of digital integrated circuit DC parameter standard reproducing method that embodiment of the present invention provides, comprises the following steps:
S1: the controller 12 in digital integrated circuit DC parameter standard set-up 1 arranges digital integrated circuit DC parameter standard value;
S2: the instrument module group 11 in digital integrated circuit DC parameter standard set-up 1 according to the voltage/current applying value at described digital integrated circuit DC parameter standard value and device under test 2 pairs of digital integrated circuit DC parameter standard set-up 1 two ends by controller 12, instrument module group 11, device under test 2 is sequentially connected in series in the test loop of formation and reappears digital integrated circuit DC parameter, controller 12 accepts the digital integrated circuit DC parameter in the test loop of instrument module group 11 reproduction, and compare with described digital integrated circuit DC parameter standard value, obtain error testing result,
S3: if described error testing result exceedes the error judgement scope that controller 12 specifies, controller 12 utilizes dichotomy algorithm to revise the digital integrated circuit DC parameter in test loop, until the error that error testing result is less than regulation judges scope, namely revised digital integrated circuit DC parameter is the digital integrated circuit DC parameter standard of digital integrated circuit DC parameter standard set-up 1 reproduction.
Concrete, in the present embodiment: digital integrated circuit DC parameter standard set-up 1, for reappearing many group programmable digital integrated circuit DC parameter standards and calibrating the digital integrated circuit DC parameter in device under test 2; Device under test 2 is integrated circuit test system preferably, for testing digital integrated circuit DC parameter; Instrument module group 11 comprises digital multimeter 111, programmable resistance 112, source measuring unit 113, according to digital integrated circuit DC parameter measuring principle, digital multimeter 111, programmable resistance 112, source measuring unit 113 acting in conjunction reappear the standard value of different digital integrated circuit DC parameters, have that versatility is good, good portability, parameter can electrodeless adjustment and accuracy highs.Wherein, digital multimeter 111, for carrying out voltage resistance measurement; Programmable resistance 112, for setting any resistance value; Source measuring unit 113, for arranging variable voltage value; The error that controller 12 specifies judges that scope is determined by the resolving power of digital multimeter 111 voltage measurement, error judgment scope preferably 0.1%.
As shown in Figure 3, the principle of the standard value of reproduction digital integrated circuit DC parameter is: in digital integrated circuit DC parameter standard set-up 1, controller 12 is interconnected by PXI bus 6 with PXI instrument module group 11, each module reproduction digital integrated circuit DC parameter standard in control PXI instrument module group 11, and carry out the storage of data, process and display.Interface adapter 13 realizes device under test 2 and the adaptive connection of PXI instrument module group 11, is connected, while be connected with load plate 4 by test interface 7 by connection cable 5 with PXI instrument module group 11.The different principle that interface adapter 13 reappears according to digital integrated circuit parameter and standard, signal from PXI instrument module group 11 is transferred, isolates, distributed, to reappear different parameter and standards to test interface 7, calibrating installation 3 is for carrying out magnitude tracing to the digital integrated circuit DC parameter standard in digital integrated circuit DC parameter standard set-up 1.
Embodiment 1
Reproduction digital integrated circuit DC parameter standard, such as IoLduring parameter, the concrete steps of digital integrated circuit DC parameter standard reproducing method are as follows:
S1: input an I in the controller 12 in digital integrated circuit DC parameter standard set-up 1oLparameter standard value, such as 1mA, arrange suitable programmable resistance values according to this digital integrated circuit DC parameter standard value, such as 100 Ω, and measured by digital multimeter 111 pairs of programmable resistances 112 and recorded;
S2: carry out I in integrated circuit test systemoLduring parameter testing, certain magnitude of voltage can be applied to digital integrated circuit DC parameter standard set-up 1, such as 0.4V, IoLone initial voltage value is set to after parameter and standard receives this pumping signal source measuring unit 113, such as 0V, now can produce a pressure drop on programmable resistance 112, the voltage measuring value at programmable resistance 112 two ends of reading according to digital multimeter 111 and the resistance value measured in advance to calculate in loop current value now;
S3: if this current value and IoLthe error of parameter standard value exceedes the error judgement scope of controller 12 regulation, then controller 12 regulates the voltage applying value of source measuring unit 113 by dichotomy algorithm, thus the current value in change loop, again measure current value in loop according to digital multimeter 111.Repeatedly repeat said process, until current value in loop and IoLthe difference of parameter standard value is less than the error judgement scope of regulation, and now, namely the current value measured in revised loop is the I of digital integrated circuit DC parameter standard set-up 1 reproductionoLparameter and standard, to I from integrated circuit test system applies voltageoLthe whole process that parameter and standard stable output gets off is no more than 1s.IoH, IiL/ IiH, IoS, IdDparameter and standard design concept and IoLparameter and standard is similar.
