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CN104947186A - Mobile secondary feeding device for polycrystalline ingot furnace - Google Patents

Mobile secondary feeding device for polycrystalline ingot furnace
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Publication number
CN104947186A
CN104947186ACN201510420959.5ACN201510420959ACN104947186ACN 104947186 ACN104947186 ACN 104947186ACN 201510420959 ACN201510420959 ACN 201510420959ACN 104947186 ACN104947186 ACN 104947186A
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CN
China
Prior art keywords
ingot furnace
polycrystalline ingot
filling tube
secondary charging
feeding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201510420959.5A
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Chinese (zh)
Inventor
陈湘伟
薛抗美
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JIANGSU XIEXIN SOFT CONTROL EQUIPMENT TECHNOLOGY DEVELOPMENT CO LTD
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JIANGSU XIEXIN SOFT CONTROL EQUIPMENT TECHNOLOGY DEVELOPMENT CO LTD
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Priority to CN201510420959.5ApriorityCriticalpatent/CN104947186A/en
Publication of CN104947186ApublicationCriticalpatent/CN104947186A/en
Pendinglegal-statusCriticalCurrent

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Abstract

The invention relates to a mobile secondary feeding device for a polycrystalline ingot furnace. The device comprises a mobile trolley, a charging hopper which is installed on the mobile trolley, a conveying device and a lifting device, wherein a discharging valve is arranged at the bottom of the charging hopper, the conveying device comprises a shell communicated with the discharging valve, a feeding device used for receiving and transferring silicon materials, and a feeding tube which can ascend and descend and is used for receiving the silicon materials conveyed by the feeding device are arranged in the shell, and a connector for the feeding tube to stretch out is formed in the shell; the lifting device controls the feeding tube to ascend and descend. The conveying device is provided with a connector used for being connected with a feeding connector of the ingot furnace. In the feeding process, the lifting device controls the feeding tube in the conveying device to descend and the feeding tube enters the ingot furnace through the connector. The silicon materials in the charging hopper continuously enter the feeding tube under the action of the feeding device, then, the silicon materials enter the ingot furnace, and therefore secondary feeding of the polycrystalline ingot furnace is achieved, and the crucible utilization rate and the yield of the ingot furnace are increased.

