技术领域technical field
本发明涉及一种放大装置，尤其是一种对称式差动杠杆微位移放大装置。The invention relates to an amplifying device, in particular to a micro-displacement amplifying device of a symmetrical differential lever.
背景技术Background technique
近年来，随着微电子技术的发展，压电陶瓷以其优越的精密驱动和定位性能而被广泛的应用于微位移驱动和精密定位领域，但是由于其微米级的位移输出往往不能满足实际应用的需求，一般需要设计位移放大装置对其进行位移放大。现有的位移放大装置或者精度较高，或者行程较大，高精度与大行程往往很难兼得。In recent years, with the development of microelectronics technology, piezoelectric ceramics have been widely used in the field of micro-displacement drive and precision positioning due to their superior precision drive and positioning performance, but their micron-level displacement output often cannot meet the practical application Generally, it is necessary to design a displacement amplification device for displacement amplification. Existing displacement amplifying devices either have high precision or relatively large strokes, and it is often difficult to achieve both high precision and large strokes.
中国发明专利申请ZL03132498.3公开了一种微位移放大机构，由机构本体、压电陶瓷和预紧垫片组成，压电陶瓷和预紧垫片均设置在机构本体内，压电陶瓷和预紧垫片的内端面相互之间紧密接触，压电陶瓷和预紧垫片的外端面分别与机构本体的左、右侧壁的内表面紧密接触，机构本体的上、下部分别有斜向设置的左、右支承板，上、下方的左、右支承板之间分别设有上、下微移动体，左、右的支承板的两端分别与左、右侧壁和上、下微移动体连成一体结构。该放大机构行程相对较小，同时在载荷重心偏心的情况下，容易对压电杆造成剪切破坏。Chinese invention patent application ZL03132498.3 discloses a micro-displacement amplification mechanism, which consists of a mechanism body, piezoelectric ceramics and pre-tightening gaskets. The inner end surfaces of the tightening gaskets are in close contact with each other, the outer end surfaces of the piezoelectric ceramics and the pre-tightening gaskets are respectively in close contact with the inner surfaces of the left and right side walls of the mechanism body, and the upper and lower parts of the mechanism body are respectively arranged obliquely. The left and right supporting plates of the upper and lower left and right supporting plates are respectively provided with upper and lower micro-moving bodies, and the two ends of the left and right supporting plates are respectively connected with the left and right side walls and the upper and lower micro-moving bodies. body into one structure. The stroke of the amplifying mechanism is relatively small, and at the same time, it is easy to cause shear damage to the piezoelectric rod when the center of gravity of the load is eccentric.
有鉴于此，本发明人对微位移放大装置进行了深入的研究，遂有本案产生。In view of this, the inventor has carried out in-depth research on the micro-displacement amplifying device, and then this case arises.
发明内容Contents of the invention
本发明的目的在于提供一种行程较大且精度较高的对称式差动杠杆微位移放大装置。The purpose of the present invention is to provide a symmetrical differential lever micro-displacement amplifying device with large stroke and high precision.
