技术领域technical field
本发明涉及一种气体检测装置，特别涉及一种脉冲控制的多通道光声光谱检测装置。The invention relates to a gas detection device, in particular to a pulse-controlled multi-channel photoacoustic spectrum detection device.
背景技术Background technique
气体检测技术在工业化生产及日常生活中有着极其广泛的应用，诸如油气管道的泄漏检测、电力系统中的变压器油中溶解气体检测、化工企业的排放废气检测以及空气中的痕量污染气体检测等等。目前，较为常见的用于气体检测的方法主要包括：气敏传感器法、红外吸收光谱法、色谱法、光声光谱法等。其中气敏传感器法检测的精度较低，且对混合气体易产生交叉干扰，红外吸收光谱法需要的气样量大，且精度低；色谱法需要载气增加了维护量，对于在线监测不太适用。Gas detection technology is widely used in industrial production and daily life, such as leak detection of oil and gas pipelines, detection of dissolved gases in transformer oil in power systems, detection of exhaust gases from chemical companies, and detection of trace pollutant gases in the air, etc. wait. At present, the more common methods for gas detection mainly include: gas sensor method, infrared absorption spectroscopy, chromatography, photoacoustic spectroscopy, etc. Among them, the detection accuracy of the gas sensor method is low, and it is easy to cause cross interference to the mixed gas. The infrared absorption spectroscopy requires a large amount of gas samples and has low accuracy. Be applicable.
光声光谱检测方法基于气体的光声效应，其机理是气体分子吸收特定波长的光能后，随即以无辐射跃迁的方式退激，释放出的热能使气体在封闭的腔室里产生压力波，压力波的强度与气体分子的浓度成比例关系，然后加以改变进入光声池中的光的波长，就可以检测不同气体组分的浓度值，是一种高精度的检测方法。The photoacoustic spectroscopy detection method is based on the photoacoustic effect of the gas. The mechanism is that after the gas molecules absorb the light energy of a specific wavelength, they de-excite in the way of non-radiative transition, and the heat energy released causes the gas to generate pressure waves in the closed chamber. , the intensity of the pressure wave is proportional to the concentration of gas molecules, and then changing the wavelength of the light entering the photoacoustic cell can detect the concentration of different gas components, which is a high-precision detection method.
然而现阶段的光声光谱气体检测装置也存在分离元件多等缺点，如存在机械式的斩光器、旋转式的滤光片盘，不利于现场使用；如专利200680024392.9“光声光谱仪设备”采用旋转的机械斩波器调制光源，采用旋转的机械式滤光片盘调换滤光片；此外目前的设备只有一个光声腔，在检测中需要选择不同滤光片对待测混合气体中的不同成分逐一检测，所需时间较长，同时对于不能稳定存在的气体成分难以检测。此外，目前的光声光谱气体检测装置由于光源、斩光器、滤光片盘等的限制，还存在体积庞大的缺点，无法作为传感器与多通道的微机电系统(MEMS)组合应用。However, the photoacoustic spectroscopy gas detection device at the present stage also has shortcomings such as a large number of separation components, such as mechanical choppers and rotating filter discs, which are not conducive to field use; for example, the patent 200680024392. The rotating mechanical chopper modulates the light source, and the rotating mechanical filter disc is used to replace the filter; in addition, the current equipment has only one photoacoustic cavity, and different filters need to be selected for different components in the measured mixed gas. It takes a long time to detect, and it is difficult to detect gas components that cannot exist stably. In addition, the current photoacoustic spectroscopy gas detection device has the disadvantage of bulkiness due to the limitation of light source, optical chopper, filter disk, etc., and cannot be used as a sensor combined with a multi-channel micro-electromechanical system (MEMS).
