技术领域technical field
本发明涉及一种产生分布式X射线的装置，特别涉及在一个X射线光源设备中通过外置方式布置多个独立的热阴极电子发射单元并且利用栅极控制或者阴极控制来产生按照预定顺序变换焦点位置的X射线的外置热阴极分布式X射线装置以及具有该装置的CT设备。The present invention relates to a device for generating distributed X-rays, in particular to arranging a plurality of independent thermal cathode electron emission units in an external manner in an X-ray light source device and using grid control or cathode control to generate transformations in a predetermined order An external hot cathode distributed X-ray device for X-rays at the focal point and a CT device with the device.
背景技术Background technique
一般地，X射线光源是指产生X射线的设备，通常由X射线管、电源与控制系统、冷却及屏蔽等辅助装置等构成，其核心是X射线管。X射线管通常由阴极、阳极、玻璃或陶瓷外壳构成。阴极为直热式螺旋钨丝，在工作时，通过电流，加热到一种高温状态，产生热发射的电子束流，阴极被一个前端开槽的金属罩包围，金属罩使电子聚焦。阳极为在铜块端面镶嵌的钨靶，在工作时，在阳极和阴极之间施加有高压，阴极产生的电子在电场作用下加速运动飞向阳极，并且撞击靶面，从而产生X射线。Generally speaking, an X-ray light source refers to equipment that generates X-rays, usually consisting of X-ray tubes, power supply and control systems, auxiliary devices such as cooling and shielding, etc., and its core is the X-ray tube. X-ray tubes usually consist of a cathode, an anode, and a glass or ceramic housing. The cathode is a direct-heated spiral tungsten wire. When it is working, it is heated to a high temperature state by passing an electric current to generate a thermally emitted electron beam. The cathode is surrounded by a metal cover with a front slot, and the metal cover focuses the electrons. The anode is a tungsten target inlaid on the end face of the copper block. When working, a high voltage is applied between the anode and the cathode. The electrons generated by the cathode are accelerated by the electric field and fly to the anode, and hit the target surface to generate X-rays.
X射线在工业无损检测、安全检查、医学诊断和治疗等领域具有广泛的应用。特别是，利用X射线的高穿透能力制成的X射线透视成像设备在人们日常生活的方方面面发挥着重要作用。这类设备早期的是胶片式的平面透视成像设备，目前的先进技术是数字化、多视角并且高分辨率的立体成像设备，例如CT（computed tomography），可以获得高清晰度的三维立体图形或切片图像，是先进的高端应用。X-rays are widely used in industrial non-destructive testing, safety inspection, medical diagnosis and treatment and other fields. In particular, X-ray fluoroscopy imaging equipment made by utilizing the high penetrating ability of X-rays plays an important role in every aspect of people's daily life. The early days of this type of equipment were film-type plane perspective imaging equipment, and the current advanced technology is digital, multi-view and high-resolution stereoscopic imaging equipment, such as CT (computed tomography), which can obtain high-definition three-dimensional graphics or slices Graphics, are advanced high-end applications.
在现有的CT设备中，X射线源和探测器需要在滑环上运动，为了提高检查速度，通常X射线源和探测器的运动速度非常高，导致设备整体的可靠性和稳定性降低，此外，受运动速度的限制，CT的检查速度也受到了限制。因此，在CT设备中需要一种能够不移动位置就能产生多个视角的X射线源。In the existing CT equipment, the X-ray source and detector need to move on the slip ring. In order to improve the inspection speed, the X-ray source and detector usually move at a very high speed, which reduces the overall reliability and stability of the equipment. In addition, limited by the speed of movement, the inspection speed of CT is also limited. Therefore, there is a need for an X-ray source that can generate multiple viewing angles without moving its position.
为了解决现有CT设备中滑环带来的可靠性、稳定性问题和检查速度问题以及阳极靶点耐热问题，在现有专利文献中提供了一些方法。例如旋转靶X射线源，可以在一定程度上解决阳极靶过热的问题，但是，其结构复杂并且产生X射线的靶点相对于X射线源整体仍然是一个确定的靶点位置。例如，有的技术为了实现固定不动X射线源的多个视角而在一个圆周上紧密排列多个独立的传统X射线源来取代X射线源的运动，虽然这样也能够实现多视角，但是成本高，并且，不同视角的靶点间距大，成像质量（立体分辨率）很差。此外，在专利文献1（US4926452）中提出了一种产生分布式X射线的光源以及方法，阳极靶具有很大的面积，缓解了靶过热的问题，并且，靶点位置沿圆周变化，可以产生多个视角。虽然专利文献1是对获得加速的高能量电子束进行扫描偏转，存在控制难度大、靶点位置不分立以及重复性差的问题，但仍然是一种能产生分布式光源的有效方法。此外，例如在专利文献2（US20110075802）与专利文献3（WO2011/119629）中提出了一种产生分布式X射线的光源以及方法，阳极靶具有很大的面积，缓解了靶过热的问题，并且，靶点位置分散固定且阵列式排列，可以产生多个视角。此外，采用碳纳米管做为冷阴极，并且对冷阴极进行阵列排布，利用阴极栅极间的电压控制场发射，从而控制每一个阴极按顺序发射电子，在阳极上按相应顺序位置轰击靶点，成为分布式X射线源。但是，存在生产工艺复杂、碳纳米管的发射能力与寿命不高的不足之处。In order to solve the problems of reliability, stability, inspection speed and anode target heat resistance caused by slip rings in existing CT equipment, some methods are provided in existing patent documents. For example, the rotating target X-ray source can solve the problem of anode target overheating to a certain extent, but its structure is complex and the target point that generates X-rays is still a definite target point position relative to the X-ray source as a whole. For example, in order to achieve multiple viewing angles of a fixed X-ray source, some technologies closely arrange multiple independent traditional X-ray sources on a circle to replace the movement of the X-ray source. Although this can also achieve multiple viewing angles, the cost High, and the distance between the target points of different viewing angles is large, and the imaging quality (stereo resolution) is poor. In addition, in Patent Document 1 (US4926452), a light source and method for generating distributed X-rays are proposed. The anode target has a large area, which alleviates the problem of target overheating, and the position of the target point changes along the circumference, which can generate multiple perspectives. Although Patent Document 1 scans and deflects the accelerated high-energy electron beam, which has the problems of difficult control, non-discrete target positions and poor repeatability, it is still an effective method for generating distributed light sources. In addition, for example, in Patent Document 2 (US20110075802) and Patent Document 3 (WO2011/119629), a light source and method for generating distributed X-rays are proposed. The anode target has a large area, which alleviates the problem of target overheating, and , the target positions are scattered and fixed and arranged in an array, which can generate multiple viewing angles. In addition, carbon nanotubes are used as cold cathodes, and the cold cathodes are arranged in an array, and the voltage between the cathode grids is used to control the field emission, so that each cathode is controlled to emit electrons in sequence, and the target is bombarded in the corresponding order on the anode. point, becomes a distributed X-ray source. However, there are disadvantages such as complex production process, low emissivity and lifespan of carbon nanotubes.
发明内容Contents of the invention
本发明是为了解决上述课题而提出的，其目的在于提供一种无需移动光源就能产生多个视角并且有利于简化结构、提高系统稳定性、可靠性、提高检查效率的外置热阴极分布式X射线装置以及具有该外置热阴极分布式X射线装置的CT设备。The present invention is proposed to solve the above-mentioned problems, and its purpose is to provide an external hot cathode distributed X-ray device and CT equipment with the external hot cathode distributed X-ray device.
为了实现上述目的，本发明提供一种外置热阴极分布式X射线装置，其特征在于，具备：真空盒，四周密封并且内部为高真空；多个电子发射单元，每个电子发射单元互相独立且排成线形阵列安装在所述真空盒的侧壁上；阳极，安装在所述真空盒内部的中间位置，并且，在长度方向上与所述电子发射单元的排列方向平行且在宽度方向上与所述电子发射单元的安装平面形成预定角度的夹角；电源与控制系统，具有与所述阳极连接的高压电源、与所述多个电子发射单元的每一个连接的发射控制装置、用于对各电源进行控制的控制系统，所述电子发射单元具有：加热灯丝；与所述加热灯丝连接的阴极；从所述加热灯丝的两端引出的灯丝引线；绝缘支撑件，包围所述加热灯丝以及所述阴极；聚焦极，以位于所述阴极的上方的方式配置在所述绝缘支撑件的顶端；连接固定件，配置在所述聚焦极的上方，与所述真空盒的盒壁密封连接，所述灯丝引线穿过所述绝缘支撑件与所述发射控制装置连接。In order to achieve the above object, the present invention provides an external hot cathode distributed X-ray device, which is characterized in that it has: a vacuum box sealed around and a high vacuum inside; a plurality of electron emission units, each electron emission unit is independent of each other and installed in a linear array on the side wall of the vacuum box; the anode is installed in the middle position inside the vacuum box, and is parallel to the arrangement direction of the electron emission units in the length direction and in the width direction An included angle forming a predetermined angle with the installation plane of the electron emission unit; a power supply and control system having a high-voltage power supply connected to the anode, an emission control device connected to each of the plurality of electron emission units, and used for A control system for controlling each power supply, the electron emission unit has: a heating filament; a cathode connected to the heating filament; filament leads drawn from both ends of the heating filament; an insulating support member surrounding the heating filament and the cathode; the focusing electrode is arranged on the top of the insulating support in a manner above the cathode; the connecting fixture is arranged above the focusing electrode and is hermetically connected with the box wall of the vacuum box , the filament leads pass through the insulating support and are connected to the emission control device.
此外，在本发明中的外置热阴极分布式X射线装置中，还具有：高压电源连接装置，将所述阳极和所述高压电源的电缆连接，安装在所述真空盒的靠近所述阳极的一端的侧壁；发射控制装置连接装置，用于连接所述加热灯丝和所述发射控制装置；真空电源，包括在所述电源与控制系统内；真空装置，安装在所述真空盒的侧壁上，利用所述真空电源进行工作，维持所述真空盒内的高真空。In addition, in the external hot cathode distributed X-ray device in the present invention, it also has: a high-voltage power supply connection device, which connects the anode and the cable of the high-voltage power supply, and is installed in the vacuum box close to the anode The side wall of one end of the emission control device; the emission control device connection device is used to connect the heating filament and the emission control device; the vacuum power supply is included in the power supply and control system; the vacuum device is installed on the side of the vacuum box On the wall, the vacuum power supply is used to maintain the high vacuum in the vacuum box.
此外，在本发明中的外置热阴极分布式X射线装置中，所述电子发射单元还具有：栅极，安装在所述阴极与所述聚焦极之间并且紧邻阴极；栅极引线，与所述栅极连接，穿过所述绝缘支撑件，与所述发射控制装置连接。In addition, in the external hot cathode distributed X-ray device in the present invention, the electron emission unit also has: a grid installed between the cathode and the focusing electrode and adjacent to the cathode; The gate connection, passing through the insulating support, is connected to the emission control device.
此外，在本发明中的外置热阴极分布式X射线装置中，所述电子发射单元还具有：聚焦段，安装在所述聚焦极与所述连接固定件之间；聚焦装置，以包围所述聚焦段的方式配置。In addition, in the external hot cathode distributed X-ray device of the present invention, the electron emission unit further has: a focusing section installed between the focusing electrode and the connecting fixture; a focusing device to surround the Configured in the manner of the focus segment described above.
此外，在本发明中的外置热阴极分布式X射线装置中，还具有：聚焦电源，包括在所述电源与控制系统内；聚焦装置连接装置，用于连接所述聚焦装置和所述聚焦电源。In addition, in the external hot cathode distributed X-ray device in the present invention, it also has: a focusing power supply, included in the power supply and control system; a focusing device connection device, used to connect the focusing device and the focusing power supply.
此外，在本发明中的外置热阴极分布式X射线装置中，所述电子发射单元分两排安装在所述真空盒的两个相对的侧壁上。In addition, in the distributed X-ray device with an external hot cathode in the present invention, the electron emission units are installed in two rows on two opposite side walls of the vacuum box.
此外，在本发明中的外置热阴极分布式X射线装置中，所述真空盒由玻璃或陶瓷制成。In addition, in the distributed X-ray device with external hot cathode in the present invention, the vacuum box is made of glass or ceramics.
此外，在本发明中的外置热阴极分布式X射线装置中，所述真空盒由金属材料制成。In addition, in the distributed X-ray device with external hot cathode in the present invention, the vacuum box is made of metal material.
此外，在本发明中的外置热阴极分布式X射线装置中，所述多个电子发射单元排列成直线形或者是分段直线形。In addition, in the distributed X-ray device with an external hot cathode in the present invention, the plurality of electron emission units are arranged in a straight line or a segmented straight line.
此外，在本发明中的外置热阴极分布式X射线装置中，所述多个电子发射单元排列成圆弧形或者是分段圆弧形。In addition, in the distributed X-ray device with an external hot cathode in the present invention, the plurality of electron emission units are arranged in an arc shape or a segmented arc shape.
此外，在本发明中的外置热阴极分布式X射线装置中，所述多个电子发射单元的排列间隔是均匀的。In addition, in the distributed X-ray device with external hot cathodes in the present invention, the arrangement intervals of the plurality of electron emission units are uniform.
此外，在本发明中的外置热阴极分布式X射线装置中，所述多个电子发射单元的排列间隔是非均匀的。In addition, in the distributed X-ray device with an external hot cathode in the present invention, the arrangement intervals of the plurality of electron emission units are non-uniform.
此外，本发明提供一种CT设备，其特征在于，所使用的X射线源是如上所述的外置热阴极分布式X射线装置。In addition, the present invention provides a CT device, which is characterized in that the X-ray source used is the above-mentioned external hot cathode distributed X-ray device.