为了实现上述目的，本发明采用如下技术方案：In order to achieve the above object, the present invention adopts the following technical solutions:
一种对称式差动杠杆微位移放大装置，包括底座、固定在所述底座上的基板和与所述基板位于同一平面上的压电块，所述压电块具有一个顶压部和两个分别位于所述顶压部两端且以所述顶压部的中垂线为中心对称放置的传动部，两个所述传动部分别连接有一组与所述基板位于同一平面上的杠杆组件，且两组所述杠杆组件以所述顶压部的中垂线为中心对称放置，两所述传动部之间放置有抵顶在所述顶压部上的压电陶瓷驱动器；A symmetrical differential lever micro-displacement amplifying device, comprising a base, a base plate fixed on the base, and a piezoelectric block on the same plane as the base plate, the piezoelectric block has a pressing portion and two transmission parts respectively located at both ends of the pressing part and placed symmetrically around the vertical line of the pressing part, the two transmission parts are respectively connected with a set of lever assemblies located on the same plane as the base plate, And the two groups of lever assemblies are placed symmetrically around the center of the vertical line of the pressing part, and a piezoelectric ceramic driver is placed between the two transmission parts to butt against the pressing part;
各所述传动部分别具有一端与所述顶压部连接的拉杆以及一端与所述拉杆固定连接且分别与所述顶压部平行的第一推杆和第二推杆，所述第一推杆与所述顶压部之间的距离小于所述第二推杆与所述顶压部之间的距离；Each of the transmission parts has a pull rod connected to the pressing part at one end and a first push rod and a second push rod with one end fixedly connected to the pull rod and respectively parallel to the pressing part. The distance between the rod and the pressing portion is smaller than the distance between the second push rod and the pressing portion;
各所述杠杆组件分别包括第一连杆、分别与所述顶压部相垂直且一端分别与所述第一连杆柔性铰接的第一支杆和第二支杆、一端与所述第一支杆的另一端柔性铰接的第二连杆、一端与所述第二支杆的另一端柔性铰接的第三连杆以及与所述第二连杆的另一端柔性铰接且固定在所述底座上的固定块，所述第一连杆的一端柔性铰接有输出杆，且所述第一连杆和所述输出杆之间的柔性铰接位置与所述第一支杆之间的距离小于与所述第二支杆之间的距离，所述第二连杆的杆身与所述第一推杆远离所述拉杆的一端柔性铰接，所述第三连杆的另一端与所述第二推杆远离所述拉杆的一端柔性铰接，且所述第三连杆的杆身与所述基板柔性铰接。Each of the lever assemblies includes a first connecting rod, a first strut and a second strut that are respectively perpendicular to the pressing portion and one end is flexibly hinged to the first connecting rod, and one end is connected to the first connecting rod. A second connecting rod flexibly hinged at the other end of the rod, a third connecting rod flexibly hinged at one end to the other end of the second rod, and flexibly hinged to the other end of the second connecting rod and fixed on the base One end of the first connecting rod is flexibly hinged to the output rod, and the distance between the flexible hinge position between the first connecting rod and the output rod and the first support rod is less than and The distance between the second rods, the shaft of the second connecting rod is flexibly hinged with the end of the first push rod away from the pull rod, the other end of the third connecting rod is connected with the second One end of the push rod away from the pull rod is flexibly hinged, and the shaft of the third connecting rod is flexibly hinged to the base plate.
作为本发明的一种改进，两组所述杠杆组件的所述第一连杆与同一所述输出杆柔性铰接。As an improvement of the present invention, the first connecting rods of the two sets of lever assemblies are flexibly hinged to the same output rod.
作为本发明的一种改进，上述各柔性铰接都是通过柔性铰链进行铰接。As an improvement of the present invention, each of the above-mentioned flexible hinges is hinged by a flexible hinge.
作为本发明的一种改进，所述基板上设置有用于将所述压电陶瓷驱动器预紧在所述顶压部上的调节螺钉。As an improvement of the present invention, adjustment screws for pre-tightening the piezoelectric ceramic driver on the pressing part are arranged on the base plate.
作为本发明的一种改进，还包括面板，所述面板与所述输出杆固定连接。As an improvement of the present invention, a panel is further included, and the panel is fixedly connected with the output rod.
采用上述技术方案，本发明具有以下有益效果：By adopting the above technical scheme, the present invention has the following beneficial effects:
1、通过设置杠杆组件，利用差动杠杆放大的原理，实现较大的位移放大倍数，具有较大的行程，同时由于采用了柔性铰接的方式进行连接，各杆件之间的间隙和摩擦力较小，能降低误差，精度较高。1. By setting up the lever assembly and using the principle of differential lever amplification, a large displacement magnification is realized, and a large stroke is achieved. At the same time, due to the use of flexible hinges for connection, the gap and friction between the rods Smaller, can reduce the error, higher precision.
2、由于采用了对称式结构，从原理上消除了横向附加位移，避免产生剪切力，有效提高了位移精度。2. Due to the symmetrical structure, the additional lateral displacement is eliminated in principle, the shear force is avoided, and the displacement accuracy is effectively improved.