Description

Moveable secondary charging of polycrystalline ingot furnace device
Technical field
The present invention relates to field of polycrystalline silicon ingot, be specifically related to a kind of moveable secondary charging of polycrystalline ingot furnace device.
Background technology
In photovoltaic industry production process, polycrystalline silicon ingot casting is the requisite important production link that polysilicon chip is produced, and the charge amount improving single heat when equipment allows is the important channel reducing production cost.The polycrystalline silicon ingot or purifying furnace that nearly all producer design is in the market produced is all take disposable pre-charging method to produce, that is: be placed in quartz crucible by manual type accumulation by a certain percentage by polycrystalline silicon raw material that is block and powdery at clean charging room in advance.
Because polycrystalline silicon raw material that is block and powdery has certain interval when accumulation is put between block and block, tap density is lower, during hand charging, the actual piling height of silicon material has exceeded the height 10-20cm of quartz crucible, the liquid level of the silicon material after can melting in ingot casting production process only has quartz crucible height about 2/3, and quartz crucible certainly will be caused like this to there is certain waste.
Summary of the invention
Based on this, be necessary to provide one to polycrystalline silicon ingot or purifying furnace secondary charging, quartz crucible utilization ratio can be improved, improve the moveable secondary charging of polycrystalline ingot furnace device of ingot furnace output.
A kind of moveable secondary charging of polycrystalline ingot furnace device, comprising: travelling car; Loading hopper, is arranged on travelling car, is provided with bleeder valve bottom it; Feeding device, comprise the housing be connected with bleeder valve, wherein said enclosure interior is provided with for receiving and the drawing-in device of transferred silicon material, the liftable filling tube being used for receiving the silicon material that drawing-in device sends, and described housing is provided with the Link Port that can stretch out for described filling tube; And lifting device, control the lifting of described filling tube.
Above-mentioned moveable secondary charging of polycrystalline ingot furnace device, feeding device is provided with the Link Port be connected with the filler interface place of ingot furnace, time reinforced, the filling tube that lifting device controls feeding device inside declines and enters ingot furnace inside via Link Port, silicon material in loading hopper constantly enters filling tube under the effect of drawing-in device, and then enter ingot furnace inside, thus realize the secondary charging to polycrystalline silicon ingot or purifying furnace, improve crucible utilization ratio, improve ingot furnace output.
Wherein in an embodiment, described drawing-in device is oscillating feeder.
Wherein in an embodiment, described filling tube is vertically arranged, also be provided with horizontally disposed transfer lime in described housing, described transfer lime is between described oscillating feeder and filling tube, and described filling tube can drop to the position of its open top lower than the mouth of pipe of described transfer lime.
Wherein in an embodiment, described transfer lime and filling tube are silica tube.
Wherein in an embodiment, described lifting device comprise be fixed on hull outside motor, be arranged on the straight line lifting unit of described enclosure interior by described electric machine control, described straight line lifting unit drives described filling tube to be elevated.
Wherein in an embodiment, be tightly connected between described loading hopper and housing, the two forms cavity after connecting, described cavity is in communication with the outside by described Link Port, described loading hopper is provided with charging opening, feeding cover and vacuum orifice, described travelling car is provided with the vacuum pump be connected with described vacuum orifice.
Wherein in an embodiment, described travelling car is also provided with electric control cabinet, described vacuum pump is by described electric control cabinet control work.
Wherein in an embodiment, on the wall of described housing, corresponding described Link Port is provided with viewing window and camera, and described camera is by described electric control cabinet control work.
Wherein in an embodiment, described travelling car is provided with the hopper base supporting described loading hopper, is provided with LOAD CELLS between described hopper base and loading hopper.
Wherein in an embodiment, the inwall of described loading hopper is provided with supercoat.
Accompanying drawing explanation
Fig. 1 is the structural representation under the non-reinforced state of secondary charging of polycrystalline ingot furnace device of one embodiment of the invention;
Fig. 2 is the structural representation that the secondary charging of polycrystalline ingot furnace device of one embodiment of the invention feeds in raw material under state;
Fig. 3 is the front view of filling tube lifting device;
Fig. 4 is the side-view of filling tube lifting device;
Fig. 5 is the structural representation at the top of existing ingot furnace;
Fig. 6 is the structural representation at the top of ingot furnace after transformation.
Embodiment
For enabling above-mentioned purpose of the present invention, feature and advantage become apparent more, are described in detail the specific embodiment of the present invention below in conjunction with accompanying drawing.Set forth a lot of detail in the following description so that fully understand the present invention.But the present invention can be much different from alternate manner described here to implement, those skilled in the art can when without prejudice to doing similar improvement when intension of the present invention, therefore the present invention is by the restriction of following public specific embodiment.
It should be noted that, when element is called as " being fixed on " another element, directly can there is element placed in the middle in it on another element or also.When an element is considered to " connection " another element, it can be directly connected to another element or may there is centering elements simultaneously.
Unless otherwise defined, all technology used herein and scientific terminology are identical with belonging to the implication that those skilled in the art of the present invention understand usually.The object of term used in the description of the invention herein just in order to describe specific embodiment, is not intended to be restriction the present invention.Term as used herein " and/or " comprise arbitrary and all combinations of one or more relevant Listed Items.
Below in conjunction with accompanying drawing, better embodiment of the present invention is described.
With reference to figure 1 and Fig. 2, the invention provides a kind of transportable secondary charging of polycrystalline ingot furnace device, can
In ingot casting process, give secondary charging of polycrystalline ingot furnace, and can multiple stage ingot furnace equipment use be supplied.
Ginseng Fig. 1, secondary charging of polycrystalline ingot furnace device comprises travelling car 110, hopper base 120, loading hopper 130, LOAD CELLS 140, feeding device 150 and lifting device 160.
Travelling car 110 can transferring position as required, enables secondary charging of polycrystalline ingot furnace device to different ingot furnace equipment secondary chargings.Travelling car 110 is provided with electric control cabinet 112, vacuum pump 114.Wherein, electric control cabinet 112 comprises PLC and upper computer, in order to control the electrical work in feeding device.
Hopper base 120 is fixed on travelling car 110, is used for supporting loading hopper 130.LOAD CELLS 140 is also provided with between hopper base 120 and loading hopper 130.Such as, three place's fulcrums can be adopted to support loading hopper 130, and everywhere fulcrum all arranges LOAD CELLS 140.When silicon material is housed in loading hopper 130, what utilize LOAD CELLS 140 to claim is the gross weight of loading hopper 130 together with silicon material.Because the weight of loading hopper 130 is fixed, therefore utilize PLC directly can calculate the weight of the silicon material added in loading hopper 130.
The inwall of loading hopper 130 is provided with supercoat, to avoid polluting silicon material.The top of loading hopper 130 offers charging opening 132, be used for the feeding cover 133 of closed charging opening 132, vacuum orifice 134.The bottom of loading hopper 130 is provided with bleeder valve 135, is used for controlling the work output of silicon material from loading hopper 130.Vacuum pump 114 on travelling car 110 is connected with vacuum orifice 134.Vacuum pump 114 controls work by electric control cabinet 112.
Feeding device 150 comprises the housing 152 be connected with bleeder valve 135.Housing 152 inside is provided with for receiving and transporting the drawing-in device 153 of silicon material, the liftable filling tube 154 being used for receiving the silicon material that drawing-in device 153 sends.Housing 152 is provided with the Link Port 1522 that can stretch out for filling tube 154.Housing 152 is by being tightly connected between bleeder valve 135 and loading hopper 130, and the two forms cavity after connecting.This cavity is in communication with the outside by means of only Link Port 1522.
In the present invention, drawing-in device 153 is oscillating feeder.Filling tube 154 is vertically arranged.Horizontally disposed transfer lime 155 is also provided with in housing 152.Transfer lime 155 is between oscillating feeder and filling tube 154.Ginseng Fig. 2, to in polycrystalline ingot furnace 200 during secondary charging, filling tube 154 is under the control of lifting device 160, the position of its open top lower than the mouth of pipe of transfer lime 155 can be dropped to, enable the silicon material in transfer lime 155 enter filling tube 154, and then enter under gravity in polycrystalline ingot furnace 200.Filling tube 154 and transfer lime 155 are silica tube, can not pollute silicon material, and high temperature resistant.
Ginseng Fig. 3 and Fig. 4, lifting device 160 is in order to control the lifting of filling tube 154.Lifting device 160 comprise be fixed on housing 152 outside motor 162, be arranged on the straight line lifting unit 164 that housing 152 inside controls by motor 162.Filling tube 154 is driven to realize lifting when straight line lifting unit 164 is elevated.Magnetic fluid 166 is utilized to seal between motor 162 and housing 152.
The component of straight line lifting unit 164 can be the convert rotational motion that motor 162 can be exported of any appropriate be straight line up-and-down movement.Such as, straight line lifting unit 164 can be Timing Belt system.Timing Belt coordinates with the motor shaft of motor 162, and filling tube 154 is then fixed on Timing Belt.When motor shaft rotates, Timing Belt can drive filling tube 154 to rise or decline.
Ginseng Fig. 2, on the wall of housing 152, corresponding Link Port 1522 is also provided with viewing window 156 and camera 157.Camera 157 controls work by electric control cabinet 112.Utilize camera 157 to coordinate the image analysis software of special exploitation to control feeding quantity and speed, prevent filling tube 154 from gathering materials, realize semi-automatic reinforced.
Below in conjunction with Fig. 1 and Fig. 2, the concise and to the point working process describing secondary charging of polycrystalline ingot furnace device of the present invention.
Normally feed at polycrystalline ingot furnace 200 and enter into fusing later stage, the bulk silicon material be namely contained in advance in quartz crucible melts complete substantially, can carry out secondary charging after certain stocking space is arranged at crucible top.
The polycrystalline silicon raw material being crushed to certain particle diameter is installed in loading hopper 130.Utilize travelling car 110 that whole feeding device is moved to the filler interface place 210 of polycrystalline ingot furnace 200, the Link Port 1522 of feeding device is connected with filler interface place 210.Open vacuum pump 114 and be evacuated to vacuum pump highest attainable vacuum from the vacuum interface 134 of loading hopper 130, and carry out argon replaces gas to reduce the oxygen equal size in feeding device, adjustment argon gas input makes the pressure equilibrium in the vacuum pressure of feeding device and polycrystalline ingot furnace 200.
Open the valve at the filler interface place 210 of polycrystalline ingot furnace 200, filling tube 154 is dropped to ingot furnace inside.The image analysis software of camera 157 and special exploitation starts observe and detect current melted state, at the end of the silicon material fusing of prepackage is basic, system sends acousto-optic hint operator and can start to feed in raw material, after operator confirm safety, open the bleeder valve 135 bottom loading hopper 130, regulate feed rate that broken silicon material is added in ingot furnace uniformly slowly, camera 157 is constantly detecting reinforced state simultaneously, image analysis software constantly detects reinforced situation, feed in raw material as silicon material has packing phenomenon to suspend, melt until silicon material or start after removing to feed in raw material.The detection of camera 157 works and realizes semi-automatic reinforced according to the feed parameters of the sequence of control write in advance and setting together with LOAD CELLS 140, after reaching the feeding quantity of processing requirement, rise filling tube 154, close the valve at the filler interface place 210 of ingot casting furnace body, after feeding device is inflated to normal atmosphere, the Link Port 1522 of feeding device is thrown off with filler interface place 210, complete secondary charging work, thus realize polycrystalline silicon ingot or purifying furnace secondary charging, improve crucible utilization ratio, improve ingot furnace output.Then this device can move to next needs reinforced ingot furnace equipment place to feed in raw material.
In addition, secondary charging of polycrystalline ingot furnace device of the present invention, goes for current domestic most ingot furnace equipment, as: the equipment of GT, smart merit, Jing Yuntongdeng company is little to ingot furnace transformation.Particularly, ginseng Fig. 5, be the top structure schematic diagram of existing ingot furnace 300, its top is provided with viewing window 310.When using secondary charging of polycrystalline ingot furnace device of the present invention, without the need to transforming ingot casting body of heater, only needing viewing window parts to be carried out little transformation and applicable feeding device, a large amount of improvement expenses can be reduced.Ginseng Fig. 6, namely only needs to set up segregaion valve 220 at original viewing window place, is transformed into the interface that can be connected with Link Port 1522.
Each technical characteristic of the above embodiment can combine arbitrarily, for making description succinct, the all possible combination of each technical characteristic in above-described embodiment is not all described, but, as long as the combination of these technical characteristics does not exist contradiction, be all considered to be the scope that this specification sheets is recorded.
The above embodiment only have expressed several embodiment of the present invention, and it describes comparatively concrete and detailed, but can not therefore be construed as limiting the scope of the patent.It should be pointed out that for the person of ordinary skill of the art, without departing from the inventive concept of the premise, can also make some distortion and improvement, these all belong to protection scope of the present invention.Therefore, the protection domain of patent of the present invention should be as the criterion with claims.

Claims (10)

CN201510420959.5A2015-07-162015-07-16Mobile secondary feeding device for polycrystalline ingot furnacePendingCN104947186A (en)

Priority Applications (1)

Application NumberPriority DateFiling DateTitle
CN201510420959.5ACN104947186A (en)2015-07-162015-07-16Mobile secondary feeding device for polycrystalline ingot furnace

Applications Claiming Priority (1)

Application NumberPriority DateFiling DateTitle
CN201510420959.5ACN104947186A (en)2015-07-162015-07-16Mobile secondary feeding device for polycrystalline ingot furnace

Publications (1)

Publication NumberPublication Date
CN104947186Atrue CN104947186A (en)2015-09-30

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Cited By (8)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
CN105951180A (en)*2016-06-012016-09-21江苏协鑫硅材料科技发展有限公司Secondary feeding device for polysilicon ingot furnace and polycrystalline ingot casting system
CN106567124A (en)*2015-10-122017-04-19环球晶圆股份有限公司Dopant, crystal growth furnace and method using crystal growth furnace
WO2017147363A1 (en)*2016-02-252017-08-31Sunedison, Inc.Feed system for crystal pulling systems
TWI618823B (en)*2016-11-032018-03-21上海新昇半導體科技有限公司Automatic feed system and method thereof
CN108103568A (en)*2017-12-202018-06-01江苏拜尔特光电设备有限公司The automatic feeding device and its operating method of single crystal growing furnace
CN114438584A (en)*2022-01-172022-05-06徐州晶睿半导体装备科技有限公司Multi-time charging system and charging method for single crystal furnace
CN114777477A (en)*2022-05-242022-07-22合肥科晶材料技术有限公司 A chamber furnace that can feed halfway and see material changes
CN115341280A (en)*2022-08-102022-11-15天津旭日东升精密机械有限公司Secondary feeding device of ingot furnace

Citations (4)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
US3628676A (en)*1970-05-061971-12-21Koppers Co IncCoal feeding system for mechanical feed-type larry car
JPS59115736A (en)*1982-12-231984-07-04Toshiba Corp Silicon granule feeding device
CN103026160A (en)*2011-03-092013-04-03昕芙旎雅有限公司Device for introducing object to be processed, pipe unit for device for introducing object to be processed, and pipe used in this pipe unit
CN103451722A (en)*2013-08-062013-12-18浙江晶盛机电股份有限公司External continuous feeder capable of being shared by multiple coil bases

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
US3628676A (en)*1970-05-061971-12-21Koppers Co IncCoal feeding system for mechanical feed-type larry car
JPS59115736A (en)*1982-12-231984-07-04Toshiba Corp Silicon granule feeding device
CN103026160A (en)*2011-03-092013-04-03昕芙旎雅有限公司Device for introducing object to be processed, pipe unit for device for introducing object to be processed, and pipe used in this pipe unit
CN103451722A (en)*2013-08-062013-12-18浙江晶盛机电股份有限公司External continuous feeder capable of being shared by multiple coil bases

Cited By (12)

* Cited by examiner, † Cited by third party
Publication numberPriority datePublication dateAssigneeTitle
CN106567124A (en)*2015-10-122017-04-19环球晶圆股份有限公司Dopant, crystal growth furnace and method using crystal growth furnace
CN106567124B (en)*2015-10-122019-06-14环球晶圆股份有限公司Dopant, crystal growth furnace and method using crystal growth furnace
WO2017147363A1 (en)*2016-02-252017-08-31Sunedison, Inc.Feed system for crystal pulling systems
CN108884588A (en)*2016-02-252018-11-23各星有限公司 Feed system for crystal pulling system
US10968533B2 (en)2016-02-252021-04-06Corner Star LimitedFeed system for crystal pulling systems
CN105951180A (en)*2016-06-012016-09-21江苏协鑫硅材料科技发展有限公司Secondary feeding device for polysilicon ingot furnace and polycrystalline ingot casting system
CN105951180B (en)*2016-06-012019-03-15江苏协鑫硅材料科技发展有限公司 Polycrystalline silicon ingot furnace secondary feeding device and polycrystalline ingot system
TWI618823B (en)*2016-11-032018-03-21上海新昇半導體科技有限公司Automatic feed system and method thereof
CN108103568A (en)*2017-12-202018-06-01江苏拜尔特光电设备有限公司The automatic feeding device and its operating method of single crystal growing furnace
CN114438584A (en)*2022-01-172022-05-06徐州晶睿半导体装备科技有限公司Multi-time charging system and charging method for single crystal furnace
CN114777477A (en)*2022-05-242022-07-22合肥科晶材料技术有限公司 A chamber furnace that can feed halfway and see material changes
CN115341280A (en)*2022-08-102022-11-15天津旭日东升精密机械有限公司Secondary feeding device of ingot furnace

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Application publication date:20150930


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