技术领域technical field
本发明属于微电子机械惯性测量领域，尤其涉及一种用于流速、加速度和角速度敏感的仿生毛发传感器。The invention belongs to the field of microelectronic mechanical inertial measurement, in particular to a bionic hair sensor sensitive to flow velocity, acceleration and angular velocity.
背景技术Background technique
微机械惯性仪表包括机械陀螺仪(MMG)和微机械加速度计(MMA)。利用微电子加工工艺将微机械结构与所需的电子线路完全集成在一个硅片上，从而达到性能、价格、体积、重量、可靠性诸方面的高度统一。但要实现同时对加速度和角速率的测量，往往都需要采用陀螺仪和加速度计的组合，增加了系统的复杂度，不利于实现测量装置的小型化，同时也使总体成本上升，不利于检测设备的大规模应用。Micromachined inertial instruments include mechanical gyroscopes (MMG) and micromachined accelerometers (MMA). The micromechanical structure and the required electronic circuits are fully integrated on a silicon chip by using the microelectronic processing technology, so as to achieve a high degree of unity in terms of performance, price, volume, weight, and reliability. However, to achieve simultaneous measurement of acceleration and angular rate, it is often necessary to use a combination of gyroscope and accelerometer, which increases the complexity of the system, is not conducive to the miniaturization of the measurement device, and also increases the overall cost, which is not conducive to detection Large-scale application of equipment.
毛发式传感器是一种新型的潜力巨大的微传感器，它是通过仿生学原理，仿照自然界中的毛发结构进行传感器设计，通过配合现有MEMS工艺技术进行加工，可实现对流速、加速度、角速度等的测量，具有灵敏度和分辨率高、动态范围宽、抗干扰能力强等优点。The hair sensor is a new type of micro sensor with great potential. It uses the principle of bionics to imitate the hair structure in nature for sensor design. By processing with the existing MEMS technology, it can realize the measurement of flow velocity, acceleration, angular velocity, etc. It has the advantages of high sensitivity and resolution, wide dynamic range, and strong anti-interference ability.
近年来，国内外有多家研究机构开始了对毛发式传感器的研究。荷兰特温特大学的G.J.M.Krijnen教授初步研发了一种毛发式传感器，通过顶部的聚合物毛发对流速进行敏感，可以实现对mm/s级风速的敏感。但是，目前大部分机构研发的毛发式传感器为流速传感器，只能实现对流体速度的测量，功能单一，且结构较为复杂，实用性较差。In recent years, a number of research institutions at home and abroad have started research on hair sensors. Professor G.J.M.Krijnen of the University of Twente in the Netherlands has initially developed a hair sensor, which is sensitive to the flow velocity through the polymer hair on the top, and can be sensitive to the mm/s wind speed. However, most of the current hair-type sensors developed by institutions are flow rate sensors, which can only measure the fluid velocity, have a single function, and have a relatively complex structure and poor practicability.
发明内容Contents of the invention
发明目的：为了克服现有技术中存在的不足，本发明提供一种用于流速、加速度和角速度敏感的仿生毛发传感器，通过仿真毛发的结构，利用利用静电力的负刚度效应原理，实现测速。Purpose of the invention: In order to overcome the deficiencies in the prior art, the present invention provides a bionic hair sensor sensitive to flow velocity, acceleration and angular velocity. By simulating the structure of hair and using the principle of negative stiffness effect of electrostatic force, speed measurement is realized.
技术方案：为实现上述目的，本发明采用如下技术方案：一种用于流速、加速度和角速度敏感的仿生毛发传感器，包括玻璃衬底，其特征在于，包括底部信号引线、硅微传感器结构和聚合物毛发；所述底部信号引线布置在玻璃衬底上，连接硅微传感器结构的相应电极；硅微传感器结构通过锚点键合悬置于玻璃衬底上；所述聚合物毛发粘合在硅微传感器结构上表面；Technical solution: In order to achieve the above object, the present invention adopts the following technical solution: a bionic hair sensor sensitive to flow velocity, acceleration and angular velocity, comprising a glass substrate, characterized in that it includes a bottom signal lead, a silicon microsensor structure and a polymeric The bottom signal leads are arranged on the glass substrate and connected to the corresponding electrodes of the silicon microsensor structure; the silicon microsensor structure is suspended on the glass substrate by anchor point bonding; the polymer hair is bonded to the silicon The upper surface of the microsensor structure;
所述硅微传感器结构制作在单晶硅片上，包括外部框架、两个中部框架和两个内部框架；外部框架两侧分别通过对称布置的扭力梁与锚点连接；两个中部框架对称嵌在外部框架内，每个中部框架内分别嵌入一个内部框架；所述中部框架和内部框架均通过U型弹性梁与锚点相连接，悬置于玻璃衬底上；The silicon microsensor structure is fabricated on a single crystal silicon wafer, including an outer frame, two middle frames and two inner frames; both sides of the outer frame are respectively connected to the anchor points through symmetrically arranged torsion beams; the two middle frames are symmetrically embedded In the outer frame, an inner frame is respectively embedded in each middle frame; the middle frame and the inner frame are both connected to anchor points through U-shaped elastic beams and suspended on the glass substrate;
所述外部框架与中部框架之间布置有加速度、流速检测梳齿、驱动梳齿和驱动检测梳齿；所述内部框架内侧布置有角速度检测梳齿。Acceleration, flow velocity detection combs, drive combs and drive detection combs are arranged between the outer frame and the middle frame; angular velocity detection combs are arranged inside the inner frame.
进一步的，加速度、流速检测梳齿由固定在外部框架上的梳齿组与固定在中部框架上的梳齿组对插组成。当毛发受到外界加速度或流体作用时，会带动外部框架绕着扭力梁偏转一定的角度，对于加速度、流速检测梳齿来说，固定在外部框架上的梳齿会跟随进行偏转，而固定在中部框架上的梳齿不会跟随偏转，这样他们构成的电容极板的重叠面积发生改变。外部框架上施加有静电电压，通过固定在外部框架上的梳齿对固定在中部框架上的梳齿产生负刚度效应，改变中部框架的固有频率，当梳齿之间的重叠面积发生改变时，中部框架的固有频率改变程度也发生变化。Further, the acceleration and flow velocity detection combs are composed of a comb set fixed on the outer frame and a comb set fixed on the middle frame. When the hair is subjected to external acceleration or fluid, it will drive the outer frame to deflect at a certain angle around the torsion beam. For the acceleration and flow velocity detection comb teeth, the comb teeth fixed on the outer frame will follow the deflection and be fixed in the middle. The combs on the frame do not follow the deflection so that the overlapping area of the capacitive plates they form changes. An electrostatic voltage is applied to the outer frame, and the comb teeth fixed on the outer frame have a negative stiffness effect on the comb teeth fixed on the middle frame, changing the natural frequency of the middle frame. When the overlapping area between the comb teeth changes, The degree of change in the natural frequency of the middle frame also changes.
进一步的，驱动梳齿由上下两部分梳齿对插组成，其中下梳齿固定在锚点上。驱动梳齿对中部框架的驱动方式为双边驱动，在每组驱动梳齿中的两侧固定梳齿上分别施加带有直流偏置的等幅反向的交流驱动电压，使中部框架在Y方向上做简谐运动。Further, the drive comb is composed of upper and lower comb teeth, wherein the lower comb teeth are fixed on the anchor point. The driving mode of the driving combs to the middle frame is double-sided driving. The fixed combs on both sides of each set of driving combs are respectively applied with an equal-amplitude reverse AC driving voltage with DC bias to make the middle frame move in the Y direction. do simple harmonic motion.
进一步的，驱动检测梳齿由上下两部分梳齿对插组成，其中下梳齿固定在锚点上，上梳齿固定在中部框架上。驱动检测梳齿采用变面积式梳齿电容检测结构，由于中部框架的简谐运动会导致驱动检测梳齿的极板间的电容产生变化，通过对该变化进行检测，并通过与梳齿相连电极将其反馈给驱动电路，经过电路处理后反馈到驱动信号上，可以使中间框架保持以谐振频率运动。Further, the driving detection comb is composed of upper and lower comb teeth, wherein the lower comb is fixed on the anchor point, and the upper comb is fixed on the middle frame. The drive detection comb adopts a variable-area comb capacitance detection structure. Since the simple harmonic motion of the middle frame will cause a change in the capacitance between the plates of the drive detection comb, the change is detected, and the electrode connected to the comb will It is fed back to the drive circuit and fed back to the drive signal after being processed by the circuit, so that the middle frame can keep moving at the resonant frequency.
进一步的，角速度检测梳齿由上下两部分梳齿对插组成，其中下梳齿固定在锚点上，上梳齿固定在内部框架上。角速度检测梳齿采用变间距式电容检测结构，来自Y方向上的运动不会对角速度检测梳齿极板间的电容产生影响。当中部框架被正确驱动且有来自于Z轴的角速度输入时，内部框架会产生X轴方向上的运动，从而改变角速度检测梳齿极板间的电容，通过检测该电容变化，便可得到输入角速度的大小。Further, the comb teeth for angular velocity detection are composed of upper and lower comb teeth inserted in pairs, wherein the lower comb teeth are fixed on the anchor point, and the upper comb teeth are fixed on the inner frame. The angular velocity detection comb adopts a variable-pitch capacitive detection structure, and the movement from the Y direction will not affect the capacitance between the angular velocity detection comb plates. When the middle frame is driven correctly and there is an angular velocity input from the Z-axis, the inner frame will move in the X-axis direction, thereby changing the capacitance between the comb-tooth plates for angular velocity detection. By detecting the capacitance change, the input can be obtained The magnitude of the angular velocity.
进一步的，聚合物毛发由聚合物材料SU-8通过拉伸获得。SU-8是常见的聚合物材料，成本低廉，容易获取。Further, the polymer hair is obtained by stretching the polymer material SU-8. SU-8 is a common polymer material that is inexpensive and readily available.
进一步的，在对对称的中部框架和内部框架进行驱动和检测时，为同频反相工作模式，检测机构实现差动检测。Further, when driving and detecting the symmetrical middle frame and inner frame, it is the same-frequency and anti-phase working mode, and the detection mechanism realizes differential detection.
有益效果：Beneficial effect:
(1)本发明用于流速、加速度和角速度敏感的仿生毛发传感器可对加速度、流速及角速度进行测量；(1) The bionic hair sensor sensitive to flow velocity, acceleration and angular velocity of the present invention can measure acceleration, flow velocity and angular velocity;
(2)采用仿生毛发式设计，通过敏感外部作用力(加速度或流速作用)，可实现对加速度及流速的测量；(2) The bionic hair design is adopted, and the measurement of acceleration and flow velocity can be realized through sensitive external force (acceleration or flow velocity effect);
(3)通过采用传感器阵列的形式，将一部分传感器密封封装，另一部分正常与外界接触，可以实现对加速度与流体速度检测的区分；(3) By adopting the form of a sensor array, a part of the sensor is sealed and packaged, and the other part is in normal contact with the outside world, so that the detection of acceleration and fluid velocity can be distinguished;
(4)加速度、流速检测结构采用谐振式负刚度效应梳齿，具有测量精度高，抗干扰能力强的优点，且输出为数字信号，有利于电路的数字化；(4) The acceleration and flow velocity detection structure adopts resonant negative stiffness effect comb teeth, which have the advantages of high measurement accuracy and strong anti-interference ability, and the output is a digital signal, which is conducive to the digitization of the circuit;
(5)硅微传感器结构可以实现对角速度的测量；(5) The silicon microsensor structure can realize the measurement of angular velocity;
(6)角速度检测部分采用对称结构设计，在有角速度输入时，左右两侧检测输出大小相反的信号，通过测量两信号的差动变化可以得到输入角速度的大小，该差动方式能有效抑制共模干扰，增加输出信号；(6) The angular velocity detection part adopts a symmetrical structure design. When there is an angular velocity input, the left and right sides detect and output signals with opposite magnitudes. The magnitude of the input angular velocity can be obtained by measuring the differential change of the two signals. This differential method can effectively suppress the common Mode interference, increase the output signal;
(7)与基座连接的解耦梁采用U型梁的结构，不仅能够有效释放加工产生的热应力，抑制了正交耦合误差信号，而且减小了运动的非线性，从而增大了振动幅度提高了加速度检测的灵敏度；(7) The decoupling beam connected to the base adopts a U-shaped beam structure, which can not only effectively release the thermal stress generated by processing, suppress the orthogonal coupling error signal, but also reduce the nonlinearity of motion, thereby increasing the vibration Amplitude improves the sensitivity of acceleration detection;
(8)谐振器的活动梳齿分别设置在外部框架和中间框架上，可以有效利用空间，方便布置驱动梳齿和驱动反馈梳齿。(8) The movable combs of the resonator are arranged on the outer frame and the middle frame respectively, which can effectively use the space and facilitate the arrangement of the driving combs and the driving feedback combs.
附图说明Description of drawings
图1为本发明的结构示意图；Fig. 1 is a structural representation of the present invention;
图2为本发明的单个子结构示意图；Fig. 2 is a single substructure schematic diagram of the present invention;
图3为本发明的底部信号引线示意图。FIG. 3 is a schematic diagram of the bottom signal leads of the present invention.
具体实施方式detailed description
下面结合附图对本发明做更进一步的解释。The present invention will be further explained below in conjunction with the accompanying drawings.
如附图1所示，一种用于流速、加速度和角速度敏感的仿生毛发传感器，包括玻璃衬底，其特征在于，包括底部信号引线、硅微传感器结构和聚合物毛发3；所述底部信号引线布置在玻璃衬底上，连接硅微传感器结构的相应电极；硅微传感器结构通过锚点5键合悬置于玻璃衬底上；所述聚合物毛发3粘合在硅微传感器结构上表面；As shown in accompanying drawing 1, a kind of bionic hair sensor that is used for flow velocity, acceleration and angular velocity sensitivity comprises glass substrate, is characterized in that, comprises bottom signal lead wire, silicon microsensor structure and polymer hair 3; Said bottom signal The leads are arranged on the glass substrate and connected to the corresponding electrodes of the silicon microsensor structure; the silicon microsensor structure is suspended on the glass substrate through anchor point 5 bonding; the polymer hair 3 is bonded to the upper surface of the silicon microsensor structure ;
如图2所示，所述硅微传感器结构制作在单晶硅片上，包括外部框架6、两个中部框架110和两个内部框架120；外部框架6两侧分别通过对称布置的扭力梁4与锚点5连接；两个中部框架对称嵌在外部框架6内，每个中部框架110内分别嵌入一个完全相同的内部框架120；所述中部框架110和内部框架120均通过U型弹性梁与锚点相连接，悬置于玻璃衬底上；两个中部框架110及其连接结构为完全相同的结构，两个结构对称布置。As shown in Figure 2, the silicon microsensor structure is fabricated on a single crystal silicon wafer, including an outer frame 6, two middle frames 110, and two inner frames 120; the two sides of the outer frame 6 pass through symmetrically arranged torsion beams 4 respectively. It is connected with the anchor point 5; the two middle frames are symmetrically embedded in the outer frame 6, and an identical inner frame 120 is respectively embedded in each middle frame 110; the middle frame 110 and the inner frame 120 are connected to each other through U-shaped elastic beams The anchor points are connected and suspended on the glass substrate; the two middle frames 110 and their connecting structures are identical structures, and the two structures are arranged symmetrically.
所述外部框架6与中部框架110之间布置有加速度、流速检测梳齿104、驱动梳齿101和驱动检测梳齿102；所述内部框架120内侧布置有角速度检测梳齿106。Between the outer frame 6 and the middle frame 110 are arranged acceleration and flow velocity detection combs 104 , drive combs 101 and drive detection combs 102 ; inside the inner frame 120 are angular velocity detection combs 106 .
加速度、流速检测梳齿104由固定在外部框架上的梳齿组与固定在中部框架上的梳齿组对插组成。外部框架6上被施加电压U，对与当传感器有沿X轴方向的加速度或者有流速作用于聚合物毛发3时，产生的力矩会带动外部框架绕着扭力梁4扭转。即当毛发受到外界加速度或流体作用时，会带动外部框架绕着扭力梁偏转一定的角度，对于加速度、流速检测梳齿来说，固定在外部框架上的梳齿会跟随进行偏转，而固定在中部框架上的梳齿不会跟随偏转，这样他们构成的电容极板的重叠面积发生改变。外部框架上施加有静电电压，通过固定在外部框架上的梳齿对固定在中部框架上的梳齿产生负刚度效应，改变中部框架的固有频率，当梳齿之间的重叠面积发生改变时，中部框架的固有频率改变程度也发生变化。The comb tooth 104 for acceleration and flow velocity detection is composed of a comb tooth set fixed on the outer frame and a comb tooth set fixed on the middle frame. A voltage U is applied to the external frame 6 , and when the sensor has an acceleration along the X-axis or a flow velocity acts on the polymer hair 3 , the generated torque will drive the external frame to twist around the torsion beam 4 . That is, when the hair is affected by external acceleration or fluid, it will drive the external frame to deflect a certain angle around the torsion beam. For the acceleration and flow velocity detection comb teeth, the comb teeth fixed on the external frame will deflect accordingly, and the comb teeth fixed on the The combs on the middle frame do not follow the deflection so that the overlapping area of the capacitive plates they form changes. An electrostatic voltage is applied to the outer frame, and the comb teeth fixed on the outer frame have a negative stiffness effect on the comb teeth fixed on the middle frame, changing the natural frequency of the middle frame. When the overlapping area between the comb teeth changes, The degree of change in the natural frequency of the middle frame also changes.
驱动梳齿101由上下两部分梳齿对插组成，其中下梳齿固定在锚点上。驱动梳齿对中部框架的驱动方式为双边驱动，在上下两个固定梳齿上分别施加具有相同直流偏置的等幅反向的交流驱动电压，中部框架110在交流静电力的作用下作Y轴方向上的简谐运动。The drive comb 101 is composed of upper and lower comb teeth, wherein the lower comb teeth are fixed on the anchor point. The drive mode of the drive comb to the middle frame is bilateral drive. The upper and lower fixed combs are respectively applied with the same amplitude and reverse AC drive voltage with the same DC bias. The middle frame 110 acts as Y under the action of AC electrostatic force. Simple harmonic motion in the axial direction.
驱动检测梳齿102由上下两部分梳齿对插组成，其中下梳齿固定在锚点上，上梳齿固定在中部框架110上。驱动检测梳齿采用变面积式梳齿电容检测结构，由于中部框架的简谐运动会导致驱动检测梳齿的极板间的电容产生变化，通过对该变化进行检测，并通过与梳齿相连电极将其反馈给驱动电路，经过电路处理后反馈到驱动信号上，可以使中间框架保持以谐振频率运动。The drive detection comb 102 is composed of upper and lower comb teeth, wherein the lower comb is fixed on the anchor point, and the upper comb is fixed on the middle frame 110 . The drive detection comb adopts a variable-area comb capacitance detection structure. Since the simple harmonic motion of the middle frame will cause a change in the capacitance between the plates of the drive detection comb, the change is detected, and the electrode connected to the comb will It is fed back to the drive circuit and fed back to the drive signal after being processed by the circuit, so that the middle frame can keep moving at the resonant frequency.
角速度检测梳齿106由上下两部分梳齿对插组成，其中下梳齿固定在锚点上，上梳齿固定在内部框架120上。角速度检测梳齿采用变间距式电容检测结构，来自Y方向上的运动不会对角速度检测梳齿极板间的电容产生影响。当中部框架被正确驱动且有来自于Z轴的角速度输入时，内部框架会产生X轴方向上的运动，从而改变角速度检测梳齿极板间的电容，通过检测该电容变化，便可得到输入角速度的大小。The angular velocity detection comb 106 is composed of upper and lower comb teeth, wherein the lower comb teeth are fixed on the anchor point, and the upper comb teeth are fixed on the inner frame 120 . The angular velocity detection comb adopts a variable-pitch capacitive detection structure, and the movement from the Y direction will not affect the capacitance between the angular velocity detection comb plates. When the middle frame is driven correctly and there is an angular velocity input from the Z-axis, the inner frame will move in the X-axis direction, thereby changing the capacitance between the comb-tooth plates for angular velocity detection. By detecting the capacitance change, the input can be obtained The magnitude of the angular velocity.
聚合物毛发3由聚合物材料SU-8通过拉伸获得。The polymer hair 3 is obtained by stretching the polymer material SU-8.
在对对称的中部框架和内部框架进行驱动和检测时，为同频反相工作模式，检测机构实现差动检测。When driving and detecting the symmetrical middle frame and inner frame, it is the same frequency and anti-phase working mode, and the detection mechanism realizes differential detection.
如图3所示，驱动梳齿101、驱动检测梳齿102、角速度检测梳齿106分别与下层玻璃衬底的对应键合点固定驱动梳齿键合点601、固定驱动反馈梳齿键合点603和固定检测梳齿键合点605相连。As shown in Figure 3, the driving comb teeth 101, the driving detection comb teeth 102, and the angular velocity detection comb teeth 106 are fixed to the corresponding bonding points of the lower glass substrate respectively. The detection comb bond points 605 are connected.
具体实施例：Specific examples:
如图1所示，本发明用于流速、加速度和角速度敏感的仿生毛发传感器，由上中下三层构成，上层为聚合物毛发、中层为硅微传感器结构、下层为制作在玻璃衬底上的信号引线。用于测量同一平面内沿着X轴方向的流速速度及加速度，以及Z轴方向输入的角速度，所述硅微传感器结构由外部框架6、两组对称的中部框架110以及两组对称的内部框架120组成。外部框架通过扭力梁4与固定在玻璃衬底上锚点5相连接。两个完全相同的中部框架110对称布置在外部框架5的内部，通过U型弹性梁103与固定在玻璃衬底上的锚点相连接，使得中部框架悬空在玻璃衬底之上。As shown in Figure 1, the bionic hair sensor used in the present invention is sensitive to flow velocity, acceleration and angular velocity. It consists of upper, middle and lower layers. signal leads. Used to measure the flow velocity and acceleration along the X-axis direction in the same plane, and the angular velocity input in the Z-axis direction, the silicon microsensor structure consists of an outer frame 6, two sets of symmetrical middle frames 110 and two sets of symmetrical inner frames 120 compositions. The external frame is connected with anchor points 5 fixed on the glass substrate through torsion beams 4 . Two identical middle frames 110 are symmetrically arranged inside the outer frame 5, and are connected to anchor points fixed on the glass substrate through U-shaped elastic beams 103, so that the middle frames are suspended above the glass substrate.
外部框架与中部框架之间布置有加速度、流速检测梳齿104、驱动梳齿101和驱动检测梳齿102，在图2中，流速检测梳齿104具体的标注为104a、104b、104c、104d，仅为了方便表达，这四个流速检测梳齿完全相同。驱动梳齿101具体标注为101a、101b、101c、101d；驱动检测梳齿具体标注为102a、102b、102c、102d。内部框架120通过U型梁105与中部框架110连接，图2中，U型梁105具体标注为105a、105b、105c、105d，同样也悬置在玻璃衬底之上。内部框架内侧布置有角速度检测梳齿106，具体标注为106a、106b、106c。Between the outer frame and the middle frame are arranged acceleration, flow velocity detection combs 104, drive combs 101, and drive detection combs 102. In FIG. For the convenience of expression only, the four flow rate detection combs are identical. The driving comb teeth 101 are specifically marked as 101a, 101b, 101c, 101d; the driving detection comb teeth are specifically marked as 102a, 102b, 102c, 102d. The inner frame 120 is connected to the middle frame 110 through U-shaped beams 105. In FIG. 2, the U-shaped beams 105 are specifically marked as 105a, 105b, 105c, and 105d, which are also suspended above the glass substrate. Angular velocity detection comb teeth 106 are arranged inside the inner frame, specifically marked as 106a, 106b, 106c.
上述结构如图1、2所示，整个结构关于中轴线对称。硅微传感器由外部框架6、中部框架110和内部框架120构成，中部框架通过U型弹性梁103与各自锚点相连接，固定在玻璃衬底上，由于U型梁在X方向为刚性，因此中部框架的运动被限制在Y方向上。The above structure is shown in Figures 1 and 2, and the entire structure is symmetrical about the central axis. The silicon microsensor is composed of an outer frame 6, a middle frame 110, and an inner frame 120. The middle frame is connected with respective anchor points through a U-shaped elastic beam 103 and fixed on a glass substrate. Since the U-shaped beam is rigid in the X direction, the Movement of the middle frame is restricted to the Y direction.
外部框架6与中部框架110之间布置有加速度、流速检测梳齿104a、104b、104c、104d、204a，加速度、流速检测梳齿由固定在外部框架上的梳齿与固定在中部框架上的梳齿对插组成。当有外部加速度或流体速度输入时，聚合物毛发3带动外部框架6扭转，加速度、流速检测梳齿中固定在中部框架上的梳齿不会跟随外框架扭转，故扭转时，加速度、流速检测梳齿的两部分梳齿(固定在外框架上的梳齿与固定在中部框架上的梳齿)之间的重叠面积会发生改变。Acceleration and flow velocity detection combs 104a, 104b, 104c, 104d, 204a are arranged between the outer frame 6 and the middle frame 110. The acceleration and flow velocity detection combs are formed by the combs fixed on the outer frame and the combs fixed on the middle frame. Composed of paired teeth. When there is an external acceleration or fluid velocity input, the polymer hair 3 drives the outer frame 6 to twist, and the comb teeth fixed on the middle frame in the acceleration and flow velocity detection combs will not follow the twist of the outer frame, so when twisting, the acceleration and flow velocity detection The overlapping area between the two parts of the comb teeth (the comb teeth fixed on the outer frame and the comb teeth fixed on the middle frame) will change.
外部框架与中部框架之间布置有驱动梳齿及驱动检测梳齿。驱动梳齿101a、101b、101c、101d由两个固定在玻璃衬底的锚点上的梳齿与其之间的固定在中部框架上的梳齿对插组成。两组驱动梳齿之间为驱动检测梳齿102a、102b，布置在中部框架的左右侧，结构与驱动梳齿完全相同，也是由与固定在玻璃衬底的锚点上的梳齿与固定在中部框架上的梳齿对插组成。中部框架110与内部框架120之间通过U型弹性梁105相连，内部框架在Y轴方向跟随中部框架一起运动，在X轴方向可独立左右运动。内部框架120内侧为角速度检测梳齿106a、106b、106c，角速度检测梳齿由固定在玻璃衬底上的锚点上的梳齿与固定在内部框架上的梳齿对插组成。A drive comb and a drive detection comb are arranged between the outer frame and the middle frame. The driving combs 101a, 101b, 101c, and 101d are composed of two combs fixed on the anchor points of the glass substrate and interposed between the combs fixed on the middle frame. Between the two groups of drive combs are drive detection combs 102a, 102b, which are arranged on the left and right sides of the middle frame. The structure is exactly the same as that of the drive combs. The comb teeth on the middle frame are inserted into each other. The middle frame 110 and the inner frame 120 are connected by U-shaped elastic beams 105, the inner frame moves along with the middle frame in the Y-axis direction, and can move left and right independently in the X-axis direction. Inside the internal frame 120 are angular velocity detection combs 106a, 106b, 106c, which are composed of comb teeth fixed on anchor points on the glass substrate and comb teeth fixed on the internal frame.
其中一侧的结构如图2所示，陀螺仪被外部框架包围，外部框架上施加有电压U，于是加速度、流速检测梳齿中固定在外部框架上的梳齿便带有相同的电压。加速度、流速检测梳齿中固定在中部框架110上的梳齿将受到来自于外部框6架上的梳齿的静电力，由于静电力的吸引作用，极板发生了刚度软化，固有频率变小，且当外部框架跟随聚合物纤毛一起摆动时，加速度、流速检测梳齿之间的重叠面积发生改变，中部框架上的梳齿受到的静电力发生改变，受到的负刚度效应的程度也发生改变，于是固有频率的变化程度也发生改变。驱动梳齿101a、101b、101c、101d中每个固定在玻璃衬底的锚点上的梳齿都由上下两个固定梳齿组成，在上下两个固定梳齿上分别施加具有相同直流偏置的等幅反向的交流驱动电压，这样中部框架110在交流静电力的作用下作Y轴方向上的简谐运动。反馈梳齿102a和102b检测中部框架的运动状态，并将其反馈给驱动电路，驱动电路根据反馈信号调整驱动信号，使中部框架工作在谐振频率下。中部框架与内部框架通过U型梁105a、105b、105c、105d相连接。在内部框架110内侧，布置了三组检测梳齿106a、106b和106c，每组检测梳齿由两个反对称布置的差动电容检测梳齿构成，且电容检测梳齿由固定在玻璃衬底上的固定梳齿与固定在内部框架上的活动梳齿对插组成。The structure of one side is shown in Figure 2. The gyroscope is surrounded by the outer frame, and the voltage U is applied to the outer frame, so the comb teeth fixed on the outer frame of the acceleration and flow velocity detection combs carry the same voltage. The combs fixed on the middle frame 110 in the acceleration and flow velocity detection combs will receive the electrostatic force from the combs on the outer frame 6. Due to the attraction of the electrostatic force, the rigidity of the plate will soften and the natural frequency will become smaller. , and when the outer frame swings with the polymer cilia, the overlapping area between the acceleration and flow velocity detection comb teeth changes, the electrostatic force on the comb teeth on the middle frame changes, and the degree of the negative stiffness effect also changes , so the degree of change in the natural frequency also changes. Each of the driving combs 101a, 101b, 101c, and 101d fixed on the anchor point of the glass substrate is composed of two fixed combs, and the same DC bias is applied to the upper and lower fixed combs. The constant amplitude and reverse AC driving voltage, so that the middle frame 110 performs simple harmonic motion in the Y-axis direction under the action of the AC electrostatic force. Feedback combs 102a and 102b detect the movement state of the middle frame and feed it back to the driving circuit, and the driving circuit adjusts the driving signal according to the feedback signal to make the middle frame work at the resonant frequency. The middle frame is connected with the inner frame through U-shaped beams 105a, 105b, 105c, 105d. Inside the internal frame 110, three sets of detection combs 106a, 106b, and 106c are arranged, each set of detection combs is composed of two antisymmetrically arranged differential capacitance detection combs, and the capacitance detection combs are fixed on the glass substrate It is composed of the fixed comb teeth on the upper part and the movable comb teeth fixed on the internal frame.
通过采用传感器阵列的形式，实现对加速度与流体速度检测的区分，将一部分传感器密封封装，另一部分正常与外界接触，当外界为流体环境时，密封封装的传感器的毛发不会受到流体作用，而没有进行密封的传感器将会受到作用；当外界输入为加速度输入时，则所有传感器均会受到作用而产生扭转。By adopting the form of sensor array, the distinction between acceleration and fluid velocity detection is realized. Part of the sensor is sealed and packaged, and the other part is in normal contact with the outside world. When the outside world is a fluid environment, the hair of the sealed and packaged sensor will not be affected by the fluid. Sensors that are not sealed will be affected; when the external input is acceleration input, all sensors will be affected and twist.
玻璃衬底如图3所示，包括信号引线和金属硅/玻璃键合点。信号引线包括静电电压输入引线8c，驱动输入引线607、608，驱动反馈输入引线611、612，检测输出信号引线609、610；金属硅/玻璃键合点包括固定基座键合点8a、8b，固定驱动梳齿键合点601a、601b、601c、601d、602a、602b、602c、602d，固定驱动反馈梳齿键合点603a、603b、604a、604b固定检测梳齿键合点605a、605b、605c、606a、606b、606c。The glass substrate is shown in Figure 3, including signal leads and metal silicon/glass bonding points. Signal leads include electrostatic voltage input leads 8c, drive input leads 607, 608, drive feedback input leads 611, 612, detection output signal leads 609, 610; metal silicon/glass bonding points include fixed base bonding points 8a, 8b, fixed drive Comb tooth bonding points 601a, 601b, 601c, 601d, 602a, 602b, 602c, 602d, fixed drive feedback comb tooth bonding points 603a, 603b, 604a, 604b fixed detection comb tooth bonding points 605a, 605b, 605c, 606a, 606b, 606c.
本发明用于流速、加速度和角速度敏感的仿生毛发传感器，采用双边静电驱动，电容检测的工作方式。在驱动输入引线607和608上施加具有相同直流偏置的等幅反向的交流驱动电压，在对称一侧的驱动输入引线上施加相反的电压，则两个中部框架110工作在同频反向状态，梳齿电容在x轴即驱动方向受到的静电驱动力为：The invention is used for a bionic hair sensor sensitive to flow velocity, acceleration and angular velocity, and adopts the working mode of bilateral electrostatic drive and capacitance detection. On the driving input leads 607 and 608, an equal amplitude and reverse AC driving voltage with the same DC bias is applied, and an opposite voltage is applied to the driving input leads on the symmetrical side, then the two middle frames 110 work at the same frequency and reverse state, the electrostatic driving force on the comb capacitor on the x-axis, that is, the driving direction, is:
式中，n为谐振器的活动梳齿数，ε为介电常数，h为结构的厚度，d0为梳齿间距，Vd为驱动电压的直流偏置电压，Va为交流电压，ωd为交流电压的角频率。where n is the number of active comb teeth of the resonator, ε is the dielectric constant, h is the thickness of the structure, d0 is the distance between the comb teeth, Vd is the DC bias voltage of the driving voltage, Va is the AC voltage, ωd is the angular frequency of the AC voltage.
两个子结构100是图1中虚线框内的结构，具体来说，图2中的结构为一个子结构100，两个子结构对称设置，由于两个子结构100的驱动梳齿电容为反对称布置，因此，作用在两个子结构100上的静电驱动力方向相反。The two substructures 100 are structures within the dotted line box in FIG. 1. Specifically, the structure in FIG. 2 is a substructure 100, and the two substructures are arranged symmetrically. Since the driving comb capacitors of the two substructures 100 are arranged antisymmetrically, Therefore, the directions of the electrostatic driving forces acting on the two substructures 100 are opposite.
因此子结构中的中部框架110在静电驱动力的作用下，在Y轴作反向简谐线振动。当驱动交流电压的频率与陀螺仪驱动模态的固有频率一致时，线振动位移为：Therefore, the middle frame 110 in the substructure vibrates in reverse simple harmonic line on the Y axis under the action of the electrostatic driving force. When the frequency of the driving AC voltage is consistent with the natural frequency of the gyroscope driving mode, the linear vibration displacement is:
式中，Fd0为静电力驱动力幅值，kx为X方向的弹性刚度，Qx为驱动模态的品质因数线振动速度为：In the formula, Fd0 is the amplitude of the driving force of the electrostatic force, kx is the elastic stiffness in the X direction, and Qx is the quality factor of the driving mode. The linear vibration velocity is:
当陀螺仪有绕Z轴的外界输入角速率ωz时，根据右手定则，检测质量在输出轴(X轴)受到哥氏加速度的作用，其大小为：When the gyroscope has an external input angular rate ωz around the Z axis, according to the right-hand rule, the detection mass is affected by the Coriolis acceleration on the output axis (X axis), and its magnitude is:
式中，为输入角速率和线振动速度之间右旋夹角。In the formula, is the right-handed angle between the input angular rate and the linear vibration velocity.