发明内容Contents of the invention
本发明的目的是克服现有技术的不足，提供一种脉冲控制的气体多通道光声光谱检测装置。本发明结构简单紧凑、无机械转动部件，稳定性好，可用于对多种气体组分进行浓度值检测。The purpose of the present invention is to overcome the deficiencies of the prior art and provide a pulse-controlled gas multi-channel photoacoustic spectrum detection device. The invention has a simple and compact structure, no mechanical rotating parts, good stability, and can be used to detect the concentration values of various gas components.
光声光谱技术基于光声效应。光声效应由气体分子吸收电磁波而产生，气体分子吸收特定波长的电磁波后至激发态，随即以释放热能的方式退激，释放出的热能在气体中产生压力波，压力波的强度与气体分子的浓度成比例，通过检测吸收不同波长而产生的压力波的强度，可得到不同气体组分的浓度。Photoacoustic spectroscopy is based on the photoacoustic effect. The photoacoustic effect is produced by the absorption of electromagnetic waves by gas molecules. After absorbing electromagnetic waves of a specific wavelength, the gas molecules are excited, and then de-excited by releasing heat energy. The released heat energy generates pressure waves in the gas. The intensity of the pressure wave is the same as that of the gas molecules. The concentration of the gas is proportional to the concentration, and the concentration of different gas components can be obtained by detecting the intensity of the pressure wave generated by absorbing different wavelengths.
本发明用于气体检测的脉冲式多通道光声光谱装置，主要包括光源模块、光声信号产生模块和控制及信号处理模块。The pulse type multi-channel photoacoustic spectroscopy device for gas detection of the present invention mainly includes a light source module, a photoacoustic signal generation module, and a control and signal processing module.
所述光声信号产生模块安装在光源模块之后，使得光源模块产生的光束垂直的射入光声信号产生模块，光束的中心线与光声信号产生模块的中心线同轴；所述控制及信号处理模块与光声信号产生模块、光源模块有电连接，用来控制光源信号产生模块和光源模块。The photoacoustic signal generation module is installed behind the light source module, so that the light beam generated by the light source module enters the photoacoustic signal generation module vertically, and the centerline of the light beam is coaxial with the centerline of the photoacoustic signal generation module; the control and signal The processing module is electrically connected with the photoacoustic signal generating module and the light source module, and is used to control the light source signal generating module and the light source module.
所述的光源模块包括红外热光源和抛物面反光镜。红外热光源位于抛物面反光镜的焦点处，红外热光源产生的光经抛物面反光镜反射后形成平行光束，然后入射到光声信号产生模块中光声池的光声腔中。所述抛物面反光镜上镀有一层金属膜，以增大红外波段的光辐射反射率。由于光束照射在光声腔壁上会增加背景噪声降低系统的信噪比，而光束的发散角直接影响照射在光声腔壁上光的照射度，根据光学器件的展光度原理，压缩光束发散角，需要增大光束的直径，这就要求抛物面反光镜的直径增大；而另一方面光声腔中气体吸收光能后产生的压力波随光声腔体积增大而减小，并且光声腔体积的增大也进一步增加了待测样品的体积。因此，本发明采用大口径抛物面反光镜以增大光束直径，同时采用多通道光声腔以减小光声腔体积。所述红外热光源采用电脉冲进行光调制，在控制及信号处理模块产生的电脉冲调制下发射脉冲光束，同时电脉冲传输至控制及信号处理模块中的锁相放大器作为参考信号。The light source module includes an infrared thermal light source and a parabolic reflector. The infrared thermal light source is located at the focal point of the parabolic mirror, and the light generated by the infrared thermal light source is reflected by the parabolic mirror to form a parallel beam, and then enters the photoacoustic cavity of the photoacoustic pool in the photoacoustic signal generation module. A layer of metal film is coated on the parabolic reflector to increase the light radiation reflectivity in the infrared band. Since the light beam irradiating on the wall of the photoacoustic cavity will increase the background noise and reduce the signal-to-noise ratio of the system, and the divergence angle of the beam directly affects the irradiance of the light irradiated on the wall of the photoacoustic cavity. The diameter of the beam needs to be increased, which requires the diameter of the parabolic mirror to increase; on the other hand, the pressure wave generated by the gas absorbing light energy in the photoacoustic cavity decreases with the increase of the volume of the photoacoustic cavity, and the increase of the volume of the photoacoustic cavity Larger also further increases the volume of the sample to be tested. Therefore, the present invention adopts a large-diameter parabolic reflector to increase the beam diameter, and simultaneously adopts a multi-channel photoacoustic cavity to reduce the volume of the photoacoustic cavity. The infrared thermal light source is optically modulated by electric pulses, and pulsed beams are emitted under the modulation of electric pulses generated by the control and signal processing module, and at the same time, the electric pulses are transmitted to the lock-in amplifier in the control and signal processing module as a reference signal.