Current parameters standard value (IoH, IiL/ IiH, IoS, IdD) with the relation table of the voltage applying value of integrated circuit test system, resistance settings, source measuring unit initial value as shown in table 1, table 2:
Table 1
| Current parameters standard value | Voltage applying value | Resistance settings | Source measuring unit initial value |
| 100nA~1μA | 10mV~15V | 1MΩ | 0V |
| 1μA~10μA | 10mV~15V | 100kΩ | 0V |
| 10μA~100mA | 10mV~15V | 10kΩ | 0V |
| 100μA~1mA | 10mV~15V | 1kΩ | 0V |
| 1mA~100mA | 10mV~15V | 100Ω | 0V |
Table 2
| Current parameters standard value | Voltage applying value | Resistance settings | Source measuring unit initial value |
| -100nA~-1μA | 10mV~15V | 1MΩ | 10V |
| -1μA~-10μA | 10mV~15V | 100kΩ | 10V |
| -10μA~-100mA | 10mV~15V | 10kΩ | 10V |
| -100μA~-1mA | 10mV~15V | 1kΩ | 10V |
| -1mA~-150mA | 10mV~15V | 100Ω | 10V |
As shown in Figure 4, I is reappearedoL/ IoH, IiL/ IiH, IoS, IdDduring parameter and standard, instrument module group 11 comprises digital multimeter 111, programmable resistance 112 and source measuring unit 113; Programmable resistance 112 is connected in series with device under test 2, source measuring unit 113 successively and forms loop, digital multimeter 111 is connected in parallel on the two ends of programmable resistance 112, the passage negative pole end ground connection of device under test 2, the two ends of load plate 4 are connected with the two ends of device under test 2 passage respectively, two ends after the two ends of load plate 4 are also connected in series with programmable resistance 112, source measuring unit 113 are respectively connected, wherein, device under test 2 preferably integrated circuit test system.
Embodiment 2
Reproduction digital integrated circuit DC parameter standard, such as: VoLduring parameter, the concrete steps of digital integrated circuit DC parameter standard reproducing method are as follows:
S1: input a V in the controller 12 in digital integrated circuit DC parameter standard set-up 1oLparameter standard value, such as 0.1V, suitable programmable resistance values is set according to this digital integrated circuit DC parameter standard value, such as 1k Ω, and measures by the voltage at the two ends after digital multimeter 111 pairs of programmable resistances 112, source measuring unit 113 series connection and record;
S2: carry out V in integrated circuit test systemoLduring parameter testing, certain current value can be applied to digital integrated circuit DC parameter standard set-up 1, such as 100 μ A, VoLone initial voltage value is set to after parameter and standard receives this pumping signal source measuring unit 113, such as 0V, now can produce a pressure drop on programmable resistance 112, the programmable resistance 112 read according to digital multimeter 111, source measuring unit 113 connect after the voltage measuring value at two ends;
S3: if this magnitude of voltage and VoLthe error of parameter standard value exceedes the error judgement scope of controller 12 regulation, then controller 12 regulates the voltage applying value of source measuring unit 113 by dichotomy algorithm, change the magnitude of voltage of test interface 7, again measure the magnitude of voltage at test interface 7 two ends according to digital multimeter 111.Repeatedly repeat said process, until the magnitude of voltage at test interface 7 two ends and VoLthe difference of parameter standard value is less than the error judgement scope of regulation, and now, namely the magnitude of voltage through revised test interface 7 two ends is the V of digital integrated circuit DC parameter standard set-up 1 reproductionoLparameter and standard, to V from integrated circuit test system applies voltageoLthe whole process that parameter and standard stable output gets off is no more than 1s.ViK, VoHparameter and standard design concept and VoLparameter and standard is similar.
Voltage parameter standard value (ViK, VoL/ VoH) as shown in table 3 with the relation table of the electric current applying value of integrated circuit test system, resistance settings, source measuring unit initial value:
Table 3
| Voltage parameter standard value | Electric current applying value | Resistance settings | Source measuring unit initial value |
| 10mV~15V | 10μA~100μA | 10kΩ | 0V |
| 10mV~15V | 100μA~1mA | 1kΩ | 0V |
| 10mV~15V | 1mA~100mA | 100Ω | 0V |
As shown in Figure 5, V is reappearediK, VoL/ VoHduring parameter and standard, instrument module group 11 comprises digital multimeter 111, programmable resistance 112 and source measuring unit 113, programmable resistance 112 successively with device under test 2, source measuring unit 113 is connected in series and forms loop, digital multimeter 111 be connected in parallel on programmable resistance 112 be connected in series with source measuring unit 113 after two ends, the passage negative pole end ground connection of device under test 2, the two ends of load plate 4 are connected with the two ends of device under test 2 respectively, the two ends of load plate 4 are also connected with the two ends of digital multimeter 111 respectively, wherein, device under test 2 is integrated circuit test system preferably, interface adapter 13 is electrically connected with load plate 4 by test interface 7, for the physical connection between device under test 2 and digital integrated circuit DC parameter standard set-up 1.