3、通过将压电陶瓷驱动器布置在两个传动部之间，结构紧凑且使得整个装置的体积相对较小。3. By arranging the piezoelectric ceramic driver between the two transmission parts, the structure is compact and the volume of the whole device is relatively small.
附图说明Description of drawings
图1为本发明对称式差动杠杆微位移放大装置的结构示意图，图中省略部分零件；Fig. 1 is a structural schematic diagram of a symmetrical differential lever micro-displacement amplifying device of the present invention, and some parts are omitted in the figure;
图2为本发明对称式差动杠杆微位移放大装置的分解示意图。Fig. 2 is an exploded schematic view of the symmetrical differential lever micro-displacement amplifying device of the present invention.
图中标示对应如下：The markings in the figure correspond to the following:
10-底座； 20-基板；10-base; 20-substrate;
21-调节螺钉； 30-压电块；21-adjusting screw; 30-piezoelectric block;
31-顶压部； 32-传动部；31-top pressing part; 32-transmission part;
32a-拉杆； 32b-第一推杆；32a-pull rod; 32b-first push rod;
32c-第二推杆； 40-杠杆组件；32c-second push rod; 40-lever assembly;
41-第一连杆； 42-第一支杆；41-the first connecting rod; 42-the first support rod;
43-第二支杆； 44-第二连杆；43-the second strut; 44-the second connecting rod;
45-第三连杆； 46-固定块；45-the third connecting rod; 46-fixed block;
47-输出杆； 50-面板。47-output rod; 50-panel.
具体实施方式Detailed ways
下面结合附图和具体实施例对本发明做进一步的说明。The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.
如图1和图2所示，本实施例提供的对称式差动杠杆微位移放大装置，包括底座10、固定在底座10上的基板20和与基板20位于同一平面上的压电块30，基板20与压电块30所在的平面与底座10平行，基板20与底座10的固定方式可以是常规的方式，如采用螺钉紧固的方式，此处不再详述。As shown in Figures 1 and 2, the symmetrical differential lever micro-displacement amplifying device provided in this embodiment includes a base 10, a substrate 20 fixed on the base 10, and a piezoelectric block 30 located on the same plane as the substrate 20, The plane where the substrate 20 and the piezoelectric block 30 are located is parallel to the base 10 , and the fixing method of the substrate 20 and the base 10 can be a conventional method, such as screw fastening, which will not be described in detail here.
压电块30具有一个顶压部31和两个分别位于顶压部31两端且以顶压部31的中垂线为中心对称放置的传动部32。顶压部31的具体形状可以根据实际需要确定，在本实施例中，顶压部31呈直杆状。压电块30最好为一体成型的零件。The piezoelectric block 30 has a pressing portion 31 and two transmission portions 32 respectively located at two ends of the pressing portion 31 and placed symmetrically around the center of the vertical line of the pressing portion 31 . The specific shape of the pressing portion 31 can be determined according to actual needs. In this embodiment, the pressing portion 31 is in the shape of a straight rod. The piezoelectric block 30 is preferably an integrally formed part.
两个传动部32分别连接有一组与基板20和压电块30位于同一平面上的杠杆组件40，且两组杠杆组件40也以顶压部31的中垂线为中心对称放置。这样可从原理上消除了横向附加位移，避免工作时产生剪切力，有效提高了位移精度。The two transmission parts 32 are respectively connected with a group of lever assemblies 40 located on the same plane as the substrate 20 and the piezoelectric block 30 , and the two groups of lever assemblies 40 are also placed symmetrically around the center of the vertical line of the pressing part 31 . In this way, the lateral additional displacement can be eliminated in principle, the shear force can be avoided during operation, and the displacement precision can be effectively improved.
两传动部32之间放置有抵顶在顶压部31上的压电陶瓷驱动器(图中未视出)，压电陶瓷驱动器为常规的零部件，其可向顶压部31提供垂直于顶压部31的位移输入。A piezoelectric ceramic driver (not shown in the figure) is placed between the two transmission parts 32 against the top pressure part 31. The piezoelectric ceramic driver is a conventional part, which can provide the top pressure part 31 with Displacement input of the pressing part 31.