光声信号产生模块包括光声池和微音器。所述光声池由两个或多个圆柱形光声腔，以及每个光声腔上安装的滤光片组成。所述光声腔的轴心围绕光源模块的中心光轴呈圆周阵列分布。光声腔的数量由待检测的气体种类来决定。每个光声腔相对光轴呈对称分布，使得接收到的光强相等，且光束与光声腔中轴线平行。所述光声腔的轴向两端开有圆形通孔，分别为入光口和出光口。所述的入光口处安装有滤光片，所述的出光口安装有出光口抛物面反光镜。每个光声腔入光口上装设的滤光片可以通过不同波长的光束，即每个光声腔分别用于检测不同的气体。所述每个光声腔的中部位置都装设有微音器。所述微音器的接收面的轴心垂直于光声腔的侧壁。所述出光口抛物面反光镜的焦点在光声腔的几何中心处，使由出光孔射出的平行红外光反射回光声腔，并汇聚于光声腔的几何中心处。所述出光口抛物面反光镜的直径大于光声腔的直径，以减少抛物反射镜面边界处对光束的杂散反射。The photoacoustic signal generating module includes a photoacoustic cell and a microphone. The photoacoustic pool is composed of two or more cylindrical photoacoustic cavities and optical filters installed on each photoacoustic cavity. The axes of the photoacoustic cavity are distributed in a circular array around the central optical axis of the light source module. The number of photoacoustic cavities is determined by the type of gas to be detected. Each photoacoustic cavity is distributed symmetrically with respect to the optical axis, so that the received light intensity is equal, and the light beam is parallel to the central axis of the photoacoustic cavity. The two axial ends of the photoacoustic cavity are provided with circular through holes, which are the light entrance and the light exit respectively. A light filter is installed at the light entrance, and a parabolic reflector at the light exit is installed at the light exit. The optical filters installed on the light entrance of each photoacoustic cavity can pass light beams of different wavelengths, that is, each photoacoustic cavity is used to detect different gases. A microphone is installed in the middle of each photoacoustic cavity. The axis of the receiving surface of the microphone is perpendicular to the side wall of the photoacoustic cavity. The focal point of the parabolic mirror at the light exit is at the geometric center of the photoacoustic cavity, so that the parallel infrared light emitted from the light exit is reflected back to the photoacoustic cavity and converged at the geometric center of the photoacoustic cavity. The diameter of the parabolic mirror at the light outlet is larger than that of the photoacoustic cavity, so as to reduce the stray reflection of the light beam at the boundary of the parabolic mirror.
特别地，因为气样中待检测气体存在交叉影响，按照传统的检测方式，测定完成一种吸收波段的光声信号后，再改变光的波长进行检测，两个信号通过算法来求解出存在交叉干扰的每种气体的浓度值。而实际上所述两次检测时的气体成分有可能已经发生变化，这种求解存在着明显的误差；本发明利用多个光声腔，每个光声腔的入口端利用滤光片作为窗片，同时对多波段信号进行检测，可以降低误差。In particular, because of the cross influence of the gas to be detected in the gas sample, according to the traditional detection method, after the photoacoustic signal of one absorption band is measured, the wavelength of the light is changed for detection, and the two signals are solved by an algorithm to determine the existence of cross Interfering concentration values for each gas. In fact, the gas composition during the two detections may have changed, and there is an obvious error in this solution; the present invention utilizes a plurality of photoacoustic cavities, and an optical filter is used as a window at the entrance of each photoacoustic cavity. Simultaneous detection of multi-band signals can reduce errors.