Further, digital integrated circuit DC parameter reproducing method is further comprising the steps of: digital integrated circuit DC parameter typical magnitude is traceable to higher voltage order one, current standard by calibrating installation 3.
Concrete, in the present embodiment: calibrating installation 3 is 3458A preferably, for carrying out auto-calibration to digital integrated circuit DC parameter standard, digital integrated circuit DC parameter standard is traceable to higher voltage order one, current standard.
When magnitude tracing is carried out to digital integrated circuit DC parameter, such as: VoLparameter, S4 step is as follows:
3458A is connected on interface adapter 13 spare interface, and controller 12 is operated in the pattern of tracing to the source, by arranging V in controller 12oLparameter measurement point exports corresponding direct current parameter standard value (generally choosing three measurement points in full scale), 3458A measures this DC parameter standard value, and measurement result is stored in controller 12 according to specified format, finally can carry out error correction according to the DC parameter standard of above-mentioned measurement result to digital integrated circuit DC parameter standard set-up 1, thus ensure the value reliability of digital integrated circuit DC parameter standard.
As shown in Figure 6, when magnitude tracing is carried out to digital integrated circuit DC parameter, instrument module group 11 comprises digital multimeter 111, programmable resistance 112, source measuring unit 113, and source measuring unit 113 comprises the first source measuring unit 113a, the second source measuring unit 113b; Programmable resistance 112 is connected in series forms loop with the first source measuring unit 113a, the second source measuring unit 113b successively, the two ends of interface adapter 13 are connected with the two ends of the first source measuring unit 113a, digital multimeter 111 respectively, the two ends of calibrating installation 3 are connected with the two ends of interface adapter 13, digital multimeter 111 be connected in parallel on programmable resistance 112 and the second source measuring unit 113b be connected in series after two ends.Wherein, device under test 2 is integrated circuit test system preferably, calibrating installation 3 is 3458A preferably, interface adapter 13 is electrically connected with calibrating installation 3 by gpib interface 8, carry out auto-calibration by gpib interface 8 communication interaction, directly digital integrated circuit DC parameter standard can be traceable to higher voltage order one, current standard.
In the present embodiment: digital multimeter 111 figure place is not less than six and half, the PXI-4071 of the preferred NI company of digital multimeter 111; Programmable resistance 112 scope at least 10 Ω ~ 1M Ω, the 40-297-150 of the preferred pickering company of programmable resistance 112; First source measuring unit 113, second source measuring unit 113 precision is not less than 18bit, scope at least-10V ~ 10V, the PXI-4143 of the first source measuring unit 113a, the second preferred NI company of source measuring unit 113b.
The magnitude tracing of digital integrated circuit DC parameter standard is the core of digital integrated circuit DC parameter calibrating installation 1, only has the digital integrated circuit DC parameter standard set-up 1 after magnitude tracing can be applied to the calibration of device under test 2.
Further, digital integrated circuit DC parameter standard comprises output low level voltage (VoL), output high level voltage (VoH), output low level electric current (IoL), export high level of current (IoH), input clamp voltage (ViK), input low level electric current (IiL), input high level electric current (IiH), short-circuit current (IoS), source current (IdD).
Concrete, all digital integrated circuit DC parameter standards all can carry out electrodeless adjustment between a minimum and a maximum value, and uncertainty of measurement is better than 0.1%.
As shown in Figure 2, digital integrated circuit DC parameter standard set-up provided by the invention, comprises PXI instrument module group 11, controller 12 and interface adapter 13;
Controller 11, interface adapter 13 are electrically connected with PXI instrument module group 11 respectively;
PXI instrument module group 11, for the measuring principle according to digital integrated circuit DC parameter, reproduction many groups programmable digital integrated circuit DC parameter standard;
Controller 12, reappears digital integrated circuit DC parameter standard for control PXI instrument module group 11, and stores data, processes and show;
Interface adapter 13, for the different principle corresponding to reproduction digital integrated circuit parameter and standard, the data-signal of the PXI instrument module group 11 received is transferred, isolates, distributed, to reappear different digital integrated circuit parameter and standards to device under test 2.