根据本发明，主要是提供一种外置热阴极分布式X射线装置，在一个光源设备中产生按某种顺序周期变换焦点位置的X射线。本发明的电子发射单元采用热阴极，相对于其它设计具有发射电流大、寿命长的优点；多个电子发射单元各自独立固定在真空盒上，且可直接使用小型的二极或三极电子枪，技术成熟，成本低，应用灵活；采用长条型大阳极的设计，有效缓解了阳极过热的问题，有利于提高光源的功率；电子发射单元可以直线排列，整体成为直线型分布式X射线装置，电子发射单元也可以环形排列，整体成为环型分布式X射线装置，应用灵活；通过聚焦极的设计，和外部聚焦装置的设计，电子束可是实现非常小的焦点。相对其它分布式X射线光源设备，本发明电流大，靶点小，靶点位置分布均匀且重复性好，输出功率高，结构简单，控制方便，成本低。According to the present invention, it mainly provides an external hot cathode distributed X-ray device, which generates X-rays whose focal positions are periodically changed in a certain order in a light source device. The electron emission unit of the present invention adopts a hot cathode, which has the advantages of large emission current and long life compared with other designs; multiple electron emission units are independently fixed on the vacuum box, and can directly use a small two-pole or three-pole electron gun, The technology is mature, the cost is low, and the application is flexible; the design of the long and large anode effectively alleviates the problem of overheating of the anode, which is conducive to improving the power of the light source; the electron emission units can be arranged in a straight line, and the whole becomes a linear distributed X-ray device. The electron emission units can also be arranged in a ring, and the whole becomes a ring-shaped distributed X-ray device, which is flexible in application; through the design of the focusing pole and the design of the external focusing device, the electron beam can achieve a very small focus. Compared with other distributed X-ray light source equipment, the present invention has large current, small target point, uniform target point distribution and good repeatability, high output power, simple structure, convenient control and low cost.
将本发明的分布式X射线光源应用于CT设备，无需移动光源就能产生多个视角，因此可以省略滑环运动，有利于简化结构，提高系统稳定性、可靠性，提高检查效率。Applying the distributed X-ray light source of the present invention to CT equipment can generate multiple viewing angles without moving the light source, so the movement of the slip ring can be omitted, which is conducive to simplifying the structure, improving system stability and reliability, and improving inspection efficiency.
附图说明Description of drawings
图1是本发明的外置热阴极分布式X射线装置的结构的示意图。Fig. 1 is a schematic diagram of the structure of an external hot cathode distributed X-ray device of the present invention.
图2是本发明中的阳极与电子发射单元的位置关系的示意图。FIG. 2 is a schematic diagram of the positional relationship between the anode and the electron emission unit in the present invention.
图3是本发明中的一种电子发射单元的结构的示意图。FIG. 3 is a schematic diagram of the structure of an electron emission unit in the present invention.
图4是本发明中的一种发射控制单元的结构的示意图。Fig. 4 is a schematic diagram of the structure of a transmission control unit in the present invention.
图5是本发明中的一种具有栅极和聚焦装置的电子发射单元的结构的示意图。FIG. 5 is a schematic diagram of the structure of an electron emission unit having grids and focusing means in the present invention.
图6是本发明中的一种具有栅极控制的发射控制单元的结构的示意图。FIG. 6 is a schematic diagram of the structure of an emission control unit with gate control in the present invention.
图7是本发明中的另一种电子发射单元的结构示意图。FIG. 7 is a schematic structural view of another electron emission unit in the present invention.
图8是本发明中的圆柱形电子发射单元的结构的俯视图，（A）是圆形栅孔的情况，（B）是长方形栅孔的情况。Fig. 8 is a plan view of the structure of the cylindrical electron emission unit in the present invention, (A) is the case of circular grid holes, (B) is the case of rectangular grid holes.
图9是本发明中的长方体形电子发射单元的结构俯视图，（A）是圆形栅孔的情况，（B）是长方形栅孔的情况。Fig. 9 is a top view of the structure of the rectangular parallelepiped electron emission unit in the present invention, (A) is the case of circular grid holes, (B) is the case of rectangular grid holes.
图10是本发明中的阴极的结构示意图，（A）是平面圆形的阴极，（B）是平面长方形的阴极，（C）是球面圆弧形的阴极，（D）是圆柱弧面形的阴极。Figure 10 is a schematic diagram of the structure of the cathode in the present invention, (A) is a flat circular cathode, (B) is a flat rectangular cathode, (C) is a spherical arc-shaped cathode, (D) is a cylindrical arc surface of the cathode.
图11是本发明中的栅网的结构示意图，（A）是平面型栅网，（B）是球面型栅网，（C）是U槽型栅网。Fig. 11 is a schematic structural diagram of the grid in the present invention, (A) is a planar grid, (B) is a spherical grid, and (C) is a U-groove grid.
图12是本发明的利用栅极的控制进行的自动聚焦的示意图。Fig. 12 is a schematic diagram of the auto-focusing by gate control of the present invention.
图13是本发明中的一种直线型双排对置布置的外置热阴极分布式X射线装置的结构的示意图，（A）是电子发射单元、阳极与真空盒的位置关系的图，（B）是电子发射单元与阳极的位置关系的图。Figure 13 is a schematic diagram of the structure of a linear double-row opposed arrangement of an external hot cathode distributed X-ray device in the present invention, (A) is a diagram of the positional relationship between the electron emission unit, the anode and the vacuum box, ( B) is a diagram of the positional relationship between the electron emission unit and the anode.
图14是本发明中的一种圆弧型双排对置布置的外置热阴极分布式X射线装置的结构的示意图。Fig. 14 is a schematic diagram of the structure of an arc-shaped distributed X-ray device with external hot cathodes arranged in opposite rows in the present invention.
图15是本发明的二维分布式X射线装置的主要结构的示意图。Fig. 15 is a schematic diagram of the main structure of the two-dimensional distributed X-ray device of the present invention.
图16是本发明中的二维分布式X射线装置的阳极结构的仰视图。Fig. 16 is a bottom view of the anode structure of the two-dimensional distributed X-ray device in the present invention.
图17是本发明中的栅极与阴极分离的电子发射单元阵列的示意图，（A）是侧视图，（B）是各个栅极独立控制模式的俯视图，（C）是各个栅极互连并且阴极控制模式的俯视图。Figure 17 is a schematic diagram of the electron emission unit array in which the gate and the cathode are separated in the present invention, (A) is a side view, (B) is a top view of each gate independent control mode, (C) is each gate interconnection and Top view of the cathode control pattern.
图18是本发明中的灯丝串联的分布式X射线装置。Fig. 18 is a distributed X-ray device in which filaments are connected in series in the present invention.
图19是本发明的曲面阵列分布式X射线装置的结构的示意图。Fig. 19 is a schematic diagram of the structure of the curved surface array distributed X-ray device of the present invention.
图20是本发明的曲面阵列分布式X射线装置的结构的端面示意图。Fig. 20 is a schematic end view of the structure of the curved surface array distributed X-ray device of the present invention.
图21是本发明中的阳极的不同结构的示意图。Figure 21 is a schematic diagram of different structures of the anode in the present invention.
图22是在本发明中的环型分布式X射线装置的电子发射单元与阳极的布置关系的示意图。Fig. 22 is a schematic diagram of the arrangement relationship between the electron emission unit and the anode of the annular distributed X-ray device in the present invention.
附图标记说明：Explanation of reference signs:
1 电子发射单元1 electron emission unit
2 阳极2 anodes
3 真空盒3 vacuum box
4 高压电源连接装置4 High voltage power connection device
5 发射控制装置连接装置5 Launch control device connection device
6 聚焦装置连接装置6 Focus device connection device
7 电源与控制系统7 Power supply and control system
8 真空装置8 vacuum device
E 电子束流E electron beam current
X X射线X X ray
O 圆弧的圆心O the center of the arc
101 加热灯丝101 heating filament
102 阴极102 Cathode
103 绝缘支撑件103 insulating support
104 聚焦极104 focus pole
105 连接固定件105 connection fixture
106 灯丝引线106 Filament Leads
107 栅极107 grid
108 栅极引线108 Gate leads
109 聚焦段109 focus segment
110 聚焦装置110 focus device
701 控制系统701 Control system
702 高压电源702 High voltage power supply
703 发射控制装置703 Launch control gear
704 聚焦电源704 focus power supply
70301 负高压模块70301 negative high voltage module
70302 直流模块70302 DC module
70303 高压隔离变压器70303 High voltage isolation transformer
70304 负电压模块70304 negative voltage module
70305 正电压模块70305 positive voltage module
70306 开关模块70306 switch module
801 真空泵801 vacuum pump
802 真空阀。802 Vacuum valve.
具体实施方式Detailed ways
以下，参照附图详细地对本发明进行说明。Hereinafter, the present invention will be described in detail with reference to the drawings.
图1是本发明的外置热阴极分布式X射线装置的结构的示意图。如图1所示，本发明的外置热阴极分布式X射线装置包括多个电子发射单元1（至少两个，以后也具体地称为电子发射单元11、12、13、14、……）、阳极2、真空盒3、高压电源连接装置4、发射控制装置连接装置5、以及电源与控制系统7。此外，电子发射单元1由加热灯丝101、阴极102、绝缘支撑件103、聚焦极104、连接固定件105、灯丝引线106等组成。阳极2安装在真空盒3内部的中间，电子发射单元1与高压电源连接装置4安装在真空盒3的盒壁上并且与真空盒3构成整体密封结构。Fig. 1 is a schematic diagram of the structure of an external hot cathode distributed X-ray device of the present invention. As shown in FIG. 1 , the distributed X-ray device with external hot cathode of the present invention includes a plurality of electron emission units 1 (at least two, hereafter specifically referred to as electron emission units 11, 12, 13, 14, ...) , anode 2, vacuum box 3, high-voltage power supply connection device 4, launch control device connection device 5, and power supply and control system 7. In addition, the electron emission unit 1 is composed of a heating filament 101 , a cathode 102 , an insulating support 103 , a focusing electrode 104 , a connecting fixture 105 , a filament lead 106 and the like. The anode 2 is installed in the middle of the vacuum box 3, and the electron emission unit 1 and the high-voltage power supply connection device 4 are installed on the box wall of the vacuum box 3 and form an integral sealing structure with the vacuum box 3.
图2是本发明的外置热阴极分布式X射线装置的阳极2与电子发射单元1的相对位置关系的示意图。如图2所示，多个电子发射单元1排列在一条直线上，阳极2是与电子发射单元1的排列相对应的长条形状，并且，阳极2在长度方向上与由多个电子发射单元1排列而成的直线平行，在宽度方向上，阳极2的面向电子发射单元1的表面与电子发射单元1的面向阳极2的表面之间形成预定角度的夹角。FIG. 2 is a schematic diagram of the relative positional relationship between the anode 2 and the electron emission unit 1 of the distributed X-ray device with an external hot cathode of the present invention. As shown in Figure 2, a plurality of electron emission units 1 are arranged on a straight line, and the anode 2 is a strip shape corresponding to the arrangement of the electron emission units 1, and the anode 2 is connected with the plurality of electron emission units in the length direction. 1 are arranged parallel to each other, and in the width direction, a predetermined angle is formed between the surface of the anode 2 facing the electron emission unit 1 and the surface of the electron emission unit 1 facing the anode 2 .
电子发射单元1用于按要求产生电子束流，安装在真空盒3的侧壁上，通过连接固定件105与真空盒3的侧壁构成密封结构，电子发射单元1整体处于真空盒3之外，电子束流可通过连接固定件105中间的开孔进入真空盒3内部。此外，在图3中示出了电子发射单元1的一种结构，电子发射单元1包括加热灯丝101、阴极102、绝缘支撑件103、聚焦极104、连接固定件105、灯丝引线106。阴极102与加热灯丝101连接在一起，加热灯丝101通常采用钨丝，阴极102通常采用热发射电子能力强的材料，例如，氧化钡、钪酸盐、六硼化镧等。绝缘支撑件103包围加热灯丝101和阴极102，相当于电子发射单元1的部分壳体，采用绝缘材料，通常为陶瓷。灯丝引线106穿过绝缘支撑件103而被引出到电子发射单元1的外部，灯丝引线106与绝缘支撑件103之间为密封结构。聚焦极104安装在绝缘支撑件103的上端，聚焦极104为鼻锥形设计，中间有开孔，并且该开孔的中心与阴极102的中心上下对齐。连接固定件105用于将电子发射单元1与真空盒3密封连接，通常为刀口法兰，中间有开孔，用于使电子束流E从电子发射单元1进入到真空盒3中。绝缘支撑件103、聚焦极104、连接固定件105紧密连接在一起，使电子发射单元1的除连接固定件105的中心开孔外的其他部分形成一个真空密封结构。The electron emission unit 1 is used to generate electron beams as required, and is installed on the side wall of the vacuum box 3. A sealed structure is formed by connecting the fixing member 105 with the side wall of the vacuum box 3. The electron emission unit 1 is placed outside the vacuum box 3 as a whole. , the electron beam can enter the interior of the vacuum box 3 through the opening in the middle of the connecting fixture 105 . In addition, a structure of the electron emission unit 1 is shown in FIG. 3 . The electron emission unit 1 includes a heating filament 101 , a cathode 102 , an insulating support 103 , a focusing electrode 104 , a connecting fixture 105 , and filament leads 106 . The cathode 102 is connected with the heating filament 101. The heating filament 101 is usually made of tungsten wire, and the cathode 102 is usually made of a material with strong thermal electron emission capability, such as barium oxide, scandate, lanthanum hexaboride, etc. The insulating support 103 surrounds the heating filament 101 and the cathode 102, and is equivalent to a part of the housing of the electron emission unit 1, and is made of insulating material, usually ceramics. The filament lead 106 is led out of the electron emission unit 1 through the insulating support 103 , and the filament lead 106 and the insulating support 103 are sealed. The focusing electrode 104 is installed on the upper end of the insulating support 103 , and the focusing electrode 104 is designed in a nose cone shape with an opening in the middle, and the center of the opening is aligned with the center of the cathode 102 up and down. The connecting fixture 105 is used to seal the electron emission unit 1 and the vacuum box 3 , and is usually a knife-edge flange with an opening in the middle for allowing the electron beam E to enter the vacuum box 3 from the electron emission unit 1 . The insulating support 103 , the focusing electrode 104 , and the connecting fixture 105 are tightly connected together, so that other parts of the electron emission unit 1 except the central opening of the connecting fixture 105 form a vacuum-tight structure.
此外，电源与控制系统7包括控制系统701、高压电源702、发射控制装置703等。高压电源702通过安装在真空盒3的盒壁上的高压电源连接装置4与阳极2相连接。发射控制装置703通过发射控制装置连接装置5分别与各个电子发射单元1的灯丝引线106连接，通常具有与电子发射单元1的数量相同数量的发射控制单元。在图4中示出了一种发射控制单元的结构，发射控制装置703包括多个发射控制单元，每一个发射控制单元包括负高压模块70301、低压直流模块70302、高压隔离变压器70303。其中，负高压模块70301用于在控制系统701的控制下产生负的高压脉冲，其输出连接到高压隔离变压器70303的原边；低压直流模块70302用于产生对加热灯丝106供电加热的电流，其输出连接到高压隔离变压器70303的两组并联副边的低压端，并经过变压器绕组，从两组并联副边的高压端输出到灯丝引线106。发射控制装置连接装置5通常为带连接头的电缆，数量与电子发射单元1的数量相同。此外，控制系统701对高压电源702、发射控制装置703的工作状态进行控制。In addition, the power supply and control system 7 includes a control system 701, a high-voltage power supply 702, a launch control device 703, and the like. The high-voltage power supply 702 is connected to the anode 2 through the high-voltage power supply connection device 4 installed on the box wall of the vacuum box 3 . The emission control device 703 is respectively connected to the filament leads 106 of each electron emission unit 1 through the emission control device connection device 5 , and generally has the same number of emission control units as the number of electron emission units 1 . FIG. 4 shows a structure of a launch control unit. The launch control device 703 includes multiple launch control units. Each launch control unit includes a negative high-voltage module 70301 , a low-voltage DC module 70302 , and a high-voltage isolation transformer 70303 . Among them, the negative high-voltage module 70301 is used to generate negative high-voltage pulses under the control of the control system 701, and its output is connected to the primary side of the high-voltage isolation transformer 70303; the low-voltage DC module 70302 is used to generate current for heating the heating filament 106. The output is connected to the low-voltage ends of the two sets of parallel secondary sides of the high-voltage isolation transformer 70303, and is output to the filament lead 106 from the high-voltage ends of the two sets of parallel secondary sides through the transformer winding. The connection device 5 of the emission control device is generally a cable with a connector, and the number is the same as that of the electron emission units 1 . In addition, the control system 701 controls the working states of the high-voltage power supply 702 and the launch control device 703 .
此外，真空盒3是四周密封的空腔壳体，其内部为高真空，壳体可以由玻璃或陶瓷等绝缘材料构成。在真空盒3的侧壁上（参见图1）安装有多个电子发射单元1，这些电子发射单元1排列成直线，在内部（参见图1）安装有长条形的阳极2，阳极2在长度方向上与电子发射单元1的排列方向平行。真空盒3内部的空间足够电子束流在电场中的运动而不会产生任何阻挡。真空盒3内的高真空是通过在高温排气炉内烘烤排气获得的，其真空度通常优于10-3Pa，推荐的真空度优于10-5Pa 。In addition, the vacuum box 3 is a hollow shell sealed around, and its interior is a high vacuum, and the shell can be made of insulating materials such as glass or ceramics. A plurality of electron emission units 1 are installed on the side wall of the vacuum box 3 (see FIG. 1 ), and these electron emission units 1 are arranged in a straight line, and a strip-shaped anode 2 is installed inside (see FIG. 1 ). The length direction is parallel to the arrangement direction of the electron emission units 1 . The space inside the vacuum box 3 is sufficient for the movement of the electron beam in the electric field without any obstruction. The high vacuum in the vacuum box 3 is obtained by baking exhaust in a high-temperature exhaust furnace, and its vacuum degree is usually better than 10-3 Pa, and the recommended vacuum degree is better than 10-5 Pa.
此外，推荐的真空盒3的壳体是金属材料，在采用金属材料的情况下，电子发射单元1通过其连接固定件105与真空盒3的壁进行刀口法兰密封方式的连接，阳极2利用绝缘支撑材料在真空盒3内进行固定安装，并且，阳极2与真空盒3的壳体之间保持足够的距离，不会产生高压打火。In addition, it is recommended that the housing of the vacuum box 3 is made of a metal material. In the case of using a metal material, the electron emission unit 1 is connected to the wall of the vacuum box 3 by means of a knife-edge flange seal through its connecting fixture 105, and the anode 2 uses The insulating supporting material is fixedly installed in the vacuum box 3 , and a sufficient distance is kept between the anode 2 and the shell of the vacuum box 3 , so that high-voltage ignition will not occur.
此外，高压电源连接装置4用于将阳极2和高压电源702的电缆连接，安装在真空盒3的侧壁。高压电源连接装置4通常为内部带金属柱的锥形陶瓷结构，一端与阳极2相连接，另一端与真空盒3的盒壁紧密连接，一起形成真空密封结构。高压电源连接装置4内部的金属柱用于使阳极2和高压电源702的电缆接头形成电路连接。通常高压电源连接装置4与电缆接头之间设计为可插拔式结构。In addition, the high-voltage power supply connection device 4 is used to connect the anode 2 and the cable of the high-voltage power supply 702 , and is installed on the side wall of the vacuum box 3 . The high-voltage power supply connection device 4 is usually a conical ceramic structure with metal pillars inside, one end is connected to the anode 2, and the other end is closely connected to the box wall of the vacuum box 3 to form a vacuum-tight structure together. The metal post inside the high-voltage power supply connection device 4 is used to make the anode 2 and the cable joint of the high-voltage power supply 702 form a circuit connection. Usually, a pluggable structure is designed between the high-voltage power supply connection device 4 and the cable connector.
此外，在本发明的外置热阴极分布式X射线装置中，电子发射单元1还可以包括栅极107和栅极引线108。在图5中示出了一种具有栅极和聚焦装置的电子发射单元1的结构。如图5所示，栅极107设置在阴极102与聚焦极104之间，紧邻阴极102，栅极107通常为网状结构，外形通常与阴极102的形状相同，栅极引线108连接于栅极107并且穿过绝缘支撑件103被引出到电子发射单元1的外部，栅极引线108与绝缘支撑件103之间密封连接，栅极引线108通过发射控制装置连接装置5连接到发射控制装置703。In addition, in the distributed X-ray device with an external hot cathode of the present invention, the electron emission unit 1 may further include a grid 107 and a grid lead 108 . In FIG. 5 there is shown a structure of an electron emission unit 1 having grids and focusing means. As shown in Figure 5, the grid 107 is arranged between the cathode 102 and the focusing electrode 104, close to the cathode 102, the grid 107 is usually a mesh structure, and the shape is usually the same as that of the cathode 102, and the grid lead 108 is connected to the grid. 107 and lead out to the outside of the electron emission unit 1 through the insulating support 103, the gate lead 108 is sealed with the insulating support 103, and the gate lead 108 is connected to the emission control device 703 through the emission control device connection device 5.
此外，在本发明的外置热阴极分布式X射线装置中，发射控制装置703的发射控制单元还可以包括负偏压模块70304、正偏压模块70305、选择开关70306。在图6中示出了一种具有栅极控制的发射控制单元的结构。如图6所示，负高压模块70301用于产生负高压，其输出连接到高压隔离变压器70303的原边；市电连接到高压隔离变压器70303的两组并联副边的低压端，并经过变压器绕组，从两组并联副边的高压端输出悬浮在高压上的电源，分别供给到直流模块70302、负偏压模块70304和正偏压模块70305。直流模块70302产生对加热灯丝101供电加热的电流；负偏压模块70304和正偏压模块70305分别产生一个负的电压和一个正的电压并输出到选择开关70306的两个输入端，选择开关70306在控制装置701的作用下选择一个电压输出到栅极引线108，并最终施加到栅极107上。In addition, in the distributed X-ray device with an external hot cathode of the present invention, the emission control unit of the emission control device 703 may further include a negative bias module 70304 , a positive bias module 70305 , and a selection switch 70306 . In FIG. 6 a structure of an emission control unit with gate control is shown. As shown in Figure 6, the negative high-voltage module 70301 is used to generate negative high voltage, and its output is connected to the primary side of the high-voltage isolation transformer 70303; the mains is connected to the low-voltage end of the two sets of parallel secondary sides of the high-voltage isolation transformer 70303, and passes through the transformer winding , output power suspended on high voltage from the high voltage ends of two sets of parallel secondary sides, and supply them to DC module 70302, negative bias module 70304 and positive bias module 70305 respectively. The DC module 70302 generates a current for heating the heating filament 101; the negative bias module 70304 and the positive bias module 70305 respectively generate a negative voltage and a positive voltage and output them to the two input terminals of the selection switch 70306, and the selection switch 70306 is in the Under the action of the control device 701 , a voltage is selected and output to the gate lead 108 , and finally applied to the gate 107 .
此外，在本发明的外置热阴极分布式X射线装置中，电子发射单元1还可以包括聚焦段109和聚焦装置110。如图5所示，聚焦段109连接在聚焦极104和连接固定件105之间，聚焦极104、聚焦段109和连接固定件105可以是一个金属件加工而成的整体，也可以三个金属部件通过焊接连接在一起，聚焦装置110安装在聚焦段109外，聚焦装置110通常是聚焦线包。聚焦装置110通过聚焦装置连接装置6连接到聚焦电源704，聚焦装置110在聚焦电源704的驱动下工作，聚焦电源704的工作状态受电源与控制系统7的控制。相应地，外置热阴极分布式X射线装置还包括聚焦装置连接装置6，电源与控制系统7还包括聚焦电源704。In addition, in the distributed X-ray device with an external hot cathode of the present invention, the electron emission unit 1 may further include a focusing section 109 and a focusing device 110 . As shown in Figure 5, the focusing section 109 is connected between the focusing pole 104 and the connecting fixture 105. The focusing pole 104, the focusing section 109 and the connecting fixture 105 can be processed as a whole from one metal piece, or three metal pieces The components are connected together by welding, and the focusing device 110 is installed outside the focusing section 109, the focusing device 110 is usually a focusing wire pack. The focusing device 110 is connected to the focusing power supply 704 through the focusing device connecting device 6 , the focusing device 110 works under the driving of the focusing power supply 704 , and the working state of the focusing power supply 704 is controlled by the power supply and control system 7 . Correspondingly, the external hot cathode distributed X-ray device also includes a focusing device connection device 6 , and the power supply and control system 7 also includes a focusing power supply 704 .
此外，本发明的外置热阴极分布式X射线装置还可以包括真空装置8和真空电源705，真空装置8包括真空泵801和真空阀802，真空装置8安装在真空盒3的侧壁上。真空泵801在真空电源705的作用下进行工作，用于维持真空盒3内的高真空。通常，外置热阴极分布式X射线装置在工作时，电子束流轰击阳极2，阳极2会发热并释放少量气体，通过使用真空泵801，能够将这部分气体快速抽出，从而维持真空盒3内部的高真空度。真空泵801优选使用真空离子泵。真空阀802通常选用可以承受高温烘烤的全金属真空阀门，如全金属手动插板阀。真空阀802通常处于关闭状态。相应地，外置热阴极分布式X射线装置的电源与控制系统7还包括真空装置8的真空电源（Vacc PS）705。In addition, the external hot cathode distributed X-ray device of the present invention may also include a vacuum device 8 and a vacuum power supply 705 , the vacuum device 8 includes a vacuum pump 801 and a vacuum valve 802 , and the vacuum device 8 is installed on the side wall of the vacuum box 3 . The vacuum pump 801 works under the action of the vacuum power supply 705 to maintain the high vacuum in the vacuum box 3 . Usually, when the external hot cathode distributed X-ray device is working, the electron beam bombards the anode 2, and the anode 2 will generate heat and release a small amount of gas. By using the vacuum pump 801, this part of the gas can be quickly drawn out, thereby maintaining the vacuum inside the vacuum box 3. high vacuum. The vacuum pump 801 is preferably a vacuum ion pump. The vacuum valve 802 is usually an all-metal vacuum valve that can withstand high-temperature baking, such as an all-metal manual slide valve. Vacuum valve 802 is normally closed. Correspondingly, the power supply and control system 7 of the external hot cathode distributed X-ray device also includes a vacuum power supply (Vacc PS) 705 of the vacuum device 8 .
此外，在本发明中也能够使用其他结构的电子发射单元。图7是能够在本发明中使用的另一种电子发射单元的结构示意图。如图7所示，电子发射单元1由加热灯丝101A、阴极102A、栅极103A、绝缘支撑件104A、连接固定件109A等组成。In addition, electron emission units of other structures can also be used in the present invention. FIG. 7 is a schematic structural view of another electron emission unit that can be used in the present invention. As shown in FIG. 7 , the electron emission unit 1 is composed of a heating filament 101A, a cathode 102A, a grid 103A, an insulating supporting member 104A, a connection fixing member 109A and the like.
电子发射单元1利用连接固定件109A与真空盒3的壁构成整体密封结构，但是并不限于此，只要能够将电子发射单元1安装在真空盒3的盒壁上并且使其整体处于真空盒3之外（即，电子发射单元1的阴极端（包括加热灯丝101A、阴极102A、栅极103A）以及电子发射单元1的引线端（包括灯丝引线105A、栅极引线108A、连接固定件109A）都处于真空盒3的外部），也可以利用其它方式安装。电子发射单元1包括加热灯丝101A、阴极102A、栅极103A、绝缘支撑件104A、灯丝引线105A、连接固定件109A，并且，栅极103A由栅极架106A、栅网107A、栅极引线108A组成。阴极102A与加热灯丝101A连接在一起，加热灯丝101A通常采用钨丝，阴极102A通常采用热发射电子能力强的材料，例如，氧化钡、钪酸盐、六硼化镧等。绝缘支撑件104A包围加热灯丝101A和阴极102A，相当于电子发射单元1的壳体，采用绝缘材料，通常为陶瓷。灯丝引线105A穿过绝缘支撑件104A而被引出到电子发射单元1的下端（但不限于此，只要引出到电子发射单元1的外部即可），灯丝引线105A与绝缘支撑件104A之间为密封结构。栅极103A安装在绝缘支撑件104A的上端（即，配置在绝缘支撑件104A的开口上）并且与阴极102A对置，优选栅极103A与阴极102A的中心上下对齐。此外，栅极103A包括栅极架106A、栅网107A、栅极引线108A，栅极架106A、栅网107A、栅极引线108A均为金属制成，通常栅极架106A为不锈钢材料，栅网107A为钼材料，栅极引线108A为可伐（合金）材料。栅极引线108A穿过绝缘支撑件104A而被引出到电子发射单元1的下端（但不限于此，只要引出到电子发射单元1的外部即可），栅极引线108A与绝缘支撑件104A之间为密封结构。灯丝引线105A与栅极引线108A连接到发射控制装置703。The electron emission unit 1 utilizes the wall of the connection fixture 109A and the vacuum box 3 to form an integral sealing structure, but it is not limited to this, as long as the electron emission unit 1 can be installed on the box wall of the vacuum box 3 and the whole is placed in the vacuum box 3 Outside (that is, the cathode terminal of the electron emission unit 1 (including the heating filament 101A, the cathode 102A, the grid 103A) and the lead terminal of the electron emission unit 1 (including the filament lead 105A, the grid lead 108A, the connection fixture 109A) are all outside of the vacuum box 3), it can also be installed in other ways. The electron emission unit 1 includes a heating filament 101A, a cathode 102A, a grid 103A, an insulating support 104A, a filament lead 105A, and a connecting fixture 109A, and the grid 103A is composed of a grid frame 106A, a grid 107A, and a grid lead 108A . The cathode 102A is connected with the heating filament 101A. The heating filament 101A is usually made of tungsten wire, and the cathode 102A is usually made of a material with strong thermal electron emission capability, such as barium oxide, scandate, lanthanum hexaboride, etc. The insulating support 104A surrounds the heating filament 101A and the cathode 102A, which is equivalent to the shell of the electron emission unit 1 , and is made of insulating material, usually ceramics. The filament lead wire 105A is led out to the lower end of the electron emission unit 1 through the insulating support member 104A (but not limited to this, as long as it is led out to the outside of the electron emission unit 1), and the filament lead wire 105A and the insulating support member 104A are sealed. structure. The grid 103A is mounted on the upper end of the insulating support 104A (that is, disposed on the opening of the insulating support 104A) and is opposite to the cathode 102A. Preferably, the center of the grid 103A and the cathode 102A are aligned up and down. In addition, the grid 103A includes a grid frame 106A, a grid 107A, and a grid lead 108A. The grid frame 106A, the grid 107A, and the grid lead 108A are all made of metal. Usually, the grid frame 106A is made of stainless steel. 107A is a molybdenum material, and the gate lead 108A is a Kovar (alloy) material. The gate lead 108A is drawn out to the lower end of the electron emission unit 1 through the insulating support 104A (but not limited to this, as long as it is drawn to the outside of the electron emission unit 1 ), between the gate lead 108A and the insulating support 104A It is a sealed structure. The filament lead 105A and the gate lead 108A are connected to the emission control device 703 .
此外，具体地，关于栅极103A的结构，其主体是一块金属板（例如，不锈钢材料）即栅极架106A，在栅极架106A的中间形成有开孔，该开孔的形状可以是方形或圆形等，在该开孔的位置固定有金属丝网（例如，钼材料）即栅网107A，并且，从金属板的某个位置引出一根引线（例如，可伐合金材料）即栅极引线108A，从而能够将栅极103A连接到一个电位。此外，栅极103A位于阴极102A的正上方，栅极103A的上述开孔的中心与阴极102A的中心对准（即，上下在一条垂线上），开孔的形状与阴极102A的形状相对应，通常开孔的大小比阴极102A的面积小。但是，只要是电子束流能够通过栅极103A，栅极103A的结构并不限于上述结构。此外，栅极103A与阴极102A之间通过绝缘支撑件104A进行相对位置固定。In addition, specifically, regarding the structure of the grid 103A, its main body is a metal plate (for example, stainless steel), that is, the grid frame 106A, and an opening is formed in the middle of the grid frame 106A, and the shape of the opening may be a square Or circular, etc., a wire mesh (for example, molybdenum material) is fixed at the position of the opening, that is, the grid 107A, and a lead wire (for example, Kovar material) is drawn from a certain position of the metal plate, that is, the grid The pole lead 108A is connected so that the gate 103A can be connected to a potential. In addition, the grid 103A is located directly above the cathode 102A, and the center of the opening of the grid 103A is aligned with the center of the cathode 102A (that is, on a vertical line up and down), and the shape of the opening corresponds to the shape of the cathode 102A , usually the size of the opening is smaller than the area of the cathode 102A. However, the structure of the gate 103A is not limited to the above structure as long as electron beams can pass through the gate 103A. In addition, the relative position between the grid 103A and the cathode 102A is fixed by an insulating support 104A.
此外，具体地，关于连接固定件109A的结构，推荐的，其主体是一个圆形刀口法兰，中间形成有开孔，该开孔的形状可以是方形或圆形等，在开孔的位置与绝缘支撑件104A的上端外沿密封连接，如焊接连接，刀口法兰的外沿形成有螺钉孔，可以通过螺栓连接将电子发射单元1固定在真空盒3的壁上，其刀口与真空盒3的壁之间形成真空密封连接。这是一种方便拆卸的灵活结构，当多个电子发射单元1中的某一个发生故障时，可以灵活更换。需要指出的是，连接固定件109A的功能是实现绝缘支撑件104A与真空盒3之间的密封连接，可以有多种灵活的方式，如通过金属法兰过渡的焊接，或者玻璃高温熔融密封连接，或者陶瓷金属化后与金属的焊接等方式。In addition, specifically, regarding the structure of the connecting fixture 109A, it is recommended that its main body is a circular knife-edge flange with an opening formed in the middle. The shape of the opening can be square or circular, etc., and the opening position It is sealed and connected with the outer edge of the upper end of the insulating support 104A, such as welded connection. The outer edge of the knife edge flange is formed with a screw hole, and the electron emission unit 1 can be fixed on the wall of the vacuum box 3 by bolt connection, and its knife edge is connected with the vacuum box. 3 to form a vacuum-tight connection between the walls. This is a flexible structure that is easy to disassemble, and can be replaced flexibly when one of the multiple electron emission units 1 fails. It should be pointed out that the function of the connection fixture 109A is to realize the sealed connection between the insulating support 104A and the vacuum box 3, and there may be various flexible ways, such as welding through metal flange transition, or glass high-temperature fusion sealing connection , or the welding of ceramics and metals after metallization.
此外，电子发射单元1可以是圆柱形的结构，即，绝缘支撑件104A为圆柱形，而阴极102A、栅极架106A、栅网107A可以同时为圆形或者同时为长方形。在图8中示出了一种圆柱形的电子发射单元1的俯视图，其中，（A）示出了阴极102A、栅极架106A、栅网107A同时为圆形的结构，（B）示出了阴极102A、栅极架106A、栅网107A同时为长方形的结构。此外，对于圆形阴极，为了使阴极102A的表面产生的电子实现更好的汇聚效果，通常优选将阴极102A的表面加工成球面圆弧形（如图10（C）所示）。阴极102A的表面的直径通常为几mm，例如直径2mm，在栅极架106A上所安装的栅网107A的开孔的直径通常为几mm，例如直径1mm。此外，从栅极103A到阴极102A的表面的距离通常为零点几mm到几mm，例如2mm。此外，对于长方形阴极，为了使阴极102A的表面产生的电子实现更好的汇聚效果，通常优选的是圆柱弧面形，这样有利于窄边方向的电子束流进一步会聚。通常弧面长度为几mm到几十mm，宽度为几mm，例如长10mm、宽2mm。与此相应地，栅网107A为长方形，优选其宽度为1mm、长度为10mm。在图10中示出了阴极102A分别为平面圆形、平面长方形、球面圆弧形、圆柱弧面形这四种结构的情况。In addition, the electron emission unit 1 can be a cylindrical structure, that is, the insulating support 104A is cylindrical, and the cathode 102A, the grid frame 106A, and the grid 107A can be circular or rectangular at the same time. Figure 8 shows a top view of a cylindrical electron emission unit 1, wherein (A) shows a structure in which the cathode 102A, the grid frame 106A, and the grid 107A are simultaneously circular, and (B) shows The cathode 102A, the grid frame 106A, and the grid 107A are all rectangular structures. In addition, for a circular cathode, in order to achieve a better converging effect of the electrons generated on the surface of the cathode 102A, it is generally preferable to process the surface of the cathode 102A into a spherical arc shape (as shown in FIG. 10(C) ). The diameter of the surface of the cathode 102A is usually several mm, such as 2 mm in diameter, and the diameter of the opening of the grid 107A installed on the grid frame 106A is usually several mm, such as 1 mm in diameter. In addition, the distance from the grid 103A to the surface of the cathode 102A is usually a fraction of a millimeter to several millimeters, for example, 2 mm. In addition, for the rectangular cathode, in order to achieve a better converging effect of the electrons generated on the surface of the cathode 102A, it is generally preferable to have a cylindrical arc surface shape, which is conducive to further converging of the electron beam in the direction of the narrow side. Usually the length of the arc surface is several mm to tens of mm, and the width is several mm, for example, the length is 10 mm and the width is 2 mm. Correspondingly, the grid 107A is rectangular, preferably with a width of 1 mm and a length of 10 mm. In FIG. 10 , the cathode 102A is shown in four configurations: planar circle, planar rectangle, spherical arc, and cylindrical arc.
此外，电子发射单元1也可以是长方体型结构，即，绝缘支撑件104A为长方体，而阴极102A、栅极架106A、栅网107A可以同时为圆形，或者同时为长方形。在图9中示出了一种长方体形的电子发射单元1的俯视图，其中（A）示出了阴极102A、栅极架106A、栅网107A同时为圆形的结构，（B）示出了阴极102A、栅极架106A、栅网107A同时为长方形的结构。需要指出的是，图8以及图9中的斜纹线是为了便于区分各个不同的部件，不是表示剖面。In addition, the electron emission unit 1 can also be a cuboid structure, that is, the insulating support 104A is a cuboid, and the cathode 102A, the grid frame 106A, and the grid 107A can be circular or rectangular at the same time. 9 shows a top view of a rectangular parallelepiped electron emission unit 1, wherein (A) shows a structure in which the cathode 102A, the grid frame 106A, and the grid 107A are circular at the same time, and (B) shows The cathode 102A, the grid frame 106A, and the grid 107A are all rectangular structures. It should be pointed out that the slanted lines in FIG. 8 and FIG. 9 are for the convenience of distinguishing different components, and do not represent cross-sections.
此外，具体地，关于栅网107A的结构，如图11所示，可以是平面型，也可以是球面型，还可以是U槽型，推荐的是球面型，这是因为球面型的栅网会使得电子束具有更好的聚焦效果。In addition, specifically, regarding the structure of the grid 107A, as shown in FIG. 11, it can be a plane type, a spherical type, or a U-groove type. The spherical type is recommended, because the spherical grid It will make the electron beam have a better focusing effect.
此外，如果发射控制装置703只改变相邻的电子发射单元中的一个电子发射单元的栅极的状态，在同一时刻，相邻的电子发射单元只有一个进行电子发射而形成电子束流时，则该电子发射单元的栅极两侧的电场对该电子束流具有自动聚焦的效果。如图12所示，图中的用电子发射单元1与阳极2之间的箭头表示电子运动的方向（逆电力线方向）。在图12中，阳极2为高电压+160kV，大电场的在电子发射单元1与阳极2之间的箭头都是从电子发射单元1指向阳极2，也就是说，只要电子发射单元1发射出电子束流，则电子束流都会向阳极2运动。考察电子发射单元1的表面的局部电场状态，在相邻的电子发射单元12、13、14中，电子发射单元13的栅极103A的电压由－500V变为+2000V，则电子发射单元13进入电子发射状态，相邻的电子发射单元12和电子发射单元14的栅极103A的电压仍然为－500V，如果电子发射单元12、14存在电子发射，则电子从电子发射单元12和电子发射单元14的栅极103A向电子发射单元13的栅极103A运动，但是，由于在电子发射单元12、14不存在电子发射，所以，从电子发射单元13发射出来的电子束受到了从电子发射单元13指向相邻的电子发射单元12和电子发射单元14的电场的作用而受到挤压，因此，具有自动聚焦效果。In addition, if the emission control device 703 only changes the state of the grid of one of the adjacent electron emission units, and at the same time, only one of the adjacent electron emission units emits electrons to form an electron beam, then The electric field on both sides of the grid of the electron emission unit has an auto-focusing effect on the electron beam. As shown in FIG. 12 , the arrow between the electron emission unit 1 and the anode 2 in the figure indicates the direction of electron movement (the direction against the electric force line). In Fig. 12, the anode 2 is at a high voltage of +160kV, and the arrows between the electron emission unit 1 and the anode 2 of the large electric field are all directed from the electron emission unit 1 to the anode 2, that is to say, as long as the electron emission unit 1 emits electron beam current, the electron beam current will move towards the anode 2. Investigating the local electric field state on the surface of the electron emission unit 1, in the adjacent electron emission units 12, 13, 14, the voltage of the gate 103A of the electron emission unit 13 changes from -500V to +2000V, then the electron emission unit 13 enters In the state of electron emission, the voltage of the gate 103A of the adjacent electron emission unit 12 and electron emission unit 14 is still -500V. The grid 103A of the electron emission unit 13 moves toward the grid 103A of the electron emission unit 13, but since there is no electron emission in the electron emission unit 12, 14, the electron beam emitted from the electron emission unit 13 is subjected to the direction from the electron emission unit 13. The adjacent electron emission unit 12 and electron emission unit 14 are squeezed by the electric field, and thus have an auto-focus effect.
需要指出的是，本发明的外置热阴极分布式X射线装置工作于高真空状态，高真空的获得和维持方法可以是：将阳极2在真空盒3内完成安装，将高压电源连接装置4及真空装置8在真空盒3的壁上完成密封连接，在真空盒3侧壁的电子发射单元连接处先用盲板法兰密封，使真空盒3整体形成一个密封结构；然后将该结构置于真空炉中烘烤去气，真空阀802连接外部真空抽气系统，目的在于去除各部件的材料所吸附的气体；然后，在常温洁净环境中，从真空阀802向真空盒3内注入氮气，形成保护环境，再打开电子发射单元连接处的盲板法兰并安装电子发射单元，逐个进行；所有电子发射单元安装好后，从真空阀802连接外部真空抽气系统抽气，并再次进行烘烤排气，使真空盒3的内部为高真空；在烘烤排气的过程中可进行各个电子发射单元的阴极的激活；烘烤排气完成后，关闭真空阀802，使真空盒3内部保持高真空；外置热阴极分布式X射线装置工作过程中，阳极释放的少量气体由真空泵801抽除，维持真空盒3内部的高真空。当某一个电子发射单元损坏或者到寿命需要更换时，从真空阀802往真空盒3内部注入氮气形成保护；在最短时间内，拆下需要更换的电子发射单元，安装新的电子发射单元；真空阀802连接外部真空抽气设备，对真空盒3抽真空；当真空盒3内部再次达到高真空时，关闭真空阀802，使真空盒3内部保持高真空。It should be pointed out that the distributed X-ray device with external hot cathode of the present invention works in a high vacuum state, and the method of obtaining and maintaining high vacuum can be as follows: the anode 2 is installed in the vacuum box 3, and the high voltage power supply connection device 4 And the vacuum device 8 completes the sealing connection on the wall of the vacuum box 3, and the electron emission unit connection of the side wall of the vacuum box 3 is first sealed with a blind flange to make the vacuum box 3 integrally form a sealed structure; then place the structure Baking in a vacuum furnace to remove gas, the vacuum valve 802 is connected to an external vacuum pumping system, the purpose is to remove the gas adsorbed by the materials of each component; then, in a clean environment at normal temperature, inject nitrogen into the vacuum box 3 from the vacuum valve 802 , to form a protective environment, and then open the blind flange at the connection of the electron emission unit and install the electron emission unit, one by one; after all the electron emission units are installed, connect the vacuum valve 802 to the external vacuum pumping system to extract air, and perform again Baking and exhausting make the inside of the vacuum box 3 a high vacuum; during the baking and exhausting process, the cathodes of each electron emission unit can be activated; after the baking and exhausting is completed, close the vacuum valve 802 to make the vacuum box 3 The interior maintains a high vacuum; during the working process of the external hot cathode distributed X-ray device, a small amount of gas released by the anode is pumped out by the vacuum pump 801 to maintain a high vacuum inside the vacuum box 3 . When a certain electron emission unit is damaged or needs to be replaced at the end of its life, nitrogen is injected into the vacuum box 3 from the vacuum valve 802 to form protection; in the shortest time, the electron emission unit to be replaced is removed and a new electron emission unit is installed; vacuum The valve 802 is connected to an external vacuum pumping device to evacuate the vacuum box 3; when the inside of the vacuum box 3 reaches a high vacuum again, the vacuum valve 802 is closed to keep the inside of the vacuum box 3 at a high vacuum.
此外，需要特别指出的是，在本发明的外置热阴极分布式X射线装置中，电子发射单元1可以排列在真空盒3的一个侧壁上，也可以在真空盒3的两个相对侧壁上按相同的延展方向同时排列。在图13中示出了一种直线形双排对置布置的外置热阴极分布式X射线装置的结构，（A）是电子发射单元1、阳极2与真空盒3的位置关系的图，（B）是电子发射单元1与阳极2的位置关系的图。如图13（A）所示，多个电子发射单元1分两排分别布置在真空盒3的两个相对侧壁上，阳极2布置在真空盒3内的中部。如图13（B）所示，阳极2与两排电子发射单元1所相对的面均为斜面，电子发射单元1产生的电子束流E受到电子发射单元1与阳极2之间的电场加速，轰击阳极2的斜面，产生X射线，有用的X射线的出射方向为阳极2斜面的倾斜方向。因为两排电子发射单元1相对布置，所以，阳极2有两个斜面，两个斜面产生的X射线向相同的方向出射。In addition, it should be pointed out that, in the distributed X-ray device with external hot cathode of the present invention, the electron emission unit 1 can be arranged on one side wall of the vacuum box 3, or on two opposite sides of the vacuum box 3 The walls are arranged simultaneously in the same extension direction. Figure 13 shows the structure of a distributed X-ray device with external hot cathodes in a linear double-row arrangement, (A) is a diagram of the positional relationship between the electron emission unit 1, the anode 2 and the vacuum box 3, (B) is a diagram showing the positional relationship between the electron emission unit 1 and the anode 2 . As shown in FIG. 13(A), a plurality of electron emission units 1 are arranged in two rows on two opposite side walls of the vacuum box 3 , and the anode 2 is arranged in the middle of the vacuum box 3 . As shown in Fig. 13(B), the surfaces facing the anode 2 and the two rows of electron emission units 1 are inclined surfaces, and the electron beam E generated by the electron emission unit 1 is accelerated by the electric field between the electron emission unit 1 and the anode 2, The slope of the anode 2 is bombarded to generate X-rays, and the emission direction of the useful X-rays is the inclined direction of the slope of the anode 2 . Because the two rows of electron emission units 1 are arranged oppositely, the anode 2 has two slopes, and the X-rays generated by the two slopes are emitted in the same direction.
此外，需要特别指出的是，本发明的外置热阴极分布式X射线装置可以是直线型排列，也可以是圆弧型排列，从而满足不同的应用需求。在图14中示出了本发明的圆弧型外置热阴极分布式X射线装置的电子发射单元1和阳极2的位置关系的示意图。两排电子发射单元1沿圆周布置，分别布置在真空盒3的两个相对侧面上，这两个侧面互相平行，电子发射单元1排列的延展方向为弧线，布置的弧度大小可以根据需要确定。阳极2布置在真空盒3内的中部，即两排相对的电子发射单元1的中间，阳极2面对两排电子发射单元1的表面均为斜面，两斜面的倾斜方向均指向圆弧的中心O。电子束流E从电子发射单元1的上表面发射出来，受到阳极2与电子发射单元1之间的高压电场加速，最终轰击阳极2，在阳极2的两个斜面上形成两排圆弧形排列的系列X射线靶点，有用的X射线的出射方向指向圆弧的中心。关于圆弧型外置热阴极分布式X射线装置的真空盒3，与电子发射单元1的布置和阳极2的形状对应地也是圆弧型，或者称为环形。圆弧型分布式X射线装置的出射X射线都指向圆弧的圆心，能够应用于需要射线源圆形排列的情况。In addition, it should be pointed out that the distributed X-ray device with external hot cathodes of the present invention can be arranged in a straight line or an arc, so as to meet different application requirements. FIG. 14 shows a schematic diagram of the positional relationship between the electron emission unit 1 and the anode 2 of the arc-shaped external hot cathode distributed X-ray device of the present invention. Two rows of electron emission units 1 are arranged along the circumference, and are respectively arranged on two opposite sides of the vacuum box 3. These two sides are parallel to each other. The extension direction of the arrangement of electron emission units 1 is an arc, and the arc size of the arrangement can be determined according to needs. . The anode 2 is arranged in the middle of the vacuum box 3, that is, in the middle of two opposite rows of electron emission units 1, and the surfaces of the anode 2 facing the two rows of electron emission units 1 are inclined planes, and the inclination directions of the two inclined planes point to the center of the arc O. The electron beam E is emitted from the upper surface of the electron emission unit 1, accelerated by the high-voltage electric field between the anode 2 and the electron emission unit 1, and finally bombards the anode 2, forming two rows of circular arcs on the two slopes of the anode 2 A series of X-ray targets, the exit direction of useful X-rays points to the center of the arc. Regarding the vacuum box 3 of the arc-shaped external hot cathode distributed X-ray device, corresponding to the arrangement of the electron emission unit 1 and the shape of the anode 2, it is also arc-shaped, or called a ring. The outgoing X-rays of the arc-type distributed X-ray device all point to the center of the arc, which can be applied to the situation where a circular arrangement of radiation sources is required.
此外，需要特别指出的是，在外置热阴极分布式X射线装置中，各电子发射单元的排列可以是直线形，也可以是例如L形或者U形等分段直线形，此外，各电子发射单元的排列可以是弧形，还可以是分段弧线形，例如，由不同直径的弧形段连接而成的曲线或者直线段与弧线段的组合等。In addition, it needs to be pointed out that in the distributed X-ray device with external hot cathodes, the arrangement of the electron emission units can be linear, or segmented linear such as L-shape or U-shape. In addition, each electron emission unit The arrangement of units may be arc or segmented arc, for example, a curve formed by connecting arc segments of different diameters or a combination of straight line segments and arc segments.
此外，需要特别指出的是，在本发明的外置热阴极分布式X射线装置中，各电子发射单元的排列间距可以是均匀的，也可以是非均匀的。In addition, it should be pointed out that, in the distributed X-ray device with external hot cathode of the present invention, the arrangement pitch of each electron emission unit can be uniform or non-uniform.
此外，在本发明中也能够采用二维阵列分布的方式来配置电子发射单元，由此，能够得到二维阵列分布式X射线装置。如图15、16所示，二维阵列分布式X射线装置具有多个电子发射单元1（至少四个，以后也具体地称为电子发射单元11a、12a、13a、14a、……、电子发射单元11b、12b、13b、14b、……），电子发射单元可以是如前所述的电子发射单元的任意一种，阳极2由阳极板201和安装在阳极板201上并且与电子发射单元1对应排列的多个靶子202组成，但是，阳极2并不限于该结构，使用本领域内通常的阳极即可。此外，多个电子发射单元1以二维排列的方式配置在真空盒3的一个侧壁上，并且与阳极板201所在的平面互相平行。此外，如前所述那样，电子发射单元1整体处于真空盒3的外部，而阳极2设置在真空盒3的内部。In addition, in the present invention, the electron emission units can also be arranged in a two-dimensional array distribution manner, thus, a two-dimensional array distributed X-ray device can be obtained. As shown in Figures 15 and 16, the two-dimensional array distributed X-ray device has a plurality of electron emission units 1 (at least four, hereafter specifically referred to as electron emission units 11a, 12a, 13a, 14a, ..., electron emission units unit 11b, 12b, 13b, 14b, ...), the electron emission unit can be any one of the electron emission unit as mentioned above, the anode 2 is installed on the anode plate 201 by the anode plate 201 and is connected with the electron emission unit 1 A plurality of targets 202 arranged correspondingly, however, the anode 2 is not limited to this structure, and a common anode in the field can be used. In addition, a plurality of electron emission units 1 are arranged two-dimensionally on a side wall of the vacuum box 3 and parallel to the plane where the anode plate 201 is located. In addition, as mentioned above, the electron emission unit 1 is located outside the vacuum box 3 as a whole, and the anode 2 is arranged inside the vacuum box 3 .
在图15中示出了电子发射单元1和阳极2的空间布置的结构示意图（此处，省略了真空盒3的图示）。电子发射单元1分成两排布置在一个平面（即，真空盒3的一个侧壁）上，并且，前后排的电子发射单元1交错排列（参见图15），但是并不限于此，即便前后排的电子发射单元不彼此交错也可以。阳极2上的靶子202与电子发射单元1一一对应，靶子202的顶面指向电子发射单元1，电子发射单元1的中心与靶子202的中心的连线垂直于阳极板201的平面，此连线也是电子发射单元1所发射的电子束流E的运动路径。电子轰击靶子产生X射线，有用的X射线的出射方向平行于阳极板201的平面，并且，各有用的X射线互相平行。FIG. 15 shows a schematic structural view of the spatial arrangement of the electron emission unit 1 and the anode 2 (here, the illustration of the vacuum box 3 is omitted). The electron emission units 1 are arranged in two rows on a plane (that is, a side wall of the vacuum box 3), and the electron emission units 1 in the front and rear rows are arranged in a staggered manner (see FIG. 15 ), but it is not limited thereto, even if the front and rear rows The electron emission units may not be interlaced with each other. The target 202 on the anode 2 corresponds to the electron emission unit 1 one by one, the top surface of the target 202 points to the electron emission unit 1, and the connection line between the center of the electron emission unit 1 and the center of the target 202 is perpendicular to the plane of the anode plate 201, and this connection The line is also the movement path of the electron beam E emitted by the electron emission unit 1 . The electrons bombard the target to generate X-rays, and the emission direction of the useful X-rays is parallel to the plane of the anode plate 201, and each useful X-ray is parallel to each other.
在图16中示出了阳极2的一种结构。阳极2包括：阳极板201；二维阵列分布的多个靶子202。阳极板201为平板，由金属材料制成，并且优选是耐高温的金属材料，与电子发射单元1的上表面所构成的平面完全平行，当在阳极2上施加有正的高压时，通常为几十kV到几百kV，典型的例如180kV，从而在阳极板201和电子发射单元1之间形成平行的高压电场。靶子202安装在阳极板201上，其位置以分别与电子发射单元1的位置对应的方式布置，靶子202的表面通常使用耐高温的重金属材料，例如钨或者钨合金。靶子202为圆形锥台结构，高度通常为几mm，例如3mm，直径较大的底面与阳极板201连接，顶面的直径较小，通常为几mm，例如2mm，顶面不与阳极板201平行，通常有一个几度至十几度的小的夹角，便于电子打靶所产生的有用X射线发射出来。所有的靶子202以顶面倾斜方向一致的方式进行布置，也即所有的有用X射线的出射方向一致。靶子的这种结构设计，相当于在阳极板201上长出的小突起，改变了阳极板201的表面的局部电场分布，使得电子束在轰击靶子前具有自动聚焦的效果，使得靶点变小，有利于提高图像质量。在阳极的设计中，阳极板201使用普通金属，只有靶子202的表面为钨或者钨合金，因此降低了成本。A structure of the anode 2 is shown in FIG. 16 . The anode 2 includes: an anode plate 201; a plurality of targets 202 distributed in a two-dimensional array. The anode plate 201 is a flat plate made of a metal material, preferably a high temperature resistant metal material, completely parallel to the plane formed by the upper surface of the electron emission unit 1, when a positive high voltage is applied to the anode 2, usually Tens of kV to several hundreds of kV, typically 180 kV, so as to form a parallel high-voltage electric field between the anode plate 201 and the electron emission unit 1 . The target 202 is installed on the anode plate 201, and its positions are arranged in a manner corresponding to the position of the electron emission unit 1. The surface of the target 202 is usually made of high temperature resistant heavy metal material, such as tungsten or tungsten alloy. The target 202 is a circular truncated cone structure with a height of several mm, such as 3mm. The bottom surface with a larger diameter is connected to the anode plate 201, and the diameter of the top surface is small, usually several mm, such as 2mm. The top surface is not connected to the anode plate. 201 are parallel, usually with a small angle of a few degrees to more than ten degrees, which is convenient for the useful X-rays generated by electronic targeting to be emitted. All the targets 202 are arranged in such a manner that the inclination directions of the top surfaces are the same, that is, the emission directions of all useful X-rays are the same. This structural design of the target is equivalent to a small protrusion growing on the anode plate 201, which changes the local electric field distribution on the surface of the anode plate 201, so that the electron beam has an automatic focusing effect before bombarding the target, making the target point smaller , which is beneficial to improve the image quality. In the design of the anode, common metal is used for the anode plate 201, and only the surface of the target 202 is made of tungsten or tungsten alloy, thus reducing the cost.
此外，在本发明中，电子发射单元可以是栅极和阴极分离的结构。在图17中示出了一种栅极和阴极分离的电子发射单元阵列。在图17中，平板栅极9由绝缘骨架板901、栅板902、栅网903、栅极引线904组成。如图所示，栅板902设置于绝缘骨架板901，并且，栅网903设置于在栅板902上形成的开孔的位置，栅极引线904从栅板902引出。阴极阵列10由多个阴极结构紧密排列组成，每个阴极结构由灯丝1001、阴极1002、绝缘支撑件1004构成。平板栅极9处于阴极阵列10的上方并且这二者的距离很小，通常为几mm，例如3mm。由栅板902、栅网903、栅极引线904构成的栅极结构与阴极结构一一对应，并且，从垂直方向观察，各个栅网903的圆中心与各个阴极1002的圆中心两两重合。In addition, in the present invention, the electron emission unit may be a structure in which the grid and the cathode are separated. In FIG. 17, an electron emission cell array having a grid and a cathode separated is shown. In FIG. 17 , the flat grid 9 is composed of an insulating skeleton plate 901 , a grid plate 902 , a grid 903 , and grid leads 904 . As shown in the figure, the grid plate 902 is disposed on the insulating frame plate 901 , and the grid 903 is disposed at the position of the opening formed on the grid plate 902 , and the grid lead 904 is drawn out from the grid plate 902 . The cathode array 10 is composed of multiple cathode structures closely arranged, and each cathode structure is composed of a filament 1001 , a cathode 1002 , and an insulating support 1004 . The flat grid 9 is above the cathode array 10 and the distance between the two is very small, usually several mm, for example 3mm. The grid structure composed of the grid plate 902 , the grid 903 , and the grid leads 904 corresponds to the cathode structure one by one, and, viewed from the vertical direction, the circle center of each grid 903 coincides with the circle center of each cathode 1002 two by two.
此外，如图17（B）所示，在本发明中，栅极结构可以是各个栅极引线独立引出并且由栅极控制装置独立进行状态控制的结构。阴极阵列10的各个阴极1002可以处于相同电位例如接地，每一个栅极在负几百伏与正几千伏两个状态切换，例如在－500V和+2000V之间切换，从而控制各个电子发射单元的工作状态，例如，某个栅极在某时刻为－500V，则该栅极与对应的阴极之间的电场为负电场，从阴极发射的电子被限制在阴极的表面，在下一时刻栅极电压变为+2000V时，该栅极与对应阴极之间的电场变为正电场，从阴极发射的电子向栅极运动并且穿过栅网，发射到栅极与阳极之间的加速电场中，获得加速并且最终轰击阳极，在对应的靶子位置产生X射线。In addition, as shown in FIG. 17(B), in the present invention, the gate structure may be a structure in which each gate lead is drawn out independently and the state is independently controlled by the gate control device. Each cathode 1002 of the cathode array 10 can be at the same potential, such as grounding, and each grid can be switched between negative hundreds of volts and positive several thousand volts, for example, switching between -500V and +2000V, so as to control each electron emission unit For example, if a grid is -500V at a certain moment, the electric field between the grid and the corresponding cathode is a negative electric field, and the electrons emitted from the cathode are confined to the surface of the cathode, and at the next moment the grid When the voltage changes to +2000V, the electric field between the grid and the corresponding cathode becomes a positive electric field, and the electrons emitted from the cathode move to the grid and pass through the grid, and are emitted into the accelerated electric field between the grid and the anode. Accelerated and eventually bombarded the anode, generating X-rays at the corresponding target location.
此外，如图17（C）所示，栅极也可以是各个栅极引线并联，处于同一电位，由灯丝电源来控制各个电子发射单元的工作状态。例如所有的栅极处于－500V，各个阴极灯丝独立引出，每个阴极灯丝的两个端点之间的电压差恒定，每个阴极的整体电压在0V与－2500V两个状态之间切换。在某时刻，阴极处于0V电位，栅极与阴极之间为负电场，从阴极发射的电子被限制在阴极的表面，在下一时刻，阴极的电压变为－2500V，栅极与对应阴极之间的电场变为正电场，从阴极发射的电子向栅极运动并且穿过栅网，发射到栅极与阳极之间的加速电场中，获得加速并且最终轰击靶子，在对应的靶子位置产生X射线。In addition, as shown in FIG. 17(C), the gates can also be connected in parallel with each grid lead at the same potential, and the working state of each electron emission unit is controlled by the filament power supply. For example, all the grids are at -500V, each cathode filament is drawn out independently, the voltage difference between the two terminals of each cathode filament is constant, and the overall voltage of each cathode is switched between 0V and -2500V. At a certain moment, the cathode is at a potential of 0V, and there is a negative electric field between the grid and the cathode. The electrons emitted from the cathode are confined to the surface of the cathode. At the next moment, the voltage of the cathode becomes -2500V, and there The electric field becomes a positive electric field, the electrons emitted from the cathode move to the grid and pass through the grid, and are emitted into the accelerating electric field between the grid and the anode, get accelerated and finally bombard the target, generating X-rays at the corresponding target position .
此外，在本发明的二维分布式X射线装置中，各电子发射单元的灯丝引线可以是各自独立连接到灯丝电源的各个输出端，也可以是串联连接之后整体连接到灯丝电源的一个输出端。在图18中示出一种电子发射单元的灯丝引线串联连接到灯丝电源的示意图。在电子发射单元的灯丝引线串联连接的系统中，通常阴极都处于相同的电位，各个栅极引线需要独立引出，通过栅极控制装置来控制电子发射单元的工作状态。In addition, in the two-dimensional distributed X-ray device of the present invention, the filament lead wires of each electron emission unit can be independently connected to each output end of the filament power supply, or connected in series to one output end of the filament power supply as a whole . FIG. 18 shows a schematic diagram of a filament lead wire of an electron emission unit connected in series to a filament power supply. In a system in which the filament leads of the electron emission unit are connected in series, the cathodes are usually at the same potential, and each grid lead needs to be drawn out independently, and the working state of the electron emission unit is controlled by the grid control device.
此外，在本发明中，电子发射单元的阵列可以是二排也可以是多排。In addition, in the present invention, the array of electron emission units may be two or more rows.
此外，在本发明的中，阳极的靶子可以是圆形锥台结构，也可以是圆柱结构，可以方台结构，还可以是多棱台结构，或者其它多边形凸起，或者其它不规则凸起等结构。In addition, in the present invention, the target of the anode can be a circular truncated cone structure, a cylindrical structure, a square truncated structure, a polygonal truncated structure, or other polygonal protrusions, or other irregular protrusions. and other structures.
此外，在本发明中，阳极的靶子的顶面可以是平面，也可以是斜面、还可以是球面、或者其它不规则的表面。In addition, in the present invention, the top surface of the target of the anode may be a flat surface, an inclined surface, a spherical surface, or other irregular surfaces.
此外，在本发明中，电子发射单元的二维阵列排布可以是两个方向均为直线伸展，也可以是一个方向为直线伸展而另一个方向为弧线伸展，也可以是一个方向为直线伸展而另一个方向为分段直线伸展，还可以是一个方向为直线伸展而另一个方向为分段弧形伸展等多种组合形式。In addition, in the present invention, the two-dimensional array arrangement of electron emission units can be straight in both directions, or can be straight in one direction and arc in the other direction, or can be straight in one direction. Stretching while the other direction is segmented straight line stretching, can also be that one direction is straight line stretching and another direction is multiple combination forms such as segmental arc stretching.
此外，在本发明中，电子发射单元的二维阵列排布可以是两个方向间隔均匀一致的，可以是每个方向间隔均匀而两个方向间隔不一致的，也可以是一个方向间隔均匀而另一个方向间隔不均匀的，还可以是两个方向的间隔都不均匀的。In addition, in the present invention, the two-dimensional array arrangement of the electron emission units may be uniformly spaced in two directions, may be uniformly spaced in each direction but inconsistent in two directions, or may be uniformly spaced in one direction and not uniformly spaced in the other direction. The spacing in one direction is uneven, and the spacing in two directions can also be uneven.
此外，在本发明中，电子发射单元也能够以曲面阵列分布的方式设置，由此，能够得到曲面阵列分布式X射线装置。图19是本发明的曲面阵列分布式X射线装置的结构示意图。图20是本发明的曲面阵列分布式X射线装置内部结构的端面示意图。图21是本发明的阳极的不同结构的示意图。In addition, in the present invention, the electron emission units can also be arranged in a curved array distribution manner, thus, a curved array distributed X-ray device can be obtained. Fig. 19 is a schematic structural view of the curved surface array distributed X-ray device of the present invention. Fig. 20 is a schematic end view of the internal structure of the curved array distributed X-ray device of the present invention. Figure 21 is a schematic diagram of different configurations of the anode of the present invention.
如图所示，多个电子发射单元1（至少四个，以后也具体地称为电子发射单元11a、11b、12a、12b、13a、13b、14a、14b 、……）在曲面上沿着轴线方向面向轴线O排列多排，此外，阳极2布置在曲面的轴线O上。此外，如前所述那样，电子发射单元1安装在真空盒3的盒壁上，并且整体处于真空盒3的外部，而阳极2安装在真空盒内。As shown in the figure, a plurality of electron emission units 1 (at least four, hereafter also specifically referred to as electron emission units 11a, 11b, 12a, 12b, 13a, 13b, 14a, 14b, ...) are along the axis on the curved surface The direction is arranged in multiple rows facing the axis O, and in addition, the anodes 2 are arranged on the axis O of the curved surface. In addition, as mentioned above, the electron emission unit 1 is installed on the box wall of the vacuum box 3, and the whole is outside the vacuum box 3, and the anode 2 is installed inside the vacuum box.
此外，上述的曲面包括圆柱面和圆环面。图20是本发明的一种曲面阵列分布式X射线装置的内部结构的端面示意图，具体地说，在图20中示出了一种圆柱面阵列分布式X射线装置的内部结构的示意图。电子发射单元1在圆柱面上沿着轴线方向排列多排，并且，电子发射单元1的上表面（电子发射面）面向轴线O。阳极2布置在圆柱的轴线O上。通常，电子发射单元1处于相同的低电位，阳极2处于高电位，在阳极2与电子发射单元1之间构成正电场，电场从各电子发射单元1的表面向阳极2的轴线汇聚，电子束流E从电子发射单元1向阳极2的轴线运动，轰击阳极2，最终产生X射线。In addition, the above-mentioned curved surfaces include cylindrical surfaces and toroidal surfaces. Fig. 20 is a schematic end view of the internal structure of a curved surface array distributed X-ray device of the present invention, specifically, Fig. 20 shows a schematic view of the internal structure of a cylindrical surface array distributed X-ray device. The electron emission units 1 are arranged in rows along the axis direction on the cylindrical surface, and the upper surface (electron emission surface) of the electron emission units 1 faces the axis O. The anode 2 is arranged on the axis O of the cylinder. Usually, the electron emission unit 1 is at the same low potential, the anode 2 is at a high potential, a positive electric field is formed between the anode 2 and the electron emission unit 1, and the electric field converges from the surface of each electron emission unit 1 to the axis of the anode 2, and the electron beam The stream E moves from the electron emission unit 1 to the axis of the anode 2, bombards the anode 2, and finally generates X-rays.
此外，上述的电子发射单元1在曲面上沿着轴线方向面向轴线排列多排，多排电子发射单元可以是前后排对齐，也可以是推荐的前后排位置错开，使得每一个电子发射单元产生的电子束轰击阳极的位置是不重合的。In addition, the above-mentioned electron emission units 1 are arranged in multiple rows along the axial direction facing the axis on the curved surface. The electron emission units of the multiple rows may be aligned in the front and rear rows, or may be staggered in the recommended front and rear rows, so that each electron emission unit generates The positions where the electron beams strike the anode are misaligned.
此外，阳极2具有中空管道状的结构，能够使冷却剂在其内部流动。在图21中示出了本发明中的一种阳极及其支撑件的结构。阳极2由阳极支撑件201A、阳极管道202A、阳极靶面203A组成。阳极支撑件201A安装在阳极管道202A上并且与高压电源连接装置4的顶端（小端）连接在一起，用于对阳极2进行支撑以及固定。阳极管道202A是阳极2的主体结构，两端分别与两个冷却连接装置9A的一端连接，并且内部与冷却连接装置9A连通，成为冷却剂的循环流动的通道。阳极管道202A通常选用耐高温的金属材料，有多种结构方式，推荐为圆形的管道。此外，在某些情况下，例如阳极热功率较小的情况下，阳极2也可以是非中空管道的柱形结构。此外，阳极靶面203A是电子束轰击阳极管道202A的位置，在细微结构上有多种设计，例如，如图21（1）所示，阳极管道202A的外圆面就是电子束的轰击位置，在此种情况下，阳极管道202A整体采用耐高温重金属材料，例如，钨或者钨合金，如图21（2）所示，阳极管道202A的外圆被切除一部分而形成一个小的斜平面，该斜平面成为电子束的轰击位置，该斜平面的倾斜方向为有用的X射线的出射方向，这种结构设计有利于有用的X射线的方向一致引出，优选的是，如图21（3）所示，在阳极管道202A的外表面专门设计有阳极靶面203A，阳极靶面203A采用耐高温重金属材料，例如钨或者钨合金，厚度不小于20μm（微米），通过电镀、粘贴、焊接或者其它方式被固定在阳极管道202A的外沿加工出的小斜平面上，在此种情况下，阳极管道202A可以采用普通金属材料，从而能够降低成本。In addition, the anode 2 has a hollow pipe-like structure, and a coolant can flow therein. The structure of an anode and its support in the present invention is shown in FIG. 21 . The anode 2 is composed of an anode support 201A, an anode pipe 202A, and an anode target surface 203A. The anode support 201A is installed on the anode pipe 202A and connected with the top (small end) of the high voltage power supply connection device 4 for supporting and fixing the anode 2 . The anode pipe 202A is the main structure of the anode 2, and its two ends are respectively connected to one end of the two cooling connection devices 9A, and the inside communicates with the cooling connection device 9A to become a circulation channel for coolant. The anode pipe 202A is usually made of high-temperature-resistant metal material, and has various structures, and it is recommended to be a circular pipe. In addition, in some cases, such as the case where the thermal power of the anode is small, the anode 2 can also be a columnar structure that is not a hollow pipe. In addition, the anode target surface 203A is the position where the electron beam bombards the anode pipe 202A, and there are various designs in the fine structure, for example, as shown in Figure 21 (1), the outer circular surface of the anode pipe 202A is the bombardment position of the electron beam, In this case, the anode pipe 202A is made of high-temperature-resistant heavy metal material as a whole, such as tungsten or tungsten alloy. As shown in Figure 21 (2), the outer circle of the anode pipe 202A is cut off to form a small inclined plane. The inclined plane becomes the bombardment position of the electron beam, and the inclined direction of the inclined plane is the exit direction of useful X-rays. This structural design is conducive to the consistent extraction of useful X-rays. Preferably, as shown in Figure 21 (3) As shown, an anode target surface 203A is specially designed on the outer surface of the anode pipe 202A. The anode target surface 203A is made of high-temperature-resistant heavy metal materials, such as tungsten or tungsten alloy, with a thickness of not less than 20 μm (microns). It is fixed on the small inclined plane processed on the outer edge of the anode pipe 202A. In this case, the anode pipe 202A can be made of common metal material, thereby reducing the cost.
此外，在本发明中，上述的轴线可以是直线，也可以是圆弧，整体成为线状分布式X射线装置或者环状分布式X射线装置，以满足不同的应用需求。在图22中示出了一种环状分布的电子发射单元和阳极布置的效果图。阳极2布置在一个平面圆周上，电子发射单元1布置在阳极2的下方，两排电子发射单元1按阳极2的方向成圆周排列，同时排列在以阳极2的中心为轴线的圆弧面上，即每个电子发射单元1的表面指向阳极2的轴线。电子束流E从电子发射单元1发射出来，受到阳极2与电子发射单元1之间的高压电场加速，轰击阳极2的下沿靶面，在阳极2上形成圆形排列的阵列X射线靶点，有用的X射线的出射方向都指向阳极2所在圆周的圆心。环状分布式X射线装置的真空盒3与其内部的电子发射单元1的布置和阳极2的形状对应也是一种环型结构。环状分布式X射线装置可以是一个完整的环，也可以是一段环长，可以应用于需要射线源圆形排列的场合。In addition, in the present invention, the above-mentioned axis can be a straight line or a circular arc, and the whole becomes a linear distributed X-ray device or a ring-shaped distributed X-ray device to meet different application requirements. FIG. 22 shows an effect diagram of an arrangement of electron emission units and anodes distributed in a ring. The anode 2 is arranged on a plane circumference, the electron emission unit 1 is arranged under the anode 2, two rows of electron emission units 1 are arranged in a circle along the direction of the anode 2, and are arranged on the arc surface with the center of the anode 2 as the axis , that is, the surface of each electron emission unit 1 is directed toward the axis of the anode 2 . The electron beam E is emitted from the electron emission unit 1, accelerated by the high-voltage electric field between the anode 2 and the electron emission unit 1, and bombards the lower edge target surface of the anode 2, forming a circular array of X-ray targets on the anode 2 , the outgoing directions of useful X-rays all point to the center of the circle where the anode 2 is located. The vacuum box 3 of the ring-shaped distributed X-ray device is also a ring structure corresponding to the arrangement of the electron emission units 1 and the shape of the anode 2 inside it. The annular distributed X-ray device can be a complete ring or a section of ring length, and can be applied to occasions that require a circular arrangement of radiation sources.
此外，在本发明中，电子发射单元的阵列可以是两排也可以是多排。In addition, in the present invention, the array of electron emission units may be two or more rows.
此外，在本发明中对电子发射单元的描述中，“独立”是指每个电子发射单元具有独立发射电子束流的能力，在具体结构上可以是分立的结构，也可以是某种关联连接的结构。In addition, in the description of the electron emission unit in the present invention, "independent" means that each electron emission unit has the ability to independently emit electron beams, and the specific structure can be a discrete structure, or some kind of associated connection Structure.
此外，本发明的曲面阵列分布式X射线装置的描述中，“曲面”是指各种形式的曲面，包括圆柱面、圆环面、椭圆面、或者分段直线构成的曲面，例如正多边形柱面或者分段弧线构成的曲面等，推荐的是如前面所述的圆柱面和圆环面。In addition, in the description of the curved surface array distributed X-ray device of the present invention, "curved surface" refers to various forms of curved surfaces, including cylindrical surfaces, toroidal surfaces, elliptical surfaces, or curved surfaces composed of segmented straight lines, such as regular polygonal columns Surfaces or curved surfaces composed of segmented arcs, etc., are recommended to be cylindrical surfaces and toroidal surfaces as mentioned above.
此外，本发明中对阳极布置位置的描述中，“轴线”是指电子发射单元所布置的各种形式的曲面的真实轴线或者形式轴线，例如圆柱面的轴线是指圆柱的中心轴线，圆环面的轴线是指圆环内部的中心轴线，椭圆曲面的轴线是指靠近该段椭圆的近轴轴线，正多边形柱面的轴线是指正多边形的中心所构成的轴线。In addition, in the description of the anode arrangement position in the present invention, "axis" refers to the real axis or formal axis of the various forms of curved surfaces on which the electron emission unit is arranged. For example, the axis of a cylindrical surface refers to the central axis of the cylinder, and The axis of the surface refers to the central axis inside the ring, the axis of the ellipse surface refers to the paraxial axis close to the segment of the ellipse, and the axis of the regular polygon cylinder refers to the axis formed by the center of the regular polygon.
此外，在本发明中，阳极内部管道切面可以是圆形孔、方形孔、多边形孔、带散热片结构的内齿轮状孔、或者能增加散热面积的其它形状。In addition, in the present invention, the cut surface of the anode internal pipe can be a circular hole, a square hole, a polygonal hole, an internal gear-shaped hole with a fin structure, or other shapes that can increase the heat dissipation area.
此外，在本发明中，电子发射单元的曲面阵列排布在一个排列方向为曲线而在另一个排列方向为直线、分段直线、弧线、分段弧线、或者直线段与弧线段的组合。In addition, in the present invention, the curved surface array of electron emission units is arranged as a curve in one arrangement direction and as a straight line, a segmented straight line, an arc, a segmented arc, or a combination of a straight line segment and an arc segment in the other arrangement direction. combination.
此外，在本发明中，电子发射单元的曲面阵列排布可以是两个方向间隔均匀一致的，可以是每个方向间隔均匀，两个方向间隔不一致的，也可以是一个方向间隔均匀，另一个方向间隔不均匀的，还可以是两个方向的间隔都不均匀的。In addition, in the present invention, the arrangement of the curved surface array of the electron emission units may be uniformly spaced in two directions, may be uniformly spaced in each direction, and inconsistently spaced in two directions, or may be uniformly spaced in one direction and spaced in the other. If the intervals in the directions are uneven, the intervals in the two directions may also be uneven.
此外，在本发明中，真空盒的外形整体上可以是长方体形，也可以是圆柱体形，也可以是圆环体形，还可以是其它不影响电子发射单元与阳极的相对布置关系的其它结构。In addition, in the present invention, the overall shape of the vacuum box can be cuboid, cylinder, torus, or other structures that do not affect the relative arrangement of the electron emission unit and the anode.
实施例Example
（系统组成）(system composition)
如图1～图6所示，本发明的外置热阴极分布式X射线装置由多个电子发射单元1、阳极2、真空盒3、高压电源连接装置4、发射控制装置连接装置5、聚焦装置连接装置6、真空装置8以及电源与控制系统7组成。多个电子发射单元1排成线形阵列安装在真空盒3的一个侧壁上，每个电子发射单元1互相独立，长条形的阳极2安装在真空盒3内的中部，在线型排列方向上，阳极2与电子发射单元1的排列线互相平行，在线型排列的垂直切面，阳极2与电子发射单元1的上表面形成一个小的夹角。电子发射单元1包括加热灯丝101、阴极102、栅极107、绝缘支撑件103、聚焦极104、聚焦段109、连接固定件105、灯丝引线106、栅极引线108、聚焦装置110。高压电源连接装置4安装在真空盒3的侧壁上，内部与阳极2相连，外部以可插拔的形式连接高压电缆。发射控制装置连接装置5将每一个电子发射单元1的灯丝引线106和栅极引线108连接到发射控制装置703的每一个发射控制单元。真空装置8安装在真空盒3的侧壁上，真空装置8包括真空泵801和真空阀802。电源与控制系统7包括控制系统701、高压电源702、发射控制装置703、聚焦电源704、真空电源705等多个模块，通过电力电缆和控制电缆与系统的多个电子发射单元1的加热灯丝101、栅极107以及阳极2、真空装置8等部件相连接。其中发射控制装置703由多个（与电子发射单元1的数量相同）相同的发射控制单元构成，每一个发射控制单元由负高压模块70301、直流模块70302、高压隔离变压器70303、负偏压模块70304、正偏压模块70305、选择开关70306组成。As shown in Figures 1 to 6, the external hot cathode distributed X-ray device of the present invention consists of multiple electron emission units 1, anode 2, vacuum box 3, high voltage power supply connection device 4, emission control device connection device 5, focusing The device connection device 6, the vacuum device 8 and the power supply and control system 7 are composed. A plurality of electron emission units 1 are arranged in a linear array and installed on a side wall of the vacuum box 3, each electron emission unit 1 is independent of each other, and the strip-shaped anode 2 is installed in the middle of the vacuum box 3, in the direction of the linear arrangement , the arrangement lines of the anode 2 and the electron emission unit 1 are parallel to each other, and the anode 2 forms a small angle with the upper surface of the electron emission unit 1 in the vertical section of the linear arrangement. The electron emission unit 1 includes a heating filament 101 , a cathode 102 , a grid 107 , an insulating support 103 , a focusing electrode 104 , a focusing section 109 , a connecting fixture 105 , a filament lead 106 , a grid lead 108 , and a focusing device 110 . The high-voltage power supply connection device 4 is installed on the side wall of the vacuum box 3, the inside is connected with the anode 2, and the outside is connected with a high-voltage cable in a pluggable form. The emission control device connection means 5 connects the filament lead 106 and the grid lead 108 of each electron emission unit 1 to each emission control unit of the emission control means 703 . The vacuum device 8 is installed on the side wall of the vacuum box 3 , and the vacuum device 8 includes a vacuum pump 801 and a vacuum valve 802 . The power supply and control system 7 includes multiple modules such as a control system 701, a high-voltage power supply 702, an emission control device 703, a focusing power supply 704, and a vacuum power supply 705. The heating filaments 101 of multiple electron emission units 1 of the system are connected through power cables and control cables. , grid 107 and anode 2, vacuum device 8 and other components are connected. The emission control device 703 is composed of multiple identical emission control units (the same number as the electron emission unit 1), and each emission control unit is composed of a negative high voltage module 70301, a DC module 70302, a high voltage isolation transformer 70303, and a negative bias voltage module 70304 , Positive bias module 70305, selection switch 70306.
