技术领域technical field
本发明涉及一种基于宽带慢波系统的多路分波器，该多路分波器可用于通信领域，以实现微波段、毫米波段或太赫兹波段的分波功能。 The invention relates to a multi-channel demultiplexer based on a broadband slow-wave system, which can be used in the field of communication to realize the demultiplexing function of microwave band, millimeter wave band or terahertz band. the
背景技术Background technique
表面等离激元是束缚于金属与介质表面的电磁波，不受光学衍射极限的限制，因而可用于构造紧凑小型化元件，在表面或界面技术及数据存储等方面具有重要应用，已形成表面等离子学。通过在理想导体表面加工周期微结构（其特征尺寸远小于波长）形成的人工电磁结构能够支持仿表面等离激元的传播。利用人工电磁结构能够更方便地操纵电磁波的传播，实现多种新型功能器件。目前已提出的基于渐变金属凹槽结构的宽带慢波系统还存在以下不足：1.还没有可以简单有效地释放被束缚电磁波的方法，前人提出过可以在金属凹槽中充填对温度敏感的介质材料，通过温度调节介质的介电常数来改变慢波结构的色散关系，从而释放被束缚电磁波。不过该方法实现复杂而且精度难以控制；2.已提出的结构是纯金属结构，且金属的厚度一般近似为无限大，这样不利于与其它平面有源器件集成。本发明提出一种便于与平面有源器件集成的MIM光栅结构宽带慢波系统，并提出一种简单有效的方式来释放被束缚的电磁波，从而实现一种多路分波器。 Surface plasmons are electromagnetic waves bound to the surface of metals and media, and are not limited by the optical diffraction limit. Therefore, they can be used to construct compact and miniaturized components, and have important applications in surface or interface technology and data storage. Surface plasmons have been formed study. Artificial electromagnetic structures formed by processing periodic microstructures (whose characteristic size is much smaller than the wavelength) on the surface of an ideal conductor can support the propagation of pseudo-surface plasmons. The use of artificial electromagnetic structures can more conveniently manipulate the propagation of electromagnetic waves and realize a variety of new functional devices. The broadband slow wave system based on the graded metal groove structure that has been proposed so far still has the following deficiencies: 1. There is no simple and effective method for releasing the bound electromagnetic waves. The dielectric material changes the dispersion relationship of the slow wave structure by adjusting the dielectric constant of the medium with temperature, thereby releasing the bound electromagnetic waves. However, the implementation of this method is complex and the precision is difficult to control; 2. The proposed structure is a pure metal structure, and the thickness of the metal is generally approximately infinite, which is not conducive to integration with other planar active devices. The invention proposes a MIM grating structure broadband slow-wave system that is conveniently integrated with planar active devices, and proposes a simple and effective way to release bound electromagnetic waves, thereby realizing a multi-channel wave splitter. the
发明内容Contents of the invention
本发明的目的在于针对现有技术存在的不足，提供一种基于宽带慢波系统的多路分波器，实现多路分波。为达到上述目的，本发明的构思是：本发明提出的基于MIM光栅结构的宽带慢波系统是由介质板上非常薄的MIM光栅结构组成，该MIM光栅结构由内侧刻蚀周期矩形或者梯形等凹槽的两个金属光栅结构和绝缘体组成，金属光栅结构厚度很小（小于百分之一工作波长），金属光栅结构中的凹槽深度、宽度和/或周期等几何参数渐变，绝缘体可以是空气或其他绝缘介质，很薄的MIM光栅结构的功能是使不同频率的电磁波束缚在的不同位置的凹槽中，在凹槽末端引入不同长度的短截线分支结构，该分支结构由介质板内侧无凹槽的两片金属和绝缘体组成，其长度（从凹槽末端开始计算）应为该分支波导波长λg的四分之一的奇数倍，这种特定长度分支结构能够将束缚于凹槽中的电磁波引导出来，在不同位置凹槽末端引入不同长度分支结构，就可以将束缚于不同位置处的不同频率电磁波释放出来并使其分别沿着不同的短截线分支传播，从而实现多路分波的功能。为增加各短截线分支间的隔离度，可在短截线分支的前端引入滤波器，该滤波器由深和浅一对凹槽复合组成，通过调节深浅凹槽的深度、单元数目等可以调节滤波器的带阻特性，从而为高频分支结构将不需要的低频频率分量滤除，改善各分支间的隔离度。该多路分波器可工作于微波段、毫米波段和太赫兹波段。 