设内部框架质量为ms，则作用在检测质量上的哥氏惯性力为：Assuming that the mass of the internal frame is ms , the Coriolis inertial force acting on the detection mass is:
哥氏惯性力的方向与哥氏加速度方向相反，因此，作用在内部框架120上的哥氏惯性力的方向相反。在哥氏惯性力的作用下，内部框架120沿着敏感轴(X轴)做相向简谐振动。这样，使得活动敏感梳齿与固定敏感梳齿之间的间隙按一定的简谐振动规律变动，电容差值信号经电子线路处理后，可获得输出电压信号。梳齿电压信号为两个子结构100的电压信号之和，且输出电压信号的大小正比于输入角速率的大小。通过鉴相器比较输出电压信号与激励信号的相位关系，则可判明输入角速率的方向。The direction of the Coriolis inertial force is opposite to the direction of the Coriolis acceleration, therefore, the direction of the Coriolis inertial force acting on the inner frame 120 is opposite. Under the action of Coriolis inertial force, the inner frame 120 performs simple harmonic vibration in opposite directions along the sensitive axis (X axis). In this way, the gap between the movable sensitive comb and the fixed sensitive comb changes according to a certain law of simple harmonic vibration, and the output voltage signal can be obtained after the capacitance difference signal is processed by the electronic circuit. The comb voltage signal is the sum of the voltage signals of the two substructures 100, and the magnitude of the output voltage signal is proportional to the magnitude of the input angular rate. By comparing the phase relationship between the output voltage signal and the excitation signal through the phase detector, the direction of the input angular rate can be determined.
当陀螺仪被驱动起来时，反馈梳齿会检测到陀螺的固有频率变化，从而反馈到驱动电路上，对驱动电压进行调整从而使陀螺工作在谐振频率上。When the gyroscope is driven, the feedback comb will detect the change of the natural frequency of the gyroscope, which will be fed back to the driving circuit, and the driving voltage will be adjusted so that the gyroscope works at the resonant frequency.
外部框架6上被施加电压U，当传感器有沿X轴方向的加速度或者有流速作用于聚合物毛发3时，产生的力矩会带动外部框架绕着扭力梁4扭转，此时，由于中部框架在Z轴方向是没有自由度的，所以加速度、流速检测梳齿104a、104b、104c、104d、104e、104f中，与中部框架相连的极板保持不动，与外部框架所连接的极板会跟随转动，此时加速度、流速检测梳齿间的重叠面积发生改变，故与中部框架110相连的梳齿所受的来自于外部框架上的梳齿的静电力发生改变，根据静电负刚度效应，由于静电力改变，所以产生的等效负刚度改变，中部框架的固有频率改变。当存在静电负刚度时，谐振频率变为：A voltage U is applied to the outer frame 6. When the sensor has an acceleration along the X-axis direction or a flow velocity acts on the polymer hair 3, the generated torque will drive the outer frame to twist around the torsion beam 4. At this time, because the middle frame is in the There is no degree of freedom in the Z-axis direction, so in the acceleration and flow velocity detection combs 104a, 104b, 104c, 104d, 104e, and 104f, the pole plates connected to the middle frame remain stationary, and the pole plates connected to the outer frame will follow At this time, the overlapping area between the acceleration and flow velocity detection combs changes, so the electrostatic force received by the combs connected to the middle frame 110 from the combs on the outer frame changes. According to the electrostatic negative stiffness effect, due to The electrostatic force changes, so the resulting equivalent negative stiffness changes, and the natural frequency of the middle frame changes. When electrostatic negative stiffness is present, the resonant frequency becomes:
其中，k为梳齿原机械刚度，ke为静电力负刚度效应作用下的梳齿机械刚度，fe为静电力负刚度效应作用下的谐振频率。通过反馈梳齿对驱动谐振频率的检测，从而可以得出毛发偏转的角度，通过计算可得知加速度或流速速度的大小。Among them, k is the original mechanical stiffness of the comb, ke is the mechanical stiffness of the comb under the negative stiffness effect of the electrostatic force, and fe is the resonant frequency under the negative stiffness effect of the electrostatic force. Through the detection of the drive resonance frequency by the feedback comb teeth, the angle of hair deflection can be obtained, and the acceleration or flow velocity can be obtained through calculation.
以上所述仅是本发明的优选实施方式，应当指出，对于本技术领域的普通技术人员来说，在不脱离本发明原理的前提下，还可以做出若干改进和润饰，这些改进和润饰也应视为本发明的保护范围。The above is only a preferred embodiment of the present invention, and it should be pointed out that for those of ordinary skill in the art, some improvements and modifications can be made without departing from the principle of the present invention. It should be regarded as the protection scope of the present invention.
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| CN201410853371.4ACN104459181B (en) | 2014-12-31 | 2014-12-31 | A kind of bionical hair sensor sensitive for flow velocity, acceleration and angular speed |
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| CN201410853371.4ACN104459181B (en) | 2014-12-31 | 2014-12-31 | A kind of bionical hair sensor sensitive for flow velocity, acceleration and angular speed |
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