各传动部32分别具有一端与顶压部31连接的拉杆32a以及一端与拉杆32a固定连接且分别与顶压部31平行的第一推杆32b和第二推杆32c，第一推杆32b与顶压部31之间的距离小于第二推杆32b与顶压部31之间的距离，具体的距离可以根据装置所需要放大位移的倍数进行确定。在本实施例中，第一推杆32b、第二推杆32c与拉杆32a之间呈“F”型布置。Each transmission part 32 has a pull rod 32a connected to the pressing part 31 at one end and a first push rod 32b and a second push rod 32c with one end fixedly connected to the pull rod 32a and parallel to the pressing part 31 respectively. The distance between the pressing parts 31 is smaller than the distance between the second push rod 32b and the pressing part 31, and the specific distance can be determined according to the multiple of the required displacement of the device. In this embodiment, the first push rod 32b, the second push rod 32c and the pull rod 32a are arranged in an "F" shape.
各杠杆组件40分别包括第一连杆41、分别与顶压部31相垂直且一端分别与第一连杆41柔性铰接的第一支杆42和第二支杆43、一端与第一支杆42的另一端柔性铰接的第二连杆44、一端与第二支杆43的另一端柔性铰接的第三连杆45以及与第二连杆44的另一端柔性铰接且固定在底座10上的固定块46。第一连杆41的一端柔性铰接有输出杆47，且第一连杆41和输出杆47之间的柔性铰接位置与第一支杆42之间的距离小于其与第二支杆43之间的距离。第二连杆44的杆身与第一推杆32b远离拉杆32a的一端柔性铰接，第三连杆45的另一端与第二推杆32c远离拉杆32a的一端柔性铰接，且第三连杆45的杆身与基板20柔性铰接。Each lever assembly 40 comprises a first connecting rod 41, a first strut 42 and a second strut 43 which are respectively perpendicular to the pressing portion 31 and one end is flexibly hinged to the first connecting rod 41, and one end is connected to the first strut. The other end of 42 is a second link 44 that is flexibly hinged, one end is flexibly hinged with the other end of the second pole 43, and the other end of the second link 44 is flexibly hinged and fixed on the base 10. Fixed block 46. One end of the first connecting rod 41 is flexibly hinged with an output rod 47 , and the distance between the flexible hinge position between the first connecting rod 41 and the output rod 47 and the first strut 42 is smaller than that between it and the second strut 43 the distance. The shaft of the second connecting rod 44 is flexibly hinged to the end of the first push rod 32b away from the pull rod 32a, the other end of the third connecting rod 45 is flexibly hinged to the end of the second push rod 32c away from the pull rod 32a, and the third connecting rod 45 The shaft and the base plate 20 are flexibly hinged.
需要说明的是，上述说明中所指的各杆件的一端或另一端是对相对位置的一种概括描述，并不仅仅指杆件的端部位置，还包括相应杆件上靠近该端部位置的杆身部分。It should be noted that the one end or the other end of each rod referred to in the above description is a general description of the relative position, and not only refers to the position of the end of the rod, but also includes the position on the corresponding rod near the end. position of the shaft.
此外，上述各柔性铰接都最好通过柔性铰链进行铰接。In addition, each of the above-mentioned flexible hinges is preferably hinged by a flexible hinge.
优选的，在本实施例中，两组杠杆组件40的第一连杆41与同一输出杆47柔性铰接，避免产生剪切力影响放大装置的精度。Preferably, in this embodiment, the first connecting rods 41 of the two groups of lever assemblies 40 are flexibly hinged to the same output rod 47, so as to avoid the generation of shearing force that affects the accuracy of the amplifying device.
优选的，在本实施例中，基板20上设置有用于将压电陶瓷驱动器预紧在顶压部31上的调节螺钉21。这样便于调整压电陶瓷驱动器的位置和预紧力。Preferably, in this embodiment, the base plate 20 is provided with an adjusting screw 21 for pre-tightening the piezoelectric ceramic driver on the pressing portion 31 . This makes it easy to adjust the position and preload of the piezo actuator.
