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CN104767009A - A waveguide integrated artificial surface plasmon device and a filter integrated waveguide substrate - Google Patents

A waveguide integrated artificial surface plasmon device and a filter integrated waveguide substrate
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CN104767009A
CN104767009ACN201510084784.5ACN201510084784ACN104767009ACN 104767009 ACN104767009 ACN 104767009ACN 201510084784 ACN201510084784 ACN 201510084784ACN 104767009 ACN104767009 ACN 104767009A
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artificial surface
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surface plasmon
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崔铁军
张茜
张浩驰
范逸风
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Southeast University
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Abstract

The invention discloses a filter synthesizing an artificial surface plasmon device waveguide and a substrate integrated waveguide. The filter comprises the artificial surface plasmon waveguide and the substrate integrated waveguide. The substrate integrated waveguide comprises a first dielectric substrate and first metallization layers, and two rows of metallization through holes are formed in the first dielectric substrate. The artificial surface plasmon waveguide comprises a second dielectric substrate and second metallization layers, one or more metal grooves are formed in each second metallization layer, the depths of the metal grooves are sequentially increased from the two sides to the middle, the depths of the metal grooves are gradually increased till the depths are the same as the thicknesses of the corresponding second metallization layers, and the opening directions of the metal grooves in the second metallization layers on the upper surface and the lower surface are opposite. The filter has the advantages of being easy to machine, low in cost, small in thickness, low in weight and the like, a common circuit is conveniently manufactured, and high practical value is achieved; meanwhile an ultra-wideband filter and a narrowband filter are provided, and good filtering performance is achieved.

Description

Translated fromChinese
一种综合人工表面等离激元器件的波导和基片集成波导的滤波器A waveguide integrated artificial surface plasmon device and a filter integrated waveguide substrate

技术领域technical field

本发明涉及一种结合了人工表面等离激元器件的波导和基片集成波导的滤波器,属于新型人工电磁材料领域。The invention relates to a filter combined with a waveguide of an artificial surface plasmon device and a waveguide integrated on a substrate, and belongs to the field of new artificial electromagnetic materials.

背景技术Background technique

新型人工电磁材料(Metamaterials)是指电磁波在其中传播时具有特殊传导或者辐射特性的人工复合材料,也可以说是一种可以人工设计、满足特定等效介电常数和磁导率要求的电磁材料。新型人工电磁材料是基于等效媒质理论,即可以通过改变新型人工电磁材料单元结构的尺寸来改变等效介电常数和磁导率。经过十多年的发展,新型人工电磁材料得到了长足的发展,在隐身、天线工程等方面都有广泛的应用。New artificial electromagnetic materials (Metamaterials) refer to artificial composite materials with special conduction or radiation characteristics when electromagnetic waves propagate in them. It can also be said to be an electromagnetic material that can be artificially designed to meet specific equivalent permittivity and permeability requirements. . The new artificial electromagnetic material is based on the equivalent medium theory, that is, the equivalent permittivity and permeability can be changed by changing the size of the unit structure of the new artificial electromagnetic material. After more than ten years of development, new artificial electromagnetic materials have been greatly developed, and they are widely used in stealth and antenna engineering.

由于表面等离激元结构具有独特的性质,在数据储存、超分辨成像和负折射材料等方面有着重要的应用前景,使其成为当前广受国内外学者重视的热点研究领域之一。但是由于金属在较低的频段无法表现出其介电常数为负值的特性,使得这种结构的优异特性无法在较低的频段内得以再现。近来,人们借助于新型人工电磁材料的概念,利用周期褶皱结构成功模拟了表面等离激元在光波段的性质,业内称这种特殊结构为人工表面等离激元。这种新型的传输结构与传统的光波段的表面等离激元具有相似的特性可能成为微波电路未来发展的方向之一。Due to the unique properties of the surface plasmon structure, it has important application prospects in data storage, super-resolution imaging and negative refraction materials, making it one of the hot research fields that are widely valued by scholars at home and abroad. However, the excellent properties of this structure cannot be reproduced in the lower frequency band because metals cannot exhibit the characteristics of negative dielectric constant in the lower frequency band. Recently, with the help of the concept of new artificial electromagnetic materials, people have successfully simulated the properties of surface plasmons in the optical band by using periodic folded structures. This special structure is called artificial surface plasmons in the industry. This new type of transmission structure has similar characteristics to the traditional surface plasmons in the optical band, which may become one of the future development directions of microwave circuits.

已有的表面等离激元滤波器大部分是利用周期褶皱结构自身的特点制成的,并且结构尺寸较大,在实际应用中受到诸多限制。而此次提供了一种基于人工表面等离激元滤波器的新型综合方法,成功制成了结合人工表面等离激元器件的波导和基片集成波导的滤波器。Most of the existing surface plasmon filters are made by using the characteristics of the periodic fold structure, and the structure size is relatively large, which is subject to many limitations in practical applications. This time, a new synthesis method based on artificial surface plasmon filters was provided, and a waveguide combined with artificial surface plasmon devices and a filter with substrate-integrated waveguides were successfully fabricated.

发明内容Contents of the invention

发明目的:为了克服现有技术中存在的不足,本发明提供一种综合人工表面等离激元器件的波导和基片集成波导的滤波器,该滤波器在较宽频带内都可以实现很好的传输特性,并具有很好的矩形系数。同时,调节相应的参数,还可以实现超宽带和窄带型滤波器,且都具有较好的传输特性。该滤波器具有易于加工、成本低、厚度薄、重量轻等优点,方便的制作共性电路,具有很高的实用价值。Purpose of the invention: In order to overcome the deficiencies in the prior art, the present invention provides a filter that integrates waveguides of artificial surface plasmon devices and substrate-integrated waveguides. Transmission characteristics, and has a very good square coefficient. At the same time, by adjusting the corresponding parameters, ultra-wideband and narrowband filters can also be realized, and both have better transmission characteristics. The filter has the advantages of easy processing, low cost, thin thickness, light weight, etc., and is convenient for making a common circuit, and has high practical value.

技术方案:为实现上述目的,本发明采用的技术方案为:一种综合人工表面等离激元器件的波导和基片集成波导的滤波器,包括人工表面等离激元波导和基片集成波导, 且人工表面等离激元波导与基片集成波导、人工表面等离激元波导与端口、基片集成波导与端口均通过微带线转换器连接;Technical solution: In order to achieve the above object, the technical solution adopted in the present invention is: a waveguide of an artificial surface plasmon device and a filter for a substrate-integrated waveguide, including an artificial surface plasmon waveguide and a substrate-integrated waveguide , and the artificial surface plasmon waveguide and the substrate integrated waveguide, the artificial surface plasmon waveguide and the port, and the substrate integrated waveguide and the port are all connected by a microstrip line converter;

所述基片集成波导包括第一介质基片,所述第一介质基片的上下表面均设置有第一金属化层,同时所述第一介质基片沿人工表面等离激元波导与基片集成波导的中心线对称设置有两排金属化过孔;The substrate-integrated waveguide includes a first dielectric substrate, the upper and lower surfaces of the first dielectric substrate are provided with a first metallization layer, and at the same time, the first dielectric substrate is connected to the substrate along the artificial surface plasmon waveguide The center line of the chip integrated waveguide is symmetrically provided with two rows of metallized via holes;

所述人工表面等离激元波导包括第二介质基片,所述第二介质基片的上下表面均设置有第二金属化层,所述第二金属化层上设置有一个以上的金属凹槽,且所述金属凹槽的深度从两边向中间依次递增排列,且金属凹槽的深度递增直至与第二金属化层厚度相同,同时位于第二介质基片上下两个表面上的第二金属化层的金属凹槽开口方向相反。The artificial surface plasmon waveguide includes a second dielectric substrate, the upper and lower surfaces of the second dielectric substrate are provided with a second metallization layer, and the second metallization layer is provided with more than one metal concave Grooves, and the depths of the metal grooves are arranged in increments from both sides to the middle, and the depths of the metal grooves are gradually increased until the thickness of the second metallization layer is the same as that of the second metallization layer located on the upper and lower surfaces of the second dielectric substrate. The opening directions of the metal grooves of the metallization layer are opposite.

优选的:同排的金属化过孔之间的间距相同;金属凹槽之间间距相同。Preferably: the distance between the metallized via holes in the same row is the same; the distance between the metal grooves is the same.

优选的:所述微带转换器的主体是一段线性的微带渐变线,此微带渐变线可实现波导与50欧姆微带线之间的阻抗变换。Preferably: the main body of the microstrip converter is a linear microstrip gradient line, which can realize impedance transformation between the waveguide and the 50-ohm microstrip line.

有益效果:本发明提供的一种综合人工表面等离激元器件的波导和基片集成波导的滤波器,相比现有技术,具有以下有益效果:Beneficial effects: Compared with the prior art, the waveguide integrated artificial surface plasmon device provided by the present invention and the filter integrated with the substrate waveguide have the following beneficial effects:

1.本发明制作简单,加工方便。利用成熟的PCB加工技术可以完成对本发明的加工。1. The present invention is simple to manufacture and convenient to process. The processing of the present invention can be completed by using mature PCB processing technology.

2.本发明提供一种基于人工表面等离激元滤波器的新型综合方法。结合人工表面等离激元器件的波导和基片集成波导的滤波器,在较宽频带内都具有良好的传输特性和矩形系数。2. The present invention provides a novel synthesis method based on artificial surface plasmon filters. The waveguide combined with the artificial surface plasmon device and the filter integrated with the substrate waveguide have good transmission characteristics and square coefficients in a wide frequency band.

3.本发明可以仅仅通过调节结构的几何尺寸来改变器件的色散特性,是该滤波器在超宽带和窄带的频段也均具有良好的传输特性和矩形系数。调节简单,扩展性良好。因为结构整体上是利用金属单元结构的谐振效果来降低其等效的体相等离子谐振频率,因此,调节金属结构,相当于调节了其金属结构的谐振频点,使等离子频率发生变化,从而改变其色散特性。3. The present invention can change the dispersion characteristics of the device only by adjusting the geometric dimensions of the structure, so that the filter also has good transmission characteristics and squareness coefficients in ultra-wideband and narrowband frequency bands. Easy to adjust and good expandability. Because the structure as a whole uses the resonance effect of the metal unit structure to reduce its equivalent volume phase ion resonance frequency, therefore, adjusting the metal structure is equivalent to adjusting the resonance frequency point of the metal structure, so that the plasma frequency changes, thereby changing its dispersion properties.

4.本发明同时具备便携、重量轻、容易集成等优点。4. The present invention has the advantages of portability, light weight, and easy integration.

附图说明Description of drawings

图1是本发明中波导的单元结构示意图,图1(a)是基片集成波导的单元结构的结构示意图;图1(b)人工表面等离激元波导的金属化层的凹槽开口向上的结构示意图,图1(c)是人工表面等离激元波导的金属化层的凹槽开口向下的结构示意图。Fig. 1 is the unit structure diagram of waveguide in the present invention, and Fig. 1 (a) is the unit structure diagram of substrate integrated waveguide; Fig. 1 (b) the groove opening of the metallization layer of artificial surface plasmon waveguide upwards Fig. 1(c) is a schematic diagram of the structure of the metallization layer of the artificial surface plasmon waveguide with the groove opening downward.

图2是本发明人工表面等离激元波导的结构示意图。Fig. 2 is a schematic diagram of the structure of the artificial surface plasmon waveguide of the present invention.

图3是本发明基片集成波导的结构示意图。Fig. 3 is a schematic diagram of the structure of the substrate-integrated waveguide of the present invention.

图4是本发明中结合人工表面等离激元器件的波导和基片集成波导的滤波器的结构示意图。其中,图4(a)该滤波器结构的正面示意图,图4(b)是该滤波器结构的反 面示意图。Fig. 4 is a structural schematic diagram of a waveguide combined with an artificial surface plasmon device and a filter integrated with a substrate waveguide in the present invention. Wherein, Fig. 4 (a) is the front schematic diagram of this filter structure, and Fig. 4 (b) is the reverse schematic diagram of this filter structure.

图5是本发明中各部分波导器件的色散关系图。其中,图5(a)是该滤波器中人工表面等离激元波导单元结构(黑色实线)和基片集成波导单元结构(黑色虚线)以及光线(黑色点虚线)的色散关系;图5(b)是该滤波器中人工表面等离激元波导结构随金属凹槽深度变化而产生改变的色散特性曲线;图5(c)该滤波器中基片集成波导结构随等效宽度变化而产生改变的色散特性曲线。Fig. 5 is a diagram of the dispersion relation of each part of the waveguide device in the present invention. Among them, Figure 5(a) is the dispersion relationship between the artificial surface plasmon waveguide unit structure (black solid line) and the substrate integrated waveguide unit structure (black dotted line) and light (black dotted line) in the filter; Figure 5 (b) is the dispersion characteristic curve of the artificial surface plasmon waveguide structure in the filter as the depth of the metal groove changes; Fig. 5(c) the substrate-integrated waveguide structure in the filter changes with the equivalent width A modified dispersion characteristic curve is produced.

图6是本发明中的滤波器的S21(黑色虚线)和S11(黑色实线)参数的仿真结果曲线图。Fig. 6 is a graph of simulation results of parameters S21 (black dotted line) and S11 (black solid line) of the filter in the present invention.

图7是具有不同人工表面等离激元波导的金属凹槽深度的滤波器的S21参数的仿真结果曲线图。Fig. 7 is a graph of simulation results of the S21 parameter of filters with different metal groove depths of artificial surface plasmon waveguides.

图8是具有不同基片集成波导的等效宽度的滤波器的S21参数的仿真结果曲线图。Fig. 8 is a graph of simulation results of the S21 parameter of filters with different equivalent widths of substrate integrated waveguides.

图9是根据不同的人工表面等离激元波导的金属凹槽深度和不同基片集成波导的等效宽度,而制成的超宽带滤波器和窄带滤波器的S21参数的仿真结果曲线图。Fig. 9 is a graph showing the simulation results of the S21 parameters of ultra-wideband filters and narrowband filters made according to the metal groove depths of different artificial surface plasmon waveguides and the equivalent widths of different substrate integrated waveguides.

其中,1为基片集成波导,11为第一介质基片,12为第一金属化层,13为金属化过孔,2为人工表面等离激元波导,21为第二介质基片,22为上表面设置的第二金属化层,23为下表面设置的第二金属化层,24为金属凹槽。Among them, 1 is the substrate integrated waveguide, 11 is the first dielectric substrate, 12 is the first metallization layer, 13 is the metallized via hole, 2 is the artificial surface plasmon waveguide, 21 is the second dielectric substrate, 22 is the second metallization layer provided on the upper surface, 23 is the second metallization layer provided on the lower surface, and 24 is a metal groove.

具体实施方式Detailed ways

下面结合附图对本发明作更进一步的说明。The present invention will be further described below in conjunction with the accompanying drawings.

一种综合人工表面等离激元器件的波导和基片集成波导的滤波器,如图1、4所示,包括人工表面等离激元波导2和基片集成波导1,且人工表面等离激元波导2与基片集成波导1、人工表面等离激元波导2与端口、基片集成波导1与端口均通过微带线转换器连接;A filter that integrates waveguides of artificial surface plasmon devices and substrate-integrated waveguides, as shown in Figures 1 and 4, includes artificial surface plasmon waveguides 2 and substrate-integrated waveguides 1, and the artificial surface plasmon The polariton waveguide 2 and the substrate-integrated waveguide 1, the artificial surface plasmon waveguide 2 and the port, and the substrate-integrated waveguide 1 and the port are all connected through a microstrip line converter;

如图1(a)、图3所示,所述基片集成波导1包括第一介质基片11,所述第一介质基片11的上下表面均设置有第一金属化层12,同时所述第一介质基片11沿人工表面等离激元波导2与基片集成波导1的中心线对称设置有两排金属化过孔13。As shown in Figure 1(a) and Figure 3, the substrate-integrated waveguide 1 includes a first dielectric substrate 11, the upper and lower surfaces of the first dielectric substrate 11 are provided with a first metallization layer 12, and the The first dielectric substrate 11 is symmetrically provided with two rows of metallized via holes 13 along the center line of the artificial surface plasmon waveguide 2 and the substrate-integrated waveguide 1 .

如图1(b)、图2所示,所述人工表面等离激元波导2包括第二介质基片21,所述第二介质基片21的上下表面均设置有第二金属化层(22,23),所述第二金属化层(22,23)上设置有一个以上的金属凹槽24,且所述金属凹槽24的深度从两边向中间依次递增排列,且金属凹槽的深度递增直至与第二金属化层(22,23)厚度相同,同时位于第二介质基片21上下两个表面上的第二金属化层(22,23)的金属凹槽24开口方向相反,第二介质基片21的下表面设置的第二金属化层23的金属凹槽24的开口向上,上表面设置的 第二金属化层22的金属凹槽24的开口向下。As shown in Figure 1(b) and Figure 2, the artificial surface plasmon waveguide 2 includes a second dielectric substrate 21, and the upper and lower surfaces of the second dielectric substrate 21 are provided with a second metallization layer ( 22, 23), the second metallization layer (22, 23) is provided with more than one metal groove 24, and the depth of the metal groove 24 is arranged progressively from both sides to the middle, and the metal groove The depth increases until it is the same as the thickness of the second metallization layer (22, 23), and the opening direction of the metal groove 24 of the second metallization layer (22, 23) on the upper and lower surfaces of the second dielectric substrate 21 is opposite at the same time, The opening of the metal groove 24 of the second metallization layer 23 provided on the lower surface of the second dielectric substrate 21 is upward, and the opening of the metal groove 24 of the second metallization layer 22 provided on the upper surface is downward.

同排的金属化过孔13之间的间距相同;金属凹槽24之间间距相同。The distances between the metallized via holes 13 in the same row are the same; the distances between the metal grooves 24 are the same.

所述微带转换器的主体是一段线性的微带渐变线,此微带渐变线可实现波导与50欧姆微带线之间的阻抗变换。The main body of the microstrip converter is a linear microstrip gradient line, which can realize impedance transformation between the waveguide and the 50-ohm microstrip line.

一种基于人工表面等离激元滤波器的新型综合方法,结合了人工表面等离激元器件的波导和基片集成波导。如图1(a)所示的是典型的单层基片集成波导的单元结构,图中介质基片的上下表面均为金属化层,在介质基片的中心位置制作两排金属化过孔;人工表面等离激元波导的单元结构如图1(b)和(c)所示,介质基片的上下表面相对的金属凹槽。A novel synthesis approach based on artificial surface plasmon filters combining waveguides for artificial surface plasmon devices and substrate-integrated waveguides. As shown in Figure 1(a), the unit structure of a typical single-layer substrate integrated waveguide is shown. In the figure, the upper and lower surfaces of the dielectric substrate are metallized layers, and two rows of metallized via holes are made in the center of the dielectric substrate. ; The unit structure of the artificial surface plasmon waveguide is shown in Figure 1(b) and (c), the metal grooves on the upper and lower surfaces of the dielectric substrate are opposite.

本发明的单元结构,利用多个图1所示的结构进行周期型排列。如图4所示,人工表面等离激元波导结构的介质板上下面金属凹槽开口方向相反,且两端的凹槽的深度呈现逐渐减小直至与金属板高度相同。人工表面等离激元与基片集成波导的连接和与端口以及基片集成波导与端口连接的均采用采用微带线转换器。In the cell structure of the present invention, a plurality of structures shown in FIG. 1 are periodically arranged. As shown in Figure 4, the opening direction of the metal grooves on the bottom and bottom of the dielectric plate of the artificial surface plasmon waveguide structure is opposite, and the depth of the grooves at both ends gradually decreases until it is the same height as the metal plate. The connection between the artificial surface plasmon and the substrate integrated waveguide and the port, and the connection between the substrate integrated waveguide and the port adopt microstrip line converters.

结合人工表面等离激元褶皱形结构的和基片集成波导结构的基本性质,如图4所示,可以设计不同多种频段的滤波器。Combining the basic properties of the artificial surface plasmon wrinkled structure and the substrate-integrated waveguide structure, as shown in Figure 4, filters of different frequency bands can be designed.

所述的滤波器结构具有超宽带和窄带滤波器都具有很好的性能。The filter structure has very good performance in ultra-wideband and narrowband filters.

一种基于人工表面等离激元器件的波导结构,该波导结构包括介质基片以及介质基片上下表面相对的金属凹槽。其中,上下表面相对的金属凹槽是基于图1(b)和(c)所示的单元结构进行周期排布制成的,金属凹槽开口相反。为了与微带线转换器匹配,此波导结构的上下表面的金属片采用两端的凹槽的深度逐渐减小直至与金属板高度相同的方法。A waveguide structure based on an artificial surface plasmon device, the waveguide structure includes a dielectric substrate and metal grooves opposite to the upper and lower surfaces of the dielectric substrate. Among them, the metal grooves on the upper and lower surfaces are arranged periodically based on the unit structure shown in Figure 1 (b) and (c), and the openings of the metal grooves are opposite. In order to match with the microstrip line converter, the metal sheet on the upper and lower surfaces of the waveguide structure adopts a method in which the depth of the grooves at both ends gradually decreases until it is the same height as the metal sheet.

一种是典型的单层基片集成波导结构,该波导结构包括介质基片以及介质基片的上下表面的金属化层,在介质基片中相隔一定周期的距离制作两排金属化通孔。One is a typical single-layer substrate integrated waveguide structure. The waveguide structure includes a dielectric substrate and metallization layers on the upper and lower surfaces of the dielectric substrate. Two rows of metallized through holes are made in the dielectric substrate at a certain period of distance.

为了方便测试和连接,微带转换器的设计实现了人工表面等离激元波导与基片集成波导以及端口与人工表面等离激元波导、基片集成波导的衔接。微带转换器的主体是一段线性的微带渐变线,此微带渐变线可实现波导与50欧姆微带线之间的阻抗变换。In order to facilitate testing and connection, the design of the microstrip converter realizes the connection between the artificial surface plasmon waveguide and the substrate integrated waveguide, and the connection between the port and the artificial surface plasmon waveguide and the substrate integrated waveguide. The main body of the microstrip converter is a linear microstrip gradient line, which can realize the impedance transformation between the waveguide and the 50 ohm microstrip line.

此外,如图5(b)、(c)所示的人工表面等离激元波导和基片集成波导的色散特性,可以获知人工表面等离激元褶皱形波导结构和基片集成波导结构的基本性质。人工表面等离激元波导的截止频率和褶皱形金属凹槽的深度有直接关系,基片集成波导的截止频率 则和该波导的等效宽度有直接关系。由此还可以设计超宽带以及窄带滤波器,并都具有良好的传输特性和矩形系数,此特点使得其在实际应用下有更大的发展前景。In addition, the dispersion characteristics of the artificial surface plasmon waveguide and the substrate-integrated waveguide shown in Fig. basic nature. The cutoff frequency of the artificial surface plasmon waveguide is directly related to the depth of the corrugated metal groove, and the cutoff frequency of the substrate integrated waveguide is directly related to the equivalent width of the waveguide. Therefore, ultra-wideband and narrowband filters can also be designed, and both have good transmission characteristics and square coefficients, which make them have greater development prospects in practical applications.

本实施例的一种基于人工表面等离激元器件的波导结构和典型的单层基片集成波导结构滤波器。对于人工表面等离激元波导结构,包括介质基片以及介质基片上下表面相对的金属凹槽,并且上下表面相对的金属凹槽是基于图1(b)和(c)所示的单元结构进行周期排布制成的,金属凹槽开口相反。波导结构的上下表面的金属片采用两端的凹槽的深度逐渐减小直至与金属板高度相同的方法。对于基片集成波导结构,包括介质基片以及介质基片的上下表面的金属化层,在介质基片中相隔一定周期的距离制作两排金属化通孔。设计了一段线性微带渐变线的微带转换器,实现了人工表面等离激元波导与基片集成波导以及端口与人工表面等离激元波导、基片集成波导的衔接,此微带渐变线可实现波导与50欧姆微带线之间的阻抗变换。A waveguide structure based on an artificial surface plasmon device in this embodiment and a typical single-layer substrate integrated waveguide structure filter. For the artificial surface plasmon waveguide structure, it includes the dielectric substrate and the metal grooves on the upper and lower surfaces of the dielectric substrate, and the metal grooves on the upper and lower surfaces are based on the unit structure shown in Figure 1(b) and (c) Made of periodic arrangement, metal groove openings are opposite. The metal sheets on the upper and lower surfaces of the waveguide structure adopt a method in which the depths of the grooves at both ends gradually decrease until they are at the same height as the metal sheets. For the substrate-integrated waveguide structure, including the dielectric substrate and the metallization layers on the upper and lower surfaces of the dielectric substrate, two rows of metallized through-holes are made in the dielectric substrate at intervals of a certain period. A microstrip converter with a linear microstrip gradient line is designed to realize the connection between the artificial surface plasmon waveguide and the substrate integrated waveguide and the connection between the port and the artificial surface plasmon waveguide and the substrate integrated waveguide. The microstrip gradient The line can realize the impedance transformation between the waveguide and the 50 ohm microstrip line.

如图5所示,为本实施例各部分波导器件的色散关系。(a)是该滤波器中人工表面等离激元波导单元结构(黑色实线)和基片集成波导单元结构(黑色虚线)以及光线(黑色点虚线)的色散关系;(b)是该滤波器中人工表面等离激元波导结构随金属凹槽深度变化而产生改变的色散特性曲线;(c)该滤波器中基片集成波导结构随等效宽度变化而产生改变的色散特性曲线。As shown in FIG. 5 , it is the dispersion relationship of each part of the waveguide device in this embodiment. (a) is the dispersion relationship between the artificial surface plasmon waveguide unit structure (black solid line) and the substrate integrated waveguide unit structure (black dotted line) and light (black dotted line) in the filter; (b) is the filter The dispersion characteristic curve of the artificial surface plasmon waveguide structure in the filter varies with the depth of the metal groove; (c) the dispersion characteristic curve of the substrate integrated waveguide structure in the filter varies with the equivalent width.

如图6所示,滤波器的S21(黑色虚线)和S11(黑色实线)参数的仿真结果曲线图。As shown in FIG. 6, the simulation result graph of the S21 (black dotted line) and S11 (black solid line) parameters of the filter.

如图7所示,不同人工表面等离激元波导的金属凹槽深度的滤波器的S21参数的仿真结果曲线。As shown in Fig. 7, the simulation result curves of the S21 parameter of the filter with different metal groove depths of artificial surface plasmon waveguides.

如图8所示,同基片集成波导的等效宽度的滤波器的S21参数的仿真结果曲线。As shown in Fig. 8, the simulation result curve of the S21 parameter of the filter with the equivalent width of the integrated waveguide on the same substrate.

如图9所示,不同的人工表面等离激元波导的金属凹槽深度和不同基片集成波导的等效宽度,而制成的超宽带滤波器和窄带滤波器的S21参数的仿真结果曲。As shown in Fig. 9, the simulation results of the S21 parameters of the ultra-wideband filter and narrowband filter made by different artificial surface plasmon waveguides with metal groove depths and equivalent widths of different substrate integrated waveguides are shown in Fig. .

由上述仿真结果显示,该滤波器的传输系数在11.2GHz和21.9GHz之间均能达到-1dB左右。The above simulation results show that the transmission coefficient of the filter can reach about -1dB between 11.2GHz and 21.9GHz.

调节人工表面等离激元波导的金属凹槽深度和不同基片集成波导的等效宽度,设计的超宽带滤波器的传输系数在在8.0GHz和22.5GHz之间均能达到-1dB左右,大约有14.5GHz的带宽;窄带滤波器的传输系数在在16.9GHz和18.7GHz之间均能达到-1.5dB左右,大约有0.8GHz的带宽。By adjusting the metal groove depth of the artificial surface plasmon waveguide and the equivalent width of the integrated waveguide on different substrates, the transmission coefficient of the designed ultra-wideband filter can reach -1dB between 8.0GHz and 22.5GHz, about There is a bandwidth of 14.5GHz; the transmission coefficient of the narrowband filter can reach about -1.5dB between 16.9GHz and 18.7GHz, and it has a bandwidth of about 0.8GHz.

由上述可知,本发明的滤波器单元通过按照特定的排列组成,方便的制作曲面共型电路,具有很高的实用价值;同时还提供了超宽带和窄带滤波器,均实现了很好的滤波性能。It can be seen from the above that the filter unit of the present invention is composed according to a specific arrangement, and the curved surface common type circuit is conveniently produced, which has high practical value; at the same time, it also provides ultra-wideband and narrowband filters, all of which achieve good filtering performance.

以上所述仅是本发明的优选实施方式,应当指出:对于本技术领域的普通技术人员来说,在不脱离本发明原理的前提下,还可以做出若干改进和润饰,这些改进和润饰也应视为本发明的保护范围。The above is only a preferred embodiment of the present invention, it should be pointed out that for those of ordinary skill in the art, without departing from the principle of the present invention, some improvements and modifications can also be made, and these improvements and modifications are also possible. It should be regarded as the protection scope of the present invention.

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