Concrete, PXI instrument module group 11 comprises digital multimeter 111, programmable resistance 112, source measuring unit 113, according to digital integrated circuit DC parameter measuring principle, digital multimeter 111, programmable resistance 112, source measuring unit 113 acting in conjunction reappear the typical magnitude of different digital integrated circuit DC parameters, have that versatility is good, good portability, parameter can electrodeless adjustment and accuracy highs.Wherein, digital multimeter 111, for carrying out voltage resistance measurement; Programmable resistance 112, for setting any resistance value; Source measuring unit 113, for arranging variable voltage value.In the present embodiment: PXI (PCI extensions for Instrumentation), the PCI namely towards instrument system expands.PXI instrument module group 11 is electrically connected with interface adapter 13 by connection cable 5; PXI instrument module group 11 is electrically connected with controller 12 by PXI bus or gpib bus, PXI instrument module group 11 is electrically connected with controller 12 preferably by PXI bus 6, GPIB, i.e. General-Purpose InterfaceBus, general purpose interface bus is the bus that a kind of equipment is connected with computing machine.
Further, digital integrated circuit DC parameter standard comprises output low level voltage (VoL), output high level voltage (VoH), output low level electric current (IoL), export high level of current (IoH), input clamp voltage (ViK), input low level electric current (IiL), input high level electric current (IiH), short-circuit current (IoS), source current (IdD).
Concrete, all digital integrated circuit DC parameter standards all can carry out electrodeless adjustment between a minimum and a maximum value, and uncertainty of measurement is better than 0.1%.
Further, PXI instrument module group 11 comprises digital multimeter 111, programmable resistance 112 and source measuring unit 113; Programmable resistance 112 is connected in series with device under test 2, source measuring unit 113 successively and forms loop, and digital multimeter 111 is connected in parallel on the two ends of programmable resistance 112, for realizing the I introducing external unitoL/ IoH, IiL/ IiH, IoS, IdDthe reproduction of parameter and standard.
Concrete, in the present embodiment: digital multimeter 111 figure place is not less than six and half, the PXI-4071 of the preferred NI company of digital multimeter 111; Programmable resistance 112 scope at least 10 Ω ~ 1M Ω, the 40-297-150 of the preferred pickering company of programmable resistance 112; Source measuring unit 113 precision is not less than 18bit, scope at least-10V ~ 10V, the PXI-4143 of the preferred NI company of source measuring unit 113.
Further, PXI instrument module group 11 comprises digital multimeter 111, programmable resistance 112 and source measuring unit 113; Programmable resistance 112 is connected in series with device under test 2, source measuring unit 113 successively and forms loop, digital multimeter 111 is connected in parallel on programmable resistance 112, source measuring unit 113 be connected in series after two ends, introduce the V of external unit for realizingiK, VoL/ VoHthe reproduction of parameter and standard.
Concrete, in the present embodiment: digital multimeter 111 figure place is not less than six and half, the PXI-4071 of the preferred NI company of digital multimeter 111; Programmable resistance 112 scope at least 10 Ω ~ 1M Ω, the 40-297-150 of the preferred pickering company of programmable resistance 112; First source measuring unit 113, second source measuring unit 113 precision is not less than 18bit, scope at least-10V ~ 10V, the PXI-4143 of the first source measuring unit 113a, the second preferred NI company of source measuring unit 113b.
In the present embodiment: PXI instrument module group 11 comprises digital multimeter 111, programmable resistance 112, source measuring unit 113, source measuring unit 113 comprises the first source measuring unit 113a, the second source measuring unit 113b; Programmable resistance 112 is connected in series forms loop with the first source measuring unit 113a, the second source measuring unit 113b successively, digital multimeter 111 be connected in parallel on programmable resistance 112 and the second source measuring unit 113b be connected in series after two ends, the first source measuring unit 113a can be adopted to replace device under test 2 to realize the digital integrated circuit DC parameter standard reproduction process of digital integrated circuit DC parameter standard set-up 1 inside.
Preferably, digital multimeter 111 figure place is not less than six and half, the PXI-4071 of the preferred NI company of digital multimeter 111; Programmable resistance 112 scope at least 10 Ω ~ 1M Ω, the 40-297-150 of the preferred pickering company of programmable resistance 112; First source measuring unit 113, second source measuring unit 113 precision is not less than 18bit, scope at least-10V ~ 10V, the PXI-4143 of the first source measuring unit 113a, the second preferred NI company of source measuring unit 113b;
Be understandable that, for the person of ordinary skill of the art, other various corresponding change and distortion can be made by technical conceive according to the present invention, and all these change the protection domain that all should belong to the claims in the present invention with distortion.