优选的，在本实施例中，还包括面板50，面板50与输出杆47固定连接，可实现位移放大的输出多样性。Preferably, in this embodiment, a panel 50 is further included, and the panel 50 is fixedly connected with the output rod 47, so as to realize output diversity of displacement amplification.
优选的，在本实施例中，基板20、压电块30、杠杆组件40和输出杆47为一体式加工获得的零部件，这样加工后的基板20、压电块30、杠杆组件40和输出杆47不需要进行装配，减少装配误差，提高放大精度。Preferably, in this embodiment, the substrate 20, the piezoelectric block 30, the lever assembly 40 and the output rod 47 are integrally processed parts, so that the processed substrate 20, the piezoelectric block 30, the lever assembly 40 and the output The rod 47 does not need to be assembled, which reduces assembly errors and improves magnification accuracy.
使用时，压电陶瓷驱动器输入位移，将压电块30的顶压部31往远离压电陶瓷驱动器的方向推动，顶压部31带动传动部32一起运动，接着分别通过柔性铰接在传动部32的第一推杆32b和第二推杆32c上的第二连杆44和第三连杆45产生杠杆作用，使得第一支杆42产生与顶压部31运动方向相同的运动，第二支杆42产生与顶压部31运动方向相反的运动，放大位移，最后通过第一连杆41的杠杆作用，再一次放大位移，并将通过输出杆47将位移输出到面板50上。When in use, the piezoceramic driver inputs the displacement, and pushes the pressing part 31 of the piezoelectric block 30 away from the piezoceramic driver, and the pressing part 31 drives the transmission part 32 to move together, and then they are respectively connected to the transmission part 32 through flexible hinges. The second link 44 and the third link 45 on the first push rod 32b and the second push rod 32c produce leverage, so that the first support rod 42 produces the same movement as the pressing part 31, and the second support The rod 42 moves in the opposite direction to the pressing part 31 to amplify the displacement. Finally, the leverage of the first connecting rod 41 amplifies the displacement again and outputs the displacement to the panel 50 through the output rod 47 .
上面结合附图对本发明做了详细的说明，但是本发明的实施方式并不仅限于上述实施方式，本领域技术人员根据现有技术可以对本发明做出各种变形，如将上述实施例中的输出杆47和面板50设置成一体式的零部件等，这些都属于本发明的保护范围。The present invention has been described in detail above in conjunction with the accompanying drawings, but the embodiments of the present invention are not limited to the above-mentioned embodiments. Those skilled in the art can make various modifications to the present invention according to the prior art, such as the output of the above-mentioned embodiments The rod 47 and the panel 50 are arranged as integral parts, etc., and these all belong to the protection scope of the present invention.
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510311979.9ACN104900573B (en) | 2015-06-09 | 2015-06-09 | A kind of differential lever micro-displacement amplifying device of symmetrical expression |
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510311979.9ACN104900573B (en) | 2015-06-09 | 2015-06-09 | A kind of differential lever micro-displacement amplifying device of symmetrical expression |
| Publication Number | Publication Date |
|---|---|
| CN104900573A CN104900573A (en) | 2015-09-09 |
| CN104900573Btrue CN104900573B (en) | 2018-05-22 |
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510311979.9AActiveCN104900573B (en) | 2015-06-09 | 2015-06-09 | A kind of differential lever micro-displacement amplifying device of symmetrical expression |
| Country | Link |
|---|---|
| CN (1) | CN104900573B (en) |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106782674B (en)* | 2017-02-07 | 2022-10-25 | 广东工业大学 | A micro-displacement amplifier and nano-positioning device |
| CN106975961A (en)* | 2017-05-19 | 2017-07-25 | 广东工业大学 | A kind of long stroke fast tool servo |
| CN107414477B (en)* | 2017-08-18 | 2019-03-15 | 天津大学 | A kind of driving type piezoelectric actuator Two-degree-of-freedohigh-precision high-precision microoperation clamper |
| CN108406738B (en)* | 2018-02-27 | 2020-11-20 | 天津大学 | A two-degree-of-freedom micro-gripper |
| CN110739256B (en)* | 2019-10-28 | 2024-06-18 | 华侨大学 | Micro-displacement amplifying device |