The object of the present invention is to provide a multi-channel demultiplexer based on a wide-band slow wave system to realize multi-channel demultiplexing in view of the deficiencies in the prior art. In order to achieve the above object, the idea of the present invention is: the broadband slow-wave system based on the MIM grating structure proposed by the present invention is composed of a very thin MIM grating structure on a dielectric plate, and the MIM grating structure is composed of an inner etching period rectangle or trapezoid, etc. The groove consists of two metal grating structures and an insulator. The thickness of the metal grating structure is very small (less than one hundredth of the working wavelength), and the geometric parameters such as the groove depth, width and/or period in the metal grating structure gradually change. The insulator can be Air or other insulating media, the function of the very thin MIM grating structure is to confine electromagnetic waves of different frequencies in the grooves at different positions, and introduce stub branch structures of different lengths at the end of the groove, which are composed of dielectric plates It is composed of two pieces of metal and an insulator without grooves inside, and its length (calculated from the end of the groove) should be an odd multiple of a quarter of the wavelengthλg of the branch waveguide. This branch structure with a specific length can bind the The electromagnetic wave in the groove is guided out, and branch structures of different lengths are introduced at the end of the groove at different positions, so that the electromagnetic waves of different frequencies bound at different positions can be released and propagate along different stub branches respectively, thereby realizing multiple Road splitting function. In order to increase the isolation between stub branches, a filter can be introduced at the front end of the stub branch. The filter is composed of a pair of deep and shallow grooves. By adjusting the depth of the deep and shallow grooves, the number of units, etc. Adjust the band stop characteristics of the filter, so as to filter out unnecessary low-frequency frequency components for the high-frequency branch structure, and improve the isolation between branches. The demultiplexer can work in microwave band, millimeter wave band and terahertz wave band.
根据上述发明构思本发明采用如下技术方案： Design the present invention according to above-mentioned invention and adopt following technical scheme:
一种基于宽带慢波系统的多路分波器，包括介质板及其上薄的金属-绝缘体-金属MIM光栅结构，其特征在于：所述MIM光栅结构由内侧刻蚀周期矩形或者梯形凹槽的两个金属光栅结构和绝缘体组成，金属光栅结构厚度小于百分之一工作波长，金属光栅结构中的所述凹槽的形状是：一条横向长直凹槽与多条垂直等距分布的长度逐渐变化的纵向短直凹槽垂直相交构成，凹槽深度、宽度和周期等几何参数渐变，绝所述缘体是空气或其他绝缘介质；MIM光栅结构的功能是使不同频率的电磁波束缚在的不同位置的凹槽中，MIM光栅结构置于介质板上便于与有源器件集成。A multi-channel demultiplexer based on a broadband slow-wave system, including a dielectric plate and a thin metal-insulator-metal MIM grating structure on it, is characterized in that: the MIM grating structure is formed by etching periodic rectangular or trapezoidal grooves on the inside Composed of two metal grating structures and an insulator, the thickness of the metal grating structure is less than one percent of the working wavelength, and the shape of the grooves in the metal grating structure is: a horizontal long straight groove and a plurality of vertically equidistant distributions Gradually changing vertical short straight grooves intersect vertically, the geometric parameters such as groove depth, width and period change gradually, and the insulator is air or other insulating media; the function of the MIM grating structure is to bind electromagnetic waves of different frequencies in the In the grooves at different positions, the MIM grating structure is placed on the dielectric board to facilitate integration with active devices.
在若干所述纵向短直凹槽末端引入不同长度的短截线分支结构，该分支结构由介质板延伸出凸极中间刻蚀纵向短直凹槽的延长槽而形成两片金属和延长槽中的绝缘体组成，其长度（L1、L2、L3、L4）从凹槽末端开始计算应为该分支波导波长λg的四分之一的奇数倍。这种特定长度分支结构能够将束缚于凹槽中的电磁波引导出来，在不同位置纵向短直凹槽末端引入不同长度分支结构，就可以将束缚于不同位置处的不同频率电磁波释放出来并使其分别沿着不同的短截线分支传播，从而实现多路分波的功能，使用介质板背面的微带线作为激励源来激发MIM光栅结构中的表面电磁波。 At the end of some of the longitudinal short straight grooves, stub branch structures of different lengths are introduced. The branch structure extends from the dielectric plate to the extended groove of the middle of the salient pole and etches the longitudinal short straight groove to form two pieces of metal and the extended groove. The insulator composition, its length (L1 ,L2 ,L3 ,L4 ) calculated from the end of the groove should be an odd multiple of a quarter of the wavelength λg of the branch waveguide. This specific length branch structure can guide the electromagnetic waves bound in the groove, and introduce different length branch structures at the end of the longitudinal short straight groove at different positions, so that the electromagnetic waves of different frequencies bound at different positions can be released and made Propagate along different stub branches respectively, so as to realize the function of multi-channel splitting, and use the microstrip line on the back of the dielectric plate as the excitation source to excite the surface electromagnetic wave in the MIM grating structure.
为增加各短截线分支间的隔离度，可在所述短截线分支延长槽的前端引入滤波器，该滤波器由深和浅一对与所述延长槽垂直相交的凹槽复合组成，通过调节深浅凹槽的深度、单元数目可调节滤波器的带阻特性，从而为高频分支结构将不需要的低频频率分量滤除。 In order to increase the isolation between each stub branch, a filter can be introduced at the front end of the stub branch extension slot, and the filter is composed of a pair of deep and shallow grooves that intersect perpendicularly with the extension slot. By adjusting the depth of deep and shallow grooves and the number of units, the band-rejection characteristics of the filter can be adjusted, so as to filter out unnecessary low-frequency frequency components for the high-frequency branch structure. the
本发明与现有技术相比较，具有如下显而易见的突出实质性特点和显著技术进步： Compared with the prior art, the present invention has the following obvious outstanding substantive features and significant technological progress:
本发明首次实现了一种便于平面集成的宽带慢波系统，特别是在该宽带慢波基础上通过引入特定长度短截线分支结构可以方便地释放被束缚的电磁波，从而实现了多路分波器。该分波器可以有效地分离束缚于MIM光栅结构不同位置处的不同频率电磁波，是一种实现分波功能的新方法，并且该实现简单有效，便于加工和现有成熟工艺兼容。The present invention realizes for the first time a broadband slow wave system that is convenient for planar integration, especially on the basis of the broadband slow wave, the bound electromagnetic waves can be easily released by introducing a stub branch structure with a specific length, thereby realizing multi-channel splitting device. The wave splitter can effectively separate electromagnetic waves of different frequencies bound at different positions of the MIM grating structure, and is a new method for realizing the wave splitting function, and the realization is simple and effective, easy to process and compatible with existing mature processes.
附图说明Description of drawings
图1是本发明提出的基于MIM光栅结构的宽带慢波系统的原理图。 Fig. 1 is a schematic diagram of the broadband slow wave system based on the MIM grating structure proposed by the present invention. the
图2是图1宽带慢波系统中不同频率电磁波的群速度随凹槽深度变化的曲线图。 Fig. 2 is a graph showing the group velocity of electromagnetic waves of different frequencies in the broadband slow wave system of Fig. 1 as a function of groove depth. the
图3是本发明中基于宽带慢波器的多路分波器结构示意图。 Fig. 3 is a schematic structural diagram of a multi-channel demultiplexer based on a broadband slow wave device in the present invention. the
具体实施方式Detailed ways
为使本发明实现的技术手段、创作特征、达成目的与功效易于明白理解，下面结合附图和优选实施例，进一步阐述本发明。 In order to make the technical means, creative features, goals and effects achieved by the present invention easy to understand, the present invention will be further described below in conjunction with the accompanying drawings and preferred embodiments. the
实施例一： Embodiment one:
参见图1和图3，本基于宽带慢波系统的多路分波器，包括介质板（2）及其上薄的金属-绝缘体-金属MIM光栅结构，其特征在于：所述MIM光栅结构由内侧刻蚀周期矩形或者梯形凹槽（6）的两个金属光栅结构（3、4）和绝缘体（5）组成，金属光栅结构（3、4）厚度小于百分之一工作波长，金属光栅结构中的所述凹槽（6）的形状是：一条横向长直凹槽与多条垂直等距分布的长度逐渐变化的纵向短直凹槽垂直相交构成，凹槽深度、宽度和周期等几何参数渐变，所述绝缘体是空气或其他绝缘介质，MIM光栅结构的功能是使不同频率的电磁波束缚在的不同位置的凹槽中，MIM光栅结构置于介质板上便于与有源器件集成。Referring to Fig. 1 and Fig. 3, the multi-channel demultiplexer based on the broadband slow-wave system includes a dielectric plate (2) and a thin metal-insulator-metal MIM grating structure on it, which is characterized in that: the MIM grating structure is composed of It consists of two metal grating structures (3, 4) and an insulator (5) that etch periodic rectangular or trapezoidal grooves (6) inside, and the thickness of the metal grating structures (3, 4) is less than one percent of the working wavelength. The metal grating structure The shape of the groove (6) is: a horizontal long straight groove and a plurality of longitudinal short straight grooves whose lengths gradually change in vertical equidistant distribution are vertically intersected, and the geometric parameters such as groove depth, width and period are Gradient, the insulator is air or other insulating medium, the function of the MIM grating structure is to confine electromagnetic waves of different frequencies in grooves at different positions, and the MIM grating structure is placed on the dielectric board to facilitate integration with active devices.
实施例二： Embodiment two:
本实施例与实施例一基本相同，特别之处如下：This embodiment is basically the same as Embodiment 1, and the special features are as follows:
在若干所述纵向短直凹槽末端引入不同长度的短截线分支结构（7、8、9、10），该分支结构由介质板（2）延伸出凸极中间刻蚀纵向短直凹槽的延长槽而形成两片金属和延长槽中的绝缘体（5）组成，其长度（L1、L2、L3、L4）从凹槽末端开始计算应为该分支波导波长λg的四分之一的奇数倍。这种特定长度分支结构能够将束缚于凹槽中的电磁波引导出来，在不同位置纵向短直凹槽末端引入不同长度分支结构（7、8、9、10），就可以将束缚于不同位置处的不同频率电磁波释放出来并使其分别沿着不同的短截线分支传播，从而实现多路分波的功能，使用介质板（2）背面的微带线（1）作为激励源来激发MIM光栅结构中的表面电磁波；为增加各短截线分支间的隔离度，可在所述短截线分支延长槽的前端引入滤波器（11、12），该滤波器（11、12）由深和浅一对与所述延长槽垂直相交的凹槽复合组成，通过调节深浅凹槽的深度、单元数目可调节滤波器的带阻特性，从而为高频分支结构将不需要的低频频率分量滤除。Introduce short stub branch structures (7, 8, 9, 10) of different lengths at the ends of several of the longitudinal short straight grooves, and the branch structure is extended from the dielectric plate (2) to etch the longitudinal short straight grooves in the middle of the salient poles Two pieces of metal and an insulator (5) in the extended groove are formed, and the length (L1 ,L2 ,L3 ,L4 ) calculated from the end of the groove should be four times the wavelength λg of the branch waveguide Odd multiples of one-fifth. This specific length branch structure can guide the electromagnetic waves bound in the groove, and introduce different length branch structures (7, 8, 9, 10) at the end of the longitudinal short straight groove at different positions, so that the electromagnetic waves bound in different positions can be guided. The electromagnetic waves of different frequencies are released and propagated along different stub branches respectively, so as to realize the function of multi-channel splitting. The microstrip line (1) on the back of the dielectric plate (2) is used as the excitation source to excite the MIM grating Surface electromagnetic waves in the structure; in order to increase the isolation between each stub branch, a filter (11, 12) can be introduced at the front end of the stub branch extension slot, and the filter (11, 12) is composed of deep and A shallow pair of grooves perpendicularly intersecting with the extension grooves are compounded, and the band-rejection characteristics of the filter can be adjusted by adjusting the depth of deep and shallow grooves and the number of units, so as to filter out unnecessary low-frequency frequency components for the high-frequency branch structure .
实施例三： Embodiment three:
参见图1和2，本基于MIM光栅结构的宽带慢波系统，实现宽带慢波的原理与前人所述相同，不同的是本实施例中的金属光栅厚度d很薄，而且是置于介质基板上，这样便于与平面有源器件集成；图1中介质基板厚度为d、介质板上层金属光栅厚度为t、、金属凹槽宽度和周期分为w和p、凹槽深度dep是渐变的、空气缝宽度w_air。介质板背面的微带线（1）的金属厚度也为t，作为激励源来激发MIM光栅结构中的表面电磁波。图2中可以看出，随凹槽深度增加，不同频率电磁波的群速度会逐渐减小，甚至减为零，表明该电磁波会被束缚于该凹槽处，不再继续向前传播，不同频率电磁波的截止位置不同。Referring to Figures 1 and 2, the broadband slow wave system based on the MIM grating structure, the principle of realizing the broadband slow wave is the same as that described by the predecessors, the difference is that the thicknessd of the metal grating in this embodiment is very thin, and it is placed in the medium on the substrate, which is convenient for integration with planar active devices; in Fig. 1, the thickness of the dielectric substrate isd , the thickness of the upper metal grating on the dielectric plate ist , the width and period of the metal groove are divided intow andp , and the depth of the groovedep is gradual , Air seam widthw_air . The metal thickness of the microstrip line (1) on the back of the dielectric plate is alsot , which is used as an excitation source to excite surface electromagnetic waves in the MIM grating structure. It can be seen from Figure 2 that as the depth of the groove increases, the group velocities of electromagnetic waves of different frequencies will gradually decrease, or even decrease to zero, indicating that the electromagnetic wave will be bound to the groove and will not continue to propagate forward. The cut-off position of the electromagnetic wave is different.
参见图3，图3中包括：刻有深度渐变的金属凹槽结构的宽带慢波系统，以及四个不同长度的波导分支结构（7、8、9、10），微带线波导（1）。四个波导分支长度分别为L1、L2、L3和L4。本基于宽带慢波系统的多路分波器（本实施例为四路），通过在电磁波被束缚处引入特定长度的短截线分支结构（7、8、9、10），可以将束缚于不同位置处的不同频率电磁波释放出来并使其分别沿着不同的短截线分支传播，从而实现多路分波的功能。这里的特定长度指该短截线波导分支结构中电磁波波导波长的四分之一的奇数倍（本例选用三倍的四分之一波导波长），使用介质板背面的微带线（1）作为激励源来激发MIM光栅结构中的表面电磁波；图3给出的实施例以四路分波器为例，超过4个分支也是可以的。 See Figure 3, Figure 3 includes: a broadband slow-wave system engraved with a metal groove structure with gradual depth, and four waveguide branch structures (7, 8, 9, 10) with different lengths, microstrip line waveguide (1) . The lengths of the four waveguide branches areL1 ,L2 ,L3 andL4 . This multi-channel demultiplexer based on the broadband slow wave system (four channels in this embodiment) can be bound to Electromagnetic waves of different frequencies at different locations are released and propagate along different stub branches, thereby realizing the function of multi-channel splitting. The specific length here refers to an odd multiple of a quarter of the electromagnetic waveguide wavelength in the stub waveguide branch structure (in this example, three times the quarter waveguide wavelength is selected), using the microstrip line on the back of the dielectric plate (1) As an excitation source to excite surface electromagnetic waves in the MIM grating structure; the embodiment shown in FIG. 3 takes a four-way wave splitter as an example, and more than four branches are also possible.
本实施例中支持表面波传播的金属光栅结构根据工作频段不同，可采用不同加工工艺加以实现，例如PCB工艺、电火花线切割技术或者光刻工艺等。 In this embodiment, the metal grating structure supporting surface wave propagation can be realized by different processing techniques according to different working frequency bands, such as PCB technology, wire electric discharge cutting technology or photolithography technology. the
本实施例中，首先通过电磁仿真工具分析MIM光栅结构的色散曲线，通过控制有限厚度金属光栅结构的表面凹槽深度的渐变，实现宽带慢波的功能，从而选取不同的位置引入波导分支，实现多路分波的功能。微波段、毫米波段和太赫兹波段的有限厚度金属光栅结构加工比较简单。 In this embodiment, the dispersion curve of the MIM grating structure is first analyzed by electromagnetic simulation tools, and the function of broadband slow wave is realized by controlling the gradient of the surface groove depth of the metal grating structure with a limited thickness, so that different positions are selected to introduce waveguide branches to realize The function of demultiplexing. The processing of finite thickness metal grating structures in the microwave, millimeter and terahertz bands is relatively simple. the
以上显示和描述了本发明的基本原理和主要特征和本发明的优点。本行业的技术人员应该了解，本发明不受上述实施例的限制，上述实施例和说明书中描述的只是说明本发明的原理，在不脱离本发明精神和范围的前提下，本发明还会有各种变化和改进，这些变化和改进都落入要求保护的本发明范围内。本发明要求保护范围由所附的权利要求书及其等效物界定。 The basic principles and main features of the present invention and the advantages of the present invention have been shown and described above. Those skilled in the industry should understand that the present invention is not limited by the above-mentioned embodiments, and what described in the above-mentioned embodiments and the description only illustrates the principles of the present invention, and the present invention will also have other functions without departing from the spirit and scope of the present invention. Variations and improvements are possible, which fall within the scope of the claimed invention. The protection scope of the present invention is defined by the appended claims and their equivalents. the
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| CN201410492509.2ACN104269595A (en) | 2014-09-24 | 2014-09-24 | Multi-channel wave splitter based on broadband slow-wave system |
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410492509.2ACN104269595A (en) | 2014-09-24 | 2014-09-24 | Multi-channel wave splitter based on broadband slow-wave system |
| Publication Number | Publication Date |
|---|---|
| CN104269595Atrue CN104269595A (en) | 2015-01-07 |
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410492509.2APendingCN104269595A (en) | 2014-09-24 | 2014-09-24 | Multi-channel wave splitter based on broadband slow-wave system |
| Country | Link |
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| CN (1) | CN104269595A (en) |
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| CN104852119A (en)* | 2015-04-07 | 2015-08-19 | 上海大学 | Compact broadband slow wave system based on double curved-groove metal grating structures |
| CN105280996A (en)* | 2015-10-08 | 2016-01-27 | 中国矿业大学 | Artificial surface plasmon broadband bandstop filter based on composite U-shaped groove structure |
| CN109378559A (en)* | 2018-10-24 | 2019-02-22 | 中山大学 | A kind of radio frequency filter with periodic structure |
| CN112383997A (en)* | 2020-10-05 | 2021-02-19 | 四川大学 | High-power microwave plasma pulverized coal cracking device |
| WO2024164207A1 (en)* | 2023-02-09 | 2024-08-15 | 华为技术有限公司 | Slow wave structure, traveling wave tube, electronic device and communication system |
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| CN104767009A (en)* | 2015-02-16 | 2015-07-08 | 东南大学 | A waveguide integrated artificial surface plasmon device and a filter integrated waveguide substrate |
| CN104767009B (en)* | 2015-02-16 | 2017-12-05 | 东南大学 | A kind of waveguide of comprehensive artificial surface phasmon device and the wave filter of substrate integration wave-guide |
| CN104852119A (en)* | 2015-04-07 | 2015-08-19 | 上海大学 | Compact broadband slow wave system based on double curved-groove metal grating structures |
| CN104852119B (en)* | 2015-04-07 | 2018-04-27 | 上海大学 | Compact wideband slow wave system based on tangent bend excess metal optical grating construction |
| CN105280996A (en)* | 2015-10-08 | 2016-01-27 | 中国矿业大学 | Artificial surface plasmon broadband bandstop filter based on composite U-shaped groove structure |
| CN109378559A (en)* | 2018-10-24 | 2019-02-22 | 中山大学 | A kind of radio frequency filter with periodic structure |
| CN109378559B (en)* | 2018-10-24 | 2019-09-24 | 中山大学 | A kind of radio-frequency filter with periodic structure |
| CN112383997A (en)* | 2020-10-05 | 2021-02-19 | 四川大学 | High-power microwave plasma pulverized coal cracking device |
| WO2024164207A1 (en)* | 2023-02-09 | 2024-08-15 | 华为技术有限公司 | Slow wave structure, traveling wave tube, electronic device and communication system |
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| WD01 | Invention patent application deemed withdrawn after publication | Application publication date:20150107 | |
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