每个所述的光声腔轴向两端都开有进气口和出气口，位于垂直于每个光声腔轴向的侧壁上，可以设定相邻光声腔的进气口与出气口分别相连，使得整个光声信号产生模块对外部只有一个总进气口和总出气口；也可以是某个或某几个光声腔的进气口和出气口相连，而其余几个光声腔的进气口和出气口相连，以分别检测不同的气体；如部分光声腔可用于背景检测，可以通入背景载气，如空气、氮气或SF6等其他背景气，其输出的光声信号可以用以检测探测器的稳定性以及周边环境温度的变化等，另一部分光声腔用于检测样品气体的组分含量。Each of the photoacoustic cavity axial ends has an air inlet and an air outlet, which are located on the side wall perpendicular to the axial direction of each photoacoustic cavity, and the air inlet and the air outlet of the adjacent photoacoustic cavity can be set respectively connected, so that the entire photoacoustic signal generating module has only one main air inlet and a total air outlet to the outside; it can also be that the air inlet and air outlet of one or several photoacoustic cavities are connected, while the inlets of the remaining photoacoustic cavities The gas port is connected to the gas outlet to detect different gases respectively; if part of the photoacoustic cavity can be used for background detection, it can be introduced into the background carrier gas, such as air, nitrogen or SF6 and other background gases, and the photoacoustic signal output can be used for Detect the stability of the detector and the change of the surrounding environment temperature, etc., and another part of the photoacoustic cavity is used to detect the component content of the sample gas.
所述的控制及信号处理模块包括锁相放大器及DSP控制板，其中锁相放大器有多个信号输入通道，每个信号输入通道通过信号线缆连接至微音器。产生的光声信号经DSP进行处理，计算得到各气体的浓度值。本发明可以同时对待检测气样中的多种组分进行检测，并可进行背景差分、交叉分析等处理，有效缩短了检测时间，提高了检测精度。无机械旋转器件，寿命和稳定性。The control and signal processing module includes a lock-in amplifier and a DSP control board, wherein the lock-in amplifier has multiple signal input channels, and each signal input channel is connected to the microphone through a signal cable. The generated photoacoustic signal is processed by DSP, and the concentration value of each gas is calculated. The invention can simultaneously detect multiple components in the gas sample to be detected, and can perform background difference, cross analysis and other processing, effectively shortening the detection time and improving the detection accuracy. No mechanical rotating parts, life and stability.
所述微音器的频率响应范围是0.1Hz～30kHz，灵敏度大于20mV/Pa。所述锁相放大器的频率范围为1mHz～102.4kHz，灵敏度为2nV～1V，增益精确度为±1％，动态存储>100dB，具有GPIB和RS232两种接口。The frequency response range of the microphone is 0.1Hz-30kHz, and the sensitivity is greater than 20mV/Pa. The frequency range of the lock-in amplifier is 1mHz-102.4kHz, the sensitivity is 2nV-1V, the gain accuracy is ±1%, the dynamic storage is >100dB, and it has two interfaces of GPIB and RS232.