| CN113941899B (en)* | 2021-05-18 | 2022-12-16 | 齐鲁工业大学 | Fast cutter servo device and application thereof in high-speed high-precision curved surface machining |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1570567A (en)* | 2003-07-11 | 2005-01-26 | 哈尔滨工业大学博实精密测控有限责任公司 | Micro displacement amplifying mechanism |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3817120B2 (en)* | 2000-07-07 | 2006-08-30 | 住友重機械工業株式会社 | Displacement control method for moving table, member processing method, XY stage device, and method for manufacturing the XY stage device |
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1570567A (en)* | 2003-07-11 | 2005-01-26 | 哈尔滨工业大学博实精密测控有限责任公司 | Micro displacement amplifying mechanism |
| Title |
|---|
| 基于GMM和柔性铰链的大位移微致动器设计与研究;江晓阳;《中国优秀硕士学位论文全文数据库·工程科技Ⅱ辑》;20110930(第9期);第C030-1页* |
| 柔性微位移放大机构的设计与动力性能仿真分析;于月民等;《机械设计与研究》;20110630;第27卷(第3期);第48-55页* |
| Publication number | Publication date |
|---|---|
| CN104900573A (en) | 2015-09-09 |
| Publication | Publication Date | Title |
|---|---|---|
| CN104900573B (en) | A kind of differential lever micro-displacement amplifying device of symmetrical expression | |
| CN201168876Y (en) | Three degrees of freedom precision positioning table | |
| CN107464586B (en) | A three-degree-of-freedom large-stroke micro-positioning platform with decoupling of driving force | |
| CN103331748B (en) | Miniaturized flexible microgripper driven by piezoelectric ceramics | |
| CN104467525B (en) | Preload adjustable formula inertia stick-slip drives across yardstick precisely locating platform | |
| CN203799672U (en) | Precision positioning platform | |
| CN201153129Y (en) | Micro-displacement amplifying device | |
| CN106113022A (en) | A kind of single-freedom and flexible mini positioning platform | |
| CN109176420B (en) | A central movable joint type flexible decoupling precision positioning structure | |
| CN103030103B (en) | 3-PRR micro-motion platform based on symmetrical variable cross-section compliant mechanism | |
| CN109104118B (en) | Structural integration in situ driving full displacement composite amplified piezoelectric linear stage | |
| CN205376486U (en) | Realize high accuracy rotary motion's microbit and move amplification device | |
| CN105406755B (en) | A kind of integral type micro-nano double fastener holder | |
| CN206442316U (en) | A kind of dual drive bar amplifying type linear actuator based on stacked piezoelectric ceramics | |
| CN205051600U (en) | Symmetry formula biped driven off -resonance piezoelectricity linear electric motor | |
| CN107394401A (en) | Large deflection angle piezoelectricity two-dimensional pointing mechanism and start method with decoupling function | |
| CN204741009U (en) | A Symmetrical Differential Lever Micro-displacement Amplifying Device | |
| CN105174210B (en) | Three degrees of freedom micro-positioning platform based on symmetrical double compliant hinges | |
| CN102446562A (en) | Micro-displacement amplifying mechanism based on compliant mechanism | |
| CN104037319B (en) | Piezoelectric displacement amplification mechanism of half diamond structure | |
| CN210692509U (en) | Micro-displacement amplifying device | |
| CN102664554B (en) | Passive clamping type piezoelectric actuator | |
| CN106057250B (en) | A kind of two degrees of freedom mini positioning platform | |
| CN114107023B (en) | A piezoelectric driven cell microinjection device and its adaptive compliance control method | |
| CN106229012A (en) | A kind of big displacement high frequency sound Three Degree Of Freedom Piezoelectric Driving precisely locating platform |
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB03 | Change of inventor or designer information | Inventor after:Fan Wei Inventor after:Zhan Wei Inventor after:Li Zhongshen Inventor after:Yang Jianhong Inventor after:Chen Mei Inventor after:Jiang Fangbin Inventor before:Fan Wei Inventor before:Jiang Fangbin Inventor before:Li Zhongshen | |
| CB03 | Change of inventor or designer information | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |