技术领域technical field
本发明有关一种柔性显示装置及其制作方法，特别是指一种成本低、弯曲程度大且不易使薄膜晶体管断裂的柔性显示装置及其制作方法。The present invention relates to a flexible display device and a manufacturing method thereof, in particular to a flexible display device and a manufacturing method thereof that are low in cost, have a large degree of bending, and are not easy to break a thin film transistor.
背景技术Background technique
目前，柔性显示器的柔性基板各层结构均为无机物和金属，且各层厚度近似，在折弯时由于应力分布均匀，因此可能发生TFT（Thin Film Transistor，薄膜晶体管）位置由于折弯特性而造成偏移，甚至出现断裂。At present, the structure of each layer of the flexible substrate of the flexible display is inorganic and metal, and the thickness of each layer is similar. Due to the uniform stress distribution during bending, it may occur that the position of the TFT (Thin Film Transistor, thin film transistor) may be deformed due to the bending characteristics. cause deviation, or even breakage.
为解决上述问题，现有技术中往往采用柔性较好、易于弯曲的材料制造柔性显示装置中的显示结构，例如用氧化物半导体(铟镓锌氧化物，IGZO) 或有机物半导体( 如酞菁铜，PcCu) 等取代薄膜晶体管有源区的硅基半导体材料。但是，并非所有的显示结构都能由柔性好的替代材料制造，其选材范围受限；且即使有替代材料，也不能保证其性能、成本等都达到现有材料的水平，因此替代材料的使用可能造成柔性显示装置性能的降低和成本的升高；另外，如果使用替代材料，则柔性显示基板的结构、制备工艺等都会发生明显变化，从而无法通过现有的工艺和设备制备。In order to solve the above problems, in the prior art, flexible and easy-to-bend materials are often used to manufacture display structures in flexible display devices, such as oxide semiconductors (indium gallium zinc oxide, IGZO) or organic semiconductors (such as copper phthalocyanine , PcCu) and other silicon-based semiconductor materials that replace the active regions of thin-film transistors. However, not all display structures can be made of flexible alternative materials, and the range of material selection is limited; and even if there are alternative materials, there is no guarantee that their performance and cost will reach the level of existing materials, so the use of alternative materials It may lead to a decrease in the performance of the flexible display device and an increase in cost; in addition, if alternative materials are used, the structure and preparation process of the flexible display substrate will change significantly, so that it cannot be prepared by existing processes and equipment.
目前还可以使用弹性材料层对柔性显示基板上的各种显示结构进行封装，以保护这些结构免受损伤。然而，弹性材料层虽可保护易损结构，但其也使柔性显示基板的变形受到限制，从而导致柔性显示装置的变形能力降低。At present, various display structures on a flexible display substrate can also be encapsulated with an elastic material layer to protect these structures from damage. However, although the elastic material layer can protect the fragile structure, it also restricts the deformation of the flexible display substrate, thereby reducing the deformation ability of the flexible display device.
发明内容Contents of the invention
有鉴于此，本发明的主要目的在于提供一种制作简单、弯曲程度大且不易使TFT断裂的柔性显示装置及其制作方法。In view of this, the main purpose of the present invention is to provide a flexible display device and a manufacturing method thereof that are easy to manufacture, have a large degree of bending, and are not easy to break the TFT.
为达到上述目的，本发明提供一种柔性显示装置制作方法，该方法包括如下步骤：In order to achieve the above object, the present invention provides a method for manufacturing a flexible display device, the method comprising the following steps:
步骤一、在柔性基板上制作TFT层，将所述TFT层划分为像素区和像素间隔区，所述像素间隔区以行和列的方式间隔出多行多列的像素区；Step 1. Fabricate a TFT layer on a flexible substrate, and divide the TFT layer into a pixel area and a pixel interval area, and the pixel interval area is divided into multiple rows and columns of pixel areas in the manner of rows and columns;
步骤二、将所述像素间隔区的TFT层刻蚀直至柔性基板处，在经刻蚀后的像素间隔区内填充第一有机物平坦化层；Step 2: Etching the TFT layer in the pixel interval area up to the flexible substrate, and filling the etched pixel interval area with a first organic planarization layer;
步骤三、在所述像素区和像素间隔区上制作金属线，所述金属线跨越所述像素间隔区的第一有机物平坦化层实现相邻像素区的电连接；Step 3, making a metal line on the pixel area and the pixel interval area, and the metal line crosses the first organic planarization layer of the pixel interval area to realize the electrical connection of adjacent pixel areas;
步骤四、在实现相邻像素电连接的TFT层上制作发光器件，所述发光器件包括像素单元，所述像素单元在柔性基板上的投影与所述TFT层的像素区在柔性基板上的投影重叠，各像素单元之间的区域在柔性基板上的投影与所述TFT层的像素间隔区在柔性基板上的投影重叠。Step 4: Fabricate a light-emitting device on the TFT layer that realizes the electrical connection of adjacent pixels, the light-emitting device includes a pixel unit, the projection of the pixel unit on the flexible substrate and the projection of the pixel area of the TFT layer on the flexible substrate Overlapping, the projection of the area between the pixel units on the flexible substrate overlaps with the projection of the pixel interval region of the TFT layer on the flexible substrate.
其中一个实施例中，在所述步骤三还包括如下工艺：在所述像素区制作通孔，所述金属线跨越所述像素间隔区通过所述通孔实现相邻像素区的电连接。In one embodiment, the step 3 further includes the following process: forming a through hole in the pixel region, and the metal line crosses the pixel interval region through the through hole to realize electrical connection between adjacent pixel regions.
其中一个实施例中，在所述步骤三与步骤四之间进行如下工艺：在所述实现相邻像素电连接的TFT层上制作第二有机物平坦化层，覆盖所述金属线。In one embodiment, the following process is performed between the third step and the fourth step: a second organic planarization layer is formed on the TFT layer for realizing electrical connection of adjacent pixels to cover the metal line.
其中一个实施例中，所述第一有机物平坦化层与第二有机物平坦化层的材质为聚酰亚胺。In one embodiment, the material of the first organic planarization layer and the second organic planarization layer is polyimide.
本发明还提供一种柔性显示装置，包括：The present invention also provides a flexible display device, comprising:
柔性基板；flexible substrate;
设于所述柔性基板上的TFT层，所述TFT层包括像素区和像素间隔区，所述像素区被所述像素间隔区间隔成多行多列的阵列，所述像素间隔区内设有第一有机物平坦化层，各相邻的像素区通过所述第一有机物平坦化层上的金属线电连接；The TFT layer provided on the flexible substrate, the TFT layer includes a pixel area and a pixel interval area, the pixel area is separated into an array of multiple rows and columns by the pixel interval area, and the pixel interval area is provided with a first organic planarization layer, each adjacent pixel area is electrically connected through a metal line on the first organic planarization layer;
设于所述TFT层上的发光器件，所述发光器件包括像素单元，所述像素单元在柔性基板上的投影与所述TFT层的像素区在柔性基板上的投影重叠，各像素单元之间的区域在柔性基板上的投影与所述TFT层的像素间隔区在柔性基板上的投影重叠。A light-emitting device arranged on the TFT layer, the light-emitting device includes a pixel unit, the projection of the pixel unit on the flexible substrate overlaps with the projection of the pixel region of the TFT layer on the flexible substrate, and between each pixel unit The projection of the region on the flexible substrate overlaps with the projection of the pixel interval region of the TFT layer on the flexible substrate.
其中一个实施例中，所述像素区设有通孔，所述金属线通过所述通孔连接所述各相邻的像素区。In one embodiment, the pixel area is provided with a through hole, and the metal line connects the adjacent pixel areas through the through hole.
其中一个实施例中，所述TFT层与所述发光器件之间还设有第二有机物平坦化层，所述第二有机物平坦化层覆盖所述金属线。In one embodiment, a second organic planarization layer is further provided between the TFT layer and the light emitting device, and the second organic planarization layer covers the metal lines.
其中一个实施例中，所述第一有机物平坦化层和第二有机物平坦化层的材质为聚酰亚胺。In one embodiment, the material of the first organic planarization layer and the second organic planarization layer is polyimide.
本发明将TFT分割为像素区与像素间隔区，像素间隔区为第一有机物平坦化层，由于有机物容易弯折，因此将柔性显示装置进行弯折时，应力会集中在像素间隔区，从而防止了像素区因为折弯而发生TFT特性改变或断裂的风险。In the present invention, the TFT is divided into a pixel area and a pixel interval area, and the pixel interval area is the first organic flattening layer. Since the organic matter is easy to bend, when the flexible display device is bent, the stress will be concentrated on the pixel interval area, thereby preventing The risk of TFT characteristic change or breakage due to bending in the pixel area is eliminated.
附图说明Description of drawings
图1为本发明柔性显示装置制作方法的步骤流程图；1 is a flow chart of the steps of the manufacturing method of the flexible display device of the present invention;
图2为本发明柔性显示装置的俯视示意图；2 is a schematic top view of the flexible display device of the present invention;
图3为沿图2中A-A线的剖面图。Fig. 3 is a sectional view along line A-A in Fig. 2 .
具体实施方式Detailed ways
为便于对本发明的结构及方法及达到的效果有进一步的了解，现结合附图并举较佳实施例详细说明如下。In order to facilitate a further understanding of the structure, method and achieved effects of the present invention, preferred embodiments are described in detail below in conjunction with the accompanying drawings.
如图1至图3所示，本发明柔性显示装置制作方法包括如下步骤：As shown in Figures 1 to 3, the manufacturing method of the flexible display device of the present invention includes the following steps:
步骤一、在柔性基板上制作TFT层，将所述TFT层划分为像素区和像素间隔区，所述像素间隔区以行和列的方式间隔出多行多列的像素区。利用像素间隔区将像素区间隔成以阵列方式排列的独立孤岛。Step 1: Fabricate a TFT layer on a flexible substrate, and divide the TFT layer into a pixel area and a pixel interval area, and the pixel interval area divides a plurality of rows and columns of pixel areas in the form of rows and columns. The pixel area is used to separate the pixel area into independent islands arranged in an array.
步骤二、刻蚀TFT层的像素间隔区，将所述像素间隔区内的无机物层及金属层刻蚀掉，直至刻蚀到柔性基板处；然后在刻蚀后的像素间隔区内填充第一有机物平坦化层；第一有机物平坦化层相对之前被刻蚀掉的无机物具备更好的柔性，容易折弯。在折弯时，应力会集中在像素间隔区，从而防止了像素区因为折弯而发生TFT特性改变或断裂的风险。Step 2: Etching the pixel interval area of the TFT layer, etching away the inorganic layer and metal layer in the pixel interval area until the flexible substrate is etched; then filling the etched pixel interval area An organic planarization layer; the first organic planarization layer has better flexibility and is easier to bend than the previously etched inorganic matter. During bending, the stress will be concentrated in the pixel interval area, thereby preventing the risk of TFT characteristic change or fracture in the pixel area due to bending.
步骤三、在所述像素区和像素间隔区上制作金属线，所述金属线跨越所述像素间隔区的第一有机物平坦化层实现相邻像素区独立孤岛的电连接。金属线不仅实现了相邻像素区的电连接，而且相对之前刻蚀掉的金属层具备更好的伸展性，在折弯时减小了像素区因为折弯而发生TFT特性改变或断裂的风险。Step 3: Fabricate a metal line on the pixel area and the pixel interval area, and the metal line spans the first organic planarization layer of the pixel interval area to realize the electrical connection of the independent islands of adjacent pixel areas. The metal line not only realizes the electrical connection of adjacent pixel areas, but also has better stretchability than the previously etched metal layer, which reduces the risk of TFT characteristic change or fracture in the pixel area due to bending during bending .
步骤四、在实现相邻像素电连接的TFT层上制作发光器件，所述发光器件包括像素单元，像素单元包括多个子像素，子像素在柔性基板上的投影与像素区在柔性基板上的投影重叠；各子像素之间的区域在柔性基板上的投影与像素间隔区在柔性基板上的投影重叠。Step 4: Fabricate a light-emitting device on the TFT layer that realizes the electrical connection of adjacent pixels, the light-emitting device includes a pixel unit, the pixel unit includes a plurality of sub-pixels, the projection of the sub-pixels on the flexible substrate and the projection of the pixel area on the flexible substrate Overlapping; the projection of the area between the sub-pixels on the flexible substrate overlaps with the projection of the pixel interval area on the flexible substrate.
步骤二中，为增大柔性显示装置的弯曲程度，可以在每相邻两个像素区之间进行行列方向的刻蚀，并以有机物进行填充，以形成更为密集的折弯区，增大弯折程度。In step 2, in order to increase the bending degree of the flexible display device, etching in the row and column direction can be performed between every two adjacent pixel regions, and filled with organic matter to form a more dense bending region, increasing the degree of bending.
步骤三中，通过在像素区刻蚀通孔，然后所述金属线跨越所述像素间隔区通过所述通孔实现相邻像素区独立孤岛的电连接。In step 3, through holes are etched in the pixel regions, and then the metal lines cross the pixel interval regions and pass through the through holes to realize the electrical connection of independent islands in adjacent pixel regions.
各像素区通过金属线实现电连接后，还可以在所述TFT层上制作第二有机物平坦化层，第二有机物平坦化层覆盖所述金属线，增加了对金属线的保护，进一步减小断线的风险，增大弯折程度。所述第一和第二有机物平坦化层优选聚酰亚胺。After each pixel area is electrically connected by a metal wire, a second organic planarization layer can also be formed on the TFT layer. The second organic planarization layer covers the metal wire, which increases the protection of the metal wire and further reduces the Risk of wire breakage, increased bending. The first and second organic planarization layers are preferably polyimide.
如图2 与图3所示，本发明的柔性显示装置包括柔性基板1，设于所述柔性基板上的TFT 层2， TFT层2包括像素区20和像素间隔区21，像素区20被像素间隔区21间隔成多行多列的阵列，像素间隔区21内设有第一有机物平坦化层22，各相邻的像素区20通过所述第一有机物平坦化层22上的金属线23电连接。本发明中一有机物平坦化层22优选聚酰亚胺，其具备较优的弯折能力，因此将柔性显示装置进行弯折时，应力会集中在像素间隔区21，从而防止了像素区20因为折弯而发生TFT特性改变或断裂的风险。柔性显示装置还包括设于所述TFT层上的发光器件（图中未示出），所述发光器件包括像素单元，像素单元包括多个子像素，子像素在柔性基板上的投影与TFT层像素区在柔性基板上的投影重叠；各子像素之间的区域在柔性基板上的投影与TFT层像素间隔区在柔性基板上的投影重叠。为增大柔性显示装置的弯曲程度，可以在每相邻两个像素区之间进行行列方向的刻蚀，并以有机物进行填充，以形成更为密集的折弯区，增大弯折程度。As shown in Fig. 2 and Fig. 3, the flexible display device of the present invention includes a flexible substrate 1, a TFT layer 2 disposed on the flexible substrate, the TFT layer 2 includes a pixel region 20 and a pixel interval region 21, and the pixel region 20 is surrounded by pixels. The spacer regions 21 are spaced into an array of multiple rows and multiple columns, and a first organic planarization layer 22 is arranged in the pixel spacer region 21 , and each adjacent pixel region 20 is electrically connected to each other through a metal line 23 on the first organic planarization layer 22 . connect. In the present invention, an organic planarization layer 22 is preferably polyimide, which has better bending ability, so when the flexible display device is bent, the stress will be concentrated on the pixel interval region 21, thus preventing the pixel region 20 from being There is a risk of TFT characteristic change or breakage due to bending. The flexible display device also includes a light-emitting device (not shown in the figure) arranged on the TFT layer, the light-emitting device includes a pixel unit, and the pixel unit includes a plurality of sub-pixels, and the projection of the sub-pixels on the flexible substrate is similar to that of the TFT layer pixels. The projections of the regions on the flexible substrate overlap; the projections of the regions between the sub-pixels on the flexible substrate overlap with the projections of the TFT layer pixel interval regions on the flexible substrate. In order to increase the bending degree of the flexible display device, etching in the row and column direction can be performed between every two adjacent pixel regions, and filled with organic substances to form more dense bending regions and increase the bending degree.
该柔性显示装置的TFT层和发光器件之间进一步的包含一层第二有机物平坦化层，该第二有机物平坦化层3覆盖所述金属线，进一步保护金属线，使得金属线的弯折程度更大。该该第二有机物平坦化层3材质也为聚酰亚胺。A layer of second organic planarization layer is further included between the TFT layer of the flexible display device and the light-emitting device. The second organic planarization layer 3 covers the metal wires to further protect the metal wires, so that the bending degree of the metal wires is bigger. The second organic planarization layer 3 is also made of polyimide.
以上所述，仅为本发明的较佳实施例而已，并非用于限定本发明的保护范围。The above descriptions are only preferred embodiments of the present invention, and are not intended to limit the protection scope of the present invention.
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| CN201510022265.6ACN104600029B (en) | 2015-01-16 | 2015-01-16 | A kind of flexible display apparatus and preparation method thereof |
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| CN201510022265.6ACN104600029B (en) | 2015-01-16 | 2015-01-16 | A kind of flexible display apparatus and preparation method thereof |
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| CN104600029Atrue CN104600029A (en) | 2015-05-06 |
| CN104600029B CN104600029B (en) | 2017-10-17 |
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| CN201510022265.6AActiveCN104600029B (en) | 2015-01-16 | 2015-01-16 | A kind of flexible display apparatus and preparation method thereof |
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| TR01 | Transfer of patent right | Effective date of registration:20201215 Address after:No.146 Tianying Road, high tech Zone, Chengdu, Sichuan Province Patentee after:Chengdu CHENXIAN photoelectric Co.,Ltd. Address before:NO.320 Fuchunjiang Road, Optoelectronic Industrial Park, Kunshan Development Zone, Suzhou City, Jiangsu Province Patentee before:Kunshan New Flat Panel Display Technology Center Co.,Ltd. Patentee before:KunShan Go-Visionox Opto-Electronics Co.,Ltd. | |
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