（工作原理）(working principle)
在本发明的外置热阴极分布式X射线装置中，电源与控制系统7对聚焦电源704、发射控制装置703与高压电源702进行控制。发射控制装置703的各个单元开始工作，负高压模块70301产生负高压输出到高压隔离变压器70303的原边，使得高压隔离变压器70303副边的一组并联端悬浮在高压上，即直流模块70302、负偏压模块70304、正偏压模块70305、选择开关70306均处于一个相同的负高压上，直流模块70302产生一个悬浮于此负高压上的直流电流供给到加热灯丝101，加热灯丝101将阴极102加热到高温（例如，500~2000℃）发射状态，阴极102在其表面产生大量电子。负偏压模块70304和正偏压模块70305分别产生一个悬浮于负高压上的负电压和正电压，选择开关70306通常将负电压选通连接到栅极107。在电子发射单元1内，灯丝101、阴极102与栅极107均处于负高压，通常为负的几千伏到负的几十千负，而聚焦极104连接聚焦段109并通过连接固定件105连接到真空盒3的侧壁，处于接地电位，所以，在栅极107与聚焦极104之间形成一个小的加速电场。但是，栅极107相对阴极102还具有一个更低的负电压，因此，阴极102产生的电子不能通过栅极107，被栅极107限制在阴极102的表面。高压电源702使阳极2处于非常高的正高压，通常为正的几十千伏到几百千伏，在电子发射单元1（也即真空盒3的侧壁，通常接地电位）与阳极2之间形成正的大加速电场。In the distributed X-ray device with external hot cathode of the present invention, the power supply and control system 7 controls the focusing power supply 704 , the emission control device 703 and the high voltage power supply 702 . Each unit of the emission control device 703 starts to work, and the negative high voltage module 70301 generates a negative high voltage output to the primary side of the high voltage isolation transformer 70303, so that a group of parallel terminals of the secondary side of the high voltage isolation transformer 70303 is suspended on the high voltage, that is, the DC module 70302, the negative The bias voltage module 70304, the positive bias voltage module 70305, and the selection switch 70306 are all on the same negative high voltage, and the DC module 70302 generates a DC current suspended on the negative high voltage to supply the heating filament 101, and the heating filament 101 heats the cathode 102 In an emission state at a high temperature (for example, 500~2000° C.), the cathode 102 generates a large amount of electrons on its surface. The negative bias module 70304 and the positive bias module 70305 respectively generate a negative voltage and a positive voltage suspended on the negative high voltage, and the selection switch 70306 normally connects the negative voltage to the gate 107 . In the electron emission unit 1, the filament 101, the cathode 102 and the grid 107 are all at a negative high voltage, usually negative several thousand volts to negative tens of thousands of negative, and the focusing electrode 104 is connected to the focusing section 109 and connected to the fixing part 105. It is connected to the side wall of the vacuum box 3 and is at ground potential, so a small accelerating electric field is formed between the grid 107 and the focusing electrode 104 . However, the grid 107 has a lower negative voltage than the cathode 102 , therefore, electrons generated by the cathode 102 cannot pass through the grid 107 and are confined on the surface of the cathode 102 by the grid 107 . The high-voltage power supply 702 keeps the anode 2 at a very high positive high voltage, usually tens of kilovolts to hundreds of kilovolts positive, between the electron emission unit 1 (that is, the side wall of the vacuum box 3, usually at ground potential) and the anode 2 A large positive accelerating electric field is formed between them.
在需要产生X射线的情况下，电源与控制系统7按照指令或者预先设定程序使发射控制装置703的某一个发射控制单元的选择开关70306的输出由负电压切换为正电压，并且按照时序来变换分别与各电子发射单元1相连接的各发射控制单元的选择开关70306的输出信号。例如，在时刻1，发射控制装置703的第一发射控制单元的选择开关70306的输出由负电压切换为正电压，在对应的电子发射单元11内，栅极107与阴极102之间的电场变为正电场，电子从阴极102的表面向栅极107运动，透过栅网进入到栅极107与聚焦极104之间的加速电场获得第一次加速，聚焦极104的鼻锥形状使电子束在第一次加速过程中自动聚集，电子束的直径变小，电子束进入聚焦段109内部后，受到外部聚焦装置110施加的聚焦磁场作用，电子束的直径进一步变小。小直径的电子束通过连接固定件105中心的孔进入真空盒3内部，受到电子发射单元11与阳极2之间的大加速电场加速，获得能量，轰击阳极2，在阳极2上产生一个靶点21，并且，在靶点21的位置产生X射线的发射。在时刻2，发射控制装置703的第二发射控制单元的选择开关70306的输出由负电压切换为正电压，对应的电子发射单元12发射电子，在阳极2上产生靶点22，并且在靶点22位置产生X射线的发射。在时刻3，发射控制装置703的第三发射控制单元的选择开关70306的输出由负电压切换为正电压，对应的电子发射单元13发射电子，在阳极2上产生靶点23，并且在靶点23位置产生X射线的发射，依次类推，然后靶点24位置产生X射线的发射，然后靶点25位置产生X射线的发射……，并且循环往复。因此，电源与控制系统7利用发射控制装置703使各个电子发射单元1按照预定时序交替地进行工作而发射电子束，并且，在阳极2的不同位置交替地产生X射线，从而成为分布式X射线源。When it is necessary to generate X-rays, the power supply and control system 7 switches the output of the selection switch 70306 of a certain emission control unit of the emission control device 703 from a negative voltage to a positive voltage according to an instruction or a preset program, and the The output signal of the selection switch 70306 of each emission control unit connected to each electron emission unit 1 is switched. For example, at time 1, the output of the selection switch 70306 of the first emission control unit of the emission control device 703 is switched from a negative voltage to a positive voltage, and in the corresponding electron emission unit 11, the electric field between the grid 107 and the cathode 102 becomes For a positive electric field, the electrons move from the surface of the cathode 102 to the grid 107, through the grid and enter the accelerating electric field between the grid 107 and the focusing electrode 104 to obtain the first acceleration, and the nose cone shape of the focusing electrode 104 makes the electron beam During the first acceleration process, the diameter of the electron beam becomes smaller due to automatic focusing. After the electron beam enters the focusing section 109, it is subjected to the focusing magnetic field applied by the external focusing device 110, and the diameter of the electron beam further becomes smaller. The small-diameter electron beam enters the interior of the vacuum box 3 through the hole in the center of the connecting fixture 105, is accelerated by the large accelerating electric field between the electron emission unit 11 and the anode 2, obtains energy, bombards the anode 2, and generates a target point on the anode 2 21, and, the emission of X-rays is generated at the position of the target point 21. At time 2, the output of the selection switch 70306 of the second emission control unit of the emission control device 703 is switched from a negative voltage to a positive voltage, and the corresponding electron emission unit 12 emits electrons, generating a target point 22 on the anode 2, and at the target point The 22 position produces the emission of X-rays. At time 3, the output of the selection switch 70306 of the third emission control unit of the emission control device 703 is switched from a negative voltage to a positive voltage, and the corresponding electron emission unit 13 emits electrons to generate a target point 23 on the anode 2, and at the target point Position 23 generates X-ray emission, and so on, then target point 24 generates X-ray emission, then target point 25 generates X-ray emission..., and the cycle repeats. Therefore, the power supply and control system 7 uses the emission control device 703 to make each electron emission unit 1 work alternately according to a predetermined time sequence to emit electron beams, and X-rays are alternately generated at different positions of the anode 2, thereby becoming a distributed X-ray source.
此外，阳极2受到电子束流轰击时释放的气体被真空泵801实时抽走，真空盒3内维持高真空，这样有利于长时间稳定运行。电源与控制系统7除了对各电源进行控制以使按照设定程序驱动各个部件协调工作，同时可以通过通讯接口和人机界面接收外部命令，对系统的关键参数进行修改和设定，更新程序和进行自动控制调整。In addition, the gas released when the anode 2 is bombarded by the electron beam is pumped away by the vacuum pump 801 in real time, and a high vacuum is maintained in the vacuum box 3, which is conducive to long-term stable operation. The power supply and control system 7 not only controls each power supply to drive each component to work in harmony according to the set program, but also can receive external commands through the communication interface and man-machine interface, modify and set the key parameters of the system, update the program and Make automatic control adjustments.
此外，通过将本发明的外置热阴极分布式X射线装置应用于CT设备，从而能够得到系统稳定性及可靠性好并且检查效率高的CT设备。In addition, by applying the distributed X-ray device with external hot cathodes of the present invention to CT equipment, CT equipment with good system stability and reliability and high inspection efficiency can be obtained.
（效果）(Effect)
本发明主要是提供一种外置热阴极分布式X射线装置，在一个光源设备中产生按照预定顺序周期性地变换焦点位置的X射线。本发明的电子发射单元采用热阴极，相对于其它设计具有发射电流大、寿命长的优点；多个电子发射单元各自独立固定在真空盒上，且可直接使用小型的二极或三极电子枪，技术成熟，成本低，应用灵活；采用长条型大阳极的设计，有效缓解了阳极过热的问题，有利于提高光源的功率；电子发射单元可以直线排列，整体成为直线型分布式X射线装置，电子发射单元也可以环形排列，整体成为环型分布式X射线装置，应用灵活；通过聚焦极的设计，和外部聚焦装置的设计，电子束可是实现非常小的焦点。相对其它分布式X射线光源设备，本发明电流大，靶点小，靶点位置分布均匀且重复性好，输出功率高，结构简单，控制方便，成本低。The present invention mainly provides an external hot cathode distributed X-ray device, which generates X-rays that periodically change the focus position according to a predetermined sequence in a light source device. The electron emission unit of the present invention adopts a hot cathode, which has the advantages of large emission current and long life compared with other designs; multiple electron emission units are independently fixed on the vacuum box, and can directly use a small two-pole or three-pole electron gun, The technology is mature, the cost is low, and the application is flexible; the design of the long and large anode effectively alleviates the problem of overheating of the anode, which is conducive to improving the power of the light source; the electron emission units can be arranged in a straight line, and the whole becomes a linear distributed X-ray device. The electron emission units can also be arranged in a ring, and the whole becomes a ring-shaped distributed X-ray device, which is flexible in application; through the design of the focusing pole and the design of the external focusing device, the electron beam can achieve a very small focus. Compared with other distributed X-ray light source equipment, the present invention has large current, small target point, uniform target point distribution and good repeatability, high output power, simple structure, convenient control and low cost.
此外，将本发明的外置热阴极分布式X射线光源应用于CT设备，无需移动光源就能产生多个视角，因此可以省略滑环运动，有利于简化结构，提高系统稳定性、可靠性，提高检查效率。In addition, applying the external hot cathode distributed X-ray light source of the present invention to CT equipment can generate multiple viewing angles without moving the light source, so the movement of the slip ring can be omitted, which is conducive to simplifying the structure and improving system stability and reliability. Improve inspection efficiency.
如上所述，对本申请发明进行了说明，但是并不限于此，应该理解为能够在本发明宗旨的范围内对上述实施方式进行各种组合以及各种变更。As described above, the invention of the present application has been described, but it is not limited thereto, and it should be understood that various combinations and various changes can be made to the above-described embodiments within the scope of the gist of the invention.
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310600023.1ACN104470172B (en) | 2013-09-18 | 2013-09-18 | X-ray device and CT apparatus having the same |
| KR1020167008295AKR101855931B1 (en) | 2013-09-18 | 2014-09-17 | X-ray device and ct equipment having same |
| PCT/CN2014/086743WO2015039603A1 (en) | 2013-09-18 | 2014-09-17 | X-ray device and ct equipment having same |
| RU2016114671ARU2655916C2 (en) | 2013-09-18 | 2014-09-17 | X-ray device and ct equipment having same |
| JP2016543304AJP6526014B2 (en) | 2013-09-18 | 2014-09-17 | X-ray apparatus and CT device having the X-ray apparatus |
| US14/490,526US9653251B2 (en) | 2013-09-18 | 2014-09-18 | X-ray apparatus and a CT device having the same |
| ES14185376TES2749725T3 (en) | 2013-09-18 | 2014-09-18 | An X-ray machine and a CT device that has the same |
| PL14185376TPL2858087T3 (en) | 2013-09-18 | 2014-09-18 | A X-Ray apparatus and a CT device having the same |
| EP14185376.2AEP2858087B1 (en) | 2013-09-18 | 2014-09-18 | A X-Ray apparatus and a CT device having the same |
| HK15104561.4AHK1204201B (en) | 2015-05-14 | X-ray device and ct equipment provided with same |
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310600023.1ACN104470172B (en) | 2013-09-18 | 2013-09-18 | X-ray device and CT apparatus having the same |
| CN201310426917.3ACN104465279B (en) | 2013-09-18 | 2013-09-18 | X-ray device and CT equipment with the X-ray device |
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310426917.3ADivisionCN104465279B (en) | 2013-09-18 | 2013-09-18 | X-ray device and CT equipment with the X-ray device |
| Publication Number | Publication Date |
|---|---|
| CN104470172Atrue CN104470172A (en) | 2015-03-25 |
| CN104470172B CN104470172B (en) | 2017-08-15 |
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310600023.1AActiveCN104470172B (en) | 2013-09-18 | 2013-09-18 | X-ray device and CT apparatus having the same |
| Country | Link |
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| CN (1) | CN104470172B (en) |
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| Publication number | Publication date |
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| CN104470172B (en) | 2017-08-15 |
| HK1204201A1 (en) | 2015-11-06 |
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