本发明比较传统红外光源使用的机械斩波器有着频率稳定、参考信号无相位频移等优点，同时不需要滤光片盘，较少了旋转控制部件，并且减少了机械转动部件的使用，有利于提高整套装置的寿命。另外本发明利用多个光声腔，每个光声腔的入口端利用滤光片作为窗片，同时对多波段信号进行检测，在测量具有交叉干扰多组分气体时具有明显的优势。同时本发明可以以较小的体积实现多种气体组分同时测量，有益于与MEMS等技术的结合应用。Compared with the mechanical chopper used in the traditional infrared light source, the present invention has the advantages of stable frequency and no phase frequency shift of the reference signal. At the same time, it does not need an optical filter disc, has fewer rotating control parts, and reduces the use of mechanical rotating parts. It is beneficial to improve the service life of the whole device. In addition, the present invention utilizes multiple photoacoustic cavities, and the entrance of each photoacoustic cavity uses a filter as a window to detect multi-band signals at the same time, which has obvious advantages in measuring multi-component gases with cross interference. At the same time, the invention can realize the simultaneous measurement of multiple gas components with a small volume, which is beneficial to the combined application with technologies such as MEMS.
附图说明Description of drawings
图1为本发明脉冲式多通道光声光谱检测装置结构示意图；Fig. 1 is a schematic structural diagram of a pulsed multi-channel photoacoustic spectroscopy detection device of the present invention;
图2a、图2b、图2c为本发明光声光谱检测装置光声池结构示意图。Fig. 2a, Fig. 2b and Fig. 2c are schematic diagrams of the photoacoustic cell structure of the photoacoustic spectrum detection device of the present invention.
具体实施方式Detailed ways
以下结合附图和具体实施方式进一步说明本发明。The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.
图1为本发明脉冲式多通道光声光谱检测装置结构示意图。如图1所示，本发明装置主要包括光源模块1、光声信号产生模块2和控制及信号处理模块3。光源模块1由红外光源1-1及抛物面反光镜1-2构成。光声信号产生模块2包括光声池2-1和微音器2-4。所述红外光源1-1发出的光在控制及信号处理模块3产生的电脉冲调制下发射出脉冲光束，经由抛物面反光镜1-2反射后形成平行光束，然后入射至光声信号产生模块2中的光声腔2-2中。光声腔2-2内安装的微音器2-4把待测气体吸收红外光所产生的光声信号转换为电信号，然后输出至控制及信号处理模块3进行信号处理，计算出待测气体中各组分的浓度值。所述微音器2-4安装在光声腔2-2的侧壁上，微音器2-4接收面的轴心垂直于光声腔2-2侧壁，并且位于光声腔2-2中心处；微音器2-4产生的光声电信号经DSP进行处理，计算得到各气体的浓度值。Fig. 1 is a schematic structural diagram of a pulsed multi-channel photoacoustic spectroscopy detection device of the present invention. As shown in FIG. 1 , the device of the present invention mainly includes a light source module 1 , a photoacoustic signal generation module 2 and a control and signal processing module 3 . The light source module 1 is composed of an infrared light source 1-1 and a parabolic reflector 1-2. The photoacoustic signal generating module 2 includes a photoacoustic cell 2-1 and a microphone 2-4. The light emitted by the infrared light source 1-1 is modulated by the electric pulse generated by the control and signal processing module 3 to emit a pulse beam, which is reflected by the parabolic mirror 1-2 to form a parallel beam, and then enters the photoacoustic signal generation module 2 in the photoacoustic cavity 2-2. The microphone 2-4 installed in the photoacoustic cavity 2-2 converts the photoacoustic signal generated by the gas to be measured absorbing infrared light into an electrical signal, and then outputs it to the control and signal processing module 3 for signal processing, and calculates the gas to be measured Concentration values of each component in . The microphone 2-4 is installed on the side wall of the photoacoustic cavity 2-2, the axis of the receiving surface of the microphone 2-4 is perpendicular to the side wall of the photoacoustic cavity 2-2, and is located at the center of the photoacoustic cavity 2-2 ; The photoacoustic electric signal generated by the microphone 2-4 is processed by DSP, and the concentration value of each gas is calculated.
所述的红外光源1-1固定安装于抛物面反光镜1-2的焦点处。抛物面反光镜面镀有一层金属膜，以增大红外波段的光辐射反射率。控制及信号处理模块3中的DSP控制板产生的脉冲调制后的直流电压通过电缆线3-2传至红外光源1-1的端口处，使红外光源1-1产生脉冲平行光束。The infrared light source 1-1 is fixedly installed at the focal point of the parabolic mirror 1-2. The parabolic reflective mirror is coated with a layer of metal film to increase the reflectivity of light radiation in the infrared band. The pulse-modulated DC voltage generated by the DSP control board in the control and signal processing module 3 is transmitted to the port of the infrared light source 1-1 through the cable 3-2, so that the infrared light source 1-1 generates pulsed parallel beams.
图2为本发明光声光谱检测装置光声池结构示意图。如图2a、2b、2c所示分别表示光声腔的数量为2、4、6个时的截面图。所述的光声信号产生模块2中的光声池2-1的制作材料为黄铜或者不锈钢。本发明实施例含有两个或者两个以上的圆柱形的光声腔2-2，光声腔的数量由待检测的气体的种类决定。光声腔2-2的轴心围绕光源模块1的光轴呈圆周阵列等角度分布。光声腔2-2的轴向两端开有圆形通孔，分别为入光口和出光口。入光口处安装有滤光片，出光口处安装有抛物面反光镜。滤光片通过压圈进行固定，并使用密封胶进行密封。出光孔抛物面反光镜的焦点在光声腔的几何中心处，使由出光孔射出的平行红外光反射回光声腔，并汇聚于光声腔的几何中心处。所述出光口抛物面反光镜的直径大于光声腔的直径。垂直于每个光声腔轴向的光声腔两端侧壁上开有进气口和出气口，相邻的光声腔的进气口与出气口可以分别相连，整个光声信号产生模块对外部只有一个进气口和出气口。Fig. 2 is a schematic diagram of the photoacoustic cell structure of the photoacoustic spectroscopy detection device of the present invention. Figures 2a, 2b, and 2c show cross-sectional views when the number of photoacoustic cavities is 2, 4, and 6, respectively. The photoacoustic cell 2-1 in the photoacoustic signal generating module 2 is made of brass or stainless steel. The embodiment of the present invention contains two or more cylindrical photoacoustic cavities 2-2, and the number of photoacoustic cavities is determined by the type of gas to be detected. The axes of the photoacoustic cavities 2 - 2 are distributed equiangularly in a circular array around the optical axis of the light source module 1 . The two axial ends of the photoacoustic cavity 2-2 are provided with circular through holes, which are the light entrance and the light exit respectively. A filter is installed at the light entrance, and a parabolic reflector is installed at the light exit. The filter is held in place by a pressure ring and sealed with a sealant. The focal point of the parabolic reflector of the light exit hole is at the geometric center of the photoacoustic cavity, so that the parallel infrared light emitted from the light exit hole is reflected back to the photoacoustic cavity and converged at the geometric center of the photoacoustic cavity. The diameter of the parabolic mirror at the light outlet is larger than the diameter of the photoacoustic cavity. The sidewalls at both ends of the photoacoustic cavity perpendicular to the axial direction of each photoacoustic cavity are provided with inlets and outlets. The inlets and outlets of adjacent photoacoustic cavities can be connected respectively. The entire photoacoustic signal generation module has only An air inlet and an air outlet.
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410697178.6ACN104458634B (en) | 2014-11-26 | 2014-11-26 | Pulsed multi-channel photoacoustic spectrometry device for gas detection |
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410697178.6ACN104458634B (en) | 2014-11-26 | 2014-11-26 | Pulsed multi-channel photoacoustic spectrometry device for gas detection |
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| CN104458634Atrue CN104458634A (en) | 2015-03-25 |
| CN104458634B CN104458634B (en) | 2017-02-22 |
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| CN201410697178.6AActiveCN104458634B (en) | 2014-11-26 | 2014-11-26 | Pulsed multi-channel photoacoustic spectrometry device for